JPH1076454A - Groove forming device and polishing device for pitch disk and groove forming method and polishing method for pitch disk using same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To perform groove forming work to a pitch disk to be used for polishing optical crystals or optical glass without generating cutting dust or chip at all, or without generating fine flaws in a polished surface of the subject member, and achieve precise and high precision polishing work. SOLUTION: Plural groove forming rings 14 are detachably and position- movably inserted to a roughly pole-shaped groove forming rod member main body 2 of a groove forming device 1 to e fixed, the groove forming rod member main body 2 having the groove forming rings 14 is placed on an upper surface of a pitch disk 6 to cross around a rotation center of the pitch disk 6 to be capable of moving with play, and applied to stopper members 12A, 12B fixed on a polishing device main body part, the pitch plate is rotated, the groove forming rings 14 are applied to the upper surface of the pitch disk 6, and it is pressed and rotated to form grooves 6A concentrically, while a subject material A is applied to the upper surface of the pitch disk 6 to be polished by a polishing material holding device 8.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a polishing apparatus and a polishing method for precisely polishing optical crystals, optical glasses, and the like, which are used in various optical machines and precision measuring machines.

[0002]

2. Description of the Related Art For example, optical crystals and optical glasses such as KNbO ₃ used for such various optical machines and precision measuring instruments are required to have extremely high precision. When polishing such as
It is required that the flatness of the polished surface be equal to or less than a quarter of the wavelength of light. Conventionally, by using a polishing machine that uses a pitch disk formed by melting a material to be polished such as an optical crystal or an optical glass into a disk shape by melting a resin such as pitch or rosin, such polishing can be performed with such high precision. Is being done.

As shown in FIG. 8, such a polishing apparatus 100 includes a disk-shaped rotating table 104 which is connected to a rotating shaft 103 of a driving motor 102 via a gear or the like (not shown) and is driven to rotate. And a disk-shaped pitch plate 106 fixed to the upper surface of the turntable 104. The polishing apparatus main body 101 includes a polishing target material holding device 108 that holds the polishing target material A and abuts (presses) on the pitch plate 106 for polishing, and an upper surface of the pitch plate 106 worn by the polishing operation. A dresser device 110 is provided for grinding to maintain the flatness.

A groove 106A is formed concentrically on the surface of the pitch disc 106. When a polishing liquid is supplied, the polishing liquid is supplied to the pitch disc 1 via the groove 106A.
No. 06 is uniformly dispersed on the surface to improve the flatness of the polished surface when the material to be polished A is polished, and when the pitch material on the surface of the pitch plate 106 is chipped during the polishing, the By trapping the chipped-off pitch material in the groove 106A, it is intended to prevent the scratch on the polished surface of the material to be polished by the pitch material.

[0005] The shape of the groove formed on the surface of the pitch board varies depending on the material to be polished, the size of the pitch board, and the like. A typical method of forming the groove is to use concentric grooves. In the case of forming, a method using a cutting tool, and in the case of a lattice-shaped groove, a method of pressing a mesh net are used.

[0006]

When polishing the material A to be polished by using such a polishing apparatus 100, it is necessary to prepare a pitch board. In general, the following procedure is performed.

First, a pitch material suitable for the physical properties of the material to be polished is selected, the selected pitch material is adjusted to the size of the pitch board, the amount of the pitch material is secured, and the pitch material is heated to a predetermined temperature. And melt. Next, the molten pitch material is transferred into the form of the pitch board and solidified while allowing it to cool naturally.
The pitch board solidified in the form is taken out of the form and mounted on a rotating plate. After that, while rotating the pitch board, cutting is performed with a constant depth at a predetermined interval using a special cutting tool, concentric grooves are formed on the upper surface of the pitch board.

During the formation of the grooves, chips of the pitch material generated at the time of cutting may be scattered on the pitch board surface and adhere to the shoulders of the formed grooves and the bottoms of the grooves. Since these chips deteriorate the working environment and cause a scratch on the polished surface of the material to be polished by being mixed in the polishing liquid, careful cleaning is particularly required after the work.

According to the present invention, in consideration of the present situation, it is possible to perform a groove forming operation of a pitch plate used for polishing an optical crystal, an optical glass, etc. without generating any cutting chips and chips, An object of the present invention is to provide a polishing apparatus, a polishing method, and a groove forming method capable of performing precise and high-precision polishing processing without causing minute scratches on a polished surface of a material.

