JPH11135346A - Current transformer - Google Patents

Current transformer

Info

Publication number
JPH11135346A
JPH11135346A JP9297215A JP29721597A JPH11135346A JP H11135346 A JPH11135346 A JP H11135346A JP 9297215 A JP9297215 A JP 9297215A JP 29721597 A JP29721597 A JP 29721597A JP H11135346 A JPH11135346 A JP H11135346A
Authority
JP
Japan
Prior art keywords
shield winding
conductor
shield
current
winding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9297215A
Other languages
Japanese (ja)
Other versions
JP3327460B2 (en
Inventor
Shinzo Ogura
新三 小倉
Kazuhiro Nakasaki
一弘 中崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP29721597A priority Critical patent/JP3327460B2/en
Publication of JPH11135346A publication Critical patent/JPH11135346A/en
Application granted granted Critical
Publication of JP3327460B2 publication Critical patent/JP3327460B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Regulation Of General Use Transformers (AREA)
  • Transformers For Measuring Instruments (AREA)

Abstract

PROBLEM TO BE SOLVED: To reduce a loss generated in a shield winding, size and weight of current transformer and its cost. SOLUTION: A shield winding 3 is divided into shield winding pieces 3a to 3d. The divided parts are arranged at A part near the outermost outer conductor 5 in the shield winding 3. The shield windings 3a and 3d nearest the outer conductor 5 become farther from the outer conductor 5 than heretofore and their directions are changed, so that the magnetic combination to the outer conductor 5 becomes weak and the induced current becomes small, thereby reducing a loss.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明は、被測定電流を測
定等に適した電流値に変成する変流器に関するものであ
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a current transformer for transforming a measured current into a current value suitable for measurement and the like.

【0002】[0002]

【従来の技術】図4は、例えば特許公報第260054
8号に示された従来の変流器の説明図である。図におい
て、1は被測定電流が流れる導体、2は導体1と鎖交す
る磁路を形成する鉄心、3は鉄心2上に巻回されたシー
ルド巻線で、同じ巻回数の4つのシールド巻線片3a〜
3dに分割されている。なお、鉄心2上には2次巻線も
巻回されているが、その図示を省略している。4a、4
bはシールド巻線片3a〜3dの同極性側同士を接続す
る接続線、5は導体1の近くにこれと平行に配置された
外部導体であり、最も近いシールド巻線片3aの中央部
分が外部導体5に面している。
2. Description of the Related Art FIG.
FIG. 9 is an explanatory diagram of a conventional current transformer shown in No. 8. In the figure, 1 is a conductor through which a current to be measured flows, 2 is an iron core forming a magnetic path interlinking with the conductor 1, and 3 is a shield winding wound on the iron core 2, and four shield windings having the same number of turns are provided. Wire piece 3a ~
It is divided into 3d. Although a secondary winding is also wound on the iron core 2, its illustration is omitted. 4a, 4
b is a connection line connecting the same polarity sides of the shield winding pieces 3a to 3d, 5 is an outer conductor arranged near and parallel to the conductor 1, and the central portion of the nearest shield winding piece 3a is Facing the outer conductor 5.

【0003】この構成においては、導体1に流れている
被測定電流に比例した電流が2次巻線に流れる。そし
て、シールド巻線片3a〜3dは同巻回数、かつ同極性
側同士の接続であるので、被測定電流で発生した磁束に
より誘導電流が循環することはない。一方、外部導体5
に流れる電流により発生した磁束Φが鉄心2に侵入す
る。しかし、侵入磁束を低減するようにシールド巻線片
3a〜3dに電流が流れて、外部導体5の電流による鉄
心2の磁気飽和を防ぎ、変流器の測定誤差の増大を防止
する。
[0003] In this configuration, a current proportional to the current to be measured flowing through the conductor 1 flows through the secondary winding. Since the shield winding pieces 3a to 3d have the same number of turns and are connected on the same polarity side, the induced current does not circulate due to the magnetic flux generated by the measured current. On the other hand, the outer conductor 5
A magnetic flux Φ generated by a current flowing through the iron core 2 penetrates the iron core 2. However, a current flows through the shield winding pieces 3a to 3d so as to reduce the infiltration magnetic flux, thereby preventing magnetic saturation of the iron core 2 due to the current of the outer conductor 5 and preventing an increase in the measurement error of the current transformer.

