JPH1054369A - Control device for vacuum pump - Google Patents

Abstract

PROBLEM TO BE SOLVED: To make a plurality of sets of vacuum pumps quickly controllable, also between some vacuum pump controller and any of network control units, even if a wire break, controller trouble and noise mixing may happen, so that the other vacuum pump can be normally controlled. SOLUTION: In a control device of a vacuum pump for controlling operation of a plurality of sets of the vacuum pumps, a host computer 4, a plurality of sets of vacuum pump use controllers 2 connected to each of a plurality of sets of the vacuum pumps and a network control unit 3 relaying the host computer 4 with a plurality of sets of the vacuum pump use controllers 2 are provided. The network control unit 3 and a plurality of sets of the vacuum pump use controllers 2 are connected in parallel by a communication line of quantity corresponding to a number of sets of the vacuum pump use controllers 2.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a control device for a vacuum pump, and more particularly to a control device for a plurality of vacuum pumps comprising at least one of a cryopump, a turbo molecular pump, a cryo-turbo pump and a dry pump. The present invention relates to a vacuum pump control device capable of performing control.

[0002]

2. Description of the Related Art Generally, a cryopump is 60 to 80 mm.
In the first cryopanel cooled to K, water and the like are condensed, and in the second cryopanel cooled to 10 to 20K, nitrogen gas (N ₂ ) and argon gas (A
r) and the like, and hydrogen gas (H ₂ ) etc. which is not condensed at 10-20K is adsorbed at low temperature by an activated carbon layer or the like mounted on the second cryopanel. Semiconductor manufacturing such as sputtering equipment and implantation equipment It is used to make the inside of the vacuum chamber of the apparatus a high vacuum state.

In the above-described semiconductor manufacturing apparatus, a plurality of cryopumps are usually installed, and it is necessary to simultaneously control the operation of the plurality of cryopumps. In particular, since a cryopump is a storage-type vacuum pump, regeneration (condensation or release of adsorbed gas) is required after a certain period of time, and regeneration of a plurality of cryopumps needs to be controlled.

In addition, turbo molecular pumps, dry pumps,
A cryo-turbo pump and the like are also used for the same purpose although the principle is different. Recent semiconductor manufacturing equipment has a plurality of vacuum chambers, and different types of vacuum pumps may be selected depending on the process conditions and the like of the vacuum pump in each chamber. It is necessary to monitor and control the vacuum pump. At that time, it was necessary to install controllers for various vacuum pumps by the required number and connect them to the control device of the semiconductor manufacturing apparatus.

[0005]

As a method for controlling a plurality of vacuum pumps, it is conceivable to apply a daisy chain communication network, which is a kind of computer network. That is, a network control unit (network controller) connected to the host computer
l unit) to one vacuum pump controller that controls the cryopump, and apply a system in which this controller and each subsequent vacuum pump controller that controls each vacuum pump are connected in series. It is. This method has an advantage that a long cable is required to be a minimum when the network control unit and the vacuum pump controller are installed separately from each other, or when the vacuum pump controllers are installed separately from each other.

However, the daisy chain communication network has a problem that communication and control take time because commands from a host computer or a network control unit cannot be simultaneously executed for a plurality of vacuum pump controllers.

Further, if a communication line is disconnected or a failure or failure of the controller occurs at any point on the path from the network control unit to the last vacuum pump controller, the downstream side of the disconnection point. Alternatively, there is a problem that the vacuum pump downstream of the controller in which the failure or failure has occurred cannot be controlled. Further, even when noise is mixed in the middle of the communication line, similarly, there is a problem that the downstream vacuum pump cannot be accurately controlled.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and enables rapid control of a plurality of vacuum pumps such as a cryopump and disconnection between a network control unit and a vacuum pump controller. It is an object of the present invention to provide a vacuum pump control device that can normally control another vacuum pump even if there is a failure of a controller or a controller or noise is mixed.

Further, the present invention provides a vacuum pump in which a plurality of vacuum pumps can be controlled by one multi-pump controller, and in which a plurality of types of vacuum pumps can be controlled by one multi-pump controller. It is an object of the present invention to provide a control device.

[0010]

According to a first aspect of the present invention, there is provided a vacuum pump control device for controlling the operation of a plurality of vacuum pumps, comprising: a host computer; A plurality of vacuum pump controllers connected to each of the plurality of vacuum pumps, and a network control unit for relaying the host computer and the plurality of vacuum pump controllers, wherein the network control unit and the plurality of vacuum pumps are connected. The pump controller is characterized by being connected in parallel by the number of communication lines corresponding to the number of vacuum pump controllers.

