JPH10293063A - Measuring apparatus for quantum efficiency of phosphor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a measuring apparatus which simplifies a measuring method and its constitution, which reduces the number of times of the formation of a vacuum atmosphere in a measurement and which reduces the number of times of the turning-on-and-off operation of a light source for excitation. SOLUTION: Excitation light from a light source 1 is spectrally diffracted into beams of excitation light in a specific wavelength region (ultraviolet rays at 147 nm and those at 254 nm), a phosphor 9 to be measured is irradiated with the respective beams of excitation light, the measurement of the emission spectrum, the quantity of reflected light and the quantity of fluorescent emitted light of the phosphor 9, to be measured, by the beam of excitation light at 147 nm, the measurement of the emission spectrum, the quantity of reflected light and the quantity of fluorescent emitted light of the phosphor 9, to be measured, by the beam of excitation light at 254 nm and the measurement of the quantity of ultraviolet rays by the beam of excitation light at 254 nm are performed alternately. Measured data by the measurements are computed, and the quantum efficiency by the beam of excitation light at 147 nm of the phosphor 9 to be measured is computed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a quantum efficiency measuring device for measuring the quantum efficiency of a phosphor used in a fluorescent lamp, a plasma display, or the like.

[0002]

2. Description of the Related Art The quantum efficiency of a phosphor is extremely important as a measure for knowing the limit of the efficiency that can be reached by, for example, a phosphor for a lamp or a phosphor for a plasma display. Different types of quantum efficiency measurement methods have been used.

In the absolute value measurement method, the photon number (excitation light number) of the excitation light absorbed by the phosphor and the photon number (fluorescence light number) obtained by fluorescence emission are individually measured, and the absolute value is measured. In this method, the quantum efficiency is obtained from the ratio between the photon number and the fluorescent light number.

In this method, the absorption photon number of the excitation light absorbed by the phosphor is obtained by the following method. First, the excitation light of a single wavelength is measured using a thermal radiation detector such as a thermopile or an absolute radiometer to measure the photon number (excitation light number) of the excitation light applied to the phosphor, and the absolute reflection is measured. By measuring the number of reflected light quanta reflected from the phosphor (reflected light quantum number) using a known standard, for example, barium sulfate as the reflectance standard, and subtracting the reflected light quantum number from the excitation light quantum number obtained earlier, Find the absorption photon number.

Next, a fluorescence emission spectrum from the phosphor is measured by a spectroscope, and an absolute amount thereof is attached to an optical filter for removing only excitation light in front of the thermal emission detector or the absolute radiometer. A method of deriving the photon number of the fluorescence emission (fluorescence light quantum number) from the fluorescence emission spectrum and the absolute amount, and calculating the quantum efficiency of the phosphor from the ratio of the absorption light quantum number obtained above and this fluorescence light quantum number It is.

In this method, the absorption light quantum number and the fluorescence light quantum number of the excitation light are both weak, and an integrating sphere is required to capture all of them. As a countermeasure, it was necessary to increase the light output of the excitation light source and to use a high-sensitivity thermal radiation detector, absolute radiometer, spectroscope, and the like. Also,
Since an integrating sphere and a reflectance standard are used, the structure of the quantum efficiency measuring device is complicated and requires high accuracy.

[0007] As means for solving these problems, we first use the fluorescent quanta without using an integrating sphere, which is a cause of the light quantity shortage, or a reflectance standard, which is necessary for obtaining the number of absorbed light quanta. A simple quantum efficiency measurement method capable of measuring efficiency has been proposed (Japanese Patent Application No. 8-301478).

FIG. 2 shows an outline of a method of measuring the quantum efficiency of the phosphor and a measuring apparatus proposed by the present inventors.

In this method, first, as a measurement (1), the photon number (excitation wavelength) of excitation light to a phosphor at a specific wavelength λ1 (hereinafter referred to as wavelength λ1) in the ultraviolet region to the vacuum ultraviolet region is measured.
1), and then, as a measurement (2), the excitation light quantum number (the excitation light quantum number at the wavelength λ2) of the phosphor at the specific wavelength λ2 (hereinafter referred to as the wavelength λ2) is measured. I do.

Next, as a measurement (3), the number of reflected light quantums reflected from the phosphor of wavelength λ1 (quantity of reflected light at wavelength λ1) is measured, and as measurement (4), the number of reflected light is reflected from the phosphor of wavelength λ2. Reflected light quantum number (reflected light quantum number at wavelength λ2)
Is measured.

