JPH1034534A - Waterproof cover for cylinder polishing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a waterproof cover for a cylinder polishing device which can quicken opening/closing of a bellows by reducing a cost and easily control force pressing the bellows to a grinding wheel cover to enhance seal performance. SOLUTION: A cylinder polishing device has a bed 1 rotatably supporting a cylindrical workpiece, grinding wheel 25 reciprocation movably supported in the direction orthogonal and parallel to a rotary axis of the workpiece and a grinding wheel moving shaft device 2 supporting the grinding wheel 25. In a waterproof cover, the grinding wheel 25 and a sectional total unit in the vicinity of the workpiece of a part ground by the grinding wheel 25 are covered with a moving waterproof cover 3, it is fixedly supported on the grinding wheel moving shaft device 2. A pair of bellows waterproof covers 5a, 6b, extended from both side surfaces 3a, 3b of the moving waterproof cover 3 to end part waterproof covers 4a, 4b, are provided, one of the bellow waterproof covers 5a, 5b is openably/closably supported, a side plate 41 of the bellows waterproof cover 5b into contact with a moving waterproof cover side surface 3b is connected to a piston 62 of an air cylinder 6 supported on a supporter 69b.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a waterproof cover of a cylindrical polishing apparatus for grinding a cylindrical work such as a silicon ingot.

[0002]

2. Description of the Related Art A bed for rotatably supporting a cylindrical work, a grindstone supported reciprocally in a direction perpendicular to the rotation axis of the work and parallel to the rotation axis, and a grindstone moving shaft for supporting the grindstone. A cylindrical polishing apparatus having an apparatus is disclosed in, for example, JP-A-2-131849, US Pat. No. 4,811,524 and the like. Since a cylindrical polishing apparatus for grinding a cylindrical work such as a silicon ingot uses a large amount of grinding water, a protective cover apparatus for preventing the scattering is proposed in Japanese Utility Model Application Laid-Open No. 4-102773. In this protective cover device, a grindstone cover is fixed to a grindstone support member, and a bellows for covering the grindstone and the work is configured to be reciprocally movable and openable with the grindstone cover.

[0003]

SUMMARY OF THE INVENTION
The protective cover device of No. 102773 opens and closes the bellows by rotating the motor fixed to the grindstone cover in the normal and reverse directions.When the grindstone cover reciprocates, the bellows expands and contracts while electrically controlling the stopped motor. When a complicated electric control device is required, and when opening and closing the bellows quickly, it is necessary not only to increase the output of the motor and the complicated electric control device, but also to prevent the shock and to increase the cost, so that the opening and closing of the bellows is inexpensive. Therefore, there is a problem in sealing performance and the like because the speed of pressing the bellows against the grinding wheel cover cannot be easily controlled. The object of claim 1 of the present invention is that
No. 73 provides a waterproof cover of a cylindrical polishing device that solves the above problem of the protective cover device, can quickly open and close the bellows inexpensively, and can easily control the force of pressing the bellows against the grindstone cover, and improves the sealing performance. It is in.

[0004]

According to a first aspect of the present invention, there is provided a bed for rotatably supporting a cylindrical workpiece, and a bed reciprocally movable in a direction orthogonal to a rotation axis of the workpiece, and A grindstone supported reciprocally in parallel with the axis, and a grindstone moving shaft device that supports the grindstone, in a cylindrical polishing apparatus having: An open moving waterproof cover is fixedly supported on the whetstone moving shaft device, fixed to one of the side surfaces of the moving waterproof cover, supported so as to be openable and closable with the other side, and from both sides of the moving waterproof cover over both end chuck portions of the work. A pair of bellows waterproof covers are provided extending to the disposed end waterproof cover, and a side plate of the openable and closably supported bellows waterproof cover is in contact with a side surface of the movable waterproof cover. The movable waterproof cover is connected to a piston of an air cylinder supported by the body, and opens and closes the openable and closably supported bellows waterproof cover by moving the piston when the movable waterproof cover is stopped. When moving together with the whetstone moving shaft device, the piston is actuated in a direction to close the side plate, and the pressure for closing the side plate is adjusted by the pressure reducing valve. I will provide a. With such a configuration, a waterproof cover of a cylindrical polishing apparatus has been provided in which the bellows can be quickly opened and closed at a low cost and the force for pressing the bellows against the whetstone cover can be easily controlled.

