JPH11120523A - Magnetoresistive effect head - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a magnetoresistive effect head embodying multitracking with which recording and reproducing operation under a low flying height or sliding with high sensitivity and low noise is possible and higher density and higher speed are possible. SOLUTION: The magneto-resistive head of a yoke structure comprises a set of magnetic yokes (2, 7f, 7r) having gaps (4, 5) with which a prescribed reproduction resolution is obtainable, an anisotropic magnetoresistive effect element (AMR) 8 or giant magneto-resistive effect element (GMR) which is installed near the thinly formed part of these magnetic yokes, leading-out conductors (9, 10) for energizing either of these magneto-resistive effect elements (MRs) and a conductive 6 for bias magnetic field application to the magneto- resistive effect element 8 according to need. At this point, the magneto-resistive effect element 8 is arranged in contact with the magnetic yokes (7f, 7r) or in sufficient proximity to the distance below 100 nm. The plural magnetic heads are so arrayed in such a manner that the distance between the adjacent tracks attains <=1 μm, by which the magnetic head is applied to multitracking as well.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head used in a magnetic recording device such as a hard disk device or a magnetic tape device.

[0002]

2. Description of the Related Art In recent years, in order to increase the capacity of a magnetic recording apparatus, a magnetic head capable of responding with high sensitivity and high speed has been increasingly demanded. As a magneto-resistance effect type magnetic head (MR head) using a magneto-resistance effect element (MR element)
Have been developed for hard disk devices and magnetic tape devices and are in practical use. The magnetoresistive effect type magnetic heads are roughly classified into the following two types depending on the use or the structure.

As an example of this, FIG. 8 illustrates a conventional resistive magnetic head having a shield structure used in a hard disk drive, that is, a so-called “shield type magnetoresistive magnetic head”. This MR head has high sensitivity reproduction characteristics because the magnetoresistive effect element 8 is exposed on the head air bearing surface and is accessed in close proximity to a magnetic disk as a recording medium, for example, with a narrow gap.

On the other hand, FIG. 9 shows an example of a conventional resistance effect type magnetic head having a yoke structure used in a magnetic tape device such as a VTR or a data streamer, so-called "yoke type magnetoresistive effect magnetic head". The basic structure of this MR head is such that a part of the magnetic yoke 22 is cut out, and the magnetoresistive element 8 is arranged in that part. Since the magnetoresistive element is disposed so as to recede from the surface facing the recording medium, the magnetoresistive element has excellent characteristics in terms of sliding durability and thermal noise.

The magnetoresistive element used in these magnetic heads is made of an anisotropic magnetoresistive film. In recent years, however, a giant magnetoresistive film (GMR film) that exhibits higher sensitivity characteristics has been replaced by this film. Discussions are underway to make) practical.

[0006]

Generally, the improvement of the recording density from the standpoint of the magnetic head is achieved by increasing the track density by reducing the track width and reducing the spacing (flying height) between the magnetic head and the recording medium. And the linear recording density is increased by shortening the gap length of the magnetic head. As described above, the shield type magnetoresistive head has a high sensitivity, so that the recording density has been strongly promoted by the reduction of the track width. In addition to the increase in density, "lower flying height" and "higher linear recording density" by reducing the shield gap length are indispensable.

However, when the flying height is reduced, the probability that the magnetic head comes into contact with the recording medium is inevitably increased. Therefore, noise caused by spike heat temporarily generated due to friction, and noise on the surface of the magnetic head and the recording medium are reduced. It is generally a concern that the abrasion of the applied protective film may result in corrosion of the magnetoresistive element and instability of element operation due to electrical contact between the magnetic head and the conductive magnetic medium. However, in a “vertical” magnetoresistive magnetic head shown in FIG. 10 as an example of a magnetoresistive magnetic head having a conventional structure, the magnetoresistive element 8 is arranged at a position deeper than the head floating surface. As a result, these problems are reduced in principle. However, in order to reduce the gap length as in the above-mentioned “shield type” magnetoresistive effect magnetic head, it is necessary to make the insulating film between the element and the shield thinner, which causes a decrease in the dielectric strength. It is difficult to realize a remarkable "narrow gap" even with the vertical type head.

