JPH10326700A - Insertion type polarized light generator - Google Patents

Insertion type polarized light generator

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Publication number
JPH10326700A
JPH10326700A JP20246997A JP20246997A JPH10326700A JP H10326700 A JPH10326700 A JP H10326700A JP 20246997 A JP20246997 A JP 20246997A JP 20246997 A JP20246997 A JP 20246997A JP H10326700 A JPH10326700 A JP H10326700A
Authority
JP
Japan
Prior art keywords
magnet
fixed
magnetic field
row
horizontal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20246997A
Other languages
Japanese (ja)
Inventor
Shigemasu Okada
重益 岡田
Yutaka Murakami
豊 村上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SUMIJIYUU TEC KK
Hitachi Metals Ltd
Original Assignee
SUMIJIYUU TEC KK
Sumitomo Special Metals Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SUMIJIYUU TEC KK, Sumitomo Special Metals Co Ltd filed Critical SUMIJIYUU TEC KK
Priority to JP20246997A priority Critical patent/JPH10326700A/en
Publication of JPH10326700A publication Critical patent/JPH10326700A/en
Pending legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To provide a device mechanically closely fixed with a magnet so as to be movable adjustable by fitting a sub-magnet supporting base fixed by a bolt in a dovetail groove with a magnet supporting base, the sub-magnet supporting base having a magnet holder serially holding a number of magnets in a horizontal direction, and fixing it by a bolt, connecting the longitudinal side surfaces of the sub and the main bodies by a jig and fixing these by bolts in a horizontal direction. SOLUTION: By the divided magnet supporting bases 2 to 4 of a magnet supporting base 1, vertical and horizontal magnetic field magnet columns A2 , B3 and B4 are fixed and held by magnet holders 11, 13 and 15. The magnet holder 11 fixing the vertical magnetic field magnet column A2 is fixed in a center magnet supporting base 2 by a bolt 7, and the magnet column A2 is fixed to the magnet holder 11 by a key groove by using a key 12. The magnet supporting bases 3 and 4 of the horizontal magnetic field magnet columns B and B fix the magnet holders 13 and 15 by dovetail groove fitting and bolt-fixed sub-magnet supporting bases 5 and 6. Further, the sub- magnet supporting bases 5 and 6 and the magnet supporting bases 3 and 4 increase a mechanical fitting strength by a connecting jig 9 in a side face. Thus, a movement in each direction of the magnet column is adjusted.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】アンジュレーターやウイグラ
ーと呼ばれる挿入型偏光発生装置の磁気回路を構成する
磁石の保持構造の改良に係り、実質的に接着剤を使用し
ない機械的な固着にて磁石をタイトに密着固定した磁石
の保持構造を有する挿入型偏光発生装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement in a magnet holding structure constituting a magnetic circuit of an insertion type polarization generator called an undulator or a wiggler. The present invention relates to an insertion type polarization generator having a structure for holding a magnet which is closely adhered to a magnet.

【0002】[0002]

【従来の技術】光速に近い電子ビームが磁界中を通過す
ると電磁波、すなわちシンクロトロン放射光を発生する
が、シンクロトロン放射光源としてこれを電子貯蔵リン
グに用いることにより、シンクロトロン放射の基本的性
質である高指向性、高強度、高偏光性等の特性を種々活
用できることから、科学技術、加工技術への多種多様の
応用が可能な理想的な光源として飛躍的に応用範囲が拡
大されている。
2. Description of the Related Art When an electron beam near the speed of light passes through a magnetic field, an electromagnetic wave, that is, synchrotron radiation is generated. By using this in an electron storage ring as a synchrotron radiation light source, the basic properties of synchrotron radiation are obtained. Because it can utilize various characteristics such as high directivity, high intensity, high polarization, etc., its application range is dramatically expanded as an ideal light source that can be applied to a wide variety of science and technology and processing technology. .

【0003】今日の電子貯蔵リングには、より高いビー
ム電流、小さなビーム断面積による高輝度光源であるウ
イグラーまたはアンジュレーターと呼ばれる挿入型光源
が複数用いられている。すなわち、異磁極磁石を交互に
配置して磁界方向が交互に変化する磁界中に光速に近い
電子ビームを通過させると、電子ビームの軌道が曲げら
れる(蛇行)ごとに強い光(放射光)が発生し、その光
が相互に干渉し合いより輝度の高い光が得られるが、蛇
行角度の違いから、磁界の周期数(N)の2N倍の光が
得られるタイプがウイグラー、これより磁界が弱く電子
軌道の振幅が極めて小さいがN2の強度の光が得られる
タイプがアンジュレーターと呼ばれている。
[0003] Today's electron storage rings use a plurality of insertion light sources called wiggler or undulator, which are high brightness light sources with higher beam current and smaller beam cross section. That is, if an electron beam near the speed of light is passed through a magnetic field in which the direction of the magnetic field changes alternately by alternately disposing different magnetic pole magnets, strong light (radiation light) is generated every time the trajectory of the electron beam is bent (meandering). The generated light interferes with each other to obtain light with higher brightness. However, due to the difference in the meandering angle, a type that can obtain light of 2N times the number of periods (N) of the magnetic field is a wiggler. weak type the amplitude of the electron orbit is extremely small light intensity of N 2 is obtained is called the undulator.

【0004】アンジュレーターにおける磁石配列の構成
は、図5に示すごとく、所要寸法の多数個の磁化方向が
異なる磁石を、磁界方向が交互に変化するように所要パ
ターンで水平に配列した垂直磁場用磁石列A1,A2と水
平磁場用磁石列B1,B2の二対、4列の磁石列A1
2,B1,B2を、上下左右の4本のビームに水平配置
して磁石列で囲みトンネルを形成するように配置する
が、各磁石列は個別に3軸方向に移動可能なように種々
の機械的支持機構を用いて相対向させてあり、所定の波
長の高輝度放射光を得るためには磁界強度を変化させる
必要があり、この磁石列(A1,A2)間、磁石列
(B1,B2)間を所要のギャップ(Lg)寸法に調整位
置決めできるように構成してある。
As shown in FIG. 5, the arrangement of magnets in an undulator is such that a plurality of magnets of required dimensions having different magnetization directions are arranged horizontally in a required pattern so that the magnetic field direction changes alternately. Two pairs of magnet rows A 1 , A 2 and horizontal magnetic field magnet rows B 1 , B 2 , four magnet rows A 1 ,
A 2 , B 1 , and B 2 are horizontally arranged in four beams, up, down, left, and right, and are arranged so as to form a tunnel by being surrounded by a magnet array, but each magnet array can be individually moved in three axial directions. In order to obtain high-intensity radiated light of a predetermined wavelength, it is necessary to change the magnetic field strength, and between the magnet rows (A 1 , A 2 ) The structure is such that the gap between the magnet rows (B 1 , B 2 ) can be adjusted and positioned to a required gap (Lg) dimension.