Next, as a measurement (5), the fluorescent light quantum number (the fluorescent light quantum number at the wavelength λ1) emitted from the phosphor having the wavelength λ1 is measured, and as the measurement (6), the fluorescence from the phosphor having the wavelength λ2 is measured. The fluorescent light quantum number (the fluorescent light quantum number at the wavelength λ2) to be emitted is measured.

As described above, each photon number obtained in the measurement from the measurement (1) to the measurement (6) is calculated, and finally, the excitation light quantum number, the reflected light quantum number, and the fluorescence light quantum number of the wavelength λ1 are used to calculate the wavelength. This is a method for determining the quantum efficiency of the phosphor at λ2.

[0013]

However, when the quantum efficiency of the phosphor is measured by this method, when the wavelength .lambda.1 and the wavelength .lambda.2 are switched, or when the light receiving device for measuring the amount of light incident on the phosphor and the phosphor is used. At the time of switching or the like, it is necessary to open and close a lid of a vacuum chamber for forming a vacuum atmosphere each time.

Therefore, the vacuum chamber is repeatedly evacuated to the air atmosphere or the vacuum atmosphere repeatedly according to the measurement procedure and the measurement items, and it takes much time to measure the quantum efficiency. In addition, the number of times the phosphor light source (ultraviolet ray generating light source) is turned on and off is increased, and the load on the excitation light source is increased.

The present invention provides a method and an apparatus for measuring the quantum efficiency of a phosphor, which simplifies the measuring method, reduces the number of times of forming a vacuum atmosphere at the time of measurement, and reduces the number of times the excitation light source blinks. The purpose is to reduce it.

[0016]

In order to solve this problem, a phosphor quantum efficiency measuring apparatus according to the present invention comprises: a light source for generating a radiant flux from an ultraviolet region to a vacuum ultraviolet region; A spectroscopic unit for dispersing the bundle into at least two or more wavelength ranges; and an absorptivity and a quantum for a radiant flux in one of the wavelength ranges divided into a plurality of wavelength ranges by the spectral unit. The efficiency is known, and the fluorescent substance to be measured for measuring the quantum efficiency in a wavelength range different from the wavelength range out of a plurality of wavelength ranges, and the radiant flux emitted from the light source and the spectral unit are monitored, A monitor light receiver that is alternately set at the same position as the body, a phosphor switching unit that alternately switches the phosphor to be measured and the monitor light receiver in accordance with measurement conditions, and a vicinity of the phosphor to be measured. And said A radiation source irradiating the fluorescent substance to be measured from the light source and the spectroscopic means to a position not to block the luminous flux emitted from the light source and the spectral means; A radiant flux reflected by the phosphor, a reflected light receiver for receiving fluorescence emitted from the measured phosphor, and a radiation radiated from the light source and the spectroscopic means disposed near the measured phosphor. The fluorescent substance to be measured emits fluorescent light by the bundle, and an emission spectrum measuring means for spectrally measuring an emission spectrum of the fluorescent light emission, an emission side of the light source, a spectral means, a fluorescent substance to be measured, a monitor receiver, and a fluorescent substance switching means , The incident side of the reflected light receiver and the emission spectrum measuring means are housed in the same container,
A vacuum vessel for creating a vacuum atmosphere, vacuum evacuation means for keeping the atmosphere in the vacuum vessel at a vacuum atmosphere, control for driving / stopping (lighting-off) of the light source, control for spectroscopy of the spectroscopic means, Drive-stop control of the phosphor switching means, drive-stop control of the evacuation means, etc., while controlling various mechanism means, photoelectric conversion signals from the monitor light receiver and the reflected light light receiver, From the spectral data signal from the emission spectrum measuring means, and from the arithmetic control means for calculating the quantum efficiency, in two specific wavelength ranges, obtained from the monitor light receiver, and incident on the phosphor to be measured. A measured value of the radiant flux from the light source and the spectroscopic means, a measured value of the reflected light and the fluorescence emission from the measured phosphor obtained from the reflected light receiver, and the emission spectrum Obtained from Le measuring means, wherein a light emitting spectrum values of the fluorescence emission from the measured phosphor,
The quantum efficiency of the fluorescent substance to be measured is determined.

