JPH1082759A - Composite electrode both for suction and circulation measurements - Google Patents

Composite electrode both for suction and circulation measurements

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Publication number
JPH1082759A
JPH1082759A JP8255601A JP25560196A JPH1082759A JP H1082759 A JPH1082759 A JP H1082759A JP 8255601 A JP8255601 A JP 8255601A JP 25560196 A JP25560196 A JP 25560196A JP H1082759 A JPH1082759 A JP H1082759A
Authority
JP
Japan
Prior art keywords
tube
inner tube
electrode
liquid
glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8255601A
Other languages
Japanese (ja)
Other versions
JP3808952B2 (en
Inventor
Masao Horiba
雅夫 堀場
Shinji Takechi
伸二 武市
Yoshikazu Iwamoto
恵和 岩本
Toshiyuki Baba
利行 馬場
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Ltd
Original Assignee
Horiba Ltd
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Filing date
Publication date
Application filed by Horiba Ltd filed Critical Horiba Ltd
Priority to JP25560196A priority Critical patent/JP3808952B2/en
Publication of JPH1082759A publication Critical patent/JPH1082759A/en
Application granted granted Critical
Publication of JP3808952B2 publication Critical patent/JP3808952B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To provide an inexpensive composite electrode which can easily perform both circulation measurement and suction measurement. SOLUTION: A double tube 4 comprising an inner tube 1 forming a flow path of sample liquid and an outer tube 2 branched from the middle of the inner tube 1 for surrounding the inner tube 1 so that a ring-like space 3 is formed between the inner tube 1 and it is integrally formed of glass, a response film 5 is formed on a part of the inner tube 1 surrounded by the outer tube 2, the space 3 between the inner tube 1 and the outer tube 2 is filled with glass electrode internal liquid 6, and an inner electrode 7 is provided at a position corresponding to the response film 5 in the glass electrode internal liquid 6. On the other hand, the double tube 4 is surrounded by an outer cylinder 8 so that a ring-like gap 9 is formed between the double tube 4 and it, the gap 9 is filled with reference electrode internal liquid 10, a liquid junction 11 is provided on a part of the inner tube 1 in contact with the reference electrode internal liquid 10, and a reference electrode inner pole 12 is provided in the reference electrode internal liquid 10 corresponding to the liquid junction 11.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は吸引測定と流通測定
が可能な複合電極に関する。
The present invention relates to a composite electrode capable of performing suction measurement and flow measurement.

【0002】[0002]

【従来の技術】流通測定用pH電極は、従来、例えば図
5に示すように、試料液の流路aが横方向に形成された
ものが公知である。なお、図5中、bはpH応答膜、c
はガラス電極内極、dはガラス電極内部液、eは液絡
部、fは比較電極内部液、gは比較電極内極、hは出力
ケーブルである。
2. Description of the Related Art Conventionally, a pH electrode for flow measurement has been known in which a flow path a for a sample liquid is formed in a lateral direction as shown in FIG. In addition, in FIG. 5, b is a pH-responsive membrane, c
Denotes a glass electrode inner electrode, d denotes a glass electrode inner liquid, e denotes a liquid junction, f denotes a reference electrode internal liquid, g denotes a reference electrode inner electrode, and h denotes an output cable.

【0003】[0003]

【発明が解決しようとする課題】上述した従来の流通測
定用pH電極では、その製作過程でガラス加工の占める
割合が多く、熟練を必要とし、コスト高になっていた。
また、特に、上述のような二重管の構造では、厚肉で外
径の太い応答ガラス管の加工は熟練者にとっても難し
く、細径なキャピラリー状のものしか得ることができ
ず、また、その長さもあまり長くすることはできず、ガ
ラス部分の設計の自由度はきわめて低かった。
In the above-mentioned conventional pH electrode for flow measurement, the ratio of glass processing in the manufacturing process is large, skill is required, and the cost is high.
Particularly, in the structure of the double tube as described above, it is difficult for a skilled person to process a thick response glass tube having a large outer diameter, and only a small-diameter capillary can be obtained. The length could not be too long, and the degree of freedom in designing the glass part was extremely low.

