JPH11138488A - Articulated clean robot - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce static electricity generated on a tool attaching shaft, and prevent damage on an electric component which may easily be caused by static electricity by composing bellows which cover the vertically moving tool attaching shaft of an articulated clean robot used in a clean room of electroconductive material. SOLUTION: When a motor 16 attached to an arm 17 of a robot is rotated, a ball screw nut 20 of a ball screw spline 7 is rotated through a timing belt 15. A spline shaft 21 is thus vertically moved. A bellows holder 22 attached to the spline shaft 21 is interlocked therewith, while charge preventing ballows 6a, 6a attached thereto are interlockingly moved vertically. Static electricity may occur at the surface at this time. Surface specific resistance values of the bellows 6a, 6a are, however, very small and they are connected to a grounding terminal 3. Static electricity is eliminated through an exclusive grounding line to suppress static electricity voltage.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION In assembling semiconductors, electronic devices, hard disk drives, and the like, when an articulated clean robot is used, electronic components may be damaged by static electricity generated on the bellows surface covering a tool mounting shaft.

The present invention relates to a multi-joint clean robot having a function of reducing the generation of static electricity in order to prevent electronic parts from being damaged by static electricity generated on the bellows surface of a tool mounting shaft which moves up and down.

[0003]

2. Description of the Related Art FIG. 5 shows a conventional general-purpose horizontal articulated clean robot. The tip tool mounting shaft 1 that moves up and down is covered with a bellows 2 that expands and contracts. This multi-joint clean robot is well known and is not the object of the present invention, so a detailed description is omitted.

[0004] This type of multi-joint clean robot has a closed structure as much as possible to ensure cleanness. The tip tool mounting shaft 1 that moves up and down is generally covered with a bellows 2 made of urethane.

However, static electricity generated when the bellows covering the tip tool mounting shaft moves up and down as described above may flow to the component through the tool mounting shaft. If the components are electronic components that are sensitive to static electricity, such as semiconductors, electronic devices, and hard disk drives, or devices that include them,
There is a problem of being damaged by static electricity.

[0006]

SUMMARY OF THE INVENTION It is an object of the present invention to provide a function of reducing and eliminating static electricity generated on a tool mounting shaft of an articulated clean robot as described above. In particular, it is an object of the present invention to reduce the static electricity generated in the tip tool mounting shaft that moves up and down by using a bellows material. A second object is to eliminate static electricity from the tool mounting shaft via a dedicated ground wire.

[0007]

In order to solve the above problems, the articulated clean robot of the present invention uses a highly conductive and antistatic material as a bellows for a cover of a tool mounting shaft which moves up and down. ing. Second, the second
A structure where the end of the arm and the back of the main unit are connected with a dedicated ground wire, and the user connects the tool mounting shaft to the dedicated terminal at the end of the second arm by the user to reduce static electricity on the tool mounting shaft to ground and remove static electricity It is provided with.