【0005】上記の5図のアンジュレーターでは、磁石
列A1,A2,B1,B2が、z方向に移動したり、磁石列
1,A2がy方向に移動したり、磁石列B1,B2がx方
向に移動することにより、直線、楕円、円偏光が得られ
るもので、各磁石列A1,A2,B1,B2がそれぞれ個別
に3軸方向に移動可能なように機械的支持機構に保持さ
れるため、装置全体が大変複雑かつ大型化する問題があ
った。
In the undulator shown in FIG. 5, the magnet rows A 1 , A 2 , B 1 , B 2 move in the z direction, the magnet rows A 1 , A 2 move in the y direction, When the rows B 1 and B 2 move in the x direction, linear, elliptical, and circularly polarized light can be obtained, and the magnet rows A 1 , A 2 , B 1 , and B 2 individually move in three axial directions. Since the apparatus is held by a mechanical support mechanism as much as possible, there is a problem that the entire apparatus is very complicated and large.

【0006】そこで、近年では垂直方向に対向する上下
一対のビームに磁石列を保持させて、装置全体の簡素
化、小型化を図った構成のアンジュレーターが提案され
ている。すなわち、図4に示すごとく、上下3列ずつの
水平磁石列が相対するもので、上側は中央の磁石列A1
を挟み2つの磁石列B1,B2が配置され、下側も同様に
中央の磁石列A2を挟み2つの磁石列B3,B4が配置さ
れ、磁石列B1,A1,B2と磁石列B3,A2,B4との対
向面間距離が調整可能、すなわちy方向に移動可能に上
下3列ずつの水平磁石列が保持され、かつ磁石列B1
2,B3,B4がそれぞれz方向に移動可能に保持さ
れ、上下の中央の磁石列A1,A2間の距離調整、磁石列
1,B2,B3,B4のz方向の移動調整を行うことによ
り、直線、楕円、円偏光が得られる構成である。
Therefore, in recent years, there has been proposed an undulator having a structure in which a pair of upper and lower beams vertically opposed to each other holds a magnet array to simplify and reduce the size of the entire apparatus. That is, as shown in FIG. 4, the upper and lower horizontal magnet rows are opposed to each other, and the upper row is the center magnet row A 1.
, Two magnet rows B 1 , B 2 are arranged on the lower side, and two magnet rows B 3 , B 4 are similarly arranged on the lower side, sandwiching the central magnet row A 2 , and the magnet rows B 1 , A 1 , B The distance between the opposing surfaces of the magnets 2 and the magnet rows B 3 , A 2 , B 4 can be adjusted, that is, three upper and lower horizontal magnet rows are held so as to be movable in the y direction, and the magnet rows B 1 , B 2
B 2 , B 3 , and B 4 are respectively held so as to be movable in the z direction, the distance between the upper and lower central magnet rows A 1 and A 2 is adjusted, and the z of the magnet rows B 1 , B 2 , B 3 , and B 4 is adjusted. The configuration is such that linear, elliptical, and circularly polarized light can be obtained by adjusting the movement in the direction.

【0007】[0007]

【発明が解決しようとする課題】図4の3列一組上下対
向する磁石列からなる挿入型偏光発生装置の磁気回路
は、図5の4列の磁石列が個別に3軸方向に移動可能と
なる従来の構成に比べて、上下1本ずつのビームに支持
するため、基本的に小型軽量化が容易であるが、6列の
磁石列からなる磁気回路をコンパクトに収めるために
は、各磁石列を移動可能にした所要ホルダーに保持固定
させるための方法に工夫が必要になってくる。
The magnetic circuit of the insertion type polarized light generator shown in FIG. 4 consisting of a set of three magnets vertically opposed to each other can be moved in three axial directions individually. As compared with the conventional configuration, the beam is supported by one beam at the top and one at the bottom, so that it is basically easy to reduce the size and weight. It is necessary to devise a method for holding and fixing the magnet array to a required movable holder.

【0008】従来の4列の磁石列からなる磁気回路ユニ
ットの作製には、治具を用いて接着剤にて磁石を貼着固
定する方法が採用されていた。しかし、接着剤を介して
磁石を固着することは、その固着作業が煩雑であるばか
りでなく、固着強度も必ずしも十分とは言えず、特に当
該偏光発生装置を構成する磁気回路を超高真空環境内に
配置して使用する際には、接着剤からの樹脂揮発等があ
り、接着剤を使用することができない問題がある。
A conventional method of manufacturing a magnetic circuit unit composed of four rows of magnets has employed a method of attaching and fixing magnets with an adhesive using a jig. However, fixing the magnet via the adhesive not only complicates the fixing operation, but also does not always have sufficient fixing strength. Particularly, the magnetic circuit that constitutes the polarization generator is required to be installed in an ultra-high vacuum environment. When it is used by placing it in a space, there is a problem that the adhesive cannot be used because the resin volatilizes from the adhesive.

【0009】この発明は、挿入型偏光発生装置を構成す
る磁石列からなる磁気回路において、実質的に接着剤を
使用しないで磁石列を保持した磁気回路を形成できる構
成を目的とし、磁石列の所要の移動調整が可能な保持機
構に機械的な固着にて磁石をタイトに密着固定できる構
成の挿入型偏光発生装置の提供を目的としている。
SUMMARY OF THE INVENTION It is an object of the present invention to provide a magnetic circuit comprising a magnet array constituting an insertion type polarization generator, wherein a magnetic circuit holding the magnet array can be formed without using an adhesive. It is an object of the present invention to provide an insertion type polarization generator having a configuration in which a magnet can be tightly fixed to a holding mechanism capable of performing required movement adjustment by mechanically fixing the magnet tightly.

