JPH10253809A - Optical mixing device, light source module and color image display device, and manufacture of the optical mixing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical mixing device having relatively simple constitution and ensuring suitability for mass production. SOLUTION: Semi-transmission layers 3, 5 and 7 are formed so as to reflect light incident on planes 3a, 5a and 7a, and transmit light incident on planes 3b, 5b and 7b. Also, light transmission layers 4, 6 and 8 having incident planes 4a, 6a and 8a having an angle of 45 degrees with the planes 3a, 5a and 7a of the semi-transmission layers 3, 5 and 7 are formed among the layers 3, 5 and 7.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a light mixing device for mixing and outputting a plurality of lights having different wavelengths and a method for manufacturing the same.

[0002] The present invention also relates to a color image display device using such a light mixing device and a light source module constituting the light mixing device.

[0003]

BACKGROUND OF THE INVENTION When mixing and outputting light emitted from a plurality of light sources, it is common to use a light mixing device in which a half mirror is arranged on an optical path of light emitted from the light source.

In such a light mixing device, a plurality of optical parts are used, so that the optical axis adjustment becomes complicated. In particular, each of the optical components used in the light mixing device requires extremely high precision in its mounting position.

In order to adjust the level of the emitted light from the light source, a part of the emitted light is extracted using a beam splitter before irradiating a half mirror included in the light mixing device.
Some of the extracted light must be detected using a light receiving element and fed back to the light source. For this reason, it is relatively difficult to reduce the size of the light mixing device. Further, such a light mixing device is not suitable for mass production, and it is difficult to reduce the manufacturing cost.

[0006]

DISCLOSURE OF THE INVENTION An object of the present invention is to provide a light mixing device having a relatively simple configuration and easy optical axis adjustment. Another object of the present invention is to provide a method for manufacturing such a light mixing device. Another object of the present invention is to provide a color image display device using such a light mixing device.

The light mixing device according to the first invention has a reflection layer having a surface for reflecting incident light, both surfaces of which are parallel to the reflection surface of the reflection layer, and light incident on one of the two surfaces. A semi-transmissive layer that reflects light and transmits light incident on another surface, and an incident surface that forms an angle of 45 degrees with the reflective surface of the reflective layer, and is provided between the reflective layer and the semi-transmissive layer. A light transmitting layer provided.

In the case where the light mixing device according to the first invention is used, the light is perpendicularly incident on the incident surface of the light transmitting layer,
In addition, the first light incident on one surface of the reflection layer is emitted. In addition, a second light which is parallel to the first light and is incident on one surface of the semi-transmissive layer is emitted.

When the first light is perpendicularly incident on the incident surface of the light transmitting layer, the first light transmits through the light transmitting layer and is reflected by the reflecting layer. The first light reflected by the reflective layer enters another surface of the semi-transmissive layer, passes through the semi-transmissive layer, and exits from one surface of the semi-transmissive layer. When the second light is incident on one surface of the semi-transmissive layer, it is reflected on the one surface.

The optical axis of the first light that passes through the other surface of the semi-transmissive layer and exits from one surface and the optical axis of the second light that reflects on the one surface of the semi-transmissive layer are different from each other. First to match
The positions of the first light source and the second light source that emit the light are adjusted. Thus, the first light and the second light emitted from different light sources
And light are mixed.

The above-mentioned light mixing device has a semi-transmissive layer which is parallel on both sides, reflects light incident from one surface and transmits light incident from the other surface, and a light transmissive layer which transmits light. It can be manufactured by laminating alternately, having a predetermined width, and cutting at an angle of 45 degrees with one surface of the semi-transmissive layer. Preferably, the cut surface is further polished.

The reflection layer is a first beam splitter that transmits a part of incident light and reflects the rest of the light,
Preferably, the semi-transmissive layer is a beam splitter that transmits a part of the light incident from the one surface and reflects the rest.

In this case, the light transmitted through the first beam splitter is received, the first light detector outputs a light receiving signal corresponding to the amount of received light, and the light passes through the second beam splitter. It is preferable to further include a second photodetector that receives light and outputs a light reception signal according to the amount of received light.

When the first light is incident on the reflection layer, a part of the first light is transmitted through the reflection layer, and the first light is transmitted through the first light.
Is received by the photodetector. The first photodetector outputs a light receiving signal corresponding to the amount of received light. By feeding back this light receiving signal to the drive power source of the first light source that emits the first light, the first light at a desired level can be obtained.

When the second light is incident on the semi-transmissive layer, a part of the second light is transmitted through the semi-transmissive layer and received by the second photodetector. The second
A light receiving signal corresponding to the amount of received light is output from the photodetector.
By feeding back the light receiving signal to the second drive power source that emits the second light, the second light of a desired level can be obtained.

More preferably, a first filter is provided on the transmitted light of the first beam splitter and allows transmission of light having a first wavelength, and the second beam splitter.
A second filter is disposed on the transmitted light of the splitter and allows transmission of light having a second wavelength.

By using the first filter for transmitting the wavelength of the first light incident on the reflective layer and the second filter for transmitting the wavelength of the second light incident on the semi-transmissive layer, The first photodetector receives the light component having the first wavelength, thereby preventing disturbance light from entering the first photodetector. The second photodetector includes the second photodetector. Is incident on the second photodetector, and it is possible to prevent disturbance light from entering the second photodetector. The level adjustment of the first light and the second light can be accurately performed. A third filter that is provided on an optical path of light incident on the reflection layer and allows transmission of a light component having a third wavelength in the incident light; and a third filter that transmits light on one surface of the semi-transmission layer. A fourth filter provided on the optical path and allowing transmission of a light component having a fourth wavelength different from the third wavelength out of the incident light may be further provided.

