JPH11118460A - Two-dimensional shape detection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily detect the two-dimensional shape of the subject of detection. SOLUTION: A shell part 3 having a detecting surface 4 is provided on a sensor chip 2 having a plurality of pressure sensors formed in a semiconductor fabrication process. The shell part 3 is provided at each pressure sensor with a pressure detection chamber 12 to which the pressure-sensitive surface of the pressure sensor is opposed, and a pressure transfer hole 13 communicating each pressure detection chamber 12 to the detecting surface 4 is provided. The shell part 3 is provided also with a fluid passage 15 communicating each pressure detection chamber 12 to the outside of the shell part 3, and a fluid supply/ discharge device which is provided external to the fluid passage 15 to supply almost equal amounts of air to the pressure detection chambers 12 via the fluid passage 15 is connected to the fluid passage 15. When the pressure transfer hole 13 is closed by the subject of detection which is pressed against the detecting surface 4, the pressure of the corresponding pressure detection chamber 12 rises.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sensor for detecting a two-dimensional shape such as a fingerprint and Braille.

[0002]

2. Description of the Related Art Fingerprints and braille, for example, are three-dimensional, but these fingerprints and braille are themselves treated as two-dimensional shape data. When the two-dimensional shape data is handled by a computer, the two-dimensional shape data needs to be represented by an electric signal. In order to obtain two-dimensional data of a fingerprint or Braille, an image obtained by photographing a fingerprint or Braille is used as image data composed of electric signals, and this image data is subjected to data processing to obtain two-dimensional data represented by electric signals. .

[0003]

However, in order to perform data processing on fingerprint or Braille image data to obtain two-dimensional shape data, it is necessary to prevent the image to be photographed from being adversely affected by surrounding light and shade. . This is because if an image has an adverse effect of light and shade, it becomes impossible to accurately obtain two-dimensional shape data required for data processing. For this reason, photographing an image is not an easy task because it is necessary to adjust the surrounding light and dark conditions. Therefore, there is a problem that two-dimensional shape data of a fingerprint or Braille cannot be easily obtained.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object of the present invention is to provide a two-dimensional shape detecting device capable of easily detecting a two-dimensional shape of a detection object. It is in.

[0005]

According to a first aspect of the present invention, there is provided a pressure sensor in which a plurality of pressure sensors are arranged in a state where pressure-sensitive surfaces to which pressure is applied from the outside are arranged in the same plane. A plurality of pressure sensing chambers, each of which is disposed on the sensor chip, and which is opposed to each of the pressure-sensitive surfaces for each of the pressure sensors, and which detects an object to be detected in which a two-dimensional shape is detected. And a body having a pressure transmission hole communicating the pressure detection chamber and the detection surface for each of the pressure detection chambers, and the pressure transmission hole is closed when each of the pressure transmission holes is closed. A pressure change generating means for changing the pressure of the pressure detection chamber which is in communication is provided.

According to a second aspect of the present invention, in the first aspect, the pressure change generating means supplies or discharges a substantially equal amount of fluid to each of the pressure detection chambers. It is a fluid supply / discharge means.

According to a third aspect of the present invention, in the second aspect of the present invention, the fluid supply / discharge means is provided on the body, and the fluid for connecting the pressure detection chambers to the outside of the body. A fluid supply / discharge device that is provided outside the flow path and the body, and supplies or discharges a substantially equal amount of fluid to or from each of the fluid detection chambers through the fluid flow path.

According to a fourth aspect of the present invention, in the third aspect of the invention, a pressure detection chamber forming hole for forming the pressure detection chamber is formed in the body, and the pressure is detected by the sensor chip. A first body in which one opening of the chamber forming hole is closed, and a first body in which the pressure detecting chamber is formed while the other opening of the pressure detecting chamber forming hole is closed to form the pressure detecting chamber. And the fluid flow path includes the first body.
It was formed by a flow path forming groove formed on the contact surface of the body and the second body.

According to a fifth aspect of the present invention, in the first aspect of the invention, the pressure change generating means includes a heating resistor provided for each of the pressure detection chambers so as to be opposed to the pressure detection chamber. And power supply means for supplying power for heat generation to each of the heat generating resistance portions.