【0010】[0010]

【課題を解決するための手段】発明者らの一部は、3列
の磁石列を1組として上下に空隙を介して相対させた上
下一対の磁石列群にて磁気回路を構成する挿入型偏光発
生装置の磁石列を磁石支持台にて保持させる構成におい
て、強力なR−Fe−B系磁石を機械的に固着でき、磁
石列の組立てが容易になる機械的固着方法について種々
検討した結果、磁石列を所要方向に移動可能に保持され
た磁石支持台に装着するに際し、磁石に溝加工やテーパ
ー加工を施してこれと嵌合可能なクランプ部材やキーを
用いて固定可能な磁石ホルダーを磁石列毎に介在させる
ことにより、着磁方向が異なる多数の高磁力磁石を所要
パターンで配列し強固に固定することが容易にでき、形
成された磁石列毎の磁石ホルダーを容易に磁石支持台に
装着できることを知見した。
SUMMARY OF THE INVENTION A part of the present inventors has disclosed an insertion type in which a magnetic circuit is constituted by a pair of upper and lower magnet rows that are opposed to each other via a gap as a set of three magnet rows. In a configuration in which a magnet array of a polarization generator is held by a magnet support, strong R-Fe-B-based magnets can be mechanically anchored and results of various studies on a mechanical anchoring method that facilitates assembly of the magnet array. When mounting a magnet row on a magnet support table that is held movably in the required direction, a magnet holder that can be fixed using a clamp member or key that can be fitted with groove processing or taper processing on the magnet. By interposing each magnet row, a large number of high-magnetism magnets having different magnetization directions can be easily arranged and fixed in a required pattern, and the magnet holder for each formed magnet row can be easily mounted on the magnet support base. Can be attached to It was seen.

【0011】また、発明者らは、上記の磁石ホルダーを
磁石支持台に固着するに際して、磁石支持台をサブと本
体側の2分割型とすることにより、磁石ホルダーの磁石
支持台への装着を容易にできることに着目し、磁石ホル
ダーをボルト止めするサブと本体側の磁石支持台との結
合構成を検討したところ、サブと本体側の磁石支持台に
磁石配列方向にあり溝を設けて機械的な嵌合を確保し、
両者を垂直方向のボルトで締結するとともに、両者の側
端面を治具で連結して水平方向のボルトで固着すること
により、あり溝嵌合の機械的結合を強固かつ確実にでき
ることを知見し、この発明を完成した。
In addition, when the above-mentioned magnet holder is fixed to the magnet support base, the magnet support base is divided into a sub-type and a main body side so that the magnet holder can be mounted on the magnet support base. Focusing on the fact that it can be easily done, we examined the connection configuration between the sub that bolts the magnet holder and the magnet support base on the main body side. Secure mating,
By fastening both with vertical bolts, connecting both side end faces with jigs and fixing with horizontal bolts, we found that mechanical coupling of dovetail groove can be firmly and reliably performed, The present invention has been completed.

【0012】さらに発明者らは、目的とする偏光を得る
ために所定空隙内の磁場調整を実現するよう、上下一対
の磁石列群の各両サイドの水平磁場用磁石列と中央の垂
直磁場用磁石列とを水平(z軸)方向に相対的に移動可
能にするため、両サイドの水平磁場用磁石列の磁石ホル
ダーを固着載置した磁石支持台が直動式クロスローラー
ベアリングを介して装置基台に移動可能に装着すること
により、数μm〜10数μmの精度で移動調整が可能と
なることを知見し、この発明を完成した。
Further, the present inventors have proposed a horizontal magnetic field magnet array on each side of a pair of upper and lower magnet arrays and a central vertical magnetic field magnet so as to realize a magnetic field adjustment within a predetermined gap in order to obtain a desired polarization. In order to make it possible to relatively move the magnet array in the horizontal (z-axis) direction, a magnet support base on which the magnet holders of the magnet arrays for horizontal magnetic fields on both sides are fixedly mounted is mounted via a direct-acting cross roller bearing. The inventor of the present invention has found out that, by movably mounting the base, the movement can be adjusted with an accuracy of several μm to several tens of μm.

【0013】すなわち、この発明は、上下一対の磁石支
持台を有して水平磁場用磁石列と垂直磁場用磁石列が同
一の磁石支持台に載置される構成の挿入型偏光発生装置
において、磁石列毎に水平(z軸)方向に多数個の磁石
を直列に配列可能な磁石ホルダーに磁石を保持させて、
該磁石ホルダーを磁石支持台に固着する構成となし、磁
石ホルダーを垂直方向のボルトにて固着したサブ磁石支
持台を本体側の磁石支持台と磁石列方向に双方に設けた
あり溝にて嵌合可能となし、両者を垂直方向のボルトに
て固着し、かつ磁石支持台のサブと本体との長手側面を
治具で締結して水平方向のボルトにて固着した挿入型偏
光発生装置である。
That is, the present invention provides an insertion-type polarization generator having a pair of upper and lower magnet supports and having a horizontal magnetic field magnet row and a vertical magnetic field magnet row mounted on the same magnet support. The magnets are held by a magnet holder capable of arranging a large number of magnets in series in the horizontal (z-axis) direction for each magnet row,
The magnet holder is fixed to the magnet support table, and the sub-magnet support table to which the magnet holder is fixed with the vertical bolts is provided in the dovetail groove provided in both the magnet support table on the main body side and the magnet row direction. This is an insertion type polarization generator in which both are fixed with vertical bolts, and the longitudinal side surfaces of the sub and main body of the magnet support are fastened with a jig and fixed with horizontal bolts. .

