JPH1024581A - Liquid discharge, liquid discharge head, manufacture of liquid discharge head, and liquid discharge device using the liquid discharge head - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a liquid discharge method and a liquid discharge head which are capable of improving discharge efficiency by regulating a direction in which a bubble generated on a heating element grows and as well as a liquid discharge device using the liquid discharge head. SOLUTION: When a bubble generated grows in a bubble generating area 7, the free ends of movable members 731, 751 are displaced to the first liquid flow path 714 side by the pressure of bubble generation, and thereby, the pressure of bubble generation is directed to the discharge aperture 718 side along the movable members 731, 751 to efficiently discharge liquid from a discharge aperture 718. In addition, the movable member 751 is installed between a substrate 721 and a support member 734, so that crosstalk between the adjacent liquid flow paths is prevented from taking place.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid ejection head for ejecting a desired liquid by generating bubbles generated by applying thermal energy to the liquid, a head cartridge using the liquid ejection head, and a liquid ejection apparatus. In particular, the present invention relates to a liquid ejection head having a movable member that is displaced by utilizing the generation of bubbles, a head cartridge using the liquid ejection head, and a liquid ejection apparatus.

[0002] The present invention also relates to a facsimile having a printer, a copier, a communication system, and a printer for performing recording on a recording medium such as paper, thread, fiber, cloth, leather, metal, plastic, glass, wood, ceramics and the like. The present invention can be applied to a device such as a word processor having a unit, and further to an industrial recording device combined with various processing devices.

In the present invention, "recording" means not only giving an image having a meaning such as a character or a figure to a recording medium, but also giving an image having no meaning such as a pattern. Also means

[0004]

2. Description of the Related Art By giving energy such as heat to ink, a state change accompanied by a steep volume change (formation of bubbles) is caused in the ink, and the ink is ejected from an ejection port by an action force based on this state change. An ink jet recording method in which an image is formed by attaching the ink onto a recording medium, that is, a so-called bubble jet recording method, is conventionally known. As disclosed in U.S. Pat. No. 4,723,129 and the like, a recording apparatus using the bubble jet recording method includes a discharge port for discharging ink, and an ink flow communicating with the discharge port. A passage and an electrothermal converter as an energy generating means for discharging ink arranged in the ink flow path are generally arranged.

According to such a recording method, a high-quality image can be recorded at high speed and with low noise, and in a head performing this recording method, ejection ports for ejecting ink are arranged at a high density. Therefore, it has many advantages that a high-resolution recorded image and a color image can be easily obtained with a small device. For this reason, this bubble jet recording method has recently been used in many office devices such as printers, copiers, and facsimile machines, and has been used in industrial systems such as textile printing devices.

[0006] As the bubble jet technology is used for products in various fields, the following various requirements have been increasing in recent years.

[0007] For example, as a study on a demand for improvement in energy efficiency, optimization of a heating element such as adjusting the thickness of a protective film is mentioned. This method is effective in improving the propagation efficiency of generated heat to the liquid.

In addition, in order to obtain a high quality image, a driving condition for providing a liquid discharging method or the like in which the ink discharging speed is high and a good ink discharging can be performed based on stable bubble generation has been proposed. From the viewpoint of high-speed printing, there has also been proposed a print head having an improved flow path shape in order to obtain a liquid discharge head having a high filling (refilling) speed of the discharged liquid into the liquid flow path.

[0009] Of the flow path shapes, FIG.
(A) and (b) are disclosed in JP-A-63-199997.
No. 2, for example. The flow channel structure and the head manufacturing method described in this publication use a back wave (pressure in the direction opposite to the direction toward the discharge port, that is, pressure in the liquid chamber 1012) generated by the generation of bubbles. It is an invention which pays attention to. This back wave is known as loss energy because it is not energy directed toward the ejection direction.

The invention shown in FIGS. 38 (a) and 38 (b) discloses a valve 1010 which is located farther from the bubble generation region formed by the heating element 1002 and located on the side opposite to the discharge port 1011 with respect to the heating element 1002. I do.

In FIG. 38 (b), this valve 1010
Is manufactured by a manufacturing method using a plate material or the like.
It has an initial position as if stuck to the ceiling of the, and hangs down into the flow path 1003 as bubbles are generated. According to the present invention, a part of the back wave
It is disclosed as controlling the energy loss by controlling according to 010.

However, in this configuration, as will be understood from consideration of the case where bubbles are generated inside the flow path 1003 for holding the liquid to be discharged, suppression of a part of the back wave by the valve 1010 is not possible in the liquid discharge. Is not practical.

Originally, the back wave itself is not directly related to the ejection as described above. At the time when this back wave is generated in the flow path 1003, as shown in FIG. 38A, the pressure directly related to the discharge among the bubbles has already made the liquid dischargeable from the flow path 1003. Therefore,
It is apparent that the suppression of the back wave and its part does not significantly affect the ejection.

On the other hand, in the bubble jet recording method, since heating is repeated while the heating element is in contact with the ink, deposits are generated on the surface of the heating element due to scorching of the ink. In some cases, the generation of bubbles causes the generation of bubbles to be unstable, making it difficult to discharge ink satisfactorily. Further, even in the case where the liquid to be discharged is a liquid which is easily deteriorated by heat or a liquid in which foaming is difficult to be sufficiently obtained, a method for discharging the liquid to be discharged without changing the quality is desired. .

[0015] From such a viewpoint, the liquid (foaming liquid) that generates bubbles by heat and the liquid (ejected liquid) to be ejected are separated liquids, and the ejected liquid is ejected by transmitting the pressure due to foaming to the ejected liquid. The method is described in JP-A-61-69467, JP-A-55-81172, U.S. Pat.
No. 80,259 and the like. In these publications, the ink, which is the ejection liquid, and the foaming liquid are completely separated by a flexible film such as silicon rubber so that the ejection liquid does not come into direct contact with the heating element, and the pressure due to the foaming of the foaming liquid is controlled. The configuration is such that the liquid is transmitted to the discharge liquid by deformation of the flexible film. Such a configuration achieves prevention of deposits on the surface of the heating element, improvement in the degree of freedom in selecting the liquid to be discharged, and the like.

However, as described above, in the head having a structure in which the discharge liquid and the foaming liquid are completely separated, the pressure at the time of foaming is transmitted to the discharge liquid by expansion and contraction deformation of the flexible film. Is considerably absorbed by the flexible membrane. In addition, since the amount of deformation of the flexible film is not so large, the effect of separating the ejection liquid and the foaming liquid can be obtained, but there is a possibility that the energy efficiency and the ejection force are reduced.

In the above-described conventional device, a substrate having a groove shape for forming a liquid flow path is directly pressed on a substrate on which a heating element is formed. Is affected by the flatness of

[0018]

SUMMARY OF THE INVENTION The present invention is based on the fundamental discharge characteristics of a conventional system in which a bubble (particularly a bubble accompanying film boiling) is formed in a liquid flow path to discharge a liquid. The main task is to raise the level to a level that cannot be predicted in the past, from a viewpoint that could not be considered in the past.

The inventors return to the principle of droplet ejection,
The present inventors have conducted intensive studies to provide a novel droplet discharging method using bubbles, which has not been obtained in the past, and a head and the like used for the method. At this time, the first technology analysis starting from the operation of the movable member in the liquid flow path, which is to analyze the principle of the mechanism of the movable member in the flow path, and the second technology starting from the principle of discharging droplets by bubbles The analysis, and further, the third analysis starting from the bubble formation region of the heating element for forming bubbles is performed.

Based on these analyses, the arrangement of the fulcrum and the free end of the movable member is determined to be such that the free end is located on the discharge port side, that is, on the downstream side, and the movable member faces the heating element or the bubble generation area. This has led to the establishment of a completely new technology for actively controlling air bubbles.

Next, it has been found that considering the energy that the bubble itself gives to the ejection amount, consideration of the growth component on the downstream side of the bubble is the largest factor that can significantly improve the ejection characteristics. That is, it has been found that the efficient conversion of the growth component on the downstream side of the bubble in the ejection direction leads to the improvement of the ejection efficiency and the ejection speed. From this,
The inventors have reached a very high technical level as compared with the conventional state of the art in which the growth component on the downstream side of the bubble is positively moved to the free end side of the movable member.

Further, a heat generating area for forming bubbles,
For example, a structural element such as a movable member or a liquid flow path that is involved in the growth of the downstream side of the bubble, such as the area center on the surface that controls foaming, downstream from the center line passing through the area center in the liquid flow direction of the electrothermal converter. It has been found that it is also preferable to take into account the above.

On the other hand, it has been found that the refill speed can be greatly improved by considering the arrangement of the movable member and the structure of the liquid supply path.

In the above-described conventional device, since a substrate having a groove shape for forming a liquid flow path is directly pressed on a substrate on which a heating element is formed, the accuracy of the pressure contact is reduced. When the flatness is low, crosstalk occurs between adjacent liquid flow paths.

The inventors of the present invention have found the knowledge obtained in the above research and the superior principle of liquid ejection from a comprehensive viewpoint, and have accomplished the present invention.

The present invention has been made in view of the above-mentioned problems of the prior art, and a first object of the present invention is to regulate the growth direction of bubbles generated on a heating element. An object of the present invention is to provide a liquid discharge method, a liquid discharge head, and a liquid discharge apparatus using the liquid discharge head, which can improve discharge efficiency.

A second object is to provide a liquid discharge method, a liquid discharge head, and a liquid discharge head which can prevent crosstalk between adjacent liquid flow paths without being affected by the flatness of a substrate. It is to provide a liquid ejection device.

[0028]

According to the present invention, there is provided a liquid ejecting method for ejecting a liquid by generating bubbles, wherein a plurality of heating elements for applying heat to generate bubbles in the liquid are provided. And a groove for forming a plurality of liquid flow paths through which the liquid discharged from the plurality of discharge ports that discharge the liquid flows by being joined to the first substrate. A second substrate and a second position, which is located on the heating element and faces a bubble generation region that is a region where bubbles are generated, and is located farther from the bubble generation region than the first position and the first position. A first movable member that can be displaced between the first substrate and the second substrate, and a first movable member that can be displaced between the first substrate and the second substrate at a joint portion between the first substrate and the second substrate. And a third position and the bubble generation region more than the third position. A head having a second movable member that can be displaced between a fourth position far from the first position and the first movable member by the pressure based on the generation of bubbles in the bubble generation region. The air bubble is displaced from a position to the second position to expand the air bubble more downstream than in the direction toward the discharge port.

Further, the first movable member and the second movable member are formed of the same member.

Further, the length from the fulcrum to the free end of the second movable member is shorter than the width of the liquid flow path.

Further, the second movable member is characterized in that the second movable members in the same liquid flow path are symmetrical left and right in the flow direction of the liquid.

Further, the length of the second movable member in the liquid flow direction is longer than the length of the heating element in the liquid flow direction.

Further, the second movable member is made of a nickel plate.

In a liquid discharging method for discharging a liquid by generating bubbles, a first substrate provided with a plurality of heating elements for applying heat to generate bubbles in the liquid is bonded to the first substrate. The second substrate having grooves for forming a plurality of liquid flow paths through which the liquid discharged from the plurality of discharge ports for discharging the liquid flows, the first substrate and the second substrate Provided between the first substrate and the second substrate at a joint portion with the substrate,
Using a head having a movable member that can be displaced between a third position and a fourth position farther from the heating element than the third position, the movable member is moved to generate air bubbles on the heating element. Is displaced from the third position to the fourth position by the pressure based on the pressure, and the bubbles are greatly expanded toward the discharge port side, and the pressure is applied to the joint between the first substrate and the second substrate. Is prevented from being transmitted.

Further, the movable member is provided so that the free ends of the movable members in the same liquid flow path face each other.

Further, the length from the fulcrum to the free end of the movable member is shorter than the width of the liquid flow path.

Further, the movable members are characterized in that the movable members in the same liquid flow path are symmetrical in the left-right direction in the flow direction of the liquid.

Further, the length of the movable member in the flow direction of the liquid is longer than the length of the heating element in the flow direction of the liquid.

Further, the movable member is made of a nickel plate.

Further, the heating element is an electrothermal conversion element.

In a liquid ejection head for ejecting liquid by generating bubbles, a first substrate provided with a plurality of heating elements for applying heat to generate bubbles in the liquid;
A second substrate having a groove for forming a plurality of liquid flow paths through which liquids discharged from a plurality of discharge ports that discharge the liquid by being bonded to the first substrate;
A bubble generation region that is located on the heating element and is a region where the bubbles are generated, and is provided facing the bubble generation region, and is located farther from the bubble generation region than the first position and the first position. A first movable member displaceable between a second position and a first movable member on both sides of the first movable member in the vertical direction of the liquid flow;
The first substrate and the second substrate are provided between the first substrate and the second substrate at a joint portion between the first substrate and the second substrate. A second movable member capable of being displaced between a fourth position far from the region and the first movable member, wherein the first movable member is moved to the first position by a pressure based on the generation of bubbles in the bubble generation region. From the third position to the fourth position, and the second movable member is displaced from the third position to the fourth position by a pressure based on the generation of bubbles in the bubble generation region. .

Further, the first movable member and the second movable member are formed of the same member.

Also, the length from the fulcrum to the free end of the second movable member is shorter than the width of the liquid flow path.

Further, the second movable member is characterized in that the second movable members in the same liquid flow path are bilaterally symmetrical in the flow direction of the liquid.

The length of the second movable member in the flow direction of the liquid is longer than the length of the heating element in the flow direction of the liquid.

The liquid discharge head is characterized in that the second movable member is made of a nickel plate.

Also, in a liquid ejection head for ejecting liquid by generating bubbles, a first substrate provided with a plurality of heating elements for applying heat to generate bubbles in the liquid;
A second substrate having a groove for forming a plurality of liquid flow paths through which liquids discharged from a plurality of discharge ports that discharge the liquid by being bonded to the first substrate;
A third portion between the first substrate and the second substrate, the heating element being located between the first substrate and the second substrate at a joint portion between the first substrate and the second substrate; A movable member capable of being displaced between a fourth position far from the third position and the movable member moving from the third position to the fourth position by a pressure based on the generation of bubbles on the heating element. It is characterized by being displaced.