According to the configuration of the present invention, the static electricity generated on the tool mounting shaft at the tip of the second arm of the articulated clean robot is reduced, and the generated static electricity is eliminated through the dedicated ground wire.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an articulated clean robot according to an embodiment of the present invention will be described with reference to an external perspective view of FIG. 1 and a sectional view of FIG. 3 is a ground terminal for removing static electricity, 4 is a ground wire, 5 is a chuck, 6a is an antistatic bellows (upper), and 7 is a tool mounting shaft which is a vertical axis at the tip. It is a ball screw spline. 8 is a hose for passing power and signal cables to the second arm, 9 is a wiring cover for covering power, signal cables, air pipes and the like on the main body arm 10 side, and 11 is a wiring cover for the main arm 10. A bracket for fixing power, signal cables, and air piping, 12 is a plate for fixing the ground terminal on the main body arm side, and 13 is a SW bracket for fixing the air piping and ground terminal on the second arm side. The ground terminal 3 and the ground terminal 14 are connected to the ground wire 4 through the hose 8, the bracket 11, the main body arm 10.
And is electrically connected to the plate 12. The ground terminal 3 and the chuck 5 are electrically connected to each other by a ground wire 18 through the hollow portion of the ball screw spline shaft 21 of the ball screw spline 7, the second arm 17, and the antistatic bellows (lower) 6b. The antistatic bellows (upper) 6a is electrically connected to the ground terminal 3 via the ZW cover 19 and the SW bracket 13. The antistatic bellows (lower) 6b is electrically connected to the ground terminal 3 via the second arm 17 and the SW bracket 13.
The operation of the multi-joint clean robot configured as described above will be described. The rotation of the motor 16 causes the ball screw spline 7 via the timing belt 15 to rotate.
When the ball screw nut 20 rotates, the ball screw spline shaft 21 moves up and down. When the bellows holder 22 attached to the ball screw spline shaft 21 moves up and down in conjunction with it, the antistatic bellows (upper) (lower) 6a and 6b attached thereto move up and down, and static electricity is generated on the surface thereof. However, the surface specific resistance of the antistatic bellows (upper) (lower) 6a, 6b is very small and is connected to the ground terminal 3, so that
The generated electrostatic voltage is smaller than that of the conventional bellows made of urethane. FIG. 3 shows measurement points for measuring the electrostatic charging voltage due to the difference between the actual bellows materials and the results. In this case, the urethane material is 11
4 (v), 30 (v) for antistatic bellows (lower) 6b
It has become. In addition, as shown in the conduction resistance value comparison table of FIG. 4, when comparing between the robot body mechanically joined by metal and the dedicated ground terminal, the dedicated ground terminal conduction resistance value is smaller. The values measured as an example are 0.06 (Ω) between the dedicated ground terminals and 1-2 (Ω) between the robots.
And significantly different. Therefore, antistatic bellows (lower) 6
The static electricity generated on the surface b is grounded and eliminated through the dedicated ground terminal.

Further, as an example, when producing bellows by heat welding, the setting of the welding method may be changed in the case of an antistatic sheet as compared with a conventional urethane sheet.

The antistatic sheet may be, for example, a sheet manufactured by Achilles: Seiden Crystal or a sheet having a low surface specific resistance.

[0012]

As described above, the articulated clean robot of the present invention can eliminate static electricity generated in the bellows covering the tool mounting shaft at the time of assembling semiconductors, hard disk drives, and electronic devices. Damage due to static electricity of weak electronic components can be prevented.

[Brief description of the drawings]

FIG. 1 is an external perspective view of a robot according to an embodiment of the present invention.

FIG. 2 is a sectional view of a robot according to one embodiment of the present invention.

FIG. 3A is a diagram showing points for measuring the charged voltage of the bellows material according to the present invention and the conventional one. FIG.

FIG. 4 is a diagram showing a measurement of conduction resistance between robots and a dedicated ground.

FIG. 5 is an external perspective view of a conventional articulated clean robot.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Conventional tool mounting shaft 2 Bellows made of urethane 3 Ground terminal (second arm side) 4 Ground wire 5 Chuck 6a Antistatic bellows (upper) 6b Antistatic bellows (lower) 7 Ball screw spline 8 Hose 9 Wiring cover 10 Body arm 11 Bracket 12 Plate 13 SW bracket 14 Earth terminal (Main body side) 15 Timing belt 16 Motor 17 Second arm 18 Earth wire (up to tip chuck) 19 ZW cover 20 Ball screw nut 21 Ball screw spline shaft 22 Bellows holder

Continuation of front page (72) Inventor Mikio Hasegawa 1006 Kazuma Kadoma, Kadoma City, Osaka Matsushita Electric Industrial Co., Ltd.

Claims (2)

[Claims] The invention is characterized in that the bellows that covers a vertically movable tool mounting shaft of an articulated clean robot used in a clean room is made of a conductive material, thereby reducing static electricity generated on the tool mounting shaft. Articulated clean robot. 2. The multi-joint according to claim 1, wherein an electrical connection is established between the robot body and the bellows, and static electricity generated in the bellows is removed via a dedicated ground wire wired in the robot body. Clean robot.