On the other hand, in the yoke type magnetoresistive head having the yoke structure, the above-mentioned problems are not structurally present, and there is no functional material inside the gap which determines the resolution of the head. It is easy to narrow the gap, that is, to “increase the linear recording density”. However, due to the fact that a magnetoresistive element having a small permeance is inserted in the middle of a magnetic circuit composed of a magnetic yoke, and that the magnetic yoke and the magnetoresistive element are magnetically insulated with a thickness of about 300 nm, the conventional technology is not used. Then, there was a problem that the reproduction sensitivity was low. In addition, there is also a problem that, particularly when the track width is reduced, noise is generated due to disturbance of the magnetic domain structure of the magnetic yoke constituting the head.

Therefore, one of the objects of the present invention is to improve the sensitivity and noise by improving the structure of a yoke type magnetoresistive head having a yoke structure, and to achieve high resolution and low flying height. Another object of the present invention is to provide a yoke type magnetoresistive magnetic head capable of performing a recording / reproducing operation under sliding.

In the conventional yoke type magnetoresistive magnetic head, the magnetoresistive elements are arranged in the track width direction, and lead conductors (leads) are provided on both sides of the magnetic head in order to supply a sense current in the same direction. Must be provided,
For this reason, when "multitracking" the head,
There is a problem that it is difficult to bring adjacent tracks sufficiently close. Therefore, another object of the present invention is to
It is an object of the present invention to provide a yoke-type magnetoresistive magnetic head capable of realizing a multi-track by shortening a large number of track intervals and achieving high density and high speed of recording / reproducing.

[0011]

Means for Solving the Problems In order to solve the above problems and achieve the object, the magnetoresistive effect type magnetic head according to the present invention employs the following means. That is, [1] The magnetoresistive effect type magnetic head of the present invention comprises a set of magnetic yokes having a gap and an anisotropic magnetoresistive element (AMR) or a giant magnetoresistive element installed on a part of the magnetic yoke. An effect element (GMR), a lead conductor connected to supply current to the magnetoresistive element, and a conductor for applying a bias magnetic field to the magnetoresistive element are laminated in the track direction to form a magnetic yoke structure. . And
The magnetoresistive effect element is in contact with the magnetic yoke or
It is configured such that a sense current is applied to the magnetoresistive effect element via a magnetic yoke via a conductor layer having a thickness of 100 nm or less (ideally, 0 to 5 nm). [2] In this case, the magnetic yoke and the magnetoresistive element are electrically connected, and the sense current is supplied to the magnetoresistive element through the yoke. At the same time, the magnetic yoke and the magnetoresistive element are magnetically connected, or a non-magnetic layer or anti-ferromagnetic layer having a thickness of 100 nm or less of a predetermined conductor, or a hard magnetic layer, or any of them. The stacked films are configured to be close to each other with a space therebetween. [3] At least one of the magnetic yokes is divided in the vicinity where it is electrically connected to the magnetoresistive effect element, or a part of the magnetic yoke is partially cut away, for example, to have a partially thin shape. It is formed continuously to a thickness. [4] Further, a thin film identical to the magnetic thin film used for forming the magnetic yoke and the magnetoresistive element is disposed outside the magnetic yoke in a track width direction with a gap of, for example, 1 μm or less. Alternatively, one or more hard magnetic films having different thicknesses are arranged outside the magnetic yoke in the track width direction, and the magnetic domain of the magnetic yoke and the magnetoresistive element is controlled. [5] The above-mentioned plurality of magnetic heads are integrated in a line in the track width direction to form a multi-track head, and among the plurality of lead conductors, the lead conductor provided on the side facing the medium is shared by the plurality of magnetic heads. Then, the other lead conductor is connected so that it can be used for each magnetic head. The track gap between the adjacent magnetic heads is set to 1 μm or less, and a film is provided on the outer portion of the head at both ends of the magnetic head so that the magnetic domain of the magnetoresistive element can be controlled. [6] According to the present invention, in the yoke type magnetoresistive magnetic head, a perpendicular magnetic field is formed by applying a winding in which the magnetic yoke is wound once or several times in the vicinity of the medium facing surface and substantially parallel to the surface. It is configured to be recordable on a recording magnetic medium, and is recordable / reproducible by the same magnetic head.

(Operation) According to the above-described means, the following operation is achieved. The magnetoresistive head of the present invention is different from a conventional yoke type magnetoresistive head in that the distance between the magnetic yoke and the magnetoresistive element is ideally zero (0n).
m) or a sufficiently small value of 100 nm or less (for example, 5 nm
Degree). Therefore, the magnetic resistance of this connection portion is reduced, and a more sensitive yoke-type magnetoresistive magnetic head can be realized.