【0004】[0004]

【発明が解決しようとする課題】従来の変流器は以上の
ように構成されているので、近くに大きな電流が流れる
外部導体が存在する場合、外部導体に最も近いシールド
巻線片(図4の場合の3a)に大きな電流が流れるとと
もに、遠いシールド巻線片(3b〜3d)には比較的小
さな電流が流れる。その結果、外部導体に最も近いシー
ルド巻線片の発生損失が大きくなって過熱する恐れがあ
り、その対策として、耐熱性の良好な絶縁材料、断面積
の大きい巻線材料を使用しなければならず、したがって
寸法、重量が大きく、コストも高くなるという問題があ
った。
Since the conventional current transformer is configured as described above, if there is an external conductor near which a large current flows, the shield winding piece closest to the external conductor (FIG. 4) In this case, a large current flows through 3a), and a relatively small current flows through distant shield winding pieces (3b to 3d). As a result, the generated loss of the shield winding piece closest to the outer conductor may increase and cause overheating, and as a countermeasure, an insulating material with good heat resistance and a winding material with a large cross-sectional area must be used. Therefore, there is a problem that the size, weight and cost are high.

【0005】この発明は上記のような問題を解決するた
めになされたもので、近くに大きな電流が流れる外部導
体が存在する場合でも、シールド巻線中の発生損失を抑
えた小形、軽量、低コストの変流器を提供することを目
的とする。
SUMMARY OF THE INVENTION The present invention has been made to solve the above-described problem, and has a small size, light weight, and low power consumption that suppresses a loss generated in a shield winding even when there is an external conductor near which a large current flows. The aim is to provide a costly current transformer.

【0006】[0006]

【課題を解決するための手段】この発明に係る変流器
は、シールド巻線を4つのシールド巻線片に分割すると
ともに、被測定電流が流れる導体と外部導体とを結ぶ平
面内にシールド巻線の分割した部分を配置したものであ
る。また、上記において導体と外部導体とを結ぶ平面内
のシールド巻線の分割した部分の両側のシールド巻線片
を互いに離隔したものである。また、上記導体と外部導
体とを結ぶ平面内に一つのシールド巻線片の中央部分を
配置するとともに、この一つのシールド巻線片に直列イ
ンダクタンスを接続したものである。
A current transformer according to the present invention divides a shield winding into four shield winding pieces and has a shield winding in a plane connecting a conductor through which a current to be measured flows and an outer conductor. This is the arrangement of the divided parts of the line. In the above, the shield winding pieces on both sides of the divided portion of the shield winding in the plane connecting the conductor and the outer conductor are separated from each other. In addition, a central portion of one shield winding piece is arranged in a plane connecting the conductor and the external conductor, and a series inductance is connected to the one shield winding piece.

【0007】[0007]

【発明の実施の形態】BEST MODE FOR CARRYING OUT THE INVENTION

実施の形態1.以下、この発明の実施の形態1について
図を参照して説明する。図1はこの発明の実施の形態1
における変流器を示す説明図であり、図において、1は
被測定電流が流れる導体、2は導体1を囲むようにリン
グ状に設けられて導体1と鎖交する磁路を形成する鉄
心、3は鉄心2上に全周にわたりほぼ均一に巻回された
シールド巻線であり、互いに同じ巻回数の4つのシール
ド巻線片3a〜3dに分割されている。なお、鉄心2上
には2次巻線も巻回されているが、その図示を省略して
いる。
Embodiment 1 FIG. Hereinafter, a first embodiment of the present invention will be described with reference to the drawings. FIG. 1 shows Embodiment 1 of the present invention.
FIG. 1 is an explanatory diagram showing a current transformer in FIG. 1, in which 1 is a conductor through which a current to be measured flows, 2 is an iron core provided in a ring shape so as to surround the conductor 1 and forms a magnetic path interlinking with the conductor 1; Reference numeral 3 denotes a shield winding wound substantially uniformly on the iron core 2 over the entire circumference, and is divided into four shield winding pieces 3a to 3d having the same number of turns. Although a secondary winding is also wound on the iron core 2, its illustration is omitted.

