JPH10325789A - Crystal vibrator moisture sensor - Google Patents

Crystal vibrator moisture sensor

Info

Publication number
JPH10325789A
JPH10325789A JP13494597A JP13494597A JPH10325789A JP H10325789 A JPH10325789 A JP H10325789A JP 13494597 A JP13494597 A JP 13494597A JP 13494597 A JP13494597 A JP 13494597A JP H10325789 A JPH10325789 A JP H10325789A
Authority
JP
Japan
Prior art keywords
cellulose
film
quartz oscillator
humidity sensor
moisture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13494597A
Other languages
Japanese (ja)
Other versions
JP2969264B2 (en
Inventor
Hiroyuki Kusano
浩幸 草野
Shinichi Kimura
伸一 木村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tottori Prefectural Government
Original Assignee
Tottori Prefectural Government
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tottori Prefectural Government filed Critical Tottori Prefectural Government
Priority to JP9134945A priority Critical patent/JP2969264B2/en
Publication of JPH10325789A publication Critical patent/JPH10325789A/en
Application granted granted Critical
Publication of JP2969264B2 publication Critical patent/JP2969264B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

PROBLEM TO BE SOLVED: To improve the moisture resistance and durability of a moisture- sensing film and hence prevent deterioration, by accumulating the single- molecular film of a cellulose dielectric where hydrophobic long chain is added to cellulose macromolecule horizontally on the electrode surface of a crystal vibrator and fixing it in a layer. SOLUTION: A monomolecular film 5 of a cellulose dielectric where a hydrophobic long chain is added to the cellulose macromolecule is horizontally accumulated and fixed in a layer on the surface of a gold electrode 3 that is deposited on both surfaces of a crystal vibrator 1 that is optically polished. In the cellulose macromolecule, one portion or entire portion of cellulose hydroxyl group is a fatty acid of for example at least one type of acetic acid, butyric acid, myristic acid, and stearic acid and is esterified fatty acid cellulose ester or its mixture. Then, the monomolecular film 5 is formed by dissolving a developed solution to a chloroform solvent and developing it onto pure water at 10-20 deg.C, and is overlapped horizontally on the surface of the gold electrode 3 of the crystal vibrator 1 that is a fixed surface one by one, and a thin film is formed in a layer and is fixed.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、植物の培養機、小
植物体の生育環境を測定するための高湿度試験器等高湿
度環境下で湿度計測ができる水晶振動子湿度センサの技
術の分野に属するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to the field of a quartz oscillator humidity sensor capable of measuring humidity in a high humidity environment, such as a plant incubator, a high humidity tester for measuring the growth environment of a small plant, and the like. It belongs to

【0002】[0002]

【従来の技術】例えば、種苗生産において、種子の段階
あるいは植物の初期の成長段階から高湿度状態が生育反
応速度や形質発現反応によい影響を与えることから、高
湿度精密制御のできる培養機、小植物体の生育環境を測
定するための高湿度試験器等に最適の高湿度での安定し
た湿度計測ができる水晶振動子湿度センサが必要である
ことは、知られている。
2. Description of the Related Art In a seedling production, for example, since a high humidity condition has a good effect on a growth reaction rate and a trait expression reaction from a seed stage or an early growth stage of a plant, an incubator capable of precise control of high humidity is provided. It is known that there is a need for a quartz oscillator humidity sensor that can stably measure humidity at high humidity, which is optimal for a high humidity tester for measuring the growth environment of small plants.

【0003】そして、従来公知の水晶振動子湿度センサ
として、例えば、特開平2−285236号公報に記載
されている「水分を吸着する性質を有する親水性重合体
を適当な溶媒に溶かし、その溶液を水晶振動子の表面に
塗布し、溶媒を揮発させることによりそこに水分吸着膜
を形成させたもの」がある。そして、このものは、水溶
性無機ハロゲン塩、親水性重合体および水溶性有機溶媒
よりなるドープ液を水晶振動子の電極表面に塗布した後
水表面と接触ゲル化させ、乾燥して水晶振動子センサを
製造するというものである。
As a conventionally known quartz oscillator humidity sensor, for example, a method disclosed in Japanese Patent Application Laid-Open No. 2-285236, "A hydrophilic polymer having a property of adsorbing moisture is dissolved in a suitable solvent, Is applied to the surface of a quartz oscillator, and a solvent is volatilized to form a moisture-adsorbing film thereon. " Then, a dope consisting of a water-soluble inorganic halogen salt, a hydrophilic polymer and a water-soluble organic solvent is applied to the electrode surface of the quartz oscillator, and then gelled in contact with the water surface, dried, and dried. It is to manufacture sensors.