According to the first aspect of the present invention, the network control unit and the plurality of vacuum pump controllers are connected in parallel by the number of communication lines corresponding to the number of vacuum pump controllers. Since the network control unit can simultaneously control a plurality of vacuum pump controllers, a command from the host computer or the network control unit immediately reaches each vacuum pump controller, and can quickly control each vacuum pump.

Further, according to the present invention, even if there is a disconnection between the network control unit and a certain vacuum pump controller, a failure of the controller, or the entry of noise, the other vacuum pump controllers are affected. However, other vacuum pumps can be controlled normally.

According to a second aspect of the present invention, there is provided a vacuum pump control device for controlling the operation of a plurality of vacuum pumps, comprising a host computer and one multi-pump connected to the plurality of vacuum pumps. With a controller,
A plurality of vacuum pumps are controlled by the multi-pump controller.

According to the second aspect of the present invention, a plurality of vacuum pumps can be monitored and controlled by one multi-pump controller, and the number of pumps to be used can be reduced by modularization of a pump interface. Accordingly, it is possible to monitor and control a plurality of vacuum pumps with minimum necessary hardware. The pump interface module is provided with a turbo molecular pump other than a cryopump, a dry pump, a cryogenic turbo pump, and monitors and controls a plurality of and a plurality of kinds of vacuum pumps by one multi-pump controller,
The control device of the semiconductor manufacturing apparatus can monitor and control a plurality of vacuum pumps and a plurality of types of vacuum pumps only by exchanging information with the multi-pump controller.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the first embodiment of the control device for a vacuum pump according to the present invention will be described below with reference to FIGS. FIG. 1 is a block diagram showing the basic concept of the first embodiment of the present invention. As shown in FIG. 1, a cryopump 10 is connected to each of a plurality of vacuum chambers 1 of a semiconductor manufacturing apparatus such as a sputtering apparatus. Each cryopump 10 is connected to a vacuum pump controller 2, and various operations of the cryopump 10, for example, start / stop, regeneration start, and the like are controlled by the vacuum pump controller 2. A dry pump such as a roots vacuum pump for assisting vacuum evacuation is connected downstream of the cryopump (not shown).

The plurality of vacuum pump controllers 2 include:
The number of RS- corresponding to the number of vacuum pump controllers
It is connected in parallel to the network control unit 3 by a 232C cable. The network control unit 3 is connected to a host computer 4 of the semiconductor manufacturing device via an RS-232C cable.

The network control unit 3
It has a so-called relay function of relaying a command signal from the host computer 4, for example, start / stop, regeneration start, etc., to each vacuum pump controller 2 and transmitting a signal from each vacuum pump controller 2 to the host computer 4. doing. Further, the network control unit 3 has a control function of setting and changing control variables for each cryopump for operating each cryopump 10, and also displays a state display such as an operation state of each cryopump 10 and a temperature, a pressure, etc. Has a display function of displaying the state value of Here, the operating state refers to starting, stopping, regenerating, and the like. Further, the network control unit 3 also has a maintenance function of integrating the operation time of each cryopump 10 and determining the timing of regeneration or maintenance of the cryopump, and manually operating devices such as valves of each cryopump 10. It has a manual operation function to operate with.

Further, the network control unit 3
, A remote controller 5 can be connected. The remote controller 5 can set and change the control variables for the vacuum pump.

Next, the detailed structure of the network control unit 3 will be described with reference to FIG. FIG. 2 shows a relationship between a block diagram of one board in the network control unit 3 (portion surrounded by a chain line) and peripheral devices. In the network control unit 3, a device indicated by an alternate long and short dash line in the drawing is provided in one board for simultaneously executing a plurality of controls of the respective vacuum pump controllers 2. 5 is connected.

The one-chip CPU 101 has a bus 103
Connected to a plurality of external communication devices 104, a nonvolatile memory 105, and an input / output device 106. The external communication device 104 is connected to the vacuum pump controller 2 by a communication line 102. Normally, since the external communication device 104 has two communication lines 102, one external communication device can be connected to two vacuum pump controllers 2. Therefore, the number of built-in external communication devices 104 is determined by the number of cryopumps 10 required as devices. The input / output device 106 includes a switch 107, a light emitting diode 108, a liquid crystal display 1
09 is connected.