【0008】4a、4bはシールド巻線片3a〜3dの
同極性側同士を接続する接続線、5は導体1の近くにこ
れと平行に配置された外部導体であり、例えば導体1と
対になって往復母線をなす場合や、あるいは図示外の導
体がもう1本組み合わされて3相母線を構成する場合な
どがある。シールド巻線3の、最も外部導体5に近い個
所A部には分割部分が来るように配置する。すなわち、
導体1と外部導体5を結ぶ平面内に、シールド巻線3の
分割した部分を配置している。
Reference numerals 4a and 4b denote connecting wires connecting the same polarity sides of the shield winding pieces 3a to 3d. Reference numeral 5 denotes an outer conductor arranged near and parallel to the conductor 1, for example, in pairs with the conductor 1. To form a reciprocating bus, or a combination of another conductor (not shown) to form a three-phase bus. The shield winding 3 is arranged so that the divided portion comes to a portion A closest to the outer conductor 5. That is,
The divided part of the shield winding 3 is arranged in a plane connecting the conductor 1 and the external conductor 5.

【0009】次に動作について説明する。導体1に流れ
ている被測定電流に比例した電流が2次巻線に流れる。
この電流により、計器や保護リレー(図示せず)を用い
て電流測定、機器の保護などを行う。そして、シールド
巻線片3a〜3dは同巻回数、かつ同極性側同士の接続
であるので、被測定電流で発生した磁束により誘導電流
が循環することはない。
Next, the operation will be described. A current proportional to the measured current flowing through the conductor 1 flows through the secondary winding.
Using this current, current measurement, protection of the device, and the like are performed using an instrument and a protection relay (not shown). Since the shield winding pieces 3a to 3d have the same number of turns and are connected on the same polarity side, the induced current does not circulate due to the magnetic flux generated by the measured current.

【0010】一方、外部導体5に流れる電流により発生
した磁束Φが鉄心2に侵入する。この磁束は鉄心2のあ
る部分から入り込み、他の部分から抜け出すので鉄心2
中で磁束の向きや磁束密度が異なる。したがってシール
ド巻線片3a〜3dに生じる誘起電圧が同じにならず、
侵入磁束を低減するようにシールド巻線片3a〜3dに
電流が流れる。その結果、外部導体5の電流による鉄心
2の磁気飽和を防いで、変流器の測定誤差の増大を防止
する。
On the other hand, the magnetic flux Φ generated by the current flowing through the outer conductor 5 enters the iron core 2. This magnetic flux enters from one part of the core 2 and escapes from the other part.
The direction of the magnetic flux and the magnetic flux density are different. Therefore, the induced voltages generated in the shield winding pieces 3a to 3d do not become the same,
A current flows through the shield winding pieces 3a to 3d so as to reduce the invasion magnetic flux. As a result, magnetic saturation of the iron core 2 due to the current of the outer conductor 5 is prevented, and the measurement error of the current transformer is prevented from increasing.

【0011】図1に示したシールド巻線3の、外部導体
5に最も近いシールド巻線片3a、3dは、図4の最も
近いシールド巻線片3aに比べて外部導体5からの距離
が大きくなるとともに向きも変化しているので、外部導
体5との磁気結合が弱くなり、誘導電流が抑制される。
実験結果では、相間距離(導体1と外部導体5の距離)
1100mm、変流器の直径860mm、母線電流(導
体1および外部導体5の電流)30kA、シールド巻線
3の巻回数1500ターン、シールド巻線3の巻線材料
の断面径2.4mmの場合、図4の巻線配置では135
W発生した損失が、図1の巻線配置にすると52Wに低
減した。
The shield winding pieces 3a and 3d of the shield winding 3 shown in FIG. 1 that are closest to the outer conductor 5 have a greater distance from the outer conductor 5 than the shield winding pieces 3a that are closest to FIG. As the orientation changes, the magnetic coupling with the external conductor 5 is weakened, and the induced current is suppressed.
In the experimental results, the distance between phases (distance between conductor 1 and outer conductor 5)
1100 mm, the diameter of the current transformer is 860 mm, the bus current (current of the conductor 1 and the outer conductor 5) is 30 kA, the number of turns of the shield winding 3 is 1500, and the cross-sectional diameter of the winding material of the shield winding 3 is 2.4 mm. In the winding arrangement of FIG.
The loss of W was reduced to 52 W when the winding arrangement shown in FIG. 1 was used.

