JPH1114684A - Space charge measuring apparatus - Google Patents
Space charge measuring apparatusInfo
- Publication number
- JPH1114684A JPH1114684A JP21143397A JP21143397A JPH1114684A JP H1114684 A JPH1114684 A JP H1114684A JP 21143397 A JP21143397 A JP 21143397A JP 21143397 A JP21143397 A JP 21143397A JP H1114684 A JPH1114684 A JP H1114684A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- space charge
- piezoelectric element
- sample
- voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
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- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明はパルス静電応力法を
利用した空間電荷測定装置に関するもので、特に測定試
料が絶縁破壊するときの局部的な空間電荷を測定できる
装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a space charge measuring device using a pulse electrostatic stress method, and more particularly to a device capable of measuring a local space charge when a dielectric breakdown of a measurement sample occurs.
【０００２】[0002]
【従来の技術】従来よりパルス静電応力法を利用した空
間電荷測定技術として、特開平4-52566号公報、特開平8
-5690号公報、特開平8-122385号公報記載のものが知ら
れている。パルス静電応力法は、絶縁体試料を電極で挾
み、空間電荷が蓄積されている試料に高電圧パルスを印
加し、試料中の電荷に静電力を作用させて試料に歪みを
生じさせ、この歪みによって発生する弾性波を圧電素子
で検出する方法である。特に、上記公報のうち特開平8-
5690号公報は、試料に比べて十分小さい圧電素子を複数
個配列し、試料の局部的な空間電荷を測定する方法を開
示している。2. Description of the Related Art Conventionally, as a space charge measurement technique using a pulse electrostatic stress method, Japanese Patent Application Laid-Open Nos.
JP-A-5690 and JP-A-8-122385 are known. In the pulse electrostatic stress method, an insulator sample is sandwiched between electrodes, a high voltage pulse is applied to the sample in which space charge is accumulated, and an electrostatic force is applied to the charge in the sample to cause distortion in the sample. In this method, an elastic wave generated by the distortion is detected by a piezoelectric element. In particular, of the above publications,
No. 5690 discloses a method of arranging a plurality of piezoelectric elements sufficiently smaller than a sample and measuring a local space charge of the sample.
【０００３】[0003]
【発明が解決しようとする課題】しかし、上記のいずれ
の技術においても試料に装着される電極の面積が大き
く、電極の特定部分で必ず絶縁破壊するようになされて
いないため、絶縁破壊起点部分の局部的な空間電荷を測
定することができない。However, in any of the above techniques, since the area of the electrode mounted on the sample is large and the dielectric breakdown is not necessarily caused at a specific portion of the electrode, the dielectric breakdown starting point portion is not required. Local space charge cannot be measured.
【０００４】従って、本発明の主目的は、測定試料が絶
縁破壊するときの局部的な空間電荷を測定できる装置を
提供することにある。Accordingly, an object of the present invention is to provide an apparatus capable of measuring a local space charge when a dielectric breakdown of a measurement sample occurs.
【０００５】[0005]
【課題を解決するための手段】本発明は上記の目的を達
成するためになされたもので、その特徴は、絶縁体試料
を挾む一方の電極と他方の電極とを有し、一方の電極に
パルス電圧を印加する手段と、他方の電極に装着されて
パルス電圧の印加に伴って発生する弾性波を検出する圧
電素子と、圧電素子の出力信号から空間電荷の分布を測
定する手段とを具える空間電荷測定装置において、一方
の電極を絶縁体試料中に差し込まれる針電極とし、その
先端の曲率径を１０以上１００μｍ以下として、圧電素
子の大きさを１mm2 以下としたことにある。SUMMARY OF THE INVENTION The present invention has been made to achieve the above-mentioned object, and has a feature that one of the electrodes sandwiches an insulator sample and the other electrode, and the one electrode is provided. Means for applying a pulse voltage to the piezoelectric element, a piezoelectric element attached to the other electrode for detecting an elastic wave generated by the application of the pulse voltage, and means for measuring a space charge distribution from an output signal of the piezoelectric element. In the space charge measuring device provided, one of the electrodes is a needle electrode inserted into an insulator sample, the tip of which has a curvature diameter of 10 to 100 μm and the size of the piezoelectric element is 1 mm 2 or less.
【０００６】[0006]
【発明の実施の形態】以下、本発明の実施の形態を図１
に基づいて説明する。図１は本発明装置の構成を示す説
明図である。FIG. 1 is a block diagram showing an embodiment of the present invention.
It will be described based on. FIG. 1 is an explanatory diagram showing the configuration of the device of the present invention.
