JPH1021558A - Master disk recording device and position control method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To perform positional control with a high resolution but lower than the detection resolution of positional control for the fine movement of a recording unit. SOLUTION: For making an optical master disk 20 by collecting laser lights with a recording unit 21 and performing exposure, the recording unit 21 is sent in the radial direction of the optical master disk 20 by a first driving system 24, the recording unit 21 is position-adjusted in the radial direction by a second driving system 34 and a distance within the resolution of the second driving system 34 is position-adjusted by a third driving system 36.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a disk recording method and apparatus for recording information by irradiating a laser beam to an optical disk master, for example.

[0002]

2. Description of the Related Art FIG. 39 is a block diagram of a conventional optical disk master recording apparatus.

A spindle motor 2 is provided on an anti-vibration table 1. An optical disc master 3 is mounted on a turntable connected to the rotation shaft of the spindle motor 2. The optical disk master 3 is obtained by applying a resist on a glass substrate.

[0004] A coarse movement table 4 is provided on the vibration isolation table 1. The coarse movement table 4 includes a friction drive mechanism 5
Drive along the rails 6 and 7 in the direction of the arrow (a),
That is, the optical disc master 3 moves in the radial direction at a predetermined coarse movement stroke at every step.

[0005] The coarse movement table 4 is provided with a fine movement table 8, and the fine movement table 8 is provided with a recording unit 9.

The fine movement table 8 is for finely moving the recording unit 9 in the radial direction of the optical disk 3 by making a fine movement with a fine movement stroke smaller than the coarse movement stroke for each step due to expansion and contraction of the piezoelectric element.

The recording unit 9 includes an objective lens and an objective lens actuator, and focuses laser light on the optical disk master 3.

On the other hand, the recording laser head 1
0 is provided. The recording laser head 10 outputs a recording laser beam 11 for irradiating the optical disk master 3 with an EO modulator (electro-optic modulator) 12 and an AO modulator (acousto-optic modulator). ) 1
The recording unit 9 is guided to a recording unit 9 through a recording optical system 15 including 3, 14 and the like.

The laser length measuring system 16 has a function of measuring the length of each of the coarse movement table 4 and the fine movement table 8.

The controller 17 inputs the positions of the coarse movement table 4 and the fine movement table 8 measured by the laser length measurement system 16 and moves the coarse movement table 4 and the fine movement table so that the position of the recording unit 9 becomes the target position. It has a function of performing feedback control on driving of the table 8.

With such a configuration, the optical disk master 3 is driven by the rotation of the spindle motor 2 so that the arrow (b)
Spin at a constant speed in the direction.

At the same time, the recording unit 9 repeats a contraction operation of the fine movement table 8 when the coarse movement table 4 moves by one coarse movement stroke and an extension operation of the fine movement table 8 when the coarse movement table 4 stops. The optical disk master 3 moves in the radial direction.

The positions of the coarse movement table 4 and the fine movement table 8 at this time are measured by the laser length measuring system 16 and sent to the controller 17. When each position of the coarse movement table 4 and the fine movement table 8 is input, the controller 17 drives and controls the coarse movement table 4 and the fine movement table 8 so that the position of the recording unit 9 becomes the target position.

On the other hand, the recording laser beam 11 output from the recording laser head 10 is guided to the recording unit 9 through the recording optical system 15, so that the recording unit 9 performs recording while moving in the radial direction of the optical disk master 3. The laser beam 11 is irradiated onto the optical disc master 3 rotating at a constant speed.

As a result, the resist on the optical disk master 3 is exposed, and a group of information such as pits and grooves is spirally recorded.

[0016]

However, the resolution for each position control of the coarse movement table 4 and the fine movement table 8 is restricted by the resolution of the length measurement by the laser length measurement system 16, and this laser length measurement system In principle, it is impossible to control the position at a resolution higher than the length measurement resolution according to P.16.

For example, if a laser interferometer is used for the laser length measuring system 16, the current maximum resolution of this laser interferometer is 0.3 nm, and it is impossible to perform position control with a resolution higher than this value. It is.