Further, the light source is a deuterium lamp, and the spectroscopic means is at least two or more narrow-band transmission filters, which are mutually selected. Furthermore, the monitor light receiver and the reflected light receiver are silicon photodiodes, the reflected light receiver is two light receivers, and the light receiving surface of one of the light receivers is provided by the light source and the spectroscopic means. This is a band-pass filter that shields the reflected light from the measured phosphor of the radiant flux irradiated on the measured fluorescent body and transmits only the fluorescence emission.

In addition, the emission spectrum measuring means is a polychromator for simultaneously measuring emission spectra in a plurality of wavelength ranges.

Further, the center wavelengths of a plurality of wavelength ranges selectively spectrally separated by the spectral means are 147 nm and 172n.
m, 185 nm, or 254 nm.

Further, a shutter for irradiating or blocking the radiant flux from the light source is arranged on an optical axis formed by the light source and the fluorescent substance to be measured.

Further, in the method for measuring quantum efficiency of a phosphor according to the present invention, the ambient atmosphere around the phosphor to be measured is set to a vacuum atmosphere, and after the vacuum atmosphere, the second excitation light is converted to the fluorescence to be measured. Irradiating a body to measure an emission spectrum, a reflected light amount and a fluorescent light emission amount of the fluorescent substance to be measured in the second excitation light, and an ultraviolet light amount of the second excitation light; The data obtained in the step of measuring the emission spectrum, the reflected light amount and the fluorescent light emission amount of the measured phosphor in the excitation light, and the ultraviolet light amount of the first excitation light, and the data obtained in the respective measurement steps are calculated. Calculating the quantum efficiency of the phosphor under measurement with the second excitation light, from the start to the end of the measurement in the step of performing the measurement, in which one vacuum atmosphere is formed. Making measurements in a state And it features.

[0022]

Embodiments of the present invention will be described below with reference to FIG. FIG. 1 is a configuration diagram showing an outline of a quantum efficiency measuring device for measuring the quantum efficiency of a phosphor in an ultraviolet region to a vacuum ultraviolet region.

In FIG. 1, reference numeral 1 denotes a light source for generating a radiant flux (hereinafter referred to as excitation light) from the ultraviolet region to the vacuum ultraviolet region.
Preferably, it is a deuterium lamp. Reference numeral 2 denotes a light source power source for turning on the light source 1, reference numeral 3 denotes a shutter for irradiating or blocking excitation light from the light source 1, and reference numeral 4 denotes shutter driving means for opening and closing the shutter 3, which is an electromagnetic solenoid. Reference numeral 5 denotes a condensing means for condensing the excitation light emitted from the light source 1, which is a sapphire lens.

Reference numeral 6 denotes a spectral unit for dispersing the excitation light from the light source 1 into an arbitrary wavelength range. The narrow band transmission filter 7 is preferably an interference filter made of a metal multilayer film, and has a center wavelength of 147 nm, 1
72 nm, 185 nm, 254 nm and the like are prepared. Reference numeral 8 denotes a filter switching unit that switches a specific filter from the narrow band transmission filters 7 in order to select a specific wavelength range by the spectroscopic unit 6, and is a motor.

Reference numeral 9 denotes one of the wavelength ranges separated into a plurality of wavelength ranges by the spectral means 6, the absorption rate and the quantum efficiency of the excitation light in the wavelength range are known, and the known one of the plurality of wavelength ranges is known. A fluorescent substance to be measured for measuring the quantum efficiency in a wavelength range different from the wavelength range, 10 is a monitor light receiver for monitoring the excitation light from the light source 1, and salicylic acid having no wavelength sensitivity dependence on the front surface of the light receiving surface. This is a silicon photodiode on which a sodium film is formed (not shown).

Reference numeral 11 denotes the fluorescent substance 9 to be measured and the monitor light receiver 1
A phosphor switching means for alternately switching between 0 and 0 in accordance with the measurement conditions is provided by a rotating mechanism. The same phosphor switching means 1 is used for both the phosphor 9 to be measured and the monitor light receiver 10.
1, respectively.

Reference numeral 12 denotes a rotation driving means for rotating the phosphor switching means 11, which is a motor. 13a and 13
b is disposed near the fluorescent body 9 to be measured and at a position where the excitation light emitted from the light source 1 and the spectroscopic means 6 to the fluorescent body 9 to be measured is not blocked. Of the excitation light applied to the measurement phosphor 9, the excitation light reflected by the measurement target phosphor 9 and the reflected light receiver that receives the fluorescence emission from the measurement target phosphor 9. A silicon photodiode having a film of sodium salicylate (not shown) having no dependency on wavelength sensitivity.

