JPH10318240A - Positioning mechanism - Google Patents

Abstract

PROBLEM TO BE SOLVED: To relieve a positioning work and to reduce a manufacturing cost. SOLUTION: A positioning mechanism comprises a plurality of screw shafts 2 protruded upward in a plurality of different positions of a stand frame 50; an object to be positioned having a plurality of leg bodies 57 in which a hole 7 to insert the screw shaft 2 is formed; and a plurality of upper and lower nut (3 and 6) pairs through which the leg body 57 is securely threadedly engaged and fixed with the screw shaft 2 at the upper and lower parts of each leg body 57. The object to be positioned is securely positioned at other member, placed on the rack frame 50, and the rack frame 50. In this case, the diameter of the hole 7 of each leg body 57 is set to a value larger than that of the screw shaft 2. Spherical washers 4 and 5 consisting of a pair of recessed spherical washers 8 and 11 in which holes 8a, 9a, 10a, and 11a having a diameter larger than that of the screw shaft 2 are formed and protrusion spherical washers 9 and 10 are respectively located between the leg body 57 and an upper nut 6 inserted in the upper side of the leg body and between the leg body 57 and a lower nut 3 inserted in the lower side of the leg body.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a positioning mechanism for positioning and fixing a positioning object such as a closed vessel such as a vacuum chamber with respect to other members installed on a frame and the frame.

[0002]

2. Description of the Related Art FIGS. 7 and 8 show a multi-chamber type semiconductor manufacturing apparatus for performing various processes on a wafer.

[0003] In these figures, a transfer chamber 52 in which a wafer transfer robot 51 is provided is provided on a gantry frame 50.
Around the area 2, there are provided four process chambers 53,... (In this case, only one process chamber is shown) for performing various semiconductor processing processes on the wafer W. Reference numeral 54 denotes a lifter on which the wafer W is placed.

[0004] Between the process chambers 53,... And the transfer chamber 52, communication between these chambers is performed.
A gate valve 56 for accommodating a gate 55 to be shut off is arranged. The transfer chamber 52, the process chamber 53 and the gate valve 56 are kept in a vacuum state.

[0005] The process chamber 53 has chamber fixing mechanisms 70 at four corners. That is, in the chamber fixing mechanism 70, the chamber mounting legs 57 provided at the four corners of the process chamber 53 include:
The process chamber 53 is positioned and fixed to the gantry frame 50 by inserting a screw shaft 58 of a bolt screwed to the gantry frame 50 and screwing it with a nut 59.

That is, in this system, the wafer W is transferred from one process chamber to another process chamber by the wafer transfer robot 51 provided in the transfer chamber 52 so that the wafer W is transferred into each process chamber 53. Various semiconductor processing is performed on the wafer W.

In such a system, when the transfer chamber 52, the process chamber 53, and the gate valve 56 are installed on the gantry frame 50, the transfer chamber 52 is first installed at a predetermined position on the gantry frame 50, and then the transfer chamber 52 is installed. Opening 60
The gate valves 56 are installed on the four side surfaces on which are formed, and these are fixed with bolts 61. Reference numeral 62 denotes an O-ring.

As described above, the screw shafts 58 of the bolts project from predetermined positions of the gantry frame 50 where the legs of the process chamber 53 are to be attached. Attach 59. Next, the process chamber 53 is installed on the screw shaft by inserting the screw shaft 58 into the holes formed in the four legs 57 of the process chamber 53. Next, the upper nut 59 is connected to the screw shaft 58.
While adjusting the level of the process chamber 53 with the upper nut and the lower nut.
3 and fasten the process chamber 53 to the gate valve 56.
To join.

[0009]

As described above, in the above conventional apparatus, the chamber fixing mechanism 70 of the process chamber 53 can only adjust the height of the four corners of the process chamber 53.

