JPH11112141A - Manufacture of multilayer wiring board - Google Patents

Manufacture of multilayer wiring board

Info

Publication number
JPH11112141A
JPH11112141A JP27537997A JP27537997A JPH11112141A JP H11112141 A JPH11112141 A JP H11112141A JP 27537997 A JP27537997 A JP 27537997A JP 27537997 A JP27537997 A JP 27537997A JP H11112141 A JPH11112141 A JP H11112141A
Authority
JP
Japan
Prior art keywords
layer
board
multilayer
minutes
wiring board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP27537997A
Other languages
Japanese (ja)
Inventor
Shoichi Takamatsu
章一 高松
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Showa Denko Materials Co Ltd
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP27537997A priority Critical patent/JPH11112141A/en
Publication of JPH11112141A publication Critical patent/JPH11112141A/en
Pending legal-status Critical Current

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  • Production Of Multi-Layered Print Wiring Board (AREA)

Abstract

PROBLEM TO BE SOLVED: To reduce the dimensional change in processing stage after multilayering by heat-treating a multilayer wiring board where an inner-layer circuit board and a prepreg are stacked into a multilayer, within the specified temperature range for stacking before circuit processing. SOLUTION: A laminate where both sides of glass base material epoxy resin are covered with copper is processed to make a circuit by etched foil method, and further oxidation treatment is applied to the surface of the copper foil 3 of the circuit. Copper foils are arranged through one sheet each of glass cloth base material epoxy resin prepreg 2 above and below this manufactured inner-layer circuit board 1. This combination constituent material is heated and pressurized at 2.94 MPa and 170 deg.C for 90 minutes in decompressed atmosphere, and then it is cooled for 30 minutes, with this pressure on, so as to make a four-layer board. Heat treatment at 160-180 deg.C for 60 minutes is applied to this four-layer board with a hot blast circulation system of drier. In the range of ±10 deg.C of this laminate formation temperature, the dimensional property can be improved most within the treatment temperature range fit for resin. Accordingly, dimensional change and dispersion are small, and further there is no discoloration of the substrate.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、多層配線板の製造
方法に関する。
The present invention relates to a method for manufacturing a multilayer wiring board.

【0002】[0002]

【従来の技術】近年、エレクトロニクスの高性能化、高
機能化に伴ってプリント配線板は高密度化、高多層化が
進み、寸法変化の少ない多層プリント配線板が望まれて
いる。多層プリント配線板を製造する際、特に多層化積
層成形工程では、圧力による影響を少なくするため低圧
で成形したり、又より低圧成形を行うため低圧成形で発
生し易い欠点であるボイド・かすれ等の対策として、真
空囲い込みのプレスを用い減圧化で製造を行っている。
2. Description of the Related Art In recent years, printed wiring boards have been increased in density and multilayered in accordance with higher performance and higher functionality of electronics, and multilayer printed wiring boards with less dimensional change have been desired. When manufacturing multilayer printed wiring boards, especially in the multilayer lamination molding process, molding is performed at low pressure in order to reduce the influence of pressure, and voids and fading, which are disadvantages that are likely to occur in low pressure molding because low pressure molding is performed. As a countermeasure, manufacturing is performed by reducing the pressure using a vacuum-enclosed press.

【0003】また、内層回路板の寸法変化対策として
は、従来からその樹脂層のガラス転移温度から積層成形
温度の範囲の熱処理によって、板内に残されたひずみを
取り除き熱膨張率のばらつきを小さくすることや熱処理
後の冷却方法を適正化することで、加工時の寸法を小さ
くできることが特開平1−215514号公報や、特開
昭63−69625号公報等により知られており、内層
回路板にも取り入れられ効果を得てきた。
[0003] As a measure against dimensional change of the inner circuit board, heat treatment in the range from the glass transition temperature of the resin layer to the lamination molding temperature has conventionally been performed to remove the strain remaining in the board and reduce the variation in the coefficient of thermal expansion. It is known from Japanese Patent Application Laid-Open Nos. 1-215514 and 63-69625 that the dimensions during processing can be reduced by performing appropriate cooling methods after heat treatment. It has also been adopted and has gained its effect.