Further, since the magnetic yoke also serves as an extraction conductor, a current path can be formed in which a sense current is introduced from the rear of the magnetic yoke and led to the front magnetic yoke near the gap via the magnetoresistive element. Therefore, when the lead wire connected to the front magnetic yoke is used as a common electrode terminal in the multi-track configuration, it is not necessary to route the lead wire in the track width direction, and the tracks can be formed side by side with a gap of 1 μm or less. As a result, it is possible to construct a magnetic head that is extremely integrated as compared with the conventional multi-track magnetic head. It should be noted that even if a later-described bias conductor is required, there is no problem in realizing the configuration exemplified by the present invention.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a plurality of embodiments of a magnetoresistive head according to the present invention will be described in detail. (First Embodiment) FIG. 1 shows the structure of a magnetic head according to a first embodiment of the present invention. FIG. 1A is a sectional view thereof, and FIG. 1B is a plan view thereof. However, the bias conductor 6 is omitted in FIG. FIG. 1C is a perspective view showing a magnetic head manufactured based on this embodiment.

The magnetic head according to the first embodiment is
It is formed in a thin film layer structure as shown in the sectional view (a). That is, a first magnetic yoke 2 made of a predetermined soft magnetic thin film is formed on a nonmagnetic substrate 1, and a bias conductor 6 is formed via a nonmagnetic insulating layer 3 made of a predetermined nonmagnetic insulating material. Further, after a gap 4 and a back gap 5 each having an appropriate thickness and length made of a non-magnetic insulating material are formed, a second magnetic yoke 7 is formed, and a front magnetic yoke 7f of the second magnetic yoke is formed. The second magnetic yoke 7 is provided in the gap between the second magnetic yoke 7 and the rear magnetic yoke 7r.
(7f, 7r) are arranged so that they are electrically in contact with each other, and are integrally formed. These second
The magnetic yoke 7 and the magnetoresistive element 8 are in direct contact with each other or via a conductor layer (not shown) having a thickness of 100 nm or less. Further, if necessary, a front lead wire 9 and a rear lead wire 10 are formed. However, in the magnetic head of the present embodiment, the front lead-out conductors 9 are arranged as two front lead-out conductors (91, 9r) extending to both sides in the track width direction along the medium facing surface 11. However, a configuration with only one side (for example, 9 l) is also possible.

The magnetoresistive element 8 of this embodiment uses, for example, an anisotropic magnetoresistive element (AMR). Furthermore, since a bias magnetic field can be applied to the magnetoresistive element 8 by passing a current from one of the front lead conductors 9l and 9r to the other, an independent bias conductor 6 is unnecessary in this case.

The bias conductor 6 is appropriately formed as necessary. For example, when a "spin-valve" giant magnetoresistive thin film is used as a magnetoresistive element, that is, a giant magnetoresistive element (GMR) ), Such a bias conductor is not required in principle. The GMR may be a multi-layer giant magnetoresistive element, a particulate giant magnetoresistive element (granular-GMR), or the like, in addition to the spin valve giant magnetoresistive element.

The first magnetic yoke 2 has a nonmagnetic substrate 1
Although a thin film magnetic material deposited on the substrate is used, a magnetic substrate having soft magnetic properties can be used instead. Furthermore, although the magnetoresistive element 8 is arranged on the upper surface of the magnetic yoke, it may be arranged on the lower surface of the magnetic yoke. Note that the above-described embodiment is also realized in the second to sixth embodiments described below.

(Function and Effect 1) In the first embodiment configured as described above, the sense current for generating a voltage by sensing the magnetism on the recording medium by the head is introduced from the rear lead-out conductor 10, It flows out to the front lead-out wire 9 via the rear magnetic yoke 7r, the magnetoresistive element 8 and the front magnetic yoke 7f. Here, the magnetoresistance effect (MR
Effect) and the magnetic yoke 7
Since it is not necessary to insulate f and 7r, it is possible to arrange these components magnetically in contact with or close to each other. As a result, the magnetic flux transmission efficiency of the head magnetic circuit portion is improved, and the reproduction is performed. The efficiency is improved.

