JPH11158276A - Polyimide film improved in adhesiveness, and its production and laminate thereof - Google Patents

Polyimide film improved in adhesiveness, and its production and laminate thereof

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Publication number
JPH11158276A
JPH11158276A JP9328460A JP32846097A JPH11158276A JP H11158276 A JPH11158276 A JP H11158276A JP 9328460 A JP9328460 A JP 9328460A JP 32846097 A JP32846097 A JP 32846097A JP H11158276 A JPH11158276 A JP H11158276A
Authority
JP
Japan
Prior art keywords
film
polyimide film
aluminum
polyimide
solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9328460A
Other languages
Japanese (ja)
Other versions
JP3438556B2 (en
Inventor
Hiroaki Yamaguchi
裕章 山口
Hideo Ozawa
秀生 小沢
Hideji Watakabe
秀治 渡壁
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ube Corp
Original Assignee
Ube Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ube Industries Ltd filed Critical Ube Industries Ltd
Priority to JP32846097A priority Critical patent/JP3438556B2/en
Priority to US09/055,738 priority patent/US6129982A/en
Priority to EP98122194A priority patent/EP0919593B1/en
Priority to TW087119750A priority patent/TW506977B/en
Priority to DE69822973T priority patent/DE69822973T2/en
Priority to KR10-1998-0051595A priority patent/KR100384052B1/en
Publication of JPH11158276A publication Critical patent/JPH11158276A/en
Application granted granted Critical
Publication of JP3438556B2 publication Critical patent/JP3438556B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Compositions Of Macromolecular Compounds (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
  • Laminated Bodies (AREA)
  • Moulding By Coating Moulds (AREA)

Abstract

PROBLEM TO BE SOLVED: To obtain a polyimide film excellent in adhesiveness by specifying its Al content and completing its thermal treatment. SOLUTION: The Al content of a film comprising arom. tetracarboxylic acid residues and arom. diamine residues is made to be 1-1,000 ppm, pref. 4-1,000 ppm. and the thermal treatment of the film is completed. The film can be produced by reacting an arom. tetracarboxylic dianhydride with an arom. diamine in an org. solvent, homogeneously dissolving an Al compd. (e.g. aluminum hydroxide) in the resulting polyamic acid soln., casting the resulting dope on a carrier, thermally drying and peeling thus formed film from the carrier, and subjecting the dry film to imidization under heating at 420 deg.C or higher for 2-30 min or by coating a self-supporting film obtd. from a polyamic acid soln. with a soln. contg. the Al compd., drying the coated film, and subjecting it to imidization as above-mentioned.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明は、アルミニウムを
含有するとともに高温加熱処理が完了してなる接着性を
改良したポリイミドフィルム、その製法およびその積層
体に関するものであり、特に放電処理などの複雑な工程
を必要としない接着性の改良されたポリイミドフィル
ム、その製法および金属箔とポリイミドフィルムなどの
成形体とを耐熱性接着剤を介して接着した積層体に関す
るものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a polyimide film containing aluminum and having improved adhesiveness after completion of high-temperature heat treatment, a method for producing the same, and a laminate thereof. The present invention relates to a polyimide film having improved adhesiveness which does not require a process, a method for producing the same, and a laminate in which a metal foil and a molded body such as a polyimide film are bonded via a heat-resistant adhesive.

【0002】[0002]

【従来の技術】ポリイミドフィルムは、熱的性質および
電気的性質に優れているため、電子機器類の用途に広く
使用されている。しかし、ポリイミドフィルムは、通常
電子分野で使用される接着剤では大きな接着強度が得ら
れず、金属蒸着やスパッタリングして金属層を設けても
剥離強度の大きな積層体が得られないという問題があ
る。
2. Description of the Related Art Polyimide films are widely used for electronic equipment because of their excellent thermal and electrical properties. However, the polyimide film has a problem that a large adhesive strength cannot be obtained with an adhesive generally used in the electronic field, and a laminate having a large peel strength cannot be obtained even if a metal layer is formed by metal deposition or sputtering. .

【0003】このポリイミドフィルムの有する低い接着
性を改良するために種々の試みがなされている。例え
ば、特開平4−261466号公報、特開平6−299
883号公報、特表平7−503984号公報には、
錫、ビスマスまたはアンチモニ−の化合物を0.02−
1重量%含んでいる接着性を改良したポリイミドフィル
ムが記載されている。しかし、これらのポリイミドフィ
ルムは電気絶縁性などの電気特性が低下する恐れがあ
る。また、特開昭59−86634号公報、特開平2−
134241号公報には、ポリイミドフィルムのプラズ
マ放電処理による接着性の改良技術が記載されている。
しかし、この放電処理では、ポリイミドフィルムの接着
性改良効果が不十分な場合があり、複雑な後処理工程が
必要で生産性が低い。さらに、特開平1−214840
号公報には、ポリイミドフィルムのアルミニウムキレ−
ト化合物膜形成による接着性改良技術が記載されてい
る。しかし、上記公報によれば、接着性を発現した工程
の後で高温加熱処理が必要であり、ポリイミドフィルム
の一般的な電子機器分野には使用できない。
[0003] Various attempts have been made to improve the low adhesion of the polyimide film. For example, JP-A-4-261466, JP-A-6-299
No. 883, Japanese Patent Publication No. Hei 7-503984,
The compound of tin, bismuth or antimony is 0.02-
An improved adhesion polyimide film containing 1% by weight is described. However, these polyimide films may be deteriorated in electric properties such as electric insulation. Also, JP-A-59-86634 and JP-A-2-8634 are disclosed.
No. 134241 describes a technique for improving the adhesiveness of a polyimide film by plasma discharge treatment.
However, in this discharge treatment, the effect of improving the adhesion of the polyimide film may be insufficient, and a complicated post-treatment step is required, resulting in low productivity. Further, Japanese Unexamined Patent Application Publication No.
JP-A No. 2-2, the aluminum film of a polyimide film is disclosed.
A technique for improving adhesion by forming a compound film is described. However, according to the above-mentioned publication, a high-temperature heat treatment is required after the step of exhibiting the adhesiveness, and the polyimide film cannot be used in general electronic equipment fields.