By using the third filter that transmits the wavelength of the first light incident on the reflection layer, only the light component having the first wavelength is incident on the reflection layer. Incident can be prevented. Further, by using the fourth filter that transmits the wavelength of the second light incident on the semi-transmissive layer, only the light component having the second wavelength is incident on the semi-transmissive layer. Incident can be prevented.

Since the thicknesses of the reflective layer and the transflective layer are small, the thickness can be regarded as substantially zero, and
When the light source and the second light source are further provided,
The distance from the reflection surface of the reflection layer to the other surface of the semi-transmission layer is 1 / (2) ^{1 /} of the distance between the light emitted from the first light source and the light emitted from the second light source. ^doubled.

According to a second aspect of the present invention, there is provided a light mixing device, wherein a first beam splitter having a reflecting surface which transmits a part of incident light and reflects the rest, and both surfaces of which are reflected by the first beam splitter. A second beam splitter that is parallel to the surface, transmits a portion of light incident from one surface, reflects the rest, and transmits light incident from the other surface, and both surfaces are the second beam splitter. A third beam splitter that is parallel to one surface of the beam splitter, transmits part of light incident from one surface, reflects the rest, and transmits light incident from the other surface. An optical mixer, a first light source that emits first outgoing light having a first wavelength, a second light source that emits second outgoing light having a different wavelength from the first light source, The third emission light having a wavelength different from the first wavelength and the second wavelength is emitted. A first collimating lens that converts the first emitted light emitted from the first light source into parallel light and guides the first emitted light to a reflecting surface of the first beam splitter. A second collimator that converts the second light emitted from the second light source into parallel light and guides it to one surface of the second beam splitter.
A lens device comprising: a lens; and a third collimating lens that converts the third light emitted from the third light source into parallel light and guides the third light to one surface of the third beam splitter. 1 are provided on the optical paths of the outgoing light of the first beam splitter and the transmitted light of the first beam splitter, respectively.
A first filter that allows transmission of light having the second wavelength, and a first filter that is provided on an optical path of the second emission light and the transmission light of the second beam splitter, and transmits the light having the second wavelength. And a third filter provided on the optical path of the third outgoing light and the transmitted light of the third beam splitter, respectively, and allowing the transmission of the light having the third wavelength. And a filter device that receives the transmitted light of each of the first beam splitter, the second beam splitter, and the third beam splitter, and outputs a light reception signal corresponding to the amount of received light. The first photodetector, the second photodetector and the third photodetector.
And a photodetector having the above photodetector.

According to the second aspect, the plurality of outgoing lights emitted from the light source device are made into parallel lights in the lens device. The parallel light is guided to the optical mixer, and a part of the parallel light is reflected, mixed, and emitted from the optical mixer.
Part of the parallel light passes through the optical mixer, and is received by the photodetector via the filter device.

A first emission light amount adjusting means for adjusting an emission light amount of the first light source based on a light reception signal of the first photodetector; A second emitted light amount adjusting means for adjusting the emitted light amount of the second light source, and a third emitted light amount adjusting means for adjusting the emitted light amount of the third light source based on a light reception signal of the third light detector. With the further arrangement, the amount of light emitted from the light source device can be adjusted according to the amount of light received by the photodetector. It can be adjusted to a desired level.

Further, since the filter device is provided, it is possible to prevent disturbance light from being incident on the photodetector. The level of light emitted from the light source device can be adjusted accurately.

In the above, for example, the first light source, the second light source and the third light source are red, green and blue light sources, and the first filter, the second filter and the A third filter allows transmission of light components having red, green and blue wavelengths.

A light source module according to a third aspect of the present invention provides a light source substrate having a plurality of openings for positioning a light source, a plurality of openings positioned in the plurality of openings of the light source substrate, and a plurality of emitted lights emitted through the openings. A light source and a first electrode formed on the light source substrate and one electrode of each of the plurality of light sources are connected in common.

By using this light source module, the light mixing device of the second invention can be constituted.

A color image display device according to a fourth aspect of the present invention is a color light source for emitting a color beam based on an input color signal, and deflects a color beam emitted from the color light source based on a given deflection control signal. And a display panel for irradiating a color beam deflected by the light deflector and displaying an image represented by the color beam.

According to the fourth aspect, the color signal is converted into a color beam corresponding to the color signal by the color light source. The color beam is deflected by the deflecting means and is applied to the display panel. Thereby, an image represented by the color beam is displayed on the display panel.

The light deflecting means has a mirror for reflecting the color beam and a mirror driving means capable of bending and twisting the mirror. The mirror driving means converts the color beam to light. When deflecting in the horizontal direction, one of the bending and twisting of the mirror is performed, and when deflecting the color beam in the vertical direction, one of the bending and twisting of the mirror is performed.

[0030]

DESCRIPTION OF THE PREFERRED EMBODIMENTS FIGS. 1 and 2 show an embodiment of the present invention. FIG. 1 is a perspective view of the light mixing device 1, and FIG.
FIG. 2 is a sectional view taken along the line II-II in FIG. 1.

The light mixing device 1 comprises a first semi-transmissive layer 3, a second
, A third light-transmitting layer 7, a second light-transmitting layer 4, a third light-transmitting layer 6, and a fourth light-transmitting layer 8 are alternately stacked. It is formed by doing. One surface 1a of the light mixing device 1 is an incident surface of light to be mixed. The transflective layers 3, 5, and 7 are parallel to each other, and the incident surface 1a and the transflective layers 3, 5, and 7 form an angle of 45 degrees.

