JPH10281747A - X-rat tube, method and equipment for measuring thickness of sheet-like matter using x-ray - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an X-ray tube and a method and an equipment for measuring the thickness of a sheet-like matter accurately and inexpensively through a simple structure using X-rays even if the sheet-like matter is moved at a higher speed. SOLUTION: An X-ray tube 8 to be used comprises conductors each having a heat source disposed at a plurality of positions in the longitudinal direction of a hollow vacuum container, and a plurality of anodes radiating X-rays by a hot electron stream radiated from a heat source in the hollow vacuum container. The X-ray tube 8 and a plurality of X-ray detectors 24 are supported on a support 50 and a sheet-like matter 52 is passed between them. The sensor support is reciprocated and the thickness of a reference body 58 and the sheet- like matter 52 is measured by means of the endmost X-ray source and detector which are then corrected. Subsequently, the measurements of the inner X-ray source and detector are corrected sequentially using the corrected measurements of the endmost inner X-ray source and detector.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an X-ray tube,
X-ray utilizing sheet-like material thickness measuring method using X-ray tube and X-ray for implementing this X-ray utilizing sheet-like material thickness measuring method
The present invention relates to a line-based sheet thickness measuring device.

[0002]

2. Description of the Related Art A conventional X-ray utilizing sheet thickness measuring apparatus for measuring the thickness of a sheet using X-rays corresponds to one X-ray tube and one X-ray tube. One X-ray detector arranged at a position separated by a predetermined distance from one X-ray tube;
And a supporting frame supporting the. Then, a sheet-like material such as a vinyl sheet is passed through a predetermined position between the one X-ray tube and one X-ray detector, and during this time, the support frame intersects the moving direction of the sheet-like material. It is reciprocated in a direction, for example, a width direction.

[0003]

A set of X-ray tubes and X-ray detectors of the conventional X-ray utilizing sheet-like thickness measuring apparatus having the above-mentioned configuration is used for moving the surface of the moving sheet-like material. A continuous arc-shaped trajectory that oscillates in the width direction of the sheet is drawn, and the pitch of the trajectory in the moving direction of the sheet increases as the moving speed of the sheet increases.

[0004] For this reason, as the moving speed of the sheet increases, the measured density of the thickness of the sheet decreases. In order to improve the measurement density, the reciprocating speed of the support frame in the width direction of the sheet-like object is improved, and a continuous arc-shaped wave shape that oscillates in the width direction of the sheet-like object relative to the surface of the moving sheet-like object The pitch of the locus may be reduced, but the reciprocating speed decreases as the width of the sheet increases.

That is, in the conventional X-ray utilizing sheet thickness measuring apparatus as described above, as the moving speed of the sheet increases, the measurement density of the thickness of the sheet increases, and the thickness of the sheet increases. Even if the width becomes large, the above measurement density becomes rough.

SUMMARY OF THE INVENTION The present invention has been made under the above circumstances, and an object of the present invention is to provide a simple and inexpensive structure which can accurately move a sheet at a higher speed than conventional ones. It is an object of the present invention to provide an X-ray utilizing sheet thickness measuring method, an X-ray utilizing sheet thickness measuring device, and an X-ray tube used for these.

[0007]

In order to achieve the above-mentioned object of the present invention, a method for measuring the thickness of a sheet-like material utilizing X-rays according to the present invention is as follows: a plurality of X-ray sources are linearly arranged at predetermined intervals. At a predetermined position between the arranged X-ray tube and a plurality of X-ray detectors which are arranged to face the plurality of X-ray sources of the X-ray tube and are separated from the plurality of X-ray sources by a predetermined distance, a sheet-like shape is provided. Let things pass,
A plurality of X-ray sources and a plurality of X-ray detectors facing the plurality of X-ray sources; a plurality of X-ray detectors facing the plurality of X-ray sources; Is measured.

Here, since the X-ray tube has a configuration in which a plurality of X-ray sources are linearly arranged at predetermined intervals, the configuration is simple and inexpensive. A sheet-like object is passed at a predetermined position between a plurality of X-ray detectors which are arranged opposite to a plurality of X-ray sources of the X-ray tube and are separated from the plurality of X-ray sources by a predetermined distance. The thickness of a plurality of positions on a sheet is measured between an X-ray source and a plurality of X-ray detectors facing the plurality of X-ray sources by using the plurality of X-ray detectors facing the plurality of X-ray sources. By doing so, it is possible to accurately measure the thickness of the sheet even if the sheet is moved at a higher speed than before.

In order to carry out the method for measuring the thickness of a sheet-like material utilizing X-rays according to the present invention, the apparatus for measuring the thickness of a sheet-like material utilizing X-rays according to the present invention comprises: An X-ray tube arranged at a predetermined interval in the X-ray tube; a plurality of X-ray detectors arranged opposite to the plurality of X-ray sources of the X-ray tube and separated from the plurality of X-ray sources by a predetermined distance; Multiple X-ray tubes
A sheet-like object is passed at a predetermined position between the X-ray source and the plurality of X-ray detectors, and a plurality of X-rays are generated by the plurality of X-ray sources and the plurality of X-ray detectors facing the plurality of X-ray sources. It is characterized in that the thicknesses of a plurality of positions of the sheet are measured between a plurality of X-ray detectors facing the radiation source.

[0010] In order to achieve the above object of the present invention,
The method for measuring the thickness of an X-ray utilizing sheet according to the present invention also includes: an X-ray tube in which a plurality of X-ray sources are linearly arranged at predetermined intervals; A plurality of X-ray detectors arranged at a predetermined distance from the plurality of X-ray sources, and a sensor support having a plurality of X-ray sources and a plurality of X-ray detectors. The X-ray source and the X-ray detector located at a predetermined position between the plurality of X-ray sources and the plurality of X-ray detectors. Providing a sheet of reference material at the predetermined position between the plurality of X-ray sources and the plurality of X-ray detectors of the sensor support, and moving the sensor support to the extreme end. The X-ray source and the X-ray detector located at the first position facing the sheet-like object and facing the calibration reference body Reciprocating to and from a second position; when the sensor support is positioned at the first position, the thickness of the calibration reference is determined by the extreme end X-ray source and the X-ray detector. Is detected to calibrate the thickness detection value by the X-ray source and the X-ray detector located at the end, and the thickness of the sheet-like material is measured by the remaining X-ray source and the X-ray detector facing the sheet-like material. When the sensor support is located at the second position, the X at the extreme end is detected.
After the thickness of the sheet is detected by the remaining X-ray source and the X-ray detector facing the sheet including the X-ray source and the X-ray detector, the X-ray source and the X-ray located at the extreme ends The X-ray source located at the end and the X-ray source disposed next to the X-ray detector and the sensor support by the X-ray detector are based on the thickness detection value of the sheet-like object by the detector. Calibrating the thickness detection value of the sheet when placed in the first position; each time the reciprocating operation of the sensor support is subsequently performed, the X-ray source calibrated when the reciprocating operation was performed last time And the X-ray source and the X-ray source and the X-ray detector adjacent to the inside that are calibrated when the reciprocating operation was performed last time based on the thickness detection value of the sheet-like object by the X-ray detector. Calibrate the thickness detection of the sheet; finally all X-ray sources and X-ray detectors Thickness detecting value is calibrated with respect to the thickness detection value calibrated by the X-ray source and the X-ray detector located on the extreme edge; it can be characterized.

Also in this case, since the X-ray tube has a configuration in which a plurality of X-ray sources are linearly arranged at predetermined intervals, the configuration is simple and inexpensive. A sheet-like object is passed at a predetermined position between a plurality of X-ray detectors which are arranged opposite to a plurality of X-ray sources of the X-ray tube and are separated from the plurality of X-ray sources by a predetermined distance. The thickness of a plurality of positions on a sheet is measured between an X-ray source and a plurality of X-ray detectors facing the plurality of X-ray sources by using the plurality of X-ray detectors facing the plurality of X-ray sources. By doing so, it is possible to accurately measure the thickness of the sheet-like object even if the sheet-like object is moved at a higher speed than before, and furthermore, a plurality of X-ray sources and a plurality of X-ray detectors of the sensor support. Every time the sheet-like object is passed at the predetermined position, the thickness detection values of the plurality of X-ray sources and the plurality of X-ray detectors are all the X-ray sources and X-rays located at the extreme ends. Calibration is based on the calibrated thickness detected by the detector, so that the thickness of the sheet can be measured more accurately. It can be.