[0010]

SUMMARY OF THE INVENTION The present invention has been made in order to achieve the above-mentioned problems and objects in the prior art, and a groove forming apparatus of the present invention has a disk-shaped pitch disk. A rotary table that can be mounted and driven to rotate, and a groove forming apparatus for a pitch board provided with a groove forming mechanism that forms a concentric groove on the upper surface of the pitch board, wherein the groove forming mechanism has a substantially cylindrical groove. A groove forming rod member, comprising: a forming rod member body; and a plurality of groove forming rings that are removably and movably inserted through the groove forming rod member body, and the groove forming ring is inserted. The main body is mounted movably on the upper surface of the pitch board so as to cross the vicinity of the center of rotation of the pitch board, and a groove forming rod member main body is formed by a stopper member fixedly attached to the groove forming apparatus main body of the pitch board. Is the top of the pitch board Rolling is suppressed in the groove forming mechanism, the groove forming ring of the groove forming mechanism is brought into contact with the upper surface of the pitch board, and is configured to form a concentric groove while pressing and rotating. I do.

A polishing apparatus according to the present invention is a polishing apparatus for polishing a material to be polished, comprising: a rotary table which is driven to rotate; and a disk-shaped rotary table mounted on the rotary table and rotated together with the rotary table. In a polishing apparatus comprising a pitch disc and a material to be polished which holds a material to be polished and polishes the material to be polished in contact with the upper face of the pitch disc, concentric grooves are formed on the upper face of the pitch disc. A groove forming apparatus for forming the groove, the groove forming apparatus includes a substantially cylindrical groove forming rod member main body, and a plurality of groove forming rods that are detachably inserted into the groove forming rod member main body and are movably inserted therethrough. A groove forming rod member main body through which the groove forming ring is inserted is movably mounted on the upper surface of the pitch board so as to cross the vicinity of the center of rotation of the pitch board, and the polishing apparatus main body is provided. By the stopper member fixedly attached to the portion, the groove forming rod member body is prevented from rolling on the pitch board upper surface, and the groove forming ring of the groove forming device is brought into contact with the pitch board upper surface, It is characterized in that the groove is formed concentrically while being pressed and rotated.

Further, the polishing method of the present invention is characterized in that a rotating table driven to rotate, a disk-shaped pitch disk mounted on the upper surface of the rotating table and rotated with the rotating table, and a material to be polished are held. A polishing method for polishing a material to be polished by using a polishing apparatus composed of a material to be polished and an apparatus for holding the material to be polished while being brought into contact with the upper surface of the pitch board. A plurality of groove forming rings are detachably and movably inserted into and fixed to the groove forming rod member main body, and the groove forming rod member main body into which the groove forming ring is inserted is rotated by the rotation center of the pitch machine. While movably mounted on the upper surface of the pitch board so as to cross the vicinity, it is brought into contact with a stopper member fixedly attached to the main body of the polishing apparatus, and the pitch board is rotated, and the groove forming ring of the groove forming apparatus is rotated. Pi Is brought into contact with the switch panel upper surface, while forming a groove concentrically while the press rotating, the polishing material retention device, characterized in that polished by contacting the polishing object to pitch plate upper surface.

Further, according to the present invention, there is provided a pitch disc groove forming method, comprising: a rotary table driven to rotate; and a disk-shaped pitch disc mounted on the upper surface of the rotary table and rotated together with the rotary table. Using a molding device, a plurality of ring forming rings are detachably and movably inserted and fixed in a substantially cylindrical groove forming rod member body, and the groove forming ring is inserted through the groove forming ring. The rod member body is movably mounted on the top surface of the pitch board so as to cross the vicinity of the center of rotation of the pitch board, and is brought into contact with a stopper member fixedly attached to the groove forming device body portion of the pitch board, so that the pitch board Is rotated, and the groove forming ring of the groove forming apparatus is brought into contact with the upper surface of the pitch board, and the grooves are formed concentrically while being pressed and rotated.

