JPH11134608A - Production of magnetic head and magnetic head - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent rust generation and to improve a production yield by covering the entire surface of workpieces with a water repelling agent right after a deposition stage of magnetic metallic thin films and a machining stage. SOLUTION: Two substrates 20 are tightly adhered by opposing track width regulating grooves to each other and are joined by a nonmagnetic material 19. Magnetic recording medium-contact surfaces are ground to a semi-cylindrical shape and after the substrates 20 are immersed into a vessel 22 of the water repelling agent 21, the substrates are taken out and are dried for several seconds. Here, the water repelling agent 21 is made into an easily removable liquid by an org. solvent, such as toluene. The amt. of the water repelling agent to be used is confined to <=0.5 g for each one piece of the substrates 20. The vessel 22 capable of preventing evaporation of the water repelling agent 21 is used. Next, the grooves 23 for regulating the contact width of the magnetic recording medium-contact surfaces of the substrates 20 are formed. The substrates are again immersed into the water repelling agent 21 after the formation and are taken out and dried. Further, the substrates 20 are cut from the central point at the width of the grooves 23 toward the base and, thereafter, the water repelling agent 21 on the surface is removed by toluene, by which the magnetic head is completed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a magnetic head for recording and reproducing data on a magnetic recording medium and a magnetic head manufactured by the method.

[0002]

2. Description of the Related Art In recent years, in the field of magnetic recording, the density of recording signals has been increasing, and a magnetic recording medium having a high coercive force and a high residual magnetic flux density, such as a ferromagnetic metal material, has been used as a nonmagnetic support. A magnetic tape such as a metal tape directly adhered thereon is used.

In order to record and reproduce data on and from a magnetic tape such as a metal tape, it is necessary to use a metal magnetic material having a high saturation magnetic flux density for obtaining a sufficient recording magnetic field and excellent soft magnetic properties. -It is necessary to use it for an in-gap type magnetic head.

Recently, as the metal magnetic material, Fe
Microcrystalline metal magnetic thin films containing (iron) as a main component have been put into practical use. This metal magnetic thin film is composed of a multilayer film in which a magnetic thin film layer composed of FeMN and a Pt (platinum) layer are stacked. M is Ta (tantalum), Zr (zirconia), Hf (hafnium), Nb (niobium), Ti
At least one metal selected from the group consisting of (titanium), and N is nitrogen.

[0005]

The magnetic head having the above-described metal magnetic thin film has a disadvantage that rust is easily generated on the metal magnetic thin film exposed on the sliding surface by machining such as grinding. As a cause of this rust, Fe contained in a large amount in the metal magnetic thin film, or fine crystal grains having a composition close to pure Fe, which is generated by the separation of the Fe layer and the MN layer by heat treatment, are used to remove processing dust. This is to cause a chemical reaction with Cl (chlorine) contained in the cleaning liquid in the cleaning step, Cl contained in sweat generated by the operator, and the like.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and has as its object to provide a method of manufacturing a magnetic head capable of preventing generation of rust and a magnetic head manufactured by the method.

[0007]

According to the present invention, there is provided a method for manufacturing a magnetic head in which a magnetic gap is formed of a metal magnetic thin film, the method comprising: This is achieved by incorporating a step of covering the entire surface of the workpiece with the water repellent immediately after the end of the step. Further, the above object is attained in the present invention,
A magnetic head in which a magnetic gap is formed of a metal magnetic thin film, wherein a step of covering the entire surface of the workpiece with a water-repellent agent immediately after a machining step after the film forming step of the metal magnetic thin film is incorporated. This is achieved by being manufactured by a manufacturing process.

According to the above configuration, even if the metal magnetic thin film is exposed by machining, the exposed metal magnetic thin film is covered with the water repellent, so that the occurrence of rust on the exposed metal magnetic thin film can be prevented. .

[0009]

Preferred embodiments of the present invention will be described below in detail with reference to the accompanying drawings. The embodiment described below is a preferred specific example of the present invention,
Although various technically preferable limits are given, the scope of the present invention is not limited to these embodiments unless otherwise specified in the following description.