Further, the movable member is provided so that the free ends of the movable members in the same liquid flow path face each other.

Further, the length from the fulcrum to the free end of the movable member is shorter than the width of the liquid flow path.

Further, the movable members are characterized in that the movable members in the same liquid flow path are symmetrical left and right in the liquid flow direction.

The length of the movable member in the liquid flow direction is longer than the length of the heating element in the liquid flow direction.

Further, the movable member is made of a nickel plate.

Further, the heating element is an electrothermal conversion element.

The liquid discharge head further includes a drive signal supply means for supplying a drive signal for discharging liquid from the liquid discharge head.

Further, the liquid discharge head includes a recording medium transport means for transporting a recording medium which receives the liquid discharged from the liquid discharge head.

Further, the recording is performed by discharging ink from the liquid discharge head and attaching the ink to recording paper.

The present invention is also characterized in that recording is performed by discharging ink from the liquid discharge head and attaching the ink to the cloth.

The recording is performed by discharging ink from the liquid discharge head and attaching the ink to plastic.

The recording is performed by ejecting ink from the liquid ejection head and attaching the ink to metal.

Further, the recording is performed by ejecting ink from the liquid ejection head and attaching the ink to wood.

The present invention is also characterized in that recording is performed by discharging ink from the liquid discharge head and attaching the ink to leather.

[0062] The present invention is also characterized in that color recording is performed by discharging recording liquids of a plurality of colors from the liquid discharge head and attaching the recording liquids of the plurality of colors to a recording medium.

Further, a plurality of the ejection ports are arranged over the entire width of the recordable area of the recording medium.

A plurality of discharge ports for discharging the liquid, a plurality of liquid flow paths through which the liquid discharged from the plurality of discharge ports flows, and a plurality of heating elements for applying heat to generate bubbles in the liquid. And a groove for forming a plurality of liquid flow paths through which the liquid discharged from the plurality of discharge ports discharging the liquid flows by being joined to the first substrate. A second substrate provided, a bubble generation region located on the heating element, wherein the bubble is generated, and a first position and a first position provided facing the bubble generation region. A first movable member that can be displaced between a second position farther from the bubble generation region than the first substrate and the first substrate on both sides of the first movable member in the vertical direction of the liquid flow. The first substrate and the second substrate at a joint portion with the second substrate; And a second movable member that can be displaced between a third position and a fourth position farther from the bubble generation region than the third position. A method for manufacturing a liquid ejection head, wherein the movable member and the second movable member are formed of the same member, wherein the distance between the second movable members in the same liquid flow path is
The width is increased as the distance from the discharge port increases.

(Operation) In the present invention configured as described above, when the bubbles generated in the bubble generation region grow, the free ends of the first and second movable members are moved by the pressure of the bubble generation. The first liquid flow path and the second liquid flow path.
The liquid flow path is in communication with the liquid flow path.

As described above, the displacement of the first and second movable members causes the pressure due to the generation of air bubbles to be increased by the first and second movable members.
The liquid is directed toward the discharge port side along the movable member, and the liquid is discharged efficiently from the discharge port. In addition, since the second movable member is displaced toward the first liquid flow path, the pressure due to the generation of bubbles is less likely to be transmitted to the joint between the first substrate and the second substrate. Crosstalk between the channels is prevented. Note that crosstalk is prevented even when the second movable member does not move.

[0067]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Before describing embodiments of the present invention, the principle of liquid ejection in a liquid ejection head to which the present invention is applied will be described with reference to the drawings.

(First Embodiment) First, in this embodiment,
An example will be described in which the ejection force and the ejection efficiency are improved by controlling the propagation direction of the pressure based on the bubbles and the growth direction of the bubbles for ejecting the liquid.

FIG. 1 is a schematic sectional view showing an example of the liquid discharge head of the present invention, and FIG. 2 is a partially cutaway perspective view of the liquid discharge head of the present invention.

The liquid discharge head of this embodiment is a heating element 2 (40 μm in this embodiment) that applies thermal energy to liquid as a discharge energy generating element for discharging liquid.
A heating resistor having a shape of m × 105 μm) is provided on the element substrate 1, and a liquid flow path 10 is arranged on the element substrate 1 corresponding to the heating element 2. The liquid flow path 10 communicates with the discharge port 18 and also communicates with a common liquid chamber 13 for supplying liquid to the plurality of liquid flow paths 10, and has an amount corresponding to the liquid discharged from the discharge port 18. Liquid is received from this common liquid chamber 13.

The heating element 2 is provided on the element substrate 1 in the liquid flow path 10.
A plate-shaped movable member 31 made of an elastic material such as metal and having a flat portion is provided in a cantilever shape so as to face the liquid passage, and one end of the movable member 31 has a liquid flow path. 10
Is fixed to a base (supporting member) 34 formed by patterning a photosensitive resin or the like on the wall or the element substrate 1.
Thus, the movable member 31 is held and forms a fulcrum (fulcrum portion) 33.

The movable member 31 is provided with a fulcrum (fulcrum portion; fixed end) 3 at the upstream side of a large flow flowing from the common liquid chamber 13 through the movable member 31 to the discharge port 18 by the liquid discharging operation.
3 and a distance of about 15 μm from the heating element 2 so as to cover the heating element 2 at a position facing the heating element 2 so as to have a free end (free end portion) 32 downstream of the fulcrum 33. Are arranged at a distance. The space between the heating element 2 and the movable member 31 is the bubble generation area 11. Note that the types, shapes, and arrangements of the heating element 2 and the movable member 31 are not limited thereto, and may be any shapes and arrangements that can control the growth of bubbles and the propagation of pressure as described later. In addition, the above-described liquid flow path 10 has a first liquid flow path 14 that directly communicates with the discharge port 18 with the movable member 31 as a boundary, for the purpose of describing the flow of the liquid to be described later. 11 and a second liquid flow path 16 having a liquid supply path 12.

The movable member 31 is generated by causing the heating element 2 to generate heat.
Heat is applied to the liquid in the bubble generation region 11 between the heater and the heating element 2 to generate bubbles 40 in the liquid based on the film boiling phenomenon as described in US Pat. No. 4,723,129. The pressure based on the generation of the bubble 40 and the bubble 40 act on the movable member 31 preferentially.
(C) Or, as shown in FIG. 2, the displacement is made so as to open largely toward the discharge port 18 around the fulcrum 33. Movable member 3
1 or the state of the displacement, the propagation of the pressure based on the generation of the bubble 40 and the growth of the bubble 40 themselves are caused by the ejection port 18.
Guided to the side.

Here, one of the ejection principles in the present invention will be described.

One of the important principles of the present invention is that the movable member 31 arranged to face the bubble 40
From the first position in the steady state to the second position, which is the position after the displacement, based on the pressure or the bubble 40 itself,
This displacement of the movable member 31 guides the pressure accompanying the generation of the bubbles 40 and the bubbles 40 themselves to the downstream side where the discharge ports 18 are arranged.

This principle will be described in more detail in comparison with a conventional liquid flow path structure.

FIG. 3 is a schematic diagram showing pressure propagation from bubbles in a conventional head, and FIG. 4 is a schematic diagram showing pressure propagation from bubbles in a head of the present invention. Here, the propagation direction of the pressure in the direction of the discharge port is represented by V _A , and the propagation direction of the pressure to the upstream side is represented by V _B.

A conventional head as shown in FIG.
The direction of pressure propagation by the generated bubbles 40
There is no configuration. Therefore, the pressure propagation direction of the bubble 40 is V₁
~ V₈As shown in the figure, the direction is perpendicular to the bubble surface.
I was right. Among them, it has the greatest effect on liquid ejection
V_AA component having a component in the pressure propagation direction in the direction₁~ V_Four
That is, the pressure of the part closer to the discharge port than the position of almost half of the bubble
Direction component of propagation, liquid discharge efficiency, liquid discharge force, discharge speed
This is an important part that directly contributes to the degree. Further V ₁Is a vomit
Outgoing direction V_AWorks efficiently because it is closest to the direction of_Four
Is V_AThe direction component toward is relatively small.

On the other hand, in the case of the present invention shown in FIG. 4, the movable member 31 moves downstream in the pressure propagation directions V _{1 to} V ₄ of the bubbles which are oriented in various directions as in the case of FIG. Side (discharge port side), and converts the pressure into the _VA propagation direction, whereby the pressure of the bubbles 40 directly and efficiently contributes to the discharge. Then, the bubble growth direction itself is guided in the downstream direction similarly to the pressure propagation directions V _{1 to} V _4, and grows more downstream than upstream. As described above, by controlling the growth direction itself of the bubble by the movable member and controlling the pressure propagation direction of the bubble, it is possible to achieve a fundamental improvement in the discharge efficiency, the discharge force, the discharge speed, and the like.

Next, returning to FIG. 1, the ejection operation of the liquid ejection head of this embodiment will be described in detail.

FIG. 1A shows a state before energy such as electric energy is applied to the heating element 2.
Is a state before generating heat.

What is important here is that the movable member 31 is provided at a position facing at least a downstream portion of the bubble generated by the heat generated by the heat generating element 2. That is, on the liquid flow path structure, at least downstream of the area center 3 of the heat generating element 2 (through the area center 3 of the heat generating element, it is orthogonal to the length direction of the flow path so that the downstream side of the bubble acts on the movable member 31. The movable member 31 is disposed to a position (downstream from the line).

FIG. 1B shows that the heating element 2 generates heat when electric energy or the like is applied to the heating element 2, and the generated heat heats a part of the liquid filling the bubble generation region 11 to cause film boiling. This is a state in which accompanying air bubbles 40 are generated.

At this time, the movable member 31 is displaced from the first position to the second position by the pressure based on the generation of the bubble 40 so as to guide the pressure propagation direction of the bubble 40 toward the discharge port 18. What is important here is that the movable member 31
Is disposed on the downstream side (discharge port side), and a fulcrum 33
Is disposed on the upstream side (common liquid chamber side), and at least a part of the movable member 31 faces the downstream portion of the heating element 2, that is, the downstream portion of the bubble 40.

FIG. 1C shows a state in which the bubbles 40 have further grown, but the movable member 31 has been further displaced in accordance with the pressure caused by the generation of the bubbles 40. The generated bubble 40 grows larger downstream than upstream and the first bubble of the movable member 31
(The dotted line). As described above, the movable member 31 is gradually displaced in accordance with the growth of the bubble 40, so that the pressure propagation direction of the bubble 40 and the direction in which the accumulation is easily moved, that is, the growth direction of the bubble 40 to the free end side, are discharged. The fact that the ink can be uniformly directed to the outlet 18 is also considered to increase the discharge efficiency. The movable member 31 hardly hinders the transmission of the bubbles 40 and the bubbling pressure toward the discharge port 18, and the direction in which the pressure is propagated and the direction in which the bubbles 40 grow in accordance with the magnitude of the propagating pressure. Can be controlled.

FIG. 1D shows a state in which the bubble 40 contracts and disappears due to the decrease in the internal pressure of the bubble after the above-mentioned film boiling.

The movable member 31 displaced to the second position
The initial position (first position in FIG. 1A) of FIG.
Position). Further, at the time of defoaming, in order to compensate for the contracted volume of the bubbles 40 in the bubble generation region 11 and to compensate for the volume of the discharged liquid, the flow V from the upstream side (B), that is, from the common liquid chamber 13 side. _{Like D1} , _VD2 ,
Come flows liquid as V _c of the flow from the discharge port 18 side.

The operation of the movable member and the discharge operation of the liquid accompanying the generation of bubbles have been described above. The liquid refill in the liquid discharge head of the present invention will be described in detail below.

The liquid supply mechanism of the present invention will be described in more detail with reference to FIG.

After the bubble 40 has reached the maximum volume state and enters the defoaming process after FIG. 1 (c), a volume of liquid that compensates for the defoamed volume is supplied to the bubble generation region 11 in the first liquid flow path 14. Of the second liquid flow path 16 and the common liquid chamber side 13 of the second liquid flow path 16. In the conventional liquid flow path structure without the movable member 31, the amount of the liquid flowing from the discharge port side to the defoaming position and the amount of the liquid flowing from the common liquid chamber are the same as the part closer to the discharge port than the bubble generation region and the common liquid. This is due to the magnitude of the flow resistance with the part close to the chamber (based on the flow path resistance and the inertia of the liquid).

For this reason, when the flow resistance on the side close to the discharge port is small, a lot of liquid flows from the discharge port side to the defoaming position, and the retreat amount of the meniscus becomes large. In particular, as the flow resistance on the side close to the discharge port is reduced to increase the discharge efficiency in order to increase the discharge efficiency, the meniscus M at the time of defoaming becomes larger, the refill time becomes longer, and the refill time becomes longer, and high-speed printing is performed. Was to hinder.

On the other hand, in this embodiment, since the movable member 31 is provided, the volume W of the bubble is reduced by the first member of the movable member 31.
When W1 is on the upper side and W2 is on the bubble generation area 11 side with respect to the position, the meniscus stops retreating when the movable member 31 returns to the original position at the time of defoaming, and the liquid supply for the remaining volume of W2 is thereafter performed. It is done mainly by the liquid supply from the flow V _D2 in the second flow path 16. Thus, while the amount corresponding to about half of the volume of the bubble W has conventionally been the meniscus retraction amount, it has become possible to suppress the meniscus retreat amount to a smaller amount, which is about half of W1.

Further, the liquid for the volume of W2 is supplied along the surface of the movable member 31 on the side of the heating element by using the pressure at the time of defoaming, mainly from the upstream side (V _D2 ) of the second liquid flow path 16. Faster refills were achieved because they could be forced.

The characteristic feature here is that when refilling is performed using the pressure at the time of defoaming with the conventional head, the vibration of the meniscus is increased and the image quality is degraded. Movable member 3 for high speed refill
1, the flow of the liquid on the discharge port 18 side between the region of the first liquid flow path 14 on the discharge port 18 side and the bubble generation region 11 is suppressed, so that the vibration of the meniscus can be extremely reduced.

As described above, the present invention achieves high-speed refilling by forcibly refilling the foaming area via the liquid supply path 12 of the second flow path 16 and suppressing the meniscus retreat and vibration described above. When used in the fields of stable printing, high-speed repetitive ejection, and printing, improvement in image quality and high-speed printing can be realized.