(Operation) According to the first aspect of the present invention,
When the side for detecting the two-dimensional shape of the detection target is pressed against the detection surface of the body, each pressure transmission hole that opens in the detection surface on the detection surface where the detection target is pressed is closed. Then, the pressure change generating means changes the pressure of each pressure detection chamber to which each closed pressure transmission hole communicates from the pressure when the pressure transmission hole is not closed. As a result, the output signal output from the pressure sensor that detects the pressure in the pressure detection chamber in which the pressure has changed changes. Therefore, the output signal of the pressure sensor that communicates with the pressure transmission hole that opens in the region corresponding to the portion where the detection target is pressed against the detection surface changes from the output signal when the pressure transmission hole is not closed.

According to the invention described in claim 2, according to claim 1,
In addition to the effect of the invention described in the above, when the pressure transmission hole is closed, the fluid supplied to the pressure detection chamber with which the pressure transmission hole communicates is not discharged to the outside from the pressure transmission hole. Accordingly, the pressure in the pressure detection chamber increases, and an output signal corresponding to the increased pressure is output from the pressure sensor.
Alternatively, when the pressure transmission hole is closed, no fluid is supplied from the outside to the pressure detection chamber to which the pressure transmission hole communicates via the pressure transmission hole. Accordingly, the pressure in the pressure detection chamber decreases, and an output signal corresponding to the reduced pressure is output from the pressure sensor.

According to the invention described in claim 3, according to claim 2,
In addition to the operation of the invention described in the above, a fluid is supplied to each fluid detection chamber via a fluid flow path from a fluid supply / discharge device provided outside. Alternatively, fluid is discharged from each fluid detection chamber. Therefore, when the pressure transmission hole is closed, the pressure in the pressure detection chamber with which the pressure transmission hole communicates changes from the pressure up to that time.

According to the fourth aspect of the present invention, the third aspect is provided.
In addition to the operation of the invention described in the above, when the second body is joined to the upper surface of the first body joined to the upper surface of the sensor chip, a pressure detection chamber is formed and a fluid flow path is formed.

According to the invention described in claim 5, according to claim 1 of the present invention,
In addition to the effect of the invention described in (1), when the pressure transmission hole is closed, the pressure in the pressure detection chamber to which the pressure transmission hole communicates increases due to heat generated from the heat generating resistor. Therefore, an output signal corresponding to the increased pressure is output from the pressure sensor.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to FIGS. 1 to 5
FIG. 3 is a diagram that is greatly simplified to explain the configuration, and is different from an actual one.

As shown in FIG. 2, in the present embodiment, a two-dimensional shape detecting device (hereinafter, referred to as a shape detecting device) 1
It includes a plate-shaped sensor chip 2 and a rectangular parallelepiped body 3 provided on the sensor chip 2. The upper surface of the body 3 is a detection surface 4 for detecting the two-dimensional shape of the object to be detected.

FIG. 4 is a schematic plan view of the sensor chip 2. As shown in FIG. 4, the sensor chip 2 has a semiconductor pressure sensor (hereinafter, pressure sensor) 5 formed on a single crystal silicon substrate by a semiconductor manufacturing process. In the present embodiment, the pressure sensors 5 are formed in an array on a silicon substrate, and the sensor chip 2 is a pressure sensor array. Each pressure sensor 5 has its pressure-sensitive surface 6 arranged in the same plane.

Each pressure sensor 5 is of a micro-diaphragm type, in which a pressure reference chamber formed on a silicon substrate is covered with a micro-diaphragm made of a silicon nitride film, and four piezoresistive gauges are provided on the micro-diaphragm. is there. Each piezoresistive gauge is electrically connected to form a bridge circuit. The pressure reference chamber is sealed with a silicon nitride film. This pressure sensor 5 uses a silicon nitride film micro-diaphragm as a CV
D, and the pressure reference chamber can be formed by undercut etching using an anisotropic etching solution.
The piezoresistive gauge can be formed by impurity diffusion or epitaxial growth. This pressure sensor 5
Since the pressure reference chamber is kept in a vacuum state, the absolute pressure can be detected.

In the present embodiment, the pressure-sensitive surface 6, that is, the upper surface of the micro-diaphragm has a size of one side of 0.1.
Each pressure sensor is formed such that the pitch of each pressure-sensitive surface 6 is 0.1 to 0.5 mm.

