JPH10321134A - Manufacture of plasma display panle - Google Patents

Manufacture of plasma display panle

Info

Publication number
JPH10321134A
JPH10321134A JP12555997A JP12555997A JPH10321134A JP H10321134 A JPH10321134 A JP H10321134A JP 12555997 A JP12555997 A JP 12555997A JP 12555997 A JP12555997 A JP 12555997A JP H10321134 A JPH10321134 A JP H10321134A
Authority
JP
Japan
Prior art keywords
phosphor
film
glass substrate
conductive films
plasma display
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12555997A
Other languages
Japanese (ja)
Inventor
Eiichiro Hirose
英一郎 広瀬
Yoshinori Shinohara
義典 篠原
Nobuaki Nishi
信昭 西
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Materials Corp
Original Assignee
Mitsubishi Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Materials Corp filed Critical Mitsubishi Materials Corp
Priority to JP12555997A priority Critical patent/JPH10321134A/en
Publication of JPH10321134A publication Critical patent/JPH10321134A/en
Pending legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To form a film-like phosphor excellent in position and height accuracy with high efficiency by arranging conductive films and counter electrodes formed on a cell inside surface on a glass substrate through slurry of phosphor powder, electrodepositing a phosphor on the conductive films by impressing DC voltage between both electrodes, and burning away the conductive films or its electric conductivity by baking. SOLUTION: Partition walls 6 are formed on a back glass substrate 5, and next, a resist film of a prescribed pattern is formed on a cell inside surface, and a metallic film is stuck by sputtering or the like, or a conductive high polymer film is stuck by a vacuum evaporation method, and conductive films 13 are formed. Next, the back glass substrate 5 on which the conductive films 13 are formed and counter electrodes are soaked and arranged in a suspension of phosphor powder so that the conductive films 13 and the counter electrodes are opposed to each other, and electrodeposition layers 14 of phsophor powder are formed on the conductive layers 13 by impressing DC voltage of about 100 to 600 V between the conductive films 13 and the counter electrodes. After the electrodeposition layers 14 are formed on the whole cells, the back glass substrate 5 is dried and baked.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明はプラズマディスプレ
ーパネルの製造方法に係り、特に、プラズマディスプレ
ーパネルの基板に蛍光体膜を形成するに当り、電着法を
採用することにより容易且つ高精度に蛍光体膜を形成す
る方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a plasma display panel, and more particularly, to forming a phosphor film on a substrate of a plasma display panel by using an electrodeposition method to easily and accurately emit a fluorescent film. The present invention relates to a method for forming a body film.

【0002】[0002]

【従来の技術】プラズマディスプレー(plasma display)
は、気体放電を利用した画像表示装置であって、通常、
多数の微小な放電セルを縦横(マトリクス状)に配列
し、必要な部分のセルを放電発光させて文字や図形を表
示する。この平面表示パネルはプラズマディスプレーパ
ネル (plasma display panel, PDP)と称される。プ
ラズマディスプレーパネルは、構造が簡単で大形化が容
易である;メモリ機能を有する;カラー化が可能であ
る;などの様々な利点を有することから、テレビなどで
用いられているブラウン管よりもはるかに大きく且つ奥
行きが小さいPDPの開発研究が進められている。
2. Description of the Related Art Plasma display
Is an image display device using gas discharge, and usually,
A large number of minute discharge cells are arranged vertically and horizontally (in a matrix), and a required portion of cells is discharged to emit light to display characters and figures. This flat display panel is called a plasma display panel (plasma display panel, PDP). The plasma display panel has various advantages such as simple structure and easy enlargement; has a memory function; can be colored; and is much more than a CRT used in a television or the like. Research and development of a large and small depth PDP is being pursued.

【0003】図2はプラズマディスプレーパネルの一般
的な構造を示す分解斜視図、図3は図2のガラス基板
1,5を組み立てたときのIII 部の詳細を示す断面の拡
大図である。
FIG. 2 is an exploded perspective view showing a general structure of a plasma display panel, and FIG. 3 is an enlarged sectional view showing details of a part III when the glass substrates 1 and 5 of FIG. 2 are assembled.

