JPH1099634A - Filter apparatus and air cleaning method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To ensure a wide filter area within definite vol. and to lower pressure loss while collecting a contaminant in air with high efficiency by providing a filter in a zigzag bent state. SOLUTION: A filter vessel having a plurality of rotary rolls 3 arranged therein is provided to an air passage 1 (1a, 1b) and a filter 4 held between nets 5 are provided zigzag by utilizing the rotary rolls to cut off the upstream and downstream sides 1a, 1b of the air passage 1. Air on the upstream side is passed through the filter 4 to be moved to the downstream side to separate a contaminant in air. When the separation capacity of the filter 4 lowers, the used filter is drawn out from a drawing-out port and a new filter is introduced from an introducing port to replace the used filter. The nets 5 prevent the sagging of the filter 4 and the twist of the filter 4 caused by the difference of a radius of curvature between both inner and outer surfaces and can be effectively used in order to provide the thick filter 4 between the rotary rolls 3 under tension. This apparatus is suitable for a cleaning apparatus of a high degree clean room put to practical use in the electronic industry.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention can secure a large filtration area, continuously separates pollutants in gas, and replaces a used filter with a new filter without opening the apparatus. The present invention relates to a filter device capable of performing the following. If the present invention is used, the filter can be replaced without causing outside air to leak to the secondary side of the filter, and continuous operation can be performed. Therefore, the filter can be used in the electronic industry such as semiconductor manufacturing, which extremely dislikes the intrusion of outside air containing pollutants. It is suitable for an air introduction system, a circulating system air cleaning device, and the like. In the description of the present invention, the term “clean room” is used as a term that means a space for an extremely high-level clean gas including the clean room.

[0002]

2. Description of the Related Art Conventionally, for the purpose of physically filtering and separating fine particles in a gas introduced into a clean room to form a highly clean space in a clean room, for example, HEPA.
Ultra-high performance filters called filters have been used. These filters were typically configured as cartridges and were disposable filters that were replaced with new filters over their life. However, conventional HEPA filters and the like cannot separate gaseous or mist-like contaminants. If these contaminants are contained, cartridges such as acid, alkali, potassium permanganate, etc. Activated carbon with carbon dioxide was filled and used as a filter. More recently, Japanese Patent Application Laid-Open No. 6-198123 describes a filter (chemical filter) made of ion-exchange fibers for the purpose of capturing and separating gas and mist-like ionic contaminants contained in gas.

[0003]

The above-mentioned conventional filter is constituted by a cartridge system, it is necessary to periodically stop and replace the filter, and the performance of separating contaminants during use is gradually reduced and is not constant. And that it is difficult to secure a sufficient filtration area. The present inventor is suitable for introducing and circulating purification of highly clean gas used in a clean room or the like, easily obtaining a large filtration area, arbitrarily using filters having different functions repeatedly, and easily opening the apparatus without opening the apparatus. In addition, a filter device and a gas cleaning method capable of replacing a filter without stopping as needed have been completed.

[0004]

Means for solving the above problems according to the present invention will be described with reference to the drawings. The problem is that a filter vessel (2) is provided in a gas flow path (1), a plurality of rotating rolls (3) are mounted inside the filter vessel in parallel, and a band-shaped filter (4) having both sides sandwiched by a net (5). ) Is introduced from the filter introduction port (6) of the filter vessel, stretched in a pleated shape (zigzag) through the rotating roll (3), and is extracted from the filter outlet (7). The gas in the gas flow path (1) is led to the filter vessel (2), and the upstream side of the filter (1a)
By providing a shielding plate (15a, 15b) on the downstream side (1b), a filter device characterized by passing through the filter (4) and capturing and separating contaminants in the gas is solved. be able to. In the filter device of the present invention, the gas flow path in the filter vessel (2) is preferably provided in the axial direction of the roll (3), that is, in the direction perpendicular to the plane of FIG. Further, the filter storage box (8) can be moved with respect to the plurality of filter vessels, and the filter supply means and the filter take-off means are provided at a ratio of one each in the filter storage box. It is also possible to connect and use each filter vessel.