Numeral 14 is disposed on the front surface of the reflected light receiver 13b, and is a reflection light (reflected by the measured phosphor 9 of the excitation light from the light source 1) out of the reflected light and the fluorescent light emitted from the measured phosphor 9. Excitation light), and a band-pass filter. 15a is a voltage converting means for converting the photocurrent from the monitor light receiver 10 into a voltage signal, 15b is a voltage converting means for converting the photocurrent from the reflected light receiver 13a into a voltage signal, and 15c is a voltage converting means from the reflected light receiver 13b. Voltage converting means for converting a photocurrent into a voltage signal;
5b and 15c are digital voltmeters.

Numeral 16 is arranged near the fluorescent substance 9 to be measured, and the fluorescent substance 9 to be measured emits fluorescent light by the excitation light emitted from the light source 1 and the condensing means 5 and the spectral means 6, and the fluorescent light emission is described later. The light guiding means for guiding the light to the emission spectrum measuring means 17 is an optical fiber. Reference numeral 17 denotes an emission spectrum measuring means for spectroscopically measuring the fluorescence emission from the fluorescent substance 9 to be measured via the light guiding means 16, which is a polychromator (such as a multi-channel spectrometer).

Reference numeral 18 denotes an emission side of the light source 1, the shutter 3, the light condensing means 5, the spectroscopic means 6, the phosphor to be measured 9, the monitor light receiver 10, the phosphor switching means 11, the reflected light light receiver 13a,
13b, a vacuum chamber for making the entrance side of the excitation light cut filter 14 and the light guide means 16 into a vacuum atmosphere, which is a vacuum chamber.

Numeral 19 designates the atmosphere in the vacuum vessel as 10-2 to 1
Evacuation means to maintain a vacuum of about 0-6 Torr,
It is a combination of a rotary pump and an oil diffusion pump.

Reference numeral 20 denotes a control signal for driving / stopping the light source power supply 2, a control signal for driving / stopping the shutter driving means 4, a control signal for driving / stopping the filter switching means 8, and a driving / stopping signal for the rotation driving means 12. Control signal, photoelectric conversion means 15
a signal transmission system (GP) for transmitting an electric signal from a, 15b, 15c, a spectral data signal from the emission spectrum measuring means 17, a control signal for driving / stopping the evacuation means 19, and the like to the arithmetic and control means 21 described later. -IB bus, etc.), 2
Numeral 1 denotes arithmetic control means for controlling the above-mentioned various mechanical means and calculating quantum efficiency from electric signals and spectral data signals, and is constituted by a computer.

The operation of the phosphor quantum efficiency measuring device configured as described above will be described below. In addition,
In the description of the present embodiment, as an example, the absorptance and quantum efficiency of the measured phosphor 9 for the excitation light at the wavelength of 254 nm are known, and the quantum efficiency of the phosphor at the wavelength of 147 nm is calculated as follows.
A method of measuring using the above quantum efficiency measuring device will be described.

First, the upper lid (not shown) of the vacuum vessel 18 is opened, and the phosphor 9 to be measured whose quantum efficiency is to be measured is fixed to the phosphor switching means 11. The measured phosphor 9 is filled in a phosphor holder (not shown) detachable from the phosphor switching means 11 by pressing with a certain pressure, and the pressed phosphor surface of the measured phosphor 9 and The angle α between the excitation light emitted from the light source 1 via the shutter 3, the light condensing means 5, and the spectroscopic means 6 to the optical axis A of the excitation light to be measured 9 is set to about 45 °.

After the fixing of the fluorescent substance 9 to be measured is completed,
With the upper lid of the vacuum vessel 18 closed and the vacuum vessel 18 hermetically closed, the rotary pump and the diffusion pump as the vacuum exhausting means 19 are operated by a command from a computer as the arithmetic and control means 21 to operate the vacuum vessel 18. The atmosphere (atmosphere) is exhausted, and the inside of the vacuum vessel 18 is 10-2 to 10
Control to maintain a vacuum of -6 Torr.

In parallel with the above operation, the operation control means 21
The light source 1 is turned on via the light source power supply 2 in response to a command from the controller, and the apparatus waits for about 30 minutes until the excitation light is stabilized. Until the excitation light emitted from the light source 1 is stabilized, the shutter 3 closes the electromagnetic solenoid, which is the shutter driving means 4, according to a command from the control means 21. It is not irradiated.