In the structure of the present invention, the following effective functions are further provided.

That is, propagation of the pressure due to the generation of bubbles to the upstream side (back wave) is suppressed. Of the bubbles generated on the heating element 2, most of the pressure caused by the bubbles on the common liquid chamber 13 side (upstream side) is a force (back wave) for pushing back the liquid toward the upstream side. This back wave,
This caused the pressure on the upstream side, the amount of liquid movement due thereto, and the inertial force accompanying the liquid movement, which reduced the refilling of the liquid into the liquid flow path and hindered high-speed driving.

In the present invention, the refill supply is further improved by first suppressing these effects on the upstream side by the movable member 31.

Next, further characteristic structures and effects of the present embodiment will be described below.

The second liquid flow path 16 in the present embodiment has a liquid supply path 12 having an inner wall which is connected to the heating element 2 substantially flatly (the heating element surface is not greatly reduced) upstream of the heating element 2. ing. In such a case, the bubble generation region 11
The supply of the liquid to the surface of the heating element 2 is performed by the movable member 31.
Along the side surface closer to the bubble generation region 11 of the carried out as V _D2. Therefore, stagnation of the liquid on the surface of the heating element 2 is suppressed, and deposition of gas dissolved in the liquid,
So-called residual air bubbles remaining without defoaming are easily removed,
Also, the heat storage in the liquid does not become too high. Therefore, more stable generation of bubbles can be repeated at high speed. In the present embodiment, the liquid supply path 12 having a substantially flat inner wall has been described. However, the present invention is not limited to this. Any liquid supply path that has a gentle inner wall that is smoothly connected to the surface of the heating element 2 can be used. Any shape that does not cause stagnation of liquid on the heating element 2 or large turbulence in liquid supply may be used.

Further, the supply of the liquid to the bubble generation region 11 is performed through the side (slit 35) of the movable member 31 so as to supply V _D1.
Some are done from. However, as shown in FIG. 1, a large movable member 31 is used to cover the entire bubble generating region 11 (cover the heating element surface) in order to more effectively guide the pressure at the time of bubble generation to the discharge port 18. Is returned to the first position, so that the bubble generation region 11 and the first liquid flow path 1
If the 4 region near the discharge port 18 of the form, such as the flow resistance of the liquid is increased, the bubble generating area 11 from the aforementioned V _D1
The flow of the liquid towards is blocked. However, in the head structure of the present invention, the flow V _D1 for supplying the liquid to the bubble generation region 11 has a very high liquid supply performance, and the movable member 31 covers the bubble generation region 11. Even if a structure that seeks to improve the discharge efficiency is adopted, the liquid supply performance will not be reduced.

FIG. 5 is a schematic diagram for explaining the flow of the liquid according to the present invention.

The positions of the free end 32 and the fulcrum 33 of the movable member 31 are such that the free end 32 is relatively downstream from the fulcrum 33 as shown in FIG. With such a configuration, functions and effects such as guiding the pressure propagation direction and growth direction of bubbles to the ejection port 18 side during foaming described above can be efficiently realized. Further, this positional relationship achieves not only a function and an effect on discharge, but also an effect that the flow resistance to the liquid flowing through the liquid flow path 10 can be reduced and the refill can be performed at a high speed even when the liquid is supplied. As shown in FIG. 5, when the meniscus M retracted by the discharge returns to the discharge port 18 by capillary force or when liquid is supplied to the defoaming, the liquid flow path 10 (the first liquid Channel 14, second
This is because the free end 32 and the fulcrum 33 are arranged so as not to go against the flows S ₁ , S ₂ , and S ₃ flowing through the liquid flow path 16 (including the liquid flow path 16).

Supplementally, in FIG. 1 of the present embodiment, as described above, the free end 32 of the movable member 31 has the area center 3 (the heating element 2) that divides the heating element 2 into an upstream area and a downstream area. It extends with respect to the heating element 2 so as to face a position downstream of a line passing through the area center (center) and orthogonal to the length direction of the liquid flow path). As a result, the movable member 31 receives a pressure or a bubble 40 that greatly contributes to the discharge of the liquid generated downstream of the area center position 3 of the heating element 2, and the pressure and the bubble 40 can be guided to the discharge port 18 side. In addition, the discharge efficiency and the discharge force can be fundamentally improved.

Further, many effects are obtained by utilizing the upstream side of the bubble 40 in addition.

In the configuration of the present embodiment, the movable member 3
The fact that the free end of 1 is performing instantaneous mechanical displacement,
It is considered that this effectively contributes to the ejection of the liquid.

(Second Embodiment) FIG. 6 is a partially cutaway perspective view of a liquid discharge head according to a second embodiment of the present invention.

In FIG. 6, A shows a state where the movable member 31 is displaced (bubbles are not shown), and B shows a state where the movable member 31 is displaced.
Reference numeral 1 denotes a state of an initial position (first position). In the state of B, it is assumed that the bubble generation region 11 is substantially sealed with respect to the discharge port 18 (here, A is not shown). , B, there is a flow path wall separating the flow path and the flow path).

The movable member 31 in FIG. 6 has two bases 34 at the side portions, and the liquid supply path 12 is provided between them. Thus, liquid can be supplied along the surface of the movable member 31 on the side of the heating element 2 and from the liquid supply path having a surface that is substantially flat or smoothly connected to the surface of the heating element 2.

Here, at the initial position (first position) of the movable member 31, the movable member 31 is close to or in close contact with the heating element downstream wall 36 and the heating element side wall 37 arranged downstream and laterally of the heating element 2. It is substantially sealed on the discharge port 18 side of the bubble generation region 11. Therefore, the pressure of the bubbles at the time of foaming, particularly the pressure on the downstream side of the bubbles, is not released and the movable member 31
Can be concentrated on the free end side.

Further, at the time of defoaming, the movable member 31 returns to the first position, and at the time of defoaming, the liquid is supplied onto the heating element 2 because the discharge port 18 side of the bubble generation region 11 is substantially closed.
Various effects described in the above embodiment, such as suppression of meniscus retraction, can be obtained. In addition, the same function and effect as those of the above embodiment can be obtained in the effect regarding the refill.

In this embodiment, as shown in FIGS. 2 and 6, the base 34 for supporting and fixing the movable member 31 is
The liquid is supplied to the liquid supply path 12 as described above by providing a base 34 having a smaller width than the liquid flow path 10, provided further upstream. Further, the shape of the base 34 is not limited to this, and any shape can be used as long as the refill can be performed smoothly.

In the present embodiment, the distance between the movable member 31 and the heating element 2 is set to about 15 μm. However, any distance may be used as long as the pressure due to the generation of bubbles is sufficiently transmitted to the movable member.

(Third Embodiment) FIG. 7 is a partially cutaway perspective view of a liquid discharge head according to a third embodiment of the present invention.

FIG. 7 shows a bubble generation area in one liquid flow path.
FIG. 4 is a diagram showing a positional relationship between bubbles generated therein and a movable member 31 and further clarifying a liquid discharging method and a refilling method of the present invention.

In many of the above-described embodiments, the movable member 31
The pressure of the generated bubble is concentrated on the free end of the discharge port 1 and the movement of the bubble is simultaneously performed with the steep movement of the movable member 31.
Achieving concentration on the 8 side has been achieved.

On the other hand, in the present embodiment, the downstream portion of the bubble, which is on the side of the discharge port 18 of the bubble directly acting on the droplet discharge, is provided at the free end side of the movable member 31 while giving the degree of freedom of the generated bubble. It regulates.

In terms of structure, FIG. 7 is different from FIG. 2 (first embodiment) in that the barrier located at the downstream end of the bubble generation area provided on the element substrate 1 in FIG. Is not provided in the present embodiment. That is, the free end region and the both end regions of the movable member 31 are opened without substantially closing the bubble generation region with respect to the discharge port region, and this configuration is the present embodiment.

In the present embodiment, since the bubble growth at the downstream end portion of the downstream portion directly acting on the droplet discharge of the bubble is allowed, the pressure component is effectively used for the discharge. In addition, at least the upward pressure (the component force of V ₂ , V ₃ and V _{4 in} FIG. 3) of the downstream portion is applied to the free end portion of the movable member 31 to the bubble growth at the downstream end portion. Therefore, the discharge efficiency is improved in the same manner as in the above-described embodiment. Compared to the above embodiment, this embodiment is
The response to the driving of the heating element 2 is excellent.

This embodiment has a manufacturing advantage because it is simple in structure.

The fulcrum of the movable member 31 of this embodiment is fixed to one base 34 having a small width relative to the surface of the movable member 31. Therefore, the liquid is supplied to the bubble generation region 11 at the time of defoaming through both sides of the base (see arrows in the figure). This base may have any structure as long as it secures supply.

In the case of the present embodiment, the refilling at the time of supplying the liquid is controlled by the presence of the movable member 31 so that the flow into the bubble generation region from above is controlled due to the defoaming of the bubbles. This is excellent for the bubble generation structure of the above. Of course, this can also reduce the amount of meniscus retraction.

As a modified example of this embodiment, it is preferable that only the both ends (one or both ends) of the movable member 31 with respect to the free end be substantially sealed with respect to the bubble generation region 11. According to this configuration, the movable member 3
The bubble discharge port 1 described above also describes the pressure toward the side 1
Because it can be used by changing to the growth of the 8 side end,
The ejection efficiency is further improved.

(Fourth Embodiment) An example in which the ejection force of the liquid due to the mechanical displacement described above is further improved will be described in this embodiment.

FIG. 8 is a sectional view of a liquid discharge head according to a fourth embodiment of the present invention.

In FIG. 8, the free end 3 of the movable member 31
2 is located further downstream of the heating element 2,
The movable member 31 extends. This allows the free end 32
The displacement speed of the movable member 31 at the position can be increased, and the generation of the ejection force due to the displacement of the movable member 31 can be further improved.

Further, since the free end 32 is closer to the ejection port 18 side than in the previous embodiment, the growth of the bubble 40 can be concentrated on a more stable directional component. Can be.

The movable member 31 is displaced at the displacement speed R1 in accordance with the bubble growth speed at the pressure center of the bubble 40. The free end 32 farther from the fulcrum 33 than this position has a higher speed. Displaced at R2. As a result, the free end 32 is mechanically acted on the liquid at a high speed to cause the liquid to move, thereby increasing the discharge efficiency.

Further, the free end shape has a shape perpendicular to the liquid flow as in FIG. 7, so that the pressure of the bubble 40 and the mechanical action of the movable member 31 contribute to the discharge more efficiently. Can be done.

(Fifth Embodiment) FIG. 9 is a schematic sectional view of a liquid ejection head according to a fifth embodiment of the present invention.

The structure of this embodiment is different from that of the previous embodiment.
The area directly communicating with the discharge port 18 does not have a flow path shape communicating with the liquid chamber side, so that the structure can be simplified.

All the liquid supply is performed only from the liquid supply passage 12 along the surface of the movable member 31 on the foaming region side. The positional relationship between the free end 32 of the movable member 31 and the fulcrum 33 with respect to the discharge port 18 and the heat generation The structure facing the body 2 is the same as in the above-described embodiment.

This embodiment realizes the above-mentioned effects such as the discharge efficiency and the liquid supply property. In particular, almost all the liquid supply is performed by suppressing the meniscus retreat and utilizing the pressure at the time of defoaming. Forcible refilling is performed using the pressure at the time of defoaming.

FIG. 9 (a) shows a state in which the liquid is foamed by the heating element 2, and FIG. 9 (b) shows a state in which the foaming is contracting. liquid supply by is performed restored and S ₃ to.

In FIG. 9C, the movable member 31 has a slight meniscus retreat M when the initial member returns to the initial position.
Is in a state of being refilled by the capillary force near the discharge port 18 after defoaming.

(Sixth Embodiment) In this embodiment, the principle of the main liquid ejection is the same as in the previous embodiment, but in this embodiment, the liquid flow path has a multi-flow path configuration. Further, the liquid (foaming liquid) to be foamed by applying heat can be separated from the liquid (ejected liquid) mainly discharged.

FIG. 10 is a sectional view of a liquid discharge head according to a sixth embodiment of the present invention, and FIG. 11 is a partially cutaway perspective view of the liquid discharge head according to the sixth embodiment of the present invention. .

In the liquid discharge head of this embodiment, a second liquid flow path 16 for bubbling is provided on the element substrate 1 on which the heating element 2 for applying thermal energy for generating bubbles in the liquid is provided. For the discharge liquid directly connected to the discharge port 18
A liquid flow path 14 is provided.

The upstream side of the first liquid flow path 14 communicates with a first common liquid chamber 15 for supplying a discharge liquid to the plurality of first liquid flow paths 14, and the upstream of the second liquid flow path 16. The side has multiple second
Second common liquid chamber 17 for supplying foaming liquid to liquid flow path 16
Is in communication with

However, when the same liquid is used for the foaming liquid and the discharge liquid, the common liquid chamber may be made one and shared.

A separation wall 30 made of an elastic material such as metal is disposed between the first and second liquid flow paths, and the first and second liquid flow paths 14 and 16 are separated from each other. And are divided. In the case where the foaming liquid and the discharge liquid are liquids that should not be mixed as much as possible, this separation wall 30
It is better to completely separate the flow of the liquid between the first liquid flow path 14 and the second liquid flow path 16 as much as possible. However, if there is no problem even if the foaming liquid and the discharge liquid are mixed to some extent, Wall 3
0 does not have to have the function of complete separation.

The separation wall 30 located in the projection space above the heating element 2 in the plane direction (hereinafter, referred to as the discharge pressure generation area; the area A in FIG. 10 and the air bubble generation area 11 in FIG. As a result, the discharge port 18 side (downstream side of the liquid flow) is a free end and the common liquid chamber (15, 17) side has a fulcrum 33
Are located on the movable member 31 having a cantilever shape. Since the movable member 31 is disposed so as to face the bubble generation region 11 (B), the first liquid flow path 14 is formed by foaming of the foaming liquid.
It operates so that it may open toward the discharge port 18 side (arrow direction in the figure). In FIG. 11 as well, a second liquid flow path 16 is formed on the element substrate 1 on which the heating resistor as the heating element 2 and the wiring electrode 5 for applying an electric signal to the heating resistor are arranged. Separation wall 30 is arranged via a space to be formed.

