JPH11156298A - Focused ultrasonic wave generator - Google Patents
Focused ultrasonic wave generatorInfo
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- JPH11156298A JPH11156298A JP32265297A JP32265297A JPH11156298A JP H11156298 A JPH11156298 A JP H11156298A JP 32265297 A JP32265297 A JP 32265297A JP 32265297 A JP32265297 A JP 32265297A JP H11156298 A JPH11156298 A JP H11156298A
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- Prior art keywords
- ultrasonic
- ultrasonic wave
- focused
- vibrator
- ultrasound
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は集束超音波発生装置
に関し、特に超音波振動子積層技術を利用した集束超音
波発生装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a focused ultrasonic generator, and more particularly, to a focused ultrasonic generator utilizing an ultrasonic transducer lamination technique.
【０００２】[0002]
【従来の技術】超音波を照射して流体中の微粒子を非接
触に捕獲したり、液体等に流れを発生させたりできるこ
とは１９世紀より知られていた。超音波を音響レンズを
用いて集束させ、この集束超音波を微粒子に作用させた
とき、微粒子が受ける輻射圧については、例えば、ジョ
ンル・ブが、ジャーナル・オブ・アクースティカル・ソサエ
ティー・オブ・アメリカ 第８９巻（１９９１年）２１４
０頁から２１４３頁（J.Wu,J. Acoust. Soc. Am. 89 (1
991) pp.2140-2143）に、集束超音波の集束点に直径２
７０μｍのポリスチレン球を捕獲することに成功した旨
報告している。また、超音波を液体に照射することで、
液体自体に流れが生じる超音波流動現象は、ナイボルグ
（W. L. Nyborg）によって冊子フィジカル・アコーステ
ィクス第２巻Ｂ（１９６５年）（Physical Acoustics
Vol. 2B, Ed. W. P. Mason, Academic Press, 1965）
のアコースティック・ストリーミング（Acoustic Stre
aming）の章の中に紹介されている。これらの現象は、
超音波強度の傾きによって生じるものと考えられてお
り、より大きな駆動力を得るためには超音波のエネルギ
ー密度の空間分布の変化を増加させるか、超音波の流体
中での減衰を大きくすればよい。2. Description of the Related Art It has been known from the 19th century that particles in a fluid can be captured in a non-contact manner by irradiating an ultrasonic wave or a flow can be generated in a liquid or the like. When ultrasonic waves are focused using an acoustic lens and the focused ultrasonic waves are applied to the fine particles, the radiation pressure applied to the fine particles can be determined, for example, according to the journal of Acoustic Society of America. Volume 89 (1991) 214
Pages 0 to 2143 (J. Wu, J. Acoust. Soc. Am. 89 (1
991) In pp.2140-2143), the focus point of the focused ultrasonic wave is 2
It reports that it successfully captured 70 μm polystyrene spheres. In addition, by irradiating ultrasonic waves to the liquid,
Ultrasonic flow phenomena in which a flow occurs in the liquid itself is described by Nyborg in Physical Acoustics, Booklet, Physical Acoustics, Volume 2, B (1965).
Vol. 2B, Ed. WP Mason, Academic Press, 1965)
Acoustic Stre
aming). These phenomena are
It is thought to be caused by the gradient of the ultrasonic intensity.To obtain a larger driving force, increase the change in the spatial distribution of the ultrasonic energy density or increase the attenuation of the ultrasonic wave in the fluid Good.