【0004】また、試料液が少量しか得られない場合に
は、スポイトやベローズ等による吸引測定を容易におこ
なえることが望ましいが、上述のように、試料液の流路
aが横方向に形成されているため、その吸上側には湾曲
したチューブ等の吸上手段を別途装着する必要があり、
その操作が面倒であった。しかも、その流路aが細径で
あると、その吸引側にスポイト等の吸引手段を装着する
のが困難なこともあった。
When only a small amount of sample solution is obtained, it is desirable to easily perform suction measurement using a dropper or bellows. However, as described above, the sample solution flow path a is formed in the lateral direction. Therefore, it is necessary to separately attach suction means such as a curved tube to the suction side,
The operation was troublesome. In addition, if the flow path a has a small diameter, it may be difficult to mount a suction means such as a dropper on the suction side.

【0005】本発明はこのような実情に鑑みてなされ、
流通測定または吸引測定のいずれをも簡易におこなえる
コスト安な複合電極を提供することを目的としている。
The present invention has been made in view of such circumstances,
It is an object of the present invention to provide a low-cost composite electrode that can easily perform both flow measurement and suction measurement.

【0006】[0006]

【課題を解決するための手段】本発明は上述の課題を解
決するための手段を以下のように構成している。請求項
1に記載の発明では、試料液の流路を形成する内管と、
その内管の途中から分岐してその内管との間に環状の空
間を形成するようにその内管を包囲する外管とよりなる
二重管をガラスにより一体的に形成し、前記外管で包囲
されている内管の一部に応答膜を形成し、かつ、前記内
管と外管との間の空間にガラス電極内部液を充填し、そ
のガラス電極内部液内の前記応答膜と対応する位置に内
部電極を設ける一方、前記二重管との間に環状の間隙を
形成するようにその二重管を外筒で包囲し、その間隙に
比較電極内部液を充填し、その比較電極内部液と接して
いる前記内管の一部に液絡部を設け、その液絡部と対応
させて前記比較電極内部液内に比較電極内極を設けてな
ることを特徴としている。
According to the present invention, means for solving the above-mentioned problems are constituted as follows. In the invention according to claim 1, an inner tube forming a flow path of the sample liquid;
A double tube comprising an outer tube surrounding the inner tube integrally formed of glass so as to branch off from the middle of the inner tube so as to form an annular space between the inner tube and the outer tube; Forming a responsive film in a part of the inner tube surrounded by, and filling a space between the inner tube and the outer tube with a glass electrode internal liquid, and the responsive film in the glass electrode internal liquid. While the internal electrode is provided at a corresponding position, the double tube is surrounded by an outer cylinder so as to form an annular gap between the double tube and the double tube, and the gap is filled with a reference electrode internal liquid. A liquid junction is provided in a part of the inner tube in contact with the electrode internal liquid, and a comparison electrode inner electrode is provided in the comparison electrode internal liquid corresponding to the liquid junction.

【0007】外筒には、例えば、適度の保形性のある合
成樹脂成形管を用い、その外筒とガラスにより一体的に
形成される二重管との接合にはゴムパッキン等を用いた
簡易な構成とし、試料液の流路を外筒に沿って縦方向に
形成することができ、スポイトやベローズ等による吸引
測定がきわめて容易となる。
For the outer cylinder, for example, a synthetic resin molded pipe having an appropriate shape-retaining property is used, and rubber packing or the like is used for joining the outer cylinder to a double pipe integrally formed of glass. With a simple configuration, the flow path of the sample liquid can be formed in the vertical direction along the outer cylinder, and suction measurement with a dropper, bellows, or the like becomes extremely easy.

【0008】そのガラスの二重管の加工そのものは比較
的に容易であり、また、その内管の一部にパイプ状の応
答膜を一体化させるには、バーナによる融接加工により
その接合作業を要領よくおこなうことができ、ガラス加
工に熟練を必要としない。また、その内管の径や長さは
適宜な値に設定が可能であり、ガラス部分の設計の自由
度が著しく向上する。
[0008] The processing of the glass double tube itself is relatively easy, and in order to integrate a pipe-shaped responsive film into a part of the inner tube, the joining operation is performed by fusion welding using a burner. Can be carried out effectively, and skill is not required for glass processing. Further, the diameter and length of the inner tube can be set to appropriate values, and the degree of freedom in designing the glass portion is significantly improved.