Since the magnetoresistive element 8 includes a layer other than the magnetic layer (magnetic flux transmitting layer) for transmitting magnetic flux, strict magnetic contact between the magnetic flux transmitting layer and the magnetic yoke is realized. Therefore, it is necessary to consider the order of forming layers in the magnetoresistive element 8. For example, when using a spin valve type giant magnetoresistive element (GMR),
In the embodiment, a so-called “free magnetization layer (free layer)” is arranged at the lowermost layer of the GMR element.

Contrary to the first embodiment, the second embodiment described below, on the contrary, exemplifies that the layer structure in which the free magnetic layer is disposed on the uppermost layer of the GMR element is appropriate. . Also, since a sense current flows through the magnetic yoke,
There is a concern that the change in the magnetoresistance of the magnetic yoke portion may be added as noise to the signal of the magnetoresistive effect element.However, the magnetization level in the magnetic yoke is low, and soft magnetic materials having almost no magnetoresistance effect ( For example, CoZrNb)
, It can be said that the noise caused by this is not a problem. That is, the magnetoresistance change rate (Δρ / ρS
(%)), The material and thickness of each layer are Ta (5 nm) / NiFe (10n).
m) / Cu (2.4nm) / NiFe (5nm) / FeMn (10nm) / Ta
For example, CoZr is applied to a magnetoresistive element having a (5 nm) film configuration.
A graph (FIG. 2A) showing the magnetoresistive effect under a uniform magnetic field by connecting a magnetic yoke of Nb (150 nm) / Ti (10 nm) / CoZrNb (150 nm) is replaced with a magnetic yoke and copper. As shown by comparison with the graph (FIG. 2 (b)) showing the characteristics when used, no problem due to the magnetoresistive effect of the magnetic yoke is observed. In the first embodiment, the back gap 5 is provided because of the necessity of electrical insulation between the first magnetic yoke 2 and the second magnetic yoke 7 (7f, 7r).
By designing the opposing areas of the two yokes to be large in this portion, it is possible to sufficiently reduce the decrease in the magnetic flux transmission efficiency due to the influence of the back gap.

Therefore, according to the structure of this embodiment, a magnetic head having a high reproduction efficiency can be realized, and the magnetic head has characteristics that are hardly affected by abrasion, corrosion, thermal noise or electrical short-circuit with a conductive magnetic medium. It becomes possible. Therefore, the magnetoresistance effect type magnetic head according to the present invention can be mounted on any device such as a magnetic disk device and a magnetic tape device. The magnetic head shown in the first embodiment has the following features as compared with the magnetic heads of the second and third embodiments described later. That is, since the magnetoresistive element is formed almost at the end of the manufacturing process of the magnetic head, it is possible to avoid the adverse effect of the characteristic deterioration of the magnetoresistive element due to heating in the manufacturing process. This is particularly effective when using a giant magnetoresistive element.

(Second Embodiment) FIG. 3 shows a second embodiment of the present invention.
1 shows a structure of a magnetic head as an embodiment example. First, in the example shown in FIG. 3A, the order of forming the layers in the layer structure in the first embodiment is reversed. That is, the lead conductors 9 and 10 are formed first, and then the magnetoresistive effect element 8 is formed between them to build a layered structure as shown in the drawing. Finally, the first magnetic yoke 2 having a continuous shape is formed.

Various modifications can be made to the method of forming the lead conductors 9 and 10. For example, the nonmagnetic insulating layer 12 can be omitted by forming a predetermined groove (not shown) in the nonmagnetic substrate 1 in advance and embedding a desired lead conductor therein.

Next, in the example shown in FIG. 3B, the first magnetic yoke 2 is buried in a concave groove formed in the non-magnetic substrate 1 to form the second magnetic yoke 7 on a flat surface. The difference from the first embodiment is that it can be formed.

(Function and Effect 2) According to the second embodiment, in the former second embodiment (FIG. 3A),
Since the magnetoresistive effect element can be formed on a non-magnetic substrate or a layer close to this substrate with no steps and a good smoothness, it has a feature that it is easy to obtain a magnetic abrasive drag effect element having good characteristics.
In the latter embodiment (FIG. 3B), since the magnetic yoke in the portion close to the medium facing surface has no step, the processing accuracy of the track width is improved when the magnetic yoke is formed by using the photolithography technique. It has the characteristic that it is easy to do.

