JPH1110496A - Sample rotating machine - Google Patents

Abstract

PROBLEM TO BE SOLVED: To polish without sagging of an edge and without directional polishing by fitting a magnet chuck to the lower end of a driving shaft passed through a sleeve in such a manner as to be moved up and down so that a sample holder is prevented from being tilted by rotation of a polishing board. SOLUTION: A sleeve 5 is installed in such a manner as to be freely rotated through a bearing 13 in a casing. A magnet chuck 7 for adsorbing a sample holder 10 and holding the same is fitted to the lower end of a driving shaft 6 passed through the sleeve in such a manner as to be moved up and down, and the upper end is fitted to a pressurizing plate 15 through a thrust bearing 14. Both ens of the pressurizing plate are connected to two driving shaft elevating and pressurizing cylinders 8 erected on a base. The sample holder 10 where a polishing sample 9 is set is adsorbed to the lower surface of the magnet chuck 7 and put down on a polishing board 11, and the polishing board is rotated by a motor. After that, the sample holder is rotated by a motor 12 and polishing pressure is applied by the cylinders 8 to perform polishing.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sample rotating machine for a polishing machine capable of performing fixed-size polishing without edge polishing on a polishing surface.

[0002]

2. Description of the Related Art Conventionally, a sample rotating machine places a sample holder on which a plurality of polishing samples are set on a polishing plate of the polishing machine.
The polishing was performed by rotating the sample holder while pressing the center with the drive shaft. Since the sample holder is merely placed on the polishing plate, the sample holder is liable to be inclined by the rotation of the polishing plate, and it is not possible to prevent the edge of the polished surface from being drooped. Further, when polishing is performed by attaching only one polishing sample to the sample holder, the polishing sample is set at a position eccentric from the center of the sample holder, so that the sample holder is completely tilted and cannot be polished.

[0003]

SUMMARY OF THE INVENTION According to the present invention, even if a plurality of polishing samples or a single polishing sample is formed, edge polishing does not occur, polishing can be performed without directionality, and fixed-size polishing can be performed in a required amount. It is an object of the present invention to provide a sample rotating machine for a polishing machine.

[0004]

According to the present invention, a plurality of columns 2 are erected on a water receiver 1 of a polishing machine, a base 3 is fixed on the columns, and a casing 4 is erected on the base. A sleeve 5 is rotatably provided in a casing, and a magnet chuck 7 is provided at a lower end of a drive shaft 6 which is vertically movable through the sleeve.
And a cylinder 8 for raising and lowering the drive shaft and applying pressure is provided on the left and right sides of the casing.

[0005]

According to the present invention, since the above-mentioned means is taken, when using the same, the sample holder 10 on which the polishing sample 9 is set is attracted to the lower surface of the magnet chuck 7 so that the polishing plate 11
After the polishing machine is rotated by a motor (not shown), the sample holder is rotated by the motor 12 and the cylinder 8 is rotated.
Polishing is performed while applying a polishing pressure.

[0006]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The embodiments shown in the drawings will be described below in more detail.

A plurality of columns 2 are erected on a water receiver 1 of a polishing machine, and a base 3 is fixed on the columns. The casing 4 is erected on the base, and the sleeve 5 is rotatably mounted in the casing via a bearing 13. A magnet chuck 7 for adsorbing and holding the sample holder 10 is attached to a lower end of a drive shaft 6 which is vertically movable through the sleeve, and an upper end is attached to a pressing plate 15 via a thrust bearing 14. Both ends of the pressure plate are connected to two drive shaft elevating / lowering cylinders 8 erected on the base. A gear 16 for transmitting the rotation of the motor 12 to sleep is attached to the upper end of the sleeve. A slide key 17 for transmitting rotation is attached to the drive shaft.
When one of the cylinders 8 erected on the base is a cylinder with a movement amount measuring device, fixed-size polishing of a polishing sample can be performed.

[0008]

According to the present invention, the magnet holder is used to hold the sample holder. Therefore, even when a plurality of polishing samples are set in the sample holder, only one polishing sample is set at an eccentric position. In addition, since the sample holder does not tilt due to the rotation of the polishing board, there is no edge drooping and polishing without directionality can be performed. In addition, one of the cylinders was provided with a movement amount measuring device, and by measuring the movement amount of the cylinder after the start of polishing, it became possible to perform fixed size polishing in which a required amount of the polishing sample could be cut.

[Brief description of the drawings]

FIG. 1 is a partially cut front view of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Water receiver 2 Prop 3 Base 4 Casing 5
Sleeve 6 Drive shaft 7 Magnet chuck 8 Cylinder
9 polishing sample 10 sample holder 11 polishing machine 12 motor 13
Bearing 14 Thrust bearing 15 Pressure plate 16 Gear 17 Sliding key

Claims (1)

[Claims] 1. A sample rotating machine for a polishing machine comprising: a sleeve provided in a casing erected on a base; a magnet chuck attached to a lower end of a drive shaft passing through the sleeve; and cylinders provided on left and right sides of the casing.