【0004】セルロース;酢酸セルロース、酪酸セルロ
ース、プロピオン酸セルロース、酢酸酪酸セルロースな
どの脂肪酸セルローストリエステル若しくはそれらの混
合物;エチルセルロース、メチルセルロースなどのセル
ロースエーテル;またはニトロセルロース等の親水性成
分としてのセルロース系高分子と疎水性成分としてのニ
グロシンとを有する高分子材料を感湿膜として用いる、
つまり、親水性と疎水性の相反する2つの性質を有する
高分子薄膜を水晶振動子面上に高分子感膜湿を形成した
水晶振動子湿度センサは、特開平8−105830号に
記載されている。
Cellulose; fatty acid cellulose triesters such as cellulose acetate, cellulose butyrate, cellulose propionate and cellulose acetate butyrate or mixtures thereof; cellulose ethers such as ethyl cellulose and methyl cellulose; and cellulose-based polymers such as nitrocellulose as hydrophilic components. Using a polymer material having a molecule and nigrosine as a hydrophobic component as a moisture-sensitive film,
That is, a quartz oscillator humidity sensor in which a polymer thin film having two properties of hydrophilic and hydrophobic contradicting each other and a polymer sensitive film moisture is formed on the quartz oscillator face is disclosed in JP-A-8-105830. I have.

【0005】また、コーティング法によって形成された
ポリエーテルスルホン感湿膜を水晶振動子表面に形成し
た水晶振動子湿度センサは、特開平7−260661号
に記載されている。
[0005] A quartz oscillator humidity sensor in which a polyethersulfone moisture-sensitive film formed by a coating method is formed on the surface of a quartz oscillator is described in JP-A-7-260661.

【0006】[0006]

【発明が解決しようとする課題】上記の公報に記載され
ている湿度センサは、いずれも感湿膜内の分子配列が乱
雑であるため、高湿度において過多の水分子吸湿を伴
い、感湿膜の劣化につながるおそれがあり、高湿度セン
サとしての耐湿性、耐久性が劣るという問題を有してい
る。
In any of the humidity sensors described in the above publications, since the molecular arrangement in the moisture-sensitive film is disordered, the moisture sensor absorbs too much water molecules at high humidity. There is a problem that the humidity resistance and durability of the high humidity sensor are inferior.

【0007】本発明は、感湿膜内分子の配列状態を制御
することにより、分子の最密凝集状態を実現し、感湿膜
内侵入分子の抑制により水晶振動子湿度センサの耐湿
性、耐久性を向上させることができる水晶振動子湿度セ
ンサの提供を目的とするものである。
The present invention realizes a close-packed state of molecules by controlling the arrangement state of the molecules in the moisture-sensitive film, and suppresses the invasion of the molecules in the moisture-sensitive film. It is an object of the present invention to provide a quartz oscillator humidity sensor capable of improving the performance.

【0008】[0008]

【課題を解決するための手段】上記課題を解決するため
の本発明に係る水晶振動子湿度センサは、水晶振動子の
電極表面に、セルロース高分子に疎水性長鎖を付加した
セルロース誘導体の単分子膜を水平に累積して層状に固
定したものである。
A quartz oscillator humidity sensor according to the present invention for solving the above-mentioned problems comprises a single crystal of a cellulose derivative obtained by adding a hydrophobic long chain to a cellulose polymer on the electrode surface of the quartz oscillator. Molecular films are accumulated horizontally and fixed in layers.

【0009】本発明に係る水晶振動子湿度センサにおけ
る水晶振動子は、光学研磨されたものである。
The quartz oscillator in the quartz oscillator humidity sensor according to the present invention is optically polished.

【0010】本発明に係る水晶振動子湿度センサにおけ
るセルロース誘導体は、セルロースの水酸基を長鎖脂肪
酸でエステル化したものである。
The cellulose derivative in the quartz oscillator humidity sensor according to the present invention is obtained by esterifying a hydroxyl group of cellulose with a long-chain fatty acid.