【0004】表面ガラス基板1上に、表示電極2、誘電
体層3及びMgO(酸化マグネシウム)等の保護膜4が
設けられている。背面ガラス基板5上には、隔壁6が所
定間隔で形成されている。この表面ガラス基板1、背面
ガラス基板5及び隔壁6,6で区画形成される微細空間
(放電セル)内に、アドレス用電極7及び膜状の蛍光体
8が形成され、放電ガス9が注入されている。
On a front glass substrate 1, a display electrode 2, a dielectric layer 3, and a protective film 4 such as MgO (magnesium oxide) are provided. On the back glass substrate 5, partition walls 6 are formed at predetermined intervals. An address electrode 7 and a film-like phosphor 8 are formed in a fine space (discharge cell) defined by the front glass substrate 1, the rear glass substrate 5, and the partitions 6, 6, and a discharge gas 9 is injected. ing.

【0005】このようなプラズマディスプレーパネルで
は、電極2,2間に電圧を印加して隔壁6,6間に形成
された放電セル内の蛍光体8を選択的に放電発光させる
ことで、文字や図形を表示する。
In such a plasma display panel, by applying a voltage between the electrodes 2 and 2 to selectively discharge and emit light from the phosphors 8 in the discharge cells formed between the partitions 6 and 6, characters and characters can be displayed. Display a shape.

【0006】従来、この蛍光体8を放電セル内に形成す
る方法としては、スクリーン印刷により直接に膜状蛍光
体8を形成する方法と、スクリーン印刷によりセル内に
蛍光体を充填した後この蛍光体をサンドブラストで掘削
して所定厚みの膜状蛍光体8を形成する方法とが採用さ
れている。
Conventionally, as a method of forming the phosphor 8 in the discharge cell, there are a method of directly forming the film-like phosphor 8 by screen printing, and a method of filling the cell with the phosphor by screen printing and then forming the phosphor. A method of forming a film-like phosphor 8 having a predetermined thickness by excavating the body by sandblasting is adopted.

【0007】[0007]

【発明が解決しようとする課題】スクリーン印刷による
膜状蛍光体の直接形成方法においては、画面サイズが大
きくなるに従い印刷位置合わせ、ペーストの印刷特性
(粘度、チクソトロピー性等)の適正化が困難となる。
一方、蛍光体を印刷によりセル内に充填してからサンド
ブラストで掘削する方法においては、3色の蛍光体のブ
ラスト掘削性が異なるために均一な掘削が困難であり、
欠落等の不具合も発生し易い。
In the method of directly forming a film phosphor by screen printing, it is difficult to adjust the printing position and to adjust the printing characteristics (viscosity, thixotropic property, etc.) of the paste as the screen size increases. Become.
On the other hand, in the method of excavating by sandblasting after filling the phosphor into the cell by printing, uniform excavation is difficult because the blast excavation properties of the three color phosphors are different,
Troubles such as dropouts are also likely to occur.

【0008】このように、従来のいずれの蛍光体形成方
法においても、セル内に均一な蛍光体膜を形成すること
が非常に難しい。
As described above, it is very difficult to form a uniform phosphor film in a cell by any of the conventional phosphor forming methods.

【0009】本発明は上記従来の問題点を解決し、プラ
ズマディスプレーパネルの膜状蛍光体を容易かつ高精度
に形成する方法を提供することを目的とする。
An object of the present invention is to solve the above-mentioned conventional problems and to provide a method for easily and accurately forming a film phosphor of a plasma display panel.

