JPH11141506A - Rodless cylinder - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a rodless cylinder manufactured simply, suitable for downsizing, and superior in dust proof performance. SOLUTION: This rodless cylinder 1 is provided with a cylinder tube 2, a piston 26, a slider 35, and a coupling body 36. By providing a protection cover 40, the slit formation face 2a of a cylinder tube 2 is covered. A slit sealing member 45 is wholly engaged with a slit 8 in a state where the outside face 45a of the slit sealing member itself is protruded from the outside opening of the slit 8. Thereby, the slit 8 is blocked from the inside of the cylinder tube 2.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rodless cylinder.

[0002]

2. Description of the Related Art Many types of cylinders in which a piston is not provided with a rod, that is, rodless cylinders have been proposed. As can be seen from the structure of this type of cylinder, this type of cylinder has a characteristic that it is convenient for achieving a long stroke without taking up installation space.

FIG. 12 shows an example of a conventional rodless cylinder 91. A piston (not shown) is accommodated in a cylinder tube 92 constituting the rodless cylinder 91 so as to be movable in the tube longitudinal direction. The piston partitions the inside of the cylinder tube 92 into two pressure action chambers. A slit 93 is formed at the center of the upper surface of the cylinder tube 92. The slit 93 extends along the longitudinal direction of the tube and communicates with the inside and outside of the cylinder tube 92. A slider 94 is provided outside the upper surface of the cylinder tube 92. The piston and the slider 94 are integrally movably connected via a yoke 95 as a connection body. Therefore, when pressurized air is supplied to and discharged from the pressure action chamber, the piston,
The yoke 95 and the slider 94 move integrally along the longitudinal direction of the tube.

This type of cylinder 91 has two types of seal belts 96 and 97 as seal members. First
The seal belt 96 is located outside the cylinder tube 92. This seal belt 96 has a slit 93
Is closed from the outside to prevent foreign matter such as dust from entering mainly through the slit 93.

On the other hand, the second seal belt 97 is located inside the cylinder tube 92. A pair of ribs 98 protrude from the upper surface of the seal belt 97. These ribs 98 can be engaged with and disengaged from an engaged portion 99 formed on the inner opening edge of the slit 93. Further, since the second seal belt 97 closes the slit 93 from the inside, leakage of the driving fluid mainly from the slit 93 is prevented. In such a closed state, the second seal belt 97 makes the slit 93 without projecting its outer surface from the outer opening of the slit 93.
To be partially engaged.

[0006]

However, in the rodless cylinder 91 having the conventional structure, it is necessary to provide the engaged portion 99 having a complicated cross-sectional shape on the inner opening edge of the slit 93. For this reason, especially when the miniaturization advances, the cylinder tube 9
Extrusion molding of No. 2 becomes difficult, and the yield is reduced. Similarly, in the conventional configuration, since the cross-sectional shape on the second seal belt 97 side becomes complicated, there has been a problem that its manufacture is difficult and the yield is reduced.

Further, the conventional configuration described above is not suitable for use in a clean room for manufacturing semiconductors because of insufficient dustproofness. Here, as a rodless cylinder excellent in dust resistance, for example, a cylinder in which the entire cylinder tube is covered with a bellows-like cover has been conventionally proposed. However, in such a rodless cylinder,
Although some suitable dustproofness can be obtained, there is a disadvantage that the structure becomes complicated and the production becomes troublesome. Therefore, it has been desired to improve dustproofness without using a bellows-like cover.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a rodless cylinder which is easy to manufacture, suitable for miniaturization, and excellent in dustproofness.

[0009]

In order to solve the above-mentioned problems, the invention according to claim 1 comprises a piston inside a cylinder tube, a slider outside the cylinder tube, A rodless cylinder including a connecting body that integrally moves the piston and the slider via a formed slit; a protective cover that covers a slit forming surface of the cylinder tube; A rod-less cylinder comprising a slit sealing member for closing the slit from the inside of the cylinder tube by entirely engaging the slit with the outer surface of the cylinder protruding. Make a summary.

According to a second aspect of the present invention, in the first aspect, a dust-proof space sealing member for closing an entrance of a dust-proof space defined by the protective cover and the cylinder tube is provided along the longitudinal direction of the tube. did.

According to a third aspect of the present invention, in the first aspect, a dustproof groove which forms a part of a dustproof space defined by the protective cover and the cylinder tube and extends along the longitudinal direction of the tube is provided. In addition, a portion of the connecting body exposed from the slit forming surface is extended in the tube short direction, and the connecting body-side extending portion is disposed in the dustproof groove.

According to a fourth aspect of the present invention, in the first aspect, a dustproof groove extending along a longitudinal direction of the tube and forming a part of the dustproof space is formed in the cylinder tube, and the slit is formed in the connecting body. The portion exposed from the forming surface is extended in the short direction of the tube, the extending portion on the connecting body side is disposed in the dustproof groove, and a seal member for the dustproof space for closing the entrance of the dustproof space is formed by the tube. It was arranged along the longitudinal direction.

