JPH11120553A - Production of substrate for magnetic recording medium - Google Patents

Production of substrate for magnetic recording medium

Info

Publication number
JPH11120553A
JPH11120553A JP27694797A JP27694797A JPH11120553A JP H11120553 A JPH11120553 A JP H11120553A JP 27694797 A JP27694797 A JP 27694797A JP 27694797 A JP27694797 A JP 27694797A JP H11120553 A JPH11120553 A JP H11120553A
Authority
JP
Japan
Prior art keywords
nip
electroless plating
glass substrate
substrate
adhesion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP27694797A
Other languages
Japanese (ja)
Inventor
Atsushi Saiki
淳 齋木
Hideo Okada
英夫 岡田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Chemical Corp
Original Assignee
Mitsubishi Chemical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Chemical Corp filed Critical Mitsubishi Chemical Corp
Priority to JP27694797A priority Critical patent/JPH11120553A/en
Publication of JPH11120553A publication Critical patent/JPH11120553A/en
Pending legal-status Critical Current

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  • Chemically Coating (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)

Abstract

PROBLEM TO BE SOLVED: To obtain a substrate having excellent adhesion property between a glass substrate and a NiP electroless plating layer and having high shock resistance and surface smoothness, and to stably obtain low floating height of a head by controlling the temp. of a NIP plating bath to a specified range in a NiP electroless plating process. SOLUTION: A glass substrate having fine recesses on the surface is used so as to obtain adhesion with a NiP electroless plating layer. The glass substrate is dipped in a NiP electroless plating bath at a temp. between >=60 deg.C and <70 deg.C C for NiP electroless plating. If the bath temp. is <60 deg.C, the film forming rate significantly decreases, which is not desirable for industrial purpose. If the temp. is >=70 deg.C, Pd adsorbed to the glass substrate in the treatment to add susceptibility reacts with the plating liquid to decrease the adhesion of the NiP plating film when the substrate is immersed in the plating bath. By this method, the obtd. magnetic recording medium has enough adhesion which does not cause peeling between the glass substrate and the NiP electroless plating film and the medium is excellent in shock resistance.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、磁気記録媒体用基
板の製造方法に関するものである。具体的には、情報産
業等で利用される固定型の薄膜磁気記録ディスク等の高
記録密度磁気記録媒体における基板の製造方法に関す
る。特には、ガラス基板と密着性の高いNiP無電解メ
ッキ層を形成する方法に係わる。
The present invention relates to a method for manufacturing a substrate for a magnetic recording medium. More specifically, the present invention relates to a method for manufacturing a substrate in a high-density magnetic recording medium such as a fixed-type thin-film magnetic recording disk used in the information industry and the like. In particular, the present invention relates to a method for forming a NiP electroless plating layer having high adhesion to a glass substrate.

【0002】[0002]

【従来の技術】近年、コンピュータなどの情報処理装置
の外部記憶装置として固定磁気ディスク装置が多く用い
られている。この固定磁気ディスク装置に搭載される磁
気ディスクは、一般に、アルミニウム合金からなる非磁
性基板の表面に、NiP無電解メッキ層を形成し、所要
の平滑化処理、テクスチャリング処理などを施した後、
その上に、非磁性金属下地層、磁性層、保護層、潤滑層
などを順次形成して作製されている。
2. Description of the Related Art In recent years, fixed magnetic disk devices have been widely used as external storage devices of information processing devices such as computers. The magnetic disk mounted on this fixed magnetic disk device generally has a NiP electroless plating layer formed on the surface of a non-magnetic substrate made of an aluminum alloy, and performs a required smoothing process, texturing process, and the like.
A nonmagnetic metal underlayer, a magnetic layer, a protective layer, a lubricating layer, and the like are sequentially formed thereon.