【０００３】超音波のエネルギー密度の分布を作る方法
の一つに、集束超音波を用いる方法がある。集束超音波
の発生方法として代表的な方法として、音響レンズを用
いる方法と、電子フォーカス技術を用いる方法がよく知
られている。実際、上記２つの公知例においては、集束
超音波の発生方法として屈折率の異なる材料を凹面状に
加工して、超音波発生源に接着することで集束超音波を
発生させる音響レンズを用いた手法が利用されている。
また、電子フォーカス技術は、平面上にアレー状に配置
された複数の超音波振動子から位相の異なる超音波を照
射して、この位相のずれを調整することで集束超音波を
発生させるもので、超音波診断装置のプローブなどに利
用されている。[0003] One of the methods for creating the energy density distribution of ultrasonic waves is to use focused ultrasonic waves. As a typical method of generating focused ultrasound, a method using an acoustic lens and a method using an electronic focusing technique are well known. In fact, in the above two known examples, as a method of generating focused ultrasound, an acoustic lens that generates a focused ultrasound by processing a material having a different refractive index into a concave shape and bonding the material to an ultrasound source is used. Techniques are used.
In addition, the electronic focus technology irradiates ultrasonic waves having different phases from a plurality of ultrasonic transducers arranged in an array on a plane, and generates a focused ultrasonic wave by adjusting the phase shift. And a probe of an ultrasonic diagnostic apparatus.
【０００４】[0004]
【発明が解決しようとする課題】上記従来技術のうち、
音響レンズを用いる手法は、単一の超音波音源から発生
させた超音波を音響レンズで屈折させることから、超音
波振動子を駆動させる回路は単純であるが、音響レンズ
の加工に関しては、超音波を照射する液体とは屈折率の
異なる固体材料を凹面状に加工する必要が有り、体内に
超音波を導入する場合など検体と超音波音源との密着性
が要求される時には、凹面の形状では超音波を導入する
検体表面の平面な形状との密着性が確保できず、別途そ
のすき間を埋める充填剤を加えたり、何かしらの配慮を
行う必要があった。また、使用する条件によっては、音
響レンズとして用いる固体材料が限定され、その音速が
液体とあまり違わない場合には、超音波照射部の厚みが
増すことから、装置内に組み込む場合の形状の自由度が
制限されたり、凹面の形状によって流体の流れが乱れて
しまうという問題点があった。さらに、マイクロマシン
内部などの従来の機械加工の工程を導入することができ
ないような微細な領域に一定の曲率の凹面を作ること
は、従来のフォトリソグラフィー技術では困難であっ
た。SUMMARY OF THE INVENTION Among the above prior arts,
In the method using an acoustic lens, the ultrasonic wave generated from a single ultrasonic sound source is refracted by the acoustic lens, so the circuit for driving the ultrasonic vibrator is simple. It is necessary to process a solid material with a different refractive index from the liquid to be irradiated with acoustic waves into a concave shape, and when close contact between the sample and the ultrasonic sound source is required, such as when introducing ultrasonic waves into the body, the concave shape In such a case, it was not possible to ensure the adhesion to the planar shape of the sample surface into which the ultrasonic wave was introduced, and it was necessary to separately add a filler to fill the gap or to take some care. Also, depending on the conditions used, the solid material used as the acoustic lens is limited, and if the sound speed is not so different from that of the liquid, the thickness of the ultrasonic irradiation section increases, so that the shape of the ultrasonic lens can be freely set when incorporated into the device. However, there has been a problem that the degree is limited and the flow of the fluid is disturbed by the shape of the concave surface. Furthermore, it has been difficult with the conventional photolithography technology to form a concave surface with a constant curvature in a fine region such as the inside of a micromachine where a conventional machining process cannot be introduced.
【０００５】上記従来技術のうち、電子フォーカス技術
を用いる集束超音波の発生技術は、上記音響レンズのよ
うな凹面レンズを別途加工する必要も無く、超音波振動
子の発生する超音波の位相を制御するのみで実現するこ
とが可能であるため、コンパクトさを要求される場所
や、超音波の集束点を移動させたい場合には有効である
が、発生させる超音波の位相制御を行うために、超音波
振動子アレーの数分の超音波発生源が必要となり、駆動
回路の構成が複雑となってしまうという問題点があっ
た。[0005] Among the above-mentioned prior arts, the technique of generating a focused ultrasonic wave using an electronic focusing technique does not require a separate processing of a concave lens such as the acoustic lens described above, and the phase of the ultrasonic wave generated by the ultrasonic transducer is changed. Because it can be realized only by controlling, it is effective in places where compactness is required or when it is desired to move the focal point of ultrasonic waves, but it is necessary to control the phase of generated ultrasonic waves. In addition, there is a problem that an ultrasonic generating source for several ultrasonic transducer arrays is required, and the configuration of the driving circuit becomes complicated.