【0004】[0004]

【発明が解決しようとする課題】しかし、これらの対策
は多層化積層までの内層回路板の寸法変化対策には効果
があったが、多層化積層後の加工工程での寸法変化には
効果がなかった。更に、近年の高密度配線技術の進歩に
よって、多層板加工時において更に高度な寸法特性を要
求されるようになったため、これに対応できる新規な技
術が必要であった。従来の内層回路板を熱処理する方法
では、要求された多層化積層後の加工工程における寸法
特性を満足することができないという課題があった。
However, these countermeasures were effective in reducing the dimensional change of the inner layer circuit board up to the multi-layer lamination, but were effective in the dimensional change in the processing step after the multi-layer lamination. Did not. Furthermore, with the recent progress of high-density wiring technology, higher dimensional characteristics have been required in the processing of a multilayer board, and a new technology capable of coping with this is required. The conventional method of heat-treating an inner-layer circuit board has a problem in that the required dimensional characteristics in a processing step after the multi-layer lamination cannot be satisfied.

【0005】本発明は、多層化後の加工工程において、
寸法変化が小さい多層配線板の製造方法を提供すること
を目的とする。
According to the present invention, in a processing step after multilayering,
It is an object of the present invention to provide a method for manufacturing a multilayer wiring board having a small dimensional change.

【0006】[0006]

【課題を解決するための手段】本発明の多層配線板の製
造方法は、内層回路板とプリプレグを多層化積層成形し
た多層配線板を、回路加工する前に、積層成形温度±1
0℃の範囲で熱処理することを特徴とする。
According to the present invention, there is provided a method for manufacturing a multilayer wiring board, comprising: forming a multilayer wiring board formed by laminating and laminating an inner layer circuit board and a prepreg;
It is characterized in that heat treatment is performed in a range of 0 ° C.

【0007】多層板の寸法変化は、内層回路板の寸法変
化と同様に多層化積層成形中、内層回路板と接着用プリ
プレグと銅箔が一体化される時の熱膨張量及びそれぞれ
の弾性率の差により生じ、その後の回路加工を行った後
に寸法収縮で現れる。従って、多層化後の加工工程にお
いて寸法変化の良好な多層板を得るためには、多層化後
の板に残留している歪みを取り除く必要がある。本発明
は、上記目的を達成するため多層化積層成形後の多層板
に積層成形温度近辺で、基板変色が少ない最適な温度域
で熱処理した後、回路加工する方法である。また、効果
を確実にするには多層板の熱処理の温度は、積層成形温
度±10℃の範囲にする必要がある。
[0007] The dimensional change of the multi-layer board is the same as the dimensional change of the inner circuit board, and the amount of thermal expansion and the respective elastic modulus when the inner circuit board, the adhesive prepreg and the copper foil are integrated during the multilayer lamination molding. And appears as dimensional shrinkage after subsequent circuit processing. Therefore, in order to obtain a multilayer board having a good dimensional change in a processing step after multilayering, it is necessary to remove distortion remaining in the board after multilayering. The present invention provides a method of processing a circuit after heat-treating a multilayer board after multi-layer lamination molding at an optimal temperature range in which the discoloration of the substrate is small near the lamination molding temperature to achieve the above object. Further, in order to ensure the effect, the temperature of the heat treatment of the multilayer board needs to be within a range of the lamination molding temperature ± 10 ° C.

【0008】[0008]

【発明の実施の形態】本発明の基材やプリプレグに使用
する樹脂は、ポリイミド樹脂、エポキシ樹脂、不飽和ポ
リエステル樹脂等一般に多層板に使用される樹脂全般で
あり、基材ではガラスクロス、ガラスペーパー、ポリエ
ステルクロス等の多層板に用いる基材全般である。熱処
理温度は製品に用いた樹脂、基材の種類によって異なる
が、ガラスクロス基材で、一般的なエポキシ樹脂の場
合、多層板の処理条件は温度160〜180℃、時間3
0〜120分間が望ましい。この範囲以外の条件では、
寸法変化に対する効果が少なく、温度が高過ぎると樹脂
が熱劣化を起こして基板の変色、その他の支障が起き
る。
BEST MODE FOR CARRYING OUT THE INVENTION The resins used for the base material and prepreg of the present invention are all resins generally used for multilayer boards such as polyimide resin, epoxy resin and unsaturated polyester resin. It is a general base material used for multilayer boards such as paper and polyester cloth. The heat treatment temperature varies depending on the type of the resin and the base material used for the product, but in the case of a glass cloth base material and a general epoxy resin, the processing conditions of the multilayer board are a temperature of 160 to 180 ° C. and a time of 3 hours.
0 to 120 minutes is desirable. For conditions outside this range,
The effect on dimensional change is small, and if the temperature is too high, the resin undergoes thermal deterioration, causing discoloration of the substrate and other troubles.

