JPH11111480A - Electrodeless discharge lamp lighting device, electrodeless discharge lamp device, lighting system and photochemical processing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent fusion of a wiring pair connecting a matching circuit to a exciting coil even in the case of a high power output. SOLUTION: The output of a high frequency power source 10 is supplied to a matching circuit 13 via a coaxial cable 20 comprising one pair of transmission lines 11, 12. A matching circuit 13 conducts matching for a high frequency voltage supplied from the high frequency power source 10 via the transmission lines 11, 12, and supplies the same to an exciting coil 24 via transmission lines 14, 15, 16, 17, 18, 19 comprising three coaxial cables 21, 22, 23.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrodeless discharge lamp lighting device for lighting an electrodeless discharge lamp, an electrodeless discharge lamp device, a lighting device, and a photochemical treatment device.

[0002]

2. Description of the Related Art In recent years, electrodeless discharge lamps have been developed as discharge lamps used for applications requiring a long service life, such as tunnel lighting, bridge lighting, and photochemical treatment equipment for sterilizing sewage.

The electrodeless discharge lamp lighting device generates an alternating magnetic field at, for example, about 13.56 MHz in an excitation coil using a high-frequency power supply, and uses an electric field generated by the magnetic field to generate a dischargeable rare gas in a glass bulb. And a spherical or oval electrodeless discharge lamp in which metal vapor such as mercury is sealed.

As an apparatus using such a conventional electrodeless discharge lamp lighting apparatus, there is proposed an illumination apparatus disclosed in Japanese Patent Application Laid-Open No. 6-203809 in which a matching circuit and an excitation coil are separated by a feeder line.

When the electrodeless discharge lamp lighting device is used as a photochemical treatment device for sterilizing sewage as described above, the electrodeless discharge lamp and the excitation coil are inserted into the processing medium. In this case, it is considered that the matching circuit and the excitation coil are separately provided and the matching circuit is disposed on water.

However, in the conventional photochemical processing apparatus, the matching circuit and the excitation coil are connected to a single power supply line (for example, 8D).
2V cable), and it was difficult to obtain a high output to prevent melting of the cable.

In a conventional photochemical processing apparatus, a processing medium is injected into a metal housing and an electrodeless discharge lamp and an excitation coil are arranged in the processing medium. This processing medium is made of a dielectric material (for example, water or water). Alcohol). For this reason, the processing medium has a great influence on the operation of transmitting high-frequency power to the excitation coil. To cope with this, it is conceivable to arrange an electrodeless discharge lamp and an excitation coil in the medium to be treated and adjust and confirm the high-frequency operation. Changes, the adjustment point of the high-frequency operation is shifted, causing high-frequency electric shock and noise.

[0008]

In the conventional electrodeless discharge lamp lighting device described above, the matching circuit and the excitation coil are connected by one feeder line, and a high output is obtained in order to prevent melting of the cable. It was difficult. Also, in a photochemical processing apparatus, a processing medium is injected into a metal housing, and an electrodeless discharge lamp and an excitation coil are arranged in the processing medium. This processing medium is a dielectric, and a high-frequency power transmission operation to the excitation coil is performed. Regarding the above, when the processing medium has a great influence and the concentration or the processing amount of the solute or solvent in the processing medium changes, the adjustment point of the high-frequency operation is shifted, causing high-frequency electric shock or noise.

Accordingly, an object of the present invention is to provide an electrodeless discharge lamp lighting device, an illuminating device, and a photochemical treatment device that can prevent the wiring pair connecting the matching circuit and the excitation coil from melting even when a high output is obtained. It is another object of the present invention to provide an electrodeless discharge lamp device capable of preventing a processing medium from having a large effect on an operation of transmitting high-frequency power to an excitation coil.

[0010]

An electrodeless discharge lamp lighting device according to the present invention comprises a plurality of wiring pairs provided in parallel with each other, an excitation coil wound around the electrodeless discharge lamp, and a high frequency power supplied from a high frequency power supply. And a matching circuit for performing voltage matching and supplying the voltage to the excitation coil via the plurality of wiring pairs.

[0011]

FIG. 1 is a circuit diagram showing an electrodeless discharge lamp lighting apparatus according to a first embodiment of the present invention.