In order to achieve the above object of the present invention,
The method of measuring the thickness of an X-ray utilizing sheet according to the present invention is also as follows:

In order to carry out the method for measuring the thickness of an X-ray utilizing sheet according to the present invention, the apparatus for measuring the thickness of an X-ray utilizing sheet according to the present invention comprises: An X-ray tube arranged at a predetermined interval, and a plurality of X-ray detectors arranged opposite to the plurality of X-ray sources of the X-ray tube and separated from the plurality of X-ray sources by a predetermined distance. A plurality of X-ray sources and a plurality of X-ray sources; a plurality of X-ray sources and a plurality of X-ray detectors;
The X-ray source located at the end in the arrangement direction of the X-ray detectors and a predetermined distance between the X-ray detectors and the X-ray detectors from the X-ray detector and separated outward by the predetermined distance. A calibration reference body independently arranged from the sensor support; and a sensor reference body having the endmost X-ray source and the X-ray detector in the first position facing the sheet-like object and the calibration reference body. A support reciprocating drive means for reciprocating between the opposing second position; when the sensor support is disposed at the first position, the endmost X-ray source and X-ray detector The thickness of the calibration reference body is detected by the detector to calibrate the thickness detection values by the X-ray source and the X-ray detector located at the end, and the remaining X-ray source and X-ray detection facing the sheet-like object The thickness of the sheet is detected by the sensor, and the sensor support is moved to the second position. When the thickness of the sheet is detected by the remaining X-ray sources and X-ray detectors facing the sheet including the X-ray source and the X-ray detector positioned at the end, The most extreme X-ray source and X
The X-ray source located at the end and the X-ray source disposed next to the X-ray detector based on the thickness detection value of the sheet by the X-ray detector and a sensor support by the X-ray detector Is calibrated the thickness detection value of the sheet-like object when it is arranged at the first position, and every time the reciprocating operation of the sensor support is subsequently performed, the X-ray calibrated at the previous reciprocating operation X-ray source and X-ray source calibrated when the reciprocating operation was performed last time based on the thickness of the sheet-like object detected by the source and the X-ray detector
An X-ray source adjacent to the inside of the X-ray detector and calibration means for calibrating a thickness detection value of a sheet-like object of the X-ray detector.

In order to achieve the above object of the present invention,
The method for measuring the thickness of an X-ray utilizing sheet according to the present invention also includes: an X-ray tube in which a plurality of X-ray sources are linearly arranged at predetermined intervals; A plurality of X-ray detectors arranged at a predetermined distance from the plurality of X-ray sources, and a sensor support having a plurality of X-ray sources and a plurality of X-ray detectors. The X-ray source and the X-ray detector located at a predetermined position between the plurality of X-ray sources and the plurality of X-ray detectors. A plurality of X-ray sources of the X-ray tube in a plurality of sets for generating X-rays of different intensities; and X-rays of different intensities. A plurality of X-ray sources are provided between the plurality of X-ray sources and the plurality of X-ray detectors of the sensor support at the predetermined position. With passing a sheet,
The sensor support is reciprocated between a first position facing the sheet-like object and a second position facing the calibration reference body, the set including the endmost X-ray source and the X-ray detector. Reciprocating; when the sensor support is arranged at the first position, a plurality of X-ray sources corresponding to a plurality of X-ray sources belonging to an endmost one in the arrangement direction of the plurality of X-ray sources among the plurality of sets. The thickness of the plurality of calibration reference bodies is detected in cooperation with the X-ray detector of
Calibrating the thickness detection values by the source and the corresponding plurality of X-ray detectors and detecting the thickness of the sheet by the remaining X-ray source and X-ray detector facing the sheet; sensor support Is located at the second position, the remaining set of X-rays facing the sheet-like object including the plurality of X-ray sources and the corresponding plurality of X-ray detectors belonging to the endmost set After the thickness of the sheet is detected by the source and the plurality of X-ray detectors, the sheet-like object is detected by the plurality of X-ray sources and the corresponding plurality of X-ray detectors belonging to the set located at the end. The sensor support of the plurality of X-ray sources and the corresponding plurality of X-ray detectors arranged in the innermost set next to the above-described set based on the thickness detection value is disposed in the first position. Calibrates any of the sheet thickness detection values when For each successive reciprocating movement of the sensor support, the thickness of a sheet-like object detected by a set of a plurality of X-ray sources and a corresponding plurality of X-ray detectors calibrated during the last reciprocating movement A set of X-ray sources and a corresponding plurality of X-ray detectors that are inwardly adjacent to the set of X-ray sources and the corresponding X-ray detectors that were calibrated the last time the reciprocating operation was performed based on the value.
Calibrate the sheet thickness readings of the source and the corresponding X-ray detectors; finally, all the thicknesses of the sets of the X-ray sources and the corresponding X-ray detectors The detection value is calibrated with reference to the calibrated thickness detection value by the endmost set of X-ray sources and the corresponding X-ray detectors.

Also in this case, the X-ray tube has a configuration in which a plurality of X-ray sources are linearly arranged at predetermined intervals, so that the configuration is simple and inexpensive. Further, a plurality of X-ray sources of the X-ray tube are configured into a plurality of sets for generating X-rays having mutually different intensities, and a plurality of X-ray sources are arranged to face the plurality of X-ray sources of the X-ray tube.
A sheet-like object is passed at a predetermined position between a plurality of X-ray detectors separated from the X-ray source by a predetermined distance, a plurality of X-ray sources and a plurality of X-ray detectors facing the plurality of X-ray sources. By measuring the thickness of the sheet at a plurality of positions between a plurality of X-ray detectors facing a plurality of X-ray sources, it is possible to accurately move the sheet at a higher speed than before It is possible to measure the thickness of a sheet-like material, and to measure the thickness of a plurality of types of sheet-like materials.

Further, each time a sheet-like object is passed at the predetermined position between the plurality of X-ray sources and the plurality of X-ray detectors of the sensor support, a plurality of sets of the plurality of X-ray sources and the plurality of X-ray sources are provided. Since all the thickness detection values of the X-ray detector are calibrated with reference to the calibrated thickness detection values by the endmost set of X-ray sources and X-ray detectors, It is possible to simultaneously and accurately measure the thicknesses of various types of sheet materials.

In order to carry out the method for measuring the thickness of a sheet using an X-ray according to the present invention, the apparatus for measuring the thickness of a sheet using an X-ray according to the present invention comprises: An X-ray tube arranged at predetermined intervals in the X-ray tube, and a plurality of X-ray detectors arranged opposite to the X-ray sources of the X-ray tube and separated from the X-ray sources by a predetermined distance. A plurality of sets of X-ray sources of the X-ray tube, the sensor supports comprising a plurality of sets for generating X-rays having mutually different intensities; and an arrangement direction of a plurality of X-ray sources and a plurality of X-ray detectors. At a predetermined position between the plurality of X-ray sources and the plurality of X-ray detectors from the endmost X-ray source and the X-ray detector, and is separated from the sensor support by the predetermined distance outside. A plurality of calibration reference bodies arranged correspondingly to X-rays of different intensities; A set including the X-ray source and the X-ray detector positioned at the extreme end while passing the sheet-like object at the predetermined position between the plurality of X-ray sources and the plurality of X-ray detectors; Reciprocating drive means for reciprocating between a first position facing the sheet-like object and a second position facing the calibration reference body; and a sensor support is disposed at the first position. A plurality of calibration standards in cooperation with a plurality of X-ray detectors corresponding to a plurality of X-ray sources belonging to a set located at the end of the plurality of sets in the arrangement direction of the plurality of X-ray sources. Detecting the thickness of the body, calibrating the thickness detection values of the plurality of X-ray sources belonging to the endmost set and the corresponding X-ray detectors, and the remaining X-rays facing the sheet-like object The thickness of the sheet is detected by a source and an X-ray detector. When the holding body is disposed at the second position, the remaining sets of the plurality of X-ray sources and the corresponding plurality of X-ray detectors belonging to the endmost set are opposed to the sheet-like object including the plurality of X-ray detectors. After the thickness of the sheet is detected by the X-ray source and the plurality of X-ray detectors, the sheet-like shape is detected by the plurality of X-ray sources and the corresponding plurality of X-ray detectors belonging to the set located at the end. The sensor support by the plurality of X-ray sources and the corresponding plurality of X-ray detectors located on the innermost side next to the above-described pair on the basis of the thickness detection value of the object is located at the first position. Any one of the thickness detection values of the sheet when placed is calibrated, and each time the reciprocating operation of the sensor support is subsequently performed, a plurality of sets calibrated when the reciprocating operation was performed last time are performed. Thickness detection of a sheet-like object using an X-ray source and a plurality of corresponding X-ray detectors A set of X-ray sources and a corresponding plurality of X-rays that are inwardly adjacent to the set of X-ray sources and corresponding X-ray detectors calibrated when the last reciprocating operation was performed based on the output value. Calibration means for calibrating the thickness detection value of the sheet-like object of the line detector.