【0009】[0009]

【実施例】【Example】

実施例 ガラス基材エポキシ樹脂両面銅張積層板(FR−4、
0.28mm、35μm銅箔)を試料とし、これをエッ
チドフォイル法により回路加工し、更に回路の銅箔表面
に酸化処理を施した。このように作製した内層回路板を
図2に示すように構成して、4層板を得た。内層回路板
の上下にガラスクロス基材エポキシ樹脂プリプレグ2
(基材厚0.1mm、樹脂分51.5%)を各1枚介し
て、銅箔3(厚み18μm)を配置した。この組合せ構
成材を、減圧雰囲気下で2.94MPa、170℃90
分間加熱、加圧を行った後、その圧力のまま冷却を30
分間行い、4層板を得た。この4層板を熱風循環型乾燥
機により、160〜180℃で60分間の加熱処理を施
した。
Example Glass-based epoxy resin double-sided copper-clad laminate (FR-4,
A 0.28 mm, 35 μm copper foil) was used as a sample, which was processed by an etched foil method, and the surface of the copper foil of the circuit was oxidized. The inner-layer circuit board thus manufactured was configured as shown in FIG. 2 to obtain a four-layer board. Glass cloth base epoxy resin prepreg 2 above and below inner circuit board
A copper foil 3 (thickness: 18 μm) was arranged via one sheet (base material thickness: 0.1 mm, resin content: 51.5%). This combined constituent material was heated at 2.94 MPa, 170 ° C. 90
After heating and pressurizing for 30 minutes, cooling
For 4 minutes to obtain a four-layer plate. The four-layer plate was subjected to a heat treatment at 160 to 180 ° C. for 60 minutes by a hot air circulation type dryer.

【0010】比較例1 実施例と同じガラス基材エポキシ樹脂両面銅張積層板を
試料とし、実施例と同様な条件で4層板を作製した後、
加熱処理しないで4層板を得た。
Comparative Example 1 A four-layer plate was prepared under the same conditions as in the example, using the same glass-base epoxy resin double-sided copper-clad laminate as the sample as a sample.
A four-layer plate was obtained without heat treatment.

【0011】比較例2 実施例と同じガラス基材エポキシ樹脂両面銅張積層板を
試料とし、実施例と同様な条件で4層板を作製した後、
熱風循環型乾燥機により120〜150℃の範囲で、6
0分間の加熱処理を施した。
Comparative Example 2 Using the same glass-base epoxy resin double-sided copper-clad laminate as a sample as a sample, and forming a four-layer plate under the same conditions as in the example,
In the range of 120 to 150 ° C, 6
Heat treatment was performed for 0 minutes.

【0012】比較例3 実施例と同じガラス基材エポキシ樹脂両面銅張積層板を
試料とし、実施例と同様な条件で4層板を作製した後、
熱風循環型乾燥機により190〜210℃の範囲で、6
0分間の加熱処理を施した。
Comparative Example 3 The same glass-base epoxy resin double-sided copper-clad laminate as in the example was used as a sample, and a four-layer plate was produced under the same conditions as in the example.
In the range of 190-210 ° C, 6
Heat treatment was performed for 0 minutes.

【0013】[0013]

【表1】 [Table 1]

【0014】実施例、比較例1、2、3によって得た各
4層板の特性比較を表1に示す。試験片寸法を500×
500mmとし、試験方法は次によった。 基板変色;多層板の熱処理後に銅箔をエッチングで取り
除き基板の変色状態を目視により評価した。○は良好、
△は変色少、×は変色多 寸法変化;多層化積層成形後の多層板の寸法を基準とし
て、多層プリント配線板加工工程におけるソルダーレベ
ラー処理後の変化率を求めた。
Table 1 shows a comparison of the characteristics of each of the four-layer plates obtained in the examples and comparative examples 1, 2, and 3. Test piece size is 500 ×
The test method was as follows. Substrate discoloration: After heat treatment of the multilayer board, the copper foil was removed by etching, and the discolored state of the substrate was visually evaluated. ○ is good,
は: little discoloration, ×: multicolor change Dimensional change: The rate of change after solder leveler processing in the multilayer printed wiring board processing step was determined based on the dimensions of the multilayer board after multilayer lamination molding.

