JPH10279072A - Holding device of flanged container - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a holding device of a flanged container so that the flanged container is not damaged by the movement of a chuck in a case where the position of a flanged part of the flanged container is not matched with the position of the chuck of the holding device. SOLUTION: In a holding device of a flanged container to hold the flanged container by the movement of chucks 10, 11 arranged opposite to each other, racks 6, 7 to be moved in the advancing/separating direction to/from each other through the forward and reverse rotation of a pinion 5 are respectively supported by guide rods 12, 13, and the chucks 10, 11 urged toward the racks 6, 7 by springs 8, 9 are movably supported by the guide rods 12, 13.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a clamping device for a flanged container, and more particularly, to a method of moving a chuck when a position of a flange portion of the flanged container does not coincide with a position of a chuck of the clamping device. The present invention relates to a holding device for a flanged container that does not damage the attached container.

[0002]

2. Description of the Related Art Conventionally, for example, a plurality of semiconductor wafers are stored in a flanged container (cassette) and transported in a factory. Then, this flanged container is used for a clamping device configured to clamp the flange portion of the flanged container by moving the chucks disposed opposite to each other in synchronization with the driving device in the opposite direction, Delivery has been made between the semiconductor manufacturing apparatus and the transport trolley.

[0003]

However, the above-mentioned conventional clamping device for a flanged container is arranged to face each other when the position of the flange of the flanged container coincides with the position of the chuck of the clamping device. By moving the provided chuck in a reciprocal direction, the flange of the flanged container can be securely clamped, but if the positions do not match, the chuck is reciprocally moved. By moving, the tip portion of the chuck collides with the tip of the flange portion of the flanged container, and when the chuck approaches further, the container itself, furthermore, the semiconductor wafer or the like stored in the container is held by the clamping force of the chuck. There was a problem of being damaged.

The present invention has been made in view of the above-described problems of the conventional clamping device for a container with a flange, and has been described in connection with the case where the position of the flange portion of the flanged container does not match the position of the chuck of the clamping device. It is an object of the present invention to provide a clamping device for a flanged container that does not damage the flanged container.

[0005]

In order to achieve the above object, a clamping device for a flanged container according to the present invention comprises a flanged container which clamps the flanged container by moving a chuck disposed opposite to the flanged container. The racks, which move in the directions of contact and separation with each other due to the forward and reverse rotation of the pinion, are supported by guide rods, respectively, and the guide rods movably support chucks biased toward the racks by springs. It is characterized by.

The holding device for a flanged container supports a rack and a chuck, which move in the directions of contact and separation with each other by forward and reverse rotation of a pinion, respectively, movably on guide rods, and moves the chuck to the rack side by a spring. When the rack is moved by forward and reverse rotation of the pinion when the position of the flange of the flanged container does not match the position of the chuck of the clamping device, the chuck comes into contact with the flange. Up to this point, the chuck moves with the rack by the urging force of the spring, but after the chuck abuts against the flange, only the rack moves, the chuck stops against the urging force of the spring, and the clamping force of the chuck Thus, it is possible to prevent the container itself, and furthermore, the semiconductor wafer and the like contained in the container from being damaged.

[0007]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of a holding device for a container with a flange according to the present invention. In the clamping device for a flanged container, a motor 1 is attached to a main body frame 14 as a driving device, a worm 2 is disposed directly or indirectly on a motor shaft of the motor 1, and a worm wheel 3 meshing with the worm 2 is rotated. Make it work. The pinion 5 is coaxially fixed to the worm wheel 3, and the motor 1 is driven to drive the pinion 5 via the worm 2 and the worm wheel 3.

The two racks 6, 7 are meshed with the pinion 5 so as to oppose each other up and down. Move, that is, approaching or moving away from each other.

The two racks 6, 7 penetrate and are supported by guide rods 12, 13, respectively.
It slides along 2 and 13. Guide rod 1
2 and 13 are fixedly attached to the main body frame 14.

The guide rods 12 and 13 are provided outside the racks 6 and 7 so as to be in contact with the racks 6 and 7.
The chucks 10 and 11 are slidably penetrated and supported, respectively. One end of each of the chucks 10 and 11 has a body frame 1.
The other ends of the springs 8 and 9 fixed to
At 9, the chucks 10 and 11 are urged toward the racks 6 and 7, that is, the two chucks 10 and 11 approach each other. Flange holding pieces 10a, 11a having a U-shaped cross section are integrally formed at the tips of the chucks 10, 11 so that the flange 4a of the flanged container 4 can be clamped.