[0005]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in detail below with reference to FIGS. FIG. 1 shows claim 1 of the present invention.
1 is a perspective view of a main part showing a schematic configuration of a waterproof cover of a cylindrical polishing apparatus according to a preferred embodiment of the present invention, in which a cylindrical work is removed. FIG.
FIG. 3 is a schematic cross-sectional view taken along a line II, FIG. 3 is a partially schematic enlarged front view showing a state in which a side plate is attached to a piston of an air cylinder when a waterproof cover of FIG. 1 is located at the leftmost end, and FIG. FIG. 3 is a pneumatic circuit diagram for driving a piston of a cylinder. In the cylindrical polishing apparatus of the present invention, a cylindrical work 8 such as a silicon ingot is rotatably supported by a chuck portion (not shown) supported on the bed 1 and can reciprocate in a direction orthogonal to the rotation axis 80 of the work 8. And rotation axis
Whetstone 25 supported reciprocally in parallel with 80, and whetstone
It has a whetstone moving shaft device 2 that supports 25. The whetstone moving shaft device 2 is supported by the bed 1 in the preferred embodiment, but may be directly supported by the base surface 11 instead. A guide portion 29 that slides on a rail 20 supported by the bed 1 is reciprocated in parallel with a rotation axis 80 by a grindstone drive unit 21, and a grindstone 23 that supports a grindstone shaft 24 that supports and rotates the grindstone 25 is a grindstone head. The cutting unit 22 reciprocates in a direction orthogonal to the rotation axis 80 of the work 8. 26 is a motor for rotating the grinding wheel shaft 24.

[0006] The waterproof cover of the cylindrical polishing apparatus of the present invention is fixedly supported on the grindstone moving shaft device 2 by covering the grindstone 25 and the movable waterproof cover 3 which covers the entire cross section near the workpiece 8 to be ground by the grindstone 25 and opens downward. The movable waterproof cover 3 is fixed to one side 3a of the movable waterproof cover 3 and is openably and closably supported by the other 3b. The movable waterproof cover extends from both side surfaces 3a and 3b to end waterproof covers 4a and 4b beyond chucks (not shown) at both ends of the work 8. The side plate 41 is provided with a pair of bellows waterproof covers 5a and 5b, and abuts against the moving waterproof cover side surface 3b of the bellows waterproof cover 5b supported so as to be openable and closable.
As shown in FIG. 3, it is connected to a piston 62 of an air cylinder 6 supported on a support 69b via a fixture 68b. There are two holes 44 on the side plate 41 of the bellows waterproof cover 5b.
The guide bar 43 is passed through the hole 44,
Both ends of the guide bar 43 are supported by the end waterproof covers 4a and 4b. The support 69b is supported by a post for an inspection device (not shown).
You may be supported by the support | pillar which stood up. As shown in FIG. 4, the piston 62 of the air cylinder 6 is inserted into the pneumatic chambers 6a and 6b indicated by dotted lines in the air cylinder main body 62,
The operation is performed by switching the electromagnetic switching valve 73 to one of 6a and 6b and sending compressed air. 63a and 63b are sensors for detecting when the piston 62 reaches both ends of the pneumatic chambers 6a and 6b in the air cylinder 6. The support 69b may be supported by the end waterproof covers 4a, 4b. Reference numeral 7 denotes a chute which covers the lower ends of the movable waterproof cover 3, the bellows waterproof covers 5a and 5b, and the end waterproof cover 4a. 31 is a seal.

A piston 62 indicated by a dashed line in FIG. 3 is operatively connected to a lower surface transmitting portion 64 of the air cylinder 6 to extract its movement, and is connected and fixed to the side plate 41 via a connecting member 63. Opening / closing of the bellows waterproof cover 5b supported so as to be opened / closed is performed when the whetstone moving shaft device 2 and the moving waterproof cover 3 are stopped, and the compressed air of the pneumatic source 70 is adjusted to an appropriate pressure regulated by the pressure reducing valve 72. The adjusted compressed air switches the electromagnetic switching valve 73 and sends the compressed air of the pneumatic source 70 to one of the pneumatic chambers 6a and 6b to move the piston 62 so that the side plate 41 moves the bellows waterproof cover 5b. It is made to open and close. When the movable waterproof cover 3 moves together with the grinding wheel moving shaft device 2, the compressed air of the pneumatic source 70 is sent to the pneumatic chamber 6b by switching the electromagnetic switching valve 73 in a direction to close the side plate 41 of the bellows waterproof cover 5b. The pressure at which the piston 62 is operated and the side plate 41 is closed is reduced by the pressure reducing valve 72.
To adjust the pressure to an appropriate pressure.