In FIG. 1, an electrodeless discharge lamp lighting device comprises:
Coaxial cable 2 which is a plurality of wiring pairs provided in parallel with each other
1, 2, 23, the excitation coil 24 wound around the electrodeless discharge lamp 25, and the high-frequency voltage supplied from the high-frequency power supply 10, and the supply to the excitation coil 24 via the plurality of wire pairs. And a circuit 13.

Reference numeral 10 denotes a high-frequency power supply. The output of the high-frequency power supply 10 is supplied to a matching circuit 13 via a coaxial cable 20 formed by a pair of transmission lines 11 and 12.

The matching circuit 13 matches a high-frequency voltage supplied from the high-frequency power supply 10 via the transmission lines 11 and 12, and performs transmission lines 14, 15, 16, 17, and 17 by three coaxial cables 21, 22, 23. The electric power is supplied to the excitation coil 24 via 18 and 19.

According to such an embodiment of the present invention, a plurality of coaxial cables 21, 22, 23, which are a plurality of wiring pairs provided in parallel with each other, are provided as a wiring pair for connecting the matching circuit 13 and the excitation coil 24. Therefore, even when a high output is obtained, the melting of the wire pair connecting the matching circuit and the excitation coil can be prevented.

The effects of the embodiment of the present invention will be described with specific experimental results.

First, for comparison, a case where the matching circuit 13 and the excitation coil 24 are connected by one coaxial cable (8D2V) will be described. Coaxial cable (8D2V)
Is 1 m in length. In this case, the coaxial cable (8D2V) is filled with polyethylene and has a characteristic impedance of 50Ω and an output terminal impedance (impedance when the discharge lamp is viewed from the cable output terminal during lighting).
0Ω. 500W input power from cable input end
And When the electrodeless discharge lamp lighting device is energized in such a state, the power loss becomes 100 W, reaches 75 ° C. in 5 minutes, and the polyethylene of the coaxial cable dissolves, causing a short circuit failure.

Next, as shown in FIG. 1, the matching circuit 13 and the excitation coil 24 are connected to three coaxial cables (RG 142G /
The case of connection in U) will be described. Three coaxial cables (RG142G / U) having a length of 1 m are used. In this case, in (RG142G / U), the filler is Teflon, the characteristic impedance of one of them is 50Ω, the characteristic impedance when three are combined is 50 / 3Ω, and the output terminal impedance is 500Ω. The input power from the cable input end is assumed to be 500W. When the electrodeless discharge lamp lighting device was energized in such a state, the power loss was 25 W, the stress on one side of the coaxial cable was about 8 W, and the temperature rise of the cable was 20 deg in one hour. Here, if the time is one hour, sufficient photochemical treatment can be performed, so that sufficient reliability can be ensured.

The RG142G / U has a thickness of 8D2V.
Because it is about 1/3 of one, even if three bundled, one 8D2
Since it is thinner than V, the space for arranging wiring can be reduced, workability can be improved, and the structure can be made advantageous.

FIG. 2 is a circuit diagram showing a modification of the embodiment of the invention shown in FIG.

In FIG. 2, an electrodeless discharge lamp lighting device 31 is shown.
Is a configuration in which the high-frequency power supply 10 and the matching circuit 13 of FIG. 1 are configured as one circuit.

The high frequency power supply 10 is constituted by MOSFETs 27 and 28 serving as first and second switching means. The matching circuit 13 includes capacitors C1, C2,
C3 and C4, a resistor R1, and a switch SW1 of a relay.
SW2.

The output terminal on the positive electrode side of the DC power supply 26 is connected to the output terminal on the negative electrode side of the DC power supply 26 via a series connection of the drain and source paths of the MOSFETs 27 and 28 of the high-frequency power supply 10. MOSFETs 27 and 28 are connected to terminal 2
With the switching voltages a1, b1 from 9, 30
On alternately at higher frequencies (eg 13.56 MHz)
Turned off. As a result, a voltage obtained by superimposing a DC voltage on a high-frequency voltage is obtained between the connection point of the MOSFETs 27 and 28 and the reference potential point.