Next, the operation of the clamping device for a flanged container will be described. As shown in FIG.
Height H to the center of 0, 11 and flange 4a of flanged container 4
When the flanged container 4 is placed in a state where the height h matches the height h, the motor 1 is driven to rotate the pinion 5 forward through the worm 2 and the worm wheel 3, and the rack 6 and 7 are guided and moved by the guide rods 12 and 13 in directions approaching each other. At the same time, the chucks 10 and 11 also move together with the racks 6 and 7 by the urging forces of the springs 8 and 9, and the flanges 4a are inserted into the flange holding pieces 10a and 11a having a U-shaped cross section. Container 4
The flanges 4a of the springs 8 and 9
Is held by the urging force.

Further, in order to release the clamping of the flange portion 4a of the flanged container 4, the motor 1 is rotated in the reverse direction, and the pinion 5 is rotated in the reverse direction, so that the racks 6, 7 are separated from each other by the guide rods 12, 13 moves. At the same time, the chucks 10 and 11 also move together with the racks 6 and 7 against the urging forces of the springs 8 and 9, and the flange 4a comes off from the inside of the flange holding pieces 10a and 11a having a U-shaped cross section. The clamping of the flange portion 4a of the flanged container 4 is released.

On the other hand, as shown in FIGS.
When the flanged container 4 is placed in a state where the height H to the center of the opposed chucks 10 and 11 does not match the height h to the flange portion 4a of the flanged container 4, the motor 1 to drive the worm 2 and the worm wheel 3
When the pinion 5 is rotated forward through, the racks 6 and 7 are guided by the guide rods 12 and 13 to move in a direction approaching each other. In accordance with this, the chucks 10 and 11 also
U-shaped cross section flange holding pieces 10a of the chucks 10, 11
Until the flange 11a comes into contact with the flange 4a of the flanged container 4, it moves together with the racks 6 and 7 by the urging forces of the springs 8 and 9, but the chuck holding member 10 of the chuck 10.11 has a U-shaped cross section.
After the a and 11a abut against the flange 4a of the flanged container 4, only the racks 6 and 7 move, and the chucks 10 and 11 stop against the urging force of the springs 8 and 9, and the racks 6 and 7 stop. A gap G is formed between the chuck 7 and the chucks 10 and 11. Thus, the clamping force of the flanges 4a of the flanged container 4 by the flange holding pieces 10a and 11a of the U-shaped cross section of the chucks 10 and 11 is only the urging force of the springs 8 and 9. It is possible to prevent the semiconductor wafer W or the like stored in the flanged container 4 itself from being damaged.

[0014]

According to the clamping device for a flanged container of the present invention,
When the position of the flange of the flanged container does not match the position of the chuck of the clamping device, when the rack is moved by forward and reverse rotation of the pinion, the chuck is held by the biasing force of the spring until the chuck contacts the flange. Moves together with the rack, but after the chuck contacts the flange, only the rack moves, the chuck stops against the urging force of the spring, and the container itself and the container It is possible to prevent damage to the semiconductor wafer and the like stored in the storage device.

[Brief description of the drawings]

FIG. 1 is a plan view showing an embodiment of a holding device for a flanged container of the present invention.

FIG. 2 is a front view of the same.

FIG. 3 is an explanatory view showing a normal clamping state of a flanged container.

FIG. 4 is a front view of the flanged container holding device of the present invention in an abnormal holding state of the flanged container.

FIG. 5 is an explanatory view showing an abnormal clamping state of the flanged container.

[Explanation of symbols]

 Reference Signs List 1 motor 2 worm 3 worm wheel 4 flanged container 4a flange 5 pinion 6 rack 7 rack 8 spring 9 spring 10 chuck 11 chuck 11 guide rod 13 guide rod 14 body frame

Claims (1)

[Claims] An apparatus for clamping a flanged container, wherein the racks, which move in the direction of contact and separation by forward and reverse rotation of a pinion, are guided by a guide rod. To each other,
A clamping device for a flanged container, wherein a chuck urged toward a rack by a spring is movably supported on the guide rod.