【0003】磁気ディスク装置では、記録再生用ヘッド
が磁気記録媒体上を一定の浮上量で移動しているが、近
年、磁気記録媒体の面記録密度の急激な増加に伴って、
この浮上量が極めて小さくなっている。また、磁気ディ
スク装置の小型化、軽量化も急速に進んでおり、これら
に対応するためには、磁気記録媒体の表面の粗さをより
一層小さくすることが必要であり、既に媒体表面粗さは
Raで数Å程度まで小さくなっている。さらに、可搬型
の固定磁気ディスク装置に対応するために磁気ディスク
に要求される耐衝撃性も400G〜800Gと高い値と
なってきているため、耐衝撃性に対して従来のアルミニ
ウム合金からなる基板では対応が難しくなっている。そ
こで、耐衝撃性、表面平滑性などの見地から、アルミニ
ウム合金基板に代わって、極めて小さな表面粗さを達成
することができ、かつ機械的強度にも優れているガラス
基板が使用され始めている。
In a magnetic disk drive, a recording / reproducing head moves over a magnetic recording medium at a constant flying height. In recent years, with the rapid increase in surface recording density of a magnetic recording medium,
This flying height is extremely small. In addition, the miniaturization and weight reduction of magnetic disk drives are also rapidly progressing, and in order to cope with these, it is necessary to further reduce the surface roughness of the magnetic recording medium, and the medium surface roughness has already been reduced. Is reduced to about several Å in Ra. Furthermore, since the impact resistance required for a magnetic disk for supporting a portable fixed magnetic disk device has also become a high value of 400 G to 800 G, a substrate made of a conventional aluminum alloy is used for the impact resistance. Then it is difficult to respond. Therefore, from the viewpoint of impact resistance and surface smoothness, glass substrates that can achieve extremely small surface roughness and have excellent mechanical strength have begun to be used instead of aluminum alloy substrates.

【0004】NiP無電解メッキを施したアルミニウム
合金基板においては、多くの場合、その表面に研磨によ
り基板円周方向に同心円状のテキスチャリングが施され
ている。これは、主に記録再生用のヘッドと磁気記録媒
体との間の摩擦特性を良好ならしめ、耐久性を確保する
ことを目的としている。また、近年では磁気ディスク装
置作動時のヘッドの浮上量が著しく小さくなっているこ
とに伴い、研磨によるテキスチャリングに代えて、CS
Sゾーンのみにレーザービームによるテキスチャリン
グ、すなわちレーザービームにより突起を形成すること
が試みられている。(特開平8−129749号公報
等)
[0004] In many cases, an aluminum alloy substrate subjected to NiP electroless plating has its surface subjected to concentric texturing in the circumferential direction of the substrate by polishing. This is intended mainly to improve the friction characteristics between the recording / reproducing head and the magnetic recording medium and to ensure durability. In recent years, as the flying height of the head during the operation of the magnetic disk drive has become extremely small, instead of texturing by polishing, CS
Attempts have been made to texturing with a laser beam only in the S zone, that is, to form projections with the laser beam. (Japanese Unexamined Patent Publication No. 8-129949)

【0005】しかしながら、NiP無電解メッキを施し
たアルミニウム合金基板とは異なり、ガラス板に直接レ
ーザービームを照射して突起を形成することは、突起形
状制御性が悪いため極めて困難である。そこで、レーザ
ーテキスチャー技術をガラス基板に適用するためには、
予め基板上にNiP無電解メッキ層を形成する必要があ
る。
However, unlike an aluminum alloy substrate subjected to NiP electroless plating, it is extremely difficult to form projections by directly irradiating a glass plate with a laser beam due to poor control of the projection shape. Therefore, in order to apply laser texture technology to glass substrates,
It is necessary to form a NiP electroless plating layer on the substrate in advance.

【0006】特開昭61−54018号公報等には、ガ
ラス基板上にNiP無電解メッキ膜を形成する方法が提
案されている。ところが、ガラス基板へ無電解メッキ法
によりNiP層を密着性良く形成することは技術的に困
難である。そこで、ガラス基板とNiP無電解メッキ膜
の密着性を改善するために、メッキに用いるガラス基板
表面を機械的または化学的に粗面化する方法や、無電解
メッキの前処理を行う方法が提案されている。例えば、
機械的な粗面化方法としては、Al2 3 等の研磨剤を
用いた砥石により表面粗さが中心線平均粗さRaで10
0Å以上研磨する方法が知られており、化学的な祖面化
方法としては、アルカリ脱脂した後、フッ化水素酸等で
エッチングする方法が知られている。
Japanese Patent Application Laid-Open No. Sho 61-54018 proposes a method of forming a NiP electroless plating film on a glass substrate. However, it is technically difficult to form a NiP layer on a glass substrate with good adhesion by electroless plating. Therefore, in order to improve the adhesion between the glass substrate and the NiP electroless plating film, a method of mechanically or chemically roughening the surface of the glass substrate used for plating and a method of performing a pretreatment of the electroless plating are proposed. Have been. For example,
As a mechanical roughening method, the surface roughness is adjusted to a center line average roughness Ra of 10 using a grindstone using an abrasive such as Al 2 O 3.
A method of polishing by 0 ° or more is known, and as a method of chemically polishing the surface, a method of performing an alkaline degreasing and then etching with hydrofluoric acid or the like is known.