However, for the optical disk master 3,
There is a demand for high-density information recording by sufficiently reducing the recording error. For this purpose, it is necessary to control the position of each of the coarse movement table 4 and the fine movement table 8 with a higher resolution than the current state. Become.

Accordingly, an object of the present invention is to provide a master recording apparatus capable of performing position control with high resolution and reducing recording errors.

Another object of the present invention is to provide a position control method capable of performing position control with high resolution.

[0021]

According to a first aspect of the present invention, there is provided an original recording apparatus for producing a master of an optical disk by condensing and exposing a laser beam by an imaging optical system. A first drive system for feeding in the radial direction, a second drive system for feedback control provided in the first drive system for adjusting the position of the imaging optical system in the radial direction, and provided in the second drive system And a third drive system of open-loop control for adjusting the position of the distance within the resolution of the second drive system.

In the case of such a master recording apparatus, when a master of an optical disk is produced by condensing and exposing a laser beam by an imaging optical system, the imaging optical system is driven by the first drive system to form the optical disk. It is fed in the radial direction, the position of the imaging optical system is adjusted in the radial direction by the second drive system, and the position within the resolution of the second drive system is adjusted by the third drive system.

According to the second aspect of the present invention, the focus of the laser light by the imaging optical system in the radial direction of the optical disk of the master recording apparatus for forming the master of the optical disk by condensing and exposing the laser light by the imaging optical system. In a position control method for detecting a position with a position detector and matching a focal position to a target position, a first step of bringing the focal position closer to the target position by feedback control based on position information of the position detector;
A second step of converting an error between the focus position and the target position generated in the first step into a voltage amount, and approaching the target position by open loop control.

According to such a position control method, in the first step, the focal position of the laser beam by the imaging optical system is brought closer to the target position by feedback control based on the position information of the position detector, and the second step is performed. In step (1), the error between the focal position and the target position generated in the first step is converted into a voltage amount, and the voltage is brought closer to the target position by open loop control. Thus, when a master disc of an optical disc is created by condensing and exposing the laser beam by the imaging optical system, the focal position of the laser beam by the imaging optical system in the radial direction of the optical disc is matched with the target position.

According to the third aspect, there is provided a coarse movement mechanism for coarsely moving the recording unit for recording information on the disk surface with a predetermined coarse movement stroke and a fine movement mechanism for finely moving the recording unit with a fine movement stroke smaller than the coarse movement stroke. In a master recording apparatus provided with: measuring means for measuring pitching when a recording unit is moved onto a disk surface by a coarse movement mechanism; and control means for controlling a fine movement mechanism based on pitching measured by the pitching measurement means. , A master recording device comprising:

In such a master recording apparatus, the pitching when the recording unit is coarsely moved on the disk surface is measured, and the fine movement mechanism is controlled based on the pitching, so that the movement of the recording unit is reduced. Position control can be performed with high resolution to reduce recording errors.

According to the fourth aspect, a coarse movement mechanism for coarsely moving the recording unit for recording information on the disk surface with a predetermined coarse movement stroke and a fine movement mechanism for finely moving the recording unit with a fine movement stroke smaller than the coarse movement stroke. Measuring means for measuring a relative position between the disk and the recording unit, and at least a coarse movement mechanism based on the relative position between the disk and the recording unit measured by the measuring means. And a control unit for controlling coarse movement.

With such a master recording apparatus, the relative position between the disk and the recording unit is measured, and at least the coarse movement by the coarse movement mechanism is performed based on the relative position between the disk and the recording unit. By performing the control, the position of the movement of the recording unit can be controlled at a high resolution without affecting the recording unit by disturbance such as vibration, and the recording error can be reduced.

According to a fifth aspect, in the master recording apparatus according to the fourth aspect, at least a disk, a recording unit,
The disk recording system of the coarse movement mechanism and the fine movement mechanism and the measuring means provided with a laser head for outputting a laser beam were respectively installed on separate vibration proof tables.

With such a master recording apparatus, it is possible to reduce the measurement error of the recording unit position caused by the vibration caused by the cooling water supplied to the laser head, control the movement of the recording unit with high resolution, and reduce the recording error. Can be reduced.

