JPH1090093A - Diaphragm and pressure sensor - Google Patents
Diaphragm and pressure sensorInfo
- Publication number
- JPH1090093A JPH1090093A JP8242821A JP24282196A JPH1090093A JP H1090093 A JPH1090093 A JP H1090093A JP 8242821 A JP8242821 A JP 8242821A JP 24282196 A JP24282196 A JP 24282196A JP H1090093 A JPH1090093 A JP H1090093A
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- stainless steel
- pressure sensor
- strain
- forging
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、圧力センサに係
り、特に流体等の圧力を検出する圧力センサに関する。The present invention relates to a pressure sensor, and more particularly to a pressure sensor for detecting a pressure of a fluid or the like.
【０００２】[0002]
【従来の技術】一般に、オーステナイト系ステンレス鋼
製の成形体は、特に耐蝕性に優れているため、各種の化
学装置用部品として広く使用されている。2. Description of the Related Art In general, austenitic stainless steel molded articles are widely used as components for various chemical devices because of their particularly excellent corrosion resistance.
【０００３】このため、耐蝕性に優れるオーステナイト
系ステンレス鋼を腐食性媒体の圧力を検出する圧力セン
サ用ダイアフラムに使用する場合、オーステナイト系ス
テンレス鋼は、耐蝕性には優れるものの、０．２％耐力
が２０〜４０ｋｇｆ／ｍｍ2程度と、同じステンレス鋼
である析出硬化型ステンレス鋼の１００〜１５０ｋｇｆ
／ｍｍ2 と比較すると、極端に低く、弾性に劣るので、
耐力に安全率を考慮するとオーステナイト系ステンレス
鋼を用いたダイアフラムが流体圧力から受ける歪の大き
さを大きな値に設定することができない。このため、オ
ーステナイト系ステンレス鋼を用いたダイアフラムは、
流体圧力を直接ダイアフラムに設置した歪ゲージ等で電
気信号に変換する構造の圧力センサには、感度が低くな
るため一般的に使用されておらず、隔膜型圧力センサの
隔膜として使用されている。For this reason, when austenitic stainless steel having excellent corrosion resistance is used for a diaphragm for a pressure sensor for detecting the pressure of a corrosive medium, the austenitic stainless steel is excellent in corrosion resistance but 0.2% proof stress. Is about 20 to 40 kgf / mm 2, which is 100 to 150 kgf of precipitation hardening stainless steel, which is the same stainless steel.
/ Mm 2 , which is extremely low and inferior in elasticity.
When the safety factor is considered in the proof stress, the magnitude of the strain that the diaphragm using the austenitic stainless steel receives from the fluid pressure cannot be set to a large value. For this reason, diaphragms using austenitic stainless steel
A pressure sensor having a structure in which a fluid pressure is directly converted into an electric signal by a strain gauge or the like installed on a diaphragm is not generally used due to low sensitivity, and is used as a diaphragm of a diaphragm type pressure sensor.
【０００４】ここで、この隔膜型圧力センサとは、歪検
出機構と隔膜を個別に備え、隔膜が測定対象である流体
と直接接触して流体圧の圧力方向へ一次変位を起こし、
この隔膜の一次変位を何らかの伝達媒体によって他方の
歪検出構造体に伝達し、電気信号に変換する構造を呈す
る圧力センサである。Here, the diaphragm type pressure sensor is provided with a strain detecting mechanism and a diaphragm separately, and the diaphragm directly contacts a fluid to be measured to cause a primary displacement in a pressure direction of a fluid pressure.
The pressure sensor has a structure in which the primary displacement of the diaphragm is transmitted to the other strain detecting structure by some transmission medium and converted into an electric signal.