【0004】[0004]

【発明が解決しようとする課題】この発明の目的は、芳
香族ポリイミドフィルムの有する熱的性質および電気的
性質などの優れた特性を保持したままで電子分野に使用
可能であって、接着性(スパッタリング性および金属蒸
着性を含む)の良好なポリイミドフィルム、その製法お
よび積層体を提供することである。
SUMMARY OF THE INVENTION An object of the present invention is to provide an aromatic polyimide film which can be used in the electronic field while retaining the excellent properties such as thermal properties and electrical properties of an aromatic polyimide film. It is an object of the present invention to provide a polyimide film having good sputtering properties and metal vapor deposition properties, a method for producing the same, and a laminate.

【0005】[0005]

【課題を解決するための手段】すなわち、この発明は、
フィルムのアルムニウム含有量が1−1000ppmで
あって、加熱処理を完了してなる接着性の改良されたポ
リイミドフィルムに関する。
That is, the present invention provides:
The present invention relates to a polyimide film having an aluminum content of 1 to 1000 ppm and having improved adhesiveness after completion of a heat treatment.

【0006】また、この発明は、フィルム形成用ポリア
ミック酸溶液にアルムニウム化合物を添加して均一に溶
解したド−プ液をキャスティングした後加熱乾燥する
か、ポリアミック酸溶液から得られた自己支持性フィル
ムにアルミニウム化合物を含む溶液を塗布した後乾燥し
て得られたアルミニウム成分を含有する乾燥フィルム
を、420℃以上の温度で加熱してイミド化を完了させ
てフィルムのアルミニウム含有量が1−1000ppm
であるポリイミドフィルムを形成することを特徴とする
接着性の改良されたポリイミドフィルムの製法に関す
る。
The present invention also relates to a self-supporting film obtained by casting a dope solution obtained by adding an aluminum compound to a polyamic acid solution for forming a film and uniformly dissolving the solution, followed by drying by heating or by using a polyamic acid solution. A dried film containing an aluminum component obtained by applying a solution containing an aluminum compound to the resultant is dried at a temperature of 420 ° C. or higher to complete imidization, and the aluminum content of the film is 1 to 1000 ppm.
The present invention relates to a method for producing a polyimide film having improved adhesiveness, characterized by forming a polyimide film having the following characteristics.

【0007】さらに、この発明は、成形体のアルミニウ
ム含有量が1−1000ppmであって、加熱処理を完
了してなる接着性の改良されたポリイミド成形体の片面
または両面に耐熱性接着剤によって金属箔が積層されて
いる積層体に関する。
Further, the present invention relates to a polyimide molded article having an aluminum content of 1 to 1000 ppm and having improved adhesion obtained by completing a heat treatment, which is provided on one or both surfaces with a heat-resistant adhesive. The present invention relates to a laminate in which foils are laminated.

【0008】この発明において、ポリイミドフィルムま
たはポリイミド成形体を構成するポリイミドとしては、
特に制限はなく、例えば、芳香族テトラカルボン酸二無
水物と芳香族ジアミンとから得られる任意の芳香族ポリ
イミドが使用できる。これらの一部を脂環族テトラカル
ボン酸二無水物あるいは脂肪族ジアミンで置き換えたも
のも使用できる。また、これらの一部を4−アミノフタ
ル酸、4−アミノ−5−メチルフタル酸、4−(3,
3’−ジメチル−4−アニリノ)フタル酸などのアミノ
ジカルボン酸で置き換えて反応させたものであってもよ
い。
In the present invention, the polyimide constituting the polyimide film or the polyimide molded body includes:
There is no particular limitation, and for example, any aromatic polyimide obtained from an aromatic tetracarboxylic dianhydride and an aromatic diamine can be used. Those in which some of these are replaced with alicyclic tetracarboxylic dianhydrides or aliphatic diamines can also be used. In addition, a part of these is 4-aminophthalic acid, 4-amino-5-methylphthalic acid, 4- (3,
It may be replaced with aminodicarboxylic acid such as 3′-dimethyl-4-anilino) phthalic acid and reacted.