【0014】また、この発明は、上下一対の磁石支持台
を有して水平磁場用磁石列と垂直磁場用磁石列が同一の
磁石支持台に載置される構成の挿入型偏光発生装置にお
いて、磁石列毎に水平(z軸)方向に多数個の磁石を直
列に配列可能な磁石ホルダーに保持させて、該磁石ホル
ダーを磁石支持台に固着する構成であり、中央の垂直磁
場用磁石列とその両サイドの水平磁場用磁石列の3列の
磁石列を1組として上下に空隙を介して相対させて上下
の磁石列群間の相対距離(y軸方向)を調整可能に、か
つ上下一対の磁石列群の各両サイド磁石列と中央の磁石
列とを水平(z軸)方向に相対的に移動可能に、当該磁
石列を保持する各磁石支持台が、例えば、直動式クロス
ローラーベアリングを介して装置基台に移動可能に装着
された挿入型偏光発生装置である。
According to the present invention, there is provided an insertion type polarization generator having a pair of upper and lower magnet supports, wherein a horizontal magnetic field magnet row and a vertical magnetic field magnet row are mounted on the same magnet support. A plurality of magnets are held in a magnet holder that can be arranged in series in the horizontal (z-axis) direction for each magnet row, and the magnet holder is fixed to a magnet support table. The three magnet rows of the horizontal magnetic field magnet rows on both sides are set as one set and are opposed to each other via an air gap so that the relative distance (y-axis direction) between the upper and lower magnet row groups can be adjusted. Each of the magnet supports for holding the magnet rows is, for example, a direct-acting cross roller so that both side magnet rows of the magnet row group and the center magnet row can be relatively moved in the horizontal (z-axis) direction. Insertable polarized light movably mounted on the device base via bearings It is a raw device.

【0015】さらに、上記の磁場調整型の挿入型偏光発
生装置において、磁石ホルダーを垂直方向のボルトにて
固着したサブ磁石支持台を本体側の磁石支持台と磁石列
方向に双方に設けたあり溝にて嵌合可能となし、両者を
垂直方向のボルトにて固着し、かつ磁石支持台のサブと
本体との長手側面を治具で締結して水平方向のボルトに
て固着した挿入型偏光発生装置を提案する。
Further, in the above-mentioned insertion type polarized light generator of the magnetic field adjustment type, a sub-magnet support base to which a magnet holder is fixed with a vertical bolt is provided on both the main body side magnet support direction and the magnet row direction. Insertion type polarized light that can be fitted in the groove, fixed both with a vertical bolt, and the longitudinal side of the sub and main body of the magnet support base is fastened with a jig and fixed with a horizontal bolt. A generator is proposed.

【0016】[0016]

【発明の実施の形態】この発明において、対象とする挿
入型偏光発生装置は、上下一対の磁石支持台を有して水
平磁場用磁石列と垂直磁場用磁石列が同一の磁石支持台
に載置され、水平磁場用磁石列と垂直磁場用磁石列が独
立して磁気ギャップ調整可能に可動に配置される構成で
あれば、実施例の挿入型偏光発生装置を初めいずれの構
成も採用できる。
BEST MODE FOR CARRYING OUT THE INVENTION In the present invention, an insertion type polarization generating apparatus to be used has a pair of upper and lower magnet supports, and a horizontal magnetic field magnet row and a vertical magnetic field magnet row are mounted on the same magnet support. As long as the horizontal magnetic field magnet row and the vertical magnetic field magnet row are arranged independently and movably so that the magnetic gap can be adjusted, any configuration including the insertion type polarization generator of the embodiment can be adopted.

【0017】この発明による挿入型偏光発生装置の磁石
支持台及び磁石ホルダーの構成を例を図面に基づいて詳
述する。図1に示す構成例は、図4に示すごとき上下一
対の磁石列群の下側をその磁石支持台及び磁石ホルダー
とともに示すもので、上側の磁石列群の磁石支持台及び
磁石ホルダーも同様構成を採用している。磁石ホルダー
10を載置した3分割型の磁石支持台1は水平(z軸)
方向のビームに載置され、例えば、図3に示すごとく支
柱30の垂直ガイド31に片持支持されるビーム27に
載置され、上下一対の磁石列群を支持する上下ビーム2
7,27が近接離反することで、磁気ギャップ調整可能
に構成されている。
The configuration of the magnet support and the magnet holder of the insertion type polarization generator according to the present invention will be described in detail with reference to the drawings. The configuration example shown in FIG. 1 shows the lower side of a pair of upper and lower magnet rows as shown in FIG. 4 together with their magnet supports and magnet holders, and the magnet supports and magnet holders of the upper magnet row group have the same configuration. Is adopted. The three-part magnet support 1 on which the magnet holder 10 is mounted is horizontal (z-axis).
For example, as shown in FIG. 3, the upper and lower beams 2 are mounted on a beam 27 that is cantilevered by a vertical guide 31 of a column 30 and supports a pair of upper and lower magnet rows.
The magnetic gap can be adjusted by moving the magnetic heads 7 and 27 toward and away from each other.

【0018】磁石支持台1は中央の垂直磁場用磁石列A
2のための磁石支持台2と両サイドの水平磁場用磁石列
3,B4を支持するための磁石支持台3,4に分割され
ており、それぞれ磁石ホルダー11,13,15を介し
て磁石列A2,B3,B4を固着保持している。
The magnet support 1 has a magnet array A for vertical magnetic field at the center.
Magnet support base 2 and the magnet array for a horizontal magnetic field on both sides B 3 for 2, B 4 is divided into the magnet support table 3 and 4 for supporting the respective through a magnet holder 11, 13 and 15 The magnet rows A 2 , B 3 and B 4 are fixedly held.

【0019】詳述すると、中央の磁石支持台2には垂直
磁場用磁石列A2を固着した磁石ホルダー11をボルト
止め等で載置固定してあり、垂直磁場用磁石列A2の各
ブロック状磁石はそれぞれキー溝を形成してキー12に
て磁石ホルダー11に固着してある。また、両サイドの
水平磁場用磁石列B3,B4を支持するための磁石支持台
3,4は、それぞれあり溝嵌合とボルト止めで載置固定
したサブ磁石支持台5,6を介して、磁石ホルダー1
3,15をボルト止めで載置固定してある。
[0019] In detail, the center of the magnet support base 2 are then placed and fixed the magnet holder 11 which is fixed a magnet array A 2 for vertical magnetic field bolting or the like, each block of the magnet for vertical field sequence A 2 Each of the magnets forms a key groove and is fixed to the magnet holder 11 by a key 12. Magnet supports 3 , 4 for supporting the horizontal magnetic field magnet rows B 3 , B 4 on both sides are provided via sub-magnet supports 5, 6, which are mounted and fixed by groove fitting and bolting, respectively. And magnet holder 1
3 and 15 are mounted and fixed with bolts.