【０００５】[0005]
【発明が解決しようとする課題】ところが、腐蝕性媒体
の圧力を検出する目的においてオーステナイト系ステン
レス鋼を隔膜として使用する隔膜型圧力センサにあって
は、隔膜と歪検出機構間の変位の伝達を行う手段とし
て、隔膜と歪検出構造体の空洞部に液体を封入したり、
あるいは隔膜と歪検出構造体をロッド等で機械的に連結
するといった手段等が採られているが、これらは部品点
数が多く、構造が複雑であり、封入液の封止やロッドの
接着等による連結の際に歪検出機構に変位が生じ易く、
機器組立、調整が困難である、といった問題点を有す
る。また、これら伝達機構は被測定物の変位だけを純粋
に測定することが難しく、ダイアフラム部材の形成材料
と封入液やロッド等の接続部の熱膨張係数の相違により
圧力センサの零点出力の変動等の熱的な影響も生じるこ
ととなる。さらには、これらの熱影響は機器調整を困難
にするとともに、測定精度が低下するといった問題点も
ある。However, in a diaphragm type pressure sensor using austenitic stainless steel as a diaphragm for the purpose of detecting the pressure of a corrosive medium, the transmission of the displacement between the diaphragm and the strain detecting mechanism is performed. As a means to perform, liquid is sealed in the cavity of the diaphragm and the strain detection structure,
Alternatively, a means of mechanically connecting the diaphragm and the strain detection structure with a rod or the like has been adopted, but these have a large number of parts, a complicated structure, and a sealing liquid sealing or rod adhesion. Displacement easily occurs in the strain detection mechanism at the time of connection,
There is a problem that it is difficult to assemble and adjust equipment. In addition, it is difficult for these transmission mechanisms to purely measure only the displacement of the object to be measured, and the difference in the coefficient of thermal expansion between the material forming the diaphragm member and the connection part of the sealing liquid or rod causes a change in the zero point output of the pressure sensor. Will also cause thermal effects. Furthermore, these heat effects make it difficult to adjust the equipment, and there is a problem that the measurement accuracy is reduced.
【０００６】本発明は、上述のような問題点に鑑みてな
されたものであり、耐蝕性を有するにもかかわらず、変
位伝達機構を用いずに被測定物の変位だけを純粋に歪と
して検出することができ、構造が簡易で、機器組立、調
整が容易な圧力センサを提供することを目的とする。SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and detects only the displacement of an object to be measured as a pure strain without using a displacement transmission mechanism despite its corrosion resistance. It is an object of the present invention to provide a pressure sensor which has a simple structure and can be easily assembled and adjusted.
【０００７】[0007]
【課題を解決するための手段】本発明は、流体等の圧力
を検出する圧力センサにおいて、この圧力センサに使用
されるダイアフラムの材料としてはオーステナイト系ス
テンレス鋼が使用され、このダイアフラムを目的とする
形状に成形する工程において目的形状の少なくとも一部
を鍛造加工によって成形されていることを特徴とする。SUMMARY OF THE INVENTION The present invention relates to a pressure sensor for detecting the pressure of a fluid or the like, wherein an austenitic stainless steel is used as a material of a diaphragm used for the pressure sensor. In the step of forming into a shape, at least a part of the target shape is formed by forging.
【０００８】本発明においては、オーステナイト系ステ
ンレス鋼の加工硬化率が大きいことを利用し、オーステ
ナイト系ステンレス鋼を鍛造加工によって成形すること
から高強度を得て、ダイアフラムが流体圧力から受ける
歪をダイアフラムに設置した歪ゲージ等を用いて電気信
号に直接変換する構造の圧力センサの利用を可能とす
る。また、耐蝕性を有するにもかかわらず、隔膜型圧力
センサと比較して機器組立、調整が容易で、しかも、伝
達機構を用いず被測定物の圧力を純粋に歪検出できるこ
とから、測定環境の温度変化によるセンサ特性の変動が
極めて小さい。In the present invention, the austenitic stainless steel has a high work hardening rate and is formed by forging the austenitic stainless steel to obtain high strength. It is possible to use a pressure sensor having a structure of directly converting to an electric signal by using a strain gauge or the like installed in the apparatus. In addition, despite having corrosion resistance, it is easier to assemble and adjust equipment compared to a diaphragm type pressure sensor, and since it can purely detect the pressure of the measured object without using a transmission mechanism, Fluctuation in sensor characteristics due to temperature change is extremely small.