The relationship between the arrangement of the fulcrum 33 and the free end 32 of the movable member 31 and the arrangement with the heating element 2 is the same as in the previous embodiment.

Although the structure of the liquid supply path 12 and the heating element 2 has been described in the previous embodiment, the structure of the second liquid flow path 16 and the heating element 2 is the same in the present embodiment. doing.

Next, the operation of the liquid ejection head of the present embodiment will be described.

FIG. 12 is a diagram for explaining the operation of the movable member.

In driving the head, the same aqueous ink was used as the discharge liquid supplied to the first liquid flow path 14 and the foaming liquid supplied to the second liquid flow path 16. The heat generated by the heating element 2 acts on the foaming liquid in the bubble generation area of the second liquid flow path 16 so that the foaming liquid is added to the foaming liquid in the same manner as described in the previous embodiment. 12
A bubble 40 is generated based on the film boiling phenomenon as described in Japanese Patent Application Laid-Open No. 9-209.

In the present embodiment, since there is no escape of the foaming pressure from three sides except for the upstream side of the bubble generation region 11, the pressure accompanying the bubble generation is applied to the movable member 31 arranged in the discharge pressure generating section. The movable member 31 propagates from the state of FIG.
As shown in (b), it is displaced to the first liquid flow path 14 side. The operation of the movable member 31 causes the first liquid flow path 14 and the second liquid flow path 1
6 communicates largely with each other, and the pressure based on the generation of the bubbles 40 is mainly transmitted in the direction (A direction) on the discharge port side of the first liquid flow path 14. The liquid is discharged from the discharge port by the propagation of the pressure and the mechanical displacement of the movable member 31 as described above.

Next, as the bubbles shrink, the movable member 3
1 returns to the position shown in FIG.
In 4, the amount of the discharged liquid corresponding to the amount of the discharged liquid is supplied from the upstream side. Also in the present embodiment, the supply of the discharge liquid is in the direction in which the movable member 31 is closed, similarly to the above-described embodiment, so that the refill of the discharge liquid is not hindered by the movable member 31.

This embodiment is the same as the first embodiment with respect to the operation and effects of the main parts relating to the propagation of the foaming pressure due to the displacement of the movable member 31, the growth direction of the bubbles, the prevention of back waves, and the like. However, adopting the two-channel configuration as in the present embodiment has the following advantages.

That is, according to the configuration of the above-described embodiment, the discharge liquid and the foaming liquid can be made different liquids, and the discharge liquid can be discharged by the pressure generated by the foaming of the foaming liquid. For this reason, conventionally, even if it is a high-viscosity liquid such as polyethylene glycol, which has been insufficiently foamed even when heat is applied and discharge power is insufficient, this liquid is supplied to the first liquid flow path, Liquid that foams well in the foaming liquid (ethanol: water = 4: 6)
The liquid can be satisfactorily discharged by supplying a liquid having a low boiling point to the second liquid flow path 16.

Further, by selecting a liquid that does not generate deposits such as kogation on the surface of the heating element even if it receives heat as the foaming liquid, foaming can be stabilized and good ejection can be performed.

Further, in the structure of the head of the present invention, the effect as described in the previous embodiment is also produced.
Further, a liquid such as a highly viscous liquid can be discharged with high discharge efficiency and high discharge force.

Further, even in the case of a liquid weak to heating, this liquid is supplied to the first liquid flow path 14 as a discharge liquid,
By supplying a liquid that is hard to thermally degenerate and favorably foams in the liquid flow path 16, it does not cause thermal harm to the liquid that is vulnerable to heating, and has high discharge efficiency and high discharge force as described above. Can be ejected.

(Other Embodiments) The embodiments of the main part of the liquid discharge head and the liquid discharge method according to the present invention have been described above. The following is an embodiment which can be preferably applied to these embodiments. An example will be described with reference to the drawings. However, in the following description, there is a case where either one of the above-described embodiment of the one-passage form and the embodiment of the two-passage form is taken up and described, but it is applicable to both forms unless otherwise specified. It is.

<Ceiling Shape of Liquid Flow Path> FIG. 13 is a view for explaining the structure of the movable member and the first liquid flow path.

As shown in FIG. 13, a grooved member 50 provided with a groove for forming the first liquid flow path 13 (or the liquid flow path 10 in FIG. 1) is provided on the separation wall 30. . In this embodiment, the height of the flow path ceiling near the position of the free end 32 of the movable member is increased, so that the operating angle θ of the movable member can be increased. The operation range of the movable member may be determined in consideration of the structure of the liquid flow path, durability and bubbling force of the movable member, but it is desirable that the movable member be operated up to an angle including the angle in the axial direction of the discharge port. Conceivable.

As shown in this figure, by making the displacement height of the free end of the movable member higher than the diameter of the discharge port,
A more sufficient transmission of the discharge force is achieved. As shown in this figure, the height of the liquid flow path ceiling at the fulcrum 33 of the movable member is lower than the height of the liquid flow path ceiling at the free end 32 of the movable member. The escape of the pressure wave to the upstream side due to the displacement can be more effectively prevented.

<Arrangement Relationship Between Second Liquid Flow Path and Movable Member> FIGS. 14A and 14B are diagrams for explaining the structure of the movable member and the liquid flow path. FIG. (B) is a view of the second liquid flow path 1 from which the separation wall 30 has been removed.
FIG. 6C is a diagram showing the arrangement relationship between the movable member 6 and the second liquid flow path 16 by overlapping these elements, and FIG. In each of the figures, the lower part of the drawing is the front side where the discharge ports are arranged.

In the present embodiment, the second liquid flow path 16 is located upstream of the heating element 2 (the upstream side is the discharge port via the heating element position, the movable member, and the first flow path from the second common liquid chamber side). A chamber (foaming) which has a constricted portion 19 at the upstream side of a large flow toward the air flow to suppress the pressure at the time of foaming from easily escaping to the upstream side of the second liquid flow path 16. Room) structure.

As in the conventional head, the flow path for bubbling and the flow path for discharging the liquid are the same, and a constricted portion is formed so that the pressure generated on the liquid chamber side from the heating element does not escape to the common liquid chamber side. In the case of the head provided with the above, it is necessary to adopt a configuration in which the cross-sectional area of the flow path in the constricted portion does not become so small in consideration of liquid refilling.

However, in the case of this embodiment, most of the liquid to be discharged can be used as the discharge liquid in the first liquid flow path, and the bubbling liquid in the second liquid flow path provided with the heating element is not much consumed. Therefore, the filling amount of the foaming liquid in the bubble generation region 11 of the second liquid flow path may be small. Therefore, since the interval in the constricted portion 19 can be made very small, that is, several μm to several tens of μm, it is possible to further suppress the pressure at the time of foaming generated in the second liquid flow path from being released too much to the surroundings, and to concentrate and move. It can be turned to the member side. This pressure is applied to the movable member 3
1 can be used as the discharge force, so that higher discharge efficiency and discharge force can be achieved. However, the shape of the first liquid flow path 16 is not limited to the above-described structure, and may be any shape as long as the pressure accompanying the generation of bubbles can be effectively transmitted to the movable member side.

As shown in FIG. 14 (c), the side of the movable member 31 covers a part of the wall constituting the second liquid flow path. Falling into the two-liquid channel can be prevented. This can further enhance the separability between the ejection liquid and the foaming liquid described above. In addition, since the escape of bubbles from the slits can be suppressed, the discharge pressure and the discharge efficiency can be further increased. further,
The effect of the refill from the upstream side by the pressure at the time of the defoaming can be enhanced.

In FIGS. 12B and 13,
With the displacement of the movable member 6 toward the first liquid flow path 14, the second
Some of the bubbles generated in the bubble generation region of the liquid flow path 4
However, by setting the height of the second flow path such that the bubbles extend, the ejection force can be further improved as compared with the case where the bubbles do not extend. be able to.
In order for the bubbles to extend into the first liquid flow path 14 in this manner, it is desirable that the height of the second liquid flow path 16 be lower than the height of the maximum bubble. μm to 30μ
m is desirable. In this embodiment, the height is set to 15 μm.

<Movable Member and Separation Wall> FIGS. 15A and 15B are diagrams for explaining another shape of the movable member. FIG. 15A is a diagram showing a rectangular shape, and FIG. FIG. 7C is a diagram showing a shape in which the movable member can easily operate, and FIG. 7C is a diagram showing a shape in which the fulcrum side is wide and the durability of the movable member is improved.

In FIG. 15, reference numeral 35 denotes a slit provided on the separation wall, and the movable member 31 is formed by this slit. As shown in FIG. 14A, it is desirable that the shape on the fulcrum side is narrowed in an arc shape, as shown in FIG. Any shape may be used as long as it has a shape that can be easily operated without entering the flow path side and has excellent durability.

In the above embodiment, the plate-like movable member 31 and the separation wall 5 having this movable member have a thickness of 5 μm.
However, the material of the movable member and the separation wall is not limited to this, and has a solvent resistance to the foaming liquid and the discharge liquid, and has elasticity to operate well as the movable member. What is necessary is just to be able to form a fine slit.

As the material of the movable member, high durability
Metals such as silver, nickel, gold, iron, titanium, aluminum, platinum, tantalum, stainless steel, phosphor bronze, and alloys thereof, or resins having a nitrile group such as acrylonitrile, butadiene, styrene, and amide groups such as polyamide Resin, resin having a carboxyl group such as polycarbonate, resin having an aldehyde group such as polyacetal, resin having a sulfone group such as polysulfone,
In addition, resins and compounds such as liquid crystal polymers, highly ink-resistant metals such as gold, tungsten, tantalum, nickel, stainless steel, titanium, alloys of these and those with ink resistance coated on the surface or polyamide A resin having an amide group such as
Resins having an aldehyde group such as polyacetal, resins having a ketone group such as polyetheretherketone, resins having an imide group such as polyimide, resins having a hydroxyl group such as a phenol resin, resins having an ethyl group such as polyethylene, polypropylene, etc. A resin having an alkyl group, a resin having an epoxy group such as an epoxy resin, a resin having an amino group such as a melamine resin, a resin having a methylol group such as a xylene resin and its compound, and a ceramic such as silicon dioxide and its compound. desirable.

Examples of the material of the separation wall include polyethylene, polypropylene, polyamide, polyethylene terephthalate, melamine resin, phenol resin, epoxy resin, polybutadiene, polyurethane, polyetheretherketone, polyethersulfone, polyarylate, polyimide, polysulfone, and liquid crystal. A resin having good heat resistance, solvent resistance and moldability represented by recent engineering plastics such as polymer (LCP) and its compound, or silicon dioxide, silicon nitride, nickel,
Metals such as gold and stainless steel, alloys and their compounds, or those whose surfaces are coated with titanium or gold are desirable.

The thickness of the separation wall may be determined in consideration of its material and shape from the viewpoint that the strength as the separation wall can be achieved and the movable member operates well.
A thickness of about 0.5 to 10 μm is desirable.

The width of the slit 35 for forming the movable member 31 is 2 μm in the present embodiment. However, if the foaming liquid and the discharge liquid are different liquids and it is desired to prevent the mixture of the two liquids, the slit is used. The width may be set so as to form a meniscus between the two liquids, and the flow of each liquid may be suppressed. For example, when a liquid of about 2 cp (centipoise) is used as the foaming liquid and a liquid of 100 cp or more is used as the ejection liquid, the liquid mixture can be prevented even with a slit of about 5 μm, but it is preferably 3 μm or less. .

The movable member in the present invention has a thickness of the order of μm (t μm), and a movable member having a thickness of the order of cm is not intended. For a movable member having a thickness on the order of μm, a slit width (W
μm), it is desirable to consider the manufacturing variation to some extent.

When the thickness of the member facing the free end and / or the side end of the movable member forming the slit is equal to the thickness of the movable member (FIG. 12, FIG. 13, etc.), the relationship between the slit width and the thickness is determined by manufacturing. By setting the following range in consideration of the variation, the mixture of the foaming liquid and the ejection liquid can be stably suppressed. Although this is a limited condition, when a high-viscosity ink (5 cp, 10 cp, etc.) is used for a foaming liquid having a viscosity of 3 cp or less, W / t
By satisfying ≦ 1, it was possible to suppress the mixing of the two liquids for a long time.

The slit that gives the “substantially sealed state” of the present invention is more reliable if it is on the order of several μm.

As described above, when the functions are separated into the foaming liquid and the discharge liquid, the movable member becomes a substantial partition member. It can be seen that the foaming liquid mixes slightly with the discharge liquid when the movable member moves with the generation of bubbles. In consideration of the fact that an ejection liquid for forming an image generally has a colorant density of about 3% to 5% in the case of ink jet recording, this foaming liquid is in a range of 20% or less with respect to the ejection droplet. Does not cause a large change in concentration. Therefore, the present invention includes such a mixed liquid as a mixture of a foaming liquid and an ejected liquid such that the amount thereof is 20% or less of the ejected liquid droplets.

In the implementation of the above configuration example, even if the viscosity is changed, the mixing of the foaming liquid at the upper limit of 15% is performed. With the foaming liquid of 5 cp or less, the mixing ratio depends on the driving frequency, but it is 10%. % As the upper limit.

In particular, as the viscosity of the discharged liquid is set to 20 cp or less, the mixed liquid can be reduced (for example, 5% or less).

Next, the positional relationship between the heating element and the movable member in the head will be described with reference to the drawings. However,
The shapes, dimensions, and numbers of the movable member and the heating element are not limited to the following. By the optimal arrangement of the heating element and the movable member, the pressure at the time of foaming by the heating element can be effectively used as the discharge pressure.

FIG. 16 is a diagram showing the relationship between the area of the heating element and the amount of ink discharged.

By giving energy such as heat to the ink, a state change accompanied by a steep volume change (generation of bubbles) is caused in the ink, and the ink is discharged from the discharge port by the action force based on this state change. In the related art of an ink jet recording method for forming an image by adhering a liquid on a recording medium, that is, a so-called bubble jet recording method, FIG.
As shown in FIG. 6, although the heating element area and the ink discharge amount are in a proportional relationship, it can be seen that there is a non-foaming effective region S that does not contribute to ink discharge. In addition, from the appearance of the kogation on the heating element, it can be seen that the non-foaming effective area S exists around the heating element. From these results, it is considered that the width of about 4 μm around the heating element is not involved in foaming.