One surface 4a, 6a and 8a of the second light transmitting layer 4, the third light transmitting layer 6 and the fourth light transmitting layer 8 constitute a part of one surface 1a of the light mixing device 1. doing.

One surface 3a of the first semi-transmissive layer 3 is a reflecting surface and reflects incident light. The other surface 3b of the first semi-transmissive layer 3 is a transmissive surface and transmits incident light. One surface 5a of the second semi-transmissive layer 5 and one surface 5a and 7a of the third semi-transmissive layer 7 are also reflective surfaces, and the other surface 5b and the third semi-transmissive layer 5 The other surface 7b of the transmission layer 7 is also a transmission surface. First light transmitting layer 2, second light transmitting layer 4, third light transmitting layer
The light transmitting layer 6 and the fourth light transmitting layer 8 transmit the incident light.

Using such a light mixing device 1, a plurality of lights having different wavelengths can be mixed and output. Next, the operation when mixing and outputting a plurality of lights will be described.

The first incident light, the second incident light and the third incident light having different wavelengths from each other are perpendicular to the surfaces 4a, 6a and 8a of the light transmitting layers 4, 6 and 8 constituting the light mixing device 1. Incident.

The first incident light enters the light mixing device 1 from one surface 4a of the second light transmitting layer 4 and passes through the second light transmitting layer 4. The first incident light is applied to one surface 3a of the first semi-transmissive layer 3.
At an incident angle of 45 degrees, and is reflected as first reflected light at a reflection angle of 45 degrees. The first reflected light is applied to one surface 1 of the light mixing device 1.
is parallel to a. The first reflected light enters from another surface 5b of the second semi-transmissive layer 5, passes through the second semi-transmissive layer 5, and exits from one surface 5a. The first reflected light is further emitted from an emission surface 1b perpendicular to one surface 1a of the light mixing device 1 via a third light transmission layer 6, a third semi-transmission layer 7, and a fourth light transmission layer 8. I do.

The second incident light enters the light mixing device 1 from one surface 6a of the third light transmitting layer 6 and passes through the third transmitting layer 6. The second incident light is incident on one surface of the second semi-transmissive layer 5 at an incident angle of 45 degrees, and is reflected as a second reflected light at a reflection angle of 45 degrees. The second reflected light is also parallel to one surface 1a of the light mixing device 1. The second reflected light is applied to the other surface 7b of the third semi-transmissive layer 7.
And the third semi-transmitting layer 7 and the fourth light transmitting layer 8
The light exits from the exit surface 1b of the light mixing device 1 via the

The third incident light enters the light mixing device 1 from one surface 8a of the fourth light transmitting layer 8 and passes through the fourth light transmitting layer 8. The third incident light is applied to one surface 7a of the third semi-transmissive layer 7.
At an incident angle of 45 degrees, and is reflected as third reflected light at a reflection angle of 45 degrees. This third reflected light is also parallel to one surface 1a of the light mixing device 1. The third reflected light is transmitted to the fourth light transmitting layer 8.
The light exits from the exit surface 1b of the light mixing device 1 via the

In this manner, the first incident light, the second incident light, and the third incident light having different wavelengths are mixed to obtain an outgoing light having a uniform optical axis (see FIG. 2). For simplicity, the optical axes of the first reflected light, the second reflected light, and the third reflected light are slightly shifted.

FIGS. 3 and 4 show a method of manufacturing the light mixing device 1 shown in FIGS. In these figures, the thickness of the semi-transmissive layer is omitted and is indicated by hatching for easy understanding.

Referring to FIG. 3, a semi-transmissive layer is
The transmissive layer 20 is further laminated on the transmissive layer 20, and the transmissive layer 20 and the semi-transmissive layer 21 are joined by anodic bonding, adhesion, or the like. When the transmissive layer 20 and the semi-transmissive layer 21 are joined using an adhesive, it is preferable to use a material having the same refractive index as that of the transmissive layer 20. Thus, the joining of the transmissive layer 20 and the transflective layer 21 is repeated, and the transmissive layers 20 and the transflective layers 21 are alternately laminated. Transmission layer
20 is made of glass, transparent resin or the like having a high transmittance. As the semi-transmissive layer 21, a metal deposition film, a dielectric sputter film, or the like is used.

The block formed in this manner is cut by laser cutting or the like at an angle of 45 degrees and a predetermined width with respect to the surface of the transmissive layer 20 (semi-transmissive layer 21). Indicated by a dashed line). Further, the cut surface is optically polished. One of the cut surfaces becomes one surface 1a of the light mixing device 1 shown in FIG. 2 and becomes an incident surface of the incident light, and the incident surface and the surface of the semi-transmissive layer 21 form an angle of 45 degrees. (FIG. 4).

FIG. 5 shows the relationship between the interval between the light beams and the thickness of the light transmitting layer when a plurality of light beams enter the light mixing device 1. In this figure, the same components as those shown in FIGS. 1 and 2 are denoted by the same reference numerals, and description thereof will be omitted.

The first light source 25 emits first incident light, and the second light source 26 emits second incident light. First
The first incident light emitted from the light source 25 is the first incident light as described above.
Is reflected on one surface 3a of the semi-transmissive layer 3 and enters the other surface 5b of the second semi-transmissive layer 5 as the first reflected light at an incident angle of 45 degrees. The first reflected light is refracted at a refraction angle based on Snell's law. The refracted first reflected light is further refracted on one surface 5a of the second semi-transmissive layer 5 and transmits through the third light-transmitting layer 6.

The second incident light emitted from the second light source 32 is reflected by the one surface 5b of the second semi-transmissive layer 5 as described above.