【０００６】本発明は、上記従来技術の音響レンズが持
つ駆動回路の単純さと、電子フォーカス技術のコンパク
トさと機械加工の単純さを併せ持つ集束超音波発生装置
を提供することを目的とする。SUMMARY OF THE INVENTION It is an object of the present invention to provide a focused ultrasonic generator having both the simplicity of the driving circuit of the above-described conventional acoustic lens, the compactness of the electronic focusing technology, and the simplicity of machining.
【０００７】[0007]
【課題を解決するための手段】上記目的を実現するた
め、本発明の集束超音波発生装置は、一つの超音波振動
子駆動回路と、超音波を集束させたい点あるいは線か
ら、超音波振動子を配置する平面上の超音波の位相に換
算して同位相となる距離の位置に配置された超音波振動
子アレーとを有し、前記集束点あるいは線に超音波を集
束させる手段を有する。In order to achieve the above object, a focused ultrasonic generator according to the present invention comprises an ultrasonic vibrator driving circuit, an ultrasonic vibrator, and an ultrasonic vibrator. An ultrasonic transducer array arranged at a position at a distance that is in phase with the ultrasonic wave on the plane on which the transducer is arranged, and having means for converging the ultrasonic wave to the focusing point or line. .
【０００８】[0008]
【発明の実施の形態】本発明の集束超音波発生装置の原
理について図１に示した第１の実施例の超音波照射部の
模式図を用いて以下に説明する。ただし図１では装置内
の構造を分かりやすくするため、装置上面の一部を透視
している。本実施例で示した装置は、超音波照射部１と
超音波振動子駆動回路部からなり、図１には超音波振動
子駆動回路部は示していない。。超音波照射部１は、２
枚の板２、５に挟まれた形で径の異なる複数の円筒形の
超音波振動子３が配置されている。超音波振動子３の上
面と下面には各々電極４が配置されており、これによっ
て、表板２と裏板５の内面に配置された各々の電極面に
電界を印加することで、超音波振動子３から超音波を発
生させることができる。このときの超音波振動子３の配
置は、図２に示した原理によって定められる。図２は、
超音波振動子が配置されている平面（R軸方向）と、超
音波照射方向（Z軸方向）との面内での超音波集束時の
超音波振動子の配置の求め方を示している。まず、Ｚ軸
上の点Zf（６）に超音波を集束させる場合、この焦点Zf
からR軸平面に下ろした垂線の足をR0としたとき、R0か
らZfまでの距離がmλであったとする。ただし、ここで
λは超音波振動子から発生させる超音波の波長、mは自
然数とする。R0の位置に超音波振動子を配置した場合、
同心円状に配置した超音波振動子各々の半径は、中心か
らn番目の超音波振動子の輪（８）の半径をRnとした場
合、DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The principle of a focused ultrasonic generator according to the present invention will be described below with reference to the schematic diagram of the ultrasonic irradiation section of the first embodiment shown in FIG. However, in FIG. 1, a part of the upper surface of the device is seen through for easy understanding of the structure inside the device. The apparatus shown in this embodiment includes an ultrasonic irradiation unit 1 and an ultrasonic vibrator driving circuit, and FIG. 1 does not show the ultrasonic vibrator driving circuit. . The ultrasonic irradiation unit 1 is 2
A plurality of cylindrical ultrasonic vibrators 3 having different diameters are arranged between the plates 2 and 5. Electrodes 4 are arranged on the upper and lower surfaces of the ultrasonic vibrator 3, respectively. By applying an electric field to each of the electrode surfaces arranged on the inner surfaces of the front plate 2 and the back plate 5, the ultrasonic wave is applied. Ultrasonic waves can be generated from the vibrator 3. The arrangement of the ultrasonic transducers 3 at this time is determined by the principle shown in FIG. FIG.