For this reason, in the conventional apparatus, the dimensional accuracy of the gantry frame 50, the mounting position and the mounting angle of the bolt 58 to the gantry frame 50, the dimensional accuracy of the process chamber 53, the mounting accuracy of the leg 57 to the process chamber 53, and the gate Extreme strictness is required with respect to the dimensions and mounting accuracy of the valve 56. If this is not satisfied, not only cannot each component be installed at a predetermined position, but also a satisfactory degree of vacuum (sealing degree) in each chamber. There is a problem that it cannot be secured. In addition, the requirement of strict accuracy for each of the above components also leads to an increase in manufacturing cost.

[0011] The present invention has been made in view of such circumstances, and does not require strict dimensions and installation accuracy for each component, and can position a positioning object such as a closed container with respect to a gantry frame and other members. It is an object of the present invention to provide a positioning mechanism that can perform positioning with high accuracy, thereby reducing positioning work and reducing system manufacturing costs.

[0012]

According to the present invention, a plurality of screw shafts projecting upward at a plurality of different positions of a gantry frame, and a leg having a hole through which the screw shaft is inserted are formed. A plurality of positioning objects having a plurality of positioning objects, and a plurality of pairs of upper and lower nuts for screwing and fixing each of the legs to the screw shaft above and below each of the legs, and installing the positioning objects on the gantry frame; In the positioning mechanism for positioning and fixing with respect to the other member and the frame, the diameter of the hole of each leg is formed larger than the diameter of the screw shaft, and the hole having a diameter larger than the screw shaft is formed. A spherical washer comprising a pair of a concave spherical washer and a convex spherical washer is inserted between the leg and an upper nut inserted above the leg, and a lower side inserted between the leg and a lower side of the leg. Between the nut Characterized in that is interposed.

According to this invention, a spherical washer made of a pair of a concave spherical washer and a convex spherical washer is interposed between the nut and the leg of the positioning object, and the diameter of the hole of the leg of the positioning object. And the diameter of the hole of the concave spherical washer and the convex spherical washer is made larger than the diameter of the screw shaft protruding from the gantry frame, and the positioning object together with the leg is moved in the height direction and the horizontal direction with respect to the screw shaft. Movement can be adjusted and tilted (rotated).

Therefore, according to the present invention, when the positioning object is mounted on the gantry frame, positioning adjustment can be performed in three-dimensional directions, so that the dimensions and mounting accuracy of each component can be reduced. Manufacturing costs can be reduced. Further, it is possible to easily position a heavy positioning object without using a large force.

Further, according to the present invention, there is provided a positioning object having a plurality of screw shafts projecting upward at a plurality of different positions of a gantry frame, and a plurality of legs formed with holes through which the screw shafts are inserted. A plurality of pairs of upper and lower nuts for screwing and fixing each of the legs to the screw shaft above and below each of the legs, and another member and a frame for mounting the object to be positioned installed on the frame. In a positioning mechanism for positioning and fixing with respect to, the diameter of the hole of each leg is formed larger than the diameter of the screw shaft, and the leg and the upper nut and the leg which are inserted above the leg, A concave or convex spherical surface is formed on each one surface of the lower nut inserted into the lower side of the leg, a hole having a diameter larger than the screw shaft is formed and the nut is formed on one surface. Sphere with the same curvature as sphere The formed spherical washer is characterized in that so as to respectively interposed between and between the leg and the lower nut of the leg and the upper nut.

According to the invention, since the nut and the spherical washer are integrated, the number of parts is reduced and the production cost is further reduced.

[0017]

Embodiments of the present invention will be described below in detail with reference to the accompanying drawings.

FIG. 1 shows a first embodiment of the present invention.

The embodiment shown in FIG. 1 employs a chamber fixing mechanism 7 disposed at the four corners of the process chamber 53 of the multi-chamber type semiconductor manufacturing apparatus shown in FIGS.
In the mechanism of this embodiment, in addition to the function of adjusting the height of the process chamber 53, a function of adjusting the position of the process chamber 53 in the horizontal direction and the function of adjusting the tilt angle are provided.