【0011】本発明に係る水晶振動子湿度センサにおけ
るセルロース誘導体の単分子膜は、展開溶液をクロロホ
ルム溶媒に溶かし、10℃〜20℃の純水上に展開して
作製したものである。
The cellulose derivative monomolecular film in the quartz oscillator humidity sensor according to the present invention is prepared by dissolving a developing solution in a chloroform solvent and developing the solution on pure water at 10 ° C. to 20 ° C.

【0012】[0012]

【発明の実施の形態】図を参照して本発明に係る水晶振
動子湿度センサの実施の形態を説明すると、図1から図
3に記載されているように、水晶振動子1は、水晶面2
の両面に金電極3が蒸着されており、金電極3の表面に
は、セルロース高分子に疎水性長鎖を付加したセルロー
ス誘導体の単分子膜5が水平に層状に累積固定されてい
る。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A preferred embodiment of a quartz oscillator humidity sensor according to the present invention will be described with reference to the drawings. As shown in FIGS. 2
A gold electrode 3 is vapor-deposited on both surfaces of the substrate, and a monolayer 5 of a cellulose derivative obtained by adding a hydrophobic long chain to a cellulose polymer is horizontally fixed on the surface of the gold electrode 3 in a layered manner.

【0013】水晶振動子1は、光学研磨されものであ
り、セルロース誘導体は、セルロースの水酸基を長鎖脂
肪酸でエステル化したものである。そして、セルロース
誘導体の単分子膜5は、展開溶液をクロロホルム溶媒に
溶かし、10℃〜20℃の純水上に展開して作製したも
のである。セルロース系高分子は、セルロースの水酸基
の一部または全部が1種類もしくは2種類以上の酢酸、
酪酸、ミリスチン酸、ステアリン酸等の脂肪酸であり、
エステル化された脂肪酸セルロースエステルもしくはそ
の混合物である。
The quartz oscillator 1 is optically polished, and the cellulose derivative is obtained by esterifying a hydroxyl group of cellulose with a long-chain fatty acid. The cellulose derivative monomolecular film 5 is prepared by dissolving a developing solution in a chloroform solvent and developing the solution on pure water at 10 ° C to 20 ° C. Cellulose-based polymer, a part or all of the hydroxyl groups of cellulose is one or more acetic acid,
Butyric acid, myristic acid, fatty acids such as stearic acid,
It is an esterified fatty acid cellulose ester or a mixture thereof.

【0014】本発明における水晶振動子1の金電極3の
表面への、セルロース高分子に疎水性長鎖を付加したセ
ルロース誘導体の単分子膜5の固定は、単分子累積法と
も言われるラングミュア膜の作製法、つまり、水面上に
形成したセルロース誘導体の単分子膜5を固定表面であ
る水晶振動子1の金電極3の表面に1枚ずつ水平に重ね
て層状に薄膜を形成固定することによって作製した。
The immobilization of the monomolecular film 5 of a cellulose derivative obtained by adding a hydrophobic long chain to a cellulosic polymer on the surface of the gold electrode 3 of the crystal unit 1 in the present invention is performed by a Langmuir film called a monomolecular accumulation method. That is, the monolayer 5 of the cellulose derivative formed on the water surface is horizontally stacked one by one on the surface of the gold electrode 3 of the crystal unit 1 which is the fixed surface, and a thin film is formed and fixed in layers. Produced.

【0015】疎水基の末端に親水基が付いた分子、例え
ばステアリン酸(CH3(CH216COOH)は、水面
上で親水基−COOHを下に向けて単分子の層になる性
質を持っており、この単分子層は2次元系で分子間距離
の大小によって「気体膜」、「液体膜」あるいは「個体
膜」となる。そして、単分子層を固体表面へ移すには大
別して2通りの方法がある。一つは「垂直侵せき法」
で、水面を横切って個体基盤を上下させ、十分な表面圧
をかけて個体膜の状態に保っておくと、各行程ごとに1
枚ずつ単分子層が重なって作製され、成膜分子の向きが
引き上げ行程と侵せき行程とが逆になり、出来上がった
ラングミュア膜は2分子層を単位胞とする層状構造を持
ったY型の膜構造ができるというものである。
A molecule having a hydrophilic group at the end of a hydrophobic group, for example, stearic acid (CH 3 (CH 2 ) 16 COOH) has a property of forming a monomolecular layer with the hydrophilic group —COOH facing downward on the water surface. This monomolecular layer is a two-dimensional system and becomes a “gas film”, “liquid film” or “solid film” depending on the size of the intermolecular distance. Then, there are roughly two methods for transferring the monomolecular layer to the solid surface. One is "vertical breach method"
By raising and lowering the solid base across the water surface and applying sufficient surface pressure to maintain the solid membrane,
The monomolecular layers are stacked one by one, and the orientation of the film forming molecules is reversed between the lifting process and the erosion process. The resulting Langmuir film is a Y-type having a layered structure with two molecular layers as unit cells. A film structure can be formed.