According to a fifth aspect of the present invention, in the third or fourth aspect, a part of the slider is extended and disposed in the dustproof groove, and the slider-side extending portion and the connecting body-side extending portion are provided. And was connected.

The invention according to claim 6 is the invention according to claims 3 to 5
In any one of the above, a guide member for guiding the movement of the slider along the longitudinal direction of the tube is provided in the dustproof groove.

According to a seventh aspect of the present invention, in the sixth aspect, the dustproof groove is provided on a pair of left and right sides of the cylinder tube, and the guide member is provided in each of the pair of dustproof grooves. .

The invention according to claim 8 is the invention according to claims 3 to 7
In any one of the above, the cylinder tube is provided with a port that opens in the dustproof groove and communicates with the inside and outside of the dustproof space.

The invention according to claim 9 is the invention according to claims 2 to 8
In any one of the above, the slider is provided with a non-blocking area protection cover that covers a region of the dust-proof space sealing member that does not block the entrance of the dust-proof space.

Hereinafter, the "action" of the present invention will be described. According to the first to ninth aspects of the present invention, the slit seal member is entirely engaged with the slit from inside the cylinder tube. Therefore, it is not necessary to form a complicated engaged portion on the inner opening edge of the slit in the cylinder tube. For this reason, the cross-sectional shapes of the cylinder tube and the slit seal member are simpler than those in the related art, thereby simplifying the manufacture of the cylinder tube and the slit seal member. Also, even if the seal member outside the cylinder tube, which was required in the past, was omitted,
Intrusion of dust into the cylinder tube through the slit is reliably prevented by the slit seal member and the protective cover.

According to the second aspect of the present invention, since the dust-proof space is partitioned, a long path from the cylinder outer region to the slit is ensured, so that dust and the like can enter through the slit more reliably. Will be blocked. In addition, as a result of the entrance of the dust-proof space being closed by the dust-proof space seal member, the dust-proof space is substantially sealed,
In the first place, the possibility that dust enters the dustproof space itself is reduced. In addition, it is also strong against dust getting in from below the cylinder tube.

According to the third aspect of the present invention, since the dust-proof space is partitioned, a long path from the cylinder outer region to the slit is ensured, so that the intrusion of dust through the slit is more reliably prevented. Is done. In addition,
By disposing the connecting body-side extending portion in the dustproof groove forming a part of the dustproof space, the path can be in a complicated state.

According to the fourth aspect of the invention, the synergistic effect of the second and third aspects of the present invention further reliably prevents dust from entering through the slit. According to the fifth aspect of the present invention, since the slider-side extension and the link-side extension are connected, the slider can be moved integrally with the piston and the connector. In addition, by arranging the slider-side extending portion in the dust-proof groove, the path can be complicated.

According to the sixth aspect of the present invention, the slider slides while being guided by the guide member. As a result, the rigidity of the slider increases, and a heavy work can be mounted. Also, since the guide member is in the dustproof groove,
Even if installed, the appearance of the cylinder will not be reduced.

According to the seventh aspect of the present invention, the slider slides while being guided by the guide member on the left and right sides of the cylinder, so that the slider has higher rigidity.
According to the eighth aspect of the present invention, by evacuating through the port, dust that has entered the dustproof space or dust generated in the dustproof space can be discharged to the outside of the cylinder. Therefore, the inside of the dustproof space can be maintained in a state of extremely high cleanliness.

According to the ninth aspect of the present invention, since the non-blocking area is covered with the non-blocking area protection cover, the possibility of dust entering the dust-proof space from the area is extremely reduced.

[0025]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS [First Embodiment] A rodless cylinder according to an embodiment of the present invention will now be described with reference to FIGS.
This will be described in detail with reference to FIG.

As shown in FIGS. 1 (a), 2 and the like, the cylinder tube 2 constituting the rodless cylinder 1 of the present embodiment is a cylindrical metal member having a uniform cross section.
The cylinder tube 2 has a bottom portion 3, a right inner portion 4,
It comprises a left inner meat part 5, a right outer meat part 6, and a left outer meat part 7.
The right inner wall portion 4 and the left inner wall portion 5 protrude from the upper surface of the bottom wall portion 3 and both have a substantially inverted L-shaped cross section. The free ends of the inner wall portions 4 and 5 face each other at a predetermined interval on the center line of the tube. As a result, a slit 8 is formed in this portion. The slit 8 extends along the longitudinal direction of the tube and communicates inside and outside the cylinder tube 2. Further, a piston housing space S1 is formed on the inner wall surface side of the inner wall portions 4, 5. The upper surface of the free end side region of both the inner wall portions 4 and 5 where the slit 8 exists is hereinafter referred to as a slit forming surface 2a.