In FIG. 1, a bolt 1 is screwed into a gantry frame 50, and its screw shaft 2 is
0 protrudes perpendicular to the upper surface. This screw shaft 2
The lower nut 3, the lower spherical washer 4, the chamber mounting leg 57, the upper spherical washer 5, and the upper nut 6 are sequentially inserted from below. That is, in this chamber fixing mechanism, the process installation chamber 57 is fastened by the upper and lower nuts 3 and 6 via the upper and lower spherical washers 4 and 5 to the chamber mounting leg 57 in which the hole 7 is inserted through the screw shaft 2. 53 is fixed to the gantry frame 50.

The lower spherical washer 4 is formed as a pair of a convex spherical washer 8 and a concave spherical washer 9, and the upper spherical washer 5 is formed.
Is configured as a pair of a convex spherical washer 10 and a concave spherical washer 11. The sliding surfaces (spherical surfaces) of the convex spherical washer 8 and the concave spherical washer 9 have the same curvature. The same applies to the convex spherical washer 10 and the concave spherical washer 11.

Here, the hole 7 of the chamber mounting leg 57 and the convex spherical surface are arranged so that the chamber mounting leg 57 can move in the horizontal direction with respect to the screw shaft 2 and can be inclined (rotated) (see FIG. 2). Hole 8a of washer 8, concave washer 9
The hole 9a, the hole 10a of the convex spherical washer 10 and the hole 11a of the concave spherical washer 11 have a required margin with respect to the diameter of the screw shaft 2.

FIG. 2 shows a state in which the chamber mounting leg 57 is inclined with respect to the screw shaft 2. The convex spherical washers 9 and 10 are slid along the surface of the leg 57 and the concave spherical washer 8 is provided. The nuts 3 and 6 are fastened to the screw shaft 2 in a state where the nuts 3 and 11 are eccentrically slid along the convex spherical washers 9 and 10.

A procedure for fixing the process chamber 53 shown in FIGS. 7 and 8 to the gantry frame 50 using the chamber fixing mechanism 70 will be described.

It is assumed that the transfer chamber 52 and the gate valve 56 are already attached to the gantry frame 50.

First, the lower nut 3, the concave spherical washer 8 and the convex spherical washer 9 are sequentially attached to the four screw shafts 2 protruding from the gantry frame 50, respectively.

Next, the holes 7 of the chamber mounting legs 57 provided at the four corners of the process chamber 53 are inserted into the four screw shafts 2, and the process chamber 53 is supported by the four screw shafts 2.

Next, the position of each lower nut 3 attached to the four screw shafts 2 is adjusted to adjust the position of the process chamber 5.
Adjust the height and level of 3

Next, the upper convex spherical washer 10, the concave spherical washer 11, and the upper nut 6 are inserted through the four screw shafts 2, and the upper nut 6 is temporarily fixed.

In this state, lightly tighten the bolt 63,
The process chamber 53 is temporarily fixed to the gate valve 56.

Next, the positions and angles of the upper and lower spherical washers 4 and 5 of the chamber fixing mechanism 70 provided at four locations of the process chamber 53 are adjusted to position the process chamber 53 in the horizontal and height directions. After the positioning is completed, the upper nut 6 and the bolt 63 of each chamber fixing mechanism are tightened to fix the process chamber 53 to the gantry frame 50 and the gate valve 56.

As described above, in this embodiment, the three-dimensional position of the process chamber 53 is provided by interposing the spherical washers 4 and 5 between the chamber mounting legs 57 of the process chamber 53 and the upper and lower nuts 3 and 6. And fine adjustment of the installation angle.
The dimensions and mounting accuracy of 0, bolt 1, process chamber 53, chamber mounting leg 57, gate valve 56, and the like can be reduced, and manufacturing costs can be reduced. Also, a heavy process chamber can be easily positioned without using a large force.

In the above embodiment, the spherical washer 4,
The positional relationship between the convex spherical washer 9 and the concave spherical washer 8 in the vertical direction is arbitrary. For example, in the spherical washer 4, the lower nut 3 side may be a convex spherical washer, and a concave spherical washer may be disposed thereon.

Further, a flat washer or a spring washer is interposed between the nut 3 and the concave spherical washer 8 and between the nut 6 and the concave spherical washer 11, so that the nut 3,
6 may be prevented from loosening.