The X-rays used in the above-described various methods for measuring the thickness of an X-ray utilizing sheet according to the present invention and the various above-described X-rays used in the thickness measuring apparatus utilizing an X-ray utilizing the present invention. The tube is: a hollow vacuum vessel; a conductor extending in the hollow vacuum vessel and having a heat source at a plurality of positions in the extending direction; and a heat source at a plurality of positions of the conductor in the hollow vacuum vessel. And a plurality of anodes that emit X-rays by thermionic electron current emitted from the heat source.

With such a configuration, since a single X-ray tube can emit X-rays from a plurality of anodes, that is, from a plurality of positions, it is provided with one heat source and one anode. As compared with the case where a plurality of X-ray tubes are used, the manufacturing cost is reduced and the power consumption is reduced.

Further, the total weight is reduced as compared with the case where a plurality of X-ray tubes are used. This is because when the X-ray tube is reciprocated with the support in the X-ray utilizing sheet thickness measuring method of the present invention and the various X-ray utilizing sheet thickness measuring apparatuses according to the present invention described above. This is advantageous.

In the X-ray tube according to the present invention having the above-described structure, the X-ray transmission window has a reflection function of reflecting light from the heat source toward the heat source. Is preferred.

With such a configuration, the amount of heat generated by the heat source can be increased to increase the amount of thermionic emission, and the power consumption can be reduced. That is, the operation efficiency of the X-ray tube is improved.

For this purpose, it is preferable that the X-ray transmission window has a rhodium film on the inner surface. Rhodium films are excellent in light reflectivity, cost, and durability.

In the X-ray tube according to the present invention having the above-described structure, a plurality of X-ray transmission windows are formed in the hollow vacuum vessel corresponding to a plurality of anodes. Preferably, the line transmitting window includes an anode.

With this configuration, the X-rays generated at the anode are not weakened by the X-ray transmission window,
The operation efficiency of the X-ray tube is improved.

For this purpose, it is preferable that the anode of the X-ray transmission window is made of tantalum foil. Tantalum foil is excellent in X-ray emission efficiency, cost, and durability. Further, it is preferable that the X-ray transmission window includes a good heat conductor for transmitting heat generated in the anode to the external space. The good thermal conductor suppresses the temperature rise of the anode and improves the durability of the anode.

For this purpose, it is preferable that the X-ray transmission window has a gold thin film on the outer surface.

The gold thin film is excellent in durability, heat conduction characteristics and cost.

In the X-ray tube according to the present invention, which is configured as described above, the anode voltages applied to the plurality of anodes can be classified into a plurality of magnitudes.

With such a configuration, a plurality of anodes of one X-ray tube according to the present invention can emit X-rays of a plurality of intensities, and use X-rays of a plurality of intensities. As a result, it becomes possible to measure the thicknesses of a plurality of types of sheet-like materials having different materials and thicknesses.

In one X-ray tube according to the present invention, a plurality of types of X-ray transmission filters having mutually different X-ray transmittances are provided in a plurality of X-ray transmission windows, so that a plurality of X-ray transmission windows can be used. X-rays with multiple intensities and wavelengths can be emitted, and it is possible to measure the thickness of multiple types of sheet materials having different materials and thicknesses using X-rays with multiple intensities and wavelengths. .

[0032]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Various embodiments of the present invention will be described below in detail with reference to the accompanying drawings.

[First Embodiment] First, the structure of an X-ray tube according to a first embodiment of the present invention will be described with reference to FIGS. 1A and 1B.

FIG. 1A is a schematic diagram showing a main part of an X-ray tube according to a first embodiment of the present invention and an X-ray detector used in combination with the X-ray tube. FIG. 1B is an enlarged sectional view of the X-ray emission window of the X-ray tube of FIG. 1A.

As shown in FIG. 1A, the X-ray tube 8 according to the first embodiment of the present invention comprises:
0, a conductor 12 extending in the hollow vacuum vessel 10 along the longitudinal direction of the hollow vacuum vessel 10 and having a plurality of heat sources 12a at predetermined intervals in the longitudinal direction; And a plurality of anodes 14 provided in correspondence with the plurality of heat sources 12a.

In this embodiment, the anode 14 constitutes a part of an X-ray emission window 16 covering a plurality of X-ray emission openings 10a corresponding to the plurality of anodes 14 in the hollow vacuum vessel 10. ing.

As shown in FIG. 1B, in this embodiment, the X-ray emission window 16 has an anode 14 made of, for example, tantalum foil, and the inside of the hollow vacuum vessel 10 at the anode 14. It is composed of a rhodium film 18 covering the facing inner surface and a gold thin film 20 covering the outer surface facing the outside of the hollow vacuum vessel 10 at the anode 14.

As shown in FIG. 1A, a conductor 12 and a plurality of anodes 14 in a hollow vacuum vessel 10 are connected to a power supply 22. When the power supply 22 applies a predetermined voltage to the conductor 12 and the plurality of anodes 14, thermionic currents emitted from the plurality of heat sources 12 a of the conductor 12 collide with the corresponding anodes 14 and X-rays are applied to the corresponding anodes 14. Release.

An X-ray detector 24 is disposed outside the hollow vacuum vessel 10 at a predetermined distance from the X-ray emission window 16, and the X-ray detector 24 detects X-rays emitted from the anode 14. Then, it is displayed on the display 26.

Here, a plurality of X-ray sources constituted by a plurality of heat sources 12a of the conductor 12 and a plurality of anodes 14, and a plurality of X-ray detectors corresponding to the plurality of X-ray sources are provided. By arranging the object at a predetermined position between the positions 24, the thickness of the object can be displayed on the display 26 based on the X-ray dose detected by the X-ray detector 24.

In this embodiment, the rhodium film 18 of the X-ray emission window 16 reflects light emitted from the plurality of heat sources 12a of the conductor 12 due to heat generation toward the corresponding heat sources 12a. Due to this reflection, the heat generation efficiency of the heat source 12a is improved. In other words, the operation efficiency of the X-ray tube is improved because a smaller amount of electricity is required to obtain the same heat generation amount. It should be noted that any thin film other than the rhodium film 18 may be used as long as it can transmit thermionic current from the heat source 12a toward the anode 14 and reflect the light from the heat source 12a toward the heat source 12a. It goes without saying that it can be used even if there is.

In this embodiment, the heat source 12a
In order to improve the heat generation efficiency, a light reflection plate 28 is also provided on the side opposite to the X-ray emission window 16 with respect to the plurality of heat sources 12 a in the hollow vacuum vessel 10. The light reflecting plate 28
Can be installed on the outer surface of the hollow vacuum vessel 10 when the hollow vacuum vessel 10 transmits light.

In the present embodiment, the gold thin film 20 of the X-ray emission window 16 easily transfers the heat generated from the anode 14 by receiving the flow of thermionic electrons from the heat source 12 a to the external space to generate heat of the anode 14. To prevent the anode 14 from deteriorating. That is, the life of the anode 14 is extended.
Here, other than the gold thin film 20, a thin film of a material that can easily transmit heat from the anode 14 to the external space to prevent heat generation of the anode 14 and thereby reduce the speed of deterioration of the anode 14 can be used. It goes without saying that a thin film of any material can be used.

[Second Embodiment] Next, the structure of an X-ray tube according to a second embodiment of the present invention will be described with reference to FIGS. 2A and 2B.

FIG. 2A schematically shows a main part of an X-ray tube according to a second embodiment of the present invention and an X-ray detector used in combination with the X-ray tube. FIG. 2B is an enlarged sectional view of the X-ray emission window of the X-ray tube of FIG. 2A.