【0020】詳述すると、サブ磁石支持台5,6の上面
に磁石ホルダー13,15を載置して下面側からボルト
7にて固着するもので、ボルト頭が露出しないよう植込
み型に構成してある。サブ磁石支持台5,6の下面と本
体側の磁石支持台3,4の上面には、双方に嵌合可能な
あり溝8が磁石配列方向に形成され、この両者をあり溝
嵌合させてサブ磁石支持台5,6上面より植込み型のボ
ルト7にて固着している。
More specifically, the magnet holders 13 and 15 are mounted on the upper surfaces of the sub-magnet support bases 5 and 6 and fixed by bolts 7 from the lower surface side. It is. On the lower surfaces of the sub-magnet supports 5 and 6 and the upper surfaces of the magnet supports 3 and 4 on the main body side, dovetail grooves 8 that can be fitted to both are formed in the magnet arrangement direction. The sub-magnet supports 5 and 6 are fixed from the upper surfaces with stud-type bolts 7.

【0021】さらに、サブ磁石支持台5,6と磁石支持
台3,4の各長手方向の側面には、水平方向の締結を確
保するための締結具9が設けられており、締結具9は横
押し治具9aの一方端がサブ磁石支持台5,6の側面に
ボルト9bにて螺着されて回動可能で他方端が磁石支持
台3,4の所要位置で横押しボルト9cにて貫通固着さ
れ、サブ磁石支持台5,6と磁石支持台3,4を前記の
あり溝8方向へ押圧することにより、両者の機械的嵌合
をより強固にしている。
Further, a fastener 9 for securing horizontal fastening is provided on each longitudinal side surface of the sub magnet support bases 5, 6 and the magnet support bases 3, 4. One end of the lateral pressing jig 9a is screwed to the side surfaces of the sub magnet support bases 5, 6 with bolts 9b and is rotatable, and the other end is at the required position of the magnet support bases 3, 4 with the lateral pressing bolt 9c. The sub-magnet supports 5 and 6 and the magnet supports 3 and 4 are pressed through in the direction of the dovetail groove 8 so as to further strengthen the mechanical fit between them.

【0022】なお、上述の各磁石列B3,B4の各ブロッ
ク状磁石は上面端に配列方向に嵌合用の浅い溝が設けら
れ、その対角位置の下部側面にも嵌合用の深い溝部bが
設けてあり、断面略L字型の磁石ホルダー13,15に
は前記磁石上面端の浅い溝に嵌合するように凸条14,
16が設けられ、また磁石下部側面の溝部bに挿入する
爪部を有するクランプ材17,18をホルダー端部にボ
ルト止めしてあり、磁石列B3,B4の各ブロック状磁石
が磁石ホルダー13,15に固着される。
Each of the block magnets in each of the above-mentioned magnet rows B 3 and B 4 has a shallow groove for fitting in the arrangement direction on the upper surface end, and a deep groove for fitting also on the lower side surface at the diagonal position. b are provided on the magnet holders 13 and 15 having a substantially L-shaped cross section so as to fit into the shallow groove at the upper end of the magnet.
16 are provided, and clamp members 17 and 18 each having a claw portion to be inserted into the groove b on the lower side surface of the magnet are bolted to the end of the holder, and each block-shaped magnet of the magnet rows B 3 and B 4 is a magnet holder. 13 and 15 are fixed.

【0023】また、磁石ホルダーや固着用のクランプ
材、ボルト、ビス、締結具などには非磁性材のステンレ
ス鋼、アルミ合金等を用いることができ、磁石列の各磁
石には高磁気特性で機械的強度の高いR−Fe−B系焼
結磁石等の希土類磁石が採用できる。
A non-magnetic material such as stainless steel or aluminum alloy can be used for the magnet holder, the clamp material for fixing, the bolt, the screw, the fastener, and the like. Rare earth magnets such as R-Fe-B based sintered magnets having high mechanical strength can be used.

【0024】次に、この発明による挿入型偏光発生装置
の他の構成例、すなわち上下一対の磁石列群の各両サイ
ドの水平磁場用磁石列と中央の垂直磁場用磁石列とを水
平(z軸)方向に相対的に移動可能にした構成例を図面
に基づいて詳述する。図2に示す磁石支持台及び磁石ホ
ルダーの構成は、図1に示す磁石支持台及び磁石ホルダ
ーの構成と同等であり、ここでは磁石支持台2,3,4
が、直動式クロスローラーベアリング25を介して支持
基台20に移動可能に装着された構成を示す。
Next, another example of the configuration of the insertion type polarization generator according to the present invention, that is, the horizontal magnetic field magnet rows on both sides and the central vertical magnetic field magnet rows on each side of a pair of upper and lower magnet rows are horizontally (z An example of a configuration that is relatively movable in the (axis) direction will be described in detail with reference to the drawings. The configuration of the magnet support and the magnet holder shown in FIG. 2 is the same as the configuration of the magnet support and the magnet holder shown in FIG.
Shows a configuration mounted movably on the support base 20 via a direct-acting cross roller bearing 25.

【0025】垂直磁場用磁石列A2を固着した磁石ホル
ダー11は、磁石支持台2にボルト止めされ、さらに支
持基台20の中央部にボルト止めされ、また、水平磁場
用磁石列B3,B4を固着した磁石ホルダー13,15
は、サブ磁石支持台5,6、磁石支持台3,4の順にボ
ルト止めされ、磁石列方向にボールねじ23,24を内
蔵したスライダー21,22にボルト止めされ、このス
ライダー21,22は支持基台20のビーム(z軸)方
向の溝部に配置されるが、直動式クロスローラーベアリ
ング25を介して支持基台20に移動可能に装着され
る。
The magnet holder 11 to which the vertical magnetic field magnet row A 2 is fixed is bolted to the magnet support 2, further bolted to the center of the support base 20, and the horizontal magnetic field magnet row B 3 , magnet holders 13, 15 fixed to B 4
Are bolted in the order of the sub-magnet supports 5, 6 and the magnet supports 3, 4 and bolted in the magnet row direction to sliders 21, 22 having ball screws 23, 24 built therein, and the sliders 21, 22 are supported. It is arranged in a groove in the beam (z-axis) direction of the base 20, but is movably mounted on the support base 20 via a direct-acting cross roller bearing 25.

