JPH1112786A - Conduction treating liquid - Google Patents

Conduction treating liquid

Info

Publication number
JPH1112786A
JPH1112786A JP16411397A JP16411397A JPH1112786A JP H1112786 A JPH1112786 A JP H1112786A JP 16411397 A JP16411397 A JP 16411397A JP 16411397 A JP16411397 A JP 16411397A JP H1112786 A JPH1112786 A JP H1112786A
Authority
JP
Japan
Prior art keywords
acid
conductive
monomer
conduction
range
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16411397A
Other languages
Japanese (ja)
Inventor
Hisao Takano
久夫 高野
Mizuki Nagai
瑞樹 長井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Showa Denko Materials Co Ltd
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP16411397A priority Critical patent/JPH1112786A/en
Publication of JPH1112786A publication Critical patent/JPH1112786A/en
Pending legal-status Critical Current

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  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
  • Electroplating Methods And Accessories (AREA)

Abstract

PROBLEM TO BE SOLVED: To form a stable conductive film in the initial period of conduction and to rapidly complete a polymn. reaction by adhering a conductive monomer to an insulated surface, then constituting a conduction treating liquid to impart electrical conductivity by oxidation polymn. of this monomer of an org. acid or its salts and an inorg. acid and the conductive monomer. SOLUTION: The conductive monomer is composed of a monomer consisting of a 5-membered heterocyclic group contg. sulfur or nitrogen, for example, pyrrole, thiophene, furan or its deriv. The amt. thereof to be added is preferably in a range of 0.01 to 0.3 wt.%. While the inorg. acid is generally sulfuric acid, other examples thereof include hydrochloric acid, phosphoric acid, etc. The content thereof is in a range of 1 to 20 wt.%. The examples of the org. acid or its salts include p-toluenesulfonic acid or its salt, etc. The content thereof is preferably set in a range of 0.1 to 30 wt.%.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、モノマーの化学的
な方法による酸化重合を利用して、導電性皮膜を絶縁物
表面に形成する方法、特にプリント配線板のスルーホー
ルをめっきして、スルーホールに導体を形成するために
有利に使用することのできる酸性導電化処理液に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of forming a conductive film on the surface of an insulating material by utilizing the oxidative polymerization of a monomer by a chemical method. The present invention relates to an acidic conductive solution which can be advantageously used for forming a conductor in a hole.

【0002】[0002]

【従来の技術】絶縁基板のスルーホールの内壁に電気め
っきを行うために、予めスルーホール内壁に導電性を付
与する手段として、特開平5−506125号公報およ
び特開平4−188696号公報に示されているよう
に、従来のような無電解めっきによらず、酸化重合によ
り導電性高分子膜を形成する有機モノマーと溶媒又は可
溶化剤を含む処理液、例えばピロールとN−メチル−2
−ピロリドンとの混合物を用い、スルーホール内壁の絶
縁物表面に導電性高分子膜を形成した後、電気銅めっき
を行う方法が提案されている。
2. Description of the Related Art Japanese Patent Application Laid-Open Nos. 5-506125 and 4-188696 disclose means for imparting conductivity to the inner wall of a through hole in advance in order to electroplate the inner wall of the through hole of an insulating substrate. As described above, a processing solution containing an organic monomer for forming a conductive polymer film by oxidative polymerization and a solvent or a solubilizing agent, such as pyrrole and N-methyl-2, instead of the conventional electroless plating.
-A method has been proposed in which a mixture with pyrrolidone is used to form a conductive polymer film on the surface of an insulator on the inner wall of a through-hole, and then to perform electrolytic copper plating.