【0016】またもう一つは、「水平付着法」で、基盤
を水平に構え上から水面に接着させて移し取るというも
ので、この方法では成膜分子の向きの交代はなく、疎水
基が基盤側に向いた単分子層を単位胞とするX型の膜構
造ができるというものである。本発明は、垂直浸せき法
及び水平付着法によった。
The other is the "horizontal attachment method" in which the substrate is held horizontally and adhered to the water surface and then transferred. In this method, the orientation of the film-forming molecules is not changed, and the hydrophobic groups are removed. An X-type membrane structure having a monolayer facing the substrate as a unit cell can be formed. The invention relied on a vertical dipping method and a horizontal deposition method.

【0017】図4は、水晶振動子1の発信周波数測定に
使用したCMOSインバータを用いた帰還発信回路の1
例を示すもので、図に示すように、水晶振動子1、イン
バータ6、抵抗R、コンデンサCから構成されており、
測定値を表示するマイクロウェーブカウンタ7に連結さ
れている。本回路は水晶振動子1を誘導性リアクタンス
素子として用い、2つのコンデンサCとの間で発信回路
を形成することにより、水晶振動子1の機械振動を安定
的に電気信号に変換できるものである。
FIG. 4 shows a feedback oscillation circuit 1 using a CMOS inverter used for measuring the oscillation frequency of the crystal unit 1.
It shows an example, and as shown in the figure, is composed of a crystal oscillator 1, an inverter 6, a resistor R, and a capacitor C,
It is connected to a microwave counter 7 which displays the measured values. This circuit uses the crystal unit 1 as an inductive reactance element and forms a transmission circuit between the two capacitors C so that the mechanical vibration of the crystal unit 1 can be stably converted into an electric signal. .

【0018】金電極3を蒸着した15MHZの水晶振動
子1にステアリン酸を1層累積した後、公知の垂直浸漬
法及び水平付着法により、セルロース誘導体の単分子膜
5が水平に層状に累積固定されている。
After one layer of stearic acid is accumulated on the 15 MHz quartz oscillator 1 on which the gold electrode 3 is deposited, the monolayer 5 of the cellulose derivative is accumulated and fixed horizontally in a layered manner by a known vertical immersion method and a horizontal attachment method. Have been.

【0019】金電極3との密着性向上のため、まずステ
アリン酸単分子膜を累積する。その後、パルミトイルセ
ルロースをクロロホルム溶媒に1m mol glucose/1溶かし
た展開溶液を水温10℃〜20℃の純水上に展開し、水
平付着法により片側2層の層厚が約40Åの累積膜を形
成した。
In order to improve the adhesion with the gold electrode 3, first, a monomolecular film of stearic acid is accumulated. Thereafter, a developing solution in which palmitoyl cellulose was dissolved in chloroform solvent at 1 mmol glucose / 1 was spread on pure water at a water temperature of 10 ° C. to 20 ° C., and two layers on one side were formed into a cumulative film having a thickness of about 40 ° by a horizontal adhesion method. did.

【0020】このようにして表面にパルミトイルセルロ
ース感湿膜を形成させた1個の水晶振動子1を用いた水
晶振動子発信回路が図4に示されており、測定された周
波数はマイクロウエーブカウンタ7によって計測される
ようにした周波数測定装置8を10℃〜20℃の恒温恒
湿の水槽中に設置し、相対湿度に対する周波数変化を計
測した。
FIG. 4 shows a quartz oscillator transmitting circuit using one quartz oscillator 1 having a palmitoyl cellulose moisture-sensitive film formed on the surface in this manner. The measured frequency is a microwave counter. The frequency measuring device 8 measured by 7 was installed in a constant temperature and constant humidity water bath at 10 ° C. to 20 ° C., and the frequency change with respect to the relative humidity was measured.

