JPH1114310A - Three-dimensional position measuring device - Google Patents
Three-dimensional position measuring deviceInfo
- Publication number
- JPH1114310A JPH1114310A JP9166886A JP16688697A JPH1114310A JP H1114310 A JPH1114310 A JP H1114310A JP 9166886 A JP9166886 A JP 9166886A JP 16688697 A JP16688697 A JP 16688697A JP H1114310 A JPH1114310 A JP H1114310A
- Authority
- JP
- Japan
- Prior art keywords
- dimensional
- position measuring
- image
- moving device
- dimensional position
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は３次元位置測定装置
に関し、特に微細な針状物体の先端位置を１０〜１００
mmの範囲で１〜１０μｍの精度で測定可能な３次元位置
測定装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a three-dimensional position measuring apparatus, and more particularly, to a method for measuring the position of the tip of a fine needle-like object from 10 to 100.
The present invention relates to a three-dimensional position measuring device capable of measuring with an accuracy of 1 to 10 μm in a range of mm.
【０００２】[0002]
【従来の技術】３次元位置測定法としては、特開平6−1
09442 号公報に開示されている直交するスリット光を用
いてテレビカメラで光切断像を検出する方法、また、あ
る程度大きさのある物体の位置計測については、レーザ
光を使用してその反射光を検出する方法等が一般的に用
いられている。しかし、先が尖った微細な針状物体の先
端位置検出には先端に光を合わせることが困難なことか
ら、これらの方法は適さない。2. Description of the Related Art A three-dimensional position measuring method is disclosed in
No. 09442 discloses a method of detecting a light cut image with a television camera using orthogonal slit light, and a method of measuring the position of an object having a certain size by using a laser beam to reflect the reflected light. A detection method and the like are generally used. However, these methods are not suitable for detecting the position of the tip of a fine needle-like object having a sharp point because it is difficult to focus light on the tip.
【０００３】特開平6−249627 号公報に開示されている
２台のテレビカメラを用いたステレオ写真法等があるが
この方法ではテレビ画像から物体の位置を検出するため
光学系に歪みが少ない等の高精度が要求される。あるい
は基準マーカを用いて光学系の歪みを補正する必要があ
る。２台のテレビカメラと９０°に配置した二つのミラ
ーを用いて対象物体が常に各テレビカメラの視野の中心
になるようにサーボ系を構成して物体位置を計測する方
法が特開平6−82467号公報に開示されている。この方法
ではテレビカメラの光学系の歪みは問題とならないが、
ミラーの歪みは測定誤差に影響する。また、ミラーのサ
ーボ系が４組必要となり装置が複雑になる。[0003] There is a stereo photography method using two television cameras disclosed in Japanese Patent Application Laid-Open No. 6-249627. In this method, the position of an object is detected from a television image, so that the optical system has little distortion. High precision is required. Alternatively, it is necessary to correct the distortion of the optical system using a reference marker. Japanese Patent Laid-Open No. 6-82467 discloses a method for measuring the position of an object by using two television cameras and two mirrors arranged at 90 ° to form a servo system so that the target object is always at the center of the field of view of each television camera. No. 6,086,045. With this method, the distortion of the optical system of the TV camera is not a problem,
Mirror distortion affects measurement errors. Further, four sets of mirror servo systems are required, and the apparatus becomes complicated.
【０００４】[0004]
【発明が解決しようとする課題】本発明の目的は、簡単
な方法で１〜１０μｍの精度で、微細な針状物体の先端
位置が測定可能な３次元位置測定装置を提供することに
ある。SUMMARY OF THE INVENTION It is an object of the present invention to provide a three-dimensional position measuring apparatus capable of measuring the position of the tip of a fine needle-like object with a simple method at an accuracy of 1 to 10 .mu.m.
