JPH10282424A - Light irradiating device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To facilitate to irradiate many objects with a light rays of the same wavelength, to lower the cost of a device and to make a whole system compact by efficiently irradiating plural objects with one light beam. SOLUTION: This device comprises an entrance port 2 having an entrance optical axis 2A in the fixed direction and an entrance optical axis 3A intersecting the entrance optical axis 2A and orienting to an irradiating object 21, is provided with an exit optical system 3 arranged in the direction of the entrance optical axis 2A and an mirror 5 arranged on the entrance optical axis 2A and reflecting/introducing the incident light rays being made incident from the entrance port 2 to the respective exit optical systems 3 and composed of a partial mirror, reflecting/introducing a part of light rays from the entrance port 2 to the relevant exit optical system 3 and transmitting a remaining light rays through it toward a mirror 5 in the next stage, as all mirrors 5 except a mirror 5E in the final stage located farthest from the entrance port 2.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a light irradiating apparatus, and more particularly to a light irradiating apparatus that efficiently irradiates a single light beam to a plurality of irradiation objects.

[0002]

2. Description of the Related Art For example, when a research sample (irradiation target) is irradiated with laser light or the like, it is sometimes necessary to simultaneously irradiate a plurality of samples with laser light of the same wavelength. No suitable light irradiating device is found, and only a light irradiating device such as a laser generator is arranged for each sample.

[0003]

However, arranging a laser generator or the like for each sample requires a laser generator corresponding to the number of samples when the number of samples is large. It is troublesome to adjust the light beams from laser generators to have the same wavelength and further to make the intensity distribution suitable for irradiation, and it is disadvantageous in terms of cost because many laser generators are required. Since the whole becomes large, it is not preferable in terms of space efficiency.

The present invention has been made in view of the above circumstances, and irradiates a single light beam to a plurality of irradiation targets efficiently, thereby facilitating irradiation of a large number of irradiation targets with light beams of the same wavelength, thereby reducing costs. It is an object of the present invention to provide a light irradiation device suitable for applying to a system for irradiating a biological research sample with laser light, for example, by reducing the number of components and making the whole system compact.

[0005]

In order to solve the above-mentioned problems and to achieve the above object, a light irradiation apparatus according to the first aspect comprises an entrance having an incident optical axis in a certain direction; A plurality of emission optical systems having an emission optical axis crossing and directed to each of the irradiation target groups, arranged in the direction of the incident optical axis, and arranged for each emission optical system positioned on the incident optical axis. A mirror that reflects and introduces a light beam incident from the entrance to each of the exit optical systems, and a part of the light beam from the entrance as the entire mirror except for the last mirror located farthest from the entrance. Is reflected and introduced toward the corresponding output optical system, and a partial mirror that transmits the remaining light toward the next mirror is used.
In the light irradiation device according to claim 2, a technique of changing the transmittance of the partial mirror stepwise from the side closer to the entrance to the side farther from the side closer to the entrance so as to evenly divide the light beam into the entire exit optical system. Applied. According to a third aspect of the present invention, in the light irradiation apparatus, a technique is used in which the emission optical system includes a uniformizing optical system that equalizes the intensity of a passing light beam in a passing plane. According to a fourth aspect of the present invention, in the light irradiation apparatus, a technique is employed in which the emission optical system includes an irradiation area adjustment lens system that adjusts a size of an irradiation area of a light beam with respect to an irradiation target. In the light irradiation device according to the fifth aspect, a technique is employed in which a light beam incident from the entrance is a laser beam. 7. The light irradiation device according to claim 6, wherein a plurality of said entrances are provided in correspondence with one irradiation target group, and an emission optical system is formed for each of said entrances. A technique of irradiating a target with a light beam from each entrance from each output optical system is applied.

[0006]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a light irradiation device according to the present invention will be described below with reference to FIGS.
This light irradiation device is a device that is installed at a terminal portion that irradiates a laser beam transmitted from a laser generator to a sample in a system that irradiates a laser beam to a research sample (irradiation target). This system is used for many research samples.
It has a function of irradiating laser light. In addition, laser light having a standard wavelength is fixedly introduced into one light irradiation device, and up to two types of laser light having a wavelength other than the standard wavelength can be selectively introduced. Are simultaneously irradiated on the sample.

However, the light irradiating apparatus according to the present invention is not limited to use for irradiating a research sample with light, but can be applied to other apparatuses for irradiating a large number of irradiation targets with a light beam of the same wavelength. Further, the light beam to be introduced is not limited to a laser beam, but may be a beam to be introduced after, for example, splitting a xenon lamp.