FIG. 1 is a perspective view showing an embodiment of a magnetic head to which the present invention is applied, and FIG. 2 is a partially enlarged plan view thereof. The magnetic head 10 includes a pair of magnetic core halves 11 and 12 which are separately formed on the left and right sides of a magnetic gap g positioned substantially at the center of the magnetic recording medium contact surface 10a.
Are joined and integrated by abutting a magnetic gap forming surface which is an abutting surface.

The magnetic gap g is made of SiO ₂ or Al ₂
It is made of a non-magnetic material such as glass in which Na ₂ CO ₃ or PbO is mixed with O ₃ or SiO ₂ , and has a predetermined azimuth angle θ inclined with respect to the running direction (track direction) of the magnetic tape indicated by the arrow T. And has a predetermined gap length in the direction of the track width Tw.

The magnetic core halves 11 and 12 are composed of bases 13 and 14 serving as auxiliary cores and a metal magnetic thin film 1 serving as a main core.
5 and 16. The bases 13 and 14 are made of an oxide soft magnetic material such as a Mn-Zn ferrite or a Ni-Zn ferrite, for example.
Together with the auxiliary core part forming a closed magnetic circuit.

On the magnetic gap forming surfaces of the bases 13 and 14, track width regulating grooves 17 and 18 for regulating the track width Tw of the magnetic gap g extend from the vicinity of both ends of the magnetic gap g in the depth direction. It is formed in an arc shape. The track width regulating grooves 17 and 18 are filled with a non-magnetic material 19 such as glass for the purpose of securing the contact characteristics with the magnetic recording medium and preventing uneven wear due to sliding contact.

On the surfaces of the bases 13 and 14 facing the magnetic gap forming surfaces, winding grooves 11a and 12a for restricting the depth of the magnetic gap g and winding a coil (not shown) are provided. , Are formed to have a substantially rectangular side surface. The winding groove may be formed only on one of the bases.

The metal magnetic thin films 15 and 16 are made of, for example, Fe-
It is made of a ferromagnetic metal material having excellent soft magnetic properties such as a Si-Al-based alloy or an Fe-Ta-N-based alloy. The magnetic gap forming surfaces of the bases 13 and 14, the track width regulating grooves 17 and 18, and the winding grooves Films are formed on the entire surface including the inside of 11a and 12a,
Together with the bases 13 and 14, it is a main core that forms a closed magnetic circuit. Therefore, the opposing surfaces of the metal magnetic thin films 15 and 16 are the magnetic gap forming surfaces of the magnetic core halves 11 and 12. The metal magnetic thin films 15 and 16 may be formed on at least a part of the surfaces of the winding grooves 11a and 12a.

A method for manufacturing the magnetic head 10 having such a configuration will be described. First, as shown in FIG. 3, for example, an M of about 34.5 mm in length, 2.5 mm in width, and about 1 mm in thickness is used.
Substrate 20 made of n-Zn ferrite oxide soft magnetic material
Is prepared. Subsequently, as shown in FIG.
In the width direction of the main surface 20a of FIG.
18 are formed.

Here, the track width regulating grooves 17, 18
The angle of the side surface of the portion which is in contact with the main surface 20a is usually formed at about 8 ° to 45 °, but may be 0 °.
However, if the angle is small, the electromagnetic conversion efficiency is reduced, and if the angle is large, the possibility of reading a signal from a non-target track on the magnetic recording medium is increased, resulting in an increase in noise. . The depth of the track width regulating grooves 17 and 18 is 80 μm to 150 μm.
m, and the cross-sectional shape of the track width regulating grooves 17 and 18 is usually U-shaped or V-shaped.
It may be a polygon.

Next, as shown in FIG.
To form a winding groove 11a, 12a for winding the winding. Then, the main surface 20a of the base 20 is polished so that the surface roughness becomes about 20 ° to 100 °. As shown in FIGS. 6 and 7, with respect to the substrate 20 formed as described above, as shown in FIGS.
6 and a gap film gf are formed by a sputtering method. Then, as shown in FIG. 8, the two bases 20 are brought into close contact with the track width regulating grooves 17 and 18 together and joined by the non-magnetic material 19.

