JPH11145763A - Piezoelectric resonance part and its polarization processing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a piezoelectric resonance part with high accuracy and strength which requires no assembling process, can facilitate its polarization processing and also can be miniaturized. SOLUTION: A part main body 22 consists of an integrally baked layered product, including plural laminated ceramic layers, where a piezoelectric vibrator 25 is placed at an intermediate section of the layered product in its laminating direction with both ends of the vibrator 25 functioning as cases. Exciting internal electrodes and polarizing internal electrodes 26 and 27 are added for the vibrator 25. Then via hole connecting parts are prepared to secure electrical connection between the exciting internal electrodes used for the vibrator 25 and the input/ output terminal electrodes formed on the outer surface of the body 22. Furthermore, via hole connecting parts 39 and 40 are prepared to secure electrical connection between the electrodes 26, 27 and the polarizing terminal electrodes 37, 38 formed on the outer surface of the body 22 respectively.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric resonance component and a polarization processing method thereof, and more particularly, to a piezoelectric resonance component having a piezoelectric vibrator made of a piezoelectric ceramic whose piezoelectric characteristics are given by polarization processing, and a piezoelectric resonance component thereof. The present invention relates to a polarization processing method.

[0002]

2. Description of the Related Art FIGS. 7 and 8 are exploded perspective views of conventional piezoelectric resonance parts 1 and 2 which are of interest to the present invention, respectively. Each of the piezoelectric resonance components 1 and 2 includes a piezoelectric vibrator 3 prepared and polarized in advance. In order to seal the piezoelectric vibrator 3, in the piezoelectric resonance component 1 shown in FIG. 7, the piezoelectric vibrator 3 is housed in the case body 4 having a container shape, and the lid 5 is closed so as to close the opening of the case body 4. Is adhered to the case body 4. On the other hand, in the piezoelectric resonance component 2 shown in FIG. 8, the piezoelectric vibrator 3 is mounted on the substrate 6, and a container-like cap 7 is adhered to the substrate 6 so as to cover the piezoelectric vibrator 3.

[0003]

However, the conventional piezoelectric resonance component 1 shown in FIG.
And the case body 4 and the lid 5 are prepared separately from each other,
It is obtained by assembling these elements. Similarly, the conventional piezoelectric resonance component 2 shown in FIG. 8 is obtained by separately preparing the piezoelectric vibrator 3, the substrate 6, and the cap 7, and assembling these components.

[0004] Therefore, these piezoelectric resonance parts 1 and 2 have variations in the positional relationship between the components during assembly, variations in the manner of applying an adhesive for sealing, and the provision of a damper material for preventing vibration leakage. There is a problem that variations in the mode are likely to occur, and as a result, variations in performance are likely to occur. SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to solve the above-described problems, and basically does not require an assembling process, and can perform polarization processing after the form as a part is completed. An object of the present invention is to provide a component and a polarization processing method thereof.

[0005]

A piezo-resonant component according to the present invention is characterized by having the following configuration in order to solve the above-mentioned technical problems. That is, a piezoelectric resonance component according to the present invention includes a component main body obtained by integrally firing a laminated body including a plurality of laminated ceramic layers. Among the plurality of ceramic layers constituting the component main body, the ceramic layer located at least in the middle in the laminating direction has piezoelectricity.

A pair of first and second excitation internal electrodes and a pair of first and second excitation internal electrodes are sandwiched so as to sandwich at least a part of the above-described piezoelectric ceramic layer located at an intermediate portion in the laminating direction. And a second polarization internal electrode are individually formed inside the component body, whereby a portion sandwiched by the first and second excitation internal electrodes constitutes a piezoelectric vibrator. ,
The ceramic layers located at both ends in the stacking direction of the component body function as cases of the piezoelectric resonance component.