A protruding portion 7 is formed at an end of the substrate of the sensor chip 5, and a connecting portion 8 to which a wiring from each pressure sensor 5 is connected is provided on an upper surface of the protruding portion 7 (however, each connecting portion 8 is provided). In the drawing, only the schematic shape is shown.) The connecting portion 8 is a group of bonding pads 8 to which signal wirings (not shown) from the pressure sensors 5 are connected. 8 is connected to an external sensor peripheral circuit.

FIG. 1 is a schematic plan view showing the shape detecting device 1, and FIG. 3 is a sectional view taken along line AA in FIG. FIG.
As shown in the figure, the body 3 is joined to the upper surface of the sensor chip 5. The body includes a lower body 9 as a first body and an upper body 10 as a second body.
FIG. 5 is a plan view showing the lower trunk portion 9 joined to the upper surface of the sensor chip 5. The lower body 9 is made of single crystal silicon or Pyrex glass, and is formed in a plate shape having a size to cover all the pressure sensors 5 of the sensor chip 2 as shown in FIGS. The pressure detecting chamber forming hole 1 with which the pressure sensitive surface 6 of each pressure sensor 5 faces the lower body 9.
1 is formed in plurality. Each pressure-sensitive surface 6 has a pressure detection chamber forming hole 11 whose lower opening is closed by the pressure-sensitive surface 6 of each pressure sensor 5.

Each pressure detection chamber forming hole 11 can be formed, for example, by ion etching which is directional etching. The ion etching can be performed by any of reactive ion etching (parallel plate type ion etching), reactive ion beam etching, reactive high-speed atomic beam etching, and the like. According to each of these etching methods, it is possible to perform the through etching with a high aspect ratio.

The lower body 9 is joined to the sensor chip 2. When the lower body 9 is made of single-crystal silicon, the bonding can be performed by direct bonding, which is one type of pressure welding. When the lower body 9 is made of Pyrex glass, it is performed by anodic bonding. be able to.

An upper body 10 is joined to the upper surface of the lower body 9. The upper body 10 is made of single crystal silicon or Pyrex glass, as shown in FIGS.
The lower body 9 is formed in a plate shape large enough to cover each pressure detection chamber forming hole 11. The upper body portion 10, the lower body portion 9, and the sensor chip 2 form a pressure detection chamber 12 to which each pressure sensor 5 faces. Also, the upper surface of the upper body 10
The detection surface 4 is pressed against the detection target. One side of the detection object is pressed against the detection surface 4 to obtain two-dimensional shape data. The two-dimensional shape data is a two-dimensional shape consisting of a part in which the unevenness of the object to be detected, such as a finger or a Braille part, which is a three-dimensional body such as a fingerprint or Braille, comes into contact with the detection surface 4 or a paper or cloth. This is data representing a two-dimensional shape composed of a portion where one surface of the detection target having a penetrating portion, such as a formed punched pattern, comes into contact with the detection surface.

In the upper body 10, for each pressure detection chamber 12,
A pressure transmission hole 13 that connects the pressure detection chamber 12 to the detection surface 4 is formed. Each pressure transmission hole 13 is formed to extend in a direction perpendicular to the detection surface 4, and is opened on the detection surface 4 above the corresponding pressure sensor 5. Therefore, the openings 14 of the pressure transmission holes 13 are arranged in an array on the detection surface 4 at the same pitch as the pressure sensors 5 on the sensor chip 2.

A channel forming groove 15 is formed on the lower surface of the upper body 10. A fluid flow path 16 that connects each pressure detection chamber 12 to the outside of the body 3 is formed by the upper surface of the lower body 9 and the flow path forming groove 15 of the upper body 10 joined to the upper surface. . The fluid passage 16 is gathered in one opening 17 opened on the side surface of the body 3. This opening 17
Is connected to an air supply device (not shown) that supplies air at a predetermined pressure to each of the pressure detection chambers 12 via a fluid flow path 16. The fluid passage 16 is formed so that the air supplied from the air supply device is supplied to the pressure detection chambers 12 almost uniformly.