As shown in FIG. 2A, the X-ray tube 29 according to the second embodiment of the present invention also includes: an elongated hollow vacuum vessel 30; and a longitudinal direction of the hollow vacuum vessel 30 in the hollow vacuum vessel 30. A conductor 32 having a plurality of heat sources 32a at predetermined intervals in the longitudinal direction;
And a plurality of anodes 34 provided corresponding to the plurality of heat sources 32a of the conductor 32.

In this embodiment, the anode 34 constitutes a part of an X-ray emission window 36 that covers a plurality of X-ray emission openings 30a corresponding to the plurality of anodes 34 in the hollow vacuum vessel 30. ing.

As shown in FIG. 2B, in this embodiment, the X-ray emission window 36 includes an anode 34 made of, for example, tantalum foil, and the inside of the hollow vacuum vessel 10 at the anode 34. A rhodium film 38 covering the inner surface facing the X-ray transmission filter 40 covering the outer surface facing the outside of the hollow vacuum vessel 30 at the anode 34
And is composed of

As shown in FIG. 2A, the conductor 32 in the hollow vacuum vessel 30 and the odd-numbered anodes 34 among the plurality of anodes 34 are connected to a power supply I42.
The power supply I42 applies a predetermined voltage to the conductor 32 and the plurality of anodes 34.
And the odd-numbered anode 34 in the
Of the plurality of heat sources 32a impinge on the corresponding anodes 34, and X-rays are emitted from the odd-numbered anodes 34 to which voltage is applied by the power supply I42.

An X-ray detector 44 is disposed outside the hollow vacuum vessel 30 at a predetermined distance from the X-ray emission window 36, and the X-ray detector 44 detects X-rays emitted from the anode 34. Then, it is displayed on the display 46.

Here, a plurality of X-ray sources constituted by a plurality of heat sources 32a of the conductor 32 and a plurality of anodes 34, and a plurality of X-ray detectors corresponding to the plurality of X-ray sources are provided. If an object is arranged at a predetermined position between the positions 44, the thickness of the object can be displayed on the display 46 based on the X-ray amount detected by the X-ray detector 44.

Further, as shown in FIG. 2A, a conductor 32 and a plurality of anodes 34 in a hollow vacuum vessel 30 are provided.
Are connected to the power supply II 48. The power supply II48 generates a voltage different from that of the power supply I42. The power supply II 48 applies a predetermined voltage to the conductor 3
2 and the even-numbered anodes 34 among the plurality of anodes 34, thermionic currents radiated from the plurality of heat sources 32a of the conductor 32 collide with the corresponding anodes 34, in which the voltage is supplied by the power supply II 48. X-rays having different wavelengths from those of the odd-numbered anodes 34 are emitted from the even-numbered anodes 34 loaded with.

The X-rays emitted from the even-numbered anodes 34 are also detected by the corresponding X-ray detectors 44 and displayed on the display 46.

Here, a plurality of X-ray sources constituted by a plurality of heat sources 32a of the conductor 32 and a plurality of anodes 34, and a plurality of X-ray detectors corresponding to the plurality of X-ray sources are provided. If an object is arranged at a predetermined position between the positions 44, the thickness of the object can be displayed on the display 46 based on the X-ray amount detected by the X-ray detector 44.

In this embodiment, the odd-numbered anodes 34 and the even-numbered anodes 34 among the plurality of anodes 34 emit X-rays having different wavelengths from each other. The thickness of the multilayer can be measured simultaneously.

In this embodiment, the rhodium film 38 of the X-ray radiation window 36 reflects light emitted from the plurality of heat sources 32a of the conductor 32 due to heat generation toward the corresponding heat sources 32a. Due to this reflection, the heat generation efficiency of the heat source 32a is improved. In other words, the operation efficiency of the X-ray tube is improved because a smaller amount of electricity is required to obtain the same heat generation amount. Any thin film other than the rhodium film 38 may be used as long as the thin film is made of a material capable of transmitting the thermoelectron current from the heat source 32a toward the anode 34 and reflecting light from the heat source 32a toward the heat source 32a. It goes without saying that it can be used even if there is.

In this embodiment, as in the case of the first embodiment described above, in order to improve the heat generation efficiency of the heat source 32a, a plurality of heat sources 32a are formed in the hollow vacuum vessel 30.
A light reflecting plate can be provided on the side opposite to the X-ray emission window 36, and the light reflecting plate is provided on the outer surface of the hollow vacuum vessel 30 when the hollow vacuum vessel 30 transmits light. You can do it.

In this embodiment, the X-ray transmission filter 40 of the X-ray emission window 36 regulates the width of the wavelength of the X-ray emitted from the corresponding anode 34, and the X-ray emitted from the odd-numbered anode 34. And the wavelengths of the X-rays emitted from the even-numbered anodes 34 are not overlapped, and the thicknesses of the objects made of different materials using X-rays of different wavelengths emitted from them. Improve measurement accuracy.

In the second embodiment, X
As in the case of the above-described first embodiment, the line radiation window 36 easily transfers the heat from the anode 34, which is generated by receiving a thermoelectron flow from the heat source 32a to the external space, such as a gold thin film, for example. The transmission prevents the anode 34 from generating heat, thereby reducing the rate at which the anode 34 degrades. That is, it goes without saying that a thin film having good thermal conductivity that extends the life of the anode 34 can be provided on the outer space side of the anode 34.

In the above-described embodiment, different voltages are applied to every other one of the plurality of anodes 34 to emit X-rays having different wavelengths every other one. Different voltages may be applied to one or more anodes 34 to emit X-rays of different wavelengths. In this case, a plurality of anodes adjacent to each other and equidistantly loaded with mutually different voltages are set as one set, and a plurality of similar sets are arranged at equal intervals in the longitudinal direction of the hollow vacuum vessel 30. Thereby, the thickness of the object of a plurality of materials can be measured simultaneously.

[Third Embodiment] Next, referring to FIGS. 3 and 4, this embodiment using the X-ray tube 8 according to the first embodiment of the present invention shown in FIG. 1 will be described. A structure of an X-ray utilizing sheet thickness measuring apparatus according to a third embodiment of the present invention will be described.

FIG. 3 is a schematic longitudinal sectional view showing an X-ray utilizing sheet thickness measuring apparatus according to a third embodiment of the present invention in a state where a support is disposed at a first position. FIG. 4 is a schematic longitudinal section showing an X-ray utilizing sheet thickness measuring apparatus according to a third embodiment of the present invention in a state where a support is disposed at a second position. FIG.

In this embodiment, an X-ray tube 8 according to the first embodiment of the present invention shown in FIG. 1 and a plurality of X-ray detectors 24 used in combination with this X-ray tube 8 are shown.
Is supported by a support 50 formed of a rectangular frame.
A plurality of X-ray emission windows 16 of the X-ray tube 8 and a plurality of X-ray detectors 2
4 are supported so as to be arranged at equal intervals from each other,
A traveling path of the sheet-like object 52 is defined at a predetermined position between the plurality of X-ray emission windows 16 of the X-ray tube 8 and the plurality of X-ray detectors 24.

The support 50 is, for example, a roller 54 a and a guide rail 54 so as to be reciprocally movable on the pedestal 54 in the direction in which the plurality of X-ray radiation windows 16 of the X-ray tube 8 and the plurality of X-ray detectors 24 are arranged.
It is supported by known movement guide means such as a combination with b.

The support 50 is connected to a known reciprocating drive means 56 so as to be reciprocated within a predetermined range S. In this embodiment, the reciprocating drive means 56 includes a motor 56a and a lead screw 5 selectively rotated in both directions by the motor 56a and screwed to the support 50.
6b, and any known configuration that can reciprocate the support 50 within the predetermined range S can be adopted.

The pedestal 54 also has a plurality of X-ray emission windows at predetermined positions between the plurality of X-ray emission windows 16 of the X-ray tube 8 supported by the support 50 and the plurality of X-ray detectors 24. A plurality of X-rays are radiated from the outermost (left end in this embodiment) X-ray emission window 16 in the arrangement direction of the plurality of X-ray emission windows 16 (leftward in this embodiment). The calibration reference body 58 is arranged at the same interval as the interval S of the arrangement of the windows 16. The calibration reference body 58 is made of the same material as the sheet-like material 52 and has a predetermined thickness.