In these cases, it is preferable to mount unbalanced weight members on both ends of the groove forming rod member main body. Further, an unbalanced weight member is attached to both ends of the substantially cylindrical groove forming rod member body, and the groove forming rod member body is formed on the upper surface of the pitch board so as to cross the pitch board near the center of rotation of the pitch board. By rotating the pitch board by placing it movably on the stopper member and rotating the pitch board, the groove forming rod member body will rotate in the same direction on the pitch board, but if the load is heavy, The groove forming rod member body rotates in the same direction (rotation direction) as the movement direction (rotation direction) of the pitch board surface, and the lighter weight rotates in the opposite direction to the movement direction of the pitch board surface.

As described above, since the groove forming ring of the groove forming device is pressed against the upper surface of the pitch board while being pressed against the upper surface of the pitch board, concentric grooves can be formed on the upper surface of the pitch board with the groove forming ring. Modified molding of a shallow groove whose upper surface is polished by polishing can also be performed.

Further, the present invention is not a conventional cutting method using a cutting tool, but a method of forming a groove on the surface of a pitch machine by rotating and pressing a groove forming ring to cut the groove. No cutting powder is generated at the time of cutting as in the case of cutting by the method described above, not only the working environment is improved, but also no foreign matter is mixed into the polishing liquid, and no scratch is generated on the polished surface of the material to be polished.

Further, the polished surface worn by polishing the upper surface of the pitch plate can be polished flat by rotating the groove forming rod member body against the upper surface of the pitch plate and pressing and rotating the main body.

[0018]

DESCRIPTION OF THE PREFERRED EMBODIMENTS According to the present invention, a portion corresponding to 1/2 in the longitudinal direction (that is, 1 / (1) of the approximate diameter of the pitch disc) of the portion of the groove forming rod member body which is in contact with the pitch disc face. 2), a substantially disk-shaped groove forming ring fixed by being detachably inserted and fixedly movable at a fixed interval between the two sides) and pressing the pitch board surface to modify the surface. At the same time, the groove is formed.

In this case, the shape of the groove forming ring is shown in FIG.
As shown in (1), the inner diameter R is slightly larger than the outer diameter r of the substantially cylindrical portion of the groove forming rod member body so as to be inserted into the groove forming rod member body, and the width L is the groove width l. The thickness T of the groove forming ring corresponding to the groove depth s (corresponding to the outer diameter of the ring) is 0.1 to 3 mm.
It is preferably about 5 mm. Further, the shape of the groove forming ring is a substantially disk-shaped ring shape in which an insertion hole is formed in the center portion thereof, and both surfaces of the ring in the radial direction F are formed.
However, it is desirable to have a shape like a solo ban ball that forms a tapered inclined surface of 45 degrees or less with respect to the radial direction. This is because, when the inclined surface F is a tapered inclined surface that exceeds 45 degrees with respect to the radial direction, when the pitch surface is pressed against the pitch surface, the surface F in the radial direction is applied to the pitch surface. This is because the groove cannot be formed.

Further, the groove forming ring is fixed to the groove forming rod member body by processing a counterbored screw on the groove forming ring and fixing it with a screw. The ring can be removed and the position can be freely moved. It is preferable to use a simple type. By doing so, it is possible to variously change the shape, interval, and the like of the grooves formed on the surface of the pitch board depending on the material to be polished, the size of the pitch board, and the like.

The material of the groove forming ring is the same as that of the groove forming rod member body, such as a metal material such as stainless steel having excellent corrosion resistance and abrasion resistance, or a ceramic or resin such as glass or alumina. May be selected according to the material of the pitch board.

Further, it is preferable that the weight member is a ring-shaped metal weight, and is configured to be detachably attached to screw holes provided at both ends of the groove forming rod member by screws.

[0023]

Embodiments of the present invention will be described below in detail with reference to the drawings. FIG. 1 is a perspective view showing the entire polishing apparatus of the present invention, FIG. 2 is a partial perspective view of FIG. 1, and FIG.
FIG. 4 is a partially enlarged sectional view taken along line AA of FIG. 3, showing a state where grooves are formed in the pitch board. FIG. 5 is an enlarged view of a portion B of FIG. FIG. 6 is a cross-sectional view of FIG.
It is sectional drawing about the C line.

In FIG. 1, reference numeral 1 denotes a polishing apparatus as a whole, and the polishing apparatus 1 is connected to a rotating shaft 1B of a driving motor 1A via a gear or the like (not shown) and is driven to rotate. The rotary table 4 includes a rotary table 4 and a disk-shaped pitch board 6 mounted on the upper surface of the rotary table 4. The pitching disc 6 is formed by melting a resin such as pitch or rosin to form a disc. On the surface of the pitching disc 6, grooves are formed concentrically in order to allow trapping of abrasives and polishing debris during polishing. 6A are formed.