According to the present invention, the recording unit for recording information on the disk surface is coarsely moved by a predetermined coarse movement stroke and finely moved by a fine movement stroke smaller than the coarse movement stroke. A master disc recording apparatus for performing information recording, comprising: a rotation mechanism for driving a disc to rotate; and a disc fine movement means for finely moving the rotation mechanism in the same direction as the movement direction by the coarse movement and the fine movement of the recording unit. This is a master recording device.

In such a master recording apparatus, the rotating mechanism is finely moved by the disk fine moving means to separate the rotating mechanism from the recording unit, and vibration such as vibration caused by the rotating operation of the rotating mechanism during focus control is controlled. By eliminating the effect, the measurement error of the recording unit position can be reduced,
The position of the movement of the recording unit can be controlled with high resolution, and the recording error can be reduced.

According to the seventh aspect, in the master recording apparatus according to the first to third aspects, the measuring means for measuring the amount of distortion in the coarse movement mechanism, and the amount of distortion measured by the measuring means is preset. And a notifying means for notifying based on the value that has become greater than or equal to the value.

With such a master recording apparatus, when the amount of distortion in the coarse movement mechanism is equal to or greater than a preset value, a notification of one cause of a recording error due to disturbance of the coarse movement mechanism such as dust and scratches is made.

According to the eighth aspect, a coarse movement mechanism for coarsely moving the recording unit for recording information on the disk surface with a predetermined coarse movement stroke and a fine movement mechanism for finely moving the recording unit with a fine movement stroke smaller than the coarse movement stroke. And a fuzzy inference means for controlling coarse movement by the coarse movement mechanism by fuzzy inference based on at least a change in acceleration of the coarse movement mechanism.

With such a master recording apparatus, the coarse movement movement of the coarse movement mechanism is controlled by fuzzy inference based on at least the acceleration change of the coarse movement mechanism, so that the measurement error of the recording unit position can be reduced. The position of the unit can be controlled with high resolution to reduce recording errors.

According to the ninth aspect, in the master recording apparatus according to the eighth aspect, the fuzzy inference means inputs a PID value for a change in acceleration of the coarse movement mechanism and a deviation between a target position and a current position of the coarse movement mechanism. And a function of outputting a drive signal of the coarse movement mechanism by performing fuzzy inference based on the acceleration change and the PID value.

According to a tenth aspect of the present invention, in the master recording apparatus according to the eighth aspect, the fuzzy inference means inputs a change in the acceleration of the coarse movement mechanism and a deviation between the target position and the current position of the coarse movement mechanism. It has a function of obtaining an input signal to the PID control unit by performing fuzzy inference based on the change and the deviation, and drives and controls the coarse movement mechanism by an output of the PID control unit.

According to an eleventh aspect of the present invention, in the master recording apparatus according to the eighth aspect, the fuzzy inference means inputs a change in acceleration of the coarse movement mechanism and a deviation between a target position and a current position of the coarse movement mechanism, and inputs these accelerations. Fuzzy inference is performed based on the change and the deviation to output a drive signal for the coarse movement mechanism.

According to the twelfth aspect, a coarse movement mechanism for coarsely moving the recording unit for recording information on the disk surface with a predetermined coarse movement stroke, and a fine movement mechanism for finely moving the recording unit with a fine movement stroke smaller than the coarse movement stroke. In the master recording device equipped with, a neural network for inputting at least the acceleration change of the coarse movement mechanism and repeatedly updating the synaptic connection load so as to minimize the evaluation function by the multilayer network to obtain the drive output of the coarse movement mechanism, It is a master recording device provided.

With such a master recording apparatus, since at least the acceleration change of the coarse movement mechanism is inputted and the drive output of the coarse movement mechanism is obtained by the multilayer network of the neural network, the measurement error of the recording unit position can be reduced.
The position of the movement of the recording unit can be controlled with high resolution, and the recording error can be reduced.

According to a thirteenth aspect, in the master recording apparatus according to the twelfth aspect, the neural network inputs a deviation between a target position and a current position of the coarse movement mechanism, and changes in speed and acceleration of the coarse movement mechanism. The evaluation function based on the acceleration change and deviation of the dynamic mechanism is adjusted by the synaptic connection load to
Has a function of obtaining an input signal to the ID control unit, and
The drive of the coarse movement mechanism is controlled by the output of the D control unit.

