JPH1047350A - Air bearing spindle - Google Patents

Air bearing spindle

Info

Publication number
JPH1047350A
JPH1047350A JP20014996A JP20014996A JPH1047350A JP H1047350 A JPH1047350 A JP H1047350A JP 20014996 A JP20014996 A JP 20014996A JP 20014996 A JP20014996 A JP 20014996A JP H1047350 A JPH1047350 A JP H1047350A
Authority
JP
Japan
Prior art keywords
displacement
spindle
circuit
housing
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20014996A
Other languages
Japanese (ja)
Inventor
Naoyuki Uchiyama
尚行 内山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTN Corp
Original Assignee
NTN Corp
NTN Toyo Bearing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NTN Corp, NTN Toyo Bearing Co Ltd filed Critical NTN Corp
Priority to JP20014996A priority Critical patent/JPH1047350A/en
Publication of JPH1047350A publication Critical patent/JPH1047350A/en
Pending legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Turning (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

PROBLEM TO BE SOLVED: To detect the displacement of a spindle stably without being adversely affected by inductance of a cable by building a displacement sensor circuit for detecting the displacement of the spindle, in a housing. SOLUTION: A board 8 of a sensor circuit 9 is built in a housing 3 along with a displacement gage 5. In order to protect the sensor circuit 9 from noise and to prevent an electric shock accident caused by the leak or the like of a motor 4, the housing 3 is earthed. The sensor circuit 9 is so formed that a resonance point of a resonance circuit changes according to the position of a spindle 1 and in association with this, the amplitude of sine wave changes. The sine wave changed in amplitude is therefore converted into DC voltage by a rectifying circuit, and a signal indicating the position of the main spindle is outputted as DC voltage to the outside through a low-pass filter for eliminating high frequency noise. The position of the spindle 1 can thereby be outputted stably to the outside only by supplying a stable power source.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明は空気軸受スピンド
ルに関し、特に、空気軸受を含む流体軸受によって主軸
をハウジング内で支持し、主軸の変位を検出するような
空気軸受スピンドルに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air bearing spindle, and more particularly to an air bearing spindle in which a spindle is supported in a housing by a fluid bearing including an air bearing and displacement of the spindle is detected.

【0002】[0002]

【従来の技術】従来、小径の穴明けでは工具の径が小さ
いため、加工時に折損しやすいという問題点があった。
このため、従来から加工状態を監視することにより、工
具に加わる過負荷を防止したり、工具の折損を検出ある
いは予知しようとする試みがなされており、その1つに
スピンドルにセンサを組み込み、加工反力を主軸の変位
によって検出するものがある。特に、主軸を静圧軸受に
よって支持する場合には、軸受に起因する回転時の振動
が非常に小さくできるので、微小な加工反力でも軸の変
位として検出することが可能である。
2. Description of the Related Art Heretofore, there has been a problem that a small-diameter hole is easily broken during machining because the diameter of the tool is small.
For this reason, attempts have conventionally been made to prevent the overload applied to the tool or to detect or predict the breakage of the tool by monitoring the machining state. Some devices detect a reaction force by displacement of a main shaft. In particular, when the main shaft is supported by a hydrostatic bearing, vibration during rotation caused by the bearing can be extremely reduced, so that even a minute machining reaction force can be detected as a displacement of the shaft.

【0003】図3はそのようなスピンドルの一例を示す
断面図である。図3において、主軸1は静圧軸受2によ
ってハウジング3に対して非接触で支持され、モータ4
によって回転駆動される。主軸1の一端には非接触の変
位計5が設けられて主軸1の変位が検出される。主軸1
の他端にはドリル6が取付けられる。変位計5の出力は
変位検出回路7に与えられて検出信号が出力される。
FIG. 3 is a sectional view showing an example of such a spindle. 3, a main shaft 1 is supported by a hydrostatic bearing 2 in a non-contact manner with respect to a housing 3, and a motor 4 is provided.
Is driven to rotate. A non-contact displacement meter 5 is provided at one end of the main shaft 1 to detect the displacement of the main shaft 1. Spindle 1
A drill 6 is attached to the other end of. The output of the displacement meter 5 is supplied to a displacement detection circuit 7 to output a detection signal.