【０００５】[0005]
【課題を解決するための手段】本発明の構成は、２台の
テレビカメラと画像合成器，モニタテレビ，ＸＹＺ３次
元移動装置を用い、２台のテレビカメラは光軸をある角
度を持って同一平面上で、移動距離が読み取れる表示を
有する３次元移動装置上に設置する。２台のテレビカメ
ラの光軸の交点が各テレビカメラの光学系の焦点になる
ように設定し、２台のテレビカメラの出力画像を合成し
て一つのモニタ画面に映し出すとともに、モニタ画面に
中央位置を示す表示を重ね合わせて出し、針状物体の先
端位置の画像がモニタ画面の中央位置になるように３次
元移動装置を動作させ、３次元移動装置の移動距離表示
を読み取ることにより針状物体の先端位置測定が実現で
きる。The structure of the present invention uses two television cameras, an image synthesizer, a monitor television and an XYZ three-dimensional moving device, and the two television cameras have the same optical axis at an angle. It is installed on a three-dimensional moving device having a display on which a moving distance can be read on a plane. The intersection of the optical axes of the two TV cameras is set so as to be the focal point of the optical system of each TV camera, the output images of the two TV cameras are combined and projected on one monitor screen, and the center is displayed on the monitor screen. The three-dimensional moving device is operated so that the image indicating the position of the tip of the needle-shaped object is located at the center position of the monitor screen, and the moving distance display of the three-dimensional moving device is read. Measurement of the tip position of an object can be realized.
【０００６】[0006]
【発明の実施の形態】以下、本発明の実施例を図１に示
す一実施例により説明する。全体は、図示していない装
置に取り付けられた測定対象である針状物体１，２台の
テレビカメラ２，３とその取り付け板４，画像合成器
５，モニタテレビ６，３次元移動装置であるＸＹＺステ
ージ７，グラスファイバ式の照明用光源８で構成され
る。２台のテレビカメラ２，３は各光軸をある角度を持
って同一平面になるように取り付け板４に取り付けら
れ、さらに、移動距離が読み取れる表示を有するＸＹＺ
ステージ７上に設置される。また、２台のテレビカメラ
２，３の光軸の交点が各テレビカメラ２，３の光学系の
焦点になるように設定される。２台のテレビカメラ２，
３による、図示していない装置に取り付けられた測定対
象である針状物体１の出力画像は、一般的な二つの画像
を一つに合成する画像合成器５で一つの画面に合成され
てモニタテレビ６の画面に映し出される。モニタテレビ
６の画面には中央位置を示す表示（図１では縦横の線）
も２台のテレビカメラ２，３の出力合成画像に重ね合わ
せて出される。針状物体１の先端位置の画像がモニタテ
レビ６の画面の中央位置になるようにＸＹＺステージ７
を動作させる。ＸＹＺステージ７の移動距離表示を読み
取ることにより針状物体１の先端位置測定が実現でき
る。DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to an embodiment shown in FIG. The whole is a needle-shaped object to be measured attached to a device (not shown), one or two television cameras 2 and 3, and their mounting plates 4, an image synthesizer 5, a monitor television 6, and a three-dimensional moving device. It comprises an XYZ stage 7 and a glass fiber type illumination light source 8. The two television cameras 2 and 3 are mounted on a mounting plate 4 so that their optical axes are at the same angle and at the same plane, and further, XYZ having a display from which the moving distance can be read.
It is installed on the stage 7. The intersection of the optical axes of the two television cameras 2 and 3 is set so as to be the focal point of the optical system of each television camera 2 and 3. Two TV cameras 2,
3, an output image of the needle-like object 1 to be measured attached to an apparatus (not shown) is synthesized on a single screen by an image synthesizer 5 for synthesizing two general images into one and monitored. The image is displayed on the screen of the television 6. Display indicating the center position on the screen of the monitor TV 6 (vertical and horizontal lines in FIG. 1)
Are also superimposed on the output composite images of the two television cameras 2 and 3. XYZ stage 7 so that the image at the tip of needle-like object 1 is at the center of the screen of monitor television 6.
To work. By reading the display of the moving distance of the XYZ stage 7, the tip position of the needle-shaped object 1 can be measured.