According to a fourteenth aspect of the present invention, in the master recording apparatus according to the twelfth aspect, the neural network includes a deviation between a target position and a current position of the coarse movement mechanism, and a preset P value.
The ID value and the change in acceleration of the coarse movement mechanism are input, and the evaluation function based on the change in acceleration and the deviation of the coarse movement mechanism is adjusted by the synapse connection load to obtain a PI for the PID control unit.
It has a function to obtain the D value, and controls the driving of the coarse movement mechanism by the output of the PID control unit.

According to a fifteenth aspect of the present invention, in the master recording apparatus according to the twelfth aspect, the neural network includes a deviation between a target position and a current position of the coarse movement mechanism, and a preset P value.
It has a function of inputting the ID value and the change in acceleration of the coarse movement mechanism, and adjusting the evaluation function based on the change in acceleration and the deviation of the coarse movement mechanism by a synaptic connection load to obtain a drive output of the coarse movement mechanism.

[0045]

BEST MODE FOR CARRYING OUT THE INVENTION

(1) Hereinafter, a first embodiment of the present invention will be described with reference to the drawings.

FIG. 1 is a configuration diagram of an optical disk master recording apparatus.

In this optical disc master recording apparatus, a recording unit 21 for recording information on the optical disc master 20 is disposed above the optical disc master 20 having a glass substrate coated with a resist. A first drive system for feeding the master 20 in the radial direction;
And a second drive system for feedback control that adjusts the position of the recording unit 21 in the radial direction of the master optical disc 20. The second drive system is provided in the second drive system and is within the resolution of the second drive system. And a third drive system of open loop control for adjusting the position of the distance.

That is, a turntable 23 is connected to the rotating shaft of the spindle motor 22, and the optical disk master 20 is mounted on the turntable 23.

The coarse movement mechanism 24 causes the recording unit 21 to move the recording unit 21 at a predetermined coarse movement stroke for each step.
Has the function of moving in the radial direction.

The coarse movement mechanism 24 includes a coarse movement drive motor 25.
, A driving rod 26 is connected thereto, and a coarse movement table 28 is connected to the driving rod 26 via a coupling 27.

A tach generator 29 is connected to the coarse drive motor 25, and the speed signal v ₁ of the coarse table 28 is fed back to the driver 30 from the tach generator 29. Note that a plurality of rolls 31 and 32 are pressed against the drive rod 26.

On the coarse movement table 28, a fine movement actuator 34 as a fine movement mechanism is provided via a support 33. The fine movement actuator 34 uses, for example, a piezoelectric element and has a function of expanding and contracting at a fine movement stroke smaller than the coarse movement stroke of the coarse movement table 28 per step.

An ultrafine actuator 36 is provided at the tip of the fine actuator 34 via a support 35, and the recording unit 21 is provided at the tip of the ultrafine actuator 36.

The ultra-fine movement actuator 36 uses, for example, a piezoelectric element and has a function of moving the recording unit 21 in the radial direction of the optical disk master 20 with an ultra-fine movement stroke smaller than the fine movement stroke of the fine movement actuator 34.

The sensitivity of the ultra-fine movement actuator 36 is as follows.
For example, 0.08 μm / V, for example, 16 mV
Is applied, the displacement is 0.08 [μm] × 16 [mV] /1000=1.25 nm (1).

The recording unit 21 is composed of a voice coil motor (VCM) 37 and an objective lens 38. The recording laser beam 40 output from the recording laser head 39 enters through a recording optical system such as a mirror 41 and is condensed. And has a function of condensing light on the optical disk master 20.

The first laser length measuring system 42 uses a laser interferometer, and outputs laser light to a mirror 43 provided on the coarse movement table 28 and receives the reflected laser light. And has a function of measuring the position of the coarse movement table 28.