Further, on the outer surface of the component body and on one of the outermost ceramic layers, the above-mentioned first and second ceramic layers are provided.
The first and second input / output terminal electrodes electrically connected to the excitation internal electrodes are formed, and the first and second polarization electrodes are formed on the other outermost ceramic layer. First and second polarization terminal electrodes are formed to be electrically connected to the internal electrodes.

Also, inside the component body, there are first and second excitation internal electrodes and first and second input / output terminal electrodes for electrically connecting the first and second input / output terminal electrodes to each other. Are formed so as to penetrate a specific ceramic layer, and electrically connect the first and second internal electrodes for polarization to the first and second terminal electrodes for polarization, respectively. The first and second via connection portions for polarization are formed so as to penetrate a specific ceramic layer.

Further, inside the component body, first and second vibration-allowing cavities sandwiching the piezoelectric vibrator in the laminating direction are formed along the direction in which the ceramic layer extends. In the piezoelectric resonance component according to the present invention, the first and second polarization internal electrodes may be positioned so as to sandwich the first and second excitation internal electrodes according to the vibration frequency to be obtained. The first and second excitation internal electrodes may be positioned so as to sandwich the first and second polarization internal electrodes.

[0010] The present invention is also directed to a polarization processing method for a piezoelectric resonance component as described above. In this polarization processing method, a voltage is applied to the first and second polarization terminal electrodes, whereby the piezoelectric ceramic layer sandwiched between the first and second polarization internal electrodes is polarized.

[0011]

1 to 5 illustrate a piezoelectric resonance component 11 according to an embodiment of the present invention. More specifically, FIG. 1 is a perspective view showing the appearance of the piezoelectric resonance component 11 from above, FIG. 2 is a perspective view showing the appearance of the piezoelectric resonance component 11 from below, and FIG.
FIG. 4 is a cross-sectional view taken along a line III-III in FIG. 1, and FIG.
FIG. 5 is a cross-sectional view taken along a line IV-IV in FIG. 1, and FIG.

As shown in FIG. 5, the piezoelectric resonance component 11
A plurality of laminated ceramic layers 12, 13, 14, 1
A component body 22 having, for example, a rectangular parallelepiped shape obtained by integrally firing a laminate including 5, 16, 17, 18, 19, 20, and 21 is provided. These illustrated ceramic layers 1
2 to 21 are representative of a plurality of ceramic layers constituting the component main body 22. Actually, a ceramic layer (not shown) is provided between the ceramic layers 12 to 21.
If necessary, they may be interposed in a manner that does not hinder the electrical connection described later.

[0013] Of the plurality of ceramic layers 12 to 21, the ceramic layer 1 located at an intermediate portion in the laminating direction.
4 to 17 have piezoelectricity. In some embodiments, the ceramic layers 14 to 17 having piezoelectricity are obtained by firing ceramic green sheets containing lead zirconate titanate (PbZrTiO ₃ ) as a ceramic component. In addition, this is achieved in an integral firing step performed after obtaining a green laminate.

Further, among the plurality of ceramic layers 12 to 21, the ceramic layers 1 located at both ends in the laminating direction are arranged.
2 and 13 and 18 to 21 are made of a different material system from the ceramic layers 14 to 17 located in the above-described intermediate portion. The ceramic layers 12 and 13 and 18 to 21 preferably have relatively high mechanical strength and have dielectric properties. In one embodiment, Ba,
B ₄ C to those mainly composed of Al ₂ O ₃ and SiO ₂
Is obtained by sintering a ceramic green sheet having a ceramic component to which about 0.4% is added in an integrated sintering step of a green laminate described later.

Further, both ends and an intermediate portion in the laminating direction are
A ceramic layer, for example, a ceramic layer located between
13 and 18 indicate differences in the material system between the both ends and the middle part.
Can reduce differences in thermal behavior such as thermal expansion or contraction
It may be composed of a material system such as In this case,
Grease for ceramic layers 14-17
The sheet contains lead zirconate titanate as described above.
When used as a lamic component, for example, it is located at both ends
Ceramic for ceramic layers 12 and 19-21
The green sheet is cordierite (2MgO-2Al_Two
O_Three-5SiO _TwoAbout 5% lead borosilicate glass
Is used as a ceramic component,
For the ceramic layers 13 and 18 located between each
Ceramic green sheets are 50% cordierite and
50% lead zirconate titanate as ceramic component
What should I do?