After the excitation light of the light source 1 is stabilized, the focusing means 5
Of the narrow band transmission filter 7, which is the spectral unit 6 provided on the emission side of the sapphire lens, and transmits a specific wavelength range of 147 nm to the arithmetic control unit 21
Is selected via the filter switching means 8 and set on the optical axis A.

In such a state, first, 147n
An emission spectrum of the measured phosphor 9 in a specific wavelength range of m is measured.

Specifically, the shutter 3 is opened via the shutter driving means 4 in response to a command from the arithmetic control means 21. At this time, the excitation light from the light source 1 is condensed by the condensing means 5 on the phosphor 9 to be measured, and the light having a specific wavelength of 147 nm (14
7 nm ultraviolet light).

When the 147 nm ultraviolet light is irradiated on the fluorescent substance 9 to be measured, the fluorescent substance 9 emits fluorescent light as visible light, and the fluorescent light is guided to an optical fiber which is a light guiding means 16 disposed near the fluorescent substance 9 to be measured. The polychromator, which is the emission spectrum measuring means 17, takes in the emission spectrum data of the measured phosphor 9 via the signal transmission system 20 into the computer, which is the arithmetic control means 21. Note that an optical axis B between the fluorescent body 9 to be measured and the incident side of the optical fiber as the light guide means 16 is set at an angle β with respect to the optical axis A.
Specifically, the angle β is about 90 °.

Next, the amount of reflected light and the amount of fluorescence emitted from the fluorescent substance 9 to be measured in a specific wavelength range of 147 nm are measured.

Specifically, in the above arrangement, the reflected light receiver 13a provided in the vicinity of the fluorescent body 9 to be measured emits a fluorescent light (visible light) from the fluorescent body 9 to be measured in response to a command from the arithmetic and control means 21. And the reflected light of 147 nm ultraviolet light, and receives only the fluorescent light (visible light) from the fluorescent body 9 to be measured by the reflected light receiver 13b and the excitation light cut filter 14. The measured phosphor 9 and the reflected light receiver 1
The optical axis C between the optical axes 3a and 13b and the excitation light cut filter 14 is set at an angle γ with respect to the optical axis A. Specifically, the angle γ is about 45 °.

The photocurrents from the reflected light receivers 13a and 13b are converted into voltage signals by digital voltmeters as voltage conversion means 15b and 15c according to a command from the arithmetic and control means 21. The reflected light data and the fluorescent light emission data are taken into a computer as the arithmetic and control unit 21.

Next, the amount of ultraviolet light of the excitation light applied to the fluorescent substance 9 to be measured in a specific wavelength range of 147 nm is measured.

Specifically, in response to a command from the arithmetic and control unit 21, the rotating mechanism as the phosphor switching unit 11 is driven to rotate by the motor as the rotation driving unit 12, and the measured object disposed in the phosphor switching unit 11 is measured. Instead of the phosphor 9, a monitor light receiver 10 is opposed to the light source 1 side on the optical axis A, and the monitor light receiver 10 receives the direct light of the excitation light converted to 147 nm ultraviolet light by the narrow band transmission filter 7. . At this time, the light receiving surface (not shown) of the monitor light receiver 10 is disposed so as to be normal (90 °) to the optical axis A.

The photocurrent from the monitor light receiver 10 is converted into a voltage signal by a digital voltmeter, which is a voltage conversion means 15 a, in accordance with a command from the arithmetic and control means 21, and excitation of 147 nm ultraviolet light is performed via a signal transmission system 20. The data is taken into the computer as the arithmetic control means 21 as optical data.

With the above operation, the emission spectrum, the reflected light amount and the fluorescent light emission amount of the measured phosphor 9 in the specific wavelength range of 147 nm, and the ultraviolet light of the excitation light applied to the measured phosphor 9 in the specific wavelength range of 147 nm After the measurement of the amount is completed, the shutter 3 is closed via the shutter driving means 4 in response to a command from the arithmetic control means 21.

Next, the emission spectrum of the measured phosphor 9 in the specific wavelength range of 254 nm, the amount of reflected light and the amount of fluorescence emitted, and the measured phosphor 9 in the specific wavelength range of 254 nm.
The amount of ultraviolet light of the excitation light applied to the sample is measured.

The measuring method and procedure are as described above for 147.
It is almost the same as the measurement method and procedure performed in the specific wavelength region of nm, and an outline thereof will be described below.

First, among the narrow band transmission filters 7, which are the spectral means 6, filters that transmit a specific wavelength range of 254 nm are selected through the filter switching means 8 in accordance with a command from the arithmetic control means 21, Set on axis A.