【0003】例えば、絶縁基板の所定箇所にドリルで穴
あけし、次いで研磨、洗浄等を含む洗浄活性工程(デス
ミア工程)、さらに、銅箔表面の粗化を行うエッチング
工程、被めっき物表面の改質を行うコンデショニング工
程、重合触媒となるマンガン酸化物を形成する過マンガ
ン酸処理工程、導電性高分子膜となる有機モノマーの付
与工程、酸化重合工程から成る導電化処理を経た後、直
接電気銅めっきを行い、絶縁基板のスルーホールが形成
するなどである。これらの工程のうち、酸化重合工程
は、マンガン酸化物を重合触媒として、酸化物質を含む
酸性溶液中において、化学反応により導電性ポリマーを
絶縁物表面に形成する工程である。
For example, a predetermined area of an insulating substrate is drilled, followed by a cleaning activation step (desmear step) including polishing and cleaning, an etching step for roughening the copper foil surface, and a modification of the surface of the object to be plated. After conducting a conditioning process, a permanganic acid treatment process to form a manganese oxide serving as a polymerization catalyst, a process of applying an organic monomer to form a conductive polymer film, and an oxidative polymerization process, For example, copper plating is performed to form through holes in the insulating substrate. Among these steps, the oxidative polymerization step is a step of forming a conductive polymer on the surface of an insulator by a chemical reaction in an acidic solution containing an oxidizing substance using manganese oxide as a polymerization catalyst.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、このよ
うな工程において、導電化処理液の初期(新液)の状態
では、皮膜の導電性が充分でなく、これを補うために、
ダミーを用いて導電化処理液をある程度使い込まなけれ
ばならないという課題があった。
However, in such a process, in the initial state (new solution) of the electroconductive treatment liquid, the conductivity of the film is not sufficient.
There has been a problem that a conductive solution must be used to some extent using a dummy.

【0005】本発明は、導電化初期においても、安定し
た導電性を有する皮膜を形成させることを可能にし、か
つ重合反応を短時間に完了させることを目的とする。
An object of the present invention is to make it possible to form a film having a stable conductivity even at the initial stage of conductivity, and to complete the polymerization reaction in a short time.

【0006】[0006]

【課題を解決するための手段】本発明の導電化処理液
は、絶縁化表面に導電性モノマーを付着させ、その後、
その導電性モノマーを酸化重合して導電性を付与する導
電化処理液として、有機酸もしくはその塩類と無機酸と
導電性モノマーとからなることを特徴とする。
Means for Solving the Problems The electroconductive treatment liquid of the present invention causes a conductive monomer to adhere to an insulating surface, and thereafter,
The conductive treatment liquid for imparting conductivity by oxidative polymerization of the conductive monomer is made of an organic acid or a salt thereof, an inorganic acid, and a conductive monomer.

【0007】[0007]

【発明の実施の形態】本発明の導電性モノマーは、硫黄
或あるいは窒素を含有する5員の複素環基から成るモノ
マー例えば、ピロール、チオフェン、フランもしくはそ
の誘導体等を添加することができる。添加量は0.01
〜0.3重量%の範囲が好ましい。その理由は0.01
重量%未満であると、均一な導電性皮膜が得られず、
0.3重量%を超えると、処理液の寿命が低下するため
である。
BEST MODE FOR CARRYING OUT THE INVENTION The conductive monomer of the present invention may contain a monomer comprising a sulfur or nitrogen-containing 5-membered heterocyclic group, for example, pyrrole, thiophene, furan or a derivative thereof. Addition amount is 0.01
The range is preferably from 0.3 to 0.3% by weight. The reason is 0.01
If the content is less than 10% by weight, a uniform conductive film cannot be obtained,
If the content exceeds 0.3% by weight, the life of the processing solution is reduced.

【0008】本発明に用いる導電化処理液の基本成分の
うち無機酸は、硫酸が一般的であるが、他に塩酸、りん
酸等が挙げられる。その含有量の範囲は、1〜20重量
%の範囲が好ましく、1重量%未満の場合には安定な酸
化反応を行うことができず、導電性が不十分となる。ま
た、含有量が20重量%を超えると効果の向上はなく、
経済的でない。
[0008] Among the basic components of the electroconductive treatment solution used in the present invention, the inorganic acid is generally sulfuric acid, but other examples include hydrochloric acid and phosphoric acid. The content is preferably in the range of 1 to 20% by weight, and if it is less than 1% by weight, a stable oxidation reaction cannot be performed, resulting in insufficient conductivity. When the content exceeds 20% by weight, the effect is not improved.
Not economic.