The second laser length measuring system 44 uses a laser interferometer, and outputs a laser beam to a mirror 45 provided on a support 35 at the tip of the fine movement actuator 34, and reflects the reflected laser beam. It has a function of receiving light and measuring the position of the distal end of the fine movement actuator 34.

The computer 46 has a function of issuing a target position command Q ₁ for the coarse movement table 28 to the deviation unit 47. The deviator 47 is configured to output the target position command Q ₁ and the first
Has a function of calculating a deviation from the position of the coarse movement table 28 measured by the laser length measuring system 42 and sending the deviation to the driver 30.

The computer 46 has a function of issuing a target position command Q ₂ to the fine actuator 34 to the deviation unit 48. The deviation device 48 has a function of calculating a deviation between the target position command Q ₂ and the tip position of the fine movement actuator 34 measured by the second laser length measurement system 44 and sending the deviation to the driver 49.

[0061] The computer 46 has a function of applying the ultra-fine actuator 36 in an open loop command voltage V _z to the very fine actuator 36 through the driver 50.

The computer 46 repeats the expansion / contraction control of the ultra-fine movement actuator 36 and the fine movement actuator 34 and the feed operation of the coarse movement mechanism 24 to repeat the recording unit 2.
1 is moved in the radial direction of the optical disk master 20.

That is, a command voltage _Vz is issued to the ultra-fine motion actuator 36 to extend the ultra-fine motion actuator 36 by several steps in the ultra-fine motion stroke S _{1 as} shown in FIG. There is reached the fine movement stroke S ₂ of the fine actuator 34, operates stretched micro actuator 34 by one step with operating shrinkage ultra fine actuator 36.

When the extension / retraction operation of the ultra-fine movement actuator 36 and the fine movement actuator 34 is repeated and the extension amount of the fine movement actuator 34 reaches the coarse movement stroke S ₃ of the coarse movement mechanism 24, the fine movement actuator 34 is contracted and the coarse movement table is moved. 27 for one coarse movement stroke S ₃
Only feed operation.

Next, the operation of the device configured as described above will be described.

The optical disk master 20 is a turntable 2
3 and is rotated at a constant speed by the rotational drive of the spindle motor 22.

At the same time, the position of the recording unit 21 is controlled over a large stroke by repeating the feed operation of the coarse movement mechanism 24 and the expansion and contraction operations of the fine movement actuator 34 and the ultra-fine movement actuator 36.

[0068] That is, when the command voltage V _z with respect to ultra-fine actuator 36 is issued, the ultra-fine actuator 36, as shown in FIG. 2 super fine movement stroke S ₁
, The recording unit 21 is moved in the radial direction of the master optical disc 20.

When the extension amount of the ultra-fine movement actuator 36 reaches the fine movement stroke S ₂ of the fine movement actuator 34, the ultra-fine movement actuator 36 contracts, and at the same time, the fine movement actuator 34 moves the fine movement stroke S _2.
Only one step is extended.

The ultra-fine movement actuator 36 extends again by several steps in the ultra-fine movement stroke S ₁ to move the recording unit 21 in the radial direction of the optical disk master 20.

Then, these ultra-fine movement actuators 36
And the fine movement actuator 34 are repeatedly extended and retracted.
Extending fine actuator 34 is several steps, when the elongation amount reaches the coarse stroke S ₃ of the coarse feed mechanism 24, the fine actuator 34 with operating shrinkage, coarse table 28 is coarse stroke of the coarse positioner 24 S Feeding operation is performed by ₃ .

As described above, the expansion / contraction operation of the fine movement actuator 34 and the ultra-fine movement actuator 36 and the feeding operation of the coarse movement mechanism 24 are repeatedly performed, and the recording position of the recording unit 21 on the optical disk master 20 is as shown in FIG. is a position control for each ultrasonic fine movement stroke S _1.

At this time, the position of the coarse movement table 28 is measured by the first laser length measuring system 42 and sent to the deviation unit 47. Here, the target position command Q ₁ and the position of the coarse movement table 28 Is obtained and sent to the driver 30 to perform feedback control (closed loop).

At the same time, the tip position of the fine actuator 34 is measured by the second laser length measuring system 44 and sent to the deviation unit 48, where the target position command Q ₂ and the tip position of the fine actuator 34 are compared. The feedback control (closed loop) is performed by obtaining the deviation and sending it to the driver 49.