The polishing apparatus main body 3 includes a material A to be polished.
Material holding device 8 for holding the wafer and abutting it on the pitch plate 6 for polishing, and forming a groove 6A on the upper surface of the pitch plate 6 worn by the polishing operation to maintain the function of the groove. An apparatus 10 is provided.

The polished material holding device 8 has two holding rod members 8B fixed to the polished material holding device main body 8A.
A rotating roller 8C is provided at the tip of the rotating roller 8C, and the rotating roller 8C is rotatably fitted in a guide groove (not shown) provided on the outer periphery of the ring-shaped material to be polished 8D. ing. Then, the material A to be polished is fixed and held in the ring of the material to be polished fixing member 8D by a known fixing means such as a screw, and the pitch plate 6 is rotated to abut on the pitch plate 6, whereby the material to be polished is fixed. The material-to-be-polished fixing member 8D holding the polishing material A rotates on its own via a rotating roller 8C to polish.

On the other hand, the groove forming apparatus 10 includes the polishing apparatus main body 3.
Above, two stopper members 12A and 12B fixedly provided at both ends with the diameter of the pitch disc 6 interposed therebetween, and a pitch disc so as to cross the pitch disc 6 near the center of rotation of the pitch disc. The groove forming rod member body 2 having a substantially cylindrical shape and movably mounted on the upper surface of the groove 6 and the supporting members 2A and 2B at both ends of the groove forming rod member body 2 are detachably mounted. And a weight member 16 for applying an unbalanced load to the rod body 2.

That is, the groove forming apparatus 10 is used for the pitching machine 6
A groove-forming rod member body 2 having a length slightly larger than the diameter of the groove-forming rod member body, a plurality of groove-forming rings 14 inserted through the groove-forming rod member body 2, and the groove-forming rod member body 2
Are formed by stopper members 12A and 12B that support the supporting members 2A and 2B at both ends. As shown in FIGS. 2 and 3, the groove forming rod member main body 2 is provided with support recesses 12 formed in stopper members 12A and 12B.
By inserting the support members 2A and 2B at both ends of the groove forming rod member main body 2 into C and 12D, the groove forming rod is brought into contact with the support members 2A and 2B when the pitching machine 6 rotates. Although the member main body 2 cannot move in the rotation direction of the pitching machine 6, it moves up and down in a direction perpendicular to the upper surface of the pitch board 6, and rotates around the axis of the groove forming rod member main body 2 (ie, self-rotation). ) Is possible. In addition,
In the case of the present embodiment, the support recesses 12C and 12D are provided in the stopper members 12A and 12B, and the support members 2A and 2B at both ends of the groove forming rod member main body 2 are fitted. However, the present invention is not limited to such a structure. For example, although not shown, the stopper members 12A, 12B are connected to the support members 2A,
A structure in which the groove forming rod member main body 2 does not rotate together with the pitching machine 6 by abutting on the rotation direction of the pitching machine 6 with 2B may be used.

As shown in FIGS. 4 and 5, the groove forming rod member main body 2 has a half of the portion in contact with the pitch board surface of the groove forming rod member body in the longitudinal direction.
(That is, 1 / １ ／ of the approximate diameter of the pitch board 6).
2), a plurality of groove forming rings 1
4 are inserted and fixed at regular intervals.

In this case, the shape of the groove forming ring 14 is
As shown in FIG. 5, the inner diameter R is slightly larger than the outer diameter r of the substantially cylindrical portion of the groove forming rod member body 2 so as to be inserted into the groove forming rod member body, and the width L is The thickness T of the groove forming ring 14 is set to about 0.1 to 3 mm corresponding to the groove width l, and corresponds to the groove depth s (corresponding to the outer diameter of the ring).
Is preferably about 0.1 to 5 mm. Further, the shape of the groove forming ring 14 is a substantially disk-shaped ring shape in which an insertion hole is formed at the center thereof, and the radial surface F of both surfaces thereof is 45 degrees or less with respect to the radial direction. It is desirable to have a shape like a solo ban ball that forms a tapered inclined surface. This is because, when the inclined surface F is a tapered inclined surface that exceeds 45 degrees with respect to the radial direction, when the pitch surface is pressed against the pitch surface, the surface F in the radial direction is applied to the pitch surface. This is because the groove cannot be formed.