The connection point between the MOSFETs 27 and 28 is connected to the source of the MOSFET 27 via a series connection of the capacitors C1, C2, C3 and C4 of the matching circuit 13. The connection points of the capacitors C2 and C3 are the coaxial cables 21 and
2 and 23 are connected to one end of one of the transmission lines 14, 16 and 18. The capacitor C2 has a relay switch SW1.
Are connected in parallel. To the capacitor C4, a switch SW2 of the relay is connected in parallel, and a resistor R2 is connected in parallel. Relay switches SW1 and SW2
Is turned on during start-up and turned off after start-up, thereby switching the resonance circuit constant during and after the start of the electrodeless discharge lamp 25 to protect the high-frequency power supply 10. The connection point between the capacitor C4 and the source of the MOSFET 27 is connected to one end of the other transmission line 15, 17, 19 of the coaxial cable 21, 22, 23.

The other end of one of the transmission lines 14, 16, 17 of the coaxial cables 21, 22, 23 is connected to the other transmission line 15, of the coaxial cables 21, 22, 23 via an excitation coil 24.
17 and 19 are connected to the other ends.

In such a modified example, the same effect as in FIG. 1 can be obtained.

FIG. 3 is a circuit diagram showing a second embodiment of the electrodeless discharge lamp lighting device according to the present invention.

Reference numerals 41, 42 and 43 denote three-phase AC 200
V AC power supply, and AC voltages from the AC power supplies 41, 42, 43 are supplied to high frequency power supplies 44, 45, 46, respectively.
Supplied to The high-frequency power supplies 44, 45, and 46 generate high-frequency voltages from the supplied AC voltage, and connect the connector boxes 50 through coaxial cables 47, 48, and 49, respectively.
Lead to. The connector box 50 includes a coaxial cable 47,
The high frequency voltages from 48 and 49 are applied to the coaxial cable 5 respectively.
It is guided to matching circuits 54, 55, 56 via 1, 52, 53. The matching circuit 54 matches the high frequency voltage from the coaxial cable 51 and supplies the high frequency voltage to the excitation coil of the lamp unit 63 via the two parallel coaxial cables 57 and 58. The matching circuit 55 matches the high frequency voltage from the coaxial cable 52 and supplies the high frequency voltage to the excitation coil of the lamp unit 64 via the two parallel coaxial cables 59 and 60. The matching circuit 56
The high frequency voltage from the coaxial cable 53 is matched, and the lamp unit 65 is connected via two parallel coaxial cables 61 and 62.
To the excitation coil.

FIGS. 4 and 5 show the processing of the photochemical treatment apparatus using the electrodeless discharge lamp lighting device of FIG. 3, wherein FIG. 4 is a cross-sectional view as viewed from the side and FIG. 5 is a cross-sectional view as viewed from the front.

In FIG. 4, a photochemical processing apparatus 71 includes a processing tank 73 into which a liquid 72 for photochemical processing is injected,
, An electrodeless discharge lamp 75 that is lit by using an electric field generated by a magnetic field of an excitation coil 74 of the electrodeless discharge lamp lighting device, and has a waterproof property, at least a part of which is ultraviolet light. The electrodeless discharge lamp 75, the other end of the transmission line of the electrodeless discharge lamp lighting device, and a circuit connected to the other end are inserted into the processing tank. And a discharge lamp container 76.

In FIG. 5, the lamp units 63, 64, 65 shown in FIG. 3 are constituted by an excitation coil 74, an electrodeless discharge lamp 75, and a discharge lamp vessel 76.

The lamp units 63, 64, 65 are mounted by holders 77. The holder 77 is suspended from above by a reel 78, and can be pulled up from the liquid 72.

The high-frequency power supplies 44, 45, 46, the coaxial cables 47, 48, 49, the connector box 50, the coaxial cables 51, 52, 53, and the matching circuits 54, 55, 56
The lamp units 63 and 6 are disposed outside the processing tank 73.
The coaxial cables 57, 58, 59, 60, 61, 62 are disposed inside the processing tank 73.
The matching circuits 54, 55, and 56 and the lamp units 63, 64, and 65 are connected via the wall surfaces.

According to the embodiment of the present invention, the same effects as those of the embodiment of the present invention shown in FIG. 1 can be obtained.

FIG. 6 is a block diagram showing a third embodiment of the electrodeless discharge lamp device according to the present invention, which is applied to a photochemical treatment device.