The right outer wall portion 6 and the left outer wall portion 7 protrude vertically from both upper edges of the bottom wall portion 3 and somewhat higher than the slit forming surface 2a. The right outer wall portion 6 is located outside the right inner wall portion 4, and a right dustproof groove 11 is formed between the both 4 and 6 so as to extend along the longitudinal direction of the tube. The left outer wall portion 7 is located outside the left inner wall portion 5, and a left dustproof groove 12 is formed between the left and right inner wall portions 5 so as to extend in the longitudinal direction of the tube. These dustproof grooves 11, 1 forming part of a dustproof space 43 described later.
2 both open on the upper surface side of the cylinder tube 2. The bottom surfaces of the dustproof grooves 11 and 12 are curved.

In the case of the cylinder tube 2 of the present embodiment,
The lower surface side of the bottom portion 3 serves as a cylinder installation surface 2b. And on such a cylinder installation surface 2b,
Two scratch prevention grooves 13 are formed. The cylinder tube 2 has bolt insertion holes 14 at a plurality of locations. Two of the bolt insertion holes 14 are formed in the bottom portion 4, and the other two are formed in the free end regions of the inner portions 4 and 5. The cylinder tube 2 has a symmetric structure. The cylinder tube 2 can be manufactured by extrusion molding using aluminum or the like as a material. At this time, the dustproof grooves 11, 1
2. A scratch prevention groove 13 and a bolt insertion hole 14 are formed.

Openings at both ends of the cylinder tube 2 are closed by end covers 15 and 16, respectively. Bolt insertion holes 17 are formed in both end covers 15 and 16. These bolt insertion holes 17 are located at positions corresponding to the respective bolt insertion holes 14 opened at both end surfaces of the cylinder tube 2. Therefore, four bolts 18
The end covers 15 and 16 can be fixed to the cylinder tube 2 using. A first supply / discharge port (not shown) is provided on the end cover 15 located on the right side in FIG. 2A, and a second supply / discharge port (not shown) is provided on the end cover 16 located on the left side in FIG. ing. These supply / discharge ports are used for driving fluid (pressurized air in this embodiment).
Respectively connected to a fluid supply for supplying

As shown in FIG. 2B, a piston 25 is slidably accommodated in the piston accommodation space S1 of the cylinder tube 2 along the longitudinal direction of the tube.
Similarly, a part of the yoke 26 as a connecting body (the body 27)
Are slidably accommodated. A pair of pistons 25 exist and are fixed to both end surfaces of the body 27. As a result, the piston housing space S1 is divided into two regions by the presence of the piston 25 and the body 27 of the yoke 26. In FIG. 2B, a region partitioned on the right side is referred to as a first pressure action chamber 28, and a region partitioned on the left side is referred to as a second pressure action chamber 29. The first supply / discharge port on the right end cover 15 communicates with the first pressure action chamber 28, and the second supply / discharge port on the left end cover 16 communicates with the second pressure action chamber 29.

The pressure action chamber 28 is connected via the first supply / discharge port.
When the pressurized air is supplied to the inside, the two pistons 25 and the yoke 26 move integrally in the left side in the piston accommodating space S1. Conversely, the pressure action chamber 2 via the second supply / discharge port
When the pressurized air is supplied into the piston 9, the pistons 25 and the yokes 26 move integrally in the piston receiving space S1 rightward.

As shown in FIGS. 3 and 4, the yoke 26
Is constituted by a trunk 27, a head 30, and a neck 31. The head 30 is exposed from the slit forming surface 2 a via the slit 8. Neck 31 is just slit 8
And connects the head 30 and the torso 27.

A belt sliding contact groove 32 is formed at the center of the lower surface of the body 27 so as to extend along the longitudinal direction of the tube. A slit seal belt 45 described later slides on the belt sliding contact groove 32.

The head 30 of the yoke 26 is provided with connecting body-side extending portions 30a on both sides thereof. Linked body side extension 30a
Is formed by extending both sides of the head 30 in the tube short direction. The distal ends of the connecting body-side extending portions 30a are bent toward the lower surface of the tube, and are disposed in the dustproof grooves 11 and 12.
A bolt hole for attaching a slider is formed at the distal end of the connecting body-side extending portion 30a along the tube short direction.

As shown in FIGS. 2 and 3, the rodless cylinder 1 has a slider 35. The slider body 36 constituting the slider 35 has a table shape, and the upper surface thereof is a surface for mounting a work. A pair of slider-side extending portions 36a protrude from both lower edges of the slider body 36. These slider-side extending portions 36a both extend downward to form the dustproof grooves 11, 1.
2 are arranged. A bolt hole for attaching the slider is formed at the distal end of the slider-side extending portion 36a along the tube short direction. The bolt holes for attaching the slider are located at positions corresponding to the bolt holes of the connecting body-side extending portion 30a. Accordingly, by inserting the bolt 38 into both bolt holes, the slider-side extending portion 36a and the connecting body-side extending portion 30a are connected. As a result, the slider 3
5 is movable integrally with the yoke 26.