【0009】前記の芳香族テトラカルボン酸二無水物と
しては、例えば3,4,3’,4’−ビフェニルテトラ
カルボン酸二無水物(以下単にs−BPDAと略記する
こともある。)、ピロメリット酸二無水物、ベンゾフェ
ノンテトラカルボン酸二無水物、ビス(3,4−ジカル
ボキシフェニル)エ−テル二無水物(オキシジフタル酸
二無水物)などが挙げられる。前記の芳香族ジアミンと
しては、例えばパラフェニレンジアミン、4,4’−ジ
アミノジフェニルエ−テルが挙げられる。その一部を
4,4’−ジアミノジフェニルスルフィド、4,4’−
ジアミノベンゾフェノン、4,4’−ジアミノジフェニ
ルメタン、2,2−ビス(4−アミノフェニル)プロパ
ン、1,4−ビス(4−アミノフェノキシ)ベンゼン、
4,4’−ビス(4−アミノフェニル)ジフェニルエ−
テル、4,4’−ビス(4−アミノフェニル)ジフェニ
ルスルホン、4,4’−ビス(4−アミノフェニル)ジ
フェニルスルフィド、4,4’−ビス(4−アミノフェ
ニル)ジフェニルメタン、4,4’−ビス(4−アミノ
フェノキシ)ジフェニルエ−テル、4,4’−ビス(4
−アミノフェノキシ)ジフェニルスルホン、4,4’−
ビス(4−アミノフェノキシ)ジフェニルスルフィド、
4,4’−ビス(4−アミノフェノキシ)ジフェニルメ
タン、2,2−ビス〔4−(アミノフェノキシ)フェニ
ル〕プロパン、2,2−ビス〔4−(4−アミノフェノ
キシ)フェニル〕ヘキサフルオロプロパンなどの複数の
ベンゼン環を有する柔軟な芳香族ジアミン、1,4−ジ
アミノブタン、1,6−ジアミノヘキサン、1,8−ジ
アミノオクタン、1,10−ジアミノデカン、1,12
−ジアミノドデカンなどの脂肪族ジアミン、キシレンジ
アミンなどのジアミンによって置き換えられてもよい。
The aromatic tetracarboxylic dianhydride includes, for example, 3,4,3 ′, 4′-biphenyltetracarboxylic dianhydride (hereinafter sometimes abbreviated simply as s-BPDA), pyro, and the like. Merritic dianhydride, benzophenone tetracarboxylic dianhydride, bis (3,4-dicarboxyphenyl) ether dianhydride (oxydiphthalic dianhydride) and the like can be mentioned. Examples of the aromatic diamine include paraphenylenediamine and 4,4′-diaminodiphenyl ether. Some of them are 4,4'-diaminodiphenyl sulfide, 4,4'-
Diaminobenzophenone, 4,4′-diaminodiphenylmethane, 2,2-bis (4-aminophenyl) propane, 1,4-bis (4-aminophenoxy) benzene,
4,4'-bis (4-aminophenyl) diphenyl-
Ter, 4,4'-bis (4-aminophenyl) diphenylsulfone, 4,4'-bis (4-aminophenyl) diphenylsulfide, 4,4'-bis (4-aminophenyl) diphenylmethane, 4,4 ' -Bis (4-aminophenoxy) diphenyl ether, 4,4'-bis (4
-Aminophenoxy) diphenyl sulfone, 4,4'-
Bis (4-aminophenoxy) diphenyl sulfide,
4,4'-bis (4-aminophenoxy) diphenylmethane, 2,2-bis [4- (aminophenoxy) phenyl] propane, 2,2-bis [4- (4-aminophenoxy) phenyl] hexafluoropropane, etc. Aromatic diamine having a plurality of benzene rings, 1,4-diaminobutane, 1,6-diaminohexane, 1,8-diaminooctane, 1,10-diaminodecane, 1,12
-May be replaced by aliphatic diamines such as diaminododecane, diamines such as xylene diamine.

【0010】特に、ポリイミドとして、3,3’,4,
4’−ビフェニルテトラカルボン酸二無水物とパラフェ
ニレンジアミンとから得られるポリイミド、ピロメリッ
ト酸二無水物と3,3’,4,4’−ビフェニルテット
ラカルボン酸二無水物またはベンゾフェノンテトラカル
ボン酸二無水物との芳香族テトラカルボン酸成分とパラ
フェニレンジアミンまたはパラフェニレンジアミン(P
PDと略記することもある)と4,4’−ジアミノジフ
ェニルエ−テル(DADEと略記することもある)との
芳香族ジアミン成分とから製造されるポリイミドが低熱
線膨張係数(通常50−250℃の範囲で、1×10-5
−2×10-5cm/cm/℃である)であるため好適に
使用される。共重合体の場合、PPD/DADE(モル
比)は100/0−15/85であることが好ましい。
ポリイミドは、単独重合、ランダム重合、ブロック重
合、あるいはあらかじめ2種類以上のポリアミック酸を
合成しておきポリアミック酸溶液を混合し反応を完了さ
せる、いずれの方法によっても達成される。
In particular, as polyimide, 3,3 ′, 4,
Polyimide obtained from 4'-biphenyltetracarboxylic dianhydride and paraphenylenediamine, pyromellitic dianhydride and 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride or benzophenone tetracarboxylic acid Aromatic tetracarboxylic acid component with dianhydride and paraphenylenediamine or paraphenylenediamine (P
Polyimide produced from an aromatic diamine component of PD (sometimes abbreviated as PD) and 4,4'-diaminodiphenyl ether (sometimes abbreviated as DADE) has a low coefficient of linear thermal expansion (usually 50-250). 1 × 10 -5 in the range of ° C.
−2 × 10 −5 cm / cm / ° C.). In the case of a copolymer, the PPD / DADE (molar ratio) is preferably 100 / 0-15 / 85.
Polyimide can be achieved by homopolymerization, random polymerization, block polymerization, or any method in which two or more kinds of polyamic acids are synthesized in advance, and a polyamic acid solution is mixed to complete the reaction.

【0011】この発明においては、ポリイミドフィルム
またはポリイミド成形体のアルミニウム(アルミニウム
の形態としては、酸化アルミニウムとして存在している
と考えられる)の割合(アルミニウム金属換算)が1−
1000ppm、好ましくは4−1000ppmである
ことが必要である。前記のポリイミドフィルムまたはポ
リイミド成形体表面のアルミニウムの量が1ppm以下
では接着性の改良が十分ではなく、1000ppm以上
ではポリイミドフィルムの機械的特性が低下し、接着性
も低下するので好ましくない。
In the present invention, the ratio (in terms of aluminum metal) of aluminum (which is considered to be present as aluminum oxide in the form of aluminum) of the polyimide film or polyimide molded product is 1-.
It needs to be 1000 ppm, preferably 4-1000 ppm. When the amount of aluminum on the surface of the polyimide film or the polyimide molded article is 1 ppm or less, the improvement of the adhesiveness is not sufficient, and when the amount is 1000 ppm or more, the mechanical properties of the polyimide film are deteriorated and the adhesiveness is also unfavorably reduced.