In FIG. 6, a photochemical treatment device 80 includes a lamp unit 83 containing an electrodeless discharge lamp 85 and an excitation coil 84 wound around the electrodeless discharge lamp 85 by an outer tube 86, and transmission lines 91 and 92. A wiring pair 90;
A matching circuit 82 that matches a high-frequency voltage supplied from a high-frequency power supply 81 and supplies the high-frequency voltage to the excitation coil 84 via the wiring pair 90; the lamp unit 83 and the wiring pair 9;
0, and an electrical connection means for electrically connecting one side line (transmission line 92) of the wiring pair 90 and the metal housing 87 from inside the metal housing 87 (see FIG. 1). Wiring 93), and the wiring length D of the wiring pair 90 is provided.
The length 1 is such that the influence of the wavelength of the high-frequency voltage can be ignored.

The metal housing 87 is provided with a liquid 88 for photochemical treatment.
Is a processing tank into which is injected.

Next, the wiring length D1 of the wiring pair 90 will be described in detail.

First, the frequency of the high-frequency voltage is set to 13.56 M
If the frequency is Hz, the wavelength of the high-frequency voltage when assumed to be in a vacuum is 22.1 m. Here, if the wiring pair 90 is a coaxial cable of polyethylene filling, the wavelength is 14.8 m. In this case, the wiring length D1 of the wiring pair 90 is 1/1 of the wavelength.
If it is less than 10, the effect of the wavelength of the high-frequency voltage can be sufficiently ignored. The wiring length D1 of the wiring pair 90 is １ ／ of the wavelength.
No resonance occurs except at positions other than the integral multiple of the wavelength and around the integral multiple of 1/4 of the wavelength.

According to such an embodiment of the present invention, the electric connection means (wiring 93) for electrically connecting one side line (transmission line 92) of the wiring pair 90 and the metal casing 87 is provided. This makes it possible to determine the potential difference between the metal casing 87 and one side of the wiring pair 90, prevent the processing medium from having a large effect on the operation of transmitting high-frequency power to the excitation coil, and generate high-frequency electric shock and noise. Can be prevented.

Further, by setting the wiring length D1 of the wiring pair 90 to such a length that the influence of the wavelength of the high-frequency voltage can be ignored, it is possible to prevent a reduction in efficiency due to resonance of the wiring pair 90.

FIG. 7 is a circuit diagram showing a first modification of the embodiment of the invention shown in FIG.

Reference numeral 101 denotes a high-frequency power supply. The high-frequency power supply 101 supplies a high-frequency current to the primary winding L1 of the transformer 102. As a result, a high-frequency voltage is generated in the secondary winding L2 of the transformer 102. The intermediate point of the secondary winding L2 is connected to the metal case 120 of the processing tank, which serves as a reference potential point. One end of the secondary winding L2 is connected to the other end of the secondary winding L2 via the capacitor C11 and connected to the other end of the secondary winding L2 via the coil L3, the capacitor C12, and the coil L4. Is done. The transformer 102, the coils L3 and L4, and the capacitors C11 and C12 constitute a matching circuit.

The connection point between the coil L3 and the capacitor C12 is connected to the connection point between the coil L4 and the capacitor C12 through the series connection of one transmission line 103 of the coaxial cable 110, the excitation coil 107, and one transmission line 105 of the coaxial cable 111. Connected. The excitation coil 107 is wound around the electrodeless discharge lamp 108. Both ends of the other wires 104 and 106 of the coaxial cables 110 and 111 are connected to the metal housing 120.

By such connection to the metal housing 120, the distributed capacitances C01, C02, C03, C0 indicated by broken lines are obtained.
4, the metal housing 120 and the coaxial cable 1
It is possible to prevent the occurrence of a high-frequency potential difference generated between the two ends of the first and second transistors 10 and 111.

FIG. 8 is a circuit diagram showing a second modification of the embodiment of the invention shown in FIG.

Reference numeral 121 denotes a high-frequency power supply. One output terminal of the high-frequency power supply 121 is connected to a capacitor C13,
C14 is connected to the other output terminal of the high frequency power supply 121 via a series connection. Capacitor C14 and high frequency power supply 1
The connection point of the other output terminal of 21 is connected to the metal case 123 of the processing tank serving as a reference potential point.

The connection points of the capacitors C13 and C14 are connected to one transmission line 123 of the coaxial cable 130, the excitation coil 1
27, is connected to the connection point between the capacitor C14 and the other output terminal of the high frequency power supply 121 via a series connection of the other transmission line 125 of the coaxial cable 130. Capacitor C1
3 and C14 constitute a matching circuit. Excitation coil 12
7 is wound around the electrodeless discharge lamp 128. The output end of the wiring 126 of the coaxial cable 130 is connected to the metal housing 140.