FIG. 1 is a front view showing one emission optical system M1 into which a laser beam for a standard wavelength is introduced, of the light irradiation device M of the embodiment, and FIG. It is a side view. The light irradiation device M is disposed facing ten samples (irradiation targets) 21 in the sample holder 20, and as shown in FIG. 2, an emission optical system M1 for a standard wavelength and another selection light. Two output optical series M2, M for wavelength
3 All outgoing optical systems M1, M2, M3
Have substantially the same configuration except that the wavelength of the incident laser beam is different. It should be noted that a larger number (three or more rows) of output optical systems for the selected wavelengths can be provided.

A light irradiation apparatus M based on the emission optical system M1 for the standard wavelength will be described with reference to FIG. The light irradiation device M has a rectangular base 1 with the long side direction being the X direction and the short side direction being the Y direction. Base 1
Above one end surface in the X direction, an entrance 2 formed by an optical transmission path end on the incident side is provided with the incident optical axis 2A directed in the X direction. Laser light is incident from the entrance 2.

In the X direction of the base 1, ten outgoing optical systems 3 are arranged at regular intervals in the direction of the incident optical axis 2A from the side closer to the entrance 2 to the side farther from the entrance 2, and the outgoing optical system M1 is arranged. Make up. Each of the exit optical systems 3 includes an incident optical axis 2
Each has an output optical axis 3A in the Y direction that intersects A.

On the incident optical axis 2A, mirrors 5 are arranged in a line for each output optical system 3. These mirrors 5 are for reflecting and introducing the laser beam incident from the entrance 2 to the respective exit optical systems 3, and are arranged at an angle of 45 degrees with respect to the X and Y directions.

All of the mirrors 5 except the last-stage mirror 5E located farthest from the entrance 2 are constituted by partial mirrors. The light is reflected and introduced toward the corresponding output optical system 3, and the remaining light is transmitted toward the mirror 5 at the next stage.

In this case, the transmittance of the partial mirror is
The light beam changes stepwise from a side closer to the entrance 2 to a side farther from the entrance 2 so as to evenly divide the light beam into the entire exit optical system 3.
That is, the laser light incident by the partial mirror is
Since it is necessary to divide by 0, the transmittance is 9/10, 8/9, 7/8, 6/7,
They are set to 5/6, 4/5, 3/4, 2/3, 1/2, and 0/1 (total reflection mirror). However, it is optional whether or not the light rays are equally divided into all the emission optical systems 3, and the transmittance of each mirror 5 can be set arbitrarily. Also, mirror 5
The light beam is reflected and introduced by the light source 3 to form the output optical axis 3A, and the sample 21 is set in the direction of the output optical axis 3A.

As described above, the mirror 5 and the emission optical system 3 are integrated to constitute the light irradiation device M, and each mirror 5 and the emission optical system 3 corresponding to the mirror 5 introduce one light. It is possible to perform divided irradiation of irradiating the laser light for each of a plurality of samples 21 from two laser lights having the same wavelength.

Each of the exit optical systems 3 includes a homogenizing optical system 7 for homogenizing the intensity distribution of the passing light beam in the passing plane.
An irradiation area adjusting lens system 6 for adjusting the size of the irradiation area of the light beam to the sample 21 is included. Uniform optical system 7
Is composed of a fly-eye lens and two lenses. However, the configuration is not limited to this configuration, and the configuration of the homogenizing optical system 7 is arbitrary as long as the intensity distribution of the passing light beam can be uniformed.

The irradiation area adjusting lens system 6 has an output optical axis 3A.
And a plurality of stages (four stages in the figure) that can move forward and backward. The irradiation area adjusting lens system 6 increases or decreases the size of the irradiation area with respect to the sample 21 by appropriately interposing one of the grouped lenses on the output optical axis 3A (optical path). However, the irradiation area adjusting lens system 6 is not limited to the illustrated one. For example, it is possible to arbitrarily set the number of grouped lenses, and the means for moving each grouped lens forward and backward. A collimator 8 is interposed between the entrance 2 and the first-stage mirror 5.

As shown in FIG. 2, the light irradiation device M arranges the emission optical system M1 for the standard wavelength vertically above the sample 21, and emits the other two optical systems for the selected wavelength. M
2, M3 are arranged obliquely on both sides of the output optical system M1. One sample 21 in the sample 21 group (irradiation target group) is provided with each of the output optical systems M1, M2, M3. Light can be emitted simultaneously from each one output optical system 3.

Here, the output optical system M for the selected wavelength is used.
2. Since laser beams of different wavelengths are incident on the entrance of M3, one sample 21 is irradiated with laser beams of three different wavelengths at the same time. For example, a laser beam having a wavelength of 500 nm is emitted from the emission optical system M1, a laser beam having a wavelength of 200 nm is emitted from the emission optical system M2, and a laser beam having a wavelength of 1000 nm is emitted from the emission optical system M3 to one sample 21 simultaneously. You.