【０００７】本発明装置は絶縁油２を貯溜する油槽１内
と、試料３の一方に装着される針電極４（高圧側電極）
と、試料３の他方に装着されると共に油槽１の底面から
外部に露出するアース側電極５を具えている。絶縁体試
料３は絶縁油２内に浸漬されており、試料３の上面から
針電極４が差し込まれ、試料３の下面における針電極４
と対向する位置にはアース側電極５が当接されている。[0007] The apparatus of the present invention comprises a needle electrode 4 (high-voltage side electrode) mounted in an oil tank 1 for storing insulating oil 2 and one of samples 3.
And an earth electrode 5 attached to the other side of the sample 3 and exposed to the outside from the bottom surface of the oil tank 1. The insulator sample 3 is immersed in the insulating oil 2, the needle electrode 4 is inserted from the upper surface of the sample 3, and the needle electrode 4 on the lower surface of the sample 3.
The ground-side electrode 5 is in contact with a position opposite to.
【０００８】ここで、針電極４の先端曲率径は１０以上
１００μｍ以下とする。針電極４により、絶縁破壊の発
生する極めて局所的な高電界を発生させることができ
る。この曲率が１０μｍ未満では針電極先端の空間電荷
緩和効果が顕著になり、その部分での電界の計算が困難
となる。逆に、１００μｍを超えると破壊電界近傍まで
針電極先端の局所電界を高めることが難しい。[0008] Here, the tip curvature diameter of the needle electrode 4 is set to 10 or more and 100 µm or less. The needle electrode 4 can generate an extremely local high electric field at which dielectric breakdown occurs. When the curvature is less than 10 μm, the effect of relaxing the space charge at the tip of the needle electrode becomes remarkable, and it becomes difficult to calculate the electric field in that portion. Conversely, if it exceeds 100 μm, it is difficult to increase the local electric field at the tip of the needle electrode to near the breakdown electric field.
【０００９】この針電極４につながるリード線は途中で
二股に別れ、一方は結合コンデンサ６を介して高圧パル
ス発生器７に接続され、他方は高圧直流電源８に接続さ
れている。これにより、針電極４を通じて試料３に直流
高電圧および高圧パルスを印加することができる。The lead wire connected to the needle electrode 4 is split into two branches in the middle. One is connected to a high-voltage pulse generator 7 via a coupling capacitor 6, and the other is connected to a high-voltage DC power supply 8. Thereby, a DC high voltage and a high voltage pulse can be applied to the sample 3 through the needle electrode 4.
【００１０】また、油槽１の底部から露出したアース側
電極５の下面（試料との接触面と反対側）には圧電素子
９が装着されている。圧電素子９は高圧パルスの印加に
伴って試料３に歪みを生じさせ、その歪みによって生じ
る弾性波を検出して電気信号として出力する。ここで、
この圧電素子９の面積は１mm2 以下とする。本例では１
mm×１mmの圧電素子とした。１mm2 を超える大きさの圧
電素子では、針電極以外の部分の空間電荷を併せて測定
してしまうため分解能が低下するからである。この圧電
素子９にはポリフッ化ビニリデン等を、前記のアース電
極５にはアルミ等を用いることができる。A piezoelectric element 9 is mounted on the lower surface of the earth electrode 5 exposed from the bottom of the oil tank 1 (on the side opposite to the sample contact surface). The piezoelectric element 9 generates a distortion in the sample 3 in response to the application of the high-voltage pulse, detects an elastic wave generated by the distortion, and outputs it as an electric signal. here,
The area of the piezoelectric element 9 is 1 mm 2 or less. In this example, 1
It was a piezoelectric element of mm × 1 mm. This is because, in a piezoelectric element having a size exceeding 1 mm 2 , the space charge of a portion other than the needle electrode is also measured, so that the resolution is reduced. The piezoelectric element 9 can be made of polyvinylidene fluoride or the like, and the ground electrode 5 can be made of aluminum or the like.
【００１１】そして、圧電素子９は、同素子９からの信
号を増幅する広帯域アンプ10に接続され、さらに信号を
表示するオシロスコープ11および信号から空間電荷分布
を演算するコンピュータ12に接続されている。空間電荷
分布の演算は、圧電素子９の出力信号レベルが試料内部
の空間電荷量に依存しており、高圧パルスの印加から弾
性波が検出されるまでの時間が電荷蓄積位置からの距離
に依存していることから求める。The piezoelectric element 9 is connected to a broadband amplifier 10 for amplifying a signal from the element 9, and further connected to an oscilloscope 11 for displaying a signal and a computer 12 for calculating a space charge distribution from the signal. In the calculation of the space charge distribution, the output signal level of the piezoelectric element 9 depends on the amount of space charge inside the sample, and the time from application of a high-voltage pulse to detection of an elastic wave depends on the distance from the charge accumulation position. Ask from what you do.