As shown in FIG. 3, when the slider 35 and the yoke 26 are connected, a cover insertion portion 39 is formed between the two. A protective cover 40 is inserted through the cover insertion portion 39 in a non-contact manner. The protective cover 40 covers the slit forming surface 2a of the cylinder tube 2 over the entire area in the tube longitudinal direction. At both ends of the protective cover 40, two cover mounting holes 41 are formed. By inserting bolts 42 into these cover mounting holes 41, the protective cover 40 is fixed to the upper surfaces of both end covers 15, 16. The height of the upper surface of the protective cover 40 is designed to be substantially equal to the height of the upper surfaces of the outer wall portions 6 and 7. In addition,
A dustproof space 43 is defined in the cylinder tube 2 by the protective cover 40 and the cylinder tube 2.

As shown in FIGS. 1 (b), 2 (b), 3 and the like, the rodless cylinder 1 includes a seal belt 45 as a slit sealing member. The seal belt 45 has a length comparable to that of the cylinder tube 2 and is mainly made of a resin material (for example, a polyurethane resin, a polyamide resin, a polyacetal resin, or the like). In this case, it is preferable to select a wear-resistant resin such as a polyacetal resin represented by “Duracon (trade name)”. The seal belt 45
Has a core 46 made of a thin metal plate at the center thereof.

The seal belt 45 having the same cross-sectional shape
Is provided with a pair of ridges 47 on its outer surface (upper surface in FIG. 1B) 45a. These ridges 47 project from each other at an angle of about 90 °. On the other hand, the inner surface (the lower surface in FIG. 1B) 45b of the seal belt 45 is flat. Both left and right surfaces (that is, engagement surfaces) 45c of the seal belt 45 are concave. In addition,
The seal belt 45 of the present embodiment has a simple cross-sectional shape as a whole.

As shown in FIG. 2B, both ends of the seal belt 45 are inserted into belt insertion holes 48 having substantially rectangular cross sections provided in the end covers 15 and 16. The outer opening of the belt insertion hole 48 is closed by a cap 49. Both ends of the seal belt 45 are fixed by belt fixing bolts 50. Two belt fixing bolts 50 are provided at each end to constantly hold the seal belt 45 downward.

As shown in FIG. 1B, the free ends of the inner wall portions 4 and 5 of the cylinder tube 2 have a simple and round cross-sectional shape. Therefore, the cross-sectional shape of the slit 8 is relatively simple. The seal belt 45 can be entirely engaged with the slit 8 with its outer surface 45a protruding from the outer opening of the slit 8. At this time, the left and right surfaces 45c of the seal belt 45 and the free end tip surfaces of the inner wall portions 4 and 5 are in close contact with each other. As a result, the slit 8 is closed from the inside of the cylinder tube 2, that is, from the side of the piston housing space S1. Such a seal belt 45 mainly serves to prevent the pressurized air supplied to each of the pressure action chambers 28 and 29 from leaking outside through the slit 8.

As shown in FIGS. 2 (a), 2 (c), 3 and the like, the rodless cylinder 1 is provided with a seal member 52 for a dustproof space. The sealing member 52 has a length comparable to that of the cylinder tube 2 and is disposed in a pair on the left and right along the longitudinal direction of the tube. Both ends of these seal members 52 are fixed by fixing bolts 53. Two fixing bolts 53 are provided at each end to constantly hold the seal member 52 downward. The seal member 52 is formed by attaching a resin material to one side of a thin metal plate. The thin metal plate is disposed outside the dustproof space 43. These seal members 52 are in sliding contact with sliding contact grooves 51 provided on both sides of the upper surface of the slider body 36. The seal member 52 can almost entirely close the entrance of the dustproof space 43 except for a portion where the sliding contact groove 51 is present. The insides of the upper ends of the outer wall portions 6 and 7 and both edges of the protective cover 40 are formed in such a shape that a portion made of a resin material in the seal member 52 can be locked.

As shown in FIGS. 2A to 2C and 4, the slider body 36 of the slider 35 has a non-blocking area protection cover 54. The non-blocking area protection cover 54 is attached to the dustproof space 4
3 at least covers a region where the entrance of the seal member 52 is not closed, that is, a region where the seal member 52 is lifted upward by the sliding contact groove 51. In the present embodiment, the non-blocking area protection covers 54 are provided on the left and right sides of the slider body 36. When the dust-proof space sealing member 52 closes the entrance of the dust-proof space 43, the dust-proof space 43 is substantially closed.

As shown in FIG. 4, the rodless cylinder 1 has a vacuum port 55. The port 55 is bent substantially in an L-shape, and is formed in the bottom portion 3 of the cylinder tube 2. One end of the port 55 is open at the bottom of the left dust-proof groove 12, and the other end is open at the lower left side of the cylinder tube 2. As a result, the inside and outside of the dustproof space 43 are communicated through the vacuum port 55. When the rodless cylinder 1 is used, the port 55 is connected to an unillustrated evacuation unit.