By connecting to such a metal housing 140, distributed capacitances C05, C06, C07, C0 indicated by broken lines are provided.
8 can be prevented, and the same effect as the modification of FIG. 7 can be obtained. FIG. 9 is a block diagram showing a fourth embodiment of the electrodeless discharge lamp device according to the present invention, which is applied to a lighting device.

In FIG. 9, reference numeral 150 denotes a photochemical treatment apparatus.
Are an electrodeless discharge lamp 155, an excitation coil 154 wound around the electrodeless discharge lamp 155, transmission lines 161, 16
2 and a matching circuit 152 that matches the high-frequency voltage supplied from the high-frequency power supply 151 to supply the excitation coil 154 via the wiring pair 160, the electrodeless discharge lamp 155, the excitation coil 154, and the like. A metal housing 156 that accommodates at least a part of the wiring pair (the transmission lines 161 and 162); and an electrical unit that electrically connects the one side line 162 of the wiring pair and the metal housing 156 from inside the metal housing 156. Connection means (wiring 157).

According to such an embodiment of the present invention, one side line (transmission line 162) of the wiring pair 160 and the metal casing 1
Electrical connection means (wiring 15
7), the metal housing 156 and the wiring pair 16 are provided.
The potential difference can be determined between the zero-side wires, and the processing medium can be prevented from having a large effect on the operation of transmitting high-frequency power to the excitation coil, and high-frequency electric shock and noise can be prevented.

FIG. 10 is a block diagram showing a fifth embodiment of the electrodeless discharge lamp device according to the present invention. Components similar to those in the embodiment of the invention shown in FIG. Description is omitted.

Referring to FIG. 10, the photochemical treatment device 170
Is a member 177 made of an insulating material such as glass.
And a member 178 formed of a conductor such as a metal, and one side line (transmission line 92) of the wiring pair 90 is connected by a member 178 with a wiring 179, and the member 178 is connected to the metal casing 87 and the wiring 1
At 80, it is electrically connected.

According to the embodiment of the invention, the same effect as that of the embodiment of the invention shown in FIG. 6 can be obtained.

FIG. 11 is a block diagram showing a sixth embodiment of the electrodeless discharge lamp device according to the present invention. Components similar to those of the embodiment of FIG. 6 are denoted by the same reference numerals. Description is omitted.

Referring to FIG. 11, a photochemical treatment apparatus 190
Is a member 197 made of an insulating material such as glass.
And a member 198 formed of a conductor such as a metal. One side line (transmission line 92) of the wiring pair 90 is connected to the wiring 199 by a member 198. The member 198 is electrically connected to the metal housing 87 by the extension 200.

According to the embodiment of the invention, the same effect as that of the embodiment of the invention shown in FIG. 6 can be obtained.

The embodiment of the invention shown in FIG. 1 can be applied to an apparatus other than the photochemical processing apparatus, for example, an illumination apparatus. In this case, the lighting device includes at least a part of the electrodeless discharge lamp lighting device illustrated in FIG. 1 and an electrodeless discharge lamp that is lit using an electric field generated by a magnetic field of an excitation coil of the electrodeless discharge lamp lighting device. What is necessary is just to comprise the outer tube which is formed with the member which permeate | transmits light, and accommodates the said electrodeless discharge lamp and the said excitation coil wound around said electrodeless discharge lamp. FIG.
In the embodiment of the invention shown in FIG. 6, two or three wire pairs connected in parallel are provided, but four or more wire pairs connected in parallel may be provided.

[0059]

According to the present invention, even when a high output is obtained, melting of the wire pair connecting the matching circuit and the excitation coil can be prevented, and sufficient reliability can be ensured. In addition, since the processing medium can be prevented from significantly affecting the operation of transmitting high-frequency power to the excitation coil, high-frequency electric shock and noise can be prevented.

[Brief description of the drawings]

FIG. 1 is a circuit diagram showing a first embodiment of an electrodeless discharge lamp lighting device according to the present invention.

FIG. 2 is a circuit diagram showing a modification of the embodiment of the invention shown in FIG. 1;

FIG. 3 is a circuit diagram showing a second embodiment of the electrodeless discharge lamp lighting device according to the present invention.