On the other hand, when the recording laser beam 40 is output from the recording laser head 39, the recording laser beam 40 is guided to the recording unit 21 through a recording optical system such as a mirror 41.

The recording unit 21 irradiates the recording laser beam 40 onto the rotating optical disk master 20 at a constant speed while moving in the radial direction of the optical disk master 20 as described above.

As a result, the resist on the optical disk master 20 is exposed, and information groups such as pits and grooves are recorded spirally or concentrically.

As described above, when information is recorded on the optical disk master 20, the coarse movement mechanism 24 and the fine movement actuator 3
4 is feedback-controlled, and the operation of the ultra-fine movement actuator 36 performs position control of a resolution lower than the position control of the first and second laser length measurement systems 42 and 44.

More specifically, the sensitivity of the fine actuator 34 and the ultra-fine actuator 36 is set to 0.08.
[Μm / V], first and second laser length measuring systems 4
When the resolution of 2,44 2.5 [nm], when the fine actuator 34 is feedback position control to position P _1, and the length of the super-fine actuator 36 with L _1, the fine actuator 34 at this time, FIG. 3 (a)-
As shown by the fine movement position x _p and the ultra fine movement position X _u in (c), the swinging motion is P ₁ ± 2.5 [nm] (2), and the ultra fine movement actuator 36 is (P ₁ + L ₁ ) ± 2. .5 [nm] (3) Note that there is a relationship of x _p = X _u = 0.

Here, the fine movement is performed when the fine movement actuator 34 is feedback-controlled to each position P ₁ , P ₂ (where P ₁ -P ₂ is 1 bit detected by the laser length measuring system 42). Assuming that the voltages applied to the actuator 34 are V ₁ and V ₂ , respectively, when a voltage of V ₁ + (V ₂ −V ₁ ) / 2 (4) is applied to the ultrafine actuator 36, the hysteresis of the piezoelectric element is obtained. ignoring the distal end position of the ultra fine actuator 36, that is, the position of the recording unit _{21, P 1 + (P 2 -P} 1) / 2 ... becomes a (5), the actual is feedback controlled,
First laser measuring system 42 in which fine movement is at target position ± fine movement
Between 1 bit (P ₂ -P ₁ ).

Therefore, as shown in FIG. 3 (c), the oscillation of the fine motion actuator 34 caused by the ultra-fine motion of the ultra-fine motion actuator 36 is changed from the stop position of the oscillation, that is, the average position of the recording unit 21 to (P ₂ −P _1). ) / 2 ... (6) only from the position P ₁ is shifted to from the P _2.

Specifically, when a voltage V _a shown in FIG. 3B, for example, a voltage of 16 mV is applied to the ultra-fine movement actuator 36, the
As shown in (1), it is displaced by 1.25 [nm].

Assuming that the piezoelectric constant is k ₁ [m / V], the displacement of the ultrafine movement actuator 36 is expressed by V ₁ × k ₁ (= 1.25 [nm]) (7).

As a result, as shown in FIG. 3 (c), the position of the tip of the ultrafine movement actuator 36 is displaced by 1.25 nm from the center position of the vibration having the amplitude of 2.5 nm.

As described above, when the position of the recording unit 21 is shifted by the operation of the ultra-fine movement actuator 36, the center position of the light intensity distribution by the recording laser beam 40 at the time of recording is also shifted as shown in FIG.

Due to the shift of the center position of the light intensity distribution, the position of the pit created after the development is slightly affected by the resist characteristic of the optical disk master 20, ie, the relationship between the light intensity distribution and the light intensity distribution required for pit generation during development. The control can be performed at a resolution lower than the detection resolution of the first laser length measurement system 42.

As described above, according to the first embodiment, the recording unit 21 is moved on the optical disk master 20 by the feed operation of the coarse movement mechanism 24 and the fine movement stroke by the fine movement actuator 34, and
Since the recording unit is moved by the ultra-fine movement stroke by the drive based on the open loop control of No. 6, the position of the movement of the recording unit 21 can be controlled with a resolution higher than the detection resolution of the first laser length measurement system 42 for the fine movement.