Next, the characteristic effects of the present embodiment will be listed. (A) In this rodless cylinder 1, the seal belt 4
5 is configured to entirely engage the slit 8 from the inside of the cylinder tube 2. This is made possible by omitting the sealing member on the outside of the cylinder tube 2 which has been required in the related art, and as a result, a space that allows the engagement on the outer opening edge of the slit 8 is secured.
Therefore, according to the present embodiment, it is not necessary to form a complicated engaged portion on the inner opening edge of the slit 8 in the cylinder tube 2. For this reason, the cross-sectional shapes of the cylinder tube 2 and the seal belt 45 serving as the slit seal member are both simpler than in the related art. Therefore,
The manufacture of the cylinder tube 2 by extrusion is simplified, and the yield is reliably increased. Of course, the manufacture of the seal belt 45 is similarly simplified, and the yield is reliably increased. As a result, the rodless cylinder 1 suitable for miniaturization and easy to manufacture can be realized. In addition, as a result of improving the yield, prevention of cost increase can be expected.

Even if the sealing member on the outside of the cylinder tube 2 which is conventionally essential is omitted, the intrusion of dust into the inside of the cylinder tube 2 through the slit 8 is ensured by the seal belt 45 and the protective cover 40. Is blocked. Therefore, rodless cylinder 1 with excellent dustproofness
It can be.

(B) In this rodless cylinder 1, the dust cover space 43 is defined by the protective cover 40 and the cylinder tube 2, so that the path from the cylinder outer region to the slit 8 is longer than that of the conventional product. Have been. For this reason, dust cannot pass through the path and reach the slit forming surface 2a, and the intrusion of dust through the slit 8 is more reliably prevented. In addition, the entrance of the dustproof space 43 is closed by the dustproof space seal member 52. As a result, the dustproof space 43 is substantially closed, and the possibility of dust entering the dustproof space 43 itself is reduced in the first place. In addition, with such a configuration, it becomes strong against dust being caught from below the cylinder tube 2.

Further, since the connecting body-side extending portion 30a and the slider-side extending portion 36a are disposed in the dustproof grooves 11 and 12, which form part of the dustproof space 43, the path is in a complicated state. (See FIG. 3). As a result, the intrusion of dust through the slit 8 can be more reliably prevented, and the dust resistance is further improved.

(C) Rodless cylinder 1 of the present embodiment
In the dustproof space seal member 52, the dustproof space 43
The slider 35 is provided with a non-blocking region protection cover 54 that covers a region not blocking the entrance of the slider 35. Accordingly, since the non-blocking area is covered by the cover 54, the possibility that dust enters the dustproof space 43 from the area is extremely small. This leads to further improvement in dust resistance.

(D) In this rodless cylinder 1, the damage prevention groove 13 is formed on the lower surface of the cylinder tube 2, so that only a part of the cylinder installation surface 2b is in contact with the installation surface. Become. This prevents the entire cylinder installation surface 2b from being damaged.

(E) Rodless cylinder 1 of the present embodiment
In the cylinder tube 2, a vacuum port 55 that opens inside the dustproof groove 12 and communicates with the inside and outside of the dustproof space 43 is provided. Therefore, by evacuating through the port 55, dust that has entered the dustproof space 43 and dust generated in the dustproof space 43 can be discharged to the outside of the rodless cylinder 1. Therefore, the inside of the dust-proof space 43 can be maintained in an extremely high clean state, and the dust-proof property is further improved. For this reason, it is possible to sufficiently cope with use in a clean room for manufacturing semiconductors (specifically, so-called P7 specification). Second Embodiment Next, a rodless cylinder 61 according to a second embodiment will be described with reference to FIG. Embodiment 1
The same components as those described above are denoted by the same reference numerals in the drawings, and detailed description thereof will be omitted.

The cylinder tube 2 of the rodless cylinder 61 has a component mounting groove structure. The component mounting groove structure in the present embodiment refers to a switch mounting groove 63 for slidably mounting a cylinder switch 62 as a piston position detecting means. The switch mounting groove 63 has a substantially T-shaped cross section, and its entrance side is narrowed. Switch mounting groove 63
Are present in the upper region on the outer surface side of each of the outer meat portions 6, 7. Note that these switch mounting grooves 63 can be formed simultaneously with the extrusion of the cylinder tube 2.

On the other hand, the slider 35, which is a member that moves together with the piston 25, has a magnet 64. In the present embodiment, the magnet 64 having a circular cross section is held on the side surface of the slider-side extending portion 36a. The reason for selecting the part as the installation place of the magnet 64 is that the part is the outer meat part 6,
7 because the cylinder switch 62 can be reliably turned on and off even with a small magnet 64.

The operation and effect of this embodiment will be listed below. (A) Since the rodless cylinder 61 also has the same configuration as that of the first embodiment, it goes without saying that the effects and advantages (1) to (2) listed in the first embodiment are achieved. Of course, if the cylinder tube 2 is provided with the evacuation port 55, the operation and effect E of the first embodiment can be further achieved.