【0012】実施の形態2.図2はこの発明の実施の形
態2における変流器を示す説明図であり、5a、5bは
導体1の近くでこれの両端に平行に配置された外部導体
であり、導体1と外部導体5a、5bとで3相母線を構
成している。シールド巻線3の、最も外部導体5a、5
bに近い個所A部およびB部は分割部分になっている。
すなわち、導体1と外部導体5a、5bとを結ぶ平面内
にはシールド巻線3の分割した部分を配置している。そ
して、A部の両側のシールド巻線片3a、3dは互いに
離隔していて、その間にシールド巻線3が巻かれてない
スペースができている。B部の両側のシールド巻線片3
b、3cについても上記と同様になっている。A部、B
部のシールド巻線の無い部分以外は、シールド巻線3が
鉄心2上にほぼ均一に巻回されている。5c、5d、5
eは、導体1、外部導体5a、5bがなす平面と平行な
平面内に配置された、三相母線を構成する別の外部導体
である。その他は実施の形態1の場合と同様であるの
で、説明を省略する。
Embodiment 2 FIG. FIG. 2 is an explanatory view showing a current transformer according to Embodiment 2 of the present invention. Reference numerals 5a and 5b denote external conductors disposed near and parallel to both ends of the conductor 1; , 5b constitute a three-phase bus. The outermost conductors 5a, 5a of the shield winding 3
The portions A and B close to b are divided portions.
That is, the divided portions of the shield winding 3 are arranged in a plane connecting the conductor 1 and the external conductors 5a and 5b. Then, the shield winding pieces 3a and 3d on both sides of the portion A are separated from each other, and a space where the shield winding 3 is not wound is formed therebetween. Shield winding pieces 3 on both sides of part B
The same applies to b and 3c. Part A, B
The shield winding 3 is wound substantially uniformly on the iron core 2 except for the portion where no shield winding is provided. 5c, 5d, 5
“e” is another external conductor constituting a three-phase bus, which is arranged in a plane parallel to the plane formed by the conductor 1 and the external conductors 5a and 5b. The rest is the same as in the first embodiment, and a description thereof will not be repeated.

【0013】この構成においては、外部導体5aとシー
ルド巻線片3a、3dとの間、および外部導体5bとシ
ールド巻線片3b、3cとの間の磁気結合が実施の形態
1の場合よりもさらに弱くなり、誘導電流が抑制され、
シールド巻線で発生する損失が小さくなる。さらに、別
の3相母線の外部導体5dの電流で生じる磁束の侵入に
対して、シールド巻線3の最も近い個所C部がシールド
巻線3の分割部分になっているので、シールド巻線片3
a、3bについては、図1のシールド巻線片3a、3d
について説明したのと同様の効果がある。
In this configuration, the magnetic coupling between the outer conductor 5a and the shield winding pieces 3a and 3d and the magnetic coupling between the outer conductor 5b and the shield winding pieces 3b and 3c are different from those in the first embodiment. Further weakened, the induced current is suppressed,
The loss generated in the shield winding is reduced. Furthermore, since the closest portion C of the shield winding 3 is a divided portion of the shield winding 3 with respect to the penetration of magnetic flux generated by the current of the external conductor 5d of another three-phase bus, the shield winding piece 3
a, 3b, the shield winding pieces 3a, 3d of FIG.
Has the same effect as described above.

