JPH11140712A - Ventilating device for dust proofing clothes - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a ventilating device for dust proofing clothes capable of suppressing the discharge of a chemical substance which is an ingredient of secretion by perspiration, etc., produced from human body of a worker and supposed to be a chemical pollution source, through the ventilating device. SOLUTION: This device has a cassette structured chemical filter 3 additionally installed adjacently to an exhaust side of a ventilating mechanism 2 which comprises a dust collector unit 2b and an air supplying and exhausting unit 2c, connected to the hood 1a of dust proofing clothes 1 through a ventilating tube 2a. When the air supplying and exhausting unit 2c is working, the inside air of the dust proofing clothe 1 is sucked and the dust in the air is removed by the dust collecting unit 2b and a chemical substance as a chemical pollution source is removed by the chemical filter 3 and clean air is discharged to a clean room to retain a clean manufacturing environment and, at the same time, the clean air in the clean room is seecked from the air supplying and exhausting unit 2c and the inside air of the dust proofing clothes 1 is ventilated.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

TECHNICAL FIELD The present invention relates to a semiconductor device,
The present invention relates to a ventilation device for dust-proof clothing worn when manufacturing a magnetic disk, a liquid crystal, and the like and a product incorporating the same in a clean room.

[0002]

2. Description of the Related Art In the process of manufacturing semiconductor devices, magnetic disks, liquid crystals, etc. and products incorporating them, if dust in the air is mixed or adhered, the performance of the products will be significantly deteriorated and the yield rate will be reduced. Become. Therefore,
In order to avoid the influence of dust, a clean room where dust is reduced as much as possible shall be installed, and workers engaged in manufacturing work shall wear dustproof clothing. It has been widely and widely practiced to always maintain the clean room in a clean manufacturing environment by ventilating the internal air through a ventilation mechanism consisting of a dust collection unit and a supply / exhaust unit mounted on a dust-proof garment. .

Hereinafter, details of the conventional technique will be described with reference to FIG. FIG. 2 is a rear view showing an example of a mounted state of a conventional ventilation system for a dustproof garment, in which a worker wears a space type dustproof garment 1 having a hood 1a on a head in a clean room and covers the whole body. It represents the state that has been done. In FIG. 2, a ventilation mechanism 2 composed of a dust collection unit 2b in which a high-performance air filter and activated carbon are collectively integrated into a unit, and a supply / exhaust unit 2c for ventilating the air inside the dust-proof garment 1, is provided with an air supply unit. A hood 1 disposed above the dust-proof garment 1 via a ventilation pipe 2a having a reciprocating passage having a pair of exhausts;
a.

When the worker who is isolated from the clean manufacturing environment in the clean room by wearing the dust proof clothing 1 operates the air supply / exhaust unit 2c, the air inside the dust proof clothing 1 is discharged through the exhaust passage of the ventilation pipe 2a. Suctioned and dust collection unit 2b
While passing through the air passage, clean air is exhausted into the clean room from the exhaust port of the air supply / exhaust unit 2c, and the clean air in the clean room is sucked from the air inlet of the air supply / exhaust unit 2c, and the ventilation pipe The air is supplied into the dust proof clothing 1 through the air supply passage 2a, and the air inside the dust proof clothing 1 is ventilated.

Conventionally, as described above, the amount of dust contained in the air in the clean room has been minimized to maintain a clean manufacturing environment at all times.

[0006]

However, with the advancement of the manufacturing technology of semiconductor devices, magnetic disks, liquid crystals, and the like, the required processing level of these members has been advanced, and the sweat generated from the human body of the worker has been increased. When a chemical substance consisting of secretions such as secretions is discharged from the dust-proof clothing into the clean room through the ventilation mechanism, this chemical substance is mixed with or adhered to the product separately from the dust to reduce the quality of the product. There is a problem of chemical contamination that may cause a reduction.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and a chemical substance, which is a source of chemical pollution due to components of secretions such as sweat generated from the human body of an operator, is provided with a ventilation mechanism from inside dustproof clothing. It is an object of the present invention to provide a ventilation device for dust-proof garments, which can suppress discharge into a clean room through the clean room and can avoid a decrease in quality of products manufactured in the clean room.

[0008]

According to the present invention, it is an object of the present invention to provide a dustproof apparatus provided with a ventilation mechanism comprising a dust collecting unit for ventilating air inside a dustproof garment worn in a clean room and a supply / exhaust unit. This is achieved by providing a structure in which a ventilation filter is provided with a chemical filter for absorbing a chemical substance generated in a dustproof garment in a clothing ventilation apparatus. It is effective that the chemical filter has a cassette type structure, and the chemical filter preferably has an ammonia gas absorbing function.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention relates to a dust-proof clothing ventilator provided with a ventilation mechanism including a dust-collecting unit and a supply / exhaust unit for ventilating the air inside the dust-proof clothing worn in a clean room. A ventilator for dust-proof clothing, which is provided with a chemical filter for absorbing the chemical substances generated in the building, and as a chemical filter, to chemically absorb the chemical substance that is a chemical contamination source efficiently. In addition, the most suitable chemical reaction method such as an ion exchange type, a catalytic type, and an adsorption type is selected and applied depending on the chemical substance to be absorbed.

According to the ventilation device for a dustproof garment of the present invention, the dust generated in the dustproof garment is removed by the dust collecting unit, and the chemical substance is removed by the chemical filter. Clean air is discharged from the dust-proof garment into the clean room, where the chemical substances that are the source of chemical pollution are also removed from the secretions such as sweat as well as the generated dust. It can be maintained in a clean production environment state with little.