【0012】この発明の前記の割合でアルムニウムを含
有し加熱処理を完了してなる接着性の改良されたポリイ
ミドフィルムは、例えば、前記各成分を使用し、ジアミ
ン成分とテトラカルボン酸二無水物の略等モル量を、有
機溶媒中で反応させてポリアミック酸の溶液(均一な溶
液状態が保たれていれば一部がイミド化されていてもよ
い)とし、該ポリアミック酸の溶液にアルムニウム化合
物を添加して均一に溶解したド−プ液を支持体にキャス
ティングした後加熱乾燥した後支持体から剥離した乾燥
フィルム、あるいはポリアミック酸溶液から得られた自
己支持性フィルムにアルミニウム化合物を含む溶液を塗
布した後乾燥して得られたアルミニウム成分を含有する
乾燥フィルムを、420℃以上、好ましくは430−5
20℃の温度で、好適には2−30分間程度加熱してイ
ミド化を完了させてフィルムのアルミニウム含有量が1
−1000ppmである厚み25−125μm、特に4
5−125μm程度のポリイミドフィルムを形成するこ
とによって接着性の改良されたポリイミドフィルムを得
ることができる。
The polyimide film containing aluminum in the above-mentioned ratio and having improved adhesion obtained by completing the heat treatment according to the present invention comprises, for example, the use of each of the above-mentioned components, a diamine component and a tetracarboxylic dianhydride. Approximately equimolar amounts are reacted in an organic solvent to form a polyamic acid solution (partially imidized if a uniform solution state is maintained), and an aluminum compound is added to the polyamic acid solution. A solution containing an aluminum compound is applied to a dry film that has been added and uniformly dissolved and cast on a support, then dried by heating and then peeled off from the support, or a self-supporting film obtained from a polyamic acid solution. The dried film containing the aluminum component obtained by drying after drying is 420 ° C. or higher, preferably 430-5.
The film was heated at a temperature of 20 ° C., preferably for about 2 to 30 minutes, to complete the imidization and to reduce the aluminum content of the film to 1
A thickness of 25-125 μm, especially 4
By forming a polyimide film of about 5-125 μm, a polyimide film with improved adhesion can be obtained.

【0013】前記のアルミニウム化合物としては、ポリ
アミック酸溶液に可溶性のアルミニウム化合物を好適に
使用することができる。これらのアルミニウム化合物と
しては、例えば水酸化アルミニウムや、アルミニウムモ
ノエチルアセテ−トジイソプロピレ−ト、アルミニウム
ジエチルアセテ−トモノイソプロピレ−ト、アルミニウ
ムトリアセチルアセトネ−ト、アルミニウムトリエチル
アセトアセテ−ト、アルミニウムイソプロピレ−ト、ア
ルミニウムブチレ−トなどの有機アルミニウム化合物が
挙げられ、特に有機アルミニウム化合物としてはアルミ
ニウムトリアセチルアセトナ−トが好ましい。
As the aluminum compound, an aluminum compound soluble in a polyamic acid solution can be suitably used. Examples of these aluminum compounds include aluminum hydroxide, aluminum monoethyl acetate diisopropylate, aluminum diethyl acetate monoisopropylate, aluminum triacetylacetonate, aluminum triethylacetoacetate, and aluminum isopropylate. And organic aluminum compounds such as aluminum butyrate. Particularly, the organic aluminum compound is preferably aluminum triacetylacetonate.

【0014】この発明の方法において、自己支持性フィ
ルムにアルミニウム化合物を含む溶液を塗布する場合に
は、塗布するアルミニウム化合物の濃度は0.01−5
重量%程度、特に0.02−5重量%程度であることが
好ましい。前記の塗布液に使用する溶媒としては、特に
制限はなく、アルコ−ル、芳香族炭化水素、脂肪族炭化
水素、脂環族炭化水素、ケトン系溶媒、エ−テリ系溶
媒、アミド系溶媒を使用することができる。
In the method of the present invention, when a solution containing an aluminum compound is applied to the self-supporting film, the concentration of the aluminum compound to be applied is 0.01-5%.
It is preferable that the amount is about 0.02 to 5% by weight. The solvent used in the coating solution is not particularly limited, and may include alcohols, aromatic hydrocarbons, aliphatic hydrocarbons, alicyclic hydrocarbons, ketone solvents, ether solvents, and amide solvents. Can be used.

【0015】前記の自己支持性フィルムは、例えば前記
の酸成分およびジアミン成分を有機溶媒中、約100℃
以下、特に20−60℃の温度で反応させてポリアミッ
ク酸の溶液とし、このポリアミック酸の溶液をド−プ液
として使用し、そのド−プ液を支持体に流延し、70−
200℃程度に乾燥して薄膜を形成し、支持体から剥離
して得ることができる。この剥離を容易に行うことがで
きるように、有機リン化合物、例えば亜リン酸トリフェ
ニル、リン酸トリフェニル等をポリアミック酸重合時に
固形分(ポリマ−)濃度に対して0.01〜1%の範囲
で添加することができる。
The self-supporting film is prepared, for example, by mixing the above-mentioned acid component and diamine component in an organic solvent at about 100 ° C.
Hereinafter, the reaction is carried out at a temperature of 20-60 ° C. in particular to form a polyamic acid solution. This polyamic acid solution is used as a dope solution, and the dope solution is cast on a support.
It can be obtained by drying at about 200 ° C. to form a thin film and peeling it from the support. An organic phosphorus compound, for example, triphenyl phosphite, triphenyl phosphate, or the like, is used in an amount of 0.01 to 1% based on the solid content (polymer) concentration at the time of polyamic acid polymerization so that the peeling can be easily performed. It can be added in a range.