The X-ray tube 8 supported by the support 50 and the plurality of X-ray detectors 24 are connected to the power source 2 supported by the pedestal 54.
2, the display device 46, the calibration means 60 and the conductive line 62.

In this embodiment, the thickness of the sheet 52 is reduced by using the plurality of X-ray emission windows 16 and the plurality of X-ray detectors 24 of the X-ray tube 8 supported by the support 50. Thing 5
Before measurement at a plurality of positions in the width direction 2, the support 50 is reciprocated by a distance corresponding to the predetermined interval S by the reciprocating drive means 56, during which the calibrating means 60 The plurality of thickness values displayed on the display means 46 based on the plurality of X-ray detection values obtained by the X-ray emission window 16 and the plurality of X-ray detectors 24 are used to determine the already known thickness of the calibration reference body 58. Thus, calibration is performed to obtain a more accurate value of the thickness of the sheet-like material 52.

The calibration operation by the calibration means 60 is as follows. Using a plurality of X-ray emission windows 16 and a plurality of X-ray detectors 24 of the X-ray tube 8 supported by the support body 50, the thickness of the sheet-like object 52 is adjusted at a plurality of positions in the width direction of the sheet-like object 52. Before the measurement is performed, the support 50 is moved by the reciprocating drive means 56 toward the calibration reference body 58 as shown in FIG. 4 by the above-mentioned predetermined interval S, and the X-ray is moved at the second position shown in FIG. The thickness of the sheet 52 is measured by the plurality of X-ray emission windows 16 and the plurality of X-ray detectors 24 of the tube 8. At this time, the X-ray emitted from the outermost X-ray emission window 16 (left end in this embodiment) among the plurality of X-ray emission windows 16 toward the corresponding X-ray detector 24 is the calibration reference. The thickness of body 58 will be measured. The X-ray emission window 16 located on the outermost side (the left end in this embodiment)
X of the calibration reference body 58 by the X-ray detector 24 corresponding to
The thickness value displayed on the display means 46 based on the line detection value is calibrated by the known thickness of the calibration reference body 58.

Next, the support 50 is moved by the reciprocating drive means 56 from the second position shown in FIG. 4 to the first position shown in FIG. The thickness of the sheet 52 is measured by the plurality of X-ray emission windows 16 and the plurality of X-ray detectors 24 of the X-ray tube 8 at the first position shown in FIG. At this time, all of the plurality of X-ray emission windows 16 and the plurality of X-ray detectors 24 measure the thickness of the sheet-like material 52.

At this time, the X-ray radiation window 16 located on the outermost side (the left end in this embodiment) and the corresponding X-ray detector 2
The thickness value of the sheet-like object 52 displayed on the display means 46 based on the X-ray detection value obtained by the step 4 is an accurate value after the calibration has already been performed. In this case, the position of the sheet-like object 52 whose thickness is measured by the X-ray radiation window 16 located on the outermost side (the left end in this embodiment) and the corresponding X-ray detector 24 is the same as that of the support 50 in the previous time. When arranged at the second position shown in FIG. 4, it is adjacent to the X-ray radiation window 16 located at the outermost position (left end in this embodiment) and the corresponding X-ray detector 24 (left end in this embodiment). This is the position of the sheet 52 whose thickness has been measured by the X-ray emission window 16 and the corresponding X-ray detector 24.

For this reason, when the support 50 is next placed at the second position shown in FIG. 4, measurement is performed by the X-ray radiation window 16 located second from the left end and the corresponding X-ray detector 24. The value of the thickness of the sheet-like object 52 is set to the outermost position (left end in this embodiment) after the calibration when the support 50 was previously placed at the first position shown in FIG. By matching the thickness value of the sheet-like object 52 measured by the X-ray emission window 16 corresponding to the X-ray emission window 16 corresponding to the X-ray emission window 16 located second from the left end, The thickness value of the sheet-like object 52 displayed on the display means 46 based on the X-ray detection value obtained by the line detector 24 is also calibrated by the calibration reference body 58.

By moving the support 50 back and forth several times between the second position shown in FIG. 4 and the first position shown in FIG. 3, a plurality of X-ray radiation As described above, the window 16 and the plurality of X-ray detectors 24 utilize the measurement of the thickness at the same position adjacent to each other in the width direction of the sheet-like material 52. X-ray emission window 1 located on the outermost side (left end in this embodiment)
The thickness of the sheet 52 displayed on the display means 46 can be calibrated sequentially based on the detected X-ray values from the X-ray detector 24 corresponding to the X-ray detector 6.

[Fourth Embodiment] Next, the fourth embodiment of the present invention using the X-ray tube 8 according to the first embodiment of the present invention shown in FIG. 1 while referring to FIG. A structure of an X-ray utilizing sheet thickness measuring apparatus according to the fourth embodiment will be described.

FIG. 5 is a schematic longitudinal sectional view showing an X-ray utilizing sheet thickness measuring apparatus according to a fourth embodiment of the present invention in a state where a support is disposed at a first position. FIG. Most of the configuration of the X-ray utilizing sheet thickness measuring apparatus according to the fourth embodiment of the present invention shown in FIG. 5 is the same as that of the present invention described above with reference to FIGS. Most of the configuration of the X-ray utilizing sheet thickness measuring apparatus according to the third embodiment is the same as that of the X-ray utilizing sheet thickness measuring apparatus according to the fourth embodiment. In the members, the same constituent members as those of the X-ray utilizing sheet thickness measuring device according to the third embodiment of the present invention include the X-ray utilizing sheet according to the third embodiment of the present invention. The same reference numerals as those used for the components of the object thickness measuring device are denoted by the same reference numerals, and a detailed description of these components will be omitted.

The configuration of the X-ray utilizing sheet thickness measuring apparatus according to the fourth embodiment of the present invention shown in FIG. 5 is similar to that of the present invention described above with reference to FIGS. The difference from the configuration of the X-ray utilizing sheet thickness measuring apparatus according to the third embodiment is that the same calibration reference body 58 ′ as the calibration reference body 58 is moved in the moving direction of the support 50 on the base 54. Is provided on the opposite side of the calibration reference body 58; the support 50 is a combination of the plurality of X-ray emission windows 16 of the X-ray tube 8 and the plurality of X-ray detectors 24 on the support 50. As shown in FIG. 5, a first position facing the sheet-like object 52 at a predetermined position therebetween, and a plurality of X-ray emission windows 16 extending from the first position to the calibration reference body 58 are shown. The plurality of X-ray emission windows 1 of the X-ray tube 8 are moved by the same distance as the interval S between them. The combination of the X-ray emission window 16 and the plurality of X-ray detectors 24 disposed on the leftmost side in FIG. 5 among the combinations of the X-ray detectors 24 and the plurality of X-ray detectors 24 face the calibration reference body 58. The plurality of X-ray tubes 8 are moved by the same distance as the distance S between the plurality of X-ray emission windows 16 from the first position to the other calibration reference body 58 '. Among the combinations of the X-ray emission window 16 and the plurality of X-ray detectors 24, the combination of the X-ray emission window 16 and the plurality of X-ray detectors 24 disposed on the outermost right side in FIG. A third position opposite another calibration reference body 58, wherein the third position is alternately reciprocated between the first position and the second position, and between the first position and the third position. It is to make it.

In this embodiment, during this alternate reciprocating operation, the calibrating means 60 is used in the combination of the plurality of X-ray emission windows 16 and the plurality of X-ray detectors 24 of the X-ray tube 8. 5
In the combination of the X-ray emission windows 16 located on the left and right sides and the corresponding X-ray detector 24, the value of the thickness indication on the display 46 based on the X-ray detection value is calibrated by the calibration reference body 58 and another calibration. Calibration can be performed using the reference body 58 ', and by continuing the above-mentioned alternate reciprocating operation, the X-ray emission window 16 located on the left side in FIG. 5 corresponds to the third embodiment. X-ray emission window 1 located inward from the combination with X-ray detector 24
6 and the corresponding X-ray detector 24, the value of the display of the thickness on the display 46 based on the X-ray detection value can be sequentially calibrated as described above. 5 to the combination of the X-ray emission window 16 located on the right side and the corresponding X-ray detector 24 from the combination of the X-ray emission window 16 located on the right side and the corresponding X-ray detector 24 as described above. Then, the value of the display of the thickness on the display 46 based on the X-ray detection value can be sequentially calibrated.