In order to match the optical axes of the first reflected light and the second reflected light transmitted through the third light transmitting layer 6, the thickness t of the second light transmitting layer 4 and the first light source The distance d between the light source 25 and the second light source 26, the refractive index of the second light transmitting layer 4 and the third light transmitting layer 6, and the refractive index of the second semi-transmitting layer 5 must all be considered. Must be complicated.

However, since the thickness of the semi-transmissive layer is generally thinner than that of the light-transmitting layer, the thickness of the second semi-transmissive layer 5 can be neglected. In this case, the relationship between the thickness t of the second light transmission layer 4 and the distance d between the first light source 25 and the second light source 26 is t = (1 / (2) ^1/2 ) d. Become. Therefore,
In order to satisfy this relationship, the thickness t of the second semi-transmissive layer 4 and
If the distance between the light sources 25 and 26 is specified, the optical axes of the first reflected light and the second reflected light are aligned. Similarly, the distance d between the second light source 26 that emits the second incident light and the third light source (not shown) that emits the third incident light and the thickness t of the third semi-transmissive layer 6 are set as follows. If it is specified that t = (1 / (2) ^1/2 ) d, the optical axes of the second reflected light and the third reflected light are aligned.

FIG. 6 shows an application example of the light mixing device 1 shown in FIGS. In this figure, the same components as those shown in FIGS. 1 and 2 are denoted by the same reference numerals, and description thereof will be omitted.

In FIG. 6, the light mixing device 1 is provided with a silicon substrate 10. The silicon substrate 10 has a first
A first photodiode 11, a second photodiode 12, and a third photodiode 13 are provided substantially on the optical path of each of the incident light, the second incident light, and the third incident light. To the light mixing device 1.

The first incident light, the second incident light and the third incident light are reflected and mixed by the first semi-transmissive layer 3, the second semi-transmissive layer 5 and the third semi-transmissive layer 7, respectively, and are mixed. The light exits from the exit surface 1b of the mixing device 1. Further, the first incident light, the second incident light, and the third incident light incident on the first semi-transmissive layer 3, the second semi-transmissive layer 5, and the third semi-transmissive layer 7 have a part of the first incident light, The light is transmitted through the semi-transmissive layer 3, the second semi-transmissive layer 5, and the third semi-transmissive layer 7, respectively, and is transmitted from the other surface 1c of the light mixing device 1 as first transmitted light, second transmitted light, and third transmitted light. Emit. These first transmitted light, second transmitted light and third
The transmitted light enters the first photodiode 11, the second photodiode 12, and the third photodiode 13, respectively.

Each of the first photodiode 11, the second photodiode 12, and the third photodiode 13 outputs a light receiving signal corresponding to the amount of received light. The light receiving signals output from the first photodiode 11, the second photodiode 12, and the third photodiode 13, respectively, relate to the levels of the first incident light, the second incident light, and the third incident light. Therefore, by detecting these light receiving signals, the levels of the first incident light, the second incident light, and the third incident light can be monitored. At this time, by monitoring the incident light level from the received light signal in consideration of the transmittance of each layer, more accurate monitoring becomes possible.

In addition to the second transmitted light, the first reflected light reflected on the other surface 5b of the second semi-transmissive layer 5 also enters the second photodiode 12 as disturbance light. In addition to the third transmitted light, the first reflected light and the second reflected light reflected on the other surface 7b of the third semi-transmissive layer 7 also enter the third photodiode 13 as disturbance.

Therefore, in order to perform more accurate monitoring, the amount of the first reflected light incident on the second photodiode 12 is calculated from the light receiving signal level of the first photodiode 11, and the calculated value is used as the first light amount. Subtract from the light receiving signal level of the second photodiode 12. Thereby, the influence of disturbance light incident on the second photodiode 12 can be eliminated. In this way, disturbance light due to the first reflected light and the second reflected light incident on the third photodiode 13 can be removed.

Further, if necessary, the ratio of the first reflected light, the second reflected light, and the third reflected light included in the light emitted from the light mixing device 1 can be changed.

FIG. 7 shows a further application example of the light mixing device 1 shown in FIGS. In this figure, FIG.
The same components as those shown in FIGS. 2 and 6 are denoted by the same reference numerals, and description thereof will be omitted.

In the light mixing device shown in FIG. 7, a filter device 22 is provided between the silicon substrate 10 and the other surface 1c of the light mixing device 1. This filter device 22 has a first
The optical filter 14, the second optical filter 15, and the third optical filter 16 are included. First optical filter 1
4, second optical filter 15 and third optical filter 16
Are disposed in front of the light receiving surfaces of the first photodiode 11, the second optical photodiode 12, and the third optical filter 13, respectively. The first optical filter 14 is a first optical filter.
It has a characteristic that allows transmission of a light component having a wavelength of transmitted light (first incident light). The second optical filter 15 has a characteristic that allows transmission of a light component having the wavelength of the second transmitted light (second incident light). The third optical filter 16 has a characteristic that allows transmission of the wavelength of the third transmitted light (third incident light).

Therefore, the first photodiode 11,
Only the first transmitted light, the second transmitted light, and the third transmitted light are incident on the second photodiode 12 and the third photodiode 13, respectively, so that the incidence of disturbance light can be prevented, and accurate monitoring can be realized.

As the optical filter, a metal deposited film, a dielectric sputtered film, or a multilayer film of these can be used.

FIG. 8 shows a further application example of the light mixing device 1 shown in FIGS. In this figure, FIG.
The same components as those shown in FIGS. 2 and 7 are denoted by the same reference numerals, and description thereof will be omitted.