【0009】請求項2に記載の発明では、請求項1に記
載の発明における前記内管を直接試料容器内に導入し、
試料を吸引することを特徴としている。
In the invention according to claim 2, the inner tube according to the invention according to claim 1 is directly introduced into a sample container,
It is characterized by aspirating a sample.

【0010】請求項3に記載の発明では、請求項1に記
載の発明における前記内管に直接吸引手段を装着して試
料を吸引することを特徴としている。
According to a third aspect of the present invention, a sample is aspirated by directly attaching a suction means to the inner tube in the first aspect of the invention.

【0011】請求項4に記載の発明では、請求項1に記
載の発明における前記外筒と内筒とがシール部材によっ
て一体化されていることを特徴としている。
According to a fourth aspect of the present invention, the outer cylinder and the inner cylinder in the first aspect of the invention are integrated by a seal member.

【0012】[0012]

【発明の実施の形態】以下に本発明の吸引・流通兼用複
合電極の実施形態を図面に基づいて詳細に説明する。図
1は吸引・流通兼用複合電極の構成図、図2はその部分
拡大図であり、これらの図において符号1は試料液の流
路を形成する内管、2はその内管1の途中から分岐して
内管1との間に環状の空間3を形成するようにその内管
1を包囲する外管であり、その内管1と外管2とよりな
る二重管4がガラスにより一体的に形成されている。
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of a composite electrode according to a first embodiment of the present invention; FIG. 1 is a configuration diagram of a combined electrode for suction and flow, and FIG. 2 is a partially enlarged view of the composite electrode. In these figures, reference numeral 1 denotes an inner tube forming a flow path of a sample liquid, An outer tube surrounding the inner tube 1 so as to form an annular space 3 between the inner tube 1 and the inner tube 1. A double tube 4 including the inner tube 1 and the outer tube 2 is integrally formed of glass. Is formed.

【0013】5はその内管1の一部にバーナによる融接
等によって接続一体化されたパイプ状のpH応答膜であ
り、上述の空間3にはガラス電極内部液6が充填されて
おり、そのガラス電極内部液6内には、pH応答膜5と
対応させて内部電極7が設けられている。
Reference numeral 5 denotes a pipe-shaped pH responsive film integrally connected to a part of the inner tube 1 by fusion welding with a burner, etc. The space 3 is filled with a glass electrode internal liquid 6, An internal electrode 7 is provided in the glass electrode internal liquid 6 so as to correspond to the pH responsive film 5.

【0014】8は保形性のある合成樹脂成形品よりなる
外筒で、二重管4との間に環状の間隙9を形成するよう
にその外管2を包囲し、その間隙9には比較電極内部液
10が充填されており、その比較電極内部液10と接し
ている内管1の一部に液絡部11が設けられ、その液絡
部11と対応させて比較電極内部液10内に比較電極内
極12が設けられている。
Reference numeral 8 denotes an outer cylinder made of a synthetic resin molded article having shape-retaining properties, which surrounds the outer tube 2 so as to form an annular gap 9 with the double pipe 4, and the gap 9 has A liquid junction portion 11 is provided in a part of the inner tube 1 which is filled with the reference electrode internal solution 10 and is in contact with the reference electrode internal solution 10. A reference electrode inner pole 12 is provided therein.

【0015】13は内管1と外筒8との間に介装される
パッキン(シール部材)、14は外管2と外筒8との間
に介装されるパッキン、15は内管1と外管2との間に
介装されるパッキンであり、そのパッキン14には、比
較電極内極12に接続されるリード線121が、また、
パッキン15には、内部電極7に接続されるリード線7
1がそれぞれ貫挿保持されている。16は外筒8に開設
した内部液補充用の栓孔に嵌脱自在に密嵌されるゴム
栓、17は出力ケーブルである。
13 is a packing (seal member) interposed between the inner tube 1 and the outer tube 8, 14 is a packing interposed between the outer tube 2 and the outer tube 8, and 15 is an inner tube 1 And a lead wire 121 connected to the reference electrode inner pole 12.
The packing 15 has lead wires 7 connected to the internal electrodes 7.
1 are respectively inserted and held. Reference numeral 16 denotes a rubber stopper which is fitted in a stopper hole for replenishing the internal liquid, which is opened in the outer cylinder 8, and 17 denotes an output cable.