【0007】また、無電解メッキの前処理を行う方法と
しては、特開平7−272263号公報、特開平6−2
12440号公報等に、ガラス基板を塩化第一スズの溶
液で増感後、塩化パラジウム溶液で活性化処理を行い、
次いで、該ガラス基板を70℃以上、あるいは80℃以
上の高温下でNiP無電解メッキを行う方法が提案され
ている。
Further, as a method of performing a pretreatment for electroless plating, Japanese Patent Application Laid-Open Nos. 7-272263 and 6-2
No. 12440, etc., after sensitizing a glass substrate with a solution of stannous chloride, performing an activation treatment with a palladium chloride solution,
Next, a method has been proposed in which the glass substrate is subjected to NiP electroless plating at a high temperature of 70 ° C. or higher, or 80 ° C. or higher.

【0008】[0008]

【発明が解決しようとする課題】しかしながら、これら
の方法では、ガラス基板上に良好な磁気ディスクを得る
に充分な密着性と平滑性を有するNiP層を無電解メッ
キ法で形成することができなかった。本発明は、上述の
点に鑑みなされたものであり、その目的は、ガラス基板
とNiP無電解メッキ層との密着性に優れ、高い耐衝撃
性、表面平滑性を有し、しかも、ヘッドの低浮上高さが
安定して得られる磁気記録媒体用基板の製造方法を提供
することにある。
However, these methods cannot form a NiP layer having sufficient adhesion and smoothness on a glass substrate by an electroless plating method to obtain a good magnetic disk. Was. The present invention has been made in view of the above points, and has as its object to provide excellent adhesion between a glass substrate and a NiP electroless plating layer, high impact resistance, surface smoothness, and a head. An object of the present invention is to provide a method of manufacturing a substrate for a magnetic recording medium capable of stably obtaining a low flying height.

【0009】[0009]

【課題を解決するための手段】本発明者らは、上記実情
に鑑み鋭意検討した結果、NiP無電解メッキ工程にお
けるNiPメッキ浴の温度を制御することにより、上記
の諸要件を満たす優れたNiP層が基板上に形成される
ことを見出し、本発明に達したものである。すなわち、
本発明の要旨は、ガラス基板に、感受性化工程、活性化
工程、NiP無電解メッキ工程を順次設けてなる磁気記
録媒体用基板の製造方法であって、NiP無電解メッキ
工程におけるNiPメッキ浴の温度が60℃以上、かつ
70℃未満であることを特徴とする磁気記録媒体用基板
の製造方法に存する。
Means for Solving the Problems The inventors of the present invention have made intensive studies in view of the above-mentioned circumstances, and as a result, by controlling the temperature of the NiP plating bath in the NiP electroless plating step, an excellent NiP satisfying the above-mentioned various requirements has been obtained. The inventors have found that a layer is formed on a substrate and arrived at the present invention. That is,
The gist of the present invention is a method of manufacturing a substrate for a magnetic recording medium, which comprises sequentially providing a sensitization step, an activation step, and a NiP electroless plating step on a glass substrate, wherein the NiP plating bath is used in the NiP electroless plating step. A method for manufacturing a substrate for a magnetic recording medium, wherein the temperature is 60 ° C. or higher and lower than 70 ° C.