【0009】さらに、用いる有機酸もしくはその塩類と
しては、p−トルエンスルホン酸あるいはその塩、ポリ
スチレンスルホン酸あるいはその塩等が挙げられる。そ
の含有量は、0.1〜30重量%の範囲に設定されるこ
とが好ましく、0.1重量%未満の場合には、均一な導
電性皮膜の形成が難しく、20重量%を超えると効果の
改善がなく経済的ではない。
Further, examples of the organic acid or salts thereof used include p-toluenesulfonic acid or a salt thereof, and polystyrenesulfonic acid or a salt thereof. The content is preferably set in the range of 0.1 to 30% by weight, and if it is less than 0.1% by weight, it is difficult to form a uniform conductive film, and if it exceeds 20% by weight, it is not effective. It is not economical without improvement.

【0010】[0010]

【実施例】本発明に用いた導電化処理液係の基本組成、
条件を以下に示した。 98%硫酸・・・・・・・・・・・・・・・・・100ml/l p−トルエンスルホン酸・・・・・・・・・・・・150g/l 温度:25±1℃
DESCRIPTION OF THE PREFERRED EMBODIMENTS Basic composition of conductive treatment solution used in the present invention,
The conditions are shown below. 98% sulfuric acid 100 ml / l p-toluenesulfonic acid 150 g / l Temperature: 25 ± 1 ° C

【0011】実施例1 ガラス基材エポキシ樹脂銅張積層板の60×100m
m、板厚0.4mmtの表裏にエッチングにより長さ5
0mm、幅1.5mm,3mm,5mm,7.5mm,
10mm,15mm,20mmの樹脂部を露出させた7
種類の面積が異なる窓を形成し、これを過硫酸ナトリウ
ム溶液(80g/l)中3分間浸漬してエッチング処理
を施した。次いで、充分に水洗いした後、コンデショナ
ーCLD−100(日立化成工業株式会社製、商品名)
に、40℃で、5分間浸漬して表面処理を行った。次い
で、充分な水洗を行った後、過マンガン酸カリウム溶液
(60g/l)中に、85℃で、3分間浸漬して表面処
理を行った。その後、充分に水洗いを行い、導電性モノ
マー溶液CAD−100(日立化成工業株式会社製、商
品名)中に、室温で、2分間浸漬してモノマーを付与し
た。次いで、得られた銅張積層板を水洗なしで、前記基
本液にチオフェン誘導体を0.1g/l添加した導電化
処理液中に2分間浸漬し、絶縁物表面に導電性高分子膜
を形成させ、皮膜の色相を観察した。さらに、硫酸銅め
っき浴として、硫酸銅5水和物60g/l、硫酸180
g/l、塩素イオン50ppmおよび光沢剤CG−12
5(メルテックス社製、商品名)5ml/lからなる浴
を用い、2A/dm2 で5分間銅めっきを行い、めっ
きの析出性を評価した。めっき析出性の評価は、導電性
高分子膜が均一に形成されていないと、めっき銅の成長
が不均一となるだけでなく、めっき銅で被覆されるまで
の時間が長くなり、完全に被覆される窓の幅が短くなる
ことで評価した。
Example 1 A glass-based epoxy resin copper-clad laminate of 60 × 100 m
m, length of 5mm by etching on both sides of 0.4mmt plate
0mm, width 1.5mm, 3mm, 5mm, 7.5mm,
10mm, 15mm, 20mm exposed resin part 7
Windows having different types of areas were formed, and immersed in a sodium persulfate solution (80 g / l) for 3 minutes to perform an etching treatment. Then, after washing thoroughly with water, conditioner CLD-100 (trade name, manufactured by Hitachi Chemical Co., Ltd.)
At 40 ° C. for 5 minutes for surface treatment. Next, after sufficient washing with water, it was immersed in a potassium permanganate solution (60 g / l) at 85 ° C. for 3 minutes to perform a surface treatment. Thereafter, the substrate was sufficiently washed with water, and immersed in a conductive monomer solution CAD-100 (trade name, manufactured by Hitachi Chemical Co., Ltd.) at room temperature for 2 minutes to give a monomer. Next, the obtained copper-clad laminate is immersed for 2 minutes in a conductive treatment solution obtained by adding 0.1 g / l of a thiophene derivative to the above-mentioned basic solution without washing with water, to form a conductive polymer film on the surface of the insulator. And the hue of the film was observed. Further, as a copper sulfate plating bath, copper sulfate pentahydrate 60 g / l, sulfuric acid 180
g / l, chlorine ion 50 ppm and brightener CG-12
Copper plating was performed at 2 A / dm2 for 5 minutes using a bath of 5 ml / l (trade name, manufactured by Meltex Co., Ltd.), and the deposition property of the plating was evaluated. When the conductive polymer film is not formed uniformly, not only the growth of the plated copper becomes uneven, but also the time until it is covered with the plated copper increases, It was evaluated that the width of the window to be shortened was evaluated.