Next, as shown in FIG.
The magnetic recording medium-contact surface 10a of No. 0 is formed in a semi-cylindrical shape by machining such as cylindrical grinding. Then, as shown in FIG. 10, the cylindrically ground substrate 20 is immersed in a container 22 containing a water repellent 21, and then the substrate 20 is taken out of the container 22 and dried for several seconds. In addition, the base 20 is made of a water repellent 21
Instead of immersion, a water repellent 21 may be applied to the base 20.

Here, the water repellent 21 may be any liquid that has a water repellent effect and can be easily removed with an organic solvent such as toluene.
25 (manufactured by Sumitomo 3M) is used. The immersion conditions are regulated by the immersion holding time,
For example, after holding the state in which the substrate 20 is completely immersed in the water repellent 21 for 2 seconds, the substrate 20 is taken out of the container 22 and naturally dried. Since the amount of the water repellent 21 used is 0.5 g or less per one substrate 20, if the water repellent 21 is managed using a container 22 or the like which can prevent the evaporation of the water repellent 21, the manufacturing cost is increased. Can be suppressed.

Next, as shown in FIG. 11, a groove 23 for regulating the contact width of the base 20 with the contact surface 10a with the magnetic recording medium.
Is formed by machining such as grinding. And FIG.
As shown in FIG. 2, the substrate 20 having the groove 23 formed thereon is immersed again in the container 22 containing the water repellent 21, and then the substrate 20
Is removed from the container 22 and dried for a few seconds. The base 2
Instead of immersing 0 in the water repellent 21, the water repellent 21 may be applied to the substrate 20. The type of the water repellent 21 and the immersion conditions at this time are the same as those described with reference to FIG.

Finally, as shown in FIG. 13, the substrate 20 is sliced along the dotted lines a to c and immersed in a container containing toluene, or wiped with a cloth impregnated with toluene. Then, the water repellent 21 is removed to complete the magnetic head 10 as shown in FIG.

Here, the reason why the water repellent 21 is not used after slicing the substrate 20 is as follows. That is, as shown in FIG. 14A, the cutting direction of the base body 20 is the same as the rotation direction of the grindstone 24. Therefore, as shown in FIG.
The water repellent 21 remaining on the bottom surface of the contact width regulating groove 23 of the base 20 is diffused to the slicing surface of the base 20 by the grindstone 24 passing through the base 20. This is because the metal magnetic thin films 15 and 16 exposed on the slicing surface of the base 20 are covered with the water repellent 21.

In the manufacturing method described above, the winding groove 11
Although the case where the metal magnetic thin films 15 and 16 are formed after the formation of the metal magnetic thin films 15 and 16 has been described above, the winding grooves 11a and 12a
The metal magnetic thin films 15 and 16 may be formed prior to the formation. Although the magnetic head 10 having the azimuth angle θ has been described, the present invention can be similarly applied to a magnetic head having an azimuth angle θ of 0 °.

The magnetic head 10 manufactured as described above
When the number of rusts generated in the contact width control groove and the contact surface of the magnetic head with the conventional magnetic head was compared, the number of rusts generated in the magnetic head 10 of this embodiment was 0 out of 1,000. The number of rusts generated in the conventional magnetic head is 1000
125 of them.

According to the method of manufacturing the magnetic head 10 of this embodiment, in the processing step, contact between the metal magnetic thin films 15 and 16 and Cl or an element other than Cl which causes rust is blocked by the water repellent 21. Therefore, the generation of rust can be prevented. Further, since the generation of rust is suppressed, the yield of the magnetic head 10 can be improved.

Further, since the entire substrate 20 is covered with the water repellent agent 21, it is easy to remove dirt attached in the processing step, and the cleaning step can be simplified. As a result, the amount of the organic solvent used can be reduced, and the cost for environmental pollution measures and the like can be reduced. Further, since the water repellent 21 can be removed with an organic solvent, the magnetic head 1 is not used in the assembling step which is the next step of the processing step.
There is no particular problem in the bonding performance when bonding 0 to the head base.

FIG. 15 is a perspective view showing an embodiment of a magnetic head device according to the present invention, and FIG. 16 is a plan view showing an example of an information recording device provided with the magnetic head device.
The magnetic head device 30 is applied to an information recording device such as a video tape recorder, a data streamer, and a digital audio system, and records information on a magnetic tape TP which is a tape-shaped recording medium.
This is a rotary magnetic head device used for reproducing information recorded in P.