【０００９】[0009]
【発明の実施の形態】以下、添附図面を参照して本発明
の一実施例について説明する。図１は本発明における圧
力センサの要部断面図である。図中符号１はダイアフラ
ムであり、このダイアフラム１はオーステナイト系ステ
ンレス鋼（より具体的にはＳＵＳ３１６，ＳＵＳ３１６
Ｌ）で形成されている。このダイアフラム１には底部１
ａが一体的に形成されており、この底部１ａの受圧面に
相当する内面中央には受圧面が受けた圧力を歪ゲージ設
置面である外面側へ適切に伝達するために突起部１ｃが
形成されている。このため、このダイアフラム１は断面
内面形状がＥ型のものである。図２に示すように、この
底部１ａの上面には絶縁膜２が設けられ、この絶縁膜２
の上面には歪ゲージ３，３，３，…が載置されている。
この歪ゲージ３は保護膜４で封じ込まれている。An embodiment of the present invention will be described below with reference to the accompanying drawings. FIG. 1 is a sectional view of a main part of a pressure sensor according to the present invention. In the drawing, reference numeral 1 denotes a diaphragm, which is made of austenitic stainless steel (more specifically, SUS316 and SUS316).
L). This diaphragm 1 has a bottom 1
a is formed integrally, and a projection 1c is formed at the center of the inner surface corresponding to the pressure receiving surface of the bottom portion 1a in order to appropriately transmit the pressure received by the pressure receiving surface to the outer surface side as the strain gauge installation surface. Have been. For this reason, the diaphragm 1 has an E-shaped cross-section inner surface. As shown in FIG. 2, an insulating film 2 is provided on the upper surface of the bottom 1a.
Are placed on the upper surface of the.
This strain gauge 3 is sealed with a protective film 4.
【００１０】このような構成の圧力センサにおいて、被
測定物である流体はダイヤフラムの空洞部１ｂ内に充満
し、底部１ａを変形せしめる。この底部１ａの変形によ
り歪ゲージ３もまた変形し、この歪ゲージ３の変形が電
気的に検出され、電線等を介して圧力センサ外に取り出
され、流体圧力が測定される。In the pressure sensor having such a configuration, the fluid to be measured fills the cavity 1b of the diaphragm and deforms the bottom 1a. Due to the deformation of the bottom 1a, the strain gauge 3 is also deformed, and the deformation of the strain gauge 3 is electrically detected, taken out of the pressure sensor via an electric wire or the like, and the fluid pressure is measured.
【００１１】以下、本発明の圧力センサで使用されるダ
イアフラムの製造方法について説明する。本実施例にお
いては、予め円柱形状に予備成形された成形用材料の空
洞の受圧面を含む少なくとも一部分を冷間鍛造し、ダイ
アフラム１の内面形状を作った。ここで、本実施例にあ
っては、寸法精度の観点から冷間鍛造を採用したが、こ
れに限定されるものではなく、熱間鍛造等いずれの鍛造
法を採用しても良い。このように鍛造加工を施した中間
成形体には、鍛造工程中の物理的衝撃によって部分的又
は全体的に加工硬化が起こる。本実施例では中間成形体
の硬さは３００ＨＶ以上の値を得ることができた。な
お、成形体の外面形状は鍛造、切削等の任意の加工法で
成形することができる。また、圧力センサを用いる圧力
や環境に応じて、鍛造加工時に生じた加工歪の一部を成
形体を温度４００〜７００℃、加熱保持時間30分以上で
加熱することで和らげることができた。この歪除去は鍛
造後の成形工程において、中間成形体加工後、ダイアフ
ラム加工後のいずれも摘要できる。Hereinafter, a method for manufacturing a diaphragm used in the pressure sensor of the present invention will be described. In the present embodiment, at least a part including the pressure-receiving surface of the cavity of the molding material preliminarily formed into a cylindrical shape was cold forged to form the inner surface shape of the diaphragm 1. Here, in the present embodiment, cold forging is employed from the viewpoint of dimensional accuracy, but the invention is not limited to this, and any forging method such as hot forging may be employed. Work hardening occurs partially or entirely in the intermediate molded body subjected to forging in this way due to physical impact during the forging process. In this example, the hardness of the intermediate molded body could be obtained at a value of 300 HV or more. In addition, the outer surface shape of the molded body can be formed by any processing method such as forging or cutting. Further, depending on the pressure using the pressure sensor and the environment, a part of the processing strain generated at the time of forging could be alleviated by heating the molded body at a temperature of 400 to 700 ° C. and a heating holding time of 30 minutes or more. This distortion can be removed in the forming step after forging, either after the processing of the intermediate molded body or after the processing of the diaphragm.