Further, the present invention provides a gas cleaning method characterized by capturing and removing pollutants in a gas by using a filter containing ion exchange fibers as a filter of the filter device. I do.

[0006]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described more specifically with reference to the drawings. FIG. 1 is a longitudinal sectional view of a filter device according to the present invention in a direction perpendicular to a rotating roll, and FIG. 2 is a filter vessel longitudinal sectional view in a direction parallel to the rotating roll. FIG. 3 is a plan view of the filter device. Each of these drawings schematically shows an embodiment of the present invention.

In the present invention, a filter vessel 2 is provided in a gas flow path 1, a plurality of rotating rolls 3 are mounted side by side in the filter vessel 2, and a flexible filter 4 is sandwiched between nets 5 and introduced through a filter inlet 6. Then, it is bent and stretched in a pleated shape (zigzag shape) using the rotating roll 3, pulled out from the filter outlet 7, and the upstream side 1 a and the downstream side 1 b of the gas flow path 1 are cut off by the filter 4. Then, the gas on the upstream side is passed through the inter-filter channel 1 in the vessel.
6a, the contaminants in the gas are removed from the gas by passing through the filter 4 and moving to the downstream flow path 16b.
Capture and separate with. When the separating function of the filter 4 is reduced, the feed roll 11 is raised to pressurize the net and the filter, and then the used filter 4 is pulled out from the filter outlet 7 by rotating, and a new filter is introduced from the filter inlet 6. And replace the filter. Usually, the filter 4 is replaced intermittently when the capturing and separating function of the filter is deteriorated. However, a part of the filter 4 may be replaced intermittently. In addition, the filter can be gradually moved and replaced while the filtration operation is continued. Usually, the filter 4 is mounted such that the surfaces of the folded filter 4 are parallel to each other. The use of the rotating roll 3 is for the purpose of facilitating the running of the net 5 and is only the free rotating roll or the feed roll 1.
In order to reduce the load of (1), it can be configured by appropriately combining with a driving roll. By bending and stretching the filter in a zigzag manner, it is possible to reduce the pressure loss and to secure a filtration area necessary for trapping contaminants with high efficiency.

In a case where a filter is incorporated in the middle of a duct and in an external air conditioner, the filter device is provided with a gas flow path 1.
And the directions of introduction and withdrawal of the filter 4 are orthogonal to each other on the horizontal plane, that is, the gas flow path in the filter vessel 2 is in the axial direction of the roll 3, that is, the direction perpendicular to the plane of FIG. Is preferably provided.

In the present invention, a flexible band-like net 5 is superimposed on both sides of the filter
To use. By sandwiching the filter 4 between the nets 5, the filter 4 stretched between the rotating rolls 3 is prevented from hanging down.
a, 15b prevents the gas on the upstream side from leaking to the downstream side. In addition, the net 5 prevents the filter 4 from being twisted due to a difference in radius of curvature between the inner and outer surfaces of the filter 4 in the rotating roll 3, and further stretches the filter 4 having a large thickness in a zigzag manner between the rotating rolls 3. There is an action that can be used effectively.

As the net 5, it is convenient to use two endless long nets, each of which is superimposed on each surface of the filter and circulated. For example, in the present embodiment shown in FIG. 1, the endless long belt net 5a circulating clockwise and the endless long belt net 5b circulating counterclockwise are overlapped in advance. It is introduced from the filter introduction port 6 and stretches between the rotating rolls 3 in a zigzag manner. By sandwiching the end of the filter 4 between the nets 5a and 5b and circulating both nets at a constant speed, the filter 4 can be easily zigzag or moved between the rotating rolls 3. it can. Instead of the endless long band net, a roll having a long end band can be used similarly to the filter. The dancer roll 9a is a tension control means for the net 5a, and the dancer roll 9b is a tension control means for the net 5b. A change in the net length in the vessel 2 due to the filter thickness when the net alone runs and when the filter runs is adjusted above and below the dancer roll. Something to do. By changing the angle at which the centering rolls 18a and 18b are pressed against the net, the meandering of the net can be corrected. Feed roll 11, dancer rolls 9a, 9b
Is usually placed in a clean space to prevent contaminants from being entrained by the net 5 or entering through the inlet 6 or the like. The net can be made of metal, plastic, or the like that has the required strength and does not generate pollutants.