The rotating magnetic head device 30 includes a fixed drum 3
1, a rotating drum 32, and a motor M. The rotating drum 32 has, for example, two reproduction heads RH1 and RH2 and two recording heads WH1 and WH2 having the configuration of the magnetic head 10 described above. Each reproduction MR head RH
1, RH2 and each of the recording heads WH1, WH2 have a phase difference of 180 degrees. The rotating drum 32 rotates in the direction of arrow R with respect to the fixed drum 31 by the operation of the motor M.

The magnetic tape TP is fed obliquely from the inlet side IN to the outlet side OUT along the tape guide direction 33 along the tape guide direction 33 of the fixed drum 31. That is, the magnetic tape TP is supplied from the supply reel 34 to the rollers 34a, 3a.
4b and 34c, it travels obliquely along the lead guide portion 33 of the fixed drum 31 and comes into close contact with the rotating drum 32 and the fixed drum 31 by approximately 180 degrees.
e, 34f, and 34g, and wound on a take-up reel 35. Thereby, the recording heads WH1 and WH2 and the reproduction MR
The heads RH1 and RH2 are guided in contact with the magnetic tape TP by a helical scan method. A capstan 34h is provided corresponding to the roller 34f, and the capstan 34h is provided with a capstan motor M1.
Is rotated by

[0031]

As described above, according to the present invention, the generation of rust can be prevented, and the production yield can be improved.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an embodiment of a magnetic head according to the present invention.

FIG. 2 is a partially enlarged plan view of the magnetic head of FIG. 1;

FIG. 3 is a first view showing a method for manufacturing the magnetic head of FIG. 1;

FIG. 4 is a second view showing the method for manufacturing the magnetic head of FIG. 1;

FIG. 5 is a third view showing the method of manufacturing the magnetic head of FIG. 1;

FIG. 6 is a fourth diagram showing the method of manufacturing the magnetic head of FIG. 1;

FIG. 7 is a fifth diagram showing the method of manufacturing the magnetic head in FIG. 1;

FIG. 8 is a sixth diagram showing the method for manufacturing the magnetic head of FIG. 1;

FIG. 9 is a seventh diagram showing the method of manufacturing the magnetic head of FIG. 1;

FIG. 10 is an eighth diagram showing the method for manufacturing the magnetic head in FIG. 1;

FIG. 11 is a ninth view illustrating the method of manufacturing the magnetic head in FIG.

FIG. 12 is a tenth view showing the method for manufacturing the magnetic head of FIG. 1;

FIG. 13 is an eleventh diagram showing the method for manufacturing the magnetic head of FIG. 1;

FIG. 14 is a view showing a phenomenon in a manufacturing process of the magnetic head of FIG. 12;

FIG. 15 is a perspective view showing an example of a magnetic head device provided with the magnetic head of the present invention.

FIG. 16 is a plan view showing an example of an information recording device including the magnetic head device of FIG.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 10 ... Magnetic head, 11, 12 ... Magnetic core half body, 11a, 12a ... Winding groove, 13, 14 ... Substrate, 15, 16 ... Metal magnetic thin film, 17, 18-・ ・
Track width restricting groove, 19: non-magnetic material, 20: base, 21: water-repellent, 22: container, 23: contact width restricting groove, 24: grinding stone

Claims (4)

[Claims] 1. A method of manufacturing a magnetic head in which a magnetic gap is formed of a metal magnetic thin film, wherein a water repellent is applied to the entire surface of the workpiece immediately after a machining process after the metal magnetic thin film is formed. A method for manufacturing a magnetic head, comprising a step of covering with a magnetic head. 2. The method of manufacturing a magnetic head according to claim 1, wherein a step of removing a water repellent covering the entire surface of the workpiece with an organic solvent is incorporated in a final step. 3. The method of manufacturing a magnetic head according to claim 1, wherein the machining step is a machining step excluding a step of slicing the magnetic head into a final shape. 4. A magnetic head in which a magnetic gap is formed of a metal magnetic thin film, wherein the entire surface of the processed object is treated with a water repellent immediately after a machining step after the step of forming the metal magnetic thin film. A magnetic head manufactured by a manufacturing process including a covering process.