Therefore, in order to effectively use the foaming pressure, it is effective to dispose the movable member such that the movable area of the movable member covers the area just above the effective foaming area about 4 μm or more from the periphery of the heating element. It can be said that it is a target. In this embodiment, the effective foaming region is at least about 4 μm inside from the periphery of the heating element. However, the present invention is not limited to this type depending on the type of heating element and the forming method.

FIG. 17 is a diagram showing a positional relationship between the movable member and the heating element. The movable member 301 (FIG. 17A) and the movable member 302 having a 58 × 150 μm heating element 2 having different total movable areas. It is the schematic diagram seen from the upper part when ((b) figure) was arrange | positioned.

The size of the movable member 301 is 53 × 145 μm.
m, which is smaller than the area of the heating element 2, but approximately the same as the effective foaming area of the heating element 2, and is arranged so as to cover the effective foaming area. On the other hand, the size of the movable member 302 is 53 × 220 μm, which is larger than the area of the heating element 2 (when the width is the same, the dimension between the fulcrum and the movable tip is longer than the length of the heating element). It is arranged so as to cover the effective foaming area in the same manner as the above. The durability and discharge efficiency of the two types of movable members 301 and 302 were measured. The measurement conditions are as follows.

Foaming liquid: 40% ethanol aqueous solution Ejection ink: Dye ink Voltage: 20.2 V Frequency: 3 kHz As a result of conducting an experiment under these measurement conditions, regarding the durability of the movable member, (a) the movable member 301 In the case of 1 × 10 ⁷ pulses, the fulcrum of the movable member 301 was damaged when 1 × 10 ⁷ pulses were applied. (B) 3 × 10 ^{8 for the} movable member 302
No damage was seen when the pulse was applied. It was also confirmed that the kinetic energy based on the discharge amount and the discharge speed with respect to the input energy was improved by about 1.5 to 2.5 times.

From the above results, from the viewpoint of both durability and discharge efficiency, it is preferable that the movable member is provided so as to cover directly above the effective foaming area, and that the area of the movable member is larger than the area of the heating element. It turns out that it is excellent.

FIG. 18 shows the relationship between the distance from the edge of the heating element to the fulcrum of the movable member and the amount of displacement of the movable member. FIG. 19 shows the arrangement relationship between the heating element 2 and the movable member 31. It is sectional drawing seen from the side direction.

The heating element 2 used had a size of 40 × 105 μm. It can be seen that the greater the distance l from the edge of the heating element 2 to the fulcrum 33 of the movable member 31, the greater the displacement. Therefore, the optimum amount of displacement is determined based on the required ink discharge amount, the flow path structure of the discharge liquid, and the shape of the heating element.
It is desirable to determine the position of the fulcrum of the movable member.

When the fulcrum of the movable member is located immediately above the effective foaming area of the heating element, the durability of the movable member is reduced because the foaming pressure is directly applied to the fulcrum in addition to the stress caused by the displacement of the movable member. . According to the experiment of the present inventor, it was found that, in the case where the fulcrum was provided right above the effective foaming area, the movable wall was damaged by about 1 × 10 ⁶ pulses, and the durability was reduced. I have. Therefore, by arranging the fulcrum of the movable member just above the effective foaming area of the heating element, the practicability increases even if the movable member has a shape or material whose durability is not so high. However, even if there is a fulcrum just above the effective foaming area, it can be used favorably if the shape and material are selected. With this configuration, a liquid ejection head having high ejection efficiency and excellent durability can be obtained.

<Element Substrate> The structure of an element substrate provided with a heating element for applying heat to liquid will be described below.

FIGS. 20A and 20B are longitudinal sectional views of the liquid discharge head of the present invention. FIG. 20A is a diagram showing a head having a protective film described later, and FIG. 20B is a diagram showing a head without a protective film.

On the element substrate 1, the second liquid flow path 16, the separation wall 3
0, a first liquid flow path 14, and a grooved member 50 provided with grooves forming the first liquid flow path.

As the element substrate 1, a substrate 107 made of silicon or the like is used.
A silicon oxide film or a silicon nitride film 106 for insulation and heat storage is formed thereon, and hafnium boride (HfB ₂ ), tantalum nitride (TaN), and tantalum aluminum (TaAl) constituting a heating element are formed thereon. ) And wiring electrodes (0.2-1.0 μm thick) of aluminum or the like are patterned as shown in FIG. These two wiring electrodes 10
From 4, a voltage is applied to the resistance layer 105, and a current flows through the resistance layer to generate heat. On the resistance layer between the wiring electrodes, a protective layer such as silicon oxide or silicon nitride is formed with a thickness of 0.1 to 2.0 μm, and further thereon, a cavitation resistant layer such as tantalum (with a thickness of 0.1 to 0.6 μm) is formed. ) Is deposited,
The resistance layer 105 is protected from various liquids such as ink.

In particular, the pressure and shock waves generated during the generation and defoaming of air bubbles are extremely strong, and significantly reduce the durability of a hard and brittle oxide film.
Are used as a cavitation-resistant layer.

A structure that does not require the above-described protective layer may be used depending on the combination of the liquid, the liquid flow path structure, and the resistance material. An example is shown in FIG. Examples of the material of the resistance layer that does not require such a protective layer include an iridium-tantalum-aluminum alloy.

As described above, the configuration of the heating element in each of the above-described embodiments may be only the above-described resistance layer (heating section) between the electrodes, or may include a protective layer for protecting the resistance layer.

In the present embodiment, a heating element having a heating section composed of a resistance layer which generates heat in response to an electric signal is used. However, the present invention is not limited to this, and a heating element which is sufficient to discharge the discharge liquid is used. What is necessary is just to generate air bubbles in the foaming liquid. For example, a light-to-heat converter that generates heat by receiving light from a laser or the like, or a heat generator that has a heat generating unit that generates heat by receiving a high frequency may be used as the heat generating unit.

The above-mentioned element substrate 1 has, in addition to the electrothermal converter composed of the above-described resistance layer 105 constituting the heating section and the wiring electrode 104 for supplying an electric signal to this resistance layer, Functional elements such as a transistor, a diode, a latch, and a shift register for selectively driving the electrothermal conversion element may be integrally formed by a semiconductor manufacturing process.

Also, in order to drive the heat generating portion of the electrothermal transducer provided on the element substrate 1 as described above and discharge the liquid, the above-described resistance layer 105 is connected to the above-described resistance layer 105 through the wiring electrode 104 as shown in FIG. A rectangular pulse as shown by is applied to cause the resistance layer 105 between the wiring electrodes to generate heat sharply.

FIG. 21 is a schematic diagram showing the shape of a driving pulse.

In each of the above-described heads, the voltage was 24 V, the pulse width was 7 μsec, the current was 150 mA,
The heating element is driven by applying an electric signal at 6 kHz,
By the operation described above, the liquid ink was ejected from the ejection port. However, the condition of the drive signal is not limited to this, and any drive signal can be used as long as it can appropriately foam the foaming liquid.

<Head Structure with Two Flow Paths> The liquid discharge which can satisfactorily separate and introduce different liquids into the first and second common liquid chambers, can reduce the number of parts, and can reduce the cost. An example of the structure of the head will be described.

FIG. 22 is a cross-sectional view for explaining the supply path of the liquid discharge head of the present invention. The same reference numerals are used for the same components as those in the previous embodiment, and the detailed description is omitted here. I do.

In the present embodiment, the grooved member 50 includes the orifice plate 51 having the discharge port 18, the plurality of grooves forming the plurality of first liquid flow paths 14, and the plurality of liquid flow paths 14.
Liquid (discharge liquid) in each first liquid flow path 3
And a concave portion forming the first common liquid chamber 15 for supplying the liquid.

The separation wall 30 is provided below the grooved member 50.
Can be formed to form a plurality of first liquid flow paths 14. Such a grooved member 50 has a first liquid supply path 20 that reaches the inside of the first common liquid chamber 15 from above. Further, the grooved member 50 penetrates the separation wall 30 from the upper part thereof and reaches the second common liquid chamber 17 in the second common liquid chamber 17.
The liquid supply path 21 of FIG.

The first liquid (discharge liquid) is indicated by an arrow C in FIG.
As shown in FIG. 22, the liquid is supplied to the first common liquid chamber 15 and then to the first liquid flow path 14 via the first liquid supply path 20, and the second liquid (foaming liquid) is indicated by an arrow D in FIG. As shown, the second
Through the liquid supply path 21, the second common liquid chamber 17, and then the second common liquid chamber 17,
The liquid is supplied to the liquid flow path 16.

In this embodiment, the second liquid supply path 21 is
Although arranged in parallel with the liquid supply path 20, the present invention is not limited thereto, and penetrates the separation wall 30 disposed outside the first common liquid chamber 15 and communicates with the second common liquid chamber 17. It may be arranged in any way as long as it is formed.

The thickness (diameter) of the second liquid supply path 21
Is determined in consideration of the supply amount of the second liquid.
The shape of the second liquid supply path 21 does not need to be round,
It may be rectangular or the like.

Further, the second common liquid chamber 17 is provided with a grooved member 50.
By the partition wall 30. As a forming method, as shown in an exploded perspective view of this embodiment shown in FIG. 23, a common liquid chamber frame and a second liquid path wall are formed on an element substrate with a dry film, and a grooved member in which a separation wall is fixed. The second common liquid chamber 17 and the second liquid flow path 16 may be formed by bonding the combined body of the separation wall 30 and the element substrate 1 to the element substrate 1.

In the present embodiment, as described above, the electric heat as a heat generating element for generating heat for generating bubbles due to film boiling with respect to the foaming liquid on the support 70 formed of a metal such as aluminum. An element substrate 1 provided with a plurality of conversion elements is provided.

On the element substrate 1, a plurality of grooves forming the liquid flow path 16 formed by the second liquid path wall and a plurality of the foaming liquid flow paths are communicated. Forming a second common liquid chamber (common bubbling liquid chamber) 17 for supplying water, and a separation wall 30 provided with the movable wall 31 described above.
And are arranged.

[0211] Reference numeral 50 denotes a grooved member. The grooved member is joined to the separation wall 30 to form a discharge liquid flow path (first
A first common liquid chamber (common discharge liquid chamber) 15 which communicates with the groove forming the liquid flow path) 14 and the discharge liquid flow path to supply the discharge liquid to each discharge liquid flow path; Of the recess,
A first supply path (discharge liquid supply path) 20 for supplying discharge liquid to the first common liquid chamber, and a second supply path (foam liquid supply) for supplying foaming liquid to the second common liquid chamber 17. (Road) 21. The second supply passage 21 penetrates the separation wall 30 disposed outside the first common liquid chamber 15 and
7, the foaming liquid is not mixed with the discharge liquid by the communication path, and the foamed liquid is mixed with the second common liquid chamber 1.
5 can be supplied.

The arrangement relationship between the element substrate 1, the separation wall 30, and the grooved top plate 50 is such that the movable member 31 is arranged corresponding to the heating element of the element substrate 1, and corresponds to the movable member 31. A discharge liquid channel 14 is provided. In this embodiment,
Although the example in which one second supply path is provided in the grooved member has been described, a plurality of second supply paths may be provided according to the supply amount. Further, the discharge liquid supply path 2
0 and the cross-sectional area of the foaming liquid supply passage 21 may be determined in proportion to the supply amount. By optimizing the cross-sectional area of the flow path, it is possible to further reduce the size of the components constituting the grooved member 50 and the like.

As described above, according to this embodiment, the second
The second supply path for supplying the second liquid to the liquid flow path and the first supply path for supplying the first liquid to the first liquid flow path are formed of the same grooved top plate as the grooved member. Thereby, the number of parts can be reduced, and the process can be shortened and the cost can be reduced.

The supply of the second liquid to the second common liquid chamber communicating with the second liquid flow path is performed by the second liquid flow path in a direction penetrating the separation wall separating the first liquid and the second liquid. Since the structure is performed, the bonding step of the separation wall, the grooved member, and the heating element forming substrate only needs to be performed once, thereby improving the ease of manufacturing, improving the bonding accuracy, and discharging well. Can be.

Further, since the second liquid penetrates through the separation wall and is supplied to the second liquid common liquid chamber, the supply of the second liquid to the second liquid flow path is ensured, and the supply amount can be sufficiently secured.
Stable discharge is possible.

<Ejecting Liquid and Foaming Liquid> As described in the above embodiment, in the present invention, the structure having the movable member as described above enables the ejection force and the ejection efficiency to be higher than those of the conventional liquid ejection head. Moreover, the liquid can be discharged at a high speed. When the same liquid is used for the foaming liquid and the discharge liquid in the present embodiment, the heat is not deteriorated by the heat applied from the heating element, the deposit is hardly generated on the heating element by heating, and the heat is used to vaporize and condense. It is possible to use various liquids as long as the liquid does not deteriorate the liquid flow path, the movable member, the separation wall, and the like.

Among such liquids, as a liquid (recording liquid) used for recording, an ink having a composition used in a conventional bubble jet apparatus can be used.

On the other hand, when a head having a two-flow path structure according to the present invention is used and the discharge liquid and the foaming liquid are different liquids, a liquid having the above-mentioned properties may be used as the foaming liquid. , Methanol, ethanol, n-propanol, isopropanol, n-hexane, n-heptane, n-octane, toluene, xylene, methylene dichloride, trichlene, Freon TF, Freon BF, ethyl ether, dioxane, cyclohexane, methyl acetate, acetic acid ethyl,
Examples include acetone, methyl ethyl ketone, water, and the like, and mixtures thereof.

As the discharge liquid, various liquids can be used irrespective of the presence or absence of bubbling properties and thermal properties. In addition, liquids having low foaming properties, liquids which are easily deteriorated or deteriorated by heat, high-viscosity liquids, and the like, which have been difficult to discharge conventionally, can be used.

However, the properties of the liquid to be discharged are:
Alternatively, it is desirable that the liquid is not a liquid that hinders ejection, foaming, operation of the movable member, or the like due to a reaction with the foaming liquid.

As the ejection liquid for recording, a high-viscosity ink or the like can be used. As other discharge liquids, liquids such as medicines and perfumes that are vulnerable to heat can be used.