(Third Embodiment) Next, a third embodiment is substantially the same as the above-described second embodiment (FIG. 3A), but the second magnetic yoke 7 is divided into front and rear parts. The difference is that they are not integrated. More specifically, the thickness of a part of the second magnetic yoke is made smaller than that of the other part, and the magnetoresistive element 8 is brought into contact with this part (see FIG. 4A), or with a gap of 100 nm or less. It has a configuration (see FIG. 4 (b)) arranged close to it. In the latter configuration, the conductor layer 13 is inserted into the gap between the magnetoresistive element 8 and the magnetic yoke 7 to ensure conduction between the two.

In this embodiment, by appropriately selecting the conductivity of the magnetic yoke and the permeance (that is, the cross-sectional area of the yoke × the magnetic permeability), both the sense current and the magnetic flux are diverted to the magnetoresistive element, and the signal is transmitted. Output can be detected. For example,
An amorphous magnetic thin film made of high resistivity CoZrNb is used as the magnetic yoke, and the thickness near the magnetoresistive element is 0.3 μm.
When set to, the material and thickness of each layer
Fe (lOnm) / Cu (2.4nm) / NiFe (5nm) / FeMn (lOn
m) about 50 for the spin valve type giant magnetoresistive element
% Of the sense current. Further, in the embodiment shown in FIG. 4, the magnetoresistance effect element 8 is arranged on the upper surface side of the second magnetic yoke 7, but may be arranged on the lower surface side of the yoke if desired.

(Function 3) According to the third embodiment, a magnetic head with high sensitivity can be realized by further improving the magnetic flux propagation efficiency of the magnetic yoke as compared with the above-described embodiment. Can be.

(Fourth Embodiment) FIG. 5 shows the first to fourth embodiments.
A magnetic head as a fourth embodiment in which a recording function is added to the third embodiment is shown. One or several turns of the recording coil 14 surround the first magnetic yoke 2 and the second magnetic yoke 7 and the medium facing surface 11 of the magnetic head.
It has a structure wound substantially parallel to the surface in the vicinity. FIG.
In the fourth embodiment, the case where the number of turns is 2 turns and the yoke type magnetoresistive magnetic head is that of the first embodiment is shown, and the lead conductor of the winding is not shown. The magnetic head according to the fourth embodiment is used in combination with a recording medium having a soft magnetic underlayer for “perpendicular magnetic recording”. Assuming that the thicknesses of the first and second magnetic yokes of the magnetic head are t1 and t2, the saturation magnetization thereof is Msh, the thickness of the soft magnetic layer of the magnetic medium is δ, and the saturation magnetization is Msm, desirable recording characteristics are obtained. Therefore, it is necessary to satisfy the condition expressed by the following expression as a magnetic yoke.

Msh (tl + t2) <2Msm · δ (Equation). (Function and Effect 4) According to the fourth embodiment, recording and reproduction can be performed using the same magnetic yoke. However, since it operates as a single pole head during recording and as a ring yoke head during reproduction, the recording point and the reproduction point are shifted by the thickness of the magnetic yoke. However, this deviation amount obtained from the above-mentioned conditional expression relating to the thickness of the magnetic yoke is shorter than 1 μm for ordinary magnetic media specifications. This value is 1/3 to 1/2 or less of that of the current merge type shielded magnetoresistive magnetic head. By making the width of the yoke on the outflow end side in the recording medium running direction on the medium facing surface wider than the width of the other yoke, the recording track width can be made wider than the reproduction track width. In addition, the recording track width with respect to the reproducing track width can be made narrower than in the related art since the positional deviation of the reproducing track is small, and as a result, the track density can be improved. Further, the structure is simpler than that of the currently used merge type shielded magnetoresistive magnetic head, and the fabrication is easier.

(Fifth Embodiment) The fifth embodiment shown in FIGS. 6A and 6B is an example relating to magnetic domain control of a magnetic yoke and a magnetoresistive element. In the magnetic head structure of the first to third embodiments described above, the element structure having the same height as or close to the magnetic yoke (with reference to the substrate surface) is provided outside the magnetic yoke in the track width direction. Since there is no structure, as the fifth embodiment,
It is possible to arrange a predetermined magnetic domain control film in the portion where nothing exists. The details are realized as in the following two examples.