【００１２】[0012]
【発明の効果】本発明は、上述のようにオーステナイト
ステンレス鋼を鍛造加工で成形したことにより、筒状部
材の材料であるステンレス鋼の機械的性質の向上を図る
ことができ、圧力センサ用ダイアフラムとしての利用を
可能とする。また、耐蝕性を有するにもかかわらず、隔
膜型圧力センサと比較して部品数の少ない簡単な構造と
することができ、生産性の向上、コストダウン等の効果
がある。更に、伝達機構を用いず被測定物の変位を純粋
に歪ゲージで測定でき、測定環境の温度変化によるセン
サ特性の変動を極めて小さくすることができる。According to the present invention, the austenitic stainless steel is formed by forging as described above, whereby the mechanical properties of the stainless steel as the material of the cylindrical member can be improved, and the diaphragm for the pressure sensor can be improved. It can be used as In addition, despite having corrosion resistance, a simple structure having a smaller number of parts compared with a diaphragm type pressure sensor can be obtained, and there are effects such as improvement in productivity and cost reduction. Furthermore, the displacement of the object to be measured can be measured purely by a strain gauge without using a transmission mechanism, and fluctuations in sensor characteristics due to temperature changes in the measurement environment can be extremely reduced.
【図１】本発明における圧力センサの要部断面図であ
る。FIG. 1 is a sectional view of a main part of a pressure sensor according to the present invention.
【図２】図１中ＩＩ部の拡大図である。FIG. 2 is an enlarged view of a portion II in FIG.
１…ダイアフラム １ａ…底部 ２…絶縁膜 ３…歪ゲージ ４…保護膜 DESCRIPTION OF SYMBOLS 1 ... Diaphragm 1a ... Bottom part 2 ... Insulating film 3 ... Strain gauge 4 ... Protective film
Claims (2)
フラムにおいて、このダイアフラムの材料としてはオー
ステナイト系ステンレス鋼が使用され、このダイアフラ
ムを目的とする形状に成形する工程において目的形状の
少なくとも一部を鍛造加工によって成形されていること
を特徴とするダイアフラム。An austenitic stainless steel is used as a material of a diaphragm having at least a part of a thin portion, and at least a part of a target shape is forged in a step of forming the diaphragm into a target shape. A diaphragm characterized by being formed by processing.