First, power is supplied to the network control unit 3 from a power cord (not shown), and when the ON button of the switch 107 is pressed, the one-chip CPU 1
01 reads from the nonvolatile memory 105 the set values such as control variables for the function of the network control unit 3.

The command signal transmitted from the host computer 4 or the remote controller 5 via the communication line 102 is processed in the one-chip CPU 101 and
3. It is transmitted to each vacuum pump controller 2 via the external communication device 104 and the communication line 102. At this time, if the target pumps are different even if a plurality of command signals are congested, each vacuum pump controller 2
At the same time in parallel. A signal from each vacuum pump controller 2 is transmitted to the host computer 4 through a reverse communication procedure. When setting or changing control variables for each cryopump for operating each cryopump 10, the input is input by a switch 107 having a keyboard function, and this input signal is sent from the bus 103 through the input / output device 106. After being processed by the one-chip CPU 101, it is also sent from the external communication device 104 to each vacuum pump controller 2 via the bus 103.

Here, the setting and the change can be input from the host computer 4 or the remote controller 5. The state display such as the operation state of each cryopump 10 and the state value display such as the temperature and pressure inside the cryopump 10 are performed via the communication line 102, the external communication device 104, and the bus 10 via the vacuum pump controller 2 from each cryopump 10.
3. Displayed by the liquid crystal display 109 and the light emitting diode 108 through the one-chip CPU 101, the bus 103, and the input / output device 106. The same display can be performed by the remote controller 5.

The network control unit 3
The operation time of each cryopump 10 is calculated by a timer built in the one-chip CPU 101, and the one-chip C
The reproduction timing and maintenance timing are determined by the PU 101, and the result is displayed on the liquid crystal display 109.
It has a maintenance function that can be displayed on the display.

The network control unit 3 has a manual operation function for manually starting / stopping, starting reproduction, and opening / closing devices such as a main body or a valve of each cryopump 10 by operating a switch 107. doing. The remote controller 5 excludes a so-called relay function of transmitting a signal from the host computer to the cryopump or transmitting a signal from the cryopump to the host computer among functions of the network control unit 3. Since the remote controller 5 has all the functions, it can be used very conveniently as a system by installing the remote controller 5 in a place with good operability, that is, a place where the operator can operate at any time.

Next, the communication line 102 and its peripheral devices will be described with reference to FIG. FIG. 3 shows the network control unit 3 on the left and the host computer 4 or the vacuum pump controller 2 on the right. As described above, the one-chip CPU 101 is provided in the network controller 3.
Are connected to an external communication device 104 via a bus 103. Communication is performed from an external communication device 104 including an RS-232C driver through a connector 110 via a communication line 102 including an RS-232C cable. On the other hand, a CPU 116, an external communication device 114, and a connector 112 are also provided in the host computer 4 or the vacuum pump controller 2, and are connected to the communication line 102 formed of an RS-232C cable.

In the above configuration, transmission and reception (cable) are physically independent in RS-232C communication, as is apparent from FIG. 3, so that full-duplex communication (transmission and reception are performed simultaneously). Communication efficiency can be increased. Therefore, it is preferable to use an RS-232C cable as the communication line 102. Further, it is not necessary to provide one vacuum pump controller 2 for each cryopump 10 and control it. In consideration of more space saving, it is preferable that the vacuum pump controller also controls a plurality of vacuum pumps.

Next, the network control unit 3
The function will be described using the front panel. FIG. 4 is a front view showing a front panel of the network control unit 3. On the front panel are a liquid crystal display 109, a power switch 200, a light emitting diode 10
8. The switch 107 is arranged. Switch 107
Has a mode select switch, a pump select switch, an enter switch, and an arrow switch. For example, when the monitor mode is selected by the mode select switch, the mode select switch is pressed, and the light emitting diode 108 on the left side of the monitor is turned on. However, the monitor mode is always selected in the initial state. In this mode, it is possible to determine the temperature and pressure values of the cryopump selected by the liquid crystal display 109 and whether the cryopump is operating, stopped, or being regenerated. If you want to change the cryopump you want to monitor, press the pump select key and then press the arrow keys to monitor another cryopump. Next, when it is desired to select the control mode, when the mode select switch is pressed again, the light emitting diode 108 on the left side of the control lights up and is selected. In this mode, the selected cryopump can be manually turned on and off.