In such a state, the emission spectrum of the measured phosphor 9 in the specific wavelength range of 254 nm is measured.

More specifically, in response to a command from the arithmetic and control unit 21, the rotation mechanism as the phosphor switching unit 11 is rotationally driven by the motor as the rotation driving unit 12 via the shutter driving unit 4, After the phosphor 9 to be measured is arranged in place of the monitor light receiver 10 arranged in the switching means 11, the shutter 3 is opened.

At this time, the excitation light from the light source 1 is condensed by the condensing means 5 on the fluorescent substance 9 to be measured, and the light having a specific wavelength of 254 nm (254 nm) is transmitted by the narrow band transmission filter 7 through the spectroscopic means 6. (Ultraviolet light). This 254n
When m-ultraviolet light is applied to the fluorescent substance 9 to be measured, the fluorescent substance 9 emits fluorescent light as visible light, and this fluorescent light emission is guided to an optical fiber, which is a light guiding means 16 disposed in the vicinity of the fluorescent substance 9 to be measured. By the polychromator which is 17,
The emission spectrum data of the measured phosphor 9 is taken into the computer as the arithmetic and control means 21 via the signal transmission system 20.

Next, the amount of reflected light and the amount of fluorescence emitted from the fluorescent substance 9 to be measured in a specific wavelength range of 254 nm are measured.

More specifically, in the above arrangement, the reflected light receiver 13a provided in the vicinity of the fluorescent body 9 to be measured emits fluorescent light (visible light) from the fluorescent body 9 to be measured in accordance with a command from the arithmetic and control means 21. Light) and reflected light of 254 nm ultraviolet light, and the reflected light receiver 13b and the excitation light cut filter 14 receive only fluorescent light (visible light) from the phosphor 9 to be measured.

The photocurrents from the reflected light receivers 13a and 13b are converted into voltage signals by digital voltmeters as voltage conversion means 15b and 15c according to a command from the arithmetic and control means 21. The reflected light data and the fluorescent light emission data are taken into a computer as the arithmetic and control unit 21.

Next, the amount of ultraviolet light of the excitation light applied to the phosphor 9 to be measured in a specific wavelength range of 254 nm is measured.

More specifically, in response to a command from the arithmetic and control unit 21, the rotating mechanism as the phosphor switching unit 11 is driven to rotate by the motor as the rotation driving unit 12, and the measured object disposed in the phosphor switching unit 11 is measured. A monitor light receiver 10 is opposed to the light source 1 side on the optical axis A in place of the phosphor 9, and the monitor light receiver 10 receives the direct light of the excitation light converted to 254 nm ultraviolet light by the narrow band transmission filter 7. .

The photocurrent from the monitor light receiver 10 is converted into a voltage signal by a digital voltmeter, which is a voltage conversion means 15 a, according to a command from the arithmetic control means 21, and the 254 nm ultraviolet light is excited via the signal transmission system 20. The data is taken into the computer as the arithmetic control means 21 as optical data.

With the above operation, the emission spectrum, the reflected light amount and the fluorescent light emission amount of the measured phosphor 9 in the specific wavelength region of 254 nm, and the ultraviolet light of the excitation light applied to the measured phosphor 9 in the specific wavelength region of 254 nm After the measurement of the amount is completed, the shutter 3 is closed via the shutter driving means 4 in response to a command from the arithmetic control means 21.

The above is the operation of the phosphor quantum efficiency measuring apparatus according to the present invention. After performing these operations, the following operation is performed by the computer which is the operation control means 21 in order to obtain the quantum efficiency of the fluorescent substance 9 to be measured at the 147 nm excitation light.

That is, the fluorescence quantum number obtained from the emission spectrum of the fluorescent substance 9 to be measured with the excitation light of 147 nm is Rp147, the fluorescence quantum number obtained from the emission spectrum of the fluorescent substance 9 to be measured with the excitation light of 254 nm is Rp254, and the ratio between them is obtained. Assuming that the fluorescent light quantum number is Rp, Rp can be obtained from Expression (1).

[0063]

(Equation 1)

The excitation light quantum number obtained from the amount of ultraviolet light of the excitation light applied to the fluorescent substance 9 to be measured in the 147 nm excitation light is calculated from the Re147 and the amount of ultraviolet light of the excitation light applied to the fluorescent substance 9 to be measured in the excitation light of 254 nm. Assuming that the excitation light quantum number obtained is Re254 and the excitation light quantum number obtained from the ratio between the two is Re, Re can be obtained from equation (2).