【0010】[0010]

【課題を解決するための手段】本発明のプラズマディス
プレーパネルの隔壁形成方法は、プラズマディスプレー
パネルのガラス基板上のセル内に蛍光体を膜状に形成す
る工程を有するプラズマディスプレーパネルの製造方法
において、該ガラス基板上のセル内面に導電膜を形成し
た後、該導電膜と対向電極とを蛍光体粉末のスラリーを
介して配置し、該導電膜と対向電極との間に直流電圧を
印加して、該導電膜上に蛍光体を電着し、その後焼成し
て導電膜を消失させるか又は導電膜の導電性を消失させ
ることを特徴とするものである。
A method of forming a partition of a plasma display panel according to the present invention is directed to a method of manufacturing a plasma display panel having a step of forming a phosphor in a film on a cell on a glass substrate of the plasma display panel. After forming a conductive film on the inner surface of the cell on the glass substrate, the conductive film and the counter electrode are arranged via a slurry of phosphor powder, and a DC voltage is applied between the conductive film and the counter electrode. Then, a phosphor is electrodeposited on the conductive film, and then fired, so that the conductive film is lost or the conductivity of the conductive film is lost.

【0011】本発明に従って、電着法で蛍光体を形成す
ることにより、高効率で、位置精度や高さ精度良く膜状
蛍光体を形成することができる。
According to the present invention, by forming a phosphor by an electrodeposition method, a film phosphor can be formed with high efficiency, high positional accuracy and high accuracy.

【0012】[0012]

【発明の実施の形態】以下、図面を参照して本発明を詳
細に説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the drawings.

【0013】図1は本発明のプラズマディスプレーパネ
ルの製造方法の実施の形態を示す断面図である。
FIG. 1 is a sectional view showing an embodiment of a method of manufacturing a plasma display panel according to the present invention.

【0014】本発明においては、まず、プラズマディス
プレーパネルのガラス基板(背面ガラス基板)5上に隔
壁6を形成する。次いで、蛍光体膜を形成するセル内面
にのみ導電膜を形成する。この導電膜を形成するには、
蛍光体膜を形成しない面にレジスト膜を付け、次いで導
電膜を全面に付け、その後レジスト膜を除去すれば良
い。レジスト膜を所定パターンに形成するには、有機レ
ジストを膜状に付着させた後、所定パターン通りに露光
し、次いで未露光部を除去する等の通常の方法によれば
良い。
In the present invention, first, a partition 6 is formed on a glass substrate (back glass substrate) 5 of a plasma display panel. Next, a conductive film is formed only on the inner surface of the cell where the phosphor film is to be formed. To form this conductive film,
A resist film may be formed on the surface on which the phosphor film is not formed, a conductive film may be formed on the entire surface, and then the resist film may be removed. In order to form the resist film in a predetermined pattern, an ordinary method may be used, such as attaching an organic resist in the form of a film, exposing the organic resist to a predetermined pattern, and then removing an unexposed portion.

【0015】この所定パターンのレジスト膜を形成した
後、スパッタリング、CVD、イオンプレーティング、
印刷等の各種手法により金属膜を付着させたり、導電性
高分子膜を真空蒸着法等により付着させる。その後、レ
ジスト膜を溶剤によって溶解除去することにより、蛍光
体膜形成予定部たる内面にのみ導電膜13が形成され
る。
After forming the resist film having the predetermined pattern, sputtering, CVD, ion plating,
A metal film is attached by various methods such as printing, and a conductive polymer film is attached by a vacuum deposition method or the like. Thereafter, the resist film is dissolved and removed with a solvent, so that the conductive film 13 is formed only on the inner surface of the portion where the phosphor film is to be formed.

【0016】この導電膜13を金属膜とする場合、好適
な金属としては、W(タングステン),Al(アルミニ
ウム)等が挙げられる。金属膜の厚さは200〜200
0Åとりわけ300〜1000Åの範囲とするのが好ま
しい。この厚さが200Å未満では蛍光体粉末を均一に
付着させにくい。又、2000Åよりも厚いと、後工程
でこの金属膜を酸化させて非導電性とするための処理時
間が徒に長くなる。
When the conductive film 13 is a metal film, preferable metals include W (tungsten) and Al (aluminum). The thickness of the metal film is 200 to 200
It is preferably in the range of 0 °, especially 300 to 1000 °. If the thickness is less than 200 °, it is difficult to uniformly adhere the phosphor powder. On the other hand, if the thickness is more than 2000 °, the processing time for oxidizing this metal film to make it non-conductive in a later step is unnecessarily long.