In the next regeneration mode, the regeneration of the selected cryopump can be manually turned ON and OFF. The above two commands can be executed by pressing the enter switch. In the next configuration mode, control parameters and regeneration parameters of the selected cryopump can be set. The change of the numerical value is performed by the arrow switch, and the execution is confirmed by pressing the enter switch. Finally, in the maintenance mode, the purge valve and the roughing valve attached to the selected cryopump can be manually opened and closed, and the operation time of the vacuum pump and the time from regeneration can be set and displayed.

The above description is based on the RS-232C communication line.
In this embodiment, only the distance between the host computer 4 and the vacuum pump controller 2 is 3
If it is more than 0 m away, communication may not be possible. Alternatively, when the network control unit 3 and the vacuum pump controller 2 are far apart, a plurality of communication lines are connected over a long distance, which is complicated. FIG. 5 shows a second embodiment of the first aspect of the present invention. In the present embodiment, the external communication device 104 in one board in the network control unit 3
Are collected in another board, that is, in the distributor 300. Between the network control unit 3 and the distributor 300, for example, RS-48
5 is being communicated. With this configuration, communication is possible even if the distance between the host computer and the vacuum pump controller is 30 m or more, and if the distributor 300 and the vacuum pump controller 2 are installed at a short distance, the communication line becomes It is not complicated. Then, the same effects as those of the embodiment shown in FIG. 1 can be obtained.

Next, the detailed structure of the cryopump 10 and its peripheral devices will be described with reference to FIG. As shown in FIG. 6, the cryopump 10 includes a refrigerator 71. The compressor unit 20 is connected to the refrigerator 71 via a pipe 21. The refrigerator unit 71 includes an expander 72 that moves up and down by the expander motor 30 inside.
The first-stage expansion section 73 and the second-stage expansion section 74 adiabatically expand the normal-temperature and high-pressure working gas (helium (He) gas) from the compressor unit 20 to generate an extremely low temperature. Symbol 72-
Reference numerals 1 and 72-2 denote a first-stage seal portion and a second-stage seal portion of the expander 72, respectively.

A first-stage cryopanel 16 is provided on the upper end of the first-stage expansion portion 73 via a heat conducting element 15.
The second-stage cryopanel 17 is directly attached to the second-stage expansion portion 74.

The periphery of the first-stage expansion portion 73 and the second-stage expansion portion 74 of the refrigerator 71 is surrounded by a casing 18, and the upper end of the casing 18 is connected to the vacuum chamber 1 shown in FIG. ing.

In the cryopump having the above structure, the high-pressure working gas from the compressor unit 20 is supplied to the refrigerator 71, and the working gas is opened and closed in conjunction with the vertical movement of the expander 72 (not shown). And is adiabatically expanded in the first stage expansion portion 73 and the second stage expansion portion 74 to generate a low temperature. The expanded working gas is sent to the expander motor 30 through a flow path (not shown), and after cooling the expander motor 30, the compressor unit 2
0, compressed and subjected to oil separation and other processing.
The high-pressure working gas is supplied to the refrigerator 71 again. The low temperature generated in the first-stage expansion unit 73 and the second-stage expansion unit 74 cools the first-stage cryopanel 16 and the second-stage cryopanel 17.

By cooling the first cryopanel 16 and the second cryopanel 17 as described above,
Water in the vacuum chamber 1 is mainly condensed on the surface of the first cryopanel 16, and argon gas (Ar) or nitrogen gas (N ₂ ) is mainly condensed on the surface of the second cryopanel 17. Hydrogen gas (H ₂ ) is adsorbed on the activated carbon layer formed on the back surface of the second cryopanel 17 at a low temperature. Thereby, the gas in the vacuum chamber 1 is exhausted. Here, one characteristic function of the vacuum pump controller 2 will be particularly described.

Reference numeral 32 denotes a temperature sensor for detecting the surface temperature of the first-stage cryopanel 16, and the detection output is input to the control means 2 A of the vacuum pump controller 2. The control means 2A outputs a command for controlling the rotation speed of the expander motor 30 to the expander driving means 2B so that the surface temperature of the first-stage cryopanel 16 is maintained at a predetermined set temperature. The means 2B controls the rotation speed of the expander motor 30 based on this command. With this function, the temperature of the first-stage cryopanel 16 is kept constant, so that a stable exhaust function can be obtained.