The ceramic layers 12 to 21 may all be made of the same piezoelectric material. On the ceramic layers 15 and 16 having piezoelectricity located at the intermediate portion in the laminating direction, a pair of first and second ceramic layers is provided.
Are formed, respectively. These first and second internal electrodes for excitation 23 and 24 are connected to the ceramic layer 15 inside the component body 22.
Are sandwiched, and a portion sandwiched in this manner constitutes, for example, a piezoelectric vibrator 25 in a thickness longitudinal vibration mode.

On the other hand, at least the ceramic layers 12 and 21 located at both ends of the component body 22 in the laminating direction.
Functions as a case of the piezoelectric resonance component 1. The case is used to seal the piezoelectric vibrator 25 and to provide mechanical strength necessary for the piezoelectric resonance component 1. Therefore, the case is used for the ceramic layers 12 to 21 included in the component body 22. It is not always possible to clearly distinguish between those that work and those that do not.

Apart from the excitation internal electrodes 23 and 24, a pair of first and second polarization internal electrodes 26 are formed.
And 27 are formed. The first and second polarization internal electrodes 26 and 27 are formed on ceramic layers 14 and 17 having piezoelectricity located at an intermediate portion in the laminating direction, respectively. The first and second polarization internal electrodes 26 and 27 are in a positional relationship such that the ceramic layers 14 to 16 are sandwiched inside the component body 22.

In this embodiment, a load capacitance for forming an oscillation circuit in cooperation with the piezoelectric vibrator 25 is formed in the piezoelectric resonance component 11. This load capacity is determined by the ceramic layer 1
1 and 2 formed independently of each other on
And the third capacitance forming electrode 30 formed on the ceramic layer 20. The third capacitance forming electrode 30 faces the first and second capacitance forming electrodes 28 and 29 in common inside the component body 22 with the ceramic layer 19 interposed therebetween.

In one embodiment, each of the ceramic green sheets serving as the ceramic layers 19 and 20 has a thickness of 2 mm.
0 μm. On the outer surface of the component main body 22 and on one of the outermost ceramic layers 21, a second electrode electrically connected to both the first excitation internal electrode 23 and the first capacitance forming electrode 28. The second input / output terminal electrode 3 electrically connected to both the first input / output terminal electrode 31, the second excitation internal electrode 24, and the second capacitance forming electrode 29.
2 and a third input / output terminal electrode 33 electrically connected to the third capacitance forming electrode 30.

The first input / output via hole connection portion 34 is used to connect both the first excitation internal electrode 23 and the first capacitance forming electrode 28 to the first input / output terminal electrode 31. Are formed so as to penetrate the ceramic layers 15 to 21. Further, the second internal electrode for excitation 24 and the second
In order to connect both the capacitance forming electrodes 29 and the second input / output terminal electrode 32, the second input / output via hole connection portion 35 is formed so as to penetrate through the ceramic layers 16 to 21. Further, for connection between the third capacitance forming electrode 30 and the third input / output terminal electrode 33, a third input / output via hole connection portion 36 is formed so as to penetrate the ceramic layers 20 and 21. .

On the other hand, on the outer surface of the component body 22,
On the other outermost ceramic layer 12, first and second polarization terminal electrodes 37 and 38 electrically connected to the first and second polarization internal electrodes 26 and 27, respectively, are formed. . The above-described first internal electrode for polarization 26
In order to connect the first polarization via electrode 37 to the first polarization via electrode connection 37, the first polarization via hole connection portion 39 is connected to the ceramic layers 12 and 1.
3 is formed. In addition, for connection between the second polarization internal electrode 27 and the second polarization terminal electrode 38, a second polarization via hole connection portion 40 is formed so as to penetrate through the ceramic layers 12 to 16.