【0004】[0004]

【発明が解決しようとする課題】図3に示したスピンド
ルに内蔵される変位計5として渦電流式のものを使用し
た場合、センサ部となるコイルに対向して設置された主
軸1に渦電流が発生し、主軸1が変位すると渦電流の影
響でコイルのインダクタンスが変化するため、そのイン
ダクタンスを監視することで軸の変位を検出できる。
When an eddy current type is used as the displacement gauge 5 built in the spindle shown in FIG. 3, the eddy current is applied to the main shaft 1 installed opposite to the coil serving as the sensor section. When the main shaft 1 is displaced and the main shaft 1 is displaced, the inductance of the coil changes due to the influence of the eddy current. Therefore, the displacement of the shaft can be detected by monitoring the inductance.

【0005】従来このようなセンシング方式を使用した
スピンドルにおいて、図3に示すように主軸1の変位を
検出するための電子回路からなる変位検出回路7はスピ
ンドルの外部に設けていた。すなわち、変位計5と変位
検出回路7の2つのブロックに分離されて構成されてい
た。この場合、コイルとインダクタンス検出部とを接続
するケーブルは、使用上の便利さを考慮し、できるだけ
長くとる必要があった。しかし、ケーブルはセンサに直
列に接続されているため、インダクタンス検出部ではケ
ーブルのインダクタンスも同時に検出してしまう。この
ため、ケーブルを激しく動かしたりすると、主軸1の位
置が変化しなくてもセンサ出力がふらついたりして、主
軸変位の検出に不要な信号も同時に取込まれてしまうこ
とがあった。
Conventionally, in a spindle using such a sensing method, a displacement detection circuit 7 comprising an electronic circuit for detecting a displacement of the main shaft 1 is provided outside the spindle as shown in FIG. That is, it is configured to be separated into two blocks of the displacement meter 5 and the displacement detection circuit 7. In this case, the cable connecting the coil and the inductance detecting section needs to be as long as possible in consideration of convenience in use. However, since the cable is connected to the sensor in series, the inductance detection unit also detects the inductance of the cable at the same time. For this reason, if the cable is violently moved, the sensor output may fluctuate even if the position of the spindle 1 does not change, and a signal unnecessary for detecting the displacement of the spindle may be taken in at the same time.

【0006】しかも、外部に設けた変位検出回路の移動
もしくはスピンドル本体と変位検出回路との間のケーブ
ルの長さを変えれば、変位検出回路の調整が必要となっ
てくる。
Moreover, if the displacement detection circuit provided outside is moved or the length of the cable between the spindle body and the displacement detection circuit is changed, the displacement detection circuit needs to be adjusted.

【0007】それゆえに、この発明の主たる目的は、上
述の悪影響を受けることなく安定した軸の変位を検出し
得る空気軸受スピンドルを提供することである。
SUMMARY OF THE INVENTION It is, therefore, a primary object of the present invention to provide an air bearing spindle capable of detecting a stable shaft displacement without being affected by the above-mentioned adverse effects.

【0008】[0008]

【課題を解決するための手段】請求項1に係る発明は、
空気軸受によって主軸をハウジング内で支持する軸受ス
ピンドルにおいて、主軸の変位を検出するための変位セ
ンサ回路をハウジングに内蔵するように構成したもので
ある。
The invention according to claim 1 is
In a bearing spindle in which a main shaft is supported in a housing by an air bearing, a displacement sensor circuit for detecting displacement of the main shaft is built in the housing.

【0009】請求項2に係る発明では、請求項1のハウ
ジングを接地する。請求項3に係る発明では、請求項1
の変位センサ回路は、主軸の端面に対向して設けられる
センサと、センサに発振出力を与えるための発振回路
と、センサの出力を整流するための整流回路と、整流回
路の出力に含まれる高周波ノイズを除去するためのフィ
ルタ回路とを含む。
In the invention according to claim 2, the housing according to claim 1 is grounded. In the invention according to claim 3, claim 1
The displacement sensor circuit includes a sensor provided facing the end face of the main shaft, an oscillation circuit for giving an oscillation output to the sensor, a rectification circuit for rectifying the output of the sensor, and a high frequency included in the output of the rectification circuit. A filter circuit for removing noise.

【0010】[0010]

【発明の実施の形態】図1はこの発明の一実施形態を示
すスピンドルの断面図であり、図2はこの発明に用いら
れるセンサ回路のブロック図である。
FIG. 1 is a sectional view of a spindle showing an embodiment of the present invention, and FIG. 2 is a block diagram of a sensor circuit used in the present invention.