【0014】実施の形態3.図3はこの発明の実施の形
態3における変流器を示す説明図であり、外部導体5に
最も近いシールド巻線片3aの中央部分が外部導体5に
面するようになっている。すなわち、導体1と外部導体
5を結ぶ平面内にシールド巻線片3aの中央部分を配置
している。6はインダクタンスを有するコイルであり、
シールド巻線片3aに接続されている。シールド巻線片
3aはコイル6を介して接続線4bにより他のシールド
巻線3b、3c、3dと接続されている。他の部分につ
いては実施の形態1の場合と同様であるので説明を省略
する。
Embodiment 3 FIG. 3 is an explanatory view showing a current transformer according to Embodiment 3 of the present invention, in which a central portion of a shield winding piece 3 a closest to the external conductor 5 faces the external conductor 5. That is, the central portion of the shield winding piece 3a is arranged in a plane connecting the conductor 1 and the external conductor 5. 6 is a coil having an inductance,
It is connected to the shield winding piece 3a. The shield winding piece 3a is connected to the other shield windings 3b, 3c and 3d via the coil 6 by a connection wire 4b. The other parts are the same as those in the first embodiment, and a description thereof will be omitted.

【0015】この構成においては、外部導体5に最も近
く磁気結合の強いシールド巻線片3aにインダクタンス
を付加したので、誘導電流の最もよく流れるシールド巻
線片3aの誘導電流が抑制される。なお、この実施の形
態ではシールド巻線3を4つに分割したが、6つなど他
の複数個に分割してもよい。
In this configuration, since an inductance is added to the shield winding piece 3a closest to the outer conductor 5 and having strong magnetic coupling, the induced current of the shield winding piece 3a through which the induced current flows most is suppressed. In this embodiment, the shield winding 3 is divided into four, but may be divided into other plural parts such as six.

【0016】[0016]

【発明の効果】この発明による変流器は以上のように構
成されているので、シールド巻線に流れる誘導電流が抑
制されて発生損失が低減し、したがって耐熱性の低い絶
縁材料、断面積の小さい巻線材料を使用することがで
き、小形、軽量、低コストの変流器が得られる効果があ
る。この発明による変流器においては、シールド巻線に
流れる電流が減ってシールド巻線によるシールド効果、
すなわち外部導体の電流で生じた磁束の侵入により鉄心
が飽和して変流器の誤差が増大するのを防ぐ効果が低下
する。しかし、シールド効果は既に十分であって、現実
の問題としてシールド巻線の過熱対策が重要な問題とな
っているような場合は、この発明による変流器の採用に
よりその対策として大きな効果を奏する。
Since the current transformer according to the present invention is constructed as described above, the induced current flowing through the shield winding is suppressed and the generated loss is reduced. Since a small winding material can be used, a current transformer having a small size, light weight, and low cost can be obtained. In the current transformer according to the present invention, the current flowing through the shield winding is reduced, and the shielding effect of the shield winding is reduced.
That is, the effect of preventing the core from being saturated by the intrusion of the magnetic flux generated by the current of the outer conductor and the error of the current transformer increasing is reduced. However, in the case where the shielding effect is already sufficient and the countermeasure for overheating of the shield winding is an important problem as a practical problem, the adoption of the current transformer according to the present invention has a great effect as a countermeasure. .

【図面の簡単な説明】[Brief description of the drawings]

【図1】 この発明の実施の形態1における変流器を示
す説明図である。
FIG. 1 is an explanatory diagram showing a current transformer according to Embodiment 1 of the present invention.

【図2】 この発明の実施の形態2における変流器を示
す説明図である。
FIG. 2 is an explanatory diagram showing a current transformer according to Embodiment 2 of the present invention.

【図3】 この発明の実施の形態3における変流器を示
す説明図である。
FIG. 3 is an explanatory diagram showing a current transformer according to Embodiment 3 of the present invention.

【図4】 従来の変流器を示す説明図である。FIG. 4 is an explanatory view showing a conventional current transformer.