Further, in the above embodiment, the screw shaft 2 is projected from the gantry frame 50 by using the ordinary fastening bolt 1, but instead of the bolt 1, as shown in FIG.
Stud 1 with stabilizing leg 12 attached to screw shaft 2
3 may be used. The stud 13 may be screwed to the gantry frame 50, or may be fixed by welding.

Further, in the above embodiment, the spherical washers 4 and 5 are made of a material having a low friction coefficient,
If the material 5 is plated with a material having a low friction coefficient, particles generated from the sliding surfaces of the convex spherical washer and the concave spherical washer can be reduced. As the material having a low friction coefficient, (1) a special sintered alloy containing a large amount of a solid lubricant such as graphite or MoS2, (2) a material subjected to a ladent treatment for chemically fixing a fluorine compound on the surface, and the like are used. Can be

FIG. 3 shows another embodiment of the present invention. In this embodiment, a coating 14 of a low friction coefficient material is applied to the convex spherical surface of the convex spherical washer 8 and the concave spherical surface of the concave spherical washer 9. Is applied. Both the convex spherical surface of the upper convex spherical washer 10 and the concave spherical surface of the concave spherical washer 11 are coated with a low friction coefficient material coating 14. Therefore, also in this embodiment, particles generated from the sliding surfaces of the convex spherical washer and the concave spherical washer can be reduced. The coating layer 14 may be formed on one of the sliding surfaces of the convex spherical washer and the concave spherical washer.

FIG. 4 shows another embodiment of the present invention. In this embodiment, nipples 15 for supplying lubricating oil are formed on spherical washers 4, 5, and the spherical washers 4, 5 are interposed via these nipples. Lubricating oil is supplied to the sliding surface to reduce particles generated on the sliding surface. In this case, the nipple 15 is formed on the concave spherical washer 8 or 11 side, but may be formed on the convex spherical washer 9 or 10 side.

FIGS. 5A to 5D show still another embodiment of the present invention. In these embodiments, the spherical washers 4 of the upper and lower nuts 3 and 6 of the embodiment of FIG. By forming a convex spherical surface or a concave spherical surface on the surface in contact with 5, the washers 8 and 11 in contact with the nuts 3 and 6 are omitted, and the number of parts is reduced.

In FIG. 5 (a), a convex spherical nut 20 and a concave spherical washer 21 are arranged below the chamber mounting leg 57, and a concave spherical washer 22 and a convex spherical nut 23 are arranged above. .

In FIG. 5 (b), a concave spherical nut 24 and a convex spherical washer 25 are arranged below the chamber mounting leg 57, and a convex spherical washer 26 and a concave spherical nut 27 are arranged above. .

In FIG. 5 (c), a concave spherical nut 24 and a convex spherical washer 25 are arranged below the chamber mounting leg 57, and a concave spherical washer 22 and a convex spherical nut 23 are arranged above. .

In FIG. 5 (d), a convex spherical nut 20 and a concave spherical washer 21 are arranged below the chamber mounting leg 57, and a convex spherical washer 26 and a concave spherical nut 27 are arranged above. .

Also in these embodiments, the chamber mounting legs 57 and the washers arranged above and below the legs 57 can move and tilt the chamber mounting legs 57 in the horizontal direction with respect to the screw shaft 2. Thus, a hole having a diameter larger than the diameter of the screw shaft 2 is formed.

FIG. 6 shows still another embodiment of the present invention. In this case, a spherical body 30 is formed on the chamber mounting leg 57 itself, and the spherical body 30 is attached to upper and lower concave spherical washers 8 and 11. And are fixed by nuts 3 and 6. The sphere 30 is the center O of the thickness of the leg 57
And a spherical surface washer 8, 1
The sliding surface 1 also corresponds to the curvature of this sphere.

Also in this case, the spherical body 30 and the concave spherical washers 8 and 11 are provided so that the leg 57 can move in the horizontal direction with respect to the screw shaft 2 and can be tilted integrally with the spherical body 30.
A hole having a diameter larger than the diameter of the screw shaft 2 is formed.

That is, in this embodiment, the leg 57 and the convex spherical washers 9 and 10 of the embodiment shown in FIG. 1 are integrated to reduce the number of parts.