Since the chemical filter has a cassette type structure, it can be easily attached and detached. Further, since the chemical filter has an ammonia gas absorbing function, it is a chemical contamination source among components of secretions such as sweat of workers. Can be mainly absorbed. Hereinafter, an embodiment of the present invention will be described in detail with reference to FIG. FIG. 1 is a rear view showing an embodiment of a state in which a ventilation device for a dust-proof garment according to the present invention is mounted, wherein an operator places a hood 1a on a head in a clean room.
This shows a state in which the whole body is covered by wearing the space type dustproof garment 1 having the following.

In FIG. 1, a dust collecting unit 2 in which a high-performance air filter and activated carbon are collectively put together in a unit.
b and a supply / exhaust unit 2c for ventilating the air inside the dustproof garment 1 are provided above the dustproof vest 1 through a ventilation pipe 2a having a reciprocating passage having a pair of air supply and exhaust. A chemical filter 3 having a cassette type structure is attached to the exhaust side of the ventilation mechanism 2 by a detachable tool 3a.

When the worker who is isolated from the clean manufacturing environment in the clean room by wearing the dust proof clothing 1 operates the air supply / exhaust unit 2c, the air inside the dust proof clothing 1 is discharged through the exhaust passage of the ventilation pipe 2a. Suctioned and dust collection unit 2b
During the passage through the chemical filter 3, the chemical substance to be absorbed is absorbed, and together with the dust, the dust passes through the chemical filter 3 provided adjacent to the exhaust side of the supply / exhaust unit 2c. The clean air from which the chemical substance as the chemical contamination source has been removed is discharged into the clean room, and the clean air in the clean room is sucked from the air supply port of the air supply / exhaust unit 2c and passes through the air supply passage of the ventilation pipe 2a. By being supplied into the dust-proof garment 1, the air inside the dust-proof garment 1 is ventilated. (Example) A dust collection unit in which a high-performance air filter and activated carbon are collectively integrated into a unit, and a supply / exhaust unit for ventilating the air inside the dustproof garment are about 15 cm in width, about 10 cm in depth, and about 18 cm in height. A ventilation mechanism is formed by arranging in a rectangular parallelepiped shape, and a frame edge having an outer frame dimension of about 15 cm in width, about 10 cm in depth, and about 3 cm in height is provided on the exhaust side of the ventilation mechanism and can be opened and closed. Prepare a chemical filter that can be attached and detached from one end, and insert a cassette type chemical filter for absorbing ammonia made of ion exchange fiber into the frame edge and fix it. By attaching to the, a ventilation device for dustproof clothing was constructed. (Comparative Example) A ventilation mechanism in which the same dust collection unit and air supply / exhaust unit as in the embodiment are arranged in a rectangular parallelepiped shape having the same dimensions as the embodiment is prepared, and this is attached to a space-type dust-proof garment. A clothing ventilation system was constructed.

The worker wearing the space-type dust-proof garment equipped with the ventilator for dust-proof garment in the above-described embodiment and the comparative example is engaged in a manufacturing operation of a recording medium for a magnetic disk in a class 10 clean room for about one hour. In the above process, the content of dust and ammonia is determined at two points, an inlet through which the air inside the dust-proof garment flows into the dust collection unit and an outlet through which the air passes through a predetermined path and is discharged into the clean room. In addition to the investigation, the state of chemical contamination on the surface of the magnetic disk recording medium manufactured was investigated.

Table 1 shows the results of the investigations on the above Examples and Comparative Examples.

[0016]

[Table 1] According to Table 1, in the ventilation device for a dustproof garment in which a chemical filter is attached to a ventilation mechanism including a dust collection unit and an air supply / exhaust unit as in the example, both dust and ammonia components are removed, It can be seen that there is no trace of chemical contamination on the surface of the product. Also, in a ventilation device for a dustproof hood provided with a ventilation mechanism composed of only a dust collection unit and a supply / exhaust unit as in the comparative example, dust can be removed by the dust collection unit, but the ammonia component is not removed. It can be seen that there is a trace of local chemical contamination on the surface of the object.

[0017]

According to the present invention, there is provided a ventilating apparatus for a dustproof garment having a ventilation mechanism including a dust collecting unit and a supply / exhaust unit for ventilating the air inside the dustproof garment worn in a clean room. Cleaner with a dust collection unit that removes dust and a chemical filter that removes chemical substances that are a source of chemical pollution, by using a chemical filter attached to the ventilation mechanism to absorb the chemical substances generated in the room Air is discharged from the dust-proof clothing into the clean room, so that the clean room can be constantly maintained in a clean production environment with less dust and chemical substances that are a source of chemical pollution. Surface contamination can be reduced and suppressed, and a decrease in the quality of the product can be avoided.

[Brief description of the drawings]

FIG. 1 is a rear view showing an embodiment of a state in which a ventilation device for dustproof clothing according to the present invention is mounted.

FIG. 2 is a rear view showing an example of a mounted state of a conventional dust-proof clothing ventilation device.

[Explanation of symbols]

 1 ... Dustproof clothing 1a ... Hood 2 ... Ventilation mechanism 2a ... Ventilation pipe 2b ... Dust collection unit 2c ... Supply / exhaust unit 3 ... .... Chemical filter 3a ... Removable tool

Claims (3)

[Claims] A ventilation system for a dust-proof garment having a ventilation mechanism including a dust-collecting unit and a supply / exhaust unit for ventilating air inside the dust-proof garment worn in a clean room,
A ventilation device for a dust proof garment, wherein a chemical filter for absorbing a chemical substance generated in the dust proof garment is attached to the ventilation mechanism. 2. The ventilation device for a dustproof garment according to claim 1, wherein the chemical filter has a cassette type structure. 3. The ventilation device for a dustproof garment according to claim 1, wherein the chemical filter has an ammonia gas absorbing function.