The upper body 10 is joined to the upper surface of the lower body 9. Bonding can be performed by direct bonding when both body parts 9 and 10 are made of single-crystal silicon, and anodic bonding when either one is made of Pyrex glass. When both are Pyrex glass, fusion can be performed.

In the shape detecting device 1, when the pressure transmitting hole 13 is closed by the object pressed against the detecting surface 4, the pressure in the pressure detecting chamber 12 in which the pressure transmitting hole 13 is closed is closed. It is designed to rise from pressure when it is not.

Next, the operation of the two-dimensional shape detecting device configured as described above will be described. In a state where nothing is pressed against the detection surface 4, since the openings 14 of all the pressure transmission holes 13 are not closed, the air supplied to each pressure detection chamber 12 flows to the outside from the pressure transmission holes 13. Emitted with almost equal emissions. As a result, each pressure detection chamber 12
Are substantially equal, and the values of the output signals output from the respective pressure sensors 5 are substantially equal. An output signal output from each pressure sensor 5 in this state corresponds to a state when the detection target is not pressed against the detection surface 4.

When the side for detecting the two-dimensional shape of the object to be detected is pressed against the detection surface 4, the pressure transmission hole 13 that opens in the area of the detection surface 4 where the object is pressed is closed. Then, the pressure detection chamber 1 in which the pressure transmission hole 13 is closed is provided.
2 is no longer discharged from the pressure detection chamber 12, and the pressure in the pressure detection chamber 12 rises from the pressure when the pressure transmission hole 13 is not closed. as a result,
The output signal output from the pressure sensor 5 of the pressure detection chamber 12 whose pressure has increased changes to an output signal corresponding to the increased pressure. Therefore, the output signal of the pressure sensor 5 communicating with the pressure transmitting hole 13 opening in the area corresponding to the two-dimensional shape on the side where the detection target is pressed against the detection surface 4 changes.

Output signals from each pressure sensor are processed by a sensor peripheral circuit provided outside the shape detection sensor. In the sensor peripheral circuit, each output signal is compared with a preset reference signal, and based on the comparison result, it is determined whether or not the pressure transmission hole 13 corresponding to the output signal is closed. Therefore, the two-dimensional shape data of the detected object can be obtained from the arrangement area of the closed pressure transmission hole 13 on the detection surface 4.

As described in detail above, according to the two-dimensional shape detecting device of the present embodiment, the following effects can be obtained. (A) The pressure sensing surfaces 6 of the plurality of pressure sensors 5 formed on the sensor chip 2 are opposed to the pressure detection chambers 12 formed in the body 3 provided on the sensor chip 2. On the other hand, the upper surface of the body 3 is provided with a detection surface 4 against which the object to be detected is pressed, and a pressure transmission hole 13 for communicating each pressure detection chamber 12 with the detection surface 4 is provided. Further, the pressure detection chamber 12 in which the pressure transmission hole 13 is closed
And a pressure change generating means for changing the pressure. Therefore, when the object to be detected is pressed against the detection surface 4, the pressure of the pressure detection chamber 12 in which the pressure transmission hole 13 is closed in a two-dimensional shape in contact with the detection surface 4 changes. As a result, the output signal output from the pressure sensor 5 that detects the pressure in the pressure detection chamber 12 in which the pressure has changed changes. Therefore, the output signal output by the pressure sensor 5 communicating with the pressure transmitting hole 13 opened in the area corresponding to the two-dimensional shape on the side pressed against the detection surface 4 of the detection target changes. For this reason, the two-dimensional shape of the object pressed against the detection surface 4 is detected from the arrangement shape of the pressure transmission hole 13 of the pressure sensor 5 whose output signal has changed on the detection surface 4.

(B) In this shape detecting device 1, since the pressure sensor 5 is formed on the sensor chip 2 by a semiconductor manufacturing process, the pressure sensor 5 having a small size and high accuracy can be integrated at a high density. Can be. Therefore, a two-dimensional shape of a minute pattern such as a fingerprint can be detected with high resolution.