The shape of the filter vessel 2 is not particularly limited, and the linear length and width of the stretched filter 4 and the rotating roll 3
The number and diameter of the rolls, the pitch at which the rotating rolls are arranged, and the like are determined so that the gas flowing through the filter
May be appropriately determined on the design, assuming that the light can be transmitted.

The inside of the vessel 4 and the outside air at the inlet 6 and the outlet 7 are normally shut off by a dry seal such as a lip mechanism, but there is no particular limitation. For example, the seal can be shut off by a liquid seal wet seal. . Preferably, as in the embodiment shown in FIG. 1, the space between the filter flat portion 12 and the rotary roll portion 13 is sealed in the width direction of the filter by using a seal plate 14a and a lip seal 14b. Further, at both ends of the filter 4,
In order to prevent the gas on the upstream side from leaking to the downstream side, gas seal covers 15a and 15b which are in close contact with the filter 4 and the net 5 are provided. Gas seal cover 1
5a and 15b may be manufactured using a stainless steel thin plate or the like which has elasticity and can be in close contact with the filter 4 and the net 5. In addition, the sealing accuracy varies depending on the use conditions, but does not always require 100%.
When the amount of contaminants contained in the gas on the upstream side 1a is small, the object of the present invention can usually be achieved as long as most of the gas passes through the filter 4. FIG.
FIG. 2 is a sectional view showing an embodiment of the gas seal cover.

The filter 4 attached to the present invention can be selected according to the purpose of use of the filter device. However, the present invention can be effectively used for the purpose of forming and maintaining a high-purity space such as a clean room, particularly an ultra-high-purity space, and thus is suitable for a field requiring a high-performance filter or an ultra-high-performance filter. is there. Further, the present invention uses a filter (hereinafter, referred to as a chemical filter) containing ion exchange fibers and / or activated carbon fibers as components to chemically remove contaminant gas or mist generated in a clean room or mixed in a supply gas. It is particularly suitable for the purpose of removal.

The ion exchange fibers used in the chemical filter include strongly acidic cation exchange fibers, weakly acidic cation exchange fibers, type I or type II strongly basic anion exchange fibers, medium basic anion exchange fibers, Examples thereof include weakly basic anion exchange fibers or a mixture thereof. Usually, the cation exchange fiber, -SO ₃ H groups and /
Or an H type having an exchange group of -COOH group, and an anion exchange fiber having an OH type having an exchange group of a tertiary amine group or a quaternary ammonium group alone or according to a target substance to be removed. Use in combination. Other fibrous substances such as binder fibers for facilitating the use of ion-exchange fibers and fibrous activated carbon for capturing nonionic organic gas pollutants can also be used in combination. Preferably, the specific surface area is 1000 to 2 in order to capture evaporated organic substances and the like.
000 m ² / g of fibrous activated carbon, for example, phenolic fiber activated carbon can be used. These chemical filters are described in, for example, JP-A-6-198123.
This is described in detail in the official gazette.

In the present invention, the shape of the filter may be a felt, a sheet, a non-woven fabric, a woven fabric, a knitted fabric, a laminate thereof, a filler or a molded product. In addition, a plurality of filters having different functions can be overlapped and each function can be used. These filters may be stacked in advance, or each filter may be individually supplied. In the embodiment shown in FIG. 1, two types of filters 4a and 4b are individually supplied and used in an overlapping manner. If necessary, the filters 4a and 4b drawn from the filter vessel 2 can be separately taken out. Since the used filters can be pulled out separately, the reusable filters can be collected and reused. The filter supply / take-off means 8, 10 are usually arranged in a clean space in order to prevent contaminants from being entrained by the filter 4 or entering through the inlet 6 or the like. The thickness of the filter is determined by the purpose of use, the performance of the filter, and the like. By using the present invention, a filter having a thickness of about 20 mm can be easily used. The supply or take-off form of the filter 4 is usually a roll winding, but is not limited to this. For example, the filter 4 may be folded and overlapped. In addition, filter replacement is performed intermittently, and one filter supply / take-off means 8, 10 is connected to the rail 1.
7, etc., so that the filter can be replaced with a plurality of filter vessels, so that the equipment cost can be reduced.