In order to form electrodes such as the internal electrodes 23 and 24 for excitation and via-hole connecting portions such as the input-output via-hole connecting portions 34 to 36, conductive materials include
For example, a material containing Ag / Pd as a main component is used, and for example, a printing method is applied. In addition, the excitation internal electrode 2
Electrodes such as 3 and 24 are formed with a thickness of, for example, 1 to 10 μm.

A piezoelectric vibrator 25 is provided inside the component body 22.
And second vibration-allowing cavities 41 that sandwich
And 42 are formed along the direction in which the ceramic layers 12 to 21 extend. In this embodiment, the first
Is provided with a depression formed by pressing a part of the lower surface of the ceramic layer 13 adjacent thereto, while the second vibration-allowing cavity 4 is provided.
2 is provided with a depression formed by pressing a part of the upper surface of the ceramic layer 18 adjacent thereto.

In one embodiment, each of the ceramic green sheets serving as the ceramic layers 13 and 18 has a thickness of 2 mm.
5 to 100 μm, and the vibration-allowing cavities 41 and 42
To form these ceramic green sheets.
By applying a press of 0 to 1500 kg / cm ² , a depression having a depth of 1 to 25 μm is formed. In addition, in order to form the vibration-allowing cavities 41 and 42, in addition to the above-described method of forming the depressions in the specific ceramic layers 13 and 18, for example, a method of punching a part of each of the ceramic layers 13 and 18, or A method may be used in which a material such as carbon paste, which can be burned off during firing, is provided on each of the ceramic layers 13 and 18 and the material is burned off into cavities 41 and 42 in a subsequent firing step. .

The component body 22 is provided with a piezoelectric vibrator 2 from the outside.
5, a frequency adjusting hole 43 communicating with the first vibration-allowing cavity 41 is provided. That is, the frequency adjusting hole 43 is provided so as to penetrate the ceramic layers 12 and 13. The frequency adjusting hole 43 is for externally applying a mass object 44 as shown in FIG. 3 on the surface of the piezoelectric vibrator 25 to adjust the frequency of the piezoelectric vibrator 25. In the illustrated embodiment, two frequency adjusting holes 43 are provided, but the number is arbitrary.

In order to obtain such a piezoelectric resonance component 1, ceramic green sheets to be each of a plurality of ceramic layers including ceramic layers 12 to 21 as shown in FIG. 5 are prepared. For each ceramic green sheet, the excitation internal electrodes 23 and 24, the polarization internal electrodes 26 and 27, the capacitance forming electrodes 28 to 30,
Input / output terminal electrodes 31-33, input / output via hole connection portions 34-36, polarization terminal electrodes 37 and 38, polarization via hole connection portions 39 and 40, vibration permitting cavity 41
And 42, and a step for forming each of the frequency adjusting holes 43 are performed.

Next, the ceramic layer 14 having piezoelectricity
17 are first laminated and pressed, and then all the ceramic layers 12 to 21 are pressed.
Ceramic green sheets are laminated and pressed. In one embodiment, in each of these pressing steps, a pressure of 1000-1500 kg / cm ² and 40
A temperature of ８０80 ° C. is provided.

The green laminate thus obtained is then subjected to an integral firing step. In one embodiment, firing is performed at a temperature of 1250 ° C. in an air atmosphere. Next, by applying a voltage to the first and second polarization terminal electrodes 37 and 38 on the outer surface of the fired laminate, a voltage is applied to the first and second polarization terminal electrodes 37 and 38. An electric field is applied between the first and second polarization internal electrodes 26 and 27 connected via the first and second polarization via hole connection portions 39 and 40, whereby the first and second polarization internal electrodes 26 and 27 are applied. Internal electrode for polarization 2
Ceramic layer 1 having piezoelectricity sandwiched between 6 and 27
4 to 16 are subjected to a polarization treatment, and a piezoelectric property is imparted thereto.