【0026】支持基台20は台座26を介して装置のビ
ーム27に載置され、図3に示すごとく、ビーム27は
支柱30の垂直ガイド31に昇降自在に装着されるが、
支柱30に併設される垂直ねじ29を内蔵する垂直スラ
イダー28を介して、図2の構成からなる上下一対の磁
石列群を支持する上下の各ビーム27,27が近接離反
することで、磁気ギャップ調整可能に構成されている。
The support base 20 is mounted on a beam 27 of the apparatus via a pedestal 26. As shown in FIG. 3, the beam 27 is mounted on a vertical guide 31 of a column 30 so as to be able to move up and down.
The upper and lower beams 27, 27 supporting the pair of upper and lower magnet rows having the configuration shown in FIG. 2 approach and separate from each other via a vertical slider 28 having a vertical screw 29 provided in parallel with the column 30, thereby forming a magnetic gap. It is configured to be adjustable.

【0027】さらに、ビーム27,27には、支持基台
20が載置されるとともに、スライダー21,22のボ
ールねじ23,24を駆動するためのステップモーター
40が減速機を介して接続、載置され、スライダー2
1,22の移動量を測定するためのロータリーエンコー
ダー41も載置されている。
Further, the support base 20 is mounted on the beams 27, 27, and a step motor 40 for driving the ball screws 23, 24 of the sliders 21, 22 is connected and mounted via a reduction gear. Placed, slider 2
A rotary encoder 41 for measuring the amount of movement of the first and the second 22 is also mounted.

【0028】上述の磁石ホルダー、磁石支持台の構成で
は、上下ともに垂直磁場用磁石列A2は固定配置で、水
平磁場用磁石列B3,B4のいずれかあるいは両方をビー
ム(z軸)方向に移動させて磁場を変更し、所要の偏光
を得るが、同様構成を採用して、垂直磁場用磁石列A2
を可動型となし、水平磁場用磁石列B3,B4のいずれか
あるいは両方を固定させて磁場を変更することも可能で
あり、もちろん、図1のごとく、全ての磁石列をビーム
(z軸)方向に固定配置とすることもできる。
In the above-described configuration of the magnet holder and the magnet support base, the vertical magnetic field magnet row A 2 is fixedly arranged at the top and bottom, and one or both of the horizontal magnetic field magnet rows B 3 and B 4 are beam (z axis). change the magnetic field is moved in the direction and obtain the required polarization, it adopts the same structure, the magnet array a 2 for vertical magnetic field
Is movable, and the magnetic field can be changed by fixing one or both of the horizontal magnetic field magnet rows B 3 and B 4. Of course, as shown in FIG. It can also be fixedly arranged in the (axial) direction.

【0029】特に偏光発生装置を構成する磁気回路、す
なわち垂直磁場用磁石列及び水平磁場用磁石列を超高真
空環境内に配置して使用する場合は、一旦各々磁石列を
所定位置に配置した後に、該真空環境内にてビーム(z
軸)方向に移動させ、かつ超高真空を維持することは容
易ではなく、装置全体の大型化、複雑化を招くことか
ら、通常全ての磁石列を固定し、ビーム(z軸)方向に
移動しない構成を採用する。
In particular, when the magnetic circuit constituting the polarization generator, that is, the magnet array for the vertical magnetic field and the magnet array for the horizontal magnetic field are arranged and used in an ultra-high vacuum environment, the magnet arrays are once arranged at predetermined positions. Later, the beam (z
It is not easy to move in the (axial) direction and maintain an ultra-high vacuum, and this leads to an increase in the size and complexity of the entire apparatus. Therefore, usually, all magnet rows are fixed and moved in the beam (z-axis) direction. Adopt a configuration that does not.

【0030】一方、各々磁石列がビーム(z軸)方向に
相対的に移動可能な構成においては、種々の偏光を容易
に実現できる長所を有するが、先にも説明したように、
超高真空環境内での使用には不向きであることから、磁
気回路を大気中に配置する構成において特に有効とな
る。
On the other hand, a configuration in which each magnet row is relatively movable in the beam (z-axis) direction has an advantage that various polarizations can be easily realized, but as described above,
Since it is not suitable for use in an ultra-high vacuum environment, it is particularly effective in a configuration in which a magnetic circuit is arranged in the atmosphere.

【0031】なお、図3の装置の基本構造において、こ
こでは支柱30はレール33上を水平移動可能な移動基
台32上に装着されているが、固定構造など目的と用途
などに応じて種々の構成が採用できる。
In the basic structure of the apparatus shown in FIG. 3, the column 30 is mounted on a movable base 32 which can be moved horizontally on a rail 33. Can be adopted.

【0032】また、各々の磁石列の移動手段は図示のも
のに限定されず、要求される移動精度等に応じて、ステ
ップモータに替えてパルスモータ等の公知の移動モータ
を使用したり、ロータリーエンコーダー以外のスライダ
ー位置検出装置の採用等も可能である。
The means for moving each magnet row is not limited to the one shown in the figure, and a known moving motor such as a pulse motor may be used in place of a step motor, It is also possible to employ a slider position detecting device other than the encoder.

【0033】[0033]

【実施例】【Example】

実施例1 図1に示す構成の磁石支持台及び磁石ホルダーを有する
挿入型偏光発生装置(各々磁石列が一旦磁場調整を行っ
た後には、ビーム(z軸)方向に移動せず固定配置され
た構成)を、SUS316L等のステンレス鋼並びに表
面にTiN被膜を設けたBH(max)35MGOeの
R−Fe−B系焼結磁石を用いて作成したところ、室
温、ギャップ30mmで水平磁場強度が4.3kG、垂
直磁場強度が4.6kGの磁気特性を得た。この偏光発
生装置を構成する磁石列(磁気回路部)を超高真空装置
に入れて最終到達真空度を測定したところ、真空度1×
10-9Pa以下を達成できた。
Example 1 An insertion-type polarization generator having a magnet support base and a magnet holder having the configuration shown in FIG. 1 (after the magnet rows once adjusted the magnetic field, they were fixedly arranged without moving in the beam (z-axis) direction). Configuration) was made using a stainless steel such as SUS316L and an R-Fe-B sintered magnet of 35 MGOe BH (max) provided with a TiN coating on the surface. Magnetic properties of 3 kG and a vertical magnetic field strength of 4.6 kG were obtained. When the magnet array (magnetic circuit section) constituting this polarization generator was put into an ultra-high vacuum apparatus and the ultimate vacuum was measured, the degree of vacuum was 1 ×
10 -9 Pa or less could be achieved.