【００１２】上記のような装置において空間電荷の測定
を行うには、まず高圧直流電源８から針電極４に電圧を
印加して試料３に電荷を蓄積させる。その状態で高圧パ
ルス発生器７から同じく針電極４を通して高圧パルス
（例えば0.5 〜１kv）を短時間（例えば５〜50nsec）印
加する。そのとき、試料には電荷が蓄積され、針電極４
の先端は極めて局部的な箇所に電界を発生できるため、
絶縁破壊は必ず針電極４の先端から発生する。さらに圧
電素子９の面積も小さいため非常に限られた範囲の弾性
波を検知することができる。そのため、この圧電素子９
の出力信号より絶縁破壊時の空間電荷を測定することが
できる。To measure the space charge in the above-described apparatus, first, a voltage is applied to the needle electrode 4 from the high-voltage DC power supply 8 to accumulate the charge in the sample 3. In this state, a high-voltage pulse (for example, 0.5 to 1 kv) is applied from the high-voltage pulse generator 7 through the needle electrode 4 for a short time (for example, 5 to 50 nsec). At that time, charge is accumulated in the sample, and the needle electrode 4
Since the tip of can generate an electric field in a very local place,
The dielectric breakdown always occurs from the tip of the needle electrode 4. Further, since the area of the piezoelectric element 9 is small, it is possible to detect an elastic wave in a very limited range. Therefore, this piezoelectric element 9
The space charge at the time of dielectric breakdown can be measured from the output signal of.
【００１３】[0013]
【発明の効果】以上説明したように、本発明装置によれ
ば針電極と小面積の圧電素子を用いることで極めて局部
的な空間電荷の分布を測定することができる。As described above, according to the apparatus of the present invention, a very local space charge distribution can be measured by using a needle electrode and a small-area piezoelectric element.
【図１】本発明装置の概略構成を示す説明図である。FIG. 1 is an explanatory diagram showing a schematic configuration of a device of the present invention.
１ 油槽 ２ 絶縁油 ３ 試料 ４ 針電極 ５ アース側電極 ６ 結合コンデンサ ７ 高圧パルス発生器 ８ 高圧直流電源 ９ 圧電素子 10 広帯域アンプ 11 オシロスコープ 12 コンピュータ DESCRIPTION OF SYMBOLS 1 Oil tank 2 Insulating oil 3 Sample 4 Needle electrode 5 Earth electrode 6 Coupling capacitor 7 High voltage pulse generator 8 High voltage DC power supply 9 Piezoelectric element 10 Broadband amplifier 11 Oscilloscope 12 Computer
Claims (1)
極とを有し、一方の電極にパルス電圧を印加する手段
と、他方の電極に装着されてパルス電圧の印加に伴って
発生する弾性波を検出する圧電素子と、圧電素子の出力
信号から空間電荷の分布を測定する手段とを具える空間
電荷測定装置において、 前記一方の電極は、絶縁体試料中に差し込まれる針電極
で、その先端の曲率径が１０以上１００μｍ以下であ
り、 前記圧電素子の大きさを１mm2 以下としたことを特徴と
する空間電荷測定装置。A means for applying a pulse voltage to one electrode and a means for applying a pulse voltage to the other electrode, the means being provided in response to the application of the pulse voltage; In a space charge measuring device comprising a piezoelectric element for detecting an elastic wave to be generated and a means for measuring a space charge distribution from an output signal of the piezoelectric element, the one electrode is a needle electrode inserted into an insulator sample. A space charge measuring device, wherein the tip has a curvature diameter of 10 or more and 100 μm or less, and the size of the piezoelectric element is 1 mm 2 or less.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21143397A JPH1114684A (en) | 1997-06-20 | 1997-06-20 | Space charge measuring apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21143397A JPH1114684A (en) | 1997-06-20 | 1997-06-20 | Space charge measuring apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH1114684A true JPH1114684A (en) | 1999-01-22 |
Family
ID=16605878
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21143397A Pending JPH1114684A (en) | 1997-06-20 | 1997-06-20 | Space charge measuring apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH1114684A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103576005A (en) * | 2013-11-25 | 2014-02-12 | 上海交通大学 | System for measuring space charges in solid dielectrics under needle-board electrodes |
| CN103884973A (en) * | 2014-04-14 | 2014-06-25 | 上海交通大学 | Needle-plate electrode medium space charge and partial-discharge ultrahigh-frequency signal synchronous measurement device |
-
1997
- 1997-06-20 JP JP21143397A patent/JPH1114684A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103576005A (en) * | 2013-11-25 | 2014-02-12 | 上海交通大学 | System for measuring space charges in solid dielectrics under needle-board electrodes |
| CN103884973A (en) * | 2014-04-14 | 2014-06-25 | 上海交通大学 | Needle-plate electrode medium space charge and partial-discharge ultrahigh-frequency signal synchronous measurement device |
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