In the present invention, recording was performed using an ink having the following composition as a recording liquid that can be used for both the discharge liquid and the foaming liquid. Therefore, the landing accuracy of the droplet was improved, and a very good recorded image could be obtained.

Dye ink viscosity 2 cp: (CI food black 2) Dye 3 wt% Diethylene glycol 10 wt% Thiodiglycol 5 wt% Ethanol 3 wt% Water 77 wt% Further, liquids having the following compositions in the foaming liquid and the discharge liquid And recording was performed. As a result, a liquid having a viscosity of more than ten cp, which was difficult to discharge with a conventional head, as well as a liquid having a very high viscosity of 150 cp could be discharged satisfactorily, and a recorded matter of high quality could be obtained.

Foaming liquid 1: Ethanol 40 wt% Water 60 wt% Foaming liquid 2: Water 100 wt% Foaming liquid 3: Isopropyl alcohol 10 wt% Water 90 wt% Discharge liquid 1: Carbon black 5 5 wt% Pigment ink Styrene-acrylic acid-(viscosity Ethyl acrylate copolymer 1 wt% (oxidized 140, weight average molecular weight 8000) Monoethanolamine 0.25 wt% Glycerin 69 wt% Thiodiglycol 5 wt% Ethanol 3 wt% Water 16.75 wt% Discharge liquid 2: polyethylene glycol 200 100 wt% (viscosity: 55 cp) Discharge liquid 3: polyethylene glycol 600 100 wt% (viscosity: 150 cp) By the way, in the case of the above-mentioned liquid which is conventionally difficult to be discharged, the discharge direction is low because the discharge speed is low. Dispersion is promoted poor landing accuracy of the dot on the recording paper, but also by the discharge amount of variation occurs in these by the discharge unstable, high-quality image was difficult to obtain. However, in the configuration of the above-described embodiment, the generation of bubbles can be sufficiently and stably performed by using the foaming liquid.
As a result, it is possible to improve the landing accuracy of the droplets and stabilize the ink discharge amount, and it is possible to remarkably improve the quality of the recorded image.

<Manufacture of Liquid Discharge Head> Next, the process of manufacturing the liquid discharge head of the present invention will be described.

In the case of the liquid discharge head as shown in FIG. 2, a base 34 for providing the movable member 31 on the element substrate 1 is formed by patterning a dry film or the like. 31 was adhered or fixed by welding. Thereafter, a grooved member having a plurality of grooves forming each liquid flow path 10, a discharge port 18, and a concave part forming the common liquid chamber 13 is joined to the element substrate 1 in such a manner that the grooves correspond to the movable members. It was formed by doing.

Next, as shown in FIG. 10 and FIG.
The manufacturing process of the liquid discharge head having the flow path configuration will be described.

FIG. 23 is an exploded perspective view of the head of the present invention.

Generally, the second liquid flow path 1
6, a separation wall 30 is mounted thereon, and a grooved member 50 provided with a groove or the like constituting the first liquid flow path 14 is further mounted thereon. Alternatively, the second liquid flow path 1
After forming the wall of No. 6, the head was manufactured by joining the grooved member 50 on which the separation wall 30 was attached to the wall.

Further, a method of forming the second liquid flow path will be described in detail.

FIG. 24 is a process chart for explaining a method of manufacturing a liquid discharge head according to the present invention.

In this embodiment, as shown in FIG.
After an electrothermal conversion element having a heating element 2 made of hafnium boride, tantalum nitride, or the like is formed on an element substrate (silicon wafer) 1 using a manufacturing apparatus similar to that used in the semiconductor manufacturing process, the following steps are performed. The surface of the element substrate 1 was cleaned for the purpose of improving the adhesion to the photosensitive resin in the process. Further, in order to improve the adhesiveness, a liquid obtained by performing a surface modification on the element substrate surface with ultraviolet-ozone or the like and then diluting, for example, a silane coupling agent (manufactured by Nippon Yunika: A189) to 1% by weight with ethyl alcohol. Is spin-coated on the modified surface.

Next, as shown in (b), an ultraviolet-sensitive resin film (a dry film made by Tokyo Ohka: Odile SY) was formed on the substrate 1 having been subjected to surface cleaning and having improved adhesion.
-318) The DF was laminated.

Next, as shown in (c), a photomask PM is arranged on the dry film DF, and ultraviolet rays are passed through the photomask PM to a portion of the dry film DF to be left as the second channel wall. Was irradiated. This exposure step
Manufactured by Canon Inc .: MPA-600, about 6
The exposure was performed at an exposure of 00 mJ / cm ² .

Next, as shown in (d), the dry film DF was developed with a developing solution (BMRC-3, manufactured by Tokyo Ohka Chemical Co., Ltd.) composed of a mixture of xylene and butyl cellosolve acetate, and the unexposed portion was developed. The portion that was dissolved, exposed and cured was formed as a wall portion of the second liquid flow path 16. Further, the residue remaining on the surface of the element substrate 1 is removed by treating it with an oxygen plasma ashing apparatus (MAS-800, manufactured by Alcantech) for about 90 seconds, and subsequently, at 150 ° C. for 2 hours, and further 100 mJ / cm ^{2 of} ultraviolet irradiation. The exposure was completely cured.

According to the above-described method, the second liquid flow path can be uniformly formed with high accuracy on a plurality of heater boards (element substrates) divided and manufactured from the silicon substrate. A dicing machine (manufactured by Tokyo Seimitsu:
(AWD-4000) to cut and separate each heater board 1. An adhesive (made by Toray:
(SE4400) on the aluminum base plate 70 (FIG. 27). Next, the aluminum base plate 70
An aluminum wire (not shown) having a diameter of 0.05 mm is formed by connecting the printed wiring board 71 bonded above and the heater board 1 to each other.
Connected with.

Next, as shown in FIG. 24 (e), the joined body of the grooved member 50 and the separation wall 30 was positioned and joined to the heater board 1 thus obtained as shown in FIG.
That is, the grooved member having the separating wall 30 and the heater board 1 are positioned and engaged and fixed by the pressing spring 78, and then the ink / foaming liquid supply member 80 is joined and fixed on the aluminum base plate 70, and the aluminum wire is fixed. , Grooved member 50, heater board 1, and ink / foaming liquid supply member 80
The gap with the silicone sealant (made by Toshiba Silicone:
(TSE399) and completed.

By forming the second liquid flow path by the above-described manufacturing method, it is possible to obtain a high-precision flow path with no positional deviation with respect to the heater of each heater board. In particular, by joining the grooved member 50 and the separation wall 30 in the previous step in advance, the positional accuracy of the first liquid flow path 14 and the movable member 31 can be improved.

[0239] These high-precision manufacturing techniques stabilize ejection and improve print quality. In addition, since it can be formed on a wafer at a time, a large amount can be manufactured at low cost.

In this embodiment, an ultraviolet-curing dry film is used to form the second liquid flow path. However, a resin having an absorption band in the ultraviolet region, particularly around 248 nm, is used, and after lamination, curing is performed. Then, it can be obtained also by directly removing the resin in a portion to be the second liquid flow path by using an excimer laser.

There is also another manufacturing method.

FIG. 25 is a process chart for explaining a method of manufacturing a liquid discharge head according to the present invention.

In the present embodiment, as shown in FIG.
A resist 101 having a thickness of 15 μm was patterned on the SUS substrate 100 in the shape of the second liquid flow path.

Next, as shown in FIG.
00 was electroplated to grow a nickel layer 102 on the SUS substrate 100 by 15 μm. As the plating solution, a stress reducing agent (Zerool, manufactured by World Metal Co.), boric acid, a pit preventing agent (NP-APS, manufactured by World Metal Co.), and nickel chloride were used for nickel sulfamate. As for the method of applying an electric field at the time of electrodeposition, an electrode was attached to the anode side, the already patterned SUS substrate 100 was attached to the cathode side, and the temperature of the plating solution was set to 50 ° C.
And the current density was 5 A / cm ² .

Next, as shown in (c), ultrasonic vibration is applied to the SUS substrate 100 which has been plated as described above, and the nickel layer 102 is peeled off from the SUS substrate 100, and the desired second A liquid flow path was obtained.

On the other hand, a heater board provided with an element for electrothermal conversion was formed on a silicon wafer by using a manufacturing apparatus similar to that for a semiconductor. This wafer was separated into respective heater boards by a dicing machine in the same manner as in the previous embodiment. The heater board 1 is joined to an aluminum base plate 70 to which a printed board 104 has been joined in advance, and the printed board 7
1 and an aluminum wire (not shown) to form an electrical wiring. On the heater board 1 in such a state, as shown in FIG. 25D, the second liquid flow path obtained in the previous step was positioned and fixed. At the time of this fixing, as in the first embodiment, since the top plate on which the separation wall is fixed is engaged with and tightly attached to the top plate by the pressing spring in the subsequent step, it is fixed to the extent that no positional displacement occurs at the time of joining the top plate. Is enough.

In this embodiment, an ultraviolet-curable adhesive (Amicon UV-30 manufactured by Grace Japan) is used for the positioning and fixing.
0), and using an ultraviolet irradiation device, the exposure amount is 100
Fixation was completed in about 3 seconds at mJ / cm ² .

According to the manufacturing method of this embodiment, the second liquid flow path can be obtained with high accuracy without any displacement with respect to the heating element, and the flow path wall is formed of nickel.
It is possible to provide a highly reliable head that is resistant to alkaline liquids.

There is another manufacturing method.

FIG. 26 is a process chart for explaining a method of manufacturing a liquid discharge head according to the present invention.

In the present embodiment, as shown in FIG.
Thickness 1 with alignment hole or mark 100a
A resist 31 was applied to both sides of a 5 μm SUS substrate 100. Here, as the resist, PME manufactured by Tokyo Ohka
RP-AR900 was used.

Thereafter, as shown in FIG.
Exposure was performed using an exposure apparatus (MPA-600, manufactured by Canon Inc.) in accordance with the alignment hole 100a of No. 00, and the resist 103 in the portion where the second liquid flow path was to be formed was removed. The exposure was performed at an exposure amount of 800 mJ / cm ² .

Next, as shown in (c), the SUS substrate 100 on which the resists 103 on both sides are patterned is immersed in an etchant (an aqueous solution of ferric chloride or cupric chloride) and exposed from the resist 103. After etching the exposed portion, the resist was removed.

Next, as shown in (d), the etched SUS substrate 100 is positioned and fixed on the heater board 1 and the second liquid flow path 4 is formed in the same manner as in the above-described embodiment of the manufacturing method. Was assembled.

According to the manufacturing method of this embodiment, the second liquid flow path 4 can be obtained with high accuracy without any positional deviation with respect to the heater. In addition, since the flow path is formed of SUS, acid or alkaline property can be obtained. A highly reliable liquid ejection head that is resistant to liquid can be provided.

As described above, according to the manufacturing method of the present embodiment, the wall of the second liquid flow path is disposed in advance on the element substrate, so that the electrothermal transducer and the second liquid flow path are high. Positioning can be performed with high accuracy. In addition, since the second liquid flow path can be formed simultaneously on a large number of element substrates on the substrate before cutting and separation, a large amount of low-cost liquid discharge head can be provided.

In the liquid discharge head obtained by performing the method of manufacturing a liquid discharge head according to the manufacturing method of the present embodiment, since the heating element and the second liquid flow path are positioned with high precision, the The pressure of foaming due to the heat generated by the heat converter can be efficiently received, and the discharge efficiency is excellent.

<Liquid Discharge Head Cartridge> Next, a liquid discharge head cartridge equipped with the liquid discharge head according to the above embodiment will be schematically described.

FIG. 27 is an exploded perspective view of the liquid discharge head cartridge.

As shown in FIG. 27, the liquid discharge head cartridge mainly includes a liquid discharge head 200 and a liquid container 8.
0.

The liquid discharge head unit 200 includes the element substrate 1,
It comprises a separation wall 30, a grooved member 50, a pressing spring 78, a liquid supply member 90, a support 70 and the like. As described above, the element substrate 1 is provided with a plurality of heating resistors for applying heat to the foaming liquid in a row, and a functional element for selectively driving the heating resistors. Are provided. This element substrate 1 and the aforementioned separation wall 3 having a movable wall
0, a foaming liquid passage is formed, and the foaming liquid flows. By joining the separation wall 30 and the grooved top plate 50, a discharge flow path (not shown) through which the discharged liquid to be discharged flows is formed.

The pressing spring 78 is a member for applying an urging force in the direction of the element substrate 1 to the grooved member 50. With this urging force, the element substrate 1, the separating wall 30, the grooved member 50, and a support member to be described later are used. 70 and satisfactorily integrated.

The support 70 is for supporting the element substrate 1 and the like. On the support 70, a circuit board 71 for connecting to the element substrate 1 and supplying an electric signal,
A contact pad 72 for exchanging electrical signals with the device by connecting to the device is provided.

The liquid container 90 contains therein a discharge liquid such as ink and a foaming liquid for generating bubbles, which are supplied to the liquid discharge head. Outside the liquid container 90, a positioning portion 94 for arranging a connection member for connecting the liquid ejection head and the liquid container and a fixed shaft 95 for fixing the connection portion are provided. The discharge liquid is supplied from the discharge liquid supply path 92 of the liquid container to the discharge liquid supply path 81 of the liquid supply member 80 via the supply path 84 of the connection member.
And the discharge liquid supply paths 83, 71, 21 of each member
To the first common liquid chamber. Similarly, the foaming liquid is supplied from the supply path 93 of the liquid container to the foaming liquid supply path 82 of the liquid supply member 80 via the supply path of the connecting member, and is supplied via the foaming liquid supply paths 84, 71, and 22 of the respective members. The liquid is supplied to the second liquid chamber.

In the above-described liquid discharge head cartridge, the supply form and the liquid container that can supply the liquid are described also when the foaming liquid and the discharge liquid are different liquids, but the discharge liquid and the foaming liquid are the same. However, the supply path and the container for the foaming liquid and the discharge liquid do not have to be divided.

It should be noted that the liquid container may be refilled with the liquid after the consumption of each liquid and used. For this purpose, it is desirable to provide a liquid inlet in the liquid container. Further, the liquid discharge head and the liquid container may be integrated or may be separable.