In the above embodiment, the present invention is applied to a multi-chamber type semiconductor manufacturing apparatus as shown in FIG. 7 and FIG. The present invention may be applied to any other configuration as long as the closed container is positioned with respect to another member on the gantry frame by positioning and fixing on the frame.

[Brief description of the drawings]

FIG. 1 is a diagram showing an embodiment of the present invention.

FIG. 2 is a diagram showing a state in which a leg is inclined in the embodiment of FIG. 1;

FIG. 3 is a diagram showing another embodiment of the present invention.

FIG. 4 is a diagram showing another embodiment of the present invention.

FIG. 5 is a diagram showing another embodiment of the present invention.

FIG. 6 is a diagram showing another embodiment of the present invention.

FIG. 7 is a perspective view showing a multi-chamber type semiconductor manufacturing system to which the present invention is applied.

FIG. 8 is a partial cross-sectional view of the manufacturing system of FIG. 7;

[Explanation of symbols]

1 ... bolt 2 ... screw shaft 3, 6 ... nut 4
5 spherical washer 7 hole 8 11 concave washer 9 10
... convex washer 12 ... leg 13 ... stud 14 ... low friction material coating 15 ... nipple 20, 23 ... convex spherical nut 24, 2
7 ... concave nut 50 ... gantry frame 51 ... robot 52 ... transfer chamber 53 ... process chamber 55 ... gate 56 ... gate valve 57 ... chamber mounting leg 58 ... bolt 59 ... nut 70 ... chamber fixing mechanism

 ──────────────────────────────────────────────────の Continued on the front page (72) Inventor Kazuaki Takahira 1200 Manda, Hiratsuka-shi, Kanagawa Prefecture, Komatsu Ltd.

Claims (7)

[Claims] 1. A positioning object having a plurality of screw shafts projecting upward at a plurality of different positions of a gantry frame, a plurality of legs having holes formed therein for inserting the screw shafts, and each of the legs A plurality of pairs of upper and lower nuts for screwing and fixing each of the legs to the screw shaft on the upper and lower sides of the body, and the positioning target object with respect to other members and the gantry frame installed on the gantry frame. In the positioning mechanism for positioning and fixing, the diameter of the hole of each leg is formed larger than the diameter of the screw shaft, and a pair of a concave spherical washer and a convex spherical washer in which a hole having a diameter larger than the screw shaft is formed. The spherical washer is interposed between the leg and an upper nut inserted above the leg, and between the leg and a lower nut inserted below the leg. A position characterized by Decided mechanism. 2. The positioning mechanism according to claim 1, wherein the object to be positioned is a closed container. 3. A positioning mechanism according to claim 1, wherein a coating of a low friction material is applied to a concave spherical surface of said concave spherical washer or a convex spherical surface of said convex spherical washer. 4. The positioning mechanism according to claim 1, wherein said spherical washer is made of a low friction material. 5. The positioning mechanism according to claim 1, wherein said leg and a convex spherical washer disposed on a side of said spherical washer which is in contact with said leg are integrally formed. 6. A positioning object having a plurality of screw shafts projecting upward at a plurality of different positions of a gantry frame, a plurality of legs having holes formed therein for inserting said screw shafts, and each of said legs A plurality of pairs of upper and lower nuts for screwing and fixing each of the legs to the screw shaft on the upper and lower sides of the body, and the positioning target object with respect to other members and the gantry frame installed on the gantry frame. In a positioning mechanism for positioning and fixing, a diameter of a hole of each leg is formed to be larger than a diameter of the screw shaft, and an upper nut inserted between the leg and the upper side of the leg and the leg and the leg. A concave or convex spherical surface is formed on each one surface of the lower nut inserted into the lower side, and a hole having a diameter larger than the screw shaft is formed and the same spherical surface formed on the nut is formed on one surface. Sphere with curved sphere Positioning mechanism, characterized in that the Ssha was set to be respectively interposed between and between the leg and the lower nut of the leg and the upper nut. 7. The positioning mechanism according to claim 6, wherein the object to be positioned is a closed container.