【0016】前記のポリアミック酸製造に使用する有機
溶媒は、N−メチル−2−ピロリドン、N,N−ジメチ
ルホルムアミド、N,N−ジメチルアセトアミド、N,
N−ジエチルアセトアミド、ジメチルスルホキシド、ヘ
キサメチルホスホルアミド、N−メチルカプロラクタム
などが挙げられる。これらの有機溶媒は単独で用いても
よく、2種以上を併用してもよい。
The organic solvent used for the production of the polyamic acid is N-methyl-2-pyrrolidone, N, N-dimethylformamide, N, N-dimethylacetamide, N, N-dimethylacetamide.
N-diethylacetamide, dimethylsulfoxide, hexamethylphosphoramide, N-methylcaprolactam and the like can be mentioned. These organic solvents may be used alone or in combination of two or more.

【0017】また、前記のイミド化促進の目的で、原料
溶液中に塩基性有機化合物を添加することができる。例
えば、イミダゾ−ル、2−メチルイミダゾ−ル、1,2
−ジメチルイミダゾ−ル、2−フェニルイミダゾ−ル、
トリエチルアミン等をポリアミック酸重合時に固形分濃
度に対して0.1−10重量%の割合で使用することが
できる。
For the purpose of accelerating the imidization, a basic organic compound can be added to the raw material solution. For example, imidazole, 2-methylimidazole, 1,2
-Dimethyl imidazole, 2-phenyl imidazole,
Triethylamine or the like can be used at a rate of 0.1 to 10% by weight based on the solid content concentration at the time of polyamic acid polymerization.

【0018】この発明の金属箔積層体は、前記ポリイミ
ド製のフィルム、板や種々の形状の成形体にアルミニウ
ムを1−1000ppm含有し加熱処理を完了した接着
性の改良されたポリイミドフィルム等の成形体の片面あ
るいは両面に、耐熱性接着剤層を設け、さらに金属箔を
重ね合わせ、加熱・加圧して得ることができる。前記の
耐熱性接着剤としては、電子分野で使用されている耐熱
性接着剤であれば特に制限はなく、例えばポリイミド系
接着剤、エポキシ変性ポリイミド系接着剤、フェノ−ル
樹脂変性エポキシ樹脂接着剤、エポキシ変性アクリル樹
脂系接着剤、エポキシ変性ポリアミド系接着剤などが挙
げられる。この耐熱性接着剤層はそれ自体電子分野で実
施されている任意の方法が設けることができ、例えば前
記のポリイミドフィルム、成形体に接着剤溶液を塗布・
乾燥してもよく、別途に形成したフィルム状接着剤と張
り合わせてもよい。
The metal foil laminate of the present invention comprises a polyimide film, a plate or a molded article of various shapes containing 1-1000 ppm of aluminum, which has been subjected to a heat treatment and has improved adhesion. It can be obtained by providing a heat-resistant adhesive layer on one or both sides of the body, further laminating a metal foil, and applying heat and pressure. The heat-resistant adhesive is not particularly limited as long as it is a heat-resistant adhesive used in the electronic field. For example, a polyimide-based adhesive, an epoxy-modified polyimide-based adhesive, and a phenolic resin-modified epoxy resin adhesive , An epoxy-modified acrylic resin-based adhesive, an epoxy-modified polyamide-based adhesive, and the like. This heat-resistant adhesive layer can be provided by any method that is used in the field of electronics per se, for example, by applying an adhesive solution to the above-mentioned polyimide film or molded article.
It may be dried or bonded to a separately formed film adhesive.

【0019】この発明において使用する金属箔としては
単一金属あるいは合金、例えば、銅、アルミニウム、
金、銀、ニッケル、ステンレスの箔、メッキ層など各種
金属箔、メッキ層が挙げられるが、好適には圧延銅、電
解銅などがあげられる。金属箔の厚さは特に制限はない
が、0.1μm−10mm、特に10〜60μmが好ま
しい。
The metal foil used in the present invention may be a single metal or alloy such as copper, aluminum,
Various metal foils and plating layers such as gold, silver, nickel and stainless steel foils and plating layers are mentioned, and preferably, rolled copper, electrolytic copper and the like are mentioned. The thickness of the metal foil is not particularly limited, but is preferably 0.1 μm to 10 mm, particularly preferably 10 μm to 60 μm.

【0020】この発明の積層体には、他の基材、例えば
セラミックス、ガラス基板、シリコンウエハ−や同種あ
るいは異種の金属あるいはポリイミドフィルムなどの成
形体をさらに耐熱性接着剤によって接着してもよい。
The laminate of the present invention may be further bonded with another substrate, for example, a ceramic, a glass substrate, a silicon wafer, or a molded product of the same or different metal or polyimide film with a heat-resistant adhesive. .

【0021】この発明によって得られる接着性の改良さ
れたポリイミドフィルムおよび積層体は簡単な操作によ
って、ポリイミド自体の物性を維持し、良好な接着性を
有すているので電子分野の材料として好適に使用するこ
とができる。
The polyimide film and the laminate having improved adhesion obtained by the present invention can maintain the physical properties of the polyimide itself by a simple operation and have good adhesiveness, so that it is suitable as a material in the electronic field. Can be used.

【0022】[0022]

【実施例】以下、この発明を実施例および比較例により
さらに詳細に説明する。熱膨張係数は昇温速度10℃/
分にて測定した。ポリイミドフィルム中のアルミニウム
含量は次に示すICP発光分析で測定した。試料(約1
g)を燃焼炭化・灰化後酸溶解し、ICP発光分析法
(プラズマ励起発光分光分析法)により、(株)京都光
研製の分析装置(UOP−1 MARK−2型)を用い
て定量した。
The present invention will be described below in more detail with reference to examples and comparative examples. The coefficient of thermal expansion is 10 ° C /
Measured in minutes. The aluminum content in the polyimide film was measured by the following ICP emission analysis. Sample (about 1
g) was dissolved in acid after combustion and carbonization and incineration, and quantified by ICP emission spectrometry (plasma excitation emission spectroscopy) using an analyzer (UOP-1 MARK-2 type, manufactured by Kyoto Koken Co., Ltd.). .