In addition to the above functions, the vacuum pump controller 2 has a regeneration control function. In the regeneration process, after confirming that the valve (not shown) between the vacuum chamber 1 and the cryopump 10 is closed, the vacuum pump controller 2 stops the cryopump 10, turns on the barge heater 36, and turns on the barge valve 38. Is opened, and the inside of the cryopump is heated and pressurized. First
Heater 4 attached to step expansion section 73 and second step expansion section 74
4 and 46 are also turned on to heat the inside of the cryopump 10. When the pressure of the cryopump 10 becomes equal to or higher than the atmospheric pressure, the open / close type relief valve 41 is automatically opened, and the gas in the cryopump 10 is discharged. The temperature at the time of reproduction is controlled by the temperature sensors 32 and 34 attached to the first cryopanel 16 and the second cryopanel 17, and the heaters 44 and 46 are turned off when the temperature exceeds a certain temperature.

When the sequence in the vacuum pump controller 2 ends the regeneration, the purge valve 38 is closed, the roughing valve 40 is opened, and the roughing pump (not shown) downstream of the roughing valve 40 is used. The cryopump 10 is roughly evacuated and the pressure drops. Here, when the pressure reaches a predetermined pressure (degree of vacuum), the roughing valve 40 is closed once to check whether the inside of the cryopump 10 has been completely regenerated. If regeneration is incomplete, the pressure in the cryopump 10 increases more than a predetermined value. In this case, roughing is repeated or regeneration is repeated. The pressure of the cryopump 10 is measured by a vacuum gauge 42.

If the regeneration is complete as described above, the vacuum pump controller 2 operates as the expander motor driving means 2B
Drives the cryopump 10. Of course, since the temperature inside the cryopump 10 is close to room temperature, the rotation speed of the expander motor 30 is maximum, and a quick cool down can be performed.

Further, the vacuum pump controller 2
Transmits the various states and state values of the cryopump 10 to the network control unit 3 as described above, and receives commands from the host computer 4 or the network control unit 3.

FIG. 7 is a block diagram showing a third embodiment of the first aspect of the present invention. As shown in FIG. 7, a cryopump 10 is provided in each vacuum chamber 1 of the semiconductor manufacturing apparatus.
At least one kind of vacuum pump is connected among a turbo molecular pump 11, a dry pump 12 composed of a roots-type vacuum pump, and a cryo-turbo pump 13. In the example shown in FIG. 1, the plurality of vacuum pumps are constituted by only one kind of vacuum pump only of a cryopump. However, in the present embodiment, the plurality of vacuum pumps are a cryopump, a turbo molecular pump, and a roots pump. It is composed of a plurality of types of vacuum pumps, such as a dry pump composed of a vacuum pump and a cryo-turbo pump. Each vacuum pump is connected to a vacuum pump controller 2. The control of each vacuum pump is the same as in the example shown in FIG. 1. Since the network control unit 3 can simultaneously execute a plurality of controls of each vacuum pump controller 2, a command from the host computer 4 or the network control unit 3 The controller immediately reaches the vacuum pump controller 2 and can quickly control each vacuum pump. A dry pump for assisting vacuum evacuation is connected downstream of the cryopump, the turbo-molecular pump and the cryo-turbo pump (not shown).

Next, a second embodiment of the control device for a vacuum pump according to the present invention will be described with reference to FIGS. FIG. 8 is a block diagram showing the basic concept of the second embodiment of the present invention. As shown in FIG. 8, a plurality of vacuum chambers 1 of a semiconductor manufacturing
0, a turbo molecular pump 11, a dry pump 12 composed of a roots type vacuum pump, and at least one kind of vacuum pump of a cryogenic turbo pump 13. Each of the vacuum pumps 10, 11, 12, and 13 is connected to a multi-pump controller 50, and the vacuum pumps 10, 11, and
Monitoring and control of the start and stop of the devices 12 and 13 are performed. In addition, a dry pump for assisting vacuum evacuation is connected downstream of the cryopump, the turbo-molecular pump and the cryo-turbo pump (not shown).

The multi-pump controller 50 is connected to the host computer 4 of the semiconductor manufacturing apparatus and the RS-232C
It is connected by a cable or RS-485, receives a command signal from the host computer 4, and starts / stops the connected pump, monitors the state, and performs various settings.
The multi-pump controller 50 has a function of transmitting and relaying a command signal from the host computer 4 to the turbo-molecular pump controller 14 and a function of controlling the turbo-molecular pump controller 14. That is, the multi-pump controller 50 has a transmission relay function and a control function to a connected external controller such as the turbo molecular controller 14 in the figure.