That is, in the fourth embodiment, all of the plurality of X-ray emission windows 16 and the plurality of X-ray detectors 24 of the X-ray tube 8 are different from those of the third embodiment described above. The time required to calibrate the display value of the thickness on the display 46 based on the X-ray detection value in the combination of the above can be substantially reduced by half.

[Fifth Embodiment] Next, a fifth embodiment of the present invention using the X-ray tube 29 according to the second embodiment of the present invention shown in FIG. 2 while referring to FIG. The structure of the X-ray utilizing sheet thickness measuring apparatus according to the fifth embodiment will be described.

FIG. 6 is a schematic longitudinal sectional view showing an X-ray utilizing sheet thickness measuring apparatus according to a fifth embodiment of the present invention in a state where a support is disposed at a first position. FIG. In this embodiment, an X-ray tube 29 according to the second embodiment of the present invention shown in FIG.
A plurality of X-ray detectors 44 used in combination with the X-ray tube 2 are supported by a support 50 formed of a rectangular frame.
Nine X-ray emission windows 36 and a plurality of X-ray detectors 44 are supported so as to be arranged at equal intervals from each other, and the plurality of X-ray emission windows 36 and the plurality of X-rays of these X-ray tubes 29 are supported. A traveling path of the sheet-like material 70 is defined at a predetermined position between the sheet-like object 70 and the line detector 44.

In this embodiment, the sheet 70
Are formed by laminating two different types of material layers.

The support 50 also supports a plurality of X-rays of the X-ray tube 29.
It is connected to a known reciprocating drive means 56 so as to be reciprocated at a distance S twice as long as the distance S between the line radiation windows 36.

The pedestal 54 also has a plurality of X-ray emission windows at predetermined positions between the plurality of X-ray emission windows 36 of the X-ray tube 29 supported by the support 50 and the plurality of X-ray detectors 44. X located on the outermost side (left end in this embodiment) of
Each of the X-ray emission windows 36 and the X-ray emission windows 36 located second from the outermost side (the second from the left end in this embodiment) and the outside in the arrangement direction of the plurality of X-ray emission windows 16 (in this embodiment, (Left side) at a distance of twice the interval S of the arrangement of the plurality of X-ray emission windows 16 to the calibration reference body 58a.
And 58b are arranged.

The calibration reference body 58a is located at the outermost position (the left end in this embodiment) of the sheet-like material 70.
The odd-numbered X from the outermost (left end in this embodiment) including the X-ray detector 24 corresponding to the X-ray emission window 36
It has a predetermined thickness with the same material as the material layer whose thickness is detected by the X-ray detector 24 corresponding to the radiation window 36.

Further, another calibration reference body 58b is an X-ray detector 44 corresponding to the X-ray emission window 36 located second from the outermost side (the second from the left end in this embodiment) of the sheet-like material 70. A predetermined thickness of the same material as another material layer whose thickness is detected by the X-ray detector 24 corresponding to the even-numbered X-ray emission window 36 from the outermost (left end in this embodiment) Have.

The X-ray tube 29 and the plurality of X-ray detectors 44 supported by the support 50 are connected to the power supply I 42 and the power supply II 48 supported by the pedestal 54, the display device 46, the calibration means 72, and the conductive wire. It is connected by 74.

In this embodiment, two kinds of X-rays contained in the sheet-like material 70 are utilized by using a plurality of X-ray emission windows 36 and a plurality of X-ray detectors 44 of the X-ray tube 29 supported by a support 50. Before measuring the thickness of each of the material layers at a plurality of positions in the width direction of the sheet-like material 70, the support 50 is driven by the reciprocating driving means 56.
Is reciprocated by a distance corresponding to twice the above-described predetermined interval S, during which the calibration means 72: X-ray radiation positioned odd-numbered from the outermost (left end in this embodiment) of the X-ray tube 29 The plurality of thickness values displayed on the display means 46 are calibrated based on the plurality of X-ray detection values obtained by the window 36 and the corresponding X-ray detector 44 with the known thickness of the calibration reference body 58a. In order to obtain a more accurate value of the thickness of one material layer of the sheet-like material 70, not only the X-rays located at the even-numbered positions from the outermost (left end in this embodiment) of the X-ray tube 29 are used. Display means 46 based on a plurality of X-ray detection values by the X-ray emission window 36 and the corresponding X-ray detector 44
Are calibrated by the known thickness of the calibration reference body 58b to determine a more accurate value of the thickness of another material layer of the sheet 70. I have.

The calibration operation by the calibration means 72 is as follows. The plurality of X's of the X-ray tube 29 supported by the support 50
Before measuring the thicknesses of two different types of material layers included in the sheet-like material 70 at a plurality of positions in the width direction of the sheet-like material 70 using the radiation window 36 and the plurality of X-ray detectors 44 In addition, the support 50 has a plurality of X-ray emission windows 36 as shown in FIG.
And all of the plurality of X-ray detectors 44 are moved from the first position facing the sheet-like object 70 toward the calibration reference bodies 58a and 58b by the reciprocating drive means 56 by twice the predetermined interval S described above. Then, at the second position, the thickness of the sheet 70 is measured by the plurality of X-ray emission windows 36 of the X-ray tube 29 and the plurality of X-ray detectors 44. At this time, the X-ray emitted from the outermost (left end in this embodiment) X-ray emission window 36 among the plurality of X-ray emission windows 36 toward the corresponding X-ray detector 44 is the calibration reference. Body 58a
And the X-rays emitted from the X-ray emission window 36 located second from the outermost side (second from the left end in this embodiment) to the corresponding X-ray detector 44 Will measure the thickness of another calibration reference 58b. Then, the X-ray detector 4 corresponding to the X-ray emission window 36 located on the outermost side (the left end in this embodiment)
4, the thickness value displayed on the display means 46 is calibrated by the known thickness of the calibration reference body 58a, and the second value from the outermost is displayed. The X-ray emission window 36 located at the second position (the left end in this embodiment) and the X-ray detector 44 corresponding to the X-ray detector 44 display the X-ray detection value of another calibration reference body 58b on the display means 46 on the basis of the X-ray detection value. The thickness value is calibrated by the known thickness of the calibration reference 58b. Next, the support 50 is moved by the reciprocating drive means 56 from the above-described second position to the first position shown in FIG. 6 so as to move away from the calibration reference body 58a and another calibration reference body 58b at the above-described predetermined distance. S is moved by twice as much as S, and at the first position shown in FIG. 6, two types of X-ray radiation windows 36 and a plurality of X-ray detectors 44 of the X-ray tube 29 are included in the sheet-like object 52. Have the thickness of the material layer measured. At this time, all pairs of the X-ray radiation windows 36 and the X-ray detectors 44 corresponding to the odd-numbered X-ray radiation windows 36 from the outermost (left end in FIG. 6) among the plural X-ray detectors 44 are set. The thickness of one material layer of the sheet 70 will be measured, and the even-numbered outermost (left end in FIG. 6) among the plurality of X-ray emission windows 36 and the plurality of X-ray detectors 44 will be described. All sets of X-ray emission windows 36 and corresponding X-ray detectors 44 will measure the thickness of another material layer of the sheet 70.

At this time, the X-ray detector 4 corresponding to the outermost X-ray emission window 36 (the left end in this embodiment)
4 and the thickness of one material layer of the sheet-like material 70 displayed on the display means 46 on the basis of the X-ray detection value, and the second outermost (the second from the left end in this embodiment) X The thickness of another material layer of the sheet-like object 70 displayed on the display means 46 on the basis of the X-ray detection value by the X-ray emission window 36 and the corresponding X-ray detector 44 is accurate after being calibrated. Value.

This time, the position of the sheet 70 whose thickness is measured by the X-ray radiation window 36 located at the outermost position (the left end in this embodiment) and the corresponding X-ray detector 44, and the outermost position The position of the sheet 70 whose thickness has been measured by the X-ray radiation window 36 located at the second position (second from the left end in this embodiment) and the corresponding X-ray detector 44 is determined by the support 50 When arranged at the above-described second position, the X-ray detector 44 corresponding to the outermost (left end in this embodiment) X-ray emission window 36 and the third X-ray detector 44 (third from left end in this embodiment) And the fourth from the outermost position (fourth from the left end in this embodiment) of the position of the sheet-like object 70 whose thickness is measured by the X-ray radiation window 36 and the corresponding X-ray detector 44 located at the (th) position. X located at
This is the position of the sheet-like object 70 whose thickness has been measured by the radiation window 36 and the corresponding X-ray detector 44.