【0023】ポリイミドフィルム形成用ド−プの合成例 攪拌機、窒素導入管および還流管を備えた300mlガ
ラス製反応容器に、N,N−ジメチルアセトアミド18
3gおよび0.1gのリン酸化合物(セパ−ル365−
100 中京油脂株式会社製)を加え、攪拌および窒素
流通下、パラフェニレンジアミン10.81g(0.1
000モル)を添加し、50℃に保温し完全に溶解させ
た。この溶液に3,3’,4,4’−ビフェニルテトラ
カルボン酸二無水物29.229g(0.09935モ
ル)を発熱に注意しながら除々に添加し、添加終了後5
0℃に保ったまま5時間反応を続けた。この後、3,
3’,4,4’−ビフェニルテトラカルボン酸2水和物
0.2381g(0.00065モル)を溶解させた。
得られたポリアミック酸溶液は褐色粘調液体であり、2
5℃における溶液粘度は約1500ポイズであった。こ
のド−プから別途製造したポリイミドフィルムの単一の
層(50μm)として50−200℃での熱膨張係数は
1.5×10-5cm/cm/℃であった。
Example of Synthesis of Dope for Forming Polyimide Film N, N-dimethylacetamide 18 was placed in a 300 ml glass reaction vessel equipped with a stirrer, nitrogen inlet tube and reflux tube.
3 g and 0.1 g of the phosphoric acid compound (Separ 365-
100, manufactured by Chukyo Yushi Co., Ltd.), and stirred under a nitrogen flow with 10.81 g (0.1%) of paraphenylenediamine.
000 mol), and the mixture was kept at 50 ° C. and completely dissolved. To this solution, 29.229 g (0.09935 mol) of 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride was gradually added while paying attention to heat generation.
The reaction was continued for 5 hours while maintaining the temperature at 0 ° C. After this,
0.2381 g (0.00065 mol) of 3 ', 4,4'-biphenyltetracarboxylic acid dihydrate was dissolved.
The resulting polyamic acid solution is a brown viscous liquid,
The solution viscosity at 5 ° C. was about 1500 poise. As a single layer (50 μm) of a polyimide film separately manufactured from this dope, the coefficient of thermal expansion at 50 to 200 ° C. was 1.5 × 10 −5 cm / cm / ° C.

【0024】積層体の製造例−1 電解銅箔(三井金属鉱業株式会社製、3EC−3)とポ
リイミドフィルムとの間に接着シ−ト(デュポン社製、
Pyraulux WA、厚み μm)を挟み、20
kg/cm2 、180℃、1分間の条件で加熱圧着した
後、180℃の熱風オ−ブン中で30分間後熱処理し、
冷却して積層体を得た。この積層体について、T−ピ−
ル強度(25℃)を測定した。
Production Example of Laminate-1 Adhesion sheet (manufactured by DuPont) between an electrolytic copper foil (3EC-3 manufactured by Mitsui Kinzoku Mining Co., Ltd.) and a polyimide film.
(Pyralux WA, thickness μm)
kg / cm 2 at 180 ° C. for 1 minute, followed by heat treatment in a hot air oven at 180 ° C. for 30 minutes,
After cooling, a laminate was obtained. About this laminated body,
The strength (25 ° C.) was measured.

【0025】積層体の製造例−2 ポリイミドフィルム表面を通常の前処理した後、電子ビ
−ム蒸着法によって銅薄膜を形成した。ホルダ−サイズ
に切り出したフィルムを蒸着装置内に設置後、基板温度
150℃、真空度2×10-4Pa以下、原料銅純度4
N、蒸着速度約10−25オングストロ−ム/秒の条件
で0.2μmの厚みの銅膜を堆積した。さらに、その上
に電解メッキで10μmの銅層を形成した。この積層体
について、2規定の塩酸で5分間浸積後、T−ピ−ル強
度(25℃)を測定した。
Production Example 2 of Laminated Body After the polyimide film surface was subjected to ordinary pretreatment, a copper thin film was formed by an electron beam evaporation method. After placing the film cut into the holder size in the vapor deposition apparatus, the substrate temperature is 150 ° C., the degree of vacuum is 2 × 10 −4 Pa or less, and the raw material copper purity is 4
A copper film having a thickness of 0.2 μm was deposited under the conditions of N and a deposition rate of about 10-25 Å / sec. Further, a 10 μm copper layer was formed thereon by electrolytic plating. The laminate was immersed in 2N hydrochloric acid for 5 minutes, and then the T-peel strength (25 ° C.) was measured.

【0026】実施例1−4 前記のポリアミック酸溶液をガラス基板上に流延塗布
し、150℃で10分間乾燥し、基板から剥がししてフ
レ−ム上に拘束して、表1、表2に示した濃度のアルミ
ニウムトリアセチルアセトナ−トのトルエン溶液を塗布
した後、200℃で3分間、300℃で3分間、480
℃で4分間熱処理して厚み50μmのポリイミドフィル
ムを得た。このフィルムを使用し、積層体を得た。結果
をまとめて表1、表2に示す。
Example 1-4 The above-mentioned polyamic acid solution was applied by casting onto a glass substrate, dried at 150 ° C. for 10 minutes, peeled off the substrate and restrained on a frame. After applying a toluene solution of aluminum triacetylacetonate having the concentration shown in (1), 480 minutes at 200 ° C. for 3 minutes and 300 ° C. for 3 minutes.
Heat treatment was performed at 4 ° C. for 4 minutes to obtain a polyimide film having a thickness of 50 μm. Using this film, a laminate was obtained. The results are summarized in Tables 1 and 2.