(C) The pressure change generating means is a fluid supply means for supplying a substantially equal amount of fluid to each pressure detection chamber 12. When the pressure transmission hole 13 is closed, the pressure in the pressure detection chamber 12 increases, and the output signal output by the pressure sensor 5 detecting the pressure in the pressure detection chamber 12 changes. As a result, since it is only necessary to supply a fluid to each pressure detection chamber 12 from the outside, the configuration of the pressure detection chamber 12 is simplified, and the pressure detection chambers 12 can be provided at a high density. For this reason, since the pressure transmission holes 13 can be provided at high density, a two-dimensional shape can be detected with high resolution.

(D) The fluid supply / discharge means is connected to each pressure detection chamber 1
2 is connected to the outside of the body 3, and each of the pressure detection chambers 12 is provided through the fluid passage 15 provided outside the body 3.
A fluid supply device for supplying a substantially equal amount of fluid to the apparatus.
Therefore, since only the fluid channel 15 is formed in the body 3, the configuration of the body 3 can be simplified.

(E) The body 3 is closed with the first body (lower body 9) in which the pressure detection chamber forming hole 11 forming the pressure detection chamber 12 is formed, and the pressure detection chamber forming hole 11 is closed. And the second body (the upper body 1) in which the pressure transmission holes 13 are formed.
0), and the fluid channel 16 is formed by the channel forming groove 15 formed on the contact surface of the first body and the second body. Therefore, the fluid channel 16 can be formed by simple processing.

(F) Each pressure detection chamber 1 in the fluid supply device
2 was supplied with fluid. Therefore, since the fluid is discharged to the outside from the pressure transmission hole 13 opened in the detection surface 4, it is difficult for dust and the like to enter the pressure transmission hole 13 from the outside. As a result, it can be used even in an environment where there is a lot of dust.

The embodiment is not limited to the above embodiment, but may be modified as follows. In the above-described embodiment, the fluid is supplied from the fluid supply device provided outside to each of the pressure detection chambers 12 via the fluid flow channel 16.
The fluid may be discharged from each of the pressure detection chambers 12 to the outside via 6. Also in this case, since the configuration can be simplified and the pressure detection chambers 12 can be provided at a high density, the resolution can be increased.

The pressure sensor 5 may be an integrated pressure sensor formed by a bipolar IC manufacturing process. In this case, the diaphragm is formed by anisotropic etching from the back surface of the single crystal silicon substrate. Furthermore, a base plate of crystallized glass can be joined to the back surface of the silicon substrate to facilitate handling.

Further, a semiconductor pressure sensor having another configuration may be used. In place of the strain gauge made of a piezoresistive element, a strain gauge made of a piezoelectric element formed in a semiconductor manufacturing process may be used.

The pressure sensors 5 and the openings 14 on the detection surface 4 do not need to be provided at vertically opposed positions. For example, if the openings 14 are provided at a pitch larger than the pitch at which the pressure sensors 5 and the pressure detection chambers 12 are provided,
Each pressure transmission hole 13 may be formed so as to extend in a direction inclined with respect to the detection surface 4. In this case, the flow passage cross-sectional area of each pressure transmission hole 13 may be set so that the pressure in each pressure detection chamber 12 becomes substantially equal when the detection target is not pressed against the detection surface 4. .

The detection surface 4 is not limited to a flat surface but may be a curved surface. In this case, the entire fingerprint can be detected only by pressing the finger as the detection target against the detection surface 4 in one direction.

The arrangement of the openings 14 is not limited to an array, but may be, for example, a radial or concentric arrangement. The fluid flow path 15 is not limited to the configuration formed in the upper body 10, but may be configured to be provided in the lower body 9 as shown in FIGS. 6 to 8. FIG. 6 is a plan view of the shape detection device 1, and FIG. 8 is a sectional view taken along line BB of FIG. FIG. 7 is a plan view showing a state where the lower body 9 is joined to the sensor chip 2. As shown in FIGS. 6 to 8, the lower body 9 has a fluid flow path 1 for connecting each pressure detection chamber 12 to the outside of the body 3.
8 is formed. Then, a fluid is supplied or discharged from the external fluid supply / discharge device to each pressure detection chamber 12 via the fluid flow path 18. Also in this case, the configuration of each pressure detection chamber 12 can be simplified to achieve higher density.