Thus, the piezoelectric resonance component 11 is completed. In the piezoelectric resonance component 11, a portion sandwiched between the first and second excitation internal electrodes 23 and 24 forms a piezoelectric vibrator 25. First and second excitation internal electrodes 23 and 24 for this piezoelectric vibrator 25
Are drawn out between the first and second input / output terminal electrodes 31 and 32 via the first and second input / output via hole connection portions 34 and 35, respectively. The vibration of the piezoelectric vibrator 25 is allowed by the first and second vibration allowance cavities 41 and 42.

The first to third capacitance forming electrodes 2
The load capacitance formed by 8 to 30 is inserted between each of the first and second input / output terminal electrodes 31 and 32 and the third input / output terminal electrode 33. After the completion of the piezoelectric resonance component 11 as described above, the piezoelectric vibrator 25
When the frequency adjustment is performed, as shown by the imaginary line in FIG.
5 is prepared, and this nozzle 45 is inserted into the frequency adjusting hole 43. In this state, the mass object 4 is passed through the nozzle 45.
4 is discharged. By applying the mass object 44 on the surface of the piezoelectric vibrator 25 in this manner, the mass in the vibration region of the piezoelectric vibrator 25 changes, and as a result, the vibration frequency of the piezoelectric vibrator 25 is adjusted. You. This operation is performed until a desired frequency is obtained. As the mass object 44, for example, a thermosetting resin is advantageously used.

FIG. 6 is a view corresponding to FIG. 5 for describing a piezoelectric resonance component 11a according to another embodiment of the present invention. In FIG. 6, elements corresponding to the elements shown in FIG. 5 are denoted by the same reference numerals, and redundant description will be omitted. When FIG. 6 is compared with FIG.
a, 13a, 14a, 15a, 16a, and 17a, and the same is true for the ceramic layers 18 to 21.

Among these differences, the ceramic layer 12
Regarding “a” and “13a”, only the arrangement of the frequency adjustment holes 43a is different, and there is no essential difference. On the other hand, with respect to the ceramic layers 14a to 17a, the form of formation of various electrodes and via-hole connecting portions is different. More specifically, a pair of first and second excitation internal electrodes 23a and 24a are formed on ceramic layers 14a and 17a having piezoelectricity located at an intermediate portion in the stacking direction, respectively. The first and second excitation internal electrodes 23a and 24a are in a positional relationship such that the ceramic layers 14a to 16a are sandwiched inside the component main body. Construct a piezoelectric vibrator.

The above-mentioned excitation internal electrodes 23a and 24
Apart from a, a pair of first and second internal electrodes for polarization 26a and 27a are formed on piezoelectric ceramic layers 15a and 16a located at an intermediate portion in the laminating direction, respectively. These first and second internal electrodes for polarization 26a and 27a are in a positional relationship such that the ceramic layer 15a is sandwiched inside the component body.

The first input / output via hole connecting portion 34a is used for connecting both the first excitation internal electrode 23a and the first capacitance forming electrode 28 to the first input / output terminal electrode 31. Are formed to penetrate through the ceramic layers 14a to 21. In order to connect both the second excitation internal electrode 24a and the second capacitance forming electrode 29 to the second input / output terminal electrode 32, the second input / output via hole connection portion 35a is formed of a ceramic layer. 17a to 21 are formed.

On the other hand, the first polarization internal electrode 26 described above is used.
a and the first polarization terminal electrode 37a.
Is connected to the ceramic layer 12a
To 14a. In addition, in order to connect the second polarization internal electrode 27a and the second polarization terminal electrode 38a, a second polarization via hole connection portion 40a is formed so as to penetrate through the ceramic layers 12a to 15a.