In the light mixing device shown in FIG. 8, a second filter device 23 is provided in front of the incident surface 1a of the light mixing device 1. The second filter device 23 includes a fourth optical filter 17, a fifth optical filter 18, and a sixth optical filter 19. The fourth optical filter 17, the fifth optical filter 18, and the sixth optical filter 19 are arranged on the optical paths of the first incident light, the second incident light, and the third incident light, respectively.

The fourth optical filter 17 has the characteristic of allowing the transmission of the light component having the wavelength of the first incident light, and the fifth optical filter 18 has the characteristic of transmitting the light component having the wavelength of the second incident light. The sixth optical filter 19 has characteristics that allow transmission of a light component having the wavelength of the third incident light.

Therefore, only the first incident light, the second incident light, and the third incident light enter the light mixing device 1, and the incidence of disturbance light can be prevented.

The first incident light, the second incident light, and the third
Even when an element having a wide half width of the emission wavelength distribution, such as a light emitting diode, is used as the light source of the incident light, only the light component having the desired wavelength can be incident on the light mixing device 1.

FIGS. 9 to 13 show application examples of the light mixing device 1 shown in FIGS. 1 and 2, and show a color beam emitting device. FIG. 9 is a perspective view of the color beam emitting device, and FIG.
Is a sectional view taken along line XX of FIG. 9, and FIG.
FIG. 12 is a sectional view taken along the line XI, FIG. 12 is a plan view of the color beam emitting device, and FIG. 13 is an assembled perspective view of the color beam emitting device. In these figures, the same components as those shown in FIGS. 1 to 8 are denoted by the same reference numerals, and description thereof will be omitted.

The light mixing device 1 included in the color beam emitting device is upside down as compared with that shown in FIG. A lens device 50 is provided above one surface 1a of the light mixing device 1. The lens device 50 includes a first collimating lens 51, a second collimating lens 52, and a third collimating lens 53. These first
Collimating lens 51, second collimating lens 52
The third collimating lens 53 converts red light, green light and blue light emitted from the red surface light emitting diode 37, the green surface light emitting diode 34 and the blue surface light emitting diode 31, which will be described later, into parallel light.

A light source substrate 40 is provided above the lens device 50 via a second filter device 23.

The light source substrate 40 is formed with conical openings 42, 43 and 44 at a predetermined distance in a line in the longitudinal direction thereof. The upper portions of these conical openings 42, 43 and 44 are formed with square positioning portions 42a, 43a and 44a. These positioning portions 42a, 43a and 44a
Light emitting diodes 31, 34 and 37 are fitted so that the light emitting surface faces openings 42, 43 and 44.

On the upper surface of the light source substrate 40, a common electrode 41 is formed on one surface thereof. Therefore, the light emitting diodes 31, 34
And 37 are electrically connected to a common electrode 41. The light emitting diodes 31, 34 and 37 are also formed with back electrodes 32, 35 and 38. Surface electrode 33,
By applying a drive voltage between 36 and 39 and back electrodes 32, 35 and 38, light emitting diodes 31, 34 and
37 emits light, and blue light, green light and red light are respectively emitted.

On the other side 1 c of the light mixing device 1, a photodiode substrate 60 is provided via a first filter device 22.

The p-diffusion layer 61 is formed on the photodiode substrate 60 so as to face the first filter 14, the second filter 15 and the third filter 16 of the first filter device 22. On the upper surface of the p diffusion layer 61, a p electrode 62 is formed partially with an insulating film 63 interposed therebetween. Further, an n-electrode 75 is formed on the upper surface of the photodiode substrate 60. Below the n-electrode 75, an n-layer 76 is formed. These silicon substrate 64, p diffusion layer 61, p electrode 62, n electrode 75 and n
The photodiodes 65, 66 and 67 are formed by the layer 76.

Further, light source pads 71, 72, 73 and 74 are formed on the upper surface of the photodiode substrate 60.
The light source electrode 71 and the common electrode 41 of the light source substrate 40 are electrically connected, the light source electrode 72 and the back surface electrode 32 of the blue surface light emitting diode 31 are electrically connected, and the light source electrode 73 and the green surface light emission. The back electrode of the diode 34 is electrically connected, and the light source electrode 74 and the back electrode of the red surface light emitting diode 37 are electrically connected.

In such a color beam emitting device, when a driving voltage is applied to the light source electrodes 71 and 72, the blue light emitting diode 31 emits light and emits blue light. The blue light enters the sixth optical filter 19 through the opening 42, and unnecessary light components are removed. Sixth optical filter
The blue light having passed through 19 is converted into parallel light by the collimating lens 53 and enters the third semi-transmissive layer 7. Part of the blue light is reflected by the third semi-transmissive layer 7,
The light is emitted from the light mixing device 1 and the rest is transmitted. The blue light transmitted through the third semi-transmissive layer 7 passes through the third optical filter 16 and enters the photodiode 67. The light receiving signal corresponding to the light receiving level of the blue light is n
It is obtained from the electrode 75 and the p-electrode 62. Since a light receiving signal corresponding to the level of the blue light can be obtained, the level of the driving voltage applied to the light source electrodes 71 and 72 can be changed based on the light receiving signal level, and the emission level of the blue light can be adjusted. .

Similarly, when a driving voltage is applied to the light source electrodes 71 and 73, green light is emitted from the green surface-emitting photodiode 34, and passes through the aperture 43 and the fifth filter 18 to form the collimating lens 52. Is converted into parallel light. The parallel green light is partially reflected by the second semi-transmissive layer 5, and the rest is transmitted. The green light transmitted through the second semi-transmissive layer 5 is received by the photodiode 66, and a light receiving signal corresponding to the amount of the received light is output from the n-electrode 75 and the p-electrode 62.