It shows how to find the position of the ultrasonic transducer when focusing the ultrasonic wave in the plane where the ultrasonic transducer is arranged (R axis direction) and the ultrasonic irradiation direction (Z axis direction). . First, when the ultrasonic wave is focused on the point Z f (6) on the Z axis, the focal point Z f
The perpendicular foot drawn down the R axis plane when the R 0, the distance from the R 0 to Z f is assumed to be mλ from. Here, λ is the wavelength of the ultrasonic wave generated from the ultrasonic transducer, and m is a natural number. When an ultrasonic transducer is placed at the position of R 0 ,
The radius of each of the ultrasonic transducers arranged concentrically is Rn, where Rn is the radius of the ring (8) of the nth ultrasonic transducer from the center.
【０００９】[0009]
【数１】 (Equation 1)
【００１０】と置くことが出来る。ただし、位置Rnは、
n番目の超音波振動子の中心の位置を示し、その幅は超
音波焦点の位置からの距離に換算して高々±λ／４程度
とする。本実施例では、R0の位置に基準となる超音波振
動子が配置されているものとして、R1以降の超音波振動
子の配置を説明したが、本発明における超音波振動子の
配置は、目標とする集束点の位置に同位相の超音波を照
射できる平面上の複数の位置に超音波振動子を配置する
ことで実現され、基準となる超音波振動子R0の位置が焦
点からＲ平面に下ろした垂線の足から離れていた場合に
も、R0の位置を基準としてR0と同位相で駆動できる同心
円状の超音波振動子を用いれば第１の実施例と同様な結
果を得ることが出来る。また、同様に、超音波振動子を
配置する面が曲面であった場合にも、超音波を集束させ
たい点から、前記曲面上の位置までの距離が同位相とな
る位置に超音波振動子を配置させればよい。また、超音
波振動子の厚みに関しても、超音波振動子の材質がＰＺ
Ｔ系セラミックスであった場合には、この周波数定数
は、厚み共振モード（N33モード）で１６００m・Hz程度
であることから、超音波振動子の高さをλ／２で調製し
た場合には、その高さは１０ＭHzで８０μm程度とな
る。超音波振動子の厚みは、その共振モードを利用する
ことで、効果的に超音波を発生させることが出来ること
から、使用する超音波の波長に対してλ／２、あるいは
λ／４の厚みを用いることが望ましい。また、超音波に
よるキャビテーションの発生を抑制するためには、ＭHz
領域の超音波を利用することが望ましい。[0010] It can be placed. Where the position R n is
Indicates the position of the center of the n-th ultrasonic transducer, and its width is at most about ± λ / 4 in terms of the distance from the position of the ultrasonic focal point. In this embodiment, as ultrasonic transducers as a reference to the position of R 0 are arranged has been described the arrangement of the R 1 and subsequent ultrasonic transducer, the arrangement of the ultrasonic transducer in the present invention This is realized by arranging the ultrasonic transducers at a plurality of positions on a plane capable of irradiating the same-phase ultrasonic wave to the position of the target focusing point, and the position of the reference ultrasonic transducer R 0 is set from the focal point. The same result as that of the first embodiment can be obtained by using a concentric ultrasonic vibrator that can be driven in the same phase as R 0 with reference to the position of R 0 even when away from the perpendicular foot lowered on the R plane. Can be obtained. Similarly, even when the surface on which the ultrasonic vibrator is arranged is a curved surface, the ultrasonic vibrator is located at a position where the distance from the point at which the ultrasonic wave is to be focused to the position on the curved surface is in phase. May be arranged. Also, regarding the thickness of the ultrasonic vibrator, the material of the ultrasonic vibrator is PZ
If there was a T-based ceramics, the frequency constant, because it is about 1600 m · Hz in thickness resonant mode (N 33 mode), when the preparation of the height of the ultrasonic transducer at lambda / 2 is The height is about 80 μm at 10 MHz. The thickness of the ultrasonic vibrator can be effectively set to λ / 2 or λ / 4 with respect to the wavelength of the ultrasonic wave to be used since the ultrasonic mode can be effectively generated by using the resonance mode. It is desirable to use Also, in order to suppress the generation of cavitation due to ultrasonic waves, MHz
It is desirable to use ultrasound in the area.