Further, as shown in FIG. 6, the groove forming ring 14 is fixed to the groove forming rod member body 2 by providing a spot facing portion 14A on the groove forming ring 14 and threading. It is preferable that the ring is fixed by screws 14B so that the ring can be removed and the position can be freely moved. This makes it possible to variously change the shape, interval, and the like of the grooves formed on the surface of the pitch board according to the material to be polished, the size of the pitch board, and the like.

On the other hand, the support member 2 of the groove forming rod member body 2
As shown in FIG. 7, a plurality of screw holes 15 are formed in the vicinity of both ends of A and 2B.
6 through the support members 2A and 2B,
The weight member 16 is configured to be detachably attached to the support members 2A and 2B by tightening the mounting screw 17 provided on the weight member 16.

The shape of the grooved rod member body 2 is substantially cylindrical, but is formed in a tapered shape whose diameter decreases toward the center in the axial direction. It is preferable to press the surface on which the material is to be formed so as to make the surface flat, and the reduction ratio is such that the diameter of the rod center portion of the groove forming rod member body 2 is such that the groove forming rod member body which is in contact with both ends of the pitch machine. 2 0 to 1/20 of the diameter of both ends
It is preferable to make it thinner.

The material of the groove forming rod member body 2 and the groove forming ring 14 is not particularly limited, but a metal material such as stainless steel having excellent corrosion resistance and abrasion resistance, or glass, alumina, etc. What is necessary is just to select according to the material of the pitch board 6, such as a nonmetallic material, such as.

A polishing method and a groove forming method for polishing a material to be polished using the polishing apparatus having the above-described configuration will be described below. First, a molten pitch material is poured into a mold, cooled and solidified, and mounted as a disk-shaped pitch disk 6 on the upper surface of the rotary table 4. Then, the supporting recesses 12 of the stopper members 12A and 12B are moved so that the groove forming rod member body 2 crosses the vicinity of the rotation center of the pitching machine 6.
After the support members 2A and 2B are fitted movably by fitting the support members 2A and 2B into C and 12D, the unbalanced weight member 16 is attached to both ends of the groove forming rod member body 2, that is, the support members 2A and 2B. I do. As a result, the groove forming rod member main body 2 is moved in the rotation direction of the pitch board 6 with the stopper members 1A,
1B, the groove forming rod member body 2 is
In order to make the surface of the pitch board softer so as not to rotate with it, the top face of the pitch board 6 is slowly rotated while sprinkling warm water which is appropriately warm.

As a result, as shown in FIG. 2, the heavier weight of the groove forming rod member body 2 on the side to which the groove forming ring 14 is attached (the F side in FIG. 2, ie, the stopper On the side of the member 12A), the groove forming rod member main body 2 rotates in the same direction E as the moving direction (rotation direction) D of the surface of the pitching machine 6 (down rolling). On the other hand, on the opposite side where the load is light (G side in FIG. 2, that is, on the stopper member 12B side), the rotation is made in the direction H opposite to the moving direction D of the surface of the pitcher 6 (upper rolling). As a result, the groove forming rod member body 2 rotates about the longitudinal axis, and the groove forming ring 14 is pressed against the surface of the pitch plate 6 by the heavier weight of the groove forming rod member body 2. In other words, the groove 6A is formed in the pitch board 6 by the pressing of the groove forming ring 14, and is gradually deepened.

At this time, since the groove forming rod member body 2 is supported by the entire diameter of the pitching machine 6, the groove forming ring 1
Due to the load applied to the groove 4, the grooves 6A formed on the surface of the pitching machine 6 are formed concentrically at a predetermined position by the number of the groove forming rings 14.

By the way, the surface of the pitch board 6 is initially uneven due to the pitch material pushed up by the groove forming ring 14, but the groove forming ring 14 has a thickness corresponding to its thickness. After sinking, the load applied to the groove forming rod member body 2 comes into contact with the pitch plate 6 and is applied to the pitch plate 6 in the entire groove forming rod member body 2. Will be flattened.