【0016】このように、試料液の流路を形成し、かつ
pH応答膜5が一体化されている内管1を外筒8に沿う
縦方向に形成したことにより、図3に示すように、その
内管1の上部にスポイト18やベローズ19等の吸引手
段を挿入して、その下部を試料容器内に直接導入して、
吸引測定をきわめて容易におこなうことができる。な
お、より好ましくは、試料容器や標準液容器の大きさや
形状に合わせて、例えば、内管1の先端に吸上げ用のア
ダプター20を取り付けることにより、その先端を保護
してより能率よく吸引測定をおこなうことができる。
As described above, by forming the flow path of the sample liquid and forming the inner tube 1 in which the pH responsive membrane 5 is integrated in the vertical direction along the outer tube 8, as shown in FIG. Then, a suction means such as a dropper 18 or a bellows 19 is inserted into the upper part of the inner tube 1, and the lower part is directly introduced into the sample container.
Suction measurements can be performed very easily. In addition, more preferably, by attaching a suction adapter 20 to the tip of the inner tube 1 in accordance with the size or shape of the sample container or the standard solution container, the tip is protected and the suction measurement is performed more efficiently. Can be performed.

【0017】一方、流通測定をおこなう場合には、図4
に示すように、内管1の両端に、それぞれ試料液流通用
のチューブ21,22を接続し、ポンプを介して試料
(標準液)を流通させればよい。この流通測定では、電
極スタンド(図示省略)に外筒8を縦置き状に把持させ
てもよく、また、横置き状としてもよい。あるいは、倒
置状としてもよく、その場合には、液絡部11から試料
液中に洩出する比較電極内部液の影響を受けないように
することができる。なお、縦置き、倒置いずれの場合に
も気泡を上方へ逃しやすくなり、その影響を受けにくく
することができる。
On the other hand, when the flow measurement is performed, FIG.
As shown in (2), tubes 21 and 22 for flowing sample liquid may be connected to both ends of the inner tube 1, respectively, and the sample (standard solution) may be flowed through a pump. In this flow measurement, the outer cylinder 8 may be held vertically by an electrode stand (not shown), or may be horizontally installed. Alternatively, the liquid may be inverted, and in this case, it is possible not to be affected by the liquid inside the comparative electrode leaking into the sample liquid from the liquid junction 11. It should be noted that the air bubbles can easily escape upward in both cases of vertical placement and inversion, making it less likely to be affected by the bubbles.

【0018】内管1に一体化されているパイプ状のpH
応答膜5はその全周を比較電極内部液で覆われているた
め、高い静電シールド効果が得られ、静電妨害作用を効
果的に防止することができる。また、そのpH応答膜5
の接液面積を大きく設定できるため、高い検出感度と迅
速な応答性を得ることができるのはいうまでもない。
A pipe-like pH integrated with the inner tube 1
Since the entire periphery of the response film 5 is covered with the liquid inside the comparison electrode, a high electrostatic shielding effect is obtained, and the electrostatic interference effect can be effectively prevented. In addition, the pH-responsive membrane 5
Needless to say, since the liquid contact area can be set large, high detection sensitivity and quick responsiveness can be obtained.

【0019】このようなpH応答膜5を含めたガラスの
二重管4は、熟練者を必要とするこなく、比較的容易に
得ることができ、特に、その内管1の径や長さを大に設
定することができるため設計の自由度が飛躍的に向上
し、プラント用等の大型のものまで幅広い要求仕様に柔
軟に対処できる点も大きな特徴である。なお、本発明は
pH測定用の複合電極に限られるものではなく、pH応
答膜5に代えて他のイオン応答膜を用いることによって
pH以外のイオン(例えばNa+ 等)測定用の複合電極
にも適用可能であり、同様の作用・効果を得ることがで
きる。
The glass double tube 4 including the pH responsive film 5 can be obtained relatively easily without requiring a skilled person, and in particular, the diameter and length of the inner tube 1 It is a major feature that the degree of freedom of design can be dramatically improved because it can be set to a large value, and that it can flexibly cope with a wide range of required specifications, such as large ones for plants and the like. The present invention is not limited to the composite electrode for measuring pH, but can be applied to a composite electrode for measuring ions other than pH (for example, Na + ) by using another ion responsive membrane instead of the pH responsive membrane 5. Is also applicable, and the same operation and effect can be obtained.