【０００７】図２に図１の装置を横からみた構成を示
す。図２では、ＸＹＺステージ７は２段にして下のステ
ージで原点を合わせ、上のステージで位置測定を行う構
成にしてある。微動ステージには移動距離の目盛りの付
いたバーニアダイヤルがあり、この目盛りを読み取るこ
とで位置の測定ができる。FIG. 2 shows a configuration of the apparatus of FIG. 1 as viewed from the side. In FIG. 2, the XYZ stage 7 has a configuration in which the origin is adjusted at the lower stage and the position is measured at the upper stage. The fine movement stage has a vernier dial with a scale of the moving distance, and the position can be measured by reading the scale.
【０００８】図３にモニタテレビ６の画面の例を示す。
図３は、測定対象を中央に合わせ（ａ）、その後、括弧
内に示すＸＹＺの方向に対象を移動させた時の画像
（ｂ）〜（ｆ）である。ＸＹＺの方向は、Ｘはテレビカ
メラ２，３の設置方向に対して横方向で右が＋、Ｙは上
下方向で上が＋、Ｚは前後方向で手前が＋である。この
モニタテレビ６の画面を見ながらＸＹＺステージ７のバ
ーニアダイヤルを動かしてＸＹＺステージ７の位置を変
化させ、画像が図３（ａ）になるように合わせる。移動
前と移動後のバーニアの目盛りの読みの差から対象の３
次元位置が測定できる。また、移動距離もＤ＝ＳＱＲ
{(Ｘi−Ｘ0)2＋(Ｙi−Ｙ0)2＋(Ｚi−Ｚ0)2}から求めら
れる（ＳＱＲは平方根である）。FIG. 3 shows an example of a screen of the monitor television 6.
FIG. 3 shows images (b) to (f) when the measurement target is set at the center (a), and then the target is moved in the XYZ directions shown in parentheses. As for the XYZ directions, X is + on the right side in the horizontal direction with respect to the installation direction of the television cameras 2 and 3, Y is + on the up and down direction, and Z is + on the front and rear direction. By moving the vernier dial of the XYZ stage 7 while watching the screen of the monitor television 6, the position of the XYZ stage 7 is changed, and the image is adjusted so as to be as shown in FIG. From the difference between the readings of the vernier scale before and after the movement, 3
The dimensional position can be measured. Also, the moving distance is D = SQR
{(X i −X 0 ) 2 + (Y i −Y 0 ) 2 + (Z i −Z 0 ) 2 } (SQR is a square root).
【０００９】本方法では、画像は常に図３（ａ）になる
ように合わせられるので、光学系の歪みやテレビカメラ
２，３の取り付け位置，角度による測定誤差は発生しな
い。誤差はＸＹＺステージ７の位置変化の誤差（バック
ラッシュ等も含む）に起因するのみである。テレビカメ
ラ２，３の光学系や、モニタテレビ６の画面の倍率，解
像力，ＸＹＺステージ７のバーニアの目盛り等によって
測定の分解能が決定される。通常市販されているＸＹＺ
ステージの精度は１〜５μｍである。バーニアの目盛り
も１μｍや１０μｍのものがあり、その１／２〜１／５
までは読み取ることができる。In this method, since the images are always adjusted so as to be as shown in FIG. 3A, no distortion of the optical system and no measurement error due to the mounting positions and angles of the television cameras 2 and 3 occur. The error is only caused by an error in position change of the XYZ stage 7 (including backlash and the like). The resolution of the measurement is determined by the optical system of the television cameras 2 and 3, the magnification of the screen of the monitor television 6, the resolution, the vernier scale of the XYZ stage 7, and the like. XYZ which is usually marketed
The precision of the stage is 1-5 μm. Vernier scales are also available at 1 μm and 10 μm.
Until it can be read.
【００１０】テレビカメラ２，３の取り付け角度は、０
°や１８０°、それに近い角度でなければ良く、９０°
に合わせる必要はない。The mounting angle of the TV cameras 2 and 3 is 0
° or 180 °, if it is not close to it, 90 °
There is no need to match.