FIG. 6A shows the same magnetic thin film 1 as used for the second magnetic yoke 7 and the magnetoresistive element 8, respectively.
5 and 16 show a configuration in which magnetic domain control films 5 and 16 are arranged outside the magnetic head. The purpose of this example is to prevent the magnetic domain from becoming irregular by reducing the demagnetizing field in the track width direction. To make this function work effectively, the magnetic yoke and the magnetoresistive effect element and the magnetic domain are required. The gap with the control film is required to be 1 μm or less. Therefore, in the present embodiment, the magnetic thin film can be easily manufactured by etching and removing the magnetic thin film along the outer periphery of the shape of the magnetic head by using a focused ion beam etching (FIB) device after forming the magnetic thin film. It is also possible to make it 0.2 μm or less.

FIG. 6B shows an example in which hard magnetic thin films 17 and 18 made of a permanent magnet material are arranged outside the magnetic head as magnetic domain control films. In this example, the magnetic domain generated from the thin film is used to control the magnetic domains of the second magnetic yoke 7 and the magnetoresistive element 8.

In the fifth embodiment, different types of magnetic domain control films 17 and 17 are provided at positions corresponding to the front magnetic yoke 7f, the magnetoresistive element 8 and the rear magnetic yoke 7r.
16 and 18 are shown as an example, but the invention is not limited to this. The type and thickness of the magnetic material of the magnetic domain control film for each part of the magnetic yoke 7 (7f, 7r) and the magnetoresistive element 8 Can be appropriately selected, and the intensity of the applied magnetic field can be adjusted. In the present embodiment, the magnetic domain control film can be easily formed by selectively applying a magnetic domain control film only to a necessary portion using a lift-off method after the formation of the magnetoresistive element 8 and the magnetic yoke 7. Although FIGS. 6A and 6B show only the magnetic domain control for the second magnetic yoke 7 and the magnetic resistance element 8, the same can be applied to the first magnetic yoke 2.

(Effect 5) As described above, according to the fifth embodiment, the instability of the magnetization behavior of the magnetic yoke caused by the reduction of the magnetoresistive element and the track width is improved.
Recording and reproduction with little waveform fluctuation and noise can be performed.

(Sixth Embodiment) Next, FIGS.
The sixth embodiment shown in b) shows an example of the magnetic head of the present invention which realizes multi-tracking by using the magnetic head shown in the first to third embodiments. However, in this example, the case where the integration degree is the highest as a multi-track magnetic head is shown, so that the magnetic yoke width is set equal to the track width unlike the above-described embodiments.

FIG. 7A shows an outline of the arrangement of the magnetic head and the multi-track on the magnetic medium. Magnetic heads h1 to h4 are arranged at right angles to the longitudinal direction of the tracks at close positions where exclusive access is made to the plurality of tracks T1 to T4 formed on the magnetic medium 11, respectively. The input currents (IN) to the magnetic heads h1 to h4 are supplied via individually provided rear extraction conductors 10, while the front extraction conductor 9 is connected to all the magnetic heads h1 to h4 as shown. And a sense current (OUT) based on data read from each of the tracks T1 to T4 can be obtained via a predetermined common terminal.

More specifically, it is a multi-track head in which four magnetic heads h1 to h4 are integrated in a line in the track width direction of the magnetic medium 11, and among the lead conductors connected to each magnetic yoke, this magnetic medium 11 The front lead-out conductor 9 provided on the side opposite to the magnetic heads h1 to h1
4 and a plurality of other rear extraction conductors 10 are separately provided for each head. At this time, the magnetic heads are arranged so that the track gap between adjacent magnetic heads is, for example, 1 μm or less.

FIG. 7B shows a plan configuration of an actual magnetoresistive head according to this embodiment corresponding to the multi-track structure. However, the bias conductor described above is omitted. In this example, particularly, a case where eight magnetic heads are arranged is illustrated, but the number is not limited to this and may be a number corresponding to the number of tracks.

The multi-track compatible magnetic head of this embodiment is a single magnetic head described in the first to third embodiments arranged in a planar manner by changing the portion of the lead conductor. Then, as described above, all the magnetic heads h1
... H8 share one front extraction conductor 9, and the rear extraction conductor 10 is characterized by a circuit configuration connected to each magnetic head h1.about.h8.