The other structure is substantially the same as that shown in FIG. Here, paying attention to the positional relationship between the internal electrodes for excitation and the internal electrodes for polarization, in the configuration shown in FIG. 5, the first and second internal electrodes 23 and 24 are sandwiched between the first and second internal electrodes for excitation. Since the two polarization internal electrodes 26 and 27 are located, the piezoelectric vibrator 25
And a fundamental wave in the thickness direction between the second excitation internal electrodes 23 and 24 is used. On the other hand, in the configuration shown in FIG. 6, the first and second excitation internal electrodes 23a and 24a are positioned so as to sandwich the first and second polarization internal electrodes 26a and 27a. In this positional relationship, the ceramic layers 14a, 15a and 16a have the same thickness as each other, and
Excitation internal electrode 23a and first polarization internal electrode 26a
When the distances between the second internal electrode 27a for polarization and the second internal electrode 24a for excitation are set to be equal to each other, a piezoelectric vibrator utilizing the third harmonic wave in the thickness vertical direction is formed. Can be.

[0038]

As described above, according to the present invention, the component body is obtained by integrally firing a laminated body including a plurality of laminated ceramic layers, and the component body in the stacking direction of the component body is obtained. Since the intermediate portion constitutes a piezoelectric vibrator, and both end portions in the laminating direction are made to function as a case, a piezoelectric vibrator including a conventional piezoelectric vibrator sealing step by applying an adhesive or the like is used. The step of assembling with the case becomes unnecessary, and therefore, the variation in the positional relationship of each element due to the assembly, the variation in the application mode of the adhesive for sealing, and the variation in the application mode of the damper material for preventing vibration leakage. There is no room for generating etc. Further, it is possible to obtain a structure in which vibration leakage from the piezoelectric vibrator is well suppressed.

Thus, a highly accurate piezoelectric resonance component can be obtained, and the strength of the piezoelectric resonance component can be increased. Further, the number of steps for obtaining the piezoelectric resonance component can be reduced. In addition, at least the first and second internal electrodes for excitation of the piezoelectric vibrator and the first and second input / output terminal electrodes formed on the outer surface of the component body are electrically connected. Therefore, first and second polarization internal electrodes for polarizing a piezoelectric ceramic constituting a piezoelectric vibrator and first and second polarization terminal electrodes formed on the outer surface of the component body. Since the via-hole connection portions are employed for each electrical connection with the piezoelectric element, the degree of freedom in design is increased, and the size of the piezoelectric resonance component can be reduced.

Further, since the internal electrode for polarization is provided separately from the internal electrode for excitation, this also contributes to the improvement of the degree of freedom in design, and from this, it is possible to change the pattern of the internal electrode for polarization. As a result, it becomes easy to obtain various desired vibration modes in the piezoelectric vibrator. Further, the mode and degree of polarization can be controlled more precisely.

For example, the first and second polarization internal electrodes may be positioned so as to sandwich the first and second excitation internal electrodes, or the first and second polarization internal electrodes may be sandwiched. By arranging the first and second internal electrodes for excitation so as to sandwich them, it is possible to determine a vibration frequency such as a fundamental wave or a third harmonic.
Further, according to the present invention, since the polarization processing can be performed at the stage when the form as the piezoelectric resonance component is prepared, the step of incorporating or attaching the piezoelectric vibrator after the polarization processing becomes unnecessary, and the characteristic fluctuation does not occur. . Also, after the form as a piezoelectric resonance component is prepared, there is no need to form an electrode by sputtering or the like for polarization,
Also in this respect, the number of steps for obtaining the piezoelectric resonance component can be reduced.

[Brief description of the drawings]

FIG. 1 shows a piezoelectric resonance component 11 according to an embodiment of the present invention.
FIG. 2 is a perspective view showing the appearance of the device from the upper surface side.