When a drive voltage is further applied to the light source electrodes 71 and 74, red light is emitted from the red surface emitting photodiode 37 and is applied to the collimating lens 51 via the opening 44 and the first filter 17. The light is made parallel by the lens 51. A part of the parallel red light is reflected by the first semi-transmissive layer 3 and the rest is transmitted. The transmitted red light is received by the photodiode 65, and a light receiving signal corresponding to the amount of received light is obtained from the n-electrode 75 and the p-electrode 62.

The level of the green light emitted from the green light emitting diode 34 and the level of the red light emitted from the red light emitting diode 37 can be adjusted.

FIG. 14 shows an electrical configuration in the case where the proportion of the reflected light contained in the light emitted from the light mixing device 1 included in the color beam emitting device is adjusted in the color beam emitting device shown in FIGS. FIG. In this figure, only necessary components are shown, and a filter device and the like are not shown. In this figure, the same components as those shown in FIGS. 9 to 13 are denoted by the same reference numerals, and description thereof will be omitted.

When the B drive signal, the G drive signal, and the R drive signal are input to the control circuits 101, 102, and 103, light emission drive signals for driving the light emitting diodes 35, 36, and 37 are output, and the light emitting diodes 35, 36 are output. And given to 37. As a result, the light emitting diodes 35, 36 and 37
Respectively emit red light, blue light and green light,
Photodiodes 65, 66 and 67 via light mixing device 1
Incident on. The photodiodes 65, 66, and 67 output light reception signals corresponding to the amount of received light, respectively.
1, 102 and 103 are input as control signals. Since the levels of blue light, green light and red light emitted from the light emitting diodes 35, 36 and 37 can be monitored, the amounts of these lights can be adjusted to desired levels.

FIGS. 15 and 16 show a process of manufacturing the optical substrate 40 included in the color beam emitting device shown in FIGS.

First, a silicon wafer 81 having an oxide film 82 and a nitride film 83 formed on both upper and lower surfaces is prepared (FIG. 15A).

One surface (the lower surface in FIG. 15) of the silicon wafer 81 is patterned (FIG. 15B). As a result, openings 84, 85 and 86 are formed, and a part of the silicon wafer 81 is exposed.

Wet etching is performed on one surface of the silicon wafer 81, and the openings 42 and 43 have a V-shaped cross section.
And 44 are formed (FIG. 15C). These openings 4
The tips of 2, 43 and 44 are light emission windows, and the size of the windows can be defined by the size of the mask at the time of patterning, the thickness of the silicon wafer 81, and the like.

Next, patterning is performed again using a larger mask than in the first patterning (FIG. 15).
(D)).

Further, a second wet etching is carried out (KOH can be used as an etchant), and the light emitting diode positioning portions 42a having a desired depth are formed.
43a and 44a are formed (FIG. 15E).

The oxide film 82 and the nitride film 83 formed on the upper and lower surfaces of the silicon wafer 81 are removed (FIG.
15 (F)).

The silicon wafer thus obtained
Gold 41 is deposited on the upper and lower surfaces of 81 (FIG. 15 (G)).

The light source substrate 40 is obtained as described above.

The light emitting diodes 31, 32 and 33 are fitted into the positioning portions of the obtained light source substrate 40 (FIG. 1).
6).

FIGS. 17A and 17B and FIG.
(A) and (B) show an example of a light emitting diode.

Referring to FIGS. 17A and 17B, the substrate
A back surface electrode 97 is formed on the lower surface of 91. An active layer 93 sandwiched between an upper clad layer 94 and a lower clad layer 92 is provided on the upper surface of the substrate 91. On the upper surface of the upper cladding layer 94, a transparent electrode 95 and a surface electrode 96 are formed.

The transparent electrode 95 may be removed if necessary.

In the light emitting diode shown in FIGS. 18A and 18B, the surface electrode 98 has a mesh structure. Therefore, it is possible to prevent the emission intensity from dropping inside.

FIG. 19 shows the structure of a color image display device.

The color image display device includes a color beam emitting device 100. This color beam emitting device
As 100, for example, the one shown in FIG. 14 can be used.

An R drive signal is supplied to the color beam emitting device 100,
A G drive signal and a B drive signal are provided. The color beam corresponding to these drive signals is generated by the color beam emitting device 10.
The light exits from 0 and enters the light deflector 105. A vertical synchronizing signal and a horizontal synchronizing signal are also input to the optical deflector 105. In the optical deflector 105, the color beam emitting device 10 is controlled based on the input vertical synchronizing signal and horizontal synchronizing signal.
The color beam emitted from 0 is deflected and the display panel
Project 110. As a result, a color image represented by the color beam is displayed on the display panel 110.

The light deflection device 105 includes a vertical scanning drive circuit.
101 and a horizontal scanning drive circuit 102, and a vertical scanning optical scanner 106 and a horizontal scanning optical scanner 107 are included.

The vertical scanning optical scanner 106 and the horizontal scanning optical scanner 107 have the configuration shown in FIG.

The optical scanner comprises a vibration device 111 and a vibrator. The vibrator includes a fixed portion 112 fixed to the vibration device 111 and an elastic spring portion 11 extending from the fixed portion 112.
3 and a vibrating portion 114 supported by an elastic spring portion 113. One surface of the vibrating portion 114 is a mirror surface.

The vibrating section 114 has an axially symmetrical shape with respect to the center axis of the elastic spring section 113. Therefore, the center of gravity of the vibrating portion 114 is located at a position shifted from the center axis of the elastic spring portion 113.