【0027】実施例5 前記のポリアミック酸溶液中に表1、表2に示す量の水
酸化アルミニウムを添加して均一に溶解したド−プをガ
ラス基板上に流延塗布し、150℃で10分間乾燥し、
基板から剥がししてフレ−ム上に拘束して、200℃で
3分間、300℃で3分間、480℃で4分間熱処理し
て厚み50μmのポリイミドフィルムを得た。このフィ
ルムを使用し、積層体を得た。結果をまとめて表1、表
2に示す。
Example 5 A dope obtained by adding aluminum hydroxide in the amount shown in Tables 1 and 2 to the above-mentioned polyamic acid solution and uniformly dissolving it was cast and applied on a glass substrate. Dry for a minute,
The polyimide film was peeled off from the substrate, restrained on a frame, and heat-treated at 200 ° C. for 3 minutes, 300 ° C. for 3 minutes, and 480 ° C. for 4 minutes to obtain a polyimide film having a thickness of 50 μm. Using this film, a laminate was obtained. The results are summarized in Tables 1 and 2.

【0028】実施例6−11 前記のポリアミック酸溶液中に表1、表2に示す量の水
酸化アルミニウムを添加して均一に溶解したド−プをガ
ラス基板上に流延塗布し、150℃で10分間乾燥し、
基板から剥がししてフレ−ム上に拘束して、表1、表2
に示した濃度のアルミニウムトリアセチルアセトナ−ト
のトルエン溶液を塗布した後、200℃で3分間、30
0℃で3分間、480℃で4分間熱処理して厚み50μ
mのポリイミドフィルムを得た。このフィルムを使用
し、積層体を得た。結果をまとめて表1、表2に示す。
Example 6-11 Dopes prepared by adding aluminum hydroxide in the amounts shown in Tables 1 and 2 to the above-mentioned polyamic acid solution and uniformly dissolving the resulting solution were cast on a glass substrate, and the resulting solution was coated at 150 ° C. And dry for 10 minutes
Peeled from the substrate and restrained on the frame, Tables 1 and 2
After the application of a toluene solution of aluminum triacetylacetonate having the concentration shown in
Heat treated at 0 ° C for 3 minutes and 480 ° C for 4 minutes to 50μ thickness
m was obtained. Using this film, a laminate was obtained. The results are summarized in Tables 1 and 2.

【0029】実施例12−13 前記のポリアミック酸溶液をガラス基板上に流延塗布
し、150℃で10分間乾燥し、基板から剥がししてフ
レ−ム上に拘束して、表1、表2に示した濃度のアルミ
ニウムキレ−ト化合物(川研ファインケミカル株式会社
製、ALCH)のDMAc溶液を塗布した後、200℃
で3分間、300℃で3分間、480℃で4分間熱処理
して厚み50μmのポリイミドフィルムを得た。このフ
ィルムを使用し、積層体を得た。結果をまとめて表1、
表2に示す。
Examples 12 to 13 The above-mentioned polyamic acid solution was applied by casting onto a glass substrate, dried at 150 ° C. for 10 minutes, peeled off the substrate and restrained on a frame. After a DMAc solution of an aluminum chelate compound (ALCH, manufactured by Kawaken Fine Chemical Co., Ltd.) having the concentration shown in
For 3 minutes, 300 ° C. for 3 minutes and 480 ° C. for 4 minutes to obtain a 50 μm thick polyimide film. Using this film, a laminate was obtained. The results are summarized in Table 1,
It is shown in Table 2.

【0030】また、各実施例で得られたポリイミドフィ
ルムについて、引張強度、伸び、耐屈曲性、絶縁性を確
認したところ従来公知のポリイミドフィルムをほぼ同等
であった。
Further, when the tensile strength, elongation, bending resistance, and insulation properties of the polyimide film obtained in each of the examples were confirmed, it was almost the same as the conventionally known polyimide film.

【0031】比較例1 ポリアミック酸溶液をガラス基板上に流延塗布し、15
0℃で10分間乾燥し、基板から剥がしてフレ−ム上に
拘束して200℃で3分間、300℃で3分間、480
℃で4分間熱処理して厚み50μmのポリイミドフィル
ムを得た。このフィルムを使用し、積層体を得た。結果
をまとめて表1、表2に示す。
Comparative Example 1 A polyamic acid solution was applied by casting onto a glass substrate.
After drying at 0 ° C. for 10 minutes, peeling off from the substrate and restraining on a frame, it is performed at 200 ° C. for 3 minutes and at 300 ° C. for 3 minutes.
Heat treatment was performed at 4 ° C. for 4 minutes to obtain a polyimide film having a thickness of 50 μm. Using this film, a laminate was obtained. The results are summarized in Tables 1 and 2.

【0032】[0032]

【表1】 [Table 1]

【0033】[0033]

【表2】 [Table 2]

【0034】[0034]

【発明の効果】この発明によれば、簡単な操作によっ
て、接着性の改良されたポリイミドフィルムおよび積層
体を得ることができる。
According to the present invention, a polyimide film and a laminate having improved adhesion can be obtained by a simple operation.

【0035】また、この発明によれば、ポリイミド自体
の物性を維持しており、良好な接着性を有する接着性の
改良されたポリイミドフィルムおよび積層体を得ること
ができる。
Further, according to the present invention, it is possible to obtain a polyimide film and a laminate having improved adhesiveness and good adhesiveness while maintaining the physical properties of the polyimide itself.