【0020】[0020]

【発明の効果】以上説明したように、本発明の吸引・流
通兼用複合電極によれば、ガラスの二重管の内管の一部
に応答膜を一体的に形成し、その応答膜を比較電極内部
液で覆うようにしたので、高い静電シールド効果が得ら
れる。また、ガラス二重管を合成樹脂成形の外筒内にパ
ッキン等を介して収納することにより、ガラス加工部分
が少なくなり、かつその構成が簡略化され、製作が容易
となり、コストの低減化を図ることができる。また、そ
の試料液の流路を形成する内管の径や長さを大に設定す
ることができ、幅広い要求仕様に柔軟に対処することが
できる。
As described above, according to the suction / distribution combined electrode of the present invention, the response film is formed integrally with a part of the inner tube of the double glass tube, and the response films are compared. Since the electrodes are covered with the liquid inside the electrodes, a high electrostatic shielding effect can be obtained. In addition, since the glass double tube is housed in a synthetic resin-molded outer cylinder via a packing or the like, the number of glass processing portions is reduced, the configuration is simplified, the production is facilitated, and the cost is reduced. Can be planned. Further, the diameter and length of the inner tube forming the flow path of the sample liquid can be set to be large, so that it is possible to flexibly cope with a wide range of required specifications.

【0021】その試料液の流路を縦置き状に配置するこ
とにより、チューブ等の配管を接続することなしに流路
入口を試料容器や標準液容器に直接挿入することがで
き、吸引測定を簡易におこなうことができ、また、流通
測定では、その流路の両端にチューブを接続することに
より、縦置き、横置き、倒置のいずれの姿勢でも測定可
能となる。
By arranging the flow path of the sample liquid vertically, the flow path inlet can be directly inserted into the sample container or the standard liquid container without connecting a pipe such as a tube. It can be easily performed, and in flow measurement, by connecting tubes to both ends of the flow path, measurement can be performed in any of vertical, horizontal, and inverted postures.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の吸引・流通兼用複合電極の一実施形態
を示す部分断面図である。
FIG. 1 is a partial cross-sectional view showing one embodiment of a combined suction / distribution electrode of the present invention.

【図2】同要部拡大断面図である。FIG. 2 is an enlarged sectional view of the main part.

【図3】同吸引測定時の説明図である。FIG. 3 is an explanatory diagram at the time of the suction measurement.

【図4】同流通測定時の説明図である。FIG. 4 is an explanatory diagram during the flow measurement.

【図5】従来の流通型pH電極の一例を示す断面図であ
る。
FIG. 5 is a cross-sectional view showing an example of a conventional flow-type pH electrode.

【符号の説明】[Explanation of symbols]

1…内管、2…外管、3…空間、4…二重管、5…応答
膜、6…ガラス電極内部液、7…内部電極、8…外筒、
9…間隙、10…比較電極内部液、11…液絡部、12
…比較電極内極。
DESCRIPTION OF SYMBOLS 1 ... Inner tube, 2 ... Outer tube, 3 ... Space, 4 ... Double tube, 5 ... Response membrane, 6 ... Glass electrode internal liquid, 7 ... Internal electrode, 8 ... Outer cylinder,
9: gap, 10: reference electrode internal liquid, 11: liquid junction, 12
... Internal electrode of reference electrode.

フロントページの続き (72)発明者 馬場 利行 京都府京都市南区吉祥院宮の東町2番地 株式会社堀場製作所内Continued on the front page (72) Inventor Toshiyuki Baba 2 Higashi-cho, Kichijoin-gu, Minami-ku, Kyoto, Kyoto Inside Horiba, Ltd.