【0010】以下、本発明を詳細に説明する。本発明の
ガラス基板としては、特に限定されないが、例えば、結
晶化ガラスやアルミノシリケートガラスなどが好ましく
使用される。中でも結晶化ガラスが好ましく、特には、
SiO2 −Li2 O系結晶化ガラスが好適である。ガラ
ス基板は、NiP無電解メッキ層との密着性を確保する
ため、基板表面に微細な凹部を有するガラス基板を用い
ることが好適である。より具体的には、凹部の最大幅
が、20μm以下、更に好ましくは10μm以下、特に
好ましくは5μ以下の微細な凹部が好適に使用される。
これは、板表面に微細な凹部を有する場合には、この微
細な穴の中にNiP膜が形成されるため、物理的アンカ
ー効果を高め、これによりガラス基板とNiPメッキ層
との密着を強固にするものと思われる。
Hereinafter, the present invention will be described in detail. Although the glass substrate of the present invention is not particularly limited, for example, crystallized glass or aluminosilicate glass is preferably used. Among them, crystallized glass is preferable, and in particular,
SiO 2 —Li 2 O-based crystallized glass is preferred. As the glass substrate, it is preferable to use a glass substrate having a fine concave portion on the substrate surface in order to secure adhesion to the NiP electroless plating layer. More specifically, fine recesses having a maximum width of the recesses of 20 μm or less, more preferably 10 μm or less, and particularly preferably 5 μm or less are suitably used.
This is because, when a fine concave portion is formed on the plate surface, the NiP film is formed in the fine hole, thereby enhancing the physical anchoring effect, thereby strengthening the adhesion between the glass substrate and the NiP plating layer. It seems to be.

【0011】ガラス基板の表面の微細な凹部は、例え
ば、結晶化ガラス基板においては、フッ酸、フッ化カリ
ウム、フッ化アンモニウム等のフッ酸系のエッチング剤
を使用して、化学エッチング処理を行うことにより、形
成することができる。これは、結晶化ガラスを用いる
と、化学エッチングを基板表面のアモルファス領域を選
択的にエッチングできるため、表面の平滑性をある程度
損なうことなく、適切に凹部を形成できるため好適であ
る。凹部の大きさは、エッチング液の濃度、処理温度、
処理時間などを適宜選択することにより制御することが
可能である。また、高硬度アルミノシリケート基板にお
いては、遊離砥粒や研削処理により加工することによ
り、凹部を形成することができる。
The fine concave portions on the surface of the glass substrate are subjected to a chemical etching treatment using, for example, a hydrofluoric acid-based etching agent such as hydrofluoric acid, potassium fluoride or ammonium fluoride in a crystallized glass substrate. Thereby, it can be formed. The use of crystallized glass is preferable because the amorphous region on the substrate surface can be selectively etched by chemical etching, so that the concave portion can be appropriately formed without impairing the surface smoothness to some extent. The size of the concave portion depends on the concentration of the etching solution, the processing temperature,
It is possible to control by appropriately selecting the processing time and the like. In the case of a high-hardness aluminosilicate substrate, a concave portion can be formed by processing with free abrasive grains or grinding.

【0012】本発明によれば、ガラス基板に、感受性化
工程、活性化工程を行い、続いて特定の条件下でNiP
無電解メッキを行うことによって、ガラス基板とNiP
無電解メッキ層との密着性に優れた磁気記録媒体用基板
を得ることができる。そして、通常は、感受性化工程の
前には、脱脂工程が設けられる。また、各工程間には水
洗工程が設けられ、洗浄水としては、イオン交換水また
は超純水が適宜使用される。
According to the present invention, a glass substrate is subjected to a sensitizing step and an activating step, and then NiP under specific conditions.
By performing electroless plating, the glass substrate and NiP
A substrate for a magnetic recording medium having excellent adhesion to the electroless plating layer can be obtained. And usually, before the sensitization step, a degreasing step is provided. Further, a water washing step is provided between each step, and as the washing water, ion exchange water or ultrapure water is used as appropriate.

【0013】脱脂工程は、ガラス基板の表面を洗浄する
工程であり、例えば、超純水、アルカリ洗浄剤、酸洗浄
剤、界面活性剤などを使用する方法が挙げられる。感受
性化工程および活性化工程は、ガラス基板にNiP無電
解メッキを開始させるために必要な触媒活性を与える工
程である。すなわち、ガラス表面は触媒活性がないた
め、無電解メッキを開始するためには、ガラスの表面に
Au、Pt、Pd、Ag等の貴金属の触媒核を形成する
ことが必要である。
The degreasing step is a step of cleaning the surface of the glass substrate, and includes, for example, a method using ultrapure water, an alkaline cleaning agent, an acid cleaning agent, a surfactant and the like. The sensitizing step and the activating step are steps for providing a catalytic activity necessary for starting NiP electroless plating on the glass substrate. That is, since the glass surface has no catalytic activity, it is necessary to form a catalytic nucleus of a noble metal such as Au, Pt, Pd, or Ag on the glass surface in order to start electroless plating.