For this purpose, the support 50 is then moved to the second
When placed at the position of X, the X located third from the left end
The value of the thickness of one material layer of the sheet-like object 70 measured by the radiation window 36 and the corresponding X-ray detector 44 was compared with the case where the support 50 was previously placed at the first position shown in FIG. Sometimes
The outermost (left end in this embodiment) X-ray emission window 36 after calibration and the corresponding X-ray detector 4
4. The X-ray detector 36 corresponding to the third (ie, odd-numbered) X-ray emission window 36 from the left end by matching the value of the thickness of one material layer of the sheet-like object 70 measured by the X. The thickness value of one material layer of the sheet-like material 70 displayed on the display means 46 on the basis of the X-ray detection value obtained by step 44 is also calibrated by the calibration reference body 58a.

At the same time, X located at the fourth position from the left end
The value of the thickness of another material layer of the sheet 70 measured by the radiation window 36 and the corresponding X-ray detector 44 is
When the support 50 was previously placed at the first position shown in FIG. 6, the X-ray emission window 36 located second from the outermost position (second from the left end in this embodiment) after being calibrated.
And the thickness of another material layer of the sheet-like material 70 measured by the X-ray detector 44 corresponding to the X-ray detector 44.
A sheet-like object 70 displayed on the display means 46 based on the X-ray detection value obtained by the X-ray emission window 36 and the corresponding X-ray detector 44
Has been calibrated by another calibration reference body 58a.

The support 50 is reciprocated several times between the above-described second position and the first position shown in FIG. 6 so that the plurality of X-ray emission windows 36 of the X-ray tube 29 are formed. And the plurality of X-ray detectors 44 that are located at odd-numbered and even-numbered X-ray detectors 44 measure the thickness at the same position in the width direction of the sheet-like material 70, as described above. The X-ray detector 44 corresponding to the outermost (leftmost in this embodiment) X-ray emission window 36 and the second outermost (second from leftmost in this embodiment) X-ray emission window X-ray emission windows 36 located at odd-numbered and even-numbered positions from the outermost from the X-ray detector 44 corresponding to
The thickness of one material layer and the thickness of another material layer of the sheet 70 displayed on the display means 46 can be sequentially calibrated based on the X-ray detection value of the X-ray detector 44 corresponding to the above.

[0094]

As described in detail above, the X-ray tube of the present invention
According to the X-ray sheet thickness measuring method and the X-ray sheet thickness measuring apparatus, the structure is simple and inexpensive, but even when the sheet is moved at a higher speed than in the past, it is accurate. The thickness of the sheet can be measured.

[Brief description of the drawings]

FIG. 1A is a schematic longitudinal sectional view showing a main part of an X-ray tube according to a first embodiment of the present invention and an X-ray detector used in combination with the X-ray tube. A plan view;
(B) is an enlarged sectional view of the X-ray emission window of the X-ray tube of (A).

FIG. 2A is a schematic longitudinal sectional view showing a main part of an X-ray tube according to a second embodiment of the present invention and an X-ray detector used in combination with the X-ray tube; A plan view;
(B) is an enlarged sectional view of the X-ray emission window of the X-ray tube of (A).

FIG. 3 is a schematic longitudinal sectional view showing an X-ray utilizing sheet thickness measuring apparatus according to a third embodiment of the present invention in a state where a support is disposed at a first position. .

FIG. 4 is a schematic vertical sectional view showing an X-ray utilizing sheet thickness measuring apparatus according to a third embodiment of the present invention in a state where a support is disposed at a second position. .

FIG. 5 is a schematic longitudinal sectional view showing an X-ray utilizing sheet thickness measuring apparatus according to a fourth embodiment of the present invention in a state where a support is disposed at a first position. .

FIG. 6 is a schematic longitudinal sectional view showing an X-ray utilizing sheet thickness measuring apparatus according to a fifth embodiment of the present invention in a state where a support is disposed at a first position. .

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Hollow vacuum container 12 Conductor 12a Heat source 14 Anode 16 X-ray transmission window 18 Rhodium foil 20 Gold thin film 24 X-ray detector 30 Hollow vacuum container 32 Conductor 32a Heat source 34 Anode 36 X-ray transmission window 38 Rhodium foil 40 X Line transmission filter 44 X-ray detector 50 Support 52 Sheet-like object 56 Reciprocating drive means 58, 58 'Calibration reference body 58a, 58b Calibration reference body 60 Calibration means 70 Sheet-like object 72 Calibration means

Claims (15)