As shown in FIG. 9, the fluid flow path 20 may be formed by the flow path forming groove 19 formed on the upper surface of the lower body 9 and the lower surface of the upper body 10. Alternatively, a flow path forming groove may be formed on the lower surface of the upper body 10, and a fluid flow path may be formed in cooperation with the flow path forming groove 19. In each case, the configuration of the pressure detection chamber 12 can be simplified,
Further, the fluid flow path can be easily formed.

The pressure change generating means is connected to each pressure detecting chamber 1
Each heating resistor may be constituted by a heating resistor provided so as to face the pressure detection chamber 12 and power supply means for supplying power for heating to each heating resistor. The heat generating resistor portion can be constituted by a diffusion resistor portion formed on the sensor chip 2 in a semiconductor manufacturing process. Power is always supplied to each heating resistor from a power supply unit. When the pressure transmission hole 13 is closed by the detection target, the fluid in the pressure detection chamber 12 in which the pressure transmission hole 13 is closed is confined, and the temperature is generated by the heat generated by the heating resistor. Rise. As a result, the pressure in the pressure detection chamber 12 increases, and an output signal corresponding to the pressure is output from the pressure sensor 5. In this configuration, it is only necessary to provide a heating resistor in each of the pressure detection chambers 12, so that the size of the entire shape detection device can be reduced.

The sensor peripheral circuit may be formed on the sensor chip 2 by a semiconductor manufacturing process. The sensor peripheral circuit includes a signal amplifier, a zero / span adjuster, a linearity corrector, a temperature compensator, an A / D
An output interface such as a converter, a stabilized power supply, and the like. In this case, there is no need to provide an external sensor peripheral circuit when using the shape detection sensor.

A fingerprint detecting device for detecting a fingerprint as two-dimensional shape data by the two-dimensional shape detecting device of the present invention may be configured. In this case, the fingerprint shape data can be easily detected. .

The two-dimensional shape detecting apparatus of the present invention may be configured as a braille detecting apparatus for detecting braille as two-dimensional shape data. In this case, two-dimensional shape data of Braille can be easily detected.

A two-dimensional shape detecting part which is a three-dimensional object other than a fingerprint and Braille, and in which an uneven portion of the detected object comes into contact with the detection surface 4, for example, a two-dimensional shape detecting a coin pattern or a seal imprint. It may be a device. In this case, the density of the openings 14 on the detection surface 4 may be set according to the size, the density, and the like of the detection target whose shape is to be detected.

Not only the two-dimensional shape of the portion where the uneven portion of the detection object contacts the detection surface 4, but also one surface of the detection object having a penetrating portion such as a punched pattern made of paper or cloth is the detection surface. A shape detection device that detects a two-dimensional shape of a portion that contacts the fourth shape may be used.

Hereinafter, in addition to the technical idea described in the claims, the technical idea grasped from each of the above-described embodiments will be described together with its effects. (1) In the two-dimensional shape detecting device according to any one of claims 1 to 5, a sensor peripheral circuit is formed on the sensor chip by a semiconductor manufacturing process. According to such a configuration, it can be used without preparing a sensor peripheral circuit separately.

(2) In the two-dimensional shape detecting device according to any one of claims 1 to 5, the pressure sensor is a diaphragm type, and a sealed pressure reference chamber is relatively mounted on the diaphragm. Have been. According to such a configuration, since the pressure in the pressure reference chamber is constant irrespective of the pressure outside the detection device, the absolute pressure can be detected by each pressure sensor. Therefore, the shape can be detected with high accuracy regardless of the atmospheric pressure of the surrounding environment.

(3) A fingerprint detecting device comprising the two-dimensional shape detecting device according to any one of claims 1 to 5.
According to such a configuration, a fingerprint can be easily detected.

(4) A Braille recognizing device provided with the two-dimensional shape detecting device according to any one of claims 1 to 5.
According to such a configuration, Braille can be easily detected.

In this specification, the means and members according to the present invention are defined as follows. (1) Two-dimensional shape data is data representing a two-dimensional shape consisting of a part in which an uneven portion of a detection target such as a finger or a Braille part which is a three-dimensional body contacts a detection surface, such as a fingerprint or Braille; The data includes a data representing a two-dimensional shape including a portion where one surface of a detection target having a penetrating portion contacts a detection surface, such as a punched pattern formed on paper or cloth.