【0014】上記の各工程は、公知の方法により、次の
ように実施される。(表面技術Vol.44 No.1
0、1993「ガラスと無電解ニッケルめっきの密着
性」、堀田慎一他参照。) 感受性化工程において、まず、Sn、Ti、Pd、Hg
等からなる2価の金属イオンを吸着させる。通常、0.
05g/l程度の塩化スズ水溶液が好適に使用され、常
温で塩化スズ水溶液中に1〜3分程度浸漬される。次
に、活性化工程として、前記の触媒核となる貴金属を含
む含む活性化処理溶液に上記のガラス基板を浸漬し、吸
着した2価の金属イオンの還元作用により、ガラス基板
の表面に触媒核を形成させる。通常、0.05g/l程
度の塩化パラジウム水溶液が好適に使用され、常温で塩
化パラジウム水溶液中に1〜3分程度浸漬させる。
Each of the above steps is performed as follows by a known method. (Surface Technology Vol.44 No.1
0, 1993, "Adhesion between glass and electroless nickel plating", Shinichi Hotta et al. In the sensitization step, first, Sn, Ti, Pd, Hg
And the like. Usually, 0.
A tin chloride aqueous solution of about 05 g / l is suitably used, and is immersed in a tin chloride aqueous solution at room temperature for about 1 to 3 minutes. Next, as an activation step, the above-mentioned glass substrate is immersed in an activation treatment solution containing a noble metal serving as the above-mentioned catalyst nucleus, and the catalyst nucleus is placed on the surface of the glass substrate by a reducing action of the adsorbed divalent metal ions. Is formed. Usually, an aqueous solution of palladium chloride of about 0.05 g / l is suitably used, and immersed in an aqueous solution of palladium chloride for about 1 to 3 minutes at room temperature.

【0015】活性化工程で処理されたガラス基板は、6
0℃以上、かつ70℃未満の温度のNiP無電解メッキ
浴に浸漬することによってNiP無電解メッキされる。
NiPメッキ浴の温度が、60℃未満であると著しく製
膜速度が遅くなるため工業的生産において望ましくな
い。また、70℃以上の高温であると感受性化処理時に
ガラス基板表面に吸着したPdが、メッキ浴に浸漬した
際にメッキ液と反応し、激しく水素が発生する。そのた
め、この水素が、ガラス基板とメッキ膜の間に入り込
み、NiPメッキ膜の密着性を低下させる。
The glass substrate treated in the activation step is 6
The NiP electroless plating is performed by dipping in a NiP electroless plating bath at a temperature of 0 ° C. or more and less than 70 ° C.
If the temperature of the NiP plating bath is lower than 60 ° C., the film-forming speed becomes extremely low, which is not desirable in industrial production. If the temperature is higher than 70 ° C., Pd adsorbed on the surface of the glass substrate during the sensitization treatment reacts with the plating solution when immersed in the plating bath, and violently generates hydrogen. For this reason, the hydrogen enters between the glass substrate and the plating film, and lowers the adhesion of the NiP plating film.

【0016】すなわち、本発明者らの知見によれば、7
0℃未満の低温で無電解メッキを行うことにより、より
強固な密着性を有するNiP膜ができる。NiP無電解
メッキ浴は、通常、市販のものが使用され、ガラス基板
はメッキ浴中で所定時間処理される。NiP無電解メッ
キ層の厚さは任意に選択されるが、良好な磁気記録媒体
のためには、1〜10μmの範囲が良い。
That is, according to the findings of the present inventors, 7
By performing electroless plating at a low temperature of less than 0 ° C., a NiP film having stronger adhesion can be obtained. A commercially available NiP electroless plating bath is generally used, and a glass substrate is treated in the plating bath for a predetermined time. The thickness of the NiP electroless plating layer is arbitrarily selected, but is preferably in the range of 1 to 10 μm for a good magnetic recording medium.