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 FI C08K 3/10 C08K 3/10 C08L 79/08 C08L 79/08 Z // B29K 77:00 B29L 7:00 ──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. 6 Identification code FI C08K 3/10 C08K 3/10 C08L 79/08 C08L 79/08 Z // B29K 77:00 B29L 7:00

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 フィルムのアルムニウム含有量が1−1
000ppmであって、加熱処理を完了してなる接着性
の改良されたポリイミドフィルム。
1. The film according to claim 1, wherein said film has an aluminum content of 1-1.
A polyimide film having an improved adhesion of 000 ppm after completion of the heat treatment.
【請求項2】 フィルムが芳香族テトラカルボン酸残基
と芳香族ジアミン残基とから形成されている請求項1記
載の接着性の改良されたポリイミドフィルム。
2. The polyimide film with improved adhesion according to claim 1, wherein the film is formed from an aromatic tetracarboxylic acid residue and an aromatic diamine residue.
【請求項3】 フィルム形成用ポリアミック酸溶液にア
ルムニウム化合物を添加して均一に溶解したド−プ液を
キャスティングした後加熱乾燥するか、ポリアミック酸
溶液から得られた自己支持性フィルムにアルミニウム化
合物を含む溶液を塗布した後乾燥して得られたアルミニ
ウム成分を含有する乾燥フィルムを、420℃以上の温
度で加熱してイミド化を完了させてフィルム表面のアル
ミニウム含有量が1−1000ppmであるポリイミド
フィルムを形成することを特徴とする接着性の改良され
たポリイミドフィルムの製法。
3. An aluminum compound is added to a polyamic acid solution for film formation, and a dope solution obtained by uniformly dissolving is cast and then dried by heating, or an aluminum compound is added to a self-supporting film obtained from the polyamic acid solution. A dried film containing an aluminum component obtained by applying and drying a solution containing the solution is heated at a temperature of 420 ° C. or more to complete imidization, and the aluminum film on the film surface has an aluminum content of 1 to 1000 ppm, a polyimide film. Forming a polyimide film having improved adhesion.
【請求項4】 成形体のアルムニウム含有量が1−10
00ppmであって、加熱処理を完了してなる接着性の
改良されたポリイミド成形体の片面または両面に耐熱性
接着剤によって金属箔が積層されている積層体。
4. The molded product having an aluminum content of 1-10.
A laminate in which a metal foil is laminated with a heat-resistant adhesive on one or both surfaces of a polyimide molded article having an adhesion of 00 ppm and having improved adhesiveness after the completion of the heat treatment.
【請求項5】 成形体が芳香族テトラカルボン酸残基と
芳香族ジアミン残基とから形成されているポリイミドフ
ィルムである請求項1記載の接着性の改良された積層
体。
5. The laminate with improved adhesion according to claim 1, wherein the molded article is a polyimide film formed from an aromatic tetracarboxylic acid residue and an aromatic diamine residue.
JP32846097A 1997-11-28 1997-11-28 Polyimide film with improved adhesion, method for producing the same, and laminate thereof Expired - Lifetime JP3438556B2 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP32846097A JP3438556B2 (en) 1997-11-28 1997-11-28 Polyimide film with improved adhesion, method for producing the same, and laminate thereof
US09/055,738 US6129982A (en) 1997-11-28 1998-04-06 Aromatic polyimide film having improved adhesion
EP98122194A EP0919593B1 (en) 1997-11-28 1998-11-27 Aromatic polyimide film having improved adhesion
TW087119750A TW506977B (en) 1997-11-28 1998-11-27 Aromatic polyimide film having improved adhesion
DE69822973T DE69822973T2 (en) 1997-11-28 1998-11-27 Aromatic polyimide film with improved adhesion
KR10-1998-0051595A KR100384052B1 (en) 1997-11-28 1998-11-28 Aromatic polyimide film having improved adhesion

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
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JPH11158276A true JPH11158276A (en) 1999-06-15
JP3438556B2 JP3438556B2 (en) 2003-08-18

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WO2005068185A1 (en) * 2004-01-13 2005-07-28 Ube Industries, Ltd. Polyimide-metal laminated body and polyimide circuit board
JP2005225228A (en) * 2004-01-13 2005-08-25 Ube Ind Ltd Polyimide metal laminate and circuit substrate
JP2009285995A (en) * 2008-05-29 2009-12-10 Ube Ind Ltd Polyimide metal laminated body, wiring substrate, multilayer metal laminated body, and multilayer wiring substrate
US7811660B2 (en) 2004-07-27 2010-10-12 Kaneka Corporation Polyimide film having high adhesiveness and method for producing same
US8158268B2 (en) 2005-08-04 2012-04-17 Kaneka Corporation Metal-coated polyimide film
US8513373B2 (en) 2004-09-24 2013-08-20 Kaneka Corporation Process for production of polyimide film having high adhesiveness

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WO2005068185A1 (en) * 2004-01-13 2005-07-28 Ube Industries, Ltd. Polyimide-metal laminated body and polyimide circuit board
JP2005225228A (en) * 2004-01-13 2005-08-25 Ube Ind Ltd Polyimide metal laminate and circuit substrate
KR100841414B1 (en) * 2004-01-13 2008-06-25 우베 고산 가부시키가이샤 Polyimide-metal laminated body and polyimide circuit board
JP4529695B2 (en) * 2004-01-13 2010-08-25 宇部興産株式会社 Polyimide metal laminate and polyimide circuit board
US7811660B2 (en) 2004-07-27 2010-10-12 Kaneka Corporation Polyimide film having high adhesiveness and method for producing same
US8513373B2 (en) 2004-09-24 2013-08-20 Kaneka Corporation Process for production of polyimide film having high adhesiveness
US8158268B2 (en) 2005-08-04 2012-04-17 Kaneka Corporation Metal-coated polyimide film
US8293331B2 (en) 2005-08-04 2012-10-23 Kaneka Corporation Metal-coated polyimide film
JP2009285995A (en) * 2008-05-29 2009-12-10 Ube Ind Ltd Polyimide metal laminated body, wiring substrate, multilayer metal laminated body, and multilayer wiring substrate

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