【0034】実施例2 図2、図3の構成からなる挿入型偏光発生装置を、SU
S316L等のステンレス鋼並びに表面にTiN被膜を
設けたBH(max)35MGOeのR−Fe−B系焼
結磁石を用いて作成したところ、大気中において、実施
例1とほぼ同程度の磁場強度を得ることができた。
Embodiment 2 An insertion type polarization generator having the configuration shown in FIGS.
When made using a stainless steel such as S316L and a BH (max) 35MGOe R-Fe-B based sintered magnet provided with a TiN coating on the surface, a magnetic field intensity almost equal to that of Example 1 was obtained in the atmosphere. I got it.

【0035】この偏光発生装置は、ボールねじ23,2
4を内蔵したスライダー21,22と支持基台20の間
の直動式クロスローラーベアリング25において、水平
方向に押圧する横押し治具などの採用により、クリアラ
ンスの最適化を図ったところ、数μmの精度で移動調整
が可能となった。
The polarized light generator includes ball screws 23, 2
In the direct-acting cross-roller bearing 25 between the sliders 21 and 22 having the built-in 4 and the support base 20, the clearance was optimized by adopting a horizontal pressing jig or the like for pressing in the horizontal direction. Movement adjustment is possible with the accuracy of.

【0036】[0036]

【発明の効果】この発明は、磁石列を所要方向に移動可
能に保持された磁石支持台に装着する挿入型偏光発生装
置において、磁石に溝加工やテーパー加工を施してこれ
と嵌合可能なクランプ部材やキーを用いて固定可能な磁
石ホルダーを磁石列毎に介在させ、形成された磁石列毎
の磁石ホルダーを磁石支持台に装着するに際し、磁石支
持台をサブと本体側の2分割型とし、磁石ホルダーをボ
ルト止めするサブと本体側の磁石支持台に磁石配列方向
にあり溝を設けて機械的な嵌合を確保し、両者を垂直方
向のボルトで締結するとともに、両者の側端面を治具で
連結して水平方向のボルトで固着することにより、あり
溝嵌合の機械的結合を強固かつ確実にできる。
According to the present invention, there is provided an insertion type polarization generating apparatus in which a magnet array is mounted on a magnet support table movably held in a required direction. A magnet holder that can be fixed using a clamp member or a key is interposed for each magnet row, and when the magnet holder for each formed magnet row is mounted on the magnet support, the magnet support is divided into a sub-type and a main body side. A groove is provided in the magnet arrangement direction on the sub-unit for bolting the magnet holder and the magnet support base on the main body side to secure mechanical fitting, and both are fastened with vertical bolts, and the side end faces of both Are connected by a jig and fixed with horizontal bolts, so that the mechanical connection of the dovetail fitting can be firmly and reliably performed.

【0037】特に、一旦磁場調整を行った後にビーム
(z軸)方向に各々の磁石列が相対移動しない構成にお
いては、機械的な固着にて接着剤を使用しないことによ
り、当該装置で要求される真空度1×10-9Pa以下で
の使用を達成できる。
In particular, in a configuration in which each magnet row does not relatively move in the beam (z-axis) direction after the magnetic field has been adjusted once, since the adhesive is not used by mechanical fixation, it is required in the apparatus. It can be used at a vacuum degree of 1 × 10 −9 Pa or less.

【0038】また、この発明は、磁場調整を実現するよ
う、上下一対の磁石列群の各両サイドの水平磁場用磁石
列と中央の垂直磁場用磁石列とを水平(z軸)方向に相
対的に移動可能にするため、両サイドの水平磁場用磁石
列の磁石ホルダーを固着載置した磁石支持台が直動式ク
ロスローラーベアリングを介して装置基台に移動可能に
装着することにより、数μm〜10数μmの精度で移動
調整が可能となる。
Further, according to the present invention, in order to realize magnetic field adjustment, the horizontal magnetic field magnet row and the central vertical magnetic field magnet row on each side of the pair of upper and lower magnet rows are relatively positioned in the horizontal (z-axis) direction. In order to be able to move freely, the magnet holder on which the magnet holders for the horizontal magnetic field magnet rows on both sides are fixedly mounted is movably mounted on the device base via direct-acting cross roller bearings, The movement can be adjusted with an accuracy of μm to several tens μm.

【図面の簡単な説明】[Brief description of the drawings]

【図1】この発明による挿入型偏光発生装置の磁石支持
台及び磁石ホルダーの構成を示す一部破断正面説明図で
ある。
FIG. 1 is a partially cutaway front view showing the configuration of a magnet support base and a magnet holder of an insertion type polarization generator according to the present invention.

【図2】この発明による挿入型偏光発生装置の磁石支持
台及び磁石ホルダーの他の構成を示す一部破断正面説明
図である。
FIG. 2 is a partially cutaway front view showing another configuration of the magnet support base and the magnet holder of the insertion type polarization generator according to the present invention.

【図3】この発明による挿入型偏光発生装置の構成を示
す概略説明図である。
FIG. 3 is a schematic explanatory view showing a configuration of an insertion type polarization generator according to the present invention.

【図4】この発明の対象とする挿入型偏光発生装置の磁
石列を示す斜視説明図である。
FIG. 4 is a perspective explanatory view showing a magnet array of the insertion type polarization generator to which the present invention is applied.

【図5】従来の挿入型偏光発生装置の磁石列を示す斜視
説明図である。
FIG. 5 is a perspective explanatory view showing a magnet row of a conventional insertion type polarization generator.