【0017】NiP無電解メッキを施したガラス基板
は、必要に応じて研磨処理を行ったり、レーザービーム
によるテキスチャリング、機械テキスチャリング等のテ
キスチャー処理を適宜行うことができ、更には、常法に
従って下地層、磁性層、保護層及び潤滑層等が積層され
る。本発明によれば、上記のようなガラス基板にNiP
無電解メツキを行うことにより、ガラス基板とNiP無
電解メツキ膜との剥離等を引き起こさない充分な強さの
密着性を有し、耐衝撃性に優れた磁気記録媒体を得るこ
とが可能となる。
The glass substrate on which the NiP electroless plating has been performed can be subjected to a polishing treatment as needed, or a texturing treatment such as a texturing with a laser beam or a mechanical texturing as appropriate. An underlayer, a magnetic layer, a protective layer, a lubricating layer, and the like are laminated. According to the present invention, NiP is applied to the glass substrate as described above.
By performing the electroless plating, it is possible to obtain a magnetic recording medium having a sufficient strength of adhesion that does not cause separation of the glass substrate and the NiP electroless plating film, and excellent in impact resistance. .

【0018】[0018]

【実施例】以下、実施例により本発明を更に詳細に説明
するが、本発明はその要旨を越えない限り、以下の実施
例に限定されるものではない。
EXAMPLES The present invention will be described in more detail with reference to the following Examples, but it should not be construed that the present invention is limited to the following Examples without departing from the scope of the invention.

【0019】実施例1 市販のSiO2 −Li2 O系の結晶化ガラスを使用し、
固定砥粒による研削(グライディング)処理を行った
後、研削剤(フジミインコーポレーティッド社製、商品
名「人造研削剤F0(複合人造エメリー)」:比重3.
90以上:Al23 45重量%以上、TiO2.0重
量%以下、ZrSiO49重量%以下:粒度区分#10
00(最大粒子径27μm以下))によりラッピング処
理を行った。
Example 1 A commercially available SiO 2 —Li 2 O-based crystallized glass was used.
After performing a grinding process using fixed abrasive grains, a grinding agent (manufactured by Fujimi Incorporated, trade name "artificial abrasive F0 (composite artificial emery)"): specific gravity 3.
90 or more: Al 2 O 3 45% by weight or more, TiO 2.0% by weight or less, ZrSiO 49% by weight or less: Particle size classification # 10
00 (maximum particle diameter: 27 μm or less)).

【0020】その後、ガラス用アルカリ洗剤(株式会社
パーカーコーポレーション社製、商品名「PK−LCG
22」)により浴温50℃で10分間、洗浄処理し、次
いで水洗後、酸性フッ化アンモニウム(関東化学株式会
社製、NH4 F・HF、JIS番号 K8817)50
g/l中に、室温で2分間、上記結晶化ガラスを浸漬し
てエッチング処理を行い、水洗を行った。得られたガラ
ス基板表面をSEMで3万倍で観察したところ、凹部の
最大長は、3.8μmであった。
Thereafter, an alkali detergent for glass (trade name "PK-LCG" manufactured by Parker Corporation) is used.
22 ”) at a bath temperature of 50 ° C. for 10 minutes, followed by washing with water, followed by ammonium acid fluoride (manufactured by Kanto Chemical Co., Inc., NH 4 F.HF, JIS No. K8817) 50.
The crystallized glass was immersed in g / l at room temperature for 2 minutes to perform an etching treatment, followed by washing with water. Observation of the obtained glass substrate surface with a SEM at a magnification of 30,000 times revealed that the maximum length of the concave portion was 3.8 μm.