[0016]

According to the filter device of the present invention, the filter is bent in a zigzag shape and stretched to secure a wide filtration area in a fixed volume, reduce pressure loss, and efficiently remove pollutants in gas. Can be captured. Since the net is superimposed on both sides of the filter, the filter does not drip between the rotating rolls, and the gas on the upstream side leaks from the seal covers on both sides of the filter to the downstream side. In addition, the above-mentioned net prevents the filter from being twisted due to the difference in the radius of curvature between the inner and outer surfaces of the filter in the rotating roll, and can be effectively used for zigzag a filter having a large thickness between the rotating rolls. There is action. Since a plurality of filters having different functions can be used in an overlapping manner, the functions of each filter can be used in one filtration operation. The filter supply / take-off means is moved by rails or the like, so that it is possible to reduce the equipment cost in correspondence with the exchange of the filters of a plurality of filter vessels.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view of a filter device according to the present invention in a direction perpendicular to a rotating roll.

FIG. 2 is a longitudinal sectional view of a filter vessel in a direction parallel to a rotating roll.

FIG. 3 is a plan view of the filter device.

[Explanation of symbols]

1: gas flow path (a: upstream side, b: downstream side) 2: filter vessel 3: rotating roll 4: filter (a, b) 5: net (a: filter inner circumference side, b: filter outer circumference side) 6 : Filter introduction port 7: Filter outlet 8: Filter supply means 9: Dancer roll (a, b) 10: Filter takeoff means 11: Feed roll 12: Filter flat part 1
3: rotating roll part 14a: seal plate 14b: lip seal 15: seal cover (a: upstream side, b: downstream side) 16: flow path in vessel (a: upstream side, b: downstream side)
17: Rail 18: Centering roll (a, b)

Continued on the front page (51) Int.Cl. ⁶ Identification code FIF24F 7/06 (72) Inventor Shingo Tokunaga 1-1-1, Yawata, Kumamoto-shi, Kumamoto Kyushu Nippon Electric Co., Ltd. (72) Inventor Suenaga Ritoku 1-1-1, Yawata, Kumamoto City, Kumamoto Prefecture Kyushu Nippon Electric Co., Ltd. (72) Inventor Susumu Susumu 1-1-1, Yawata, Kumamoto City, Kumamoto Prefecture Kyushu Nippon Electric Co., Ltd. (72) Inventor Fujiwara Goro 2-32 Kinrakuji, Amagasaki-shi, Hyogo Pref.Takuma Co., Ltd. 2-3-33 Kinrakuji Inside Takuma Co., Ltd.

Claims (4)

[Claims] A filter vessel (2) is provided in a gas flow path (1), and a plurality of rotating rolls (3) are mounted in parallel inside the filter vessel (2). 4)
The gas is introduced from the filter introduction port (6) of the filter vessel and is pleated (zigzag) via the rotating roll (3). The upstream side (1a) and the downstream side (1b) of the gas flow path are cut off and the filter is drawn. A filter device, wherein a gas in a gas flow path (1) is drawn out from an outlet (7), guided to a filter vessel (2), and passed through a filter (4) to separate contaminants in the gas. 2. The filter device according to claim 1, wherein the gas passes through the filter vessel in the axial direction of the roll. 3. A filter storage box (8) is movable with respect to a plurality of filter vessels, and one filter supply means and one filter take-off means are provided so as to be able to be used as one. The filter device according to claim 1, wherein 4. A gas purifier characterized by capturing and removing pollutants in a gas by using a filter containing ion exchange fibers as a filter of the filter device according to claim 1, 2 or 3. Method.