【符号の説明】[Explanation of symbols]

1 導体、2 鉄心、3 シールド巻線、3a〜3d
シールド巻線片、4a,4b 接続線、5,5a〜5d
外部導体、6 コイル。
1 conductor, 2 iron core, 3 shield winding, 3a-3d
Shield winding piece, 4a, 4b connection wire, 5.5a-5d
Outer conductor, 6 coils.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 被測定電流が流れる導体を囲む鉄心、お
よびこの鉄心上に巻回した2次巻線とシールド巻線とを
備え、このシールド巻線を同じ巻回数の複数のシールド
巻線片に分割するとともに、このシールド巻線片の同極
性側同士を接続した変流器において、上記シールド巻線
を4つのシールド巻線片に分割するとともに、上記導体
と、上記導体と平行に配置した外部導体とを結ぶ平面内
に上記シールド巻線の分割した部分を配置したことを特
徴とする変流器。
An iron core surrounding a conductor through which a current to be measured flows, a secondary winding and a shield winding wound on the iron core, wherein the shield winding is formed by a plurality of shield winding pieces having the same number of turns In the current transformer in which the same polarity sides of the shield winding pieces are connected to each other, the shield winding is divided into four shield winding pieces, and the conductor and the conductor are arranged in parallel with each other. A current transformer, wherein a divided portion of the shield winding is arranged in a plane connecting an external conductor.
【請求項2】 導体と外部導体とを結ぶ平面内のシール
ド巻線を分割した部分の両側のシールド巻線片を互いに
離隔して配置したことを特徴とする請求項1記載の変流
器。
2. The current transformer according to claim 1, wherein shield winding pieces on both sides of a portion where the shield winding is divided in a plane connecting the conductor and the outer conductor are spaced apart from each other.
【請求項3】 被測定電流が流れる導体を囲む鉄心、お
よびこの鉄心上に巻回した2次巻線とシールド巻線とを
備え、このシールド巻線を同じ巻回数の複数のシールド
巻線片に分割するとともに、このシールド巻線片の同極
性側同士を接続した変流器において、上記導体と、上記
導体と平行に配置した外部導体とを結ぶ平面内に一つの
上記シールド巻線片の中央部分を配置するとともに、上
記一つのシールド巻線片に直列にインダクタンスを接続
し、このインダクタンスを介して他のシールド巻線片と
接続したことを特徴とする変流器。
3. An iron core surrounding a conductor through which a current to be measured flows, a secondary winding and a shield winding wound on the iron core, and the shield winding is formed by a plurality of shield winding pieces having the same number of turns. In the current transformer in which the same polarity sides of the shield winding pieces are connected to each other, one shield winding piece is placed on a plane connecting the conductor and an external conductor arranged in parallel with the conductor. A current transformer having a central portion disposed therein, an inductance connected in series to the one shield winding piece, and connected to another shield winding piece via the inductance.
JP29721597A 1997-10-29 1997-10-29 Current transformer Expired - Fee Related JP3327460B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29721597A JP3327460B2 (en) 1997-10-29 1997-10-29 Current transformer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29721597A JP3327460B2 (en) 1997-10-29 1997-10-29 Current transformer

Publications (2)

Publication Number Publication Date
JPH11135346A true JPH11135346A (en) 1999-05-21
JP3327460B2 JP3327460B2 (en) 2002-09-24

Family

ID=17843674

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29721597A Expired - Fee Related JP3327460B2 (en) 1997-10-29 1997-10-29 Current transformer

Country Status (1)

Country Link
JP (1) JP3327460B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113219226A (en) * 2021-05-26 2021-08-06 中国电力科学研究院有限公司 Induction voltage divider based on multistage excitation and manufacturing method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113219226A (en) * 2021-05-26 2021-08-06 中国电力科学研究院有限公司 Induction voltage divider based on multistage excitation and manufacturing method thereof
CN113219226B (en) * 2021-05-26 2023-02-28 中国电力科学研究院有限公司 Induction voltage divider based on multistage excitation and manufacturing method thereof

Also Published As

Publication number Publication date
JP3327460B2 (en) 2002-09-24

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