(B) Further, the rodless cylinder 61
According to this, since the cylinder switch 62 can be installed, the position of the piston 25 can be accurately grasped. With such a configuration, the cylinder switch 6
Since a part of the cylinder 2 is exposed outside the cylinder 61, the installation position of the cylinder switch 62 can be easily adjusted. Third Embodiment Next, a rodless cylinder 71 of a third embodiment will be described with reference to FIG. Embodiment 1
The same components as those described above are denoted by the same reference numerals in the drawings, and detailed description thereof will be omitted.

The rodless cylinder 71 has a guide member for guiding the movement of the slider 35 in the longitudinal direction of the tube. The guide member in the present embodiment includes a guide shaft 72 and a linear ball bush 73. The guide shaft 72 has a circular cross section,
It is a rod-shaped member made of a metal material harder than aluminum, such as stainless steel. The guide shaft 72 extends along the longitudinal direction of the tube, and both ends thereof are supported by a pair of end covers 15 and 16. The linear ball bush 73 is a member having an insertion hole through which the guide shaft 72 can be slidably inserted. The insertion hole of the linear ball bush 73 holds a large number of hard balls on its inner peripheral surface. The linear ball bush 73 is provided at the lower end of the slider-side extension 74, and the slider 3
5 and the yoke 26 and the like. The slider-side extension 74 of the present embodiment is slightly longer than that of the first embodiment. The guide member including the guide shaft 72 and the linear ball bush 73 is provided in a pair of left and right dustproof grooves 11 and 12, respectively.

The operation and effect of the present embodiment will be listed below. (A) Since the rodless cylinder 71 also has the same configuration as that of the first embodiment, it is needless to say that the operation effects 1 to 2 enumerated in the first embodiment can be obtained. Of course, if the cylinder tube 2 is provided with the evacuation port 55, the operation and effect E of the first embodiment can be further achieved. The installation of the evacuation port 55 is particularly advantageous when a guide member is employed as in the present embodiment.

(B) The rodless cylinder 71
According to this, the slider 35 slides while being guided on the left and right sides of the cylinder 71 by the guide member. At this time, even if a load is applied to the slider body 36 from the up-down direction or the left-right direction, the load is securely supported on the guide shaft 72 via the linear ball bush 73. Therefore, the linear slidability of the slider 35 is not affected at all. As described above, since extremely high rigidity is secured in the slider 35, for example, a heavy work can be mounted. In addition, since the guide member is located in the dustproof grooves 11 and 12, even if it is installed, the appearance of the rodless cylinder 71 does not deteriorate. Fourth Embodiment Next, a rodless cylinder 81 according to a fourth embodiment will be described with reference to FIG. Embodiment 1
The same components as those described above are denoted by the same reference numerals in the drawings, and detailed description thereof will be omitted.

The rodless cylinder 81 also has a guide member for guiding the movement of the slider 35 in the longitudinal direction of the tube. The guide member in the present embodiment includes a linear guide 82 and an engagement block 83.
The linear guide 82 is a rod-shaped member having a rectangular cross section and made of a metal material harder than aluminum, such as stainless steel. The linear guide 82 extends along the longitudinal direction of the tube and is fixed to the bottom surfaces of the dustproof grooves 11 and 12. Therefore, the bottom surfaces of the dustproof grooves 11 and 12 are formed flat and slightly wide. Engagement block 83
Is a member slidably engaged with the linear guide 82. The engagement block 83 includes a slider-side extending portion 84.
The slider 35 and the yoke 26
It moves together with etc. Slider side extension portion 84 of the present embodiment
Is different from the first embodiment in that the lower end surface is formed wider. This is for the convenience of attaching the engagement block 83 with bolts or the like. In addition, the linear guide 8
The guide member composed of 2 and the engagement block 83 is provided in a pair of left and right dustproof grooves 11, 12, respectively.

The operation and effect of this embodiment will be listed below. (A) Since the rodless cylinder 81 also has the same configuration as that of the first embodiment, it goes without saying that the effects and advantages (1) to (2) listed in the first embodiment can be obtained. Of course, if the cylinder tube 2 is provided with the evacuation port 55, the operation and effect E of the first embodiment can be further achieved. The installation of the evacuation port 55 is particularly advantageous when a guide member is employed as in the present embodiment.

(B) The rodless cylinder 81
According to this, the slider 35 slides while being guided by the right and left sides of the cylinder 81 by the guide member. At this time, even if a load is applied to the slider body 36 from the up-down direction or the left-right direction, the load is securely supported by the linear guide 82 via the engagement block 83. Therefore, the slider 35
Has no effect on the linear slidability. As described above, since the slider 35 has extremely high rigidity,
For example, a heavy work can be mounted. Also,
Since the guide members are located in the dustproof grooves 11 and 12, even if they are installed, the appearance of the rodless cylinder 81 does not deteriorate.

(C) The present embodiment can be slightly modified as shown in FIG. In the rodless cylinder 81A of FIG. 9 which is a modification, the slider-side extending portion 84 and the connecting body-side extending portion 30a are connected in a floating state. This is different from the configuration shown in FIG. 8 which is connected in a non-floating state. That is, in the rodless cylinder 81A of FIG. 9, the bush 86 is provided on the slider-side extending portion 84. Then, the bolt 38 is rotatably inserted into the bush 86 and the yoke 2
It is fixed to the 6 side. With such a configuration, rattling of the slider 35 during sliding is reliably absorbed, and linear sliding properties can be further improved.