【0021】次に、ガラス基板を、市販の0.05g/
lのSnCl2 水溶液に室温で2分間浸漬し、水洗を行
い、感受性化処理を行った。その後、市販の0.05g
/lのPdCl2 水溶液に室温で2分間浸漬し、水洗を
行い活性化処理を行った。次いで、メッキ浴温68℃・
16時間でNiP無電解メッキで膜厚15μmのNiP
層を成膜した。さらに、メッキ後に密着性を向上させる
ため、150℃で1時間のベーキング処理を行った。こ
のようにして得られたNiP層とガラス基板の密着性を
評価した結果、評価点数が10であり、良好な密着性を
有することが確認された。なお、ガラス基板とNiP無
電解メッキ層との密着性は、JISK54008.15
の碁盤目試験により評価した。評価点数10は良好な密
着性を有することを示す。
Next, a commercially available glass substrate of 0.05 g /
1 of SnCl 2 aqueous solution at room temperature for 2 minutes, washed with water, and sensitized. Then, commercially available 0.05g
/ L of PdCl 2 aqueous solution at room temperature for 2 minutes, washed with water and activated. Next, a plating bath temperature of 68 ° C.
16-hour NiP electroless plating with a thickness of 15 μm
The layer was deposited. Further, after plating, a baking treatment was performed at 150 ° C. for 1 hour to improve adhesion. As a result of evaluating the adhesion between the thus obtained NiP layer and the glass substrate, the evaluation score was 10, and it was confirmed that the NiP layer had good adhesion. The adhesion between the glass substrate and the NiP electroless plating layer was determined in accordance with JIS K54008.15.
Was evaluated by a cross cut test. An evaluation score of 10 indicates good adhesion.

【0022】実施例2〜3 NiP無電解メッキのメッキ浴温をそれぞれ68℃、6
2℃とした以外は実施例1と同様の方法で、ガラス基板
にNiP無電解メッキ層を形成した。ガラス基板とNi
P無電解メッキ層との密着性の評価点数はいずれも10
であり、良好な密着性を有する。
Examples 2 and 3 The plating bath temperature of NiP electroless plating was 68 ° C.
An NiP electroless plating layer was formed on a glass substrate in the same manner as in Example 1 except that the temperature was changed to 2 ° C. Glass substrate and Ni
Evaluation score of adhesion to P electroless plating layer was 10
And has good adhesion.

【0023】比較例1 NiP無電解メッキのメッキ浴温を90℃とした以外は
実施例1と同様の方法で、ガラス基板にNiP無電解メ
ッキ層を形成した。密着性の評価点数は5であり、充分
な密着性を得ることができなかった。
Comparative Example 1 An NiP electroless plating layer was formed on a glass substrate in the same manner as in Example 1 except that the plating bath temperature of NiP electroless plating was set at 90 ° C. The evaluation score of adhesion was 5, and sufficient adhesion could not be obtained.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 ガラス基板に、感受性化工程、活性化工
程、NiP無電解メッキ工程を順次設けてなる磁気記録
媒体用基板の製造方法であって、NiP無電解メッキ工
程におけるNiPメッキ浴の温度が60℃以上、かつ7
0℃未満であることを特徴とする磁気記録媒体用基板の
製造方法
1. A method for manufacturing a substrate for a magnetic recording medium, comprising a glass substrate sequentially provided with a sensitizing step, an activating step, and an NiP electroless plating step, wherein a temperature of a NiP plating bath in the NiP electroless plating step is set. Is 60 ° C or more and 7
A method for producing a substrate for a magnetic recording medium, wherein the temperature is lower than 0 ° C.
【請求項2】 NiPメッキ浴の温度が、65〜69℃
であることを特徴とする請求項1記載の磁気記録媒体用
基板の製造方法
2. The temperature of a NiP plating bath is 65 to 69 ° C.
2. The method for manufacturing a substrate for a magnetic recording medium according to claim 1, wherein
【請求項3】 ガラス基板が、SiO2 −Li2 O系結
晶化ガラスからなることを特徴とする請求項1または2
記載の磁気記録媒体用基板の製造方法
3. The glass substrate according to claim 1, wherein the glass substrate is made of SiO 2 —Li 2 O-based crystallized glass.
Method of manufacturing magnetic recording medium substrate
JP27694797A 1997-10-09 1997-10-09 Production of substrate for magnetic recording medium Pending JPH11120553A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27694797A JPH11120553A (en) 1997-10-09 1997-10-09 Production of substrate for magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27694797A JPH11120553A (en) 1997-10-09 1997-10-09 Production of substrate for magnetic recording medium

Publications (1)

Publication Number Publication Date
JPH11120553A true JPH11120553A (en) 1999-04-30

Family

ID=17576643

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27694797A Pending JPH11120553A (en) 1997-10-09 1997-10-09 Production of substrate for magnetic recording medium

Country Status (1)

Country Link
JP (1) JPH11120553A (en)

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