For example, as shown in FIG. 5, the interval w between the information groups 51 such as spiral pits and grooves recorded on the optical disk master 20 is set to 1.25 or less, which is smaller than the detection resolution of the first laser length measuring system 42. Recording can be performed while controlling to about [nm] or less.

The focus center position is defined as P ₁ + (P ₂ −
When adjusting to P ₁ ) / 2, the fine movement device 34 is driven to
First match in P _1. After determining the position relative to P _1,
(P ₂ -P ₁₎ / ₂ to the corresponding voltage (V ₂ -V ₁₎ / ₂
Is applied to the ultrafine actuator 36 to obtain P ₁ + (P ₂ −
Position at P ₁ ) / 2.

In the same manner, it is possible to perform accurate positioning without defocusing at a position obtained by adding P / (n + 1) to P ₁ in consideration of the distance P between one bit and the number of points n.

The resolution of the feedback control system is determined by the position measurement system, and the density of the points that can be positioned is also determined by the resolution. Becomes possible.

(2) Next, a second embodiment of the present invention will be described. The same parts as those in FIG. 1 are denoted by the same reference numerals, and detailed description thereof will be omitted.

FIG. 6 is a configuration diagram of an optical disk master recording apparatus.

The coarse movement table 28 has a first mirror 60
Is provided. A first laser length measuring system 61 is arranged to face the first mirror 60.

The first laser length measuring system 61 uses a laser interferometer, outputs a laser beam to the first mirror 60, receives the reflected laser beam, and receives the reflected laser beam. , That is, the position of the coarse movement table 28.

A second mirror 62 is provided on the support 35 provided at the tip of the fine movement actuator 34. A second laser length measuring system 63 is arranged opposite to the second mirror 62.

The second laser length measuring system 63 uses a laser interferometer, and outputs a laser beam to the second mirror 62, receives the reflected laser beam and receives the reflected laser beam. Of the recording unit 21, that is, the position of the recording unit 21.

The computer 64 has a function of issuing a target position command Q ₁ for the coarse movement table 28 to the deviation unit 47. The deviator 47 is configured to output the target position command Q ₁ and the first
Has a function of calculating a deviation from the position of the coarse movement table 28 measured by the laser length measuring system 61 and sending the deviation to the driver 30.

The computer 64 has a function of issuing a target position command Q ₂ for the fine movement actuator 34 to the deviation device 48. The deviation device 48 has a function of obtaining a deviation between the target position command Q ₂ and the tip position of the fine movement actuator 34 measured by the second laser length measurement system 63 and sending the deviation to the driver 49.

Further, the computer 46 has a function of moving the recording unit 21 in the radial direction of the optical disk master 20 by repeating the expansion / contraction control of the fine movement actuator 34 and the feed operation of the coarse movement mechanism 24.

The computer 46 calculates the position P _s of the first mirror 60 measured by the first laser length measuring system 61 and the second mirror 62 measured by the second laser length measuring system 63. Of the position P _r
s , _Pr , applied voltage y of fine movement actuator 34
[V], sensitivity S _p of fine movement actuator 34 (= 0.0
8 [μm / V]) to calculate the pitching θ _p of the coarse movement table 28.

Here, the position C of the first mirror 60 is P
Since the pitching θ _p of the coarse movement table 28 is represented by _r− S _p · y, assuming that the vertical and horizontal intervals of the first and second mirrors 60 and 62 are L ₁ and L ₂ , θ _p = represented by _{[{(P r -S p ·} y) -P s} -L 2] / L 1 ... (8).

The track pitch recording error E ₁ on the surface of the optical disk master 20 is represented by E ₁ = L · θ _p (9), where L is the distance between the optical disk master 20 and the recording unit 21.

[0104] Thus, the computer 46 has a function for correcting the target position command Q ₂ for fine actuator 34 by the track pitch recorded error E _1.

Next, the operation of the device configured as described above will be described.

The optical disk master 20 is a turntable 2
3 and is rotated at a constant speed by the rotational drive of the spindle motor 22