【００１１】本説明では、ＸＹＺステージ７は手動で合
わせることで説明したが、電動式ＸＹＺステージを使用
しても良く、その場合は、パルスモータへの印加パルス
数から移動距離を算出すれば良い。移動距離が表示され
るコントローラも市販されている。また、図３に示すよ
うに画像が単純であるから、画像処理装置を用いて図３
（ａ）になるように電動式ＸＹＺステージで追尾して自
動測定ができるようにしても良い。画像処理は、線分の
交点を求める方法で、二つの線分の一端が一致しかつ中
央になるように追尾させれば良く、線分の交差の状態に
よって、動かす方向が決まるので、処理は簡単になる。In this description, the XYZ stage 7 has been described as being manually adjusted. However, an electrically driven XYZ stage may be used. In this case, the moving distance may be calculated from the number of pulses applied to the pulse motor. . Controllers that display the moving distance are also commercially available. In addition, since the image is simple as shown in FIG.
As shown in (a), the automatic measurement may be performed by tracking with an electric XYZ stage. The image processing is a method of finding the intersection of the line segments, and it is sufficient to perform tracking so that one end of the two line segments is coincident and located at the center, and the direction of movement is determined by the state of intersection of the line segments. It's easy.
【００１２】以上の本発明の方法により、２台のテレビ
カメラと画像合成器とＸＹＺステージにより、ＸＹＺス
テージの移動目盛りを読み取ることで簡単な構成で容易
に微細な針状物体等の先端の３次元位置測定が可能にな
る。According to the above-described method of the present invention, the moving scale of the XYZ stage is read by the two television cameras, the image synthesizer and the XYZ stage, so that the tip of the fine needle-shaped object or the like can be easily formed with a simple configuration. Dimensional position measurement becomes possible.
【００１３】[0013]
【発明の効果】以上説明したように、２台のテレビカメ
ラと画像合成器とＸＹＺステージにより、微細な針状物
体等の先端の３次元位置測定が可能となる。As described above, it is possible to measure the three-dimensional position of the tip of a fine needle-like object or the like by using two television cameras, an image synthesizer, and an XYZ stage.
【図１】本発明の一実施例である３次元移動装置の説明
図である。FIG. 1 is an explanatory diagram of a three-dimensional moving device according to an embodiment of the present invention.
【図２】本発明の一実施例の構成の横から見た図で、Ｘ
ＹＺステージを２段構成にした図である。FIG. 2 is a side view of a configuration of an embodiment of the present invention,
FIG. 3 is a diagram in which a YZ stage has a two-stage configuration.
【図３】本発明の一実施例に示す２台のテレビカメラの
映像を画像合成器で合成したモニタテレビの画像の例を
示す図である。FIG. 3 is a diagram showing an example of an image on a monitor television in which images from two television cameras shown in an embodiment of the present invention are synthesized by an image synthesizer.
１…針状物体、２，３…テレビカメラ、４…カメラ取り
付け板、５…画像合成器、６…モニタテレビ、７…ＸＹ
Ｚステージ、８…照明用光源。DESCRIPTION OF SYMBOLS 1 ... Needle-like object, 2, 3 ... TV camera, 4 ... Camera mounting plate, 5 ... Image synthesizer, 6 ... Monitor television, 7 ... XY
Z stage, 8 ... light source for illumination.
Claims (5)
置を測定する３次元位置測定装置において、２台の２次
元イメージセンサを用い、前記２台の２次元イメージセ
ンサをその光軸をある角度を持って同一平面上に設置
し、前記光軸の交点が前記２台の２次元イメージセンサ
の光学系の焦点になるように設定し、前記２台の２次元
イメージセンサは３次元移動装置上に設けられたことを
特徴とする３次元位置測定装置。1. A three-dimensional position measuring device for measuring a tip position of a needle-shaped object such as a probe to be measured, wherein two two-dimensional image sensors are used and the two two-dimensional image sensors are used as light sources. The axes are set on the same plane at an angle, and the intersection of the optical axes is set so as to be the focal point of the optical system of the two two-dimensional image sensors. A three-dimensional position measuring device provided on a three-dimensional moving device.