【００１１】つぎに、図３（ａ）に、図１で示した第１
の実施例の超音波照射部のＡ−Ａ断面での超音波振動子
９の配置を示す。図３（ａ）では、（数１）で示された
ように同心円状に超音波振動子９が配置されている。図
３（b）は第２の実施例の超音波照射部のＡ−Ａ断面図
を、（ａ）の場合と同様に示したものである。本実施例
では、２つの焦点に同時に集束超音波を照射できるよう
に、図３（ａ）で示された超音波振動子の配置を２つの
焦点の位置の配置に合わせるように、超音波振動子１０
を重ねて配置し直したものである。本実施例では２つの
焦点を同様に照射する場合の超音波振動子の空間配置を
示したが、同様に３つ以上の複数の焦点を同時に発生さ
せる場合にも、その焦点の位置に応じて、図３（ａ）で
示した超音波振動子の配置を重ね合せることで実現でき
る。図３（ｃ）は、同様に第３の実施例の超音波照射部
のＡ−Ａ断面図を、（ａ）（ｂ）の場合と同様に示した
ものである。本実施例では、超音波の焦点を１点ではな
く一つの直線となるようにしてある。焦点の線から超音
波照射部上の平面に下ろした垂線の足は、矢印１２の位
置にあるものとした場合、図２で示したのと同様な原理
で、超音波振動子１１の配置を決める事が出来る。本実
施例では、直線状の焦点を考えたが、同様に曲線状の焦
点を作成することもできる。Next, FIG. 3A shows the first line shown in FIG.
7 shows an arrangement of the ultrasonic vibrator 9 in an AA cross section of the ultrasonic irradiation unit of the embodiment. In FIG. 3A, the ultrasonic transducers 9 are arranged concentrically as shown by (Equation 1). FIG. 3B is a cross-sectional view taken along line AA of the ultrasonic irradiation unit of the second embodiment, as in the case of FIG. In this embodiment, the ultrasonic vibration is adjusted so that the arrangement of the ultrasonic transducer shown in FIG. 3A is adjusted to the arrangement of the positions of the two focal points so that the focused ultrasonic waves can be simultaneously irradiated to the two focal points. Child 10
Are superimposed and rearranged. In the present embodiment, the spatial arrangement of the ultrasonic vibrator in the case of irradiating two focal points in the same manner is shown. This can be realized by superposing the arrangement of the ultrasonic transducers shown in FIG. FIG. 3C is a cross-sectional view of the ultrasonic irradiation section taken along the line AA of the third embodiment, similarly to FIGS. 3A and 3B. In this embodiment, the focal point of the ultrasonic wave is not one point but one straight line. When the perpendicular leg lowered from the focal line to the plane on the ultrasonic irradiation unit is located at the position of arrow 12, the arrangement of the ultrasonic transducer 11 is changed according to the same principle as shown in FIG. You can decide. In the present embodiment, a linear focus is considered, but a curved focus can be similarly created.