【0017】このようにしてセル内面に導電膜13を形
成した後は、電着法により、導電膜13上に蛍光体の電
着層を堆積させる。
After the conductive film 13 is formed on the inner surface of the cell in this manner, an electrodeposition layer of a phosphor is deposited on the conductive film 13 by an electrodeposition method.

【0018】この電着法に用いる蛍光体粉末としては、
次のものが好ましい。
The phosphor powder used in the electrodeposition method includes:
The following are preferred:

【0019】赤色蛍光体としては(Y,Gd)BO3
Eu3+やY2 3 :Eu3+などが好ましい。
As the red phosphor, (Y, Gd) BO 3 :
Eu 3+ and Y 2 O 3 : Eu 3+ are preferred.

【0020】青色蛍光体としては(Ba,Mg)Al10
17:Eu2+などが好ましい。
As the blue phosphor, (Ba, Mg) Al 10
O 17 : Eu 2+ and the like are preferable.

【0021】緑色蛍光体としてはZn2 SiO4 :Mn
などが好ましい。
The green phosphor is Zn 2 SiO 4 : Mn.
Are preferred.

【0022】この粉末の平均粒径は2μm以下が好まし
い。
The average particle size of the powder is preferably 2 μm or less.

【0023】この粉末を分散させる分散媒としては、イ
ソプロピルアルコール、アセトン等の有機溶媒、あるい
はその混合物が好ましい。
As a dispersion medium for dispersing the powder, an organic solvent such as isopropyl alcohol and acetone, or a mixture thereof is preferable.

【0024】この媒体中に蛍光体粉末を分散させた懸濁
液の濃度は1〜2wt%が好ましい。
The concentration of the suspension in which the phosphor powder is dispersed in this medium is preferably 1 to 2% by weight.

【0025】本発明においては、このような蛍光体粉末
の懸濁液中に、導電膜13を形成したガラス基板11
と、対向電極を、導電膜13と対向電極とが対向するよ
うに浸漬配置し、導電膜13と対向電極との間に100
〜600V好ましくは200〜500V程度の直流電圧
(導電膜13を負とする。)を印加して、導電膜13上
に蛍光体粉末の電着層14を形成する。
In the present invention, the glass substrate 11 on which the conductive film 13 is formed is placed in the suspension of the phosphor powder.
And a counter electrode are immersed and arranged so that the conductive film 13 and the counter electrode face each other.
An electrodeposition layer 14 of a phosphor powder is formed on the conductive film 13 by applying a DC voltage of about 600 V, preferably about 200 to 500 V (the conductive film 13 is made negative).

【0026】対向電極としては、Pt,Al,SUS等
が好ましい。この対向電極はメッシュ(有孔)又は板状
であることが好ましい。
As the counter electrode, Pt, Al, SUS or the like is preferable. This counter electrode is preferably in the form of a mesh (perforated) or plate.

【0027】なお、例えば赤色蛍光体を赤色セルに形成
した後、青色蛍光体を青色セルに形成し、その後緑色蛍
光体を緑色セルに形成するなど、色ごとに蛍光体を順番
に電着させる。ある色の蛍光体を特定のセルに電着させ
るには、そのセルのアドレス電極にのみ電流を流し、他
のセルのアドレス電極には電流を流さないようにする。
Note that, for example, a red phosphor is formed on a red cell, a blue phosphor is formed on a blue cell, and then a green phosphor is formed on a green cell. . In order to deposit a phosphor of a certain color on a specific cell, a current is applied only to the address electrode of that cell, and no current is applied to the address electrode of another cell.

【0028】すべてのセルに電着層14が所望の厚みに
形成された後は、ガラス基板を乾燥させた後、焼成す
る。導電膜が金属膜である場合、酸化雰囲気中で焼成
し、金属を酸化させて導電性を消失させる。導電膜が高
分子膜である場合、焼成により熱分解させたりあるいは
酸化消失させることにより導電性を消失(又は導電膜自
体を消失)させる。
After the electrodeposited layer 14 is formed to a desired thickness in all cells, the glass substrate is dried and fired. When the conductive film is a metal film, the conductive film is fired in an oxidizing atmosphere to oxidize the metal and lose conductivity. When the conductive film is a polymer film, the conductivity is lost (or the conductive film itself is lost) by being thermally decomposed or oxidized and lost by baking.