<Liquid Discharge Apparatus> FIG. 28 is a schematic configuration diagram of a liquid discharge apparatus.

In the present embodiment, the carriage HC of the liquid discharge apparatus described using an ink discharge recording apparatus using ink as the discharge liquid is a liquid tank section 9 for storing ink.
0 and a liquid ejection head unit 200 are provided with a detachable head cartridge, and reciprocate in the width direction of a recording medium 150 such as recording paper conveyed by recording medium conveying means.

When a drive signal is supplied from a drive signal supply means (not shown) to the liquid discharge means on the carriage, the recording liquid is discharged from the liquid discharge head to the recording medium in accordance with this signal.

In the liquid ejection apparatus of the present embodiment,
A motor 111 as a drive source for driving the recording medium transporting means and the carriage; gears 112 and 113 for transmitting power from the drive source to the carriage;
5 and so on. With this recording apparatus and the liquid ejection method performed by this recording apparatus, a recorded matter of a good image could be obtained by ejecting liquid to various recording media.

FIG. 29 is a block diagram of the entire apparatus for operating ink discharge recording to which the liquid discharge method and liquid discharge head of the present invention are applied.

The recording apparatus receives print information from the host computer 300 as a control signal. The print information is temporarily stored in an input interface 301 inside the printing apparatus, and at the same time, is converted into data that can be processed in the printing apparatus, and is input to the CPU 302 also serving as a head drive signal supply unit. The CPU 302 processes data input to the CPU 302 using a peripheral unit such as the RAM 304 based on a control program stored in the ROM 303,
Convert to print data (image data).

The CPU 302 generates drive data for driving a drive motor for moving the recording paper and the recording head in synchronization with the image data in order to record the image data at an appropriate position on the recording paper. The image data and the motor drive data are respectively
The image is transmitted to the head 200 and the drive motor 306 via the motor driver 305, and is driven at a controlled timing to form an image.

The recording medium which can be applied to the recording apparatus as described above and to which a liquid such as ink is applied includes plastics, cloth, aluminum and the like used for various papers, OHP sheets, compact discs and decorative plates, etc. Metal materials such as copper and copper, leather materials such as cow skin, pig skin and artificial leather, wood such as wood and plywood, ceramic materials such as bamboo materials and tiles, and three-dimensional structures such as sponges can be targeted.

As the recording apparatus described above, various types of paper and O
A printer device for recording on an HP sheet or the like, a recording device for a plastic for recording on a plastic material such as a compact disc, a recording device for a metal for recording on a metal plate,
A recording device for leather for recording on leather, a recording device for wood for recording on wood, a recording device for ceramics for recording on ceramic materials, a recording device for recording on a three-dimensional network structure such as a sponge, and a cloth Also includes a textile printing device for performing recording on the paper.

As a discharge liquid used in these liquid discharge devices, a liquid suitable for each recording medium and recording conditions may be used.

<Recording System> Next, an example of an ink jet recording system for performing recording on a recording medium using the liquid discharge head of the present invention as a recording head will be described.

FIG. 30 is a schematic diagram for explaining the configuration of an ink jet recording system using the above-described liquid discharge head 201 of the present invention.

The liquid discharge head of this embodiment has a length of 360 dpi corresponding to the recordable width of the recording medium 150.
Is a full line type head having a plurality of ejection ports arranged at intervals of yellow (Y), magenta (M), cyan (C),
Four heads corresponding to the four colors of black (Bk) are fixedly supported by the holder 202 in parallel with each other at a predetermined interval in the X direction.

A signal is supplied to each of these heads from a head driver 307 constituting drive signal supply means, and each head is driven based on this signal.

In each head, Y, M, C,
Bk four color inks are supplied from ink containers 204a to 204d, respectively. Reference numeral 204e denotes a foaming liquid container in which a foaming liquid is stored, and the foaming liquid is supplied from the container to each head.

A head cap 203 having an ink absorbing member such as a sponge therein is provided below each head.
a to 203d are provided, and the maintenance of the head can be performed by covering the ejection openings of each head during non-printing.

Reference numeral 206 denotes a transport belt which constitutes transport means for transporting various types of non-recording media as described in the above embodiments. The transport belt 206 is drawn around a predetermined path by various rollers, and is driven by a driving roller connected to a motor driver 305.

In the ink jet recording system of this embodiment, a pre-processing device 251 and a post-processing device 252 for performing various processes on the recording medium before and after recording are provided upstream and downstream of the recording medium transport path, respectively. ing.

The contents of the pre-processing and post-processing differ depending on the type of the recording medium on which recording is performed and the type of ink. For example, for a recording medium such as metal, plastic, and ceramics, As a pretreatment, irradiation of ultraviolet rays and ozone is performed to activate the surface, thereby improving the adhesion of the ink. Further, in a recording medium such as plastic which easily generates static electricity, dust easily adheres to the surface due to the static electricity, and good recording may be hindered by the dust. For this reason, it is preferable to remove dust from the recording medium by removing static electricity from the recording medium using an ionizer device as a pretreatment.
When a cloth is used as a recording medium, an alkaline substance,
A treatment for providing a substance selected from a water-soluble substance, a synthetic polymer, a water-soluble metal salt, urea, and thiourea may be performed as pretreatment. The pre-processing is not limited to these, and may be a process of setting the temperature of the recording medium to a temperature suitable for recording.

On the other hand, the post-treatment is a fixing treatment for promoting the fixing of the ink to the recording medium to which the ink has been applied by heat treatment, ultraviolet irradiation, or the like, or a cleaning treatment for applying the pre-treatment and remaining unreacted processing agent. And the like.

Although the present embodiment has been described using a full-line head as the head, the present invention is not limited to this, and the above-described type in which a small head is conveyed in the width direction of the recording medium to perform recording is performed. It may be.

<Head Kit> A head kit having the liquid ejection head of the present invention will be described below.

FIG. 31 is a schematic diagram of a head kit.

A head kit shown in FIG. 31 has a head 51 of the present invention having an ink discharge section 511 for discharging ink.
0, an ink container 520 that is an inseparable or separable liquid container from the head, and an ink filling unit that holds ink for filling the ink container with ink.
It is contained in a kit container 501.

When the ink has been consumed, the insertion portion of the ink filling means (such as an injection needle or the like) is inserted into the air communication port 521 of the ink container, the connection portion with the head, or a hole formed in the wall of the ink container. It is sufficient to insert a part of 531 and fill the ink container with the ink in the ink filling means through the insertion portion.

Thus, the liquid discharge head of the present invention
By packing the ink container and ink filling means into one kit container to make a kit, even if the ink is consumed, the ink can be quickly and easily filled into the ink container as described above. Recording can be started quickly.

Although the head kit of the present embodiment has been described as including the ink filling means, the head kit does not have the ink filling means, and is provided with a separable ink container filled with ink. The head may be in a form accommodated in the kit container 510.

In FIG. 31, only the ink filling means for filling the ink container with ink is shown. However, in addition to the ink container, a foaming liquid filling means for filling the foaming liquid into the foaming liquid container is provided. It may be in a form contained in a kit container.

[0295]

Embodiments of the present invention will be described below with reference to the drawings.

(First Embodiment) FIGS. 32A and 32B are views showing a first embodiment of the liquid discharge head of the present invention, wherein FIG. 32A is a sectional view in a direction perpendicular to the liquid flow, and FIG. It is sectional drawing which looked at the liquid flow path from the upper surface.

In the present embodiment, as shown in FIG. 32, a discharge port 718 for discharging a liquid, a heating element 702 for applying thermal energy for generating bubbles to the liquid, and a first element having a heating element 702 are provided. The first liquid flow path 714 that communicates with the substrate 720 and the discharge port 718 and through which the liquid discharged from the discharge port 718 flows, and the first liquid flow path 714
Second substrate 72 having a groove shape forming liquid flow path 714
1 and a bubble generation region 711 formed on the heating element 702
And the first liquid flow path 714 and the second liquid flow path 716 with the discharge port 718 side as a free end facing the bubble generation region 711 and the opposite side as a fulcrum. The first liquid flow path 71 is displaced toward the first liquid flow path 714 by the pressure of bubbles generated in the bubble generation area 711.
First movable member 7 for communicating the fourth liquid flow path 716 with the second liquid flow path 716
31 and the liquid flow of the first movable member 731 are on both sides in the vertical direction, the first movable member 731 side is a free end,
The junction between the substrate 720 and the substrate 721, that is, the first liquid flow path 716 and the first liquid flow path 71 adjacent to the first liquid flow path 716
6, the first liquid flow path 714 and the second
The liquid flow path 716 is provided so as to be separated from the liquid flow path 716, and is displaced toward the first liquid flow path 714 by the pressure of bubbles generated in the bubble generation area 711, and the first liquid flow path 714 and the second liquid flow path 7
The second movable member 751 is formed of a nickel plate or the like that communicates with the second movable member 16, and a support member 734 provided between the second movable member 751 and the substrate 720. In this embodiment, the supporting member 734 and the movable member 751 are configured to be sandwiched between the substrate 720 and the substrate 721.

Hereinafter, the operation of the liquid discharge head configured as described above will be described.

In the case of discharging liquid from the liquid discharge head as shown in FIG. 32, when the heating element 702 is heated, bubbles are generated in the bubble generation region 711 on the heating element 702. In this state, the movable members 731 and 751 separate the first liquid flow path 714 from the second liquid flow path 716.

When the bubble generated in the bubble generation region 711 grows, the free ends of the movable members 731 and 751 are displaced toward the first liquid flow path 714 by the pressure of the bubble generation (broken line in the drawing), Liquid flow path 714 and second liquid flow path 71
6 is communicated.

Thus, the movable members 731 and 751
Of the movable member 73 due to the displacement of
1,751 is directed toward the discharge port 718 side,
The liquid is efficiently discharged from the discharge port 718. Further, when the movable member 751 is displaced toward the first liquid flow path 714, the pressure caused by the generation of bubbles causes the substrate 721 and the support member 73 to move.
Thus, the cross talk between the adjacent liquid flow paths is prevented. Note that the effect of preventing crosstalk can be expected even when the movable member 751 is simply provided between the support member 734 and the substrate 721, even when the movable member 751 is not movable.

Thereafter, when the bubbles shrink and disappear, the movable members 731 and 751 are closed, and the first liquid flow path 714 and the second liquid flow path 716 are separated again.

When the movable members 731 and 751 are in a closed state, a liquid for discharge is supplied from a common liquid chamber (not shown) into the first liquid flow path 714 and filled in the vicinity of the discharge port 718.

The liquid in the common liquid chamber is discharged from the discharge port 718 by repeating the operation described above.

(Second Embodiment) The above-described movable member 731
The movable member 751 and the movable member 751 can be configured by the same member.

FIG. 33 shows a second embodiment of the liquid discharge head according to the present invention.
It is a figure which shows the Example of.

In this embodiment, as shown in FIG. 33, the movable member 731 and the movable member 751 shown in FIG. 32 are formed of the same member, and are connected at the rear part of the nozzle.

Here, in the movable member 751, the distance between the movable members 751 at both ends in one liquid flow path becomes wider toward the rear of the nozzle, and the liquid flow path is formed at a portion connected to the movable member 731. It has the same width as the width. This is because bubbles are generated and the movable member 751
This is to prevent the movable member 751 from being twisted when is displaced.

(Third Embodiment) FIG. 34 is a view showing a third embodiment of the liquid discharge head of the present invention.

In this embodiment, as shown in FIG. 34, the movable member 731 is not provided in the embodiment shown in FIG.

In this embodiment, the bubble generation region 711
When the bubble generated in the step (1) grows, the free end of the movable member 751 is displaced to the first liquid flow path 714 side by the pressure of the bubble generation, whereby the pressure due to the bubble generation is discharged along the movable member 751. The liquid is directed toward the outlet 718, and the liquid is efficiently discharged from the discharge port 718. In addition, the pressure due to the generation of bubbles is not transmitted between the substrate 721 and the support member 734, thereby preventing crosstalk between adjacent liquid flow paths.

Here, in the long head, the substrate 72
The process of bonding the substrates 721 after arranging 0s is performed. In this case, since an arrangement gap is generated between the adjacent substrates 721, if the gap is widened, the wall of the liquid flow path may not be in contact with the substrate 720. Then, the pressure due to the generation of bubbles escapes into the created gap, and the discharge efficiency is reduced.

Therefore, the above-mentioned problem is solved by providing the movable member 751 also in the gap.

(Fourth Embodiment) FIG. 35 is a view showing a fourth embodiment of the liquid discharge head of the present invention.

In this embodiment, as shown in FIG. 35, only the first liquid flow path 714 is used for the liquid flow path shown in FIG. In this embodiment, the movable member 751
The length of the movable member 751 is not particularly limited. However, when the movable member 751 has a length that does not overlap the heating element 702, the movable member 751 can be attached to the substrate 720 even when no bubbles are generated on the heating element 702. Must have a certain angle with respect to. This is because, when air bubbles are generated on the heating element 702, the generated air bubbles cause the movable member 751 to be displaced, so that the air bubbles penetrate into a lower portion of the movable member 751.

In this embodiment, when air bubbles are generated in the heating element 702, the free end of the movable member 751 is displaced toward the discharge port 718 by the pressure of the air bubble generation. The liquid is directed to the ejection port 718 side along the line 751, and the liquid is ejected efficiently from the ejection port 718. In addition, pressure due to the generation of bubbles is not transmitted between the substrate 721 and the substrate 720, and crosstalk between adjacent liquid flow paths caused thereby is prevented.

(Fifth Embodiment) FIG. 36 is a view showing a liquid discharge head according to a fifth embodiment of the present invention.

In this embodiment, as shown in FIG. 36, the length of the movable members 751 at both ends in one liquid flow path is different from that shown in FIG.

(Sixth Embodiment) As a sixth embodiment, a description will be given of an embodiment that takes into account a normal misalignment.

FIG. 37 shows a sixth embodiment of the liquid discharge head of the present invention.
It is a figure which shows the Example of.

In FIG. 37, a case will be described in which the movable member 751 serving as a double-opening valve is substantially equal in width to the flow path wall of the second substrate having a groove shape.

The effect in this case is that the transmission of the pressure wave to the adjacent nozzle is prevented, thereby preventing the crosstalk.