【0021】本発明に係る水晶振動子湿度センサの水晶
振動子1の金電極3の表面に、セルロース高分子に疎水
性長鎖を付加したセルロース誘導体の単分子膜5を水平
に累積して層状に固定した時の膜質を占有面積と表面圧
との関係で表した図5に示すように、展開液の温度が1
7℃の時が表面圧が30mN/mから5mN/mの間で
直線的に減少していることから累積時の膜質の良好さが
分かる。
A monolayer film 5 of a cellulose derivative obtained by adding a hydrophobic long chain to a cellulose polymer is horizontally accumulated on the surface of the gold electrode 3 of the crystal unit 1 of the crystal unit humidity sensor according to the present invention. As shown in FIG. 5 which shows the film quality when fixed to the relationship between the occupied area and the surface pressure, the temperature of the developing solution
At 7 ° C., the surface pressure decreases linearly between 30 mN / m and 5 mN / m, indicating good film quality during accumulation.

【0022】また、展開液の温度が25℃の時も表面圧
が25mN/mから15mN/mの間で直線的に減少し
ていることから、展開液の温度17℃のものに次いで累
積時の膜質が良好であるといえる。
When the developing solution temperature is 25 ° C., the surface pressure decreases linearly between 25 mN / m and 15 mN / m. Can be said to have good film quality.

【0023】このようにして作成された水晶振動子湿度
センサの相対湿度と感湿膜重量(共振周波数の変化から
求めた)との間には、図6に示すように、良好な直線的
関係がもたらされた。また、高温放置として、100℃
に24時間放置したが、その吸湿特性に変化はみられな
かった。
As shown in FIG. 6, a good linear relationship between the relative humidity of the quartz oscillator humidity sensor thus produced and the weight of the moisture-sensitive film (determined from the change in the resonance frequency). Was brought. In addition, 100 ℃
For 24 hours, no change was observed in its moisture absorption properties.

【0024】その結果、図6に示すように、相対湿度1
2〜95%の範囲内で、相対湿度10%あたり、約10
Hz周波数シフト量が変化しており、相対湿度と周波数
シフト量の間に良好な相関関係があり、この感湿膜を形
成した水晶振動子が湿度センサとして十分に機能するこ
とがわかる。
As a result, as shown in FIG.
In the range of 2 to 95%, about 10% relative humidity and about 10%
The Hz frequency shift amount changes, and there is a good correlation between the relative humidity and the frequency shift amount. It can be seen that the quartz resonator having the moisture-sensitive film functions sufficiently as a humidity sensor.

【0025】水晶振動子湿度センサの耐湿性試験は、水
晶振動子湿度センサを一次蒸留水に30分浸した後、1
日風乾し、再び湿度に対する感度を測定するという耐湿
性繰り返し実験を3回行った。
The humidity resistance test of the quartz oscillator humidity sensor is performed by immersing the quartz oscillator humidity sensor in primary distilled water for 30 minutes,
Repeated moisture resistance experiments were performed three times: air-drying and measuring sensitivity to humidity again.

【0026】3回の実験の結果、図7に示すように、パ
ルミトイルセルロースのキャスト膜湿度センサ(グラフ
中の◇印)の感湿度は試験回数が増えると測定値変化量
が低下している。これは、キャスト膜が金電極3の表面
から剥離し、そのために水分の吸着率が低下し、キャス
ト膜湿度センサの感湿度が劣化することを物語っている
のに対して、本発明に係るパルミトイルセルロース感湿
膜湿度センサ(グラフ中の○印)にはキャスト膜質度セ
ンサのような膜の剥離が生ぜず、したがって、湿度セン
サの耐湿性に変化はなく、耐湿性が優れれていることが
わかる。なお、図7におけるX0は周波数の測定値の初
期値を示し、Xは試験後の周波数の測定値を示すもので
ある。
As a result of the three experiments, as shown in FIG. 7, the change in the measured value of the humidity sensitivity of the palmitoyl cellulose cast film humidity sensor (indicated by a triangle in the graph) decreases as the number of tests increases. This indicates that the cast film peeled off from the surface of the gold electrode 3, thereby lowering the moisture adsorption rate and deteriorating the humidity sensitivity of the cast film humidity sensor. Cellulose moisture-sensitive film humidity sensor (marked with ○ in the graph) does not peel off the film like the cast film quality sensor, and therefore, there is no change in the humidity resistance of the humidity sensor, and it has excellent moisture resistance. Recognize. In FIG. 7, X0 indicates the initial value of the measured value of the frequency, and X indicates the measured value of the frequency after the test.