The present invention is not limited to the above-described embodiment, but can be modified, for example, to another form as follows. ◎ One end of the evacuation port 55 is the end cover 1
It may be provided to open at 5,16. In addition, the evacuation port 55 includes a pair of left and right dustproof grooves 11, 1
2 may be provided for both.

The dustproof grooves 11 and 12 may be provided in only one of the left and right sides of the cylinder tube 2 instead of the pair. The guide member may have a structure other than those shown in FIGS. 7, 8, and 9. In that case, a guide member for guiding the yoke 26 instead of the slider 35 may be employed. Further, the guide member may be arranged at a place other than the dustproof grooves 11 and 12.

When the dust-proof space sealing member 52 is unnecessary, for example, when the entrance of the dust-proof space 43 is sufficiently narrow, it is possible to omit the structure. The magnet 64 may be provided at a position other than the side surface of the slider-side extending portion 36, for example, at the yoke-side extending portion 30a, the outer edge of the lower surface of the slider body 36, the outer surface of the engagement block 83, or the like. In addition, the location where the switch mounting groove 63 is formed can be changed according to the installation position of the magnet 64.

The sectional shape of the slit 8 is not limited to the above embodiments, but can be changed to another sectional shape. Needless to say, the cross-sectional shape on the side of the seal belt 52 can be changed accordingly.

The protective cover 40 may not be inserted between the slider 35 and the yoke 26. For example, it may be inserted through a cover insertion portion provided on the slider 35 itself, or may be inserted through a cover insertion portion provided on the yoke 26 itself.

The component mounting groove structure may be for mounting components other than the cylinder switch 62, and is not limited to the switch mounting groove 63. Of course, the cross-sectional shape of the component mounting groove structure can be changed according to the shape of the component to be mounted.

A structure in which a simple seal structure such as a rubber packing or a scraper is further provided around the protective cover 40 may be adopted. By doing so, the dust resistance is further improved. Another rodless cylinder 8 shown in FIG.
Reference numeral 7 includes the vacuum port 55 as in the first embodiment, and further includes a rubber packing 87a. The rubber packing 87a shown in the figure has a substantially Y-shaped cross section and is endless, and is mounted over the entire outer peripheral portion on the lower surface side of the slider body 36. Therefore, the rubber packing 87a reliably prevents air from flowing from the side of the cylinder, and as a result, the degree of vacuum in the dustproof space 43 is further increased. Therefore, improvement in dustproofness is achieved. Note that the cross-sectional shape of the rubber packing 87a may be other than a substantially Y shape.

By using a cylinder tube 89 having no dustproof grooves 11 and 12 like a rodless cylinder 88 of another example shown in FIG. 11, it can be embodied as having no dustproof space 43. With such a configuration, it is possible to obtain the second dust-proofing property, although it does not reach the above embodiments. That is, the slit 8
Of dust into the cylinder tube 89 through the
This is because the slit sealing member 45 and the protective cover 40 reliably prevent the slit.

Here, in addition to the technical ideas described in the claims, the technical ideas grasped by the above-described embodiments are listed below together with their effects. (1) The device according to any one of claims 1 to 9, wherein a component mounting groove structure extending along the longitudinal direction of the tube is provided, and a magnet is provided on the slider in a position adjacent to the component mounting groove structure. A rodless cylinder characterized by the following. With this configuration, it is possible to install the piston position detecting means with respect to the cylinder tube,
The position of the piston can be accurately grasped.

(2) The rodless cylinder according to any one of claims 8 and 9, wherein the port is a vacuum port having one end opened at the bottom of the dustproof groove. With this configuration, the dust is reliably discharged to the outside of the cylinder, and the inside of the dust-proof space can be maintained in an extremely clean state.

(3) Claims 1 to 9, technical idea 1,
3. The rodless cylinder according to claim 2, wherein the cylinder tube is an extruded product having a substantially equal cross-sectional shape.

(4) The rodless cylinder according to any one of claims 1 to 9 and technical ideas 1 to 3, wherein a damage preventing groove is formed on a lower surface of the cylinder tube. With this configuration, the entire surface on which the cylinder is mounted is prevented from being damaged.

The technical terms used in this specification are defined as follows. "Fluids: nitrogen, oxygen, carbon dioxide, argon, hydrogen,
In addition to a gas such as air which is a mixture thereof, it includes a liquid and other substances having properties similar thereto. "

[0075]

As described above in detail, according to the first to ninth aspects of the present invention, it is possible to provide a rodless cylinder which is easy to manufacture, suitable for miniaturization, and excellent in dustproofness. Can be.

According to the second and third aspects of the present invention, it is possible to more reliably prevent dust from entering through the slits, so that the dust can be more excellently protected. According to the fourth aspect of the present invention, the synergistic action of the second and third aspects further more reliably prevents dust from entering through the slits, thereby achieving extremely excellent dustproofness. can do.