FIG. 4 is a cross-sectional view from the side showing a photochemical treatment apparatus process using the electrodeless discharge lamp lighting device of FIG. 3;

FIG. 5 is a front cross-sectional view showing a photochemical treatment device process using the electrodeless discharge lamp lighting device of FIG. 3;

FIG. 6 is a block diagram showing a third embodiment of the electrodeless discharge lamp device according to the present invention.

FIG. 7 is a circuit diagram showing a first modification of the embodiment of the invention shown in FIG. 6;

FIG. 8 is a circuit diagram showing a second modification of the embodiment of the invention shown in FIG. 6;

FIG. 9 is a block diagram showing a fourth embodiment of the electrodeless discharge lamp device according to the present invention.

FIG. 10 is a block diagram showing a fifth embodiment of the electrodeless discharge lamp device according to the present invention.

FIG. 11 is a block diagram showing a sixth embodiment of the electrodeless discharge lamp device according to the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 High frequency power supply 13 Matching circuit 21, 22, 23 Coaxial cable 24 Excitation coil 25 Electrodeless lamp

[Procedure amendment]

[Submission date] October 17, 1997

[Procedure amendment 1]

[Document name to be amended] Drawing

[Correction target item name] All figures

[Correction method] Change

[Correction contents]

FIG.

FIG. 2

FIG. 3

FIG. 4

FIG. 7

FIG. 8

FIG. 9

FIG. 5

FIG. 6

FIG. 10

FIG. 11

Claims (7)

[Claims] 1. A plurality of wiring pairs provided in parallel with each other, an excitation coil wound around an electrodeless discharge lamp, and a high-frequency voltage supplied from a high-frequency power supply are matched to perform the excitation via the plurality of wiring pairs. An electrodeless discharge lamp lighting device, comprising: a matching circuit for supplying a coil. 2. An electrodeless discharge lamp, an excitation coil wound around the electrodeless discharge lamp, a wiring pair, and matching of a high-frequency voltage supplied from a high-frequency power supply to the excitation coil via the wiring pair. A matching circuit to be supplied; a metal housing accommodating at least a part of the electrodeless discharge lamp, the excitation coil and the wiring pair; and an electrical connection means for electrically connecting one side line of the wiring pair to the metal housing. An electrodeless discharge lamp device, comprising: 3. A lamp unit accommodating an electrodeless discharge lamp and an excitation coil wound around the electrodeless discharge lamp by an outer tube, a wiring pair, and matching of a high-frequency voltage supplied from a high-frequency power supply to the wiring pair. A matching circuit that supplies the excitation coil via the first and second electrodes, a metal housing that houses at least a part of the lamp unit and the wiring pair, and an electrical connection that electrically connects one side line of the wiring pair to the metal housing. An electrodeless discharge lamp device comprising: connecting means. 4. An electrodeless discharge lamp and a lamp unit accommodating an excitation coil wound around the electrodeless discharge lamp by an outer tube, a wiring pair, and matching of a high-frequency voltage supplied from a high-frequency power supply to the wiring pair. A matching circuit that supplies the excitation coil via the first and second electrodes, a metal housing that houses at least a part of the lamp unit and the wiring pair, and an electrical connection that electrically connects one side line of the wiring pair to the metal housing. And a connecting means, wherein the wiring length of the wiring pair is such that the influence of the wavelength of the high-frequency voltage can be ignored. 5. An electrodeless discharge lamp lighting device according to claim 1, wherein the electrodeless discharge lamp is lit using an electric field generated by a magnetic field of an excitation coil of the electrodeless discharge lamp lighting device. A lighting device comprising: the electrodeless discharge lamp; and an outer tube that houses the excitation coil wound around the electrodeless discharge lamp and the electrodeless discharge lamp. 6. A treatment tank into which a liquid for photochemical treatment is injected, an electrodeless discharge lamp lighting device according to claim 1, and an electric field generated by a magnetic field of an excitation coil of the electrodeless discharge lamp lighting device. A state in which the electrodeless discharge lamp to be lit, a waterproof member, at least a part of which is formed of a member that transmits ultraviolet light, houses the electrodeless discharge lamp, and an excitation coil wound around the electrodeless discharge lamp. And an outer tube inserted into the processing tank. 7. The processing apparatus according to claim 2, wherein the metal housing is a processing tank into which a liquid for photochemical processing is injected.
The electrodeless discharge lamp device according to any one of the above.