Thereafter, after the surface of the pitch board 6 becomes flat, the spraying of hot water is stopped and the operation is switched to a polishing liquid, and an operation is performed. For example, an optical crystal such as KNbO ₃ or an optical glass is replaced with a cylindrical stainless steel. A polishing sample is prepared by fixing it to the lower surface of the block made of hot melt with a hot-melt adhesive, held in the material-to-be-polished holding device 8 and brought into contact with the pitch plate 6 for polishing. Since no cutting powder is generated and no foreign matter is mixed into the polishing liquid at all, no minute scratches are generated on the polished surface of the material to be polished, so that precise and highly accurate polishing can be performed.

In the present embodiment, the material to be polished was polished after forming the groove of the pitch disc 6, but the polishing of the material to be polished was performed while forming the groove of the pitch disc 6. Of course, it can be performed simultaneously.

Also, by making the weight member 16 on the right side, that is, the weight member 16 on the side of the stopper member 12B, heavier, the portion of the groove forming rod member body 2 where the groove forming ring 14 is not mounted (FIG. 4). The right half of the pitch disk 6 is brought into contact with the upper surface of the pitch disk 6 so that the material to be polished is polished simultaneously with the dressing of the upper surface of the pitch disk 6 (the upper surface of the pitch disk 6 worn by the polishing operation is polished and its flatness is adjusted) It is also possible to perform

[0042]

EXAMPLE 1 A stainless steel round bar having a diameter of 30 mm and a length of 35 cm was placed in a longitudinal direction using a lathe such that the diameter at the center in the longitudinal axis direction was 0.6 mm smaller than the diameter at both ends. It was cut into a tapered shape to obtain a groove forming rod member body. At both ends, screw processing was performed so that the weight could be attached using attachment screws attached to a ring-shaped weight.

The groove forming ring is made of aluminum and has a width of 3 mm.
mm, thickness 3 mm, inner diameter 30.2 mm, the outer shape of which is shaped like a solo bang with both surfaces in the radial direction having a surface inclined at a taper of about 45 degrees to the radial direction. . This groove forming ring was inserted into the groove forming rod member main body, and was fixed with screws at 0.7 mm intervals, and a total of 12 groove forming rings were attached.

On the other hand, a pitch material made of asphalt is melted, poured into a mold frame, cooled and solidified, and has a diameter of 30 cm.
m. This was mounted on a rotary table of a polishing apparatus.

The groove forming rod member main body was placed on a pitch plate so that both ends of the rod forming main body were accommodated between stoppers provided at two positions diametrically opposed outside the rotary table in advance. In addition,
At this time, the weight members at both ends of the groove forming rod member main body were removed, and only the own weight of the groove forming rod member main body 2 was set.

Next, in order to soften the surface of the pitch board, the pitch board is slowly rotated at a low speed while spraying hot water on the pitch board. Start rolling over. At this time, the groove forming rod member main body 2 was in an unstable rotation with a large amount of shaking because only the portion where the groove forming ring was attached was in contact with the pitch board.

If the groove forming rod member body continues to rotate for a while under its own weight only, the rut of the shallow groove forming ring is concentrically formed at the position pressed against the surface of the pitch board by the groove forming ring. It was confirmed that 12 were made. From this state, the weight members were gradually added to both ends of the groove forming rod member main body. At this time, a little more weight member was attached to the side where the groove forming ring was attached. After the weight member was added, the groove forming rod member body continued to rotate in an unstable manner with a large swing while tilting to a direction where the groove forming ring was not attached.

At this time, the groove forming rod member main body is placed on the side with the larger load, that is, the side on which the groove forming ring is attached,
It does down rolling and is dragged by the pitch board surface at that time, but stops by contacting the stoppers at both ends and rotates about the longitudinal axis. Also, concentric grooves were formed on the surface of the pitch board while the aluminum groove forming ring continued to bite into the pitch board.

After a while, a groove having a depth of about 3 mm corresponding to the thickness of the groove forming ring began to bite into the surface of the pitch board, and the entire surface of the opposite side where the groove forming ring was not attached was also pitched. By contact with the surface of the board, the inclination of the groove forming rod member body became almost horizontal, and the rotation became stable without fluctuation, and the surface became flat along with the groove formation. After the surface of the pitch board was finished to an almost ideal surface, spraying of hot water was stopped, and the operation was switched to a polishing liquid and then leveled.