いて、この圧力センサに使用されるダイアフラムの材料
としてはオーステナイト系ステンレス鋼が使用され、こ
のダイアフラムを目的とする形状に成形する工程におい
て目的形状の少なくとも一部を鍛造加工によって成形さ
れていることを特徴とする圧力センサ。2. A pressure sensor for detecting a pressure of a fluid or the like, wherein an austenitic stainless steel is used as a material of a diaphragm used for the pressure sensor, and a target shape is formed in a step of forming the diaphragm into a target shape. Characterized in that at least a part of the pressure sensor is formed by forging.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24282196A JP3598181B2 (en) | 1996-09-13 | 1996-09-13 | Diaphragm and pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24282196A JP3598181B2 (en) | 1996-09-13 | 1996-09-13 | Diaphragm and pressure sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH1090093A true JPH1090093A (en) | 1998-04-10 |
| JP3598181B2 JP3598181B2 (en) | 2004-12-08 |
Family
ID=17094802
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24282196A Expired - Fee Related JP3598181B2 (en) | 1996-09-13 | 1996-09-13 | Diaphragm and pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3598181B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0945717A1 (en) * | 1998-03-26 | 1999-09-29 | Mettler-Toledo GmbH | Elastically deformable element and method for its manufacture |
| JP2018087730A (en) * | 2016-11-29 | 2018-06-07 | セイコーインスツル株式会社 | Diaphragm, pressure sensor using diaphragm and manufacturing method of diaphragm |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH052041U (en) * | 1992-05-21 | 1993-01-14 | 株式会社共和電業 | Pressure transducer |
| JPH07133867A (en) * | 1993-11-11 | 1995-05-23 | Daido Steel Co Ltd | Pressure sensor part and manufacture thereof |
| JPH0829280A (en) * | 1994-07-19 | 1996-02-02 | Nippon Denshi Ion:Kk | Manufacture of pressure sensor and pressure sensor |
-
1996
- 1996-09-13 JP JP24282196A patent/JP3598181B2/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH052041U (en) * | 1992-05-21 | 1993-01-14 | 株式会社共和電業 | Pressure transducer |
| JPH07133867A (en) * | 1993-11-11 | 1995-05-23 | Daido Steel Co Ltd | Pressure sensor part and manufacture thereof |
| JPH0829280A (en) * | 1994-07-19 | 1996-02-02 | Nippon Denshi Ion:Kk | Manufacture of pressure sensor and pressure sensor |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0945717A1 (en) * | 1998-03-26 | 1999-09-29 | Mettler-Toledo GmbH | Elastically deformable element and method for its manufacture |
| US6409845B1 (en) | 1998-03-26 | 2002-06-25 | Mettler-Toledo Gmbh | Elastic component for a precision instrument and process for its manufacture |
| JP2018087730A (en) * | 2016-11-29 | 2018-06-07 | セイコーインスツル株式会社 | Diaphragm, pressure sensor using diaphragm and manufacturing method of diaphragm |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3598181B2 (en) | 2004-12-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US3697917A (en) | Semiconductor strain gage pressure transducer | |
| AU2001281917B2 (en) | Pressure transmitter | |
| JP2656566B2 (en) | Semiconductor pressure transducer | |
| US10345180B2 (en) | Pressure sensor | |
| US10048152B2 (en) | Pressure transmitter with overpressure protection | |
| EP0911623A3 (en) | High pressure sensor and method of forming | |
| US9243964B2 (en) | Device for converting a force or a pressure into an electrical signal and method for producing such a device | |
| KR20110129357A (en) | Capacitance type pressure sensor | |
| EP0403254B1 (en) | Hermetic pressure sensor | |
| US4166384A (en) | Semiconductor transducer | |
| JPH0513782A (en) | Metal diaphragm for pressure sensor | |
| US20060162460A1 (en) | Differential pressure measuring apparatus | |
| JP3598181B2 (en) | Diaphragm and pressure sensor | |
| US6516670B2 (en) | Pressure sensor | |
| US5060520A (en) | Hermetic pressure sensor | |
| JPH10300607A (en) | Pressure sensor | |
| US7073400B2 (en) | Sensor for measuring pressure in a sealed volume | |
| CN117560481B (en) | Binocular camera capable of reducing beam deformation and temperature dynamic compensation method | |
| JPH052041U (en) | Pressure transducer | |
| US5672826A (en) | Semiconductor pressure sensor | |
| US11614376B2 (en) | Device for converting a pressure into an electric signal, and electronic pressure measuring device comprising such a device | |
| JP5123737B2 (en) | Method for forming pressure receiving portion of pressure sensing device | |
| RU2286555C2 (en) | Strain primary pressure transducer with zero drift compensation and membrane for it | |
| JPS60186727A (en) | Pressure sensor | |
| JP2021110687A (en) | Pressure sensor and pressure gauge |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20040427 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20040625 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20040907 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20040913 |
|
| R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100917 Year of fee payment: 6 |
|
| LAPS | Cancellation because of no payment of annual fees |