定装置において、前記２台の２次元イメージセンサとし
てテレビカメラを用い、その出力画像を合成して一つの
モニタテレビ画面に映し出すとともに、前記モニタテレ
ビ画面に中央位置を示す表示を、前記２台のテレビカメ
ラの出力画像を合成した画像に重ね合わせて出すことを
特徴とする３次元位置測定装置。2. A three-dimensional position measuring apparatus according to claim 1, wherein a television camera is used as said two two-dimensional image sensors, and output images are synthesized and displayed on one monitor television screen. A three-dimensional position measuring apparatus, wherein a display indicating a center position is superimposed on an image obtained by combining output images of the two television cameras on the monitor television screen.
定装置において、前記３次元移動装置は移動距離が読み
取れる表示を有することを特徴とする３次元位置測定装
置。3. The three-dimensional position measuring device according to claim 1, wherein said three-dimensional moving device has a display from which a moving distance can be read.
置測定装置において、原点位置を前記モニタテレビ画面
の中央に合わせた後、前記測定対象の映像を前記モニタ
テレビ画面の中央に合わせるように、前記３次元移動装
置を動作させ、前記３次元移動装置の移動距離を読み取
ることで前記測定対象の３次元位置を測定することを特
徴とする３次元位置測定装置。4. The three-dimensional position measuring apparatus according to claim 1, wherein the origin position is set at the center of the monitor television screen, and then the image to be measured is placed at the center of the monitor television screen. A three-dimensional position measuring device, wherein the three-dimensional moving device is operated so that the three-dimensional position of the measurement target is measured by reading a moving distance of the three-dimensional moving device so as to match.
置測定装置において、原点位置において前記測定対象の
映像を前記モニタテレビ画面の中央に合わせ、前記測定
対象が移動後に前記測定対象の映像を前記モニタテレビ
画面の中央に合わせるように、前記３次元移動装置を動
作させ、前記３次元移動装置の移動距離を読み取ること
で前記測定対象の３次元位置を測定することを特徴とす
る３次元位置測定装置。5. The three-dimensional position measuring apparatus according to claim 1, wherein an image of said measuring object is aligned with a center of said monitor television screen at an origin position, and said measuring object is moved after said measuring object moves. The three-dimensional moving device is operated so that the image of the three-dimensional moving device is aligned with the center of the monitor television screen, and the three-dimensional position of the measurement target is measured by reading the moving distance of the three-dimensional moving device. 3D position measuring device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9166886A JPH1114310A (en) | 1997-06-24 | 1997-06-24 | Three-dimensional position measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9166886A JPH1114310A (en) | 1997-06-24 | 1997-06-24 | Three-dimensional position measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH1114310A true JPH1114310A (en) | 1999-01-22 |
Family
ID=15839451
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9166886A Pending JPH1114310A (en) | 1997-06-24 | 1997-06-24 | Three-dimensional position measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH1114310A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008062285A2 (en) * | 2006-11-22 | 2008-05-29 | Health Robotics S.R.L. | Method and machine for manipulating toxic substances |
| US20100039132A1 (en) * | 2008-06-04 | 2010-02-18 | Lecroy Corporation | Probing Apparatus |
| CN111687002A (en) * | 2020-06-29 | 2020-09-22 | 常熟品智自动化科技有限公司 | Point gum machine needle alignment calibration control method based on machine vision |
-
1997
- 1997-06-24 JP JP9166886A patent/JPH1114310A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008062285A2 (en) * | 2006-11-22 | 2008-05-29 | Health Robotics S.R.L. | Method and machine for manipulating toxic substances |
| WO2008062285A3 (en) * | 2006-11-22 | 2008-08-14 | Health Robotics Srl | Method and machine for manipulating toxic substances |
| JP2010510513A (en) * | 2006-11-22 | 2010-04-02 | ヘルス ロボティクス エスアールエル | Method and machine for manipulating toxic substances |
| US8404492B2 (en) | 2006-11-22 | 2013-03-26 | Health Robotics S.R.L. | Method and machine for manipulating toxic substances |
| US20100039132A1 (en) * | 2008-06-04 | 2010-02-18 | Lecroy Corporation | Probing Apparatus |
| CN111687002A (en) * | 2020-06-29 | 2020-09-22 | 常熟品智自动化科技有限公司 | Point gum machine needle alignment calibration control method based on machine vision |
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