【0012】実施例2 前記基本浴にチオフェン誘導体を1g/l添加した以外
は、同様の皮膜処理を行い、皮膜の色相およびめっき析
出性を評価した。
Example 2 The same coating treatment was carried out except that 1 g / l of a thiophene derivative was added to the above-mentioned basic bath, and the hue and plating depositability of the coating were evaluated.

【0013】比較例1 前記基本浴の新液を用いた以外は、実施例1と同様の処
理を行い、皮膜の色相およびめっき析出性を評価した。
実施例1〜2および比較例の結果を表1に示す。
Comparative Example 1 The same treatment as in Example 1 was performed except that the new solution of the basic bath was used, and the hue of the film and the plating deposition property were evaluated.
Table 1 shows the results of Examples 1 and 2 and Comparative Example.

【0014】[0014]

【表1】 注)記号:○ 完全に被覆 △ やや不完全な被覆 × 被覆されるまでには時間を要す[Table 1] Note) Symbol: ○ Completely covered △ Slightly incomplete covered × It takes time to be covered

【0015】以上に説明したように、本発明によって、
チオフェンもしくはその誘導体を導電化処理液(新液)
に添加することによって、均一な導電性高分子膜を初期
から安定して形成することができ、さらにスルーホール
めっきにおいては、めっき被覆速度が速く、均一なめっ
き銅を形成することができる導電化処理液を提供するこ
とができる。
As explained above, according to the present invention,
Conductive treatment liquid for thiophene or its derivative (new solution)
Can form a uniform conductive polymer film stably from the beginning, and in the case of through-hole plating, the plating coating speed is high and a conductive plating that can form a uniform plated copper A processing solution can be provided.

【0016】[0016]

【発明の効果】以上に説明したように、本発明によっ
て、導電化初期においても、安定した導電性を有する皮
膜を形成させることを可能にし、かつ重合反応を短時間
に完了させることのできる導電化処理液を提供すること
ができる。
As described above, according to the present invention, it is possible to form a film having stable conductivity even in the initial stage of conductivity, and to provide a conductive film capable of completing a polymerization reaction in a short time. A treatment solution can be provided.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】絶縁化表面に導電性モノマーを付着させ、
その後、その導電性モノマーを酸化重合して導電性を付
与する導電化処理液として、有機酸もしくはその塩類と
無機酸と導電性モノマーとからなることを特徴とする導
電化処理液。
1. A conductive monomer is attached to an insulating surface,
Thereafter, a conductive treatment liquid comprising an organic acid or a salt thereof, an inorganic acid, and a conductive monomer, as a conductive treatment liquid for imparting conductivity by oxidative polymerization of the conductive monomer.
【請求項2】導電性モノマーが、硫黄あるいは窒素を有
する5員の複素環基から成るモノマーであることを特徴
とする請求項1に記載の導電化処理液。
2. The conductive solution according to claim 1, wherein the conductive monomer is a monomer comprising a 5-membered heterocyclic group having sulfur or nitrogen.
JP16411397A 1997-06-20 1997-06-20 Conduction treating liquid Pending JPH1112786A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16411397A JPH1112786A (en) 1997-06-20 1997-06-20 Conduction treating liquid

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16411397A JPH1112786A (en) 1997-06-20 1997-06-20 Conduction treating liquid

Publications (1)

Publication Number Publication Date
JPH1112786A true JPH1112786A (en) 1999-01-19

Family

ID=15787007

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16411397A Pending JPH1112786A (en) 1997-06-20 1997-06-20 Conduction treating liquid

Country Status (1)

Country Link
JP (1) JPH1112786A (en)

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