[Claims] 1. A hollow vacuum vessel; a conductor extending in the hollow vacuum vessel and having a heat source at a plurality of positions in the extending direction; and a heat source at a plurality of positions of the conductor in the hollow vacuum vessel. An anode that emits X-rays by a thermionic current radiated from a heat source. 2. The X-ray tube according to claim 1, wherein the X-ray transmission window has a reflection function of reflecting light from the heat source toward the heat source. 3. The X-ray tube according to claim 2, wherein the X-ray transmission window has a rhodium film on an inner surface. 4. The hollow vacuum vessel according to claim 1, wherein a plurality of X-ray transmission windows are formed corresponding to the plurality of anodes, and the X-ray transmission window includes the anode. An X-ray tube according to any one of the preceding claims. 5. The X-ray tube according to claim 4, wherein the anode of the X-ray transmission window is made of tantalum foil. 6. The X-ray tube according to claim 4, wherein the X-ray transmission window includes a good heat conductor for transmitting heat generated in the anode to an external space. 7. The X-ray transmission window has a gold thin film on an outer surface,
The X-ray tube according to claim 6, wherein: 8. An anode voltage applied to a plurality of anodes is classified into a plurality of magnitudes.
The X-ray tube according to claim 1. 9. A plurality of X-ray transmission windows, wherein a plurality of types of X-ray transmission filters having mutually different X-ray transmittances are provided.
The X-ray tube according to any one of claims 1 to 8, wherein: 10. An X-ray tube in which a plurality of X-ray sources are linearly arranged at a predetermined interval, and a plurality of X-ray sources which are arranged to face the plurality of X-ray sources of the X-ray tube and are separated from the plurality of X-ray sources by a predetermined distance. Passing the sheet-like object at a predetermined position between the plurality of X-ray detectors,
A plurality of X-ray sources and a plurality of X-ray detectors facing the plurality of X-ray sources; a plurality of X-ray detectors facing the plurality of X-ray sources; A method for measuring the thickness of a sheet-like material utilizing X-rays. 11. An X-ray tube in which a plurality of X-ray sources are linearly arranged at predetermined intervals, and an X-ray tube arranged opposite to the plurality of X-ray sources of the X-ray tube and separated from the X-ray sources by a predetermined distance. A plurality of X-ray detectors, and a sensor support having a plurality of X-ray sources and a plurality of X-ray detectors. Providing a calibration reference at a predetermined location between the X-ray source and the plurality of X-ray detectors, the calibration reference being spaced outwardly by the predetermined distance and independently of the sensor support; The sheet-like object is allowed to pass through the plurality of X-ray sources and the plurality of X-ray detectors at the predetermined position, and the sensor support is moved to the position where the X-ray source and the X-ray detector located at the extreme ends are in the sheet. Reciprocating motion to reciprocate between a first position facing the object and a second position facing the calibration reference body When the sensor support is located in the first position, the extreme end X-ray source and X
The thickness of the calibration reference body is detected by the X-ray detector to calibrate the X-ray source located at the end and the thickness detection value by the X-ray detector. The thickness of the sheet is detected by the line detector; when the sensor support is disposed at the second position, the sheet support includes the X-ray source and the sheet including the X-ray detector located at the extreme end. After the thickness of the sheet is detected by the remaining X-ray source and the X-ray detector, the thickness of the sheet is detected by the X-ray source and the X-ray detector located at the extreme ends. Thickness of the sheet when the X-ray source and the X-ray detector and the sensor support by the X-ray detector located next to the endmost X-ray source and X-ray detector are arranged at the first position Calibrate the detection value; each time the sensor support is reciprocated, The X-ray source and the X-ray detector calibrated the last time the reciprocating operation was performed based on the thickness detection value of the sheet by the X-ray source and X-ray detector calibrated when the operation was performed Calibrate the sheet thickness detections of the X-ray source and the X-ray detector adjacent to the X-ray source; Calibrated based on a calibrated thickness detection value by an X-ray source and an X-ray detector located at X.
A method for measuring the thickness of a sheet-like material using a wire. 12. An X-ray tube in which a plurality of X-ray sources are linearly arranged at predetermined intervals, and a plurality of X-ray sources arranged opposite to the plurality of X-ray sources of the X-ray tube and spaced apart from the plurality of X-ray sources by a predetermined distance. A plurality of X-ray detectors, and a sensor support having a plurality of X-ray sources and a plurality of X-ray detectors. A calibration reference positioned at a predetermined location between the X-ray source and the plurality of X-ray detectors and spaced apart by the predetermined distance and independently of the sensor support; A plurality of sets of X-ray sources for generating X-rays having different intensities; a plurality of calibration reference bodies corresponding to X-rays having different intensities; a plurality of sensor supports; The sheet-like object is passed between the X-ray source and the plurality of X-ray detectors at the predetermined position and a sensor is provided. A support including a pair of the endmost X-ray source and the X-ray detector is opposed to a sheet-like object.
And a second position facing the calibration reference; reciprocating the sensor support when the sensor support is positioned at the first position. The thickness of the plurality of calibration reference bodies is detected in cooperation with the plurality of X-ray detectors corresponding to the plurality of X-ray sources belonging to the pair located at the end in the array direction, and Calibrating the thickness detection values by the plurality of X-ray sources belonging to the plurality of X-ray detectors and detecting the thickness of the sheet by the remaining X-ray sources and X-ray detectors facing the sheet. When the sensor support is located at the second position, the remaining set of sheets facing the sheet including the plurality of X-ray sources and the corresponding plurality of X-ray detectors belonging to the endmost set. Thickness of sheet by multiple X-ray sources and multiple X-ray detectors After the detection, the plurality of X-ray sources belonging to the endmost set and the plurality of X-ray detectors corresponding to the plurality of X-ray detectors correspond to the thickness detection value of the sheet-like object as a reference. Any of the thickness detection values of the sheet when the sensor support by the plurality of X-ray sources and the corresponding plurality of X-ray detectors arranged inside is located at the first position Each time a subsequent reciprocation of the sensor support is performed, the sheet-like object by the set of the plurality of X-ray sources and the corresponding plurality of X-ray detectors calibrated at the time of the previous reciprocation is performed. A set of a plurality of Xs calibrated when the last reciprocating operation was performed based on the thickness detection value
Calibrating the sheet thickness detection values of the set of X-ray sources and the corresponding X-ray detectors adjacent inward from the source and the corresponding X-ray detectors; All thickness readings of the set of X-ray sources and corresponding X-ray detectors have been calibrated by the endmost set of X-ray sources and corresponding X-ray detectors. A method for measuring the thickness of a sheet-like material utilizing X-rays, wherein the method is calibrated based on a detected thickness value. 13. An X-ray tube in which a plurality of X-ray sources are linearly arranged at predetermined intervals; a plurality of X-ray sources arranged opposite to the plurality of X-ray sources of the X-ray tube and separated from the plurality of X-ray sources by a predetermined distance. A plurality of X-ray detectors; a plurality of X-ray sources for passing a sheet-like object at a predetermined position between the plurality of X-ray sources of the X-ray tube and the plurality of X-ray detectors; And measuring a thickness of a plurality of positions of the sheet-like object between the plurality of X-ray detectors facing the plurality of X-ray sources by using the plurality of X-ray detectors facing the plurality of X-ray sources. An X-ray utilizing sheet-like material thickness measuring device characterized by the above-mentioned. 14. An X-ray tube in which a plurality of X-ray sources are linearly arranged at predetermined intervals, and a plurality of X-ray sources which are arranged to face the plurality of X-ray sources of the X-ray tube and are separated by a predetermined distance from the plurality of X-ray sources. A plurality of X-ray detectors, a sensor support having a plurality of X-ray sources and a sheet-like object at a predetermined position between the plurality of X-ray detectors; A predetermined distance between a plurality of X-ray sources and a plurality of X-ray detectors from the X-ray source located at the end in the arrangement direction of the source and the plurality of X-ray detectors; A calibration reference positioned only outwardly and independently of the sensor support; and a first position in which the sensor support is located at the extreme end of the X-ray source and X-ray detector facing the sheet. Support reciprocating drive means for reciprocatingly moving back and forth between the second reference position and the second position facing the calibration reference; When the holding body is located at the first position, the thickness of the calibration reference body is detected by the X-ray source and the X-ray detector located at the end, and the X-position located at the end is detected.
The thickness of the sheet is calibrated by the X-ray source and the X-ray detector, and the thickness of the sheet is detected by the remaining X-ray source and the X-ray detector facing the sheet. When placed at the position, the thickness of the sheet was detected by the remaining X-ray sources and X-ray detectors facing the sheet including the X-ray source and the X-ray detector positioned at the end. After that, the outermost X-ray source and the X-ray detector are disposed on the inner side next to the X-ray source and the X-ray detector located farthest based on the thickness detection value of the sheet-like object by the X-ray source and the X-ray detector located at the extreme end When the sensor support by the X-ray source and the X-ray detector is located at the first position, the thickness detection value of the sheet-like object is calibrated, and each time the sensor support reciprocates, Sheet form by X-ray source and X-ray detector calibrated at the last reciprocating operation The X-ray source and X-ray detector calibrated when the reciprocating operation was performed last time based on the thickness detection value of And a calibration means for performing calibration. 15. An X-ray tube in which a plurality of X-ray sources are linearly arranged at a predetermined interval, and a plurality of X-ray sources which are arranged to face the plurality of X-ray sources of the X-ray tube and are separated from the plurality of X-ray sources by a predetermined distance. A plurality of X-ray detectors, wherein the plurality of X-ray sources of the X-ray tube are configured in a plurality of sets for generating X-rays having mutually different intensities; X-ray source and X-ray source located at the end in the arrangement direction of the X-ray source and the plurality of X-ray detectors
X-rays having different intensities are arranged at a predetermined position between the X-ray sources and the X-ray detectors at a predetermined distance from the X-ray detector and away from the sensor support by the predetermined distance outward.
A plurality of calibration reference bodies corresponding to the X-rays; a sheet-like object passing between the plurality of X-ray sources and the plurality of X-ray detectors of the sensor support at the predetermined position; Is reciprocated so that the set including the endmost X-ray source and the X-ray detector reciprocates between a first position facing the sheet-like object and a second position facing the calibration reference body. Support reciprocating drive means; and a plurality of X-ray sources belonging to a set located at the end in the arrangement direction of the plurality of X-ray sources among the plurality of sets when the sensor support is arranged at the first position. In cooperation with a plurality of X-ray detectors corresponding to the plurality of X-ray detectors, the thickness of the plurality of calibration reference bodies is detected, and the plurality of X-ray sources belonging to the endmost set and the corresponding plurality of X-ray detectors Remaining X-ray source facing the sheet while calibrating the thickness detection value And the X-ray detector detects the thickness of the sheet-like object. When the sensor support is disposed at the second position, the plurality of X-ray sources and the corresponding After the thickness of the sheet-like object is detected by the remaining sets of the plurality of X-ray sources and the plurality of X-ray detectors facing the sheet-like object including the line detector, the plurality of X-ray sources belonging to the endmost set are detected. The plurality of Xs in the set located next to the endmost set based on the thickness detection value of the sheet-like object by the X-ray source and the corresponding plurality of X-ray detectors
Calibrating any of the sheet thickness detection values when the sensor support by the source and the corresponding plurality of X-ray detectors is located at the first position, and subsequently reciprocating the sensor support Each time the operation is performed, the last reciprocating operation is performed based on the thickness detection value of the sheet-like object by the plurality of X-ray sources and the corresponding plurality of X-ray detectors calibrated when the previous reciprocating operation was performed. The thickness of the sheet of the set of X-ray sources and the corresponding X-ray detectors adjacent to the set of X-ray sources and the corresponding X-ray detectors calibrated when performed. And a calibration means for calibrating the detected value.