(Function and Effect 6) In the magnetic head of the sixth embodiment, a plurality of magnetic heads are realized by slightly changing the lead conductor portions. For example, after forming a magnetic thin film for a magnetic yoke and a magnetic thin film for a magnetoresistive effect element, the FIB
Not only can it be easily manufactured by separating each magnetic head using a device or the like and changing the wiring in consideration of the circuit and layout that match the application,
The distance between adjacent magnetic heads (same as the track interval) can be reduced to 1 μm or less. In addition, the above-mentioned first to first
Of course, a multi-track can also be realized for a magnetic head in which the width of the magnetic yoke near the connection of the magnetoresistive element 8 is larger than the track width shown in each of the fourth embodiments. Further, the magnetic domain control method described in the fifth embodiment can be applied to the outermost part of the magnetic head in this embodiment.

Therefore, according to the sixth embodiment, 1 μm
A highly sensitive multi-track magnetic head having a gap of less than m can be realized. As a result, recording and reproduction using a plurality of continuous tracks can be performed, and a recording apparatus having a large capacity and a high transfer speed can be constructed by using the signal processing technique suitable for multi-track recording.

(Other Modified Embodiments) The present invention has been described with reference to a plurality of embodiments.
The shapes, materials, dimensions, and the like of each part to be adopted can be modified so as to be optimal for the device to be mounted. In addition, various modifications can be made within the scope of the present invention.

[0045]

As described above, according to the magnetoresistive head of the present invention, the following effects can be obtained. (1) An advantage of the magnetic head of the present invention is that, in a resistance effect type magnetic head having a yoke structure, by applying a sense current through the magnetic yoke, the magnetoresistive effect element is brought into contact with the magnetic yoke or It is possible to dispose them close to each other, thereby improving the magnetic flux transmission efficiency of the magnetic head and achieving high sensitivity. Further, since the magnetic domain control film can be arranged by simplifying the structure, low noise can be achieved. (2) Since the structure is simple, it is easy to realize a multi-track head by integration. In addition, the distance between tracks of each magnetic head can be reduced to 1 μm or less, which is extremely useful for realizing a recording device having a large capacity and a high transfer speed. (3) Further, by applying a recording winding to the yoke-type magnetoresistive magnetic head, it is possible to provide a magnetic head capable of recording and reproducing information on a magnetic medium for perpendicular magnetic recording with the same magnetic head. It becomes a very useful magnetic head.

Therefore, according to the present invention, a magnetic recording device capable of high-sensitivity, low-noise, low-flying-volume or sliding-recording / reproducing operation, and realizing a multi-track operation capable of high-density and high-speed operation is realized. A low resistance effect type magnetic head can be provided.

[Brief description of the drawings]

1A and 1B show the structure of a magnetic head according to a first embodiment of the present invention, wherein FIG. 1A is a cross-sectional view of the head showing a positional relationship of a magnetoresistive element and the like, and FIG. FIG. 2A is a perspective view of the actual head.

FIG. 2 shows the dependence of an externally applied magnetic field on the magnetic head of the second embodiment of the present invention based on the rate of change in magnetoresistance. FIG. 2 (a) shows a spin valve type magnetoresistance effect element having a width of 40 μm and CoZrNb. A graph when a magnetic yoke made of a thin film is connected, and (b) is a graph when a non-magnetic copper yoke is connected.

3A and 3B show the structure of a magnetic head according to a second embodiment of the present invention. FIG. 3A is a sectional view of a magnetic head in which a second magnetic yoke and a magnetoresistive element arranged in contact with the second magnetic yoke are formed on the substrate side. FIG. 3B is a cross-sectional view of the head in which the second magnetic yoke and the magnetoresistive element arranged in contact with the second magnetic yoke are on the head surface and the magnetic yoke is substantially flat.

4A and 4B show the structure of a magnetic head according to a third embodiment of the present invention. FIG. 4A is a cross-sectional view of a head in which a magnetoresistive element is arranged in contact with a magnetic yoke, and FIG. FIG. 4 is a cross-sectional view of a head arranged close to a magnetic yoke via a conductor layer.

FIG. 5 is a sectional view showing the structure of a magnetic head according to a fourth embodiment of the present invention.

FIGS. 6A and 6B show a magnetic head according to a fifth embodiment of the present invention, wherein FIG. 6A is a plan view showing a case where a soft magnetic thin film is used as a magnetic domain control film, and FIG. FIG.