【0015】本発明の実施例の寸法変化を表1で見る
と、比較例の数値と比べて明らかに発明の効果が顕著で
ある。基板変色は樹脂の熱劣化に伴っておきる。比較例
3の条件では硬化が進み過ぎることで、多層板が収縮方
向の歪みを内在してしまうため寸法変化のばらつきは少
ないが、平均的に大きくなってしまい、樹脂の熱劣化も
多い。したがって、実施例の条件が最良である。さら
に、表1の結果を図1に示す。本発明の方法は、内層回
路板やプリプレグに使用した樹脂の特性を考慮した上
で、その樹脂に適した処理温度範囲の中で、最も寸法特
性を向上させることができる熱処理温度を新規に見出し
たものである。表1及び図1で明らかなように、実施例
の寸法変化率は小さく、且つ基板の変色も問題がない。
When the dimensional change of the embodiment of the present invention is shown in Table 1, the effect of the present invention is clearly remarkable as compared with the numerical value of the comparative example. The discoloration of the substrate is accompanied by the thermal deterioration of the resin. Under the conditions of Comparative Example 3, since the curing proceeds too much, the multilayer board inherently has a strain in the shrinkage direction, so that the variation in dimensional change is small, but the average is large and the resin is thermally degraded frequently. Therefore, the conditions of the embodiment are the best. Further, the results in Table 1 are shown in FIG. The method of the present invention takes into account the characteristics of the resin used for the inner layer circuit board and the prepreg, and newly finds a heat treatment temperature at which the dimensional characteristics can be improved most within a processing temperature range suitable for the resin. It is a thing. As is clear from Table 1 and FIG. 1, the dimensional change rate of the example is small, and there is no problem in discoloration of the substrate.

【0016】[0016]

【発明の効果】以上に説明したように、本発明によっ
て、多層化後の多層プリント配線板加工工程においても
寸法変化及びばらつきが小さく、さらに基板の変色がな
く良好な多層配線板の製造方法を提供することができ
る。
As described above, according to the present invention, there is provided a method of manufacturing a multi-layer printed wiring board which has a small dimensional change and variation even in a multi-layer printed wiring board processing step after the multi-layering and which has no discoloration of the substrate. Can be provided.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の効果を説明するための寸法変化率の線
図である。
FIG. 1 is a diagram of a dimensional change rate for explaining an effect of the present invention.

【図2】本発明の一実施例の構成を示す断面図である。FIG. 2 is a cross-sectional view showing a configuration of one embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1.内層回路板 2.プリプレグ 3.銅箔 1. 1. inner layer circuit board Prepreg 3. Copper foil

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】内層回路板とプリプレグを多層化積層成形
した多層配線板を、回路加工する前に、積層成形温度±
10℃の範囲で熱処理することを特徴とする多層配線板
の製造方法。
1. A multi-layer wiring board in which an inner-layer circuit board and a prepreg are formed by multi-layer lamination and molding, before laminating, a lamination molding temperature ±
A method for producing a multilayer wiring board, comprising performing heat treatment at a temperature of 10 ° C.
【請求項2】内層回路板とプリプレグにエポキシ樹脂含
浸ガラス布基材を用い、多層配線板の熱処理温度が16
0〜180℃の範囲であることを特徴とする請求項1に
記載の多層配線板の製造方法。
2. An epoxy resin impregnated glass cloth base material is used for the inner circuit board and the prepreg, and the heat treatment temperature of the multilayer wiring board is 16
The method for producing a multilayer wiring board according to claim 1, wherein the temperature is in a range of 0 to 180 ° C.
JP27537997A 1997-10-08 1997-10-08 Manufacture of multilayer wiring board Pending JPH11112141A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27537997A JPH11112141A (en) 1997-10-08 1997-10-08 Manufacture of multilayer wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27537997A JPH11112141A (en) 1997-10-08 1997-10-08 Manufacture of multilayer wiring board

Publications (1)

Publication Number Publication Date
JPH11112141A true JPH11112141A (en) 1999-04-23

Family

ID=17554675

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27537997A Pending JPH11112141A (en) 1997-10-08 1997-10-08 Manufacture of multilayer wiring board

Country Status (1)

Country Link
JP (1) JPH11112141A (en)

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