【0011】この実施形態では、図1に示すように、ハ
ウジング3内に変位計5とともにセンサ回路9の基板8
が内蔵される。また、センサ回路をノイズから守るとと
もに、モータ4の漏電などによる感電事故などの防止を
図るために、ハウジング3が接地される。
In this embodiment, as shown in FIG. 1, a displacement sensor 5 and a substrate 8 of a sensor circuit 9 are provided in a housing 3.
Is built-in. Further, the housing 3 is grounded in order to protect the sensor circuit from noise and to prevent an electric shock accident due to leakage of the motor 4 or the like.

【0012】センサ回路は図2に示すように、発振回路
11とセンサ部12と整流回路13とローパスフィルタ
14とから構成される。発振回路11は正弦波を発生し
てセンサ部12に与える。センサ部12はセンサコイル
Lと共振コンデンサCを並列接続した共振回路で構成さ
れており、センサコイルLに送られた正弦波によってセ
ンサコイルLに対向した主軸1に渦電流が発生し、主軸
1とセンサコイルLの距離によりそのインダクタンスが
変化する。このため、共振回路の共振点が主軸1の位置
により変化し、それに伴って正弦波の振幅が変化する。
振幅が変化した正弦波は整流回路13によって直流電圧
に変換され、高周波ノイズを除去するためのローパスフ
ィルタ14を介して外部に直流電圧として主軸の位置を
示す信号が外部に出力される。
As shown in FIG. 2, the sensor circuit includes an oscillation circuit 11, a sensor section 12, a rectifier circuit 13, and a low-pass filter 14. The oscillation circuit 11 generates a sine wave and supplies it to the sensor unit 12. The sensor unit 12 is configured by a resonance circuit in which a sensor coil L and a resonance capacitor C are connected in parallel, and an eddy current is generated in the main shaft 1 facing the sensor coil L by a sine wave sent to the sensor coil L, and the main shaft 1 The inductance changes depending on the distance between the sensor coil L and the sensor coil L. For this reason, the resonance point of the resonance circuit changes depending on the position of the main shaft 1, and the amplitude of the sine wave changes accordingly.
The sine wave whose amplitude has changed is converted into a DC voltage by the rectifier circuit 13, and a signal indicating the position of the main shaft is output to the outside as a DC voltage via a low-pass filter 14 for removing high-frequency noise.

【0013】したがって、図2に示したセンサ回路を図
1に示したスピンドルのハウジング3内に内蔵すること
により、安定した電源を供給するだけで、外部に主軸1
の位置を安定して出力することが可能となる。
Therefore, by incorporating the sensor circuit shown in FIG. 2 in the housing 3 of the spindle shown in FIG.
Can be output stably.

【0014】[0014]

【発明の効果】以上のように、この発明によれば、主軸
の変位を検出するための変位センサ回路をハウジングに
内蔵するようにしたので、外部にケーブルを引き回す必
要がなくなり、ケーブルのインダクタンスによる悪影響
を最小限に抑えることができる。
As described above, according to the present invention, since the displacement sensor circuit for detecting the displacement of the main shaft is built in the housing, it is not necessary to route the cable to the outside. Adverse effects can be minimized.

【図面の簡単な説明】[Brief description of the drawings]

【図1】この発明の一実施形態を示すスピンドルの断面
図である。
FIG. 1 is a sectional view of a spindle showing an embodiment of the present invention.

【図2】この発明に用いられるセンサ回路のブロック図
である。
FIG. 2 is a block diagram of a sensor circuit used in the present invention.

【図3】従来のスピンドルの断面図である。FIG. 3 is a sectional view of a conventional spindle.

【符号の説明】[Explanation of symbols]

1 主軸 2 静圧軸受 3 ハウジング 4 モータ 5 変位計 6 ドリル 8 基板 9 センサ回路 11 発振回路 12 センサ部 13 整流回路 14 ローパスフィルタ DESCRIPTION OF SYMBOLS 1 Main shaft 2 Hydrostatic bearing 3 Housing 4 Motor 5 Displacement gauge 6 Drill 8 Substrate 9 Sensor circuit 11 Oscillation circuit 12 Sensor part 13 Rectification circuit 14 Low-pass filter