[0065]

(Equation 2)

Next, the ultraviolet light amount of the excitation light to the fluorescent substance to be measured in the excitation light of 147 nm and the absorption light quantum number obtained from the reflected light amount and the fluorescent light emission amount are ε147, the excitation light to the fluorescent substance to be measured in the excitation light of 254 nm. Is the amount of ultraviolet light, and the absorption photon number obtained from the amount of reflected light and the amount of fluorescence emission is ε25.
Assuming that the quantum efficiency η 254 of the fluorescent substance 9 to be measured at 254 nm excitation light (this is known), the quantum efficiency η 147 of the fluorescent substance 9 to be finally determined at the excitation light of 147 nm is expressed by 3) It can be obtained from the equation.

[0067]

(Equation 3)

The above-described series of calculations is performed for the two phosphors 9 to be measured.
The quantum efficiency of the 54 nm pump light is known, and the quantum efficiency of the 147 nm pump light is obtained as an example. In the case of obtaining the quantum efficiency other than the specific wavelength range (147 nm), the same operation and method as described above are performed. Can be sought.

According to the present invention, in the method and apparatus for measuring quantum efficiency of a phosphor, all the measurements can be performed by forming a vacuum atmosphere at least once, and the quantum efficiency can be measured while the excitation light source is turned on. Can be performed, the measurement method can be simplified, the measurement time can be shortened, and the burden caused by the blinking of the excitation light source can be reduced.

In the above description, the light source 1 is constituted by a deuterium lamp. However, as a light source other than the deuterium lamp, the excitation from the ultraviolet region to the vacuum ultraviolet region such as a xenon lamp, a mercury lamp, and a metal halide lamp. Any light source that generates light may be used.

Further, a specific wavelength range is selected by switching a plurality of narrow-band transmission filters 7 as the spectroscopic means 6 by the filter switching means 8, but a spectrophotometer (monochromator or the like) may be used, or deuterium may be used. Instead of a lamp, a plurality of excimer lamps capable of narrow-band emission may be used for each specific wavelength range, and these may be switched to emit a radiant flux (excitation light) in a specific wavelength range.

In addition, an electromagnetic solenoid is used for the shutter driving means 4, and the filter switching means 8 and the rotation driving means 1 are used.
Although switching and driving are performed using a motor for each of the components 2, the switching and driving may be performed manually from outside the vacuum vessel 18 by combining a cam, a lever, a rotating shaft, and the like.

[0073]

As described above, according to the present invention, only one vacuum atmosphere needs to be formed at least once from the start to the end of the quantum efficiency measurement, and the vacuum evacuation is performed many times. Time loss can be reduced.

Since the quantum efficiency can be measured while the excitation light source is kept on from the start to the end of the quantum efficiency measurement, the excitation light is blinked several times by the excitation light source. And the burden caused by blinking can be reduced.

In addition, a remarkable effect is obtained that the measuring method is simplified and the measuring time is shortened.

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing an embodiment of the present invention.

FIG. 2 is a measurement flowchart showing a measurement process of a quantum efficiency measurement method of a phosphor.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 light source 2 power supply for light source 3 shutter 4 shutter driving means 5 focusing means 6 spectral means 7 narrow band transmission filter 8 filter switching means 9 fluorescent substance to be measured 10 monitor light receiver 11 fluorescent substance switching means 12 rotation driving means 13a, 13b reflection Optical receiver 14 Excitation light cut filter 15a, 15b, 15c Voltage conversion means 16 Light guide means 17 Emission spectrum measurement means 18 Vacuum container 19 Vacuum exhaust means 20 Signal transmission system 21 Operation control means

 ──────────────────────────────────────────────────の Continued on the front page (72) Inventor Shigeru Horii 1006 Kazuma Kadoma, Osaka Prefecture Matsushita Electric Industrial Co., Ltd.