7A and 7B show a magnetic head capable of coping with multitracking as a sixth embodiment of the present invention, and FIG. 7A is a perspective view showing the relationship between the arrangement of the magnetic head and multitracks on a magnetic medium; 3B is a plan view showing the actual magnetoresistive head of the embodiment. FIG.

FIG. 8 is a perspective view showing a conventional shield type magnetoresistive magnetic head.

FIG. 9 is a cross-sectional view of a conventional yoke-type magnetoresistive magnetic head in which a magnetic substrate is also used as a magnetic yoke on one side.

FIG. 10 is a perspective view showing a conventional vertical magnetoresistance effect magnetic head.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Non-magnetic board | substrate, 2 ... 1st magnetic yoke, 3 ... Non-magnetic insulating layer, 4 ... Gap, 5 ... Back gap, 6 ... Bias conductor, 7, 7f, 7r ... 2nd magnetic yoke, 8 ... Magnetoresistance effect Element, 9, 9r, 9l Front lead conductor (front lead), 10 Rear lead conductor (rear lead), 11 Medium facing surface, 12 Nonmagnetic insulating layer, 13 Conductive layer, 14 Recording Winding, 15: Magnetic thin film for magnetic yoke, 16: Magnetic thin film for magnetoresistive effect element, 17, 18, 19: Hard magnetic thin film, 20: Lead-out conductor (lead), 21: Magnetic shield, 22: Magnetic yoke, 23 … Magnetic substrate, 24… bias conductor (also used as lead conductor).

Claims (6)

[Claims] 1. A set of magnetic yokes having a predetermined gap, an anisotropic magnetoresistive element or a giant magnetoresistive element installed in a part of the magnetic yoke, and electricity is supplied to the magnetoresistive element. Therefore, the magnetic yoke has a magnetic yoke structure including a lead conductor connected to the magnetic yoke, and a conductor arranged as necessary for applying a bias magnetic field to the magnetoresistive element, and stacked in the track direction. A yoke type magnetoresistive effect type magnetic head, wherein the magnetoresistive effect element is arranged in contact with the magnetic yoke or in contact with a conductive layer having a thickness of 100 nm or less via the magnetic yoke. A magnetoresistive magnetic head, wherein a sense current is applied to the magnetoresistive element. 2. The magnetic yoke and the magnetoresistive element are electrically connected to each other, and the sense current is supplied to the magnetoresistive element via the magnetic yoke. The magneto-resistance effect element is magnetically connected or a non-magnetic layer with a predetermined conductor and a thickness of 100 nm or less,
Either an antiferromagnetic layer or a hard magnetic layer, or a layered film of each of these layers is separated and close to each other,
The magnetic head according to claim 1. 3. A magnetic yoke, wherein at least one of the magnetic yokes is divided or partially cut away in the vicinity of being electrically connected to the magnetoresistive element. 2. The magnetic head according to claim 1, wherein the magnetic head is continuous with a relatively small thickness. 4. A thin film identical to the magnetic thin film used for forming the magnetic yoke and the magnetoresistive element is disposed outside the magnetic yoke in a track width direction with a gap of 1 μm or less from the magnetic yoke. With the configuration, the magnetic yoke and the magnetic head characterized by performing magnetic domain control of the magnetoresistive element, or one or more types outside the track width direction of the magnetic yoke, 4. The magnetic head according to claim 1, wherein a magnetic domain of the magnetic yoke and the magnetoresistive element is controlled by a configuration in which hard magnetic films having different thicknesses are arranged. 5. A multi-track head in which a plurality of magnetic heads are integrated in a line in the track width direction, wherein one of the lead conductors is provided on a side facing a predetermined medium. Is shared by a plurality of magnetic heads, and the other lead conductor is connected so that it can be used individually for each magnetic head. The track gap between each of the adjacent magnetic heads can be set to 1 μm or less. 4. A structure according to claim 1, wherein a predetermined film is provided on the outer side of the magnetic head at both ends of the magnetic head so that the magnetic domain of the magnetoresistive element can be controlled. Or the magnetic head according to 4. 6. A yoke-type magnetoresistive magnetic head having a magnetic yoke structure, wherein the magnetic yoke is wound once to several times in the vicinity of a facing surface of a predetermined medium to be accessed and substantially parallel to the surface. A magnetoresistive effect type magnetic head characterized in that it is configured to be recordable on a magnetic medium for perpendicular magnetic recording by applying windings thereon, and is configured to be recordable and reproducible by the same magnetic head.