On the front surface of the multi-pump controller 50, display means such as an LED and an LCD, and input means using a switch are provided. That is, the multi-pump controller 50 has a manual operation function for monitoring and controlling each pump from the front of the apparatus. The multi-pump controller 50 includes a remote controller 5
Can be connected, and the same operation as the operation from the front of the multi-pump controller 50 can be remotely performed, which is convenient.

Next, the detailed structure of the multi-pump controller 50 will be described with reference to FIG. FIG. 9 shows a relationship between a block diagram in the multi-pump controller 50 and peripheral devices. The multi-pump controller 50 includes a bus 51, a CPU card 52 connected to the bus 51, a panel card 53, a cryopump card 54,
Turbo molecular pump card 55, dry pump card 56
And a cryo-turbo pump card 57.
The CPU card 52 includes a microprocessor, a memory,
It has a communication function and the like, and has a communication function with a host computer and a remote computer of a semiconductor manufacturing apparatus, and a control function of various cards connected by a bus 51. The panel card 53 includes an LCD, an LED, a switch, and the like, and has various input / output and display functions.

The cryopump card 54, the turbo molecular pump card 55, the dry pump card 56, and the cryo-turbo pump card 57 each have an input / output function and, if necessary, a power supply function to monitor the pump. And a control function. These cards are shown in Figure 1.
As shown by 0, the structure is such that it can be attached to and detached from the multi-pump controller 50, and the card is attached and detached according to the pump type and the number of pumps used by the semiconductor manufacturing apparatus. It has a function that enables control. The multi-pump controller 50 is shown in FIG.
0, as shown in FIG.
Each card 50, 55, 56, 57 is inserted into each slot 50S.
Can be inserted.

Since the multi-pump controller 50 of this embodiment employs the card system, the following advantages can be obtained. (1) Although the number of pumps used differs depending on the customer, it is possible to deal with different pumps simply by inserting and removing a card. That is, only the required number of cards need to be installed. (2) In the first embodiment of the present invention shown in FIGS. 1 and 7, the required number of controllers for one vacuum pump is used, whereas in the second embodiment shown in FIGS.
Since only one multi-pump controller is required, the cost of the entire system is reduced. Also, the required space can be saved. (3) When different types of vacuum pumps coexist, it is possible to cope only by mounting a card corresponding to the type of vacuum pump. (4) Even if the specification of the vacuum pump is changed, it can be dealt with only by modifying the card. (5) It is possible to respond to the new model vacuum pump by developing only the card.

As a method of controlling each individual pump by a card, a cryo-turbo pump will be described as an example.
FIG. 11 is a block diagram showing details of the cryo-turbo pump. The cryo-turbo pump is called a turbo-molecular pump with a cold trap, and is a vacuum pump provided with a cold trap that can freeze and adsorb a gas by a cryogenic panel on the upstream side of the turbo-molecular pump. FIG.
As shown in FIG. 1, the cryogenic turbo pump 13 includes a turbo molecular pump 61 and a cold trap 62. On the downstream side of the turbo molecular pump 61, the turbo molecular pump 6
A dry pump 63 for assisting the evacuation of the vacuum pump 1 is connected, and the turbo molecular pump 61 is connected to a turbo molecular pump controller 64. The helium compressor 65 supplies compressed helium to the cold trap 62. The cryo-turbo pump card 57 in the multi-pump controller 50 includes a dry pump 63,
The turbo molecular pump controller 64, the cold trap 62, and the helium compressor 65 are connected by a communication line and a power line.

The control method by the cryo-turbo pump card 57 is as follows. (1) A start / stop signal of the helium compressor 65 is transmitted from the cryo-turbo pump card 57. The helium compressor 65 starts and stops according to the signal. (2) Power (power of an expander for expanding helium gas compressed by the helium compressor 65) installed in the cold trap 62 is controlled by a communication line and a power line connecting the cryo-turbo pump card 57 and the cold trap 62. , The temperature of the cold trap 62 and the heater for regeneration of the cold trap 62 are controlled. A power supply for starting the power installed in the cold trap 62 is incorporated in the card,
Power ON / OF by start / stop instruction to the card
F is performed to start / stop the power. Based on the temperature information from the cold trap 62, a temperature control signal is transmitted from the card to control the temperature of the cold trap 62. Further, a heater is attached to the cold trap 62 for regeneration of the cold trap 62, and a heater start / stop signal is transmitted from a card to start / stop the heater. (3) The power of the turbo molecular pump 61 is incorporated in the turbo molecular pump controller 64, and the power is turned on / off based on a start / stop signal from the card, and the turbo molecular pump 61 is started / stopped. . Further, a circuit for controlling the magnetic bearing is incorporated in the turbo-molecular pump controller 64, and the turbo-molecular pump 61
To control the magnetic bearings. (4) Dry pump 6 by start / stop signal from card
Start / stop 3