The vibrating device 111 is fixed by the vibrating device 111.
When the vibration is applied to the elastic spring portion 113, the elastic spring portion 113 causes bending vibration, and since the vibrating portion 114 is asymmetric with respect to the axis of the elastic spring portion 113, torsional vibration occurs around the elastic spring portion 113. That is, the elastic spring portion of the vibrator
Reference numeral 113 has two resonance vibration modes, a bending deformation mode and a torsional deformation mode.

Since the elastic spring portion 113 of the vibrator has two resonance vibration modes, a bending deformation mode and a torsional deformation mode, it vibrates the vibration including both frequency components of the resonance frequencies of these resonance vibration modes. If generated by the device 111, the elastic spring portion 113 resonates at these resonance frequencies.

A light beam is projected obliquely on the mirror surface of the vibrating section 114. The incident light beam is reflected by the mirror surface. When the mirror surface vibrates, the incident angle and the reflection angle of the light beam change. If the mirror surface is vibrated in two orthogonal directions, the reflected light is scanned two-dimensionally.

In the vertical scanning optical scanner 106 and the horizontal scanning optical scanner 107, only one of the two resonance frequencies, which is different from each other, is used as a vibrating device.
It is caused by 111. In this embodiment, the vertical scanning optical scanner 106 is configured to generate a bending deformation mode resonance frequency, and the horizontal scanning optical scanner 107 is configured to generate a torsional deformation mode resonance frequency. ing. Thus, one-dimensional scanning of the light beam is achieved by the optical scanners 106 and 107, respectively, and the light beam can be two-dimensionally scanned by combining with the optical scanners 106 and 107.

The elastic spring portion 113 is provided with a strain detecting element (not shown). A detection signal (scanning angle monitor signal described later) indicating the amount of bending and the amount of twist is obtained by the distortion detecting element.

Returning to FIG. 19, the horizontal scanning optical scanner 107 is set so that the color beam emitted from the color beam emitting device 100 enters the mirror surface of the horizontal scanning optical scanner 107.
Is arranged. In addition, the color beam reflected by the horizontal scanning optical scanner 107 is applied to the vertical scanning optical scanner 10.
The scanner 106 is arranged so as to be incident on the mirror 6.

The resonance frequency of the torsional vibration of the horizontal scanning scanner 107 is set so as to match the frequency of the horizontal synchronizing signal supplied to the drive circuit 102. The scanning angle monitor signal from the distortion detecting element is fed back to the drive circuit 102. The driving circuit 102 controls the horizontal scanning scanner 10 so as to generate torsional vibration synchronized with the input horizontal synchronization signal.
A drive signal for exciting the vibrating device 7 is generated.

The resonance frequency of the bending vibration of the vertical scanning scanner 106 is set to match the frequency of the vertical synchronizing signal given to the drive circuit 101. The scanning angle monitor signal from the distortion detecting element is fed back to the drive circuit 101. The drive circuit 101 generates a drive signal for exciting the vibration device of the vertical scanning scanner 106 so as to generate bending vibration synchronized with the input vertical synchronization signal.

Therefore, when the color beam is incident on the optical deflector 105, the color beam is deflected in the horizontal direction by the horizontal scanning optical scanner 107, and the color beam is deflected in the vertical direction by the vertical scanning optical scanner 106. A color image is displayed on the display panel 110.

As the horizontal and vertical scanning scanners, it is needless to say that not only those using the above-described vibrator but also those using a known galvano scanner or polygon mirror can be used. .

[Brief description of the drawings]

FIG. 1 is a perspective view of a light mixing device.

FIG. 2 is a cross-sectional view of the light mixing device shown in FIG. 1, taken along line II-II.

FIG. 3 shows a method for manufacturing a light mixing device.

FIG. 4 shows a method of manufacturing the light mixing device.

FIG. 5 shows a relationship between an interval between a plurality of light sources and a thickness of a light transmitting layer in the light mixing device.

FIG. 6 shows another embodiment of the light mixing device.

FIG. 7 shows another embodiment of the light mixing device.

FIG. 8 shows another embodiment of the light mixing device.

FIG. 9 shows an embodiment of a color beam emitting device.

FIG. 10 shows an embodiment of a color beam emitting device.

FIG. 11 shows an embodiment of a color beam emitting device.

FIG. 12 shows an embodiment of a color beam emitting device.

FIG. 13 shows an embodiment of a color beam emitting device.

FIG. 14 shows an embodiment of a color beam emitting device.

FIGS. 15A to 15G show a method of manufacturing a light source substrate.

FIG. 16 shows a light source substrate.

FIGS. 17A and 17B show an example of a light emitting diode.

FIGS. 18A and 18B show an example of a light emitting diode.

FIG. 19 illustrates a configuration of a color image display device.

FIG. 20 is a perspective view of a scanning optical scanner.