【0029】[0029]

【実施例】以下に実施例を挙げて本発明をより具体的に
説明する。
The present invention will be described more specifically with reference to the following examples.

【0030】実施例1 図1に示す本発明の方法に従って、プラズマディスプレ
ーパネルの蛍光体を形成した。
Example 1 A phosphor for a plasma display panel was formed according to the method of the present invention shown in FIG.

【0031】まず、高さ150μmの隔壁を700μm
ピッチで設けた50mm×75mmのガラス(ソーダガ
ラス)基板のセル内面以外の面にレジスト膜を形成した
後、レジスト膜間に電着で必要な電極となる金属膜とし
てAl金属膜をスパッタリング法により300〜400
Åの厚さに形成した。その後、レジスト膜を溶剤により
剥離して十分に洗浄した。
First, a partition having a height of 150 μm is set to 700 μm.
After a resist film is formed on a surface other than the inner surface of the cell of a 50 mm × 75 mm glass (soda glass) substrate provided at a pitch, an Al metal film is formed by sputtering as a metal film serving as an electrode necessary for electrodeposition between the resist films. 300-400
Å was formed. Thereafter, the resist film was peeled off with a solvent and sufficiently washed.

【0032】これとは別に、次の蛍光体を分散させた蛍
光体分散懸濁液を調製した。なお、媒体は全て A:アセトン/IPA=7/3(vol比)と B:2%Mg(NO3 2 水溶液とを用い、A 100
0mlに対しB 15mlの混合液とした。蛍光体は上
記液に対し10gを懸濁させた。
Separately, a phosphor dispersion suspension in which the following phosphors were dispersed was prepared. The medium used was A: acetone / IPA = 7/3 (vol ratio) and B: 2% Mg (NO 3 ) 2 aqueous solution, and A 100
A mixture of 15 ml of B with respect to 0 ml was prepared. 10 g of the phosphor was suspended in the above solution.

【0033】 赤色蛍光体懸濁液 蛍光体: 組成 (Y,Gd)BO3 :Eu 粒径 平均2μm 青色蛍光体懸濁液 蛍光体: 組成 (Ba,Mg)Al1017:Eu 粒径 平均2μm 緑色蛍光体懸濁液 蛍光体: 組成 Zn2 SiO4 :Mn 粒径 平均2μm まず、この赤色蛍光体懸濁液中に、前記ガラス基板と、
60mm×80mmのPt板よりなる対向電極とを、ガ
ラス板のAl金属膜形成面と対向電極とが対面するよう
に配置し、金属板と赤色セルのAl金属膜との間にAl
金属膜が正となるように300Vの直流電圧を印加して
Al金属膜上に赤色蛍光体粉の電着層を形成した。電着
時間は1分とした。
Red phosphor suspension Phosphor: Composition (Y, Gd) BO 3 : Eu particle size average 2 μm Blue phosphor suspension Phosphor: Composition (Ba, Mg) Al 10 O 17 : Eu particle size average 2 μm green phosphor suspension Phosphor: composition Zn 2 SiO 4 : Mn Particle size average 2 μm First, in the red phosphor suspension,
A counter electrode made of a Pt plate of 60 mm × 80 mm is arranged so that the surface of the glass plate on which the Al metal film is formed and the counter electrode face each other, and an Al electrode is provided between the metal plate and the Al metal film of the red cell.
A DC voltage of 300 V was applied so that the metal film became positive to form an electrodeposition layer of a red phosphor powder on the Al metal film. The electrodeposition time was 1 minute.

【0034】以下、同様にして青色セル及び緑色セルに
それぞれ青色蛍光体及び緑色蛍光体を電着させた。
Subsequently, a blue phosphor and a green phosphor were electrodeposited on the blue cell and the green cell, respectively.