FIG. 2 is a perspective view showing the appearance of the piezoelectric resonance component 11 shown in FIG. 1 from the lower surface side.

FIG. 3 is a sectional view taken along line III-III in FIG. 1;

FIG. 4 is a sectional view taken along line IV-IV in FIG. 1;

5 is a perspective view showing typical ceramic layers 12 to 21 provided in the piezoelectric resonance component 11 shown in FIG. 1 separately from each other.

FIG. 6 shows a piezoelectric resonance component 1 according to another embodiment of the present invention.
FIG. 6 is a perspective view corresponding to FIG. 5, showing representative ceramic layers 12 a to 21 provided in 1 a separated from each other.

FIG. 7 is an exploded perspective view showing a conventional piezoelectric resonance component 1 which is interesting for the present invention.

FIG. 8 is an exploded perspective view showing another conventional piezoelectric resonance component 2 which is of interest to the present invention.

[Explanation of symbols]

 11, 11a Piezoelectric resonance parts 12 to 21, 12a to 17a Ceramic layer 22 Component body 23, 23a First excitation internal electrode 24, 24a Second excitation internal electrode 25 Piezoelectric vibrator 26, 26a First polarization Internal electrode 27, 27a Second internal electrode for polarization 31 First input / output terminal electrode 32 Second input / output terminal electrode 34, 34a First input / output via hole connection 35, 35a Second input / output Via-hole connection portions 37, 37a first polarization terminal electrode 38, 38a second polarization terminal electrode 39, 39a first polarization via-hole connection portion 40, 40a second polarization via-hole connection portion 41 first Vibration-allowing cavity 42 Second vibration-allowing cavity

Claims (4)

[Claims] 1. A component body obtained by integrally firing a laminated body including a plurality of laminated ceramic layers, and at least an intermediate portion in a laminating direction among the plurality of ceramic layers constituting the component body. The pair of first and second internal electrodes for excitation are formed so as to sandwich at least a part of the ceramic layer having piezoelectricity, which is located at an intermediate portion in the laminating direction, with the ceramic layer located therebetween. A pair of first and second internal electrodes for polarization are separately formed inside the component body, whereby a portion sandwiched between the first and second internal electrodes for excitation serves as a piezoelectric vibrator. And the ceramic layers located at both ends in the stacking direction of the component main body function as a case of the piezoelectric resonance component. First and second input / output terminals electrically connected to the first and second internal electrodes for excitation, respectively, on the outer surface of the component main body and on one of the outermost ceramic layers. And a second polarization terminal electrode electrically connected to the first and second polarization internal electrodes, respectively, on the other outermost ceramic layer. The first and second excitation internal electrodes and the first and second input / output terminal electrodes for electrically connecting the first and second excitation internal electrodes and the first and second input / output terminal electrodes to each other are formed inside the component body. Second
Are formed so as to penetrate the specific ceramic layer, and the first and second polarization internal electrodes and the first and second polarization terminal electrodes are respectively connected to each other. First for electrical connection
And a second polarization via-hole connecting portion is formed so as to penetrate the specific ceramic layer. Further, inside the component body, first and second vibration permitting portions sandwiching the piezoelectric vibrator in a stacking direction are provided. A piezoelectric resonance component, wherein a cavity for use is formed along a direction in which the ceramic layer extends. 2. The piezoelectric resonance component according to claim 1, wherein said first and second polarization internal electrodes are positioned so as to sandwich said first and second excitation internal electrodes. 3. The piezoelectric resonance component according to claim 1, wherein the first and second excitation internal electrodes are positioned so as to sandwich the first and second polarization internal electrodes. 4. The polarization processing method for a piezoelectric resonance component according to claim 1, wherein a voltage is applied to the first and second polarization terminal electrodes so that the first and second polarization terminal electrodes are applied. A polarization processing method for a piezoelectric resonance component, wherein polarization processing is performed on the piezoelectric ceramic layer sandwiched between the second polarization internal electrodes.