[Explanation of symbols]

 1 light mixing device 2,4,6,8,20 light transmission layer 3,5,7,21 semi-transmission layer 11,12,13 photodiode 22,23 filter device 15,26 light source 31,32,33 light emitting diode 100 Color beam emitting device 105 Optical deflector 110 Display panel

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Koji Sano, O-Muron Co., Ltd. (10) Hanazono Todo-cho, Ukyo-ku, Kyoto City, Kyoto Prefecture Inside (72) Inventor Toshiyuki Takahashi 10 Odron, Hanazono Todocho, Ukyo-ku, Kyoto-shi, Kyoto

Claims (14)

[Claims] 1. A reflecting layer having a surface for reflecting incident light, both surfaces of which are parallel to the reflecting surface of the reflecting layer, reflecting light incident on one of the two surfaces, and reflecting the light on the other surface. A semi-transmissive layer for transmitting incident light, and a light-transmissive layer having an incident surface at an angle of 45 degrees with the reflective surface of the reflective layer, and provided between the reflective layer and the semi-transmissive layer. Light mixing device. 2. A first beam splitter according to claim 1, wherein said reflecting layer transmits a part of incident light and reflects the remaining part.
The light mixing device according to claim 1, wherein the semi-transmissive layer is a second beam splitter that transmits a part of the light incident from the one surface and reflects the rest. 3. A first light receiving means for receiving light transmitted through the first beam splitter and outputting a light receiving signal corresponding to a light receiving amount.
3. The light mixing device according to claim 2, further comprising: a photodetector, and a second photodetector that receives light transmitted through the second beam splitter and outputs a light reception signal according to a received light amount. apparatus. 4. A first filter disposed on the transmitted light of the first beam splitter and allowing transmission of light having a first wavelength, and disposed on a transmitted light of the second beam splitter. To allow transmission of light having the second wavelength.
3. The optical mixing device according to claim 2, further comprising a filter. 5. A third filter which is provided on an optical path of light incident on a reflection surface of the reflection layer and allows transmission of a light component having a third wavelength out of the incident light, and a filter for the semi-transmission layer. 2. The apparatus according to claim 1, further comprising: a fourth filter provided on an optical path of the light incident on the one surface and allowing transmission of a light component having a fourth wavelength different from the third wavelength in the incident light. 3. The light mixing device according to claim 1. 6. A first light source which is perpendicularly incident on the incident surface of the transmission layer and emits light to the reflection surface of the reflection layer, and which is parallel to the light emitted from the first light source. ,
And a second emitting light incident on one surface of the semi-transmissive layer.
Wherein the distance from the reflecting surface of the reflective layer to the other surface of the semi-transmissive layer is 1/1/3 of the distance between the light emitted from the first light source and the light emitted from the second light source. (2)
^2. The light mixing device according to claim 1, wherein the ratio is ^1/2 . 7. A first beam splitter having a reflecting surface that transmits a part of incident light and reflects the rest, and both surfaces are parallel to the reflecting surface of the first beam splitter. A second beam splitter that transmits a part of the light incident from the surface, reflects the remainder, and transmits the light incident from the other surface, and both surfaces are in contact with one surface of the second beam splitter. An optical mixer having a third beam splitter that is parallel and transmits part of light incident from one surface, reflects the rest, and transmits light incident from the other surface;
A first light source that emits first emission light having a wavelength of
A second light source that emits second emission light having a different wavelength from the first light source, and a third light source that emits third emission light having a wavelength different from the first wavelength and the second wavelength.
A first collimating lens that converts the first outgoing light emitted from the first light source into parallel light, and guides the first outgoing light to a reflecting surface of the first beam splitter; A second collimating lens that converts the second light emitted from the second light source into parallel light and guides it to one surface of the second beam splitter; The third collimator guides the light emitted from the third beam splitter into parallel light and guides the light to one surface of the third beam splitter.
A lens device having a lens, a first filter provided on an optical path of the first outgoing light and an optical path of the transmitted light of the first beam splitter, and allowing transmission of the light having the first wavelength; A second filter that is provided on an optical path of the second outgoing light and the transmitted light of the second beam splitter, and that allows transmission of light having the second wavelength; A third filter provided on the optical path of the transmitted light of the third beam splitter, the third filter allowing transmission of light having the third wavelength, and the first beam splitter; A first photodetector, a second photodetector, and a second photodetector that receive the transmitted light of each of the second beam splitter and the third beam splitter and output a light reception signal corresponding to the amount of the received light. Light mixing device including a photodetector, having a third photodetector. 8. The first light source, the second light source, and the third light source are red, green, and blue light sources, and the first filter, the second filter, and the third filter. 8. The light mixing device according to claim 7, wherein the light source allows transmission of light components having red, green and blue wavelengths. 9. A first outgoing light amount adjusting means for adjusting an outgoing light amount of the first light source based on a light receiving signal of the first photodetector, and based on a light receiving signal of the second photodetector. Second emission light amount adjusting means for adjusting the emission light amount of the second light source, and third emission light amount adjustment for adjusting the emission light amount of the third light source based on a light reception signal of the third photodetector. The light mixing device according to claim 7, further comprising: means. 10. A light source substrate in which a plurality of openings for positioning a light source are formed, a plurality of light sources positioned in the plurality of openings of the light source substrate, and emitted light is emitted through the openings, and A light source module comprising: a first electrode formed and one electrode of each of the plurality of light sources is connected in common. 11. A color converter based on an input color signal.
A color light source for emitting a light beam, a light deflecting means for deflecting the color beam emitted from the color light source based on a given deflection control signal, and a color beam deflected by the light deflecting means. .Display panels for displaying images represented by beams;
A color image display device comprising: 12. The light deflecting means includes a mirror for reflecting the color beam, and mirror driving means capable of bending and twisting the mirror, wherein the mirror driving means comprises a color mirror. 7. The method of claim 1, wherein when deflecting the beam in the horizontal direction, either bending or twisting of the mirror is performed, and when deflecting the color beam in the vertical direction, bending or twisting of the mirror is performed. 12. The color image display device according to 11. 13. A semi-transmissive layer that reflects light incident from one surface and transmits light incident from another surface, and a light-transmitting layer that transmits light is alternately laminated. A method of manufacturing a light mixing device having a predetermined width and cutting at an angle of 45 degrees with one surface of the transflective layer. 14. The cut surface is further polished.
14. A method for manufacturing the light mixing device according to 13.