FIG. 12 is a block diagram showing an example in which a plurality of multi-pump controllers shown in FIGS. 8 to 10 are provided. When the number of vacuum pumps that need to be controlled exceeds the number of controllable units of one multi-pump controller 50, the plurality of multi-pump controllers 50 are connected to RS-48.
By connecting in series with 5, multiple pumps can be controlled. FIG. 13 shows a configuration in which a plurality of multi-pump controllers 50 are connected in parallel by RS-232C cables to enable control of a large number of vacuum pumps. In this case, a distributor 300 is provided as in the embodiment of FIG. 5, and the host computer 4 and the distributor 300 are connected by, for example, RS-485.

FIG. 14 is a flowchart showing the processing flow of the multi-pump controller 50. As shown in FIG. 14, in step 1 (S1), when the power is turned on, the process starts from here. In step 2 (S2), initialization of a memory, initialization of peripheral devices, and the like are performed. In step 3 (S3), it is checked whether an interface card is mounted in each slot 50S. If implemented, it also determines the card type (cryopump, cryo-turbo pump, turbo-molecular pump, dry pump). In step 4 (S4), the slot to be processed is set as the first slot. Step 5 (S
In 5), transmission / reception processing with a device connected by external communication is performed. In step 6 (S6), the switches on the entire panel are read. In step 7 (S7), the card information read in step 3 is read. In step 8 (S8), it is determined whether the processing target card is a cryopump. Step 9 (S
In 9), processing such as starting / stopping the cryopump, monitoring the state, and regenerating is performed. In step 10 (S10), it is determined whether the processing target card is a cryogenic turbo pump. In step 11 (S11), processing such as starting / stopping the cryo-turbo pump, monitoring the state, and regenerating is performed. It also monitors and controls peripheral devices such as compressors. In step 12 (S12), it is determined whether the processing target card is a turbo molecular pump. Step 13
In (S13), start / stop of the turbo molecular pump,
Performs status monitoring and other processing. In step 14 (S14), it is determined whether the processing target card is a dry pump.
In step 15 (S15), processing such as start / stop of the dry pump and state monitoring is performed. Step 16 (S1
In 6), since the corresponding pump cannot be determined, card abnormality processing is performed. In step 17 (S17), LCD display processing according to the selected display menu and LED blink processing according to each current state are performed. Step 1
8 (S18), it is determined whether the current slot to be processed is the last slot. In step 19 (S19), the processing target is moved to the next slot. Step 20 (S
In 20), the processing target is returned to one slot.

[0052]

As described above, according to the first aspect of the present invention, the network control unit and the plurality of vacuum pump controllers are connected by a number of communication lines corresponding to the number of vacuum pump controllers. Since they are connected in parallel and the network control unit can simultaneously control a plurality of vacuum pump controllers, commands from the host computer or the network controller reach each vacuum pump controller immediately, and quickly operate each vacuum pump. Can be controlled.

Further, according to the present invention, even if there is a disconnection from the network control unit to a certain vacuum pump controller, a failure of the controller, or the entry of noise, the other vacuum pump controllers are affected. The other vacuum pumps can be controlled normally.

According to the second aspect of the present invention, a plurality of vacuum pumps can be controlled by one multi-pump controller, and can be controlled with minimum necessary hardware by modularizing each pump control function. Becomes Also,
A plurality of types and a plurality of vacuum pumps can be controlled by a control module corresponding to various vacuum pumps.

[Brief description of the drawings]

FIG. 1 is a block diagram showing a first embodiment of a first aspect of a vacuum pump control device according to the present invention.

FIG. 2 is a block diagram showing a detailed structure of a network control unit.

FIG. 3 is a block diagram showing details of a communication line and peripheral devices thereof.

FIG. 4 is a front view showing a front panel of the network control unit.

FIG. 5 is a block diagram showing a second embodiment of the first aspect of the control device for the vacuum pump according to the present invention.