The wavelength of the laser light emitted from each of the emission optical systems M1, M2, M3 can be set arbitrarily.
Furthermore, laser beams of the same wavelength may be emitted from each of the emission optical systems M1, M2, and M3.

In the light irradiation device M configured as described above, while the laser light incident from the entrance 2 sequentially passes through the partial mirror formed by the mirror 5,
Each mirror 5 reflects and introduces the light into the emission optical system 3 and irradiates each sample 21. At this time, since the transmittance of the partial mirror 5 is sequentially changed, the laser light is uniformly distributed and introduced to all the emission optical systems 3 and at the same time, 10
Each sample 21 is irradiated with laser light of the same intensity.

When the irradiation area is adjusted, the adjustment can be easily performed by moving one of the lens groups constituting the irradiation area adjusting lens system 6 forward or backward. That is, it is possible to change the irradiation area by positioning any one of the four lenses on the output optical axis 3A. Further, according to the light irradiation device M, since three outgoing optical systems M1, M2, and M3 are provided, one sample 21 can be simultaneously irradiated with laser beams of three wavelengths. It is possible to conduct research under various conditions.

[0022]

As described above, according to the light irradiation apparatus of the first aspect, the partial mirror is arranged on the incident optical axis, and the reflected light of each partial mirror is sequentially arranged in the direction of the incident optical axis. Since the light is introduced into the optical system, a single light beam can be efficiently irradiated to a plurality of irradiation targets with a simple structure. Therefore, it is possible to easily irradiate a large number of irradiation targets with the same wavelength light, to reduce the cost and downsize the entire system. For example, the present invention is applicable to a system for irradiating a biological research sample with laser light. It is suitable. According to the light irradiation device of the second aspect, the transmittance of the partial mirror is changed stepwise from a side closer to the entrance to a side farther from the side so as to evenly divide the light into the entire exit optical system. Accordingly, a light beam can be easily and reliably irradiated to each of the irradiation targets under the same conditions. According to the light irradiation device of the third aspect, since the uniforming optical system is included in the emission optical system, it is possible to uniformly irradiate one irradiation target without unevenness. According to the light irradiation device of the fourth aspect, since the irradiation optical system includes the irradiation region adjusting lens system, the irradiation region with respect to the irradiation target can be freely adjusted. According to the light irradiation device of the fifth aspect, the light beam introduced from the entrance is a laser beam, and the effectiveness can be particularly exhibited. According to the light irradiation device according to claim 6, since a plurality of output optical systems are formed corresponding to one irradiation target group, light beams having different wavelengths are introduced into the entrances of the respective output optical systems. In addition, it is possible to simultaneously irradiate a single irradiation target with light beams of a plurality of wavelengths.

[Brief description of the drawings]

FIG. 1 is a front view showing an embodiment of a light irradiation device according to the present invention.

FIG. 2 is a side view of the light irradiation device shown in FIG.

[Explanation of symbols]

 M Light irradiation device M1, M2, M3 Outgoing optical system 2 Inlet 2A Incident optical axis 3 Outgoing optical system 3A Outgoing optical axis 5 Mirror 5E Last stage mirror 6 Irradiation area adjusting lens system 7 Uniform optical system 21 Sample (irradiation target) )

Claims (6)

[Claims] 1. A plurality of exits having an entrance having an incident optical axis in a fixed direction, and exiting optical axes intersecting the incident optical axis and directed to each of the irradiation target groups, and arranged in the incident optical axis direction. An optical system, and a mirror positioned on the incident optical axis and arranged for each output optical system, and a mirror that reflects and introduces a light beam incident from the input port to each output optical system, A partial mirror that reflects and introduces a part of the light beam from the entrance toward the corresponding output optical system and transmits the remaining light beam to the next mirror as all mirrors except the last mirror at the position. A light irradiation device, wherein a mirror is used. 2. The method according to claim 1, wherein the transmittance of the partial mirror is changed stepwise from a side closer to the entrance to a side farther from the entrance so as to evenly divide the light beam into the entire exit optical system. The light irradiation device according to claim 1. 3. The light irradiating apparatus according to claim 1, wherein the emission optical system includes a uniforming optical system for equalizing the intensity of a passing light beam in a passing plane. . 4. The light according to claim 1, wherein said emission optical system includes an irradiation area adjusting lens system for adjusting a size of an irradiation area of a light beam to an irradiation object. Irradiation device. 5. The light irradiation device according to claim 1, wherein the light beam incident from the entrance is a laser beam. 6. A plurality of said entrances are provided in correspondence with one irradiation target group, and an emission optical system is formed for each of said entrances. The light beam from the entrance is emitted from each of the output optical systems.
Or the light irradiation device according to 5.