Thereafter, a single crystal of KNbO ₃ , which is an optical crystal, was fixed to the lower surface of a cylindrical stainless steel block with a hot melt adhesive to prepare a polished sample. this,
Using a polishing apparatus as shown in FIG. 1, polishing was performed by holding a polished surface of KNbO ₃ on a pitch board while holding the polished material holding device.

As a result, it was confirmed that the single crystal of KNbO ₃ had good flatness of the polished surface and no scratch was generated.

[0052]

According to the polishing apparatus, the polishing method, and the groove forming method of the present invention, the present invention is an extremely excellent invention having the following remarkable and unique effects. (1) In the present invention, instead of a conventional cutting method using a cutting tool, a groove for forming a groove on the surface of a pitch machine is formed by rotating and pressing a ring for forming a groove to form a groove on the surface of a pitch machine. Such cutting powder is not generated, and no foreign matter is mixed into the polishing liquid, so that the groove forming operation of the pitch board can be performed. Therefore, no minute scratches are generated on the polished surface of the material to be polished, and precise and high-precision polishing can be performed. (2) The fixing of the groove forming ring to the groove forming rod member main body is configured such that the ring can be removed and the position can be freely moved. It is possible to variously change the shape, interval, and the like of the grooves formed on the pitch board surface. (3) Moreover, since the groove forming ring is brought into contact with the upper surface of the pitch board and pressed and rotated, concentric grooves can be formed on the upper surface of the pitch board by the groove forming ring, and the grooves can be formed by polishing work. Even when the shape changes and the groove becomes shallow and the groove width gradually narrows, the groove can be modified and formed easily and quickly. (4) The pitch material is changed depending on the material to be polished.
The groove spacing may be adjusted accordingly, but the groove spacing also affects the accuracy of the polished surface together with the shape of the groove on the pitch board surface.In the present invention, the groove forming ring is Since it is fixed with screws, the intervals can be adjusted freely and accurately on a scale, and precise and high-precision polishing can be performed. (5) Polishing of the material to be polished may be performed after forming the groove of the pitch disk, and the polishing of the material to be polished may be performed simultaneously while forming the groove of the pitch disk. (6) The dressing of the upper surface of the pitch disc is performed simultaneously with the polishing of the material to be polished by bringing a portion of the groove forming rod member body on which the groove forming ring is not mounted into contact with the upper face of the pitch disc. Is also possible.

[Brief description of the drawings]

FIG. 1 is a perspective view showing the entire polishing apparatus of the present invention.

FIG. 2 is a partial perspective view of FIG.

FIG. 3 is a plan view of FIG. 2;

FIG. 4 is a partially enlarged sectional view taken along line AA of FIG. 3;

FIG. 5 is an enlarged view of a portion B in FIG. 4;

FIG. 6 is a sectional view taken along line CC of FIG. 5;

FIG. 7 is a cross-sectional view illustrating a combined state of the groove forming rod member main body and the weight member of the polishing apparatus of the present invention.

FIG. 8 is a perspective view of a conventional polishing apparatus.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Polishing device 2 ... Groove forming rod member main body 2A, 2B ... Support member 3 ... Polishing device main body 4 ... Rotary table 6 ... Pitch board 6A ... Groove 8 · · · Polishing material holding device 8B · · · Holding rod member 8C · · · Roller roller 8D · · · · Polishing material fixing member 10 · · · Groove forming device 12A, 12B · · · Stopper members 12C, 12D · · ·.・ Support recess 14 ・ ・ ・ Groove forming ring 16 ・ ・ ・ Weight member A ・ ・ ・ Material to be polished

Claims (12)