【0027】上記のように、この水晶振動子湿度センサ
が相対湿度95%R.H.で安定した動作をすることを
確認したあと、相対湿度30%R.H.の雰囲気中に瞬
間さらした。その結果、図8に示すように、約20秒で
一定値に集束した。このことから、湿度変化への応答性
が極めて良いことが理解できる。
As described above, the quartz oscillator humidity sensor has a relative humidity of 95% R. H. After confirming that the device operates stably at a relative humidity of 30% R. H. Momentarily exposed to the atmosphere. As a result, as shown in FIG. 8, the light was focused to a constant value in about 20 seconds. From this, it can be understood that the response to the humidity change is extremely good.

【0028】[0028]

【発明の効果】本発明に係る水晶振動子湿度センサは、
耐水性の点で一段と優れ、高湿度での安定した湿度測定
が可能であるという効果を奏する。
The quartz oscillator humidity sensor according to the present invention has the following features.
It is more excellent in terms of water resistance, and has an effect that stable humidity measurement at high humidity is possible.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明に係る水晶振動子湿度センサの実施の形
態の一つを示す平面図である。
FIG. 1 is a plan view showing one embodiment of a quartz oscillator humidity sensor according to the present invention.

【図2】図1のA−A線断面図である。FIG. 2 is a sectional view taken along line AA of FIG.

【図3】図2のBで示す一点鎖線内の拡大断面図であ
る。
FIG. 3 is an enlarged sectional view taken along a dashed line indicated by B in FIG. 2;

【図4】本発明に係る水晶振動子湿度センサを用いた水
晶振動子発信回路の実施の形態の一つを示す図である。
FIG. 4 is a diagram showing one embodiment of a crystal oscillator transmission circuit using a crystal oscillator humidity sensor according to the present invention.

【図5】本発明における単分子膜を水平に累積して層状
に固定した時の膜質を占有面積と表面圧との関係で示し
たグラフ図である。
FIG. 5 is a graph showing the film quality when monolayers are horizontally accumulated and fixed in a layered form according to the present invention in relation to occupied area and surface pressure.

【図6】本発明に係る水晶振動子湿度センサを用いての
湿度計側例を周波数シフト量と相対湿度との関係で示し
たグラフ図である。
FIG. 6 is a graph showing an example of a hygrometer using a quartz oscillator humidity sensor according to the present invention in a relationship between a frequency shift amount and a relative humidity.

【図7】本発明に係る水晶振動子湿度センサの耐湿性試
験結果を測定値変化量と試験回数との関係で示したグラ
フ図である。
FIG. 7 is a graph showing the results of a moisture resistance test of the quartz oscillator humidity sensor according to the present invention in the relationship between the measured value change amount and the number of tests.

【図8】本発明に係る水晶振動子湿度センサの脱湿時間
を周波数シフト量との関係で示したグラフ図である。
FIG. 8 is a graph showing the dehumidification time of the quartz oscillator humidity sensor according to the present invention in relation to the frequency shift amount.

【符号の説明】[Explanation of symbols]

1 水晶振動子 2 水晶面 3 金電極 5 単分子膜 DESCRIPTION OF SYMBOLS 1 Quartz crystal oscillator 2 Quartz surface 3 Gold electrode 5 Monomolecular film

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 水晶振動子の電極表面に、セルロース高
分子に疎水性長鎖を付加したセルロース誘導体の単分子
膜を水平に累積して層状に固定したことを特徴とする水
晶振動子湿度センサ。
1. A quartz oscillator humidity sensor comprising a monolayer of a cellulose derivative obtained by adding a hydrophobic long chain to a cellulose polymer and horizontally fixed on a surface of an electrode of the quartz oscillator in a layered manner. .
【請求項2】 水晶振動子は、光学研磨されたものであ
ることを特徴とする請求項1に記載の水晶振動子湿度セ
ンサ。
2. The quartz oscillator humidity sensor according to claim 1, wherein the quartz oscillator is optically polished.
【請求項3】 セルロース誘導体は、セルロースの水酸
基を長鎖脂肪酸でエステル化したものであることを特徴
とする請求項1に記載の水晶振動子湿度センサ。
3. The quartz oscillator humidity sensor according to claim 1, wherein the cellulose derivative is obtained by esterifying a hydroxyl group of cellulose with a long-chain fatty acid.
【請求項4】 セルロース誘導体の単分子膜は、展開溶
液をクロロホルム溶媒に溶かし、10℃〜20℃の純水
上に展開して作製したものであることを特徴とする請求
項1に記載の水晶振動子湿度センサ。
4. The monomolecular film of a cellulose derivative is prepared by dissolving a developing solution in a chloroform solvent and developing the solution on pure water at 10 ° C. to 20 ° C. Quartz crystal humidity sensor.
JP9134945A 1997-05-26 1997-05-26 Quartz crystal humidity sensor Expired - Fee Related JP2969264B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9134945A JP2969264B2 (en) 1997-05-26 1997-05-26 Quartz crystal humidity sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9134945A JP2969264B2 (en) 1997-05-26 1997-05-26 Quartz crystal humidity sensor