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 試料液の流路を形成する内管と、その内
管の途中から分岐してその内管との間に環状の空間を形
成するようにその内管を包囲する外管とよりなる二重管
をガラスにより一体的に形成し、前記外管で包囲されて
いる内管の一部に応答膜を形成し、かつ、前記内管と外
管との間の空間にガラス電極内部液を充填し、そのガラ
ス電極内部液内の前記応答膜と対応する位置に内部電極
を設ける一方、前記二重管との間に環状の間隙を形成す
るようにその二重管を外筒で包囲し、その間隙に比較電
極内部液を充填し、その比較電極内部液と接している前
記内管の一部に液絡部を設け、その液絡部と対応させて
前記比較電極内部液内に比較電極内極を設けてなること
を特徴とする吸引・流通兼用複合電極。
1. An inner tube forming a flow path of a sample liquid, and an outer tube branching from the middle of the inner tube and surrounding the inner tube so as to form an annular space between the inner tube and the inner tube. A double tube made of glass is formed integrally with glass, a responsive membrane is formed on a part of the inner tube surrounded by the outer tube, and a glass electrode is provided in a space between the inner tube and the outer tube. While filling the internal liquid, the internal electrode is provided at a position corresponding to the response film in the glass electrode internal liquid, and the double tube is formed into an outer cylinder so as to form an annular gap between the internal tube and the double tube. And the gap is filled with the reference electrode internal liquid, a liquid junction is provided in a part of the inner tube in contact with the comparison electrode internal liquid, and the comparison electrode internal liquid is made to correspond to the liquid junction. A composite electrode for both suction and distribution, characterized in that a reference electrode inner electrode is provided in the inside.
【請求項2】 前記内管を直接試料容器内に導入し、試
料を吸引することを特徴とする請求項1に記載の吸引・
流通兼用複合電極。
2. The aspiration / suction device according to claim 1, wherein the inner tube is directly introduced into the sample container to suck the sample.
Combined distribution electrode.
【請求項3】 前記内管に直接吸引手段を装着して試料
を吸引することを特徴とする請求項1に記載の吸引・流
通兼用複合電極。
3. The combined suction / distribution electrode according to claim 1, wherein a sample is sucked by directly attaching suction means to the inner tube.
【請求項4】 前記外筒と内筒とがシール部材によって
一体化されていることを特徴とする請求項1に記載の吸
引・流通兼用複合電極。
4. The combined suction / distribution electrode according to claim 1, wherein the outer cylinder and the inner cylinder are integrated by a seal member.
JP25560196A 1996-09-05 1996-09-05 Combined suction / distribution electrode Expired - Fee Related JP3808952B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25560196A JP3808952B2 (en) 1996-09-05 1996-09-05 Combined suction / distribution electrode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25560196A JP3808952B2 (en) 1996-09-05 1996-09-05 Combined suction / distribution electrode

Publications (2)

Publication Number Publication Date
JPH1082759A true JPH1082759A (en) 1998-03-31
JP3808952B2 JP3808952B2 (en) 2006-08-16

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ID=17280999

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
JP (1) JP3808952B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007024544A (en) * 2005-07-12 2007-02-01 Horiba Ltd Composite electrode for measuring ion concentration, and ion concentration monitor
JP2007085217A (en) * 2005-09-21 2007-04-05 Iwaki Co Ltd Semisolid fluid feeder
JP2015206633A (en) * 2014-04-18 2015-11-19 株式会社堀場製作所 Chemical agent measurement electrode for semiconductor process and measurement system
US9784705B2 (en) 2014-04-18 2017-10-10 Horiba, Ltd. Measuring electrode and measuring system for chemical liquid
JP2022040731A (en) * 2020-08-31 2022-03-11 ピコテクバイオ株式会社 Microsampling chip and inspection device using microsampling chip

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007024544A (en) * 2005-07-12 2007-02-01 Horiba Ltd Composite electrode for measuring ion concentration, and ion concentration monitor
JP2007085217A (en) * 2005-09-21 2007-04-05 Iwaki Co Ltd Semisolid fluid feeder
JP2015206633A (en) * 2014-04-18 2015-11-19 株式会社堀場製作所 Chemical agent measurement electrode for semiconductor process and measurement system
US9784705B2 (en) 2014-04-18 2017-10-10 Horiba, Ltd. Measuring electrode and measuring system for chemical liquid
US10352889B2 (en) 2014-04-18 2019-07-16 Horiba, Ltd. Measuring electrode and measuring system for chemical liquid
US10359389B2 (en) 2014-04-18 2019-07-23 Horiba, Ltd. Measuring electrode and measuring system for chemical liquid
JP2022040731A (en) * 2020-08-31 2022-03-11 ピコテクバイオ株式会社 Microsampling chip and inspection device using microsampling chip

Also Published As

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