According to the fifth aspect of the present invention, since the path from the cylinder external region to the slit can be complicated, the intrusion of dust through the slit can be reliably prevented.

According to the sixth aspect of the present invention, the rigidity can be improved without deteriorating the appearance of the cylinder. According to the invention described in claim 7, higher rigidity can be ensured for the slider.

According to the eighth aspect of the present invention, as a result of further improving dustproofness, it is possible to sufficiently cope with use in, for example, a clean room for manufacturing semiconductors.

According to the ninth aspect of the present invention, the possibility of dust entering the dustproof space is extremely small,
Further improvement in dust resistance is achieved.

[Brief description of the drawings]

FIG. 1A is a cross-sectional view illustrating a cylinder tube according to a first embodiment, and FIG. 1B is an enlarged cross-sectional view of a slit sealing member.

2A is a plan view of the rodless cylinder according to the first embodiment, FIG. 2B is a cross-sectional view of the rodless cylinder cut at the center, and FIG. Sectional view when cut at a position.

FIG. 3 is a sectional view of the rodless cylinder taken along line AA of FIG.
Sectional drawing in a line.

FIG. 4 is a cross-sectional view of the rodless cylinder taken along line BB of FIG.
Sectional drawing in a line.

FIG. 5 is a side view of the rodless cylinder.

FIG. 6 is a sectional view of a rodless cylinder according to a second embodiment.

FIG. 7 is a sectional view of a rodless cylinder according to a third embodiment.

FIG. 8 is a sectional view of a rodless cylinder according to a fourth embodiment.

FIG. 9 is a sectional view of a rodless cylinder which is a modification of FIG.

FIG. 10 is a partial sectional view of a rodless cylinder in another example.

FIG. 11 is a sectional view of a rodless cylinder in another example.

12A is a sectional view of a rodless cylinder in a conventional example, and FIG. 12B is a partially enlarged sectional view of a slit and a seal belt in the rodless cylinder.

[Explanation of symbols]

1, 61, 71, 81, 81A, 87, 88: rodless cylinder, 2, 89: cylinder tube, 2a: slit forming surface, 8: slit, 11, 12: dustproof groove, 25
... Piston, 26 ... Yoke as connecting body, 35 ... Slider, 40 ... Protective cover, 43 ... Dustproof space, 45 ... Slit sealing member, 45a ... Outer side surface of slit sealing member, 52 ... Dustproof space sealing member, 30a ... connecting body side extending portion, 36a, 74, 84 ... slider side extending portion, 54
... Non-occluding area protection cover, 55... Port, 72... Guide shaft forming a guide member, 73... Linear ball bush forming a guide member, 82 .. linear guide forming a guide member, 83. Block.

Claims (9)

[Claims] A connecting member for connecting the piston and the slider so as to move integrally with each other through a slit formed along a longitudinal direction of the tube; A protective cover that covers the slit forming surface of the cylinder tube, and by engaging the slit entirely with the outer surface protruding from the outer opening of the slit, A rodless cylinder comprising: a slit sealing member for closing a slit from inside the cylinder tube. 2. A dustproof space sealing member for closing an entrance of a dustproof space defined by the protective cover and the cylinder tube is disposed along a longitudinal direction of the tube. Rodless cylinder. 3. A dustproof groove which forms a part of a dustproof space defined by the protective cover and the cylinder tube and extends along the longitudinal direction of the tube is formed in the cylinder tube, and the slit is formed in the connecting body. 2. The rodless cylinder according to claim 1, wherein a portion exposed from the surface extends in the tube short direction, and a connecting body side extending portion is arranged in the dustproof groove. 4. A dust-proof groove extending along the longitudinal direction of the tube and forming a part of the dust-proof space is formed in the cylinder tube, and a portion of the connecting body exposed from the slit forming surface is a short tube. Extend in the direction
2. The connecting body-side extending portion is arranged in the dust-proof groove, and a dust-proof space sealing member for closing an entrance of the dust-proof space is provided along a longitudinal direction of the tube. Rodless cylinder. 5. The slider according to claim 3, wherein a part of the slider is extended and disposed in the dustproof groove, and the slider-side extension and the connector-side extension are connected. 4. The rodless cylinder according to 4. 6. The rodless cylinder according to claim 3, wherein a guide member for guiding the movement of the slider along the longitudinal direction of the tube is provided in the dustproof groove. 7. The rodless cylinder according to claim 6, wherein a pair of said dustproof grooves are present on the left and right sides of said cylinder tube, and said guide members are respectively provided in said pair of dustproof grooves. . 8. The rodless cylinder according to claim 3, wherein a port that opens in the dustproof groove and communicates with the inside and outside of the dustproof space is provided in the cylinder tube. . 9. The slider according to claim 2, wherein a non-blocking area protection cover for covering the area of the dust-proof space sealing member that does not block the entrance of the dust-proof space is provided on the slider. Rodless cylinder according to the item.