(2) The pressure sensor only needs to be formed on the sensor chip by a semiconductor manufacturing process. In the case of a diaphragm type sensor, there is no relation to the presence or absence of a pressure reference chamber. The strain gauge may be a piezoresistive element or a piezoelectric element.

[0057]

As described in detail above, claims to claim 5 are provided.
According to the invention described in (1), the two-dimensional shape of the detected object can be directly detected.

According to the second aspect of the present invention, since it is only necessary to supply or discharge a fluid from the outside to each of the pressure detection chambers, the configuration is simplified and the pressure detection chambers can be provided at a high density. it can. Therefore, a two-dimensional shape can be detected with high resolution.

According to the third aspect of the present invention, since only the flow path forming groove communicating with each pressure detection chamber is formed by processing.
The configuration of the trunk can be simplified. According to the invention described in claim 4, the fluid channel can be formed by simple processing.

According to the fifth aspect of the present invention, since it is only necessary to provide a heating resistor for each pressure detection chamber, the size of the entire sensor can be reduced.

[Brief description of the drawings]

FIG. 1 is a schematic plan view showing a two-dimensional shape detection device.

FIG. 2 is a schematic perspective view of the same.

FIG. 3 is a sectional view taken along line AA in FIG. 1;

FIG. 4 is a schematic plan view showing a sensor chip.

FIG. 5 is a schematic plan view showing a state where only a lower trunk is joined.

FIG. 6 is a schematic plan view showing another example of a two-dimensional shape detection device.

FIG. 7 is a schematic plan view showing a state where only the lower trunk is joined.

FIG. 8 is a schematic sectional view taken along the line BB in FIG. 6;

FIG. 9 is a schematic cross-sectional view showing another example of a two-dimensional shape detection device.

[Explanation of symbols]

2 ... Sensor chip, 3 ... Body, 4 ... Detection surface, 5 ... Pressure sensor, 6 ... Pressure sensitive surface, 9 ... Lower body as first body, 1
0: Upper body as a second body, 11: Pressure detection chamber forming hole, 12: Pressure detection chamber, 13: Pressure transmission hole, 15: Fluid flow path constituting pressure change generating means and fluid supply / discharge means.

Claims (5)

[Claims] A plurality of pressure sensors, a sensor chip formed in a state where pressure-sensitive surfaces to which pressure is externally applied are arranged in the same plane; and a plurality of pressure sensors arranged on the sensor chip; A plurality of pressure detection chambers facing each pressure-sensitive surface are formed, and a detection surface on which a detected object whose two-dimensional shape is detected is pressed is provided, and the pressure detection chamber and the detection surface are provided for each of the pressure detection chambers. A two-dimensional shape, comprising: a body having a pressure transmitting hole communicating with the pressure transmitting hole; and a pressure change generating means for changing a pressure of the pressure detection chamber to which the pressure transmitting hole communicates when each of the pressure transmitting holes is closed. Detection device. 2. The two-dimensional shape detecting device according to claim 1, wherein said pressure change generating means is a fluid supply / discharge means for supplying or discharging a substantially equal amount of fluid to each of said pressure detection chambers. . 3. The fluid supply / discharge means is provided in the body, and a fluid flow path communicating each of the pressure detection chambers to the outside of the body, and a fluid flow path provided outside the body, The two-dimensional shape detection device according to claim 2, further comprising a fluid supply / discharge device that supplies or discharges a substantially equal amount of fluid to each of the fluid detection chambers via a passage. 4. A first body portion, wherein the body portion has a pressure detection chamber forming hole forming the pressure detection chamber, and one opening of the pressure detection chamber forming hole is closed by the sensor chip. And a second body in which the other opening of the pressure detection chamber forming hole is closed to form the pressure detection chamber and the pressure transmission hole is formed. The two-dimensional shape detection device according to claim 3, wherein the two-dimensional shape detection device is formed by a flow path forming groove formed on a contact surface between the body and the second body. 5. The pressure change generating means includes: a heating resistor provided for each of the pressure detection chambers so as to face the pressure detection chamber; and an electric power for supplying electric power to each of the heating resistors for heat generation. The two-dimensional shape detection device according to claim 1, which is a supply unit.