In operation, the whetstone moving shaft device 2 to which the moving waterproof cover 3 is fixed is moved to the original position at the right end in FIG. In this position, the bellows waterproof cover 5b and the side plate 41 are shown in FIG.
And the opposite position. At this time, the electromagnetic switching valve 73 is switched to send the compressed air to the pneumatic chamber 6a, so that the piston 62 and the side plate
By moving 41 to the left, the bellows waterproof cover 5b is separated from the movable waterproof cover 3 and opened. Then, the work 8 is gripped by a chuck (not shown), and the grindstone 25 and the grindstone moving shaft device 2 are moved to the leftmost position. Thereafter, the electromagnetic switching valve 73 is switched to send compressed air to the pneumatic chamber 6b, and the piston 62 and the side plate 41 are moved. Is moved to the right and the bellows waterproof cover 5b is brought into close contact with the movable waterproof cover 3 and closed. The pressure at which the side plate 41 presses the movable waterproof cover 3 at this time is adjusted to an appropriate pressure by adjusting the pressure reducing valve 72. Then, the grindstone 25 is rotated, and the cutting unit 22 cuts the grindstone 25 toward the work 8, and then the work 8 rotates, and the grindstone 25 and the grindstone moving shaft device 2 pass from one end to the other end of the work 8 in one pass. Alternatively, the workpiece 8 is moved by a plurality of passes, and the outer peripheral grinding of the work 8 is completed. Thereafter, the whetstone moving shaft device 2 returns to the original position, the bellows waterproof cover 5b is opened, and the work 8 is detached.

When the movable waterproof cover 3 moves together with the whetstone moving shaft device 2, the electromagnetic switching valve 73 is switched in a direction to close the side plate 41 of the bellows waterproof cover 5b, and the compressed air of the pneumatic source 70 is supplied to the pneumatic chamber 6b. Feeding activates the piston 62. When the whetstone moving shaft device 2 and the moving waterproof cover 3 are moved leftward from the original position at the right end in FIG. 1, the air in the pneumatic chamber 6b in the air cylinder 6 due to the movement of the piston 62 is reduced by the pressure reducing valve.
The pressure is appropriately adjusted via the pressure control valve 72. At this time, the pressure of the side plate 41 pressing the movable waterproof cover 3 is reduced by the pressure reducing valve.
72 is adjusted to an appropriate pressure. Moving waterproof cover 3
When the piston is moved rightward from the left end position in FIG. 1, the piston 62 is operated in the direction to close the side plate 41, and the bellows waterproof cover 5b and the side plate 41 are properly adjusted by the pressure reducing valve 72. It comes into contact with the moving waterproof cover 3 by pressure.

[0010]

According to the first aspect of the present invention, the air cylinder can quickly open and close the bellows inexpensively because the air cylinder has less shock at the time of opening and closing as compared with the electric motor even if it opens and closes faster than the electric motor. In addition, since the force for pressing the bellows against the grindstone cover can be easily controlled by adjusting the pressure by the pressure reducing valve 72 and freely adjusting the pressure, the waterproof cover of the cylindrical polishing apparatus having a long service life without a seal failure can be provided.

[Brief description of the drawings]

FIG. 1 is a front perspective view of a main part showing a schematic configuration of a waterproof cover of a cylindrical polishing apparatus according to a preferred embodiment of the first aspect of the present invention, with a cylindrical work removed.

FIG. 2 is a schematic sectional view taken along line II-II of FIG.

FIG. 3 is a side plate 41 of FIG. 1 and a piston of an air cylinder 6;
FIG. 2 is a partially schematic enlarged front view showing a state where the movable waterproof cover 3 of FIG.

FIG. 4 is a pneumatic circuit diagram for driving a piston of the air cylinder of FIG. 1;

[Explanation of symbols]

1. . Bed 2. . Wheel moving axis device
3. . Moving waterproof cover 4a, 4b. . End waterproof cover 5a, 5b. . Bellows waterproof cover 6. . Air cylinder 6a, 6b. . Pneumatic chamber 8. . Work 25. . Whetstone 41． . Side plate 62. . Piston 69b. . Support 72. . Pressure reducing valve

Claims (1)

[Claims] 1. A bed for rotatably supporting a cylindrical work, a grindstone supported reciprocally in a direction orthogonal to a rotation axis of the work and reciprocally parallel to the rotation axis, and a grindstone. A grinding wheel moving shaft device that supports, and in a cylindrical polishing device having the above, the movable waterproof cover that covers the entire cross section of the work near the workpiece of the grinding wheel and the portion to be ground by the grinding stone is fixedly supported on the grinding wheel moving shaft device, A pair of bellows waterproof covers fixed to one of the side surfaces of the movable waterproof cover so as to be openable and closable with the other, and extending from both side surfaces of the movable waterproof cover to end waterproof covers disposed beyond both end chuck portions of the work. A side plate of the openable and closably supported bellows waterproof cover, which is in contact with a side surface of the movable waterproof cover, is connected to a piston of an air cylinder supported by a support. Opening and closing of the openable and closably supported bellows waterproof cover is performed by moving the piston when the movable waterproof cover stops, and when the movable waterproof cover moves together with the whetstone moving shaft device, A waterproof cover for a cylindrical polishing apparatus, wherein the piston is operated in a direction to close the side plate, and a pressure for closing the side plate is adjusted by the pressure reducing valve.