【００１２】図４に、本発明の集束超音波発生装置を組
み込んだシステムの一部を示す。直方体の管１３の表面
に本発明の集束超音波照射装置の集束超音波発生部１６
が密着している。この超音波照射部１６を集束超音波発
生部駆動回路１７によって駆動することによって、超音
波照射部から集束超音波を管１３内に導入することが出
来る。FIG. 4 shows a part of a system incorporating the focused ultrasonic generator according to the present invention. The focused ultrasonic generator 16 of the focused ultrasonic irradiation apparatus of the present invention is applied to the surface of the rectangular tube 13.
Are in close contact. By driving the ultrasonic irradiation unit 16 by the focused ultrasonic generation unit driving circuit 17, it is possible to introduce the focused ultrasonic wave into the tube 13 from the ultrasonic irradiation unit.
【００１３】[0013]
【発明の効果】以上詳述したように、本発明を用いるこ
とによって、簡単な駆動回路を用いて、平面上に配置し
た超音波発生源から集束超音波を発生させ、隣接する平
面状の容器内に簡単に超音波を導入することができる。As described in detail above, by using the present invention, a focused ultrasonic wave is generated from an ultrasonic wave source arranged on a plane by using a simple driving circuit, and an adjacent planar container is generated. Ultrasonic waves can be easily introduced into the inside.
【図１】本発明の第１の実施例の基本構成を示す模式
図。FIG. 1 is a schematic diagram showing a basic configuration of a first embodiment of the present invention.
【図２】本発明で集束超音波が発生する原理を説明する
模式図。FIG. 2 is a schematic diagram illustrating the principle of generating focused ultrasound in the present invention.
【図３】本発明の超音波発生源の平面上での配置を装置
のＡ−Ａ断面において示した模式図で、（ａ）は図１で
示した第１の実施例での断面図、（ｂ）は第２の実施例
を説明する断面図、および（ｃ）は第３の実施例を説明
する断面図。3A and 3B are schematic views showing the arrangement of the ultrasonic generator according to the present invention on a plane, taken along the line AA of the apparatus. FIG. 3A is a sectional view of the first embodiment shown in FIG. (B) is sectional drawing explaining a 2nd Example, (c) is sectional drawing explaining a 3rd Example.
【図４】本発明の集束超音波発生装置を組み込んだシス
テムの一部を示した模式図。FIG. 4 is a schematic view showing a part of a system incorporating the focused ultrasonic generator according to the present invention.
１…超音波照射部、２…表板、３…超音波振動子、４…
電極面、５…裏板、６…超音波焦点、７…超音波音源の
中心、８…超音波音源の中心よりn番目の超音波振動子
の輪の半径、９、１０、１１…Ａ−Ａ断面での超音波振
動子の空間配置、１２…超音波音源の中心、、１３…
管、１４、１５…電極、１６…集束超音波発生部、１７
…集束超音波発生部駆動回路。DESCRIPTION OF SYMBOLS 1 ... Ultrasonic irradiation part, 2 ... Top plate, 3 ... Ultrasonic vibrator, 4 ...
Electrode surface, 5: back plate, 6: ultrasonic focus, 7: center of ultrasonic sound source, 8: radius of the ring of the nth ultrasonic vibrator from the center of the ultrasonic sound source, 9, 10, 11 ... A- Spatial arrangement of ultrasonic transducers in section A, 12 ... Center of ultrasonic sound source, 13 ...
Tubes, 14, 15 ... electrodes, 16 ... focused ultrasound generator, 17
... Driver for the focused ultrasonic generator.