As an example, a comb-shaped nickel plate is arranged at a position where the flow channel wall is joined, and is sandwiched between the first substrate and the second substrate.

[0324] The movable member 751 plays a role even when only one part protrudes from the width of the flow path wall.

[0325]

Since the present invention is constructed as described above, it has the following effects.

(1) Since the second movable member is interposed at the joint between the first substrate and the second substrate, the flow resistance increases, and the joint between the first substrate and the second substrate is increased. Liquid will not flow easily. As a result, crosstalk between adjacent flow paths can be prevented.

In the long head, since the gap between the first substrates is closed by the second movable member, it is possible to prevent the pressure caused by the generation of bubbles in the gap from escaping.

(2) When the bubbles generated in the bubble generation region grow, the first and second bubbles are generated by the pressure of the bubble generation.
The free end of the movable member is displaced, whereby the pressure due to the generation of air bubbles is directed to the discharge port side along the first and second movable members, so that the liquid is efficiently discharged from the discharge port. Can be.

[Brief description of the drawings]

FIG. 1 is a schematic sectional view showing an example of a liquid ejection head of the present invention.

FIG. 2 is a partially cutaway perspective view of the liquid ejection head of the present invention.

FIG. 3 is a schematic diagram showing pressure propagation from bubbles in a conventional head.

FIG. 4 is a schematic diagram showing pressure propagation from bubbles in the head of the present invention.

FIG. 5 is a schematic diagram for explaining a flow of a liquid according to the present invention.

FIG. 6 is a partially broken perspective view of a liquid discharge head according to a second embodiment of the present invention.

FIG. 7 is a partially cutaway perspective view of a liquid ejection head according to a third embodiment of the present invention.

FIG. 8 is a sectional view of a liquid ejection head according to a fourth embodiment of the present invention.

FIG. 9 is a schematic sectional view of a liquid ejection head according to a fifth embodiment of the present invention.

FIG. 10 is a sectional view of a liquid ejection head (two flow paths) according to a sixth embodiment of the present invention.

FIG. 11 is a partially broken perspective view of a liquid ejection head according to a sixth embodiment of the present invention.

FIG. 12 is a view for explaining the operation of the movable member.

FIG. 13 is a view for explaining a structure of a movable member and a first liquid flow path.

FIG. 14 is a view for explaining a structure of a movable member and a liquid flow path.

FIG. 15 is a view for explaining another shape of the movable member.

FIG. 16 is a diagram illustrating a relationship between a heating element area and an ink ejection amount.

FIG. 17 is a diagram illustrating an arrangement relationship between a movable member and a heating element.

FIG. 18 is a diagram showing a relationship between a distance between an edge of a heating element and a fulcrum and a displacement amount of a movable member.

FIG. 19 is a diagram for explaining an arrangement relationship between a heating element and a movable member.

FIG. 20 is a longitudinal sectional view of the liquid ejection head of the present invention.

FIG. 21 is a schematic diagram showing a shape of a driving pulse.

FIG. 22 is a cross-sectional view for explaining a supply path of the liquid ejection head of the present invention.

FIG. 23 is an exploded perspective view of the head of the present invention.

FIG. 24 is a process chart for explaining the method for manufacturing a liquid discharge head according to the present invention.

FIG. 25 is a process diagram for describing the method for manufacturing a liquid discharge head according to the present invention.

FIG. 26 is a process diagram for describing the method for manufacturing a liquid discharge head according to the present invention.

FIG. 27 is an exploded perspective view of the liquid ejection head cartridge.

FIG. 28 is a schematic configuration diagram of a liquid ejection device.

FIG. 29 is a device block diagram.

FIG. 30 is a diagram showing a liquid ejection recording system.

FIG. 31 is a schematic diagram of a head kit.

FIGS. 32A and 32B are diagrams showing a first embodiment of the liquid ejection head of the present invention, in which FIG. 32A is a cross-sectional view in a direction perpendicular to the flow of the liquid, and FIG. FIG.

FIG. 33 is a view showing a second embodiment of the liquid ejection head of the present invention.

FIG. 34 is a view showing a third embodiment of the liquid ejection head of the present invention.

FIG. 35 is a view showing a fourth embodiment of the liquid ejection head of the present invention.

FIG. 36 is a view showing a fifth embodiment of the liquid ejection head of the present invention.

FIG. 37 is a view showing a sixth embodiment of the liquid ejection head of the present invention.

FIG. 38 is a view for explaining a liquid flow path structure of a conventional liquid discharge head.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Element board 2, 702 Heating element 3 Center of area 10 Liquid flow path 11, 711 Bubble generation area 12 Supply path 13 Common liquid chamber 14, 714 First liquid flow path 15 First common liquid chamber 16, 716 Second liquid flow path 17 Second common liquid chamber 18,718 Discharge port 19 Narrowed portion 20 First supply path 21 Second supply path 22 First liquid flow path wall 23 Second liquid flow path wall 24 Convex part 30 Separation wall 31,731,751 Movable Member 32 Free end 33 Support point 34,734 Support member 35 Slit 36 Bubble generation area front wall 37 Bubble generation area side wall 40 Bubble 45 Droplet 50 Grooved member 51 Orifice plate 70 Support 78 Spring 80 Supply member 720, 721 Substrate

Claims (37)

[Claims] 1. A liquid discharging method for discharging a liquid by generating bubbles, comprising: a first substrate provided with a plurality of heating elements for applying heat to generate bubbles in the liquid; and bonding to the first substrate. A second substrate provided with grooves for forming a plurality of liquid flow paths through which the liquid discharged from the plurality of discharge ports for discharging the liquid flows; and a bubble positioned on the heating element, A first movable member which is provided facing a bubble generation region, which is a region where air bubbles are generated, and is displaceable between a first position and a second position farther from the bubble generation region than the first position. And provided between the first substrate and the second substrate at a joint portion between the first substrate and the second substrate, the third position and the third position being more than the third position. A second movable movable between a fourth position far from the bubble generation area The first movable member is displaced from the first position to the second position by a pressure based on the generation of bubbles in the bubble generation region to discharge the bubbles to the discharge port. A liquid ejection method characterized by expanding the pressure largely in the downstream direction than in the upstream direction. 2. The liquid discharging method according to claim 1, wherein the first movable member and the second movable member are formed of the same member. 3. The liquid discharging method according to claim 1, wherein a length from a fulcrum to a free end of the second movable member is shorter than a width of the liquid flow path. Liquid ejection method. 4. The liquid discharging method according to claim 1, wherein the second movable members are arranged such that the second movable members in the same liquid flow path are arranged in the liquid flow direction. A liquid ejection method characterized by being symmetrical toward the left and right. 5. The liquid discharging method according to claim 1, wherein a length of the second movable member in a flow direction of the liquid is longer than a length of the heating element in a flow direction of the liquid. Liquid ejection method characterized in that the liquid ejection method is also long. 6. The liquid discharging method according to claim 1, wherein the second movable member is made of a nickel plate. 7. A liquid discharging method for discharging a liquid by generating air bubbles, comprising: a first substrate provided with a plurality of heating elements for applying heat to generate air bubbles in the liquid; and bonding to the first substrate. A second substrate having grooves for forming a plurality of liquid flow paths through which the liquid discharged from the plurality of discharge ports discharging the liquid flows; the first substrate and the second substrate, respectively. Between the third position and a fourth position farther from the heating element than the third position, the portion being provided between the first substrate and the second substrate at a joint portion with the first substrate. Using a head having a movable member capable of displacing the movable member. The movable member is displaced from the third position to the fourth position by a pressure based on the generation of the bubble on the heating element, and the bubble is displaced. While expanding greatly to the discharge port side Serial liquid ejection method characterized by preventing the pressure is transmitted that the junction between the first substrate and the second substrate. 8. The liquid discharging method according to claim 7, wherein the movable members are provided such that free ends of the movable members in the same liquid flow path face each other. Method. 9. The liquid discharging method according to claim 7, wherein a length from a fulcrum to a free end of the movable member is shorter than a width of the liquid flow path. Method. 10. The liquid discharging method according to claim 7, wherein the movable members in the same liquid flow path are symmetrical with respect to a flow direction of the liquid. A liquid discharging method characterized by the above-mentioned. 11. The liquid discharging method according to claim 7, wherein a length of the movable member in a flow direction of the liquid is longer than a length of the heating element in a flow direction of the liquid. A liquid discharging method characterized by the above-mentioned. 12. The liquid discharging method according to claim 7, wherein the movable member is made of a nickel plate. 13. The liquid discharging method according to claim 1, wherein the heating element is an electrothermal converter. 14. A liquid discharge head that discharges a liquid by generating bubbles, a first substrate provided with a plurality of heating elements for applying heat to generate bubbles in the liquid, and bonding to the first substrate. A second substrate having grooves for forming a plurality of liquid flow paths through which the liquids discharged from the plurality of discharge ports for discharging the liquid flow, and wherein the second substrate is located on the heating element, A bubble generation region, which is a region where bubbles are generated, and a first position provided to face the bubble generation region,
A first movable member capable of being displaced between a second position farther from the bubble generation region than the position of the first substrate; and a first substrate on both sides of the first movable member in a vertical direction of the liquid flow. A third position and a fourth position farther from the bubble generation region than the third position, the third position being provided between the first substrate and the second substrate at a joint portion between the first substrate and the second substrate. And a second movable member capable of being displaced between the first movable member and the second movable member from the first position by a pressure based on the generation of bubbles in the bubble generation region. Wherein the second movable member is displaced from the third position to the fourth position by a pressure based on the generation of bubbles in the bubble generation region. 15. The liquid discharge head according to claim 14, wherein the first movable member and the second movable member are formed of the same member. 16. The liquid ejection head according to claim 14, wherein a length from a fulcrum to a free end of the second movable member is shorter than a width of the liquid flow path. Liquid ejection head. 17. The liquid ejection head according to claim 14, wherein the second movable members are arranged such that the second movable members in the same liquid flow path are arranged in the liquid flow direction. A liquid ejection head, which is symmetrical toward the left and right. 18. The liquid discharge head according to claim 14, wherein a length of the second movable member in a liquid flow direction is longer than a length of the heating element in a liquid flow direction. Liquid ejection head characterized in that it is also long. 19. The liquid discharge head according to claim 14, wherein the second movable member is made of a nickel plate. 20. A liquid discharge head that discharges a liquid by generating bubbles, a first substrate provided with a plurality of heating elements for applying heat to generate bubbles in the liquid, and bonding to the first substrate. A second substrate having a groove for forming a plurality of liquid flow paths through which the liquid discharged from the plurality of discharge ports discharging the liquid flows; the first substrate and the second substrate; Between the third position and a fourth position farther from the heating element than the third position, the portion being provided between the first substrate and the second substrate at a joint portion with the first substrate. Wherein the movable member is displaced from the third position to the fourth position by a pressure based on the generation of bubbles on the heating element. head. 21. The liquid discharge head according to claim 20, wherein the movable members are provided such that free ends of the movable members in the same liquid flow path face each other. head. 22. The liquid discharge head according to claim 20, wherein a length from a fulcrum to a free end of the movable member is shorter than a width of the liquid flow path. head. 23. The liquid ejection head according to claim 20, wherein the movable members in the same liquid flow path are symmetrical in the left-right direction in the liquid flow direction. A liquid ejection head characterized by the above-mentioned. 24. The liquid discharge head according to claim 20, wherein the length of the movable member in the liquid flow direction is longer than the length of the heating element in the liquid flow direction. A liquid ejection head characterized by the above-mentioned. 25. The liquid discharge head according to claim 20, wherein the movable member is made of a nickel plate. 26. The liquid discharge head according to claim 14, wherein the heating element is an electrothermal transducer. 27. A liquid discharge head according to claim 14, further comprising: a drive signal supply unit that supplies a drive signal for discharging liquid from the liquid discharge head. Liquid ejecting device. 28. A liquid ejection head according to claim 14, comprising: a recording medium transport unit that transports a recording medium that receives liquid discharged from the liquid ejection head. Characteristic liquid discharge device. 29. The liquid ejection apparatus according to claim 27, wherein the recording is performed by ejecting ink from the liquid ejection head and attaching the ink to recording paper. . 30. The liquid ejection apparatus according to claim 27, wherein the recording is performed by ejecting ink from the liquid ejection head and attaching the ink to a cloth. 31. The liquid ejection apparatus according to claim 27, wherein the recording is performed by ejecting ink from the liquid ejection head and attaching the ink to plastic. 32. The liquid ejection apparatus according to claim 27, wherein the recording is performed by ejecting ink from the liquid ejection head and attaching the ink to a metal. 33. The liquid discharging apparatus according to claim 27, wherein the recording is performed by discharging ink from the liquid discharging head and attaching the ink to wood. 34. The liquid discharging apparatus according to claim 27, wherein the recording is performed by discharging ink from the liquid discharging head and attaching the ink to leather. 35. The liquid ejecting apparatus according to claim 27, wherein a plurality of colors of recording liquid are ejected from the liquid ejection head, and the plurality of colors of recording liquid adhere to a recording medium. A liquid ejecting apparatus for performing recording. 36. The liquid discharging apparatus according to claim 27, wherein a plurality of the discharging ports are arranged over the entire width of a recordable area of the recording medium. . 37. A plurality of discharge ports for discharging a liquid, a plurality of liquid flow paths through which the liquid discharged from the plurality of discharge ports flows, and a plurality of heating elements for applying heat to generate bubbles in the liquid. And a groove for forming a plurality of liquid flow paths through which the liquid discharged from the plurality of discharge ports for discharging the liquid flows by being bonded to the first substrate. A second substrate, a bubble generating region located on the heating element, the bubble generating region being a region where the bubbles are generated, a first position provided on the bubble generating region,
A first movable member capable of being displaced between a second position farther from the bubble generation region than the position of the first substrate; and a first substrate on both sides of the first movable member in a vertical direction of the liquid flow. A third position and a fourth position farther from the bubble generation region than the third position, the third position being provided between the first substrate and the second substrate at a joint portion between the first substrate and the second substrate. A second movable member displaceable between the first movable member and the second movable member, wherein the first movable member and the second movable member are formed of the same member. Wherein the distance between the second movable members in the same liquid flow path is increased as the distance from the discharge port increases.