【0035】すべての電着終了後、ガラス板を十分に乾
燥させ、540℃×10minによる焼成を行うことに
より、蛍光体を形成した。その結果、各セルに均等に蛍
光体膜を形成することができた。
After the completion of all the electrodepositions, the glass plate was sufficiently dried and fired at 540 ° C. for 10 minutes to form a phosphor. As a result, a phosphor film could be uniformly formed on each cell.

【0036】[0036]

【発明の効果】以上詳述した通り、本発明のプラズマデ
ィスプレーパネルの製造方法によれば、プラズマディス
プレーパネルの蛍光体膜を容易かつ効率的に、所望の位
置に、均一に精度良く形成することができる。
As described above in detail, according to the method of manufacturing a plasma display panel of the present invention, a phosphor film of a plasma display panel can be easily and efficiently formed at a desired position uniformly and precisely. Can be.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明のプラズマディスプレーパネルの製造方
法の実施の形態を示す断面図である。
FIG. 1 is a sectional view showing an embodiment of a method for manufacturing a plasma display panel according to the present invention.

【図2】プラズマディスプレーパネルの一般的な構成を
示す分解斜視図である。
FIG. 2 is an exploded perspective view showing a general configuration of a plasma display panel.

【図3】図3のIII 部の断面の拡大図である。FIG. 3 is an enlarged view of a section taken along a line III in FIG. 3;

【符号の説明】 1 表面ガラス基板 2 表示電極 3 誘電体層 4 保護膜 5 背面ガラス基板 6 隔壁 7 アドレス電極 8 蛍光体 9 放電ガス 11 ガラス基板 12 レジスト膜 13 導電膜 14 電着層DESCRIPTION OF SYMBOLS 1 Surface glass substrate 2 Display electrode 3 Dielectric layer 4 Protective film 5 Back glass substrate 6 Partition 7 Address electrode 8 Phosphor 9 Discharge gas 11 Glass substrate 12 Resist film 13 Conductive film 14 Electrodeposition layer

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 プラズマディスプレーパネルのガラス基
板上のセル内に蛍光体を膜状に形成する工程を有するプ
ラズマディスプレーパネルの製造方法において、該ガラ
ス基板上のセル内面に導電膜を形成した後、該導電膜と
対向電極とを蛍光体粉末のスラリーを介して配置し、該
導電膜と対向電極との間に直流電圧を印加して、該導電
膜上に蛍光体を電着し、その後焼成して導電膜を消失さ
せるか又は導電膜の導電性を消失させることを特徴とす
るプラズマディスプレーパネルの製造方法。
1. A method for manufacturing a plasma display panel, comprising: forming a phosphor in the form of a film in a cell on a glass substrate of a plasma display panel, after forming a conductive film on the inner surface of the cell on the glass substrate. The conductive film and the counter electrode are arranged via the phosphor powder slurry, and a DC voltage is applied between the conductive film and the counter electrode to electrodeposit the phosphor on the conductive film and then fired. A method for manufacturing a plasma display panel, comprising: removing a conductive film by conducting the method or removing the conductivity of the conductive film.
JP12555997A 1997-05-15 1997-05-15 Manufacture of plasma display panle Pending JPH10321134A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12555997A JPH10321134A (en) 1997-05-15 1997-05-15 Manufacture of plasma display panle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12555997A JPH10321134A (en) 1997-05-15 1997-05-15 Manufacture of plasma display panle

Publications (1)

Publication Number Publication Date
JPH10321134A true JPH10321134A (en) 1998-12-04

Family

ID=14913204

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12555997A Pending JPH10321134A (en) 1997-05-15 1997-05-15 Manufacture of plasma display panle

Country Status (1)

Country Link
JP (1) JPH10321134A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19980085551A (en) * 1997-05-29 1998-12-05 엄길용 Manufacturing Method of Plasma Display Device
KR19980085554A (en) * 1997-05-29 1998-12-05 엄길용 Manufacturing Method of Plasma Display Device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19980085551A (en) * 1997-05-29 1998-12-05 엄길용 Manufacturing Method of Plasma Display Device
KR19980085554A (en) * 1997-05-29 1998-12-05 엄길용 Manufacturing Method of Plasma Display Device

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