フロントページの続き (72)発明者 明渡 純 茨城県つくば市並木１−２ 工業技術院機 械技術研究所内 (72)発明者 一木 正聡 茨城県つくば市並木１−２ 工業技術院機 械技術研究所内Continued on the front page (72) Inventor Jun Akito 1-2 Namiki, Tsukuba, Ibaraki Pref. Inside the Institute of Mechanical Engineering, Institute of Industrial Science and Technology (72) Inventor Masatoshi Ichiki 1-2 Namiki, Tsukuba, Ibaraki Pref. In the laboratory
Claims (5)
集束させたい点あるいは線から、超音波振動子を配置す
る平面あるいは曲面上の、超音波の位相に換算して同位
相となる距離の位置に複数の超音波振動子が配置された
超音波照射部と、前記集束点あるいは線に超音波を集束
させる手段と、を有することを特徴とした集束超音波発
生装置。1. An ultrasonic transducer driving circuit and a point or a line where an ultrasonic wave is to be focused are converted into a phase of the ultrasonic wave on a plane or a curved surface on which the ultrasonic transducer is arranged, and are converted into the same phase. A focused ultrasound generator comprising: an ultrasound irradiator in which a plurality of ultrasound transducers are arranged at a certain distance; and means for focusing ultrasound at the focusing point or line.
おいて、超音波振動子の厚みがλ／２であることを特徴
とした集束超音波発生装置。2. The focused ultrasonic generator according to claim 1, wherein the thickness of the ultrasonic vibrator is λ / 2.
おいて、超音波振動子の厚みがλ／４であることを特徴
とした集束超音波発生装置。3. The focused ultrasonic generator according to claim 1, wherein the thickness of the ultrasonic vibrator is λ / 4.
おいて、超音波振動子の幅が使用する超音波の波長のλ
／２以下であることを特徴とした集束超音波発生装置。4. The focused ultrasonic generator according to claim 1, wherein the width of the ultrasonic transducer is λ of the wavelength of the ultrasonic wave to be used.
/ 2 or less.
の超音波振動子と、超音波振動子の上面と下面に配置さ
れた電極と、を有し、複数の超音波振動子の各々に設置
された電極に電界を印加して、超音波振動子から超音波
を発生させること特徴とした集束超音波発生装置。5. A plurality of ultrasonic vibrators having a plurality of cylindrical ultrasonic vibrators sandwiched between two plates and having different diameters, and electrodes disposed on upper and lower surfaces of the ultrasonic vibrator. A focused ultrasonic generator characterized by generating an ultrasonic wave from an ultrasonic transducer by applying an electric field to electrodes provided on each of the transducers.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32265297A JP3706899B2 (en) | 1997-11-25 | 1997-11-25 | Focused ultrasonic generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32265297A JP3706899B2 (en) | 1997-11-25 | 1997-11-25 | Focused ultrasonic generator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11156298A true JPH11156298A (en) | 1999-06-15 |
| JP3706899B2 JP3706899B2 (en) | 2005-10-19 |
Family
ID=18146096
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32265297A Expired - Lifetime JP3706899B2 (en) | 1997-11-25 | 1997-11-25 | Focused ultrasonic generator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3706899B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021095898A1 (en) * | 2019-11-11 | 2021-05-20 | 재단법인 파동에너지 극한제어연구단 | Ultrasonic wave transmission structure |
| CN116078648A (en) * | 2023-03-08 | 2023-05-09 | 福州大学 | Ultrasonic array plate |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12032770B2 (en) | 2020-11-23 | 2024-07-09 | Toyota Motor Engineering & Manufacturing North America, Inc. | Haptic array device and control of focus point height and focus point direction |
-
1997
- 1997-11-25 JP JP32265297A patent/JP3706899B2/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021095898A1 (en) * | 2019-11-11 | 2021-05-20 | 재단법인 파동에너지 극한제어연구단 | Ultrasonic wave transmission structure |
| KR20210057286A (en) * | 2019-11-11 | 2021-05-21 | 재단법인 파동에너지 극한제어 연구단 | Ultrasonic delivery structure |
| US11980915B2 (en) | 2019-11-11 | 2024-05-14 | Center For Advanced Meta-Materials | Ultrasonic transmission structure |
| CN116078648A (en) * | 2023-03-08 | 2023-05-09 | 福州大学 | Ultrasonic array plate |
| CN116078648B (en) * | 2023-03-08 | 2024-04-30 | 福州大学 | Ultrasonic array plate |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3706899B2 (en) | 2005-10-19 |
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