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 空気軸受によって主軸をハウジング内で
支持する軸受スピンドルにおいて、 前記主軸の変位を検出するための変位センサ回路を前記
ハウジングに内蔵したことを特徴とする、空気軸受スピ
ンドル。
1. A bearing spindle for supporting a main shaft in a housing by an air bearing, wherein a displacement sensor circuit for detecting displacement of the main shaft is built in the housing.
【請求項2】 前記ハウジングを接地することを特徴と
する、請求項1の空気軸受スピンドル。
2. The air bearing spindle according to claim 1, wherein said housing is grounded.
【請求項3】 前記変位センサ回路は、 前記主軸の端面に対向して設けられるセンサと、 前記センサに発振出力を与えるための発振回路と、 前記センサの出力を整流するための整流回路と、 前記整流回路の出力に含まれる高周波ノイズを除去する
ためのフィルタ回路を含む、請求項1の空気軸受スピン
ドル。
3. The displacement sensor circuit includes: a sensor provided to face an end surface of the main shaft; an oscillation circuit for providing an oscillation output to the sensor; a rectification circuit for rectifying an output of the sensor; The air bearing spindle according to claim 1, further comprising a filter circuit for removing high frequency noise included in an output of the rectifier circuit.
JP20014996A 1996-07-30 1996-07-30 Air bearing spindle Pending JPH1047350A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20014996A JPH1047350A (en) 1996-07-30 1996-07-30 Air bearing spindle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20014996A JPH1047350A (en) 1996-07-30 1996-07-30 Air bearing spindle

Publications (1)

Publication Number Publication Date
JPH1047350A true JPH1047350A (en) 1998-02-17

Family

ID=16419611

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20014996A Pending JPH1047350A (en) 1996-07-30 1996-07-30 Air bearing spindle

Country Status (1)

Country Link
JP (1) JPH1047350A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004091856A3 (en) * 2003-04-04 2005-03-03 Strasbaugh Inc Grinding apparatus and method
CN110948288A (en) * 2019-11-28 2020-04-03 杭州电子科技大学 Air floatation main shaft rotation error detection and compensation device and method based on reflection principle

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004091856A3 (en) * 2003-04-04 2005-03-03 Strasbaugh Inc Grinding apparatus and method
US7118446B2 (en) 2003-04-04 2006-10-10 Strasbaugh, A California Corporation Grinding apparatus and method
US7458878B2 (en) 2003-04-04 2008-12-02 Strasbaugh, A California Corporation Grinding apparatus and method
CN110948288A (en) * 2019-11-28 2020-04-03 杭州电子科技大学 Air floatation main shaft rotation error detection and compensation device and method based on reflection principle

Similar Documents

Publication Publication Date Title
RU2193753C2 (en) Gyroscopic transmitter and device measuring rotation based on its usage
US20060085092A1 (en) Sensor system for a cutting machine tool
US7066028B2 (en) Acoustic sensor for monitoring machining processes in machining tools
KR20020007183A (en) Rotational direction detecting
JPH04231828A (en) Complex of converters for force, strain and noise transmitted through structure
JP2002066879A (en) Acoustic emission detecting device for machine tool
KR101070789B1 (en) Absolute vibration measuring equipment of portable shaft using casing vibration and relative vibration of shaft
JPH1047350A (en) Air bearing spindle
US7878066B2 (en) Vibration measurement system
EP1092133B1 (en) Method and apparatus for determining a resonant frequency of a resonator containing a gas composition
JPH1047351A (en) Air bearing spindle
JPH09982A (en) Unbalance detecting method of centrifuge
JP2000121655A (en) Rotating speed detector
JP2016080507A (en) Coordinate measurement system in machine tool
EP4264173B1 (en) Method for contactless power transmission between a stationary part and a movable part, electrical power supply circuit and contactless connection system including the electrical power supply circuit
JP2001009673A (en) Main shaft state detecting device for air bearing type machine tool
JP2007327919A (en) Surface potential measuring device
JP2003207426A (en) Rolling apparatus with sensor and detector
JP2002039881A (en) Torque sensor
JPH10246732A (en) Rotation detector for rotary member
JPH042467A (en) Rotation number detecting device of work in grinder and grinder
JP2001124649A (en) Pressure detecting system, capacitive pressure sensor element, and method for manufacturing it
JP2002328002A (en) Conductor detecting device
JPS62162446A (en) Tool contact detecting device
JPS63302329A (en) Vibration detector

Legal Events

Date Code Title Description
A977 Report on retrieval

Effective date: 20060227

Free format text: JAPANESE INTERMEDIATE CODE: A971007

A131 Notification of reasons for refusal

Effective date: 20060307

Free format text: JAPANESE INTERMEDIATE CODE: A131

A02 Decision of refusal

Effective date: 20060711

Free format text: JAPANESE INTERMEDIATE CODE: A02