FIG. 6 is a cross-sectional view showing a detailed structure of a vacuum pump having a vacuum pump control device according to the present invention and peripheral devices thereof.

FIG. 7 is a block diagram showing a third embodiment of the first aspect of the control device for the vacuum pump according to the present invention.

FIG. 8 is a block diagram showing one embodiment of a second aspect of the control device for the vacuum pump according to the present invention.

FIG. 9 is a block diagram showing a relationship between a block diagram in a multi-pump controller and peripheral devices.

FIG. 10 is a perspective view showing a relationship between the multi-pump controller shown in FIG. 8 and various cards.

FIG. 11 is a block diagram showing details of a cryo-turbo pump.

FIG. 12 is a block diagram showing an example in which a plurality of multi-pump controllers shown in FIGS. 8 to 10 are provided and connected in series.

FIG. 13 is a block diagram showing an example in which a plurality of multi-pump controllers shown in FIGS. 8 to 10 are provided and connected in parallel.

FIG. 14 is a flowchart showing a processing flow of the multi-pump controller.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Vacuum chamber 2 Controller for vacuum pump 3 Network control unit 4 Host computer 5 Remote controller 10 Cryo pump 11 Turbo molecular pump 12 Dry pump 13 Cryo turbo pump 14 Turbo molecular pump controller 15 Heat conduction element 16 First stage cryopanel 17 Second Step cryopanel 18 Casing 20 Compressor unit 30 Expander motor 32, 34 Temperature sensor 36 Purge heater 38 Purge valve 40 Roughing valve 41 Relief valve 42 Vacuum gauge 44, 46 Heater 50 Multi-pump controller 51 Bus 52 CPU card 53 Panel card 54 Cryo Pump card 55 Turbo molecular pump card 56 Dry pump card 57 Cryo turbo pump 1 Refrigerator unit 72 Expander 73 First stage expansion unit 74 Second stage expansion unit 101 One chip CPU 102 Communication line 103 Bus 104, 114 External communication device 105 Non-volatile memory 106 I / O device 107 Switch 108 Light emitting diode 109 Liquid crystal display 110, 112 Connector 116 CPU 300 Distributor

Claims (12)

[Claims] 1. A vacuum pump controller for controlling the operation of a plurality of vacuum pumps, comprising: a host computer; a plurality of vacuum pump controllers connected to each of the plurality of vacuum pumps; A network control unit that relays the computer and a plurality of vacuum pump controllers; the network control unit and the plurality of vacuum pump controllers are connected in parallel by a number of communication lines corresponding to the number of vacuum pump controllers; A control device for a vacuum pump, which is electrically connected. 2. The vacuum pump according to claim 1, wherein the plurality of vacuum pumps include at least one of a cryopump, a turbo-molecular pump, a cryo-turbo pump, and a dry pump. Control device. 3. The vacuum pump control device according to claim 1, wherein the host computer and the network control unit are connected by an RS-232C cable. 4. The vacuum pump control device according to claim 1, wherein the network control unit and each vacuum pump controller are connected by an RS-232C cable. 5. The vacuum pump control device according to claim 1, wherein a remote controller can be connected to the network controller. 6. A vacuum pump control device for controlling the operation of a plurality of vacuum pumps, comprising: a host computer; and one multi-pump controller connected to the plurality of vacuum pumps. A controller for a vacuum pump, wherein a plurality of vacuum pumps are controlled by a controller. 7. The vacuum pump according to claim 6, wherein the plurality of vacuum pumps include at least one of a cryopump, a turbo-molecular pump, a cryo-turbo pump, and a dry pump. Control device. 8. The vacuum pump control device according to claim 6, wherein the multi-pump controller has a pump control function having a detachable module structure such as a card. 9. The vacuum pump according to claim 6, wherein the multi-pump controller has a control module for a vacuum pump, and a single multi-pump controller monitors and controls a plurality of types of vacuum pumps. Pump control device. 10. The multi-pump controller includes:
7. The vacuum pump control device according to claim 6, wherein a remote controller is connectable. 11. The multi-pump controller is connected to an RS
The control device for a vacuum pump according to claim 6, wherein a plurality of vacuum pumps are connected in series at -485 to control a large number of vacuum pumps. 12. The multi-pump controller is connected to an RS
7. The vacuum pump control device according to claim 6, wherein a plurality of vacuum pumps are connected in parallel with each other by a -232C cable so that a large number of vacuum pumps can be controlled.