[Claims] 1. A pitch forming apparatus for a pitch machine, comprising: a rotary table on which a disk-shaped pitch board can be placed and driven to rotate; and a groove forming mechanism for forming a concentric groove on an upper surface of the pitch board. The groove forming mechanism includes a substantially cylindrical groove forming rod member main body, and a plurality of groove forming rings inserted in the groove forming rod member body so as to be detachable and positionally movable. The groove forming rod member body with the forming ring inserted
A groove forming rod member main body is mounted movably on the upper surface of the pitch board so as to cross the vicinity of the center of rotation of the pitch machine by a stopper member fixedly connected to a groove forming device main body of the pitch machine. Rolling is suppressed on the upper surface, and the groove forming ring of the groove forming mechanism is brought into contact with the upper surface of the pitch board, and is configured to form a groove concentrically while rotating by pressing. Groove machine for pitch machine. 2. The pitch machine according to claim 1, further comprising a weight member which is detachably attached to both ends of the groove forming rod member main body and applies a partial load to the groove forming member. Groove forming equipment. 3. A structure in which the groove forming rod member body is brought into contact with the upper surface of the pitch board, and is pressed and rotated to flatly grind the polished surface worn by polishing the upper face of the pitch board. The pitch forming groove forming apparatus according to claim 1 or 2, wherein: 4. A polishing apparatus for polishing a material to be polished, comprising: a rotary table driven to rotate; a disk-shaped pitch disk mounted on an upper surface of the rotary table and rotated together with the rotary table; A polishing object holding device that holds the material to be polished while being in contact with the upper surface of the pitch plate, and a groove forming device that forms concentric grooves on the upper surface of the pitch plate. The groove forming apparatus includes a substantially cylindrical groove forming rod member main body, and a plurality of groove forming rings that are detachably and movably inserted through the groove forming rod member body. The groove forming rod member body with the groove forming ring inserted
The groove forming rod member body rolls on the pitch board upper surface by a stopper member fixedly attached to the polishing apparatus body while being movably mounted on the pitch board upper surface so as to cross the vicinity of the rotation center of the pitch board. The polishing apparatus is characterized in that a groove forming ring of the groove forming apparatus is brought into contact with the upper surface of the pitch board, and the grooves are formed concentrically while being pressed and rotated. 5. The polishing apparatus according to claim 4, further comprising a weight member which is detachably attached to both ends of the groove forming rod member main body and applies a partial load to the groove forming member. . 6. A structure in which the groove forming rod member body is brought into contact with the upper surface of the pitch board, and is pressed and rotated to flatly grind the polished surface worn by the polishing of the upper face of the pitch board. The polishing apparatus according to claim 4 or 5, wherein 7. A rotary table driven to rotate, a disk-shaped pitch disk mounted on the rotary table upper surface and rotating with the rotary table, and holding the material to be polished, and bringing the material to be polished into contact with the upper surface of the pitch disk. A polishing method for polishing a material to be polished by using a polishing apparatus comprising a material to be polished and a device for polishing to be polished, comprising: a substantially cylindrical groove forming rod member body of the groove forming apparatus; A plurality of groove forming rings are detachably inserted and fixed so as to be movable, and the groove forming rod member body through which the groove forming ring is inserted,
While being movably mounted on the top surface of the pitch board so as to cross the vicinity of the center of rotation of the pitch board, it is brought into contact with a stopper member fixedly attached to the main body of the polishing apparatus, and the pitch board is rotated. The groove forming ring is brought into contact with the upper surface of the pitch board, and the groove is formed concentrically while being pressed and rotated. The material to be polished is brought into contact with the upper face of the pitch board by the polishing material holding device and polished. And polishing method. 8. The polishing method according to claim 7, wherein an unbalanced weight member is mounted on both ends of the groove forming rod member main body to perform polishing. 9. The polished surface worn by the polishing of the upper surface of the pitch plate is flatly polished by bringing the groove forming rod member body into contact with the upper surface of the pitch disk and rotating by pressing. The polishing method according to 7 or 8. 10. A substantially columnar groove using a pitch disk groove forming device comprising a rotary table driven to rotate and a disk-shaped pitch disk mounted on the upper surface of the rotary table and rotating together with the rotary table. A plurality of groove forming rings are removably and removably inserted into and fixed to the forming rod member body, and the groove forming rod member body through which the groove forming ring is inserted,
While movably mounted on the upper surface of the pitch board so as to traverse the vicinity of the center of rotation of the pitch board, abut against a stopper member fixedly attached to the groove forming device body of the pitch board,
A method of forming a groove in a pitch machine of a polishing machine, comprising: rotating a pitch machine, bringing a groove forming ring of the groove forming device into contact with an upper surface of the pitch machine, and forming a groove concentrically while pressing and rotating. . 11. The groove forming method for a pitch machine according to claim 10, wherein an unbalanced weight member is attached to both ends of the groove forming rod member body to form the groove. 12. The polishing method according to claim 12, wherein the groove forming rod member body is brought into contact with the upper surface of the pitch board, and is pressed and rotated to flatten the polished surface worn by the polishing of the upper face of the pitch board. 12. The groove forming method for a pitch board according to 10 or 11.