【符号の説明】[Explanation of symbols]

1,A2,B1,B2,B3,B4 磁石列 1,2,3,4, 磁石支持台 5,6 サブ磁石支持台 7,9b ボルト 8 あり溝 9 締結具 9a 横押し治具 9c 横押しボルト 10,11,13,15 磁石ホルダー 12 キー 14,16 凸条 17,18,22 クランプ材 20 支持基台 21,22 スライダー 23,24 ボールねじ 25 直動式クロスローラーベアリング 26 台座 27 ビーム 28 スライダー 30 支柱 31 垂直ガイド 32 移動基台 33 レール 40 ステップモーター 41 ロータリーエンコーダーA 1 , A 2 , B 1 , B 2 , B 3 , B 4 Magnet row 1, 2, 3, 4, Magnet support 5,6 Sub-magnet support 7,9b Bolt 8 Groove 9 Fastener 9a Lateral push Jig 9c Lateral push bolt 10, 11, 13, 15 Magnet holder 12 Key 14, 16 Protrusion 17, 18, 22 Clamping material 20 Support base 21, 22, Slider 23, 24 Ball screw 25 Direct-acting cross roller bearing 26 Pedestal 27 Beam 28 Slider 30 Support 31 Vertical guide 32 Moving base 33 Rail 40 Step motor 41 Rotary encoder

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 上下一対の磁石支持台を有して水平磁場
用磁石列と垂直磁場用磁石列が同一の磁石支持台に載置
される構成の挿入型偏光発生装置において、磁石列毎に
水平(z軸)方向に多数個の磁石を直列に配列可能な磁
石ホルダーに磁石を保持させて、該磁石ホルダーを磁石
支持台に固着する構成となし、磁石ホルダーを垂直方向
のボルトにて固着したサブ磁石支持台を本体側の磁石支
持台と磁石列方向に双方に設けたあり溝にて嵌合可能と
なし、両者を垂直方向のボルトにて固着し、かつ磁石支
持台のサブと本体との長手側面を治具で締結して水平方
向のボルトにて固着した挿入型偏光発生装置。
1. An insertion-type polarization generator having a pair of upper and lower magnet supports and a magnet row for horizontal magnetic field and a magnet row for vertical magnetic field mounted on the same magnet support. A structure is adopted in which a magnet is held by a magnet holder capable of arranging a large number of magnets in series in the horizontal (z-axis) direction, and the magnet holder is fixed to a magnet support table, and the magnet holder is fixed by a bolt in a vertical direction. The magnet support base on the main body side and the magnet row can be fitted in dovetail grooves provided in both directions in the magnet row direction, and both are fixed with vertical bolts. An insertion type polarization generator in which the longitudinal side faces are fastened with a jig and fixed with horizontal bolts.
【請求項2】 上下一対の磁石支持台を有して水平磁場
用磁石列と垂直磁場用磁石列が同一の磁石支持台に載置
される構成の挿入型偏光発生装置において、磁石列毎に
水平(z軸)方向に多数個の磁石を直列に配列可能な磁
石ホルダーに保持させて、該磁石ホルダーを磁石支持台
に固着する構成であり、中央の垂直磁場用磁石列とその
両サイドの水平磁場用磁石列の3列の磁石列を1組とし
て上下に空隙を介して相対させて上下の磁石列群間の相
対距離(y軸方向)を調整可能に、かつ上下一対の磁石
列群の各両サイド磁石列と中央の磁石列とを水平(z
軸)方向に相対的に移動可能に、当該磁石列を保持する
各磁石支持台が装置基台に移動可能に装着された挿入型
偏光発生装置。
2. An insertion-type polarization generator having a pair of upper and lower magnet supports and having a horizontal magnetic field magnet row and a vertical magnetic field magnet row mounted on the same magnet support, In this configuration, a large number of magnets are held in a magnet holder that can be arranged in series in the horizontal (z-axis) direction, and the magnet holder is fixed to a magnet support table. A pair of upper and lower magnet rows can be adjusted by adjusting the relative distance (y-axis direction) between the upper and lower magnet rows by vertically aligning the three magnet rows of the horizontal magnetic field row as a set through a gap. Of each side magnet row and the center magnet row are horizontal (z
An insertion-type polarization generator in which each magnet support for holding the magnet row is movably mounted on the device base so as to be relatively movable in the axial direction.
【請求項3】 請求項2において、磁石ホルダーを固着
載置した磁石支持台が直動式クロスローラーベアリング
を介して装置基台に移動可能に装着された挿入型偏光発
生装置。
3. The insertion type polarization generator according to claim 2, wherein the magnet support on which the magnet holder is fixedly mounted is movably mounted on the apparatus base via a direct-acting cross roller bearing.
【請求項4】 請求項2または請求項3において、磁石
ホルダーを垂直方向のボルトにて固着したサブ磁石支持
台を本体側の磁石支持台と磁石列方向に双方に設けたあ
り溝にて嵌合可能となし、両者を垂直方向のボルトにて
固着し、かつ磁石支持台のサブと本体との長手側面を治
具で締結して水平方向のボルトにて固着した挿入型偏光
発生装置。
4. A sub-magnet supporter according to claim 2 or 3, wherein the magnet holder is fixed with a vertical bolt, and is fitted in a dovetail groove provided on both the main body side magnet supporter and the magnet row direction. An insertion type polarization generator in which both are fixed with a vertical bolt and the longitudinal side surfaces of the sub and main body of the magnet support are fastened with a jig and fixed with a horizontal bolt.
JP20246997A 1997-03-24 1997-07-11 Insertion type polarized light generator Pending JPH10326700A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20246997A JPH10326700A (en) 1997-03-24 1997-07-11 Insertion type polarized light generator

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP9013797 1997-03-24
JP9-90137 1997-03-24
JP20246997A JPH10326700A (en) 1997-03-24 1997-07-11 Insertion type polarized light generator

Publications (1)

Publication Number Publication Date
JPH10326700A true JPH10326700A (en) 1998-12-08

Family

ID=26431641

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20246997A Pending JPH10326700A (en) 1997-03-24 1997-07-11 Insertion type polarized light generator

Country Status (1)

Country Link
JP (1) JPH10326700A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015155853A1 (en) * 2014-04-09 2015-10-15 株式会社日立製作所 Six-row type undulator and control method therefor
JP2019175766A (en) * 2018-03-29 2019-10-10 日立金属株式会社 Insertion light source
JP2021034344A (en) * 2019-08-29 2021-03-01 日立金属株式会社 Insertion light source
CN114501769A (en) * 2022-02-25 2022-05-13 中国科学院高能物理研究所 Mango twisting device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015155853A1 (en) * 2014-04-09 2015-10-15 株式会社日立製作所 Six-row type undulator and control method therefor
JP2019175766A (en) * 2018-03-29 2019-10-10 日立金属株式会社 Insertion light source
JP2021034344A (en) * 2019-08-29 2021-03-01 日立金属株式会社 Insertion light source
CN114501769A (en) * 2022-02-25 2022-05-13 中国科学院高能物理研究所 Mango twisting device

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