Publications (2)

Publication Number Publication Date
JPH10325789A true JPH10325789A (en) 1998-12-08
JP2969264B2 JP2969264B2 (en) 1999-11-02

Family

ID=15140242

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9134945A Expired - Fee Related JP2969264B2 (en) 1997-05-26 1997-05-26 Quartz crystal humidity sensor

Country Status (1)

Country Link
JP (1) JP2969264B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109406333A (en) * 2018-09-12 2019-03-01 许昌农科种业有限公司 One kind can be to different Seed inspection laboratory apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109406333A (en) * 2018-09-12 2019-03-01 许昌农科种业有限公司 One kind can be to different Seed inspection laboratory apparatus
CN109406333B (en) * 2018-09-12 2020-12-08 许昌农科种业有限公司 Can detect laboratory glassware to different seeds

Also Published As

Publication number Publication date
JP2969264B2 (en) 1999-11-02

Similar Documents

Publication Publication Date Title
AU602782B2 (en) Spin coating of electrolytes
EP0906562B1 (en) Detection of ligand interaction with polymeric material
GB2407384A (en) Humidity sensor element
JPH0365643A (en) Capacitance humidity sensor
KR101316128B1 (en) Humidity sensor
JP4855565B2 (en) Polymer coating for chemical sensors
US4172156A (en) Method of depositing a reflection reducing coating on substrates of organic material
FR2972261A1 (en) HUMIDITY SENSOR COMPRISING AS A ABSORBENT MOISTURE LAYER A POLYMERIC LAYER COMPRISING A MIXTURE OF POLYAMIDES
JPH0548411B2 (en)
FR2541771A1 (en) CHEMICAL TITRATION APPARATUS AND METHODS
US4760368A (en) Moisture sensor
JP2969264B2 (en) Quartz crystal humidity sensor
JP4302321B2 (en) Method and apparatus for producing alternating adsorption film
US6813401B1 (en) Fabrication of fabry-perot polymer film sensing interferometers
JPH0376726A (en) Manufacture of electrically conductive film and gas sensor using said film
KR20090025007A (en) An engine oil condition sensor and the manufacturing method thereof
Bender et al. Deposition of high quality coatings on SAW sensors using electrospray
Lieberzeit et al. Covalently anchored supramolecular monolayers on quartz surfaces for use in SAW sensors
US4889561A (en) Moisture sensitive material
RU2764380C1 (en) Method for manufacturing a flexible humidity sensor
JP2773292B2 (en) Quartz crystal humidity sensor
RU2009477C1 (en) Method for manufacturing contactless sensor
CN115560873A (en) MEMS sensor chip for measuring cell temperature and preparation method thereof
JPS61237044A (en) Moisture detection element and manufacture thereof
SU935519A1 (en) Process for making piezosorption sensitive element

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313113

R360 Written notification for declining of transfer of rights

Free format text: JAPANESE INTERMEDIATE CODE: R360

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20080827

Year of fee payment: 9

R370 Written measure of declining of transfer procedure

Free format text: JAPANESE INTERMEDIATE CODE: R370

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313113

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 9

Free format text: PAYMENT UNTIL: 20080827

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090827

Year of fee payment: 10

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100827

Year of fee payment: 11

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 11

Free format text: PAYMENT UNTIL: 20100827

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313113

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100827

Year of fee payment: 11

R360 Written notification for declining of transfer of rights

Free format text: JAPANESE INTERMEDIATE CODE: R360

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100827

Year of fee payment: 11

R370 Written measure of declining of transfer procedure

Free format text: JAPANESE INTERMEDIATE CODE: R370

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100827

Year of fee payment: 11

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313113

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 11

Free format text: PAYMENT UNTIL: 20100827

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

LAPS Cancellation because of no payment of annual fees