Claims (9)

[Claims] A light source for generating a radiant flux from an ultraviolet region to a vacuum ultraviolet region; a spectral unit for spectrally dividing the radiant beam from the light source into at least two wavelength ranges; In one of the wavelength ranges separated into the wavelength range, the absorptance and the quantum efficiency for the radiant flux in the wavelength range are known, and the quantum efficiency in a wavelength range different from the known wavelength range among a plurality of wavelength ranges is known. A phosphor to be measured for measuring the efficiency; a radiant flux emitted from the light source and the spectroscopic means; a monitor light receiver alternately set at the same position as the phosphor to be measured; and the phosphor to be measured. A phosphor switching unit for alternately switching the phosphor and the monitor light receiver according to measurement conditions; and irradiating the phosphor to be measured from the light source and the spectral unit near the phosphor to be measured. Release Of the radiant flux that is arranged at a position that does not block the flux and that is radiated from the light source and the spectroscopic means to the fluorescent body to be measured, the radiant flux reflected by the fluorescent body to be measured and the fluorescent light emission from the fluorescent body to be measured And a reflected light receiver that receives light, a fluorescent light emitted from the light source and the radiant flux emitted from the spectral unit, the fluorescent light to be measured emits light, and an emission spectrum of the fluorescent light emission. The emission side of the light source, the emission side of the light source, the spectral unit, the phosphor to be measured, the monitor receiver, the phosphor switching unit, the reflected light receiver, and the entrance side of the emission spectrum measurement unit in the same container. A vacuum container for holding the vacuum container in a vacuum atmosphere, vacuum evacuation means for maintaining the atmosphere in the vacuum container in a vacuum atmosphere, control for driving / stopping (lighting-off) of the light source, the spectroscope. Control of spectral, the driving of the phosphor switching means - for controlling stop, driving the evacuating means - such as a control for stopping,
A control unit for controlling various mechanism units, a photoelectric conversion signal from the monitor light receiver and the reflected light receiver, a spectral data signal from the emission spectrum measurement unit, and the like, for calculating quantum efficiency. In two specific wavelength ranges, the measured value of the radiant flux from the light source and the spectroscopic unit incident on the phosphor to be measured, obtained from the monitor light receiver, and the radiant flux obtained from the reflected light receiver, From the measured values of the reflected light and the fluorescence emission from the measured phosphor and the emission spectrum value of the fluorescence emission from the measured phosphor obtained from the emission spectrum measuring means, the quantum efficiency of the measured phosphor is determined. An apparatus for measuring the quantum efficiency of a phosphor, which is characterized in that: 2. The apparatus according to claim 1, wherein the light source is a deuterium lamp. 3. The quantum efficiency of a phosphor according to claim 1, wherein the spectral means is at least two or more narrow-band transmission filters, and the narrow-band transmission filters are selected from each other. measuring device. 4. The apparatus according to claim 1, wherein the monitor light receiver and the reflected light receiver are silicon photodiodes. 5. A reflected light receiver comprising two light receivers, wherein a light receiving surface of one of the light receivers is selected from among a radiant flux irradiated from the light source and the spectroscopic means to the fluorescent substance to be measured. 2. The phosphor quantum efficiency measuring apparatus according to claim 1, further comprising a band-pass filter that shields reflected light from the phosphor to be measured and transmits only fluorescent light. 6. An apparatus according to claim 1, wherein said emission spectrum measuring means is a polychromator for simultaneously measuring emission spectra in a plurality of wavelength ranges. 7. The center wavelengths of a plurality of wavelength ranges selectively spectrally separated by the spectral means are 147 nm, 172 nm, and 185 nm.
4. The phosphor quantum efficiency measuring apparatus according to claim 1, wherein the combination is any combination of m and 254 nm. 8. The phosphor quantum efficiency measurement according to claim 1, wherein a shutter for irradiating or shielding a radiant flux from said light source is arranged on an optical axis formed between the light source and the phosphor to be measured. apparatus. 9. A method for measuring a quantum efficiency of a phosphor in the second excitation light using a first excitation light and a second excitation light different from the first excitation light, Setting the surrounding atmosphere of the measured phosphor to a vacuum atmosphere, and irradiating the second excited light to the measured phosphor after setting the vacuum atmosphere, thereby obtaining the measured phosphor in the second excitation light. Measuring the light emission spectrum, reflected light amount and fluorescent light emission amount, and the ultraviolet light amount of the second excitation light; and light emission spectrum, reflected light amount and fluorescent light emission amount of the measured phosphor in the first excitation light. And a step of measuring the amount of ultraviolet light of the first excitation light; and calculating data obtained in the step of performing each measurement to calculate a quantum efficiency of the measured phosphor with the second excitation light. Calculating at least the step of performing the measurement. Until completion of definitive measurement start, the phosphor quantum efficiency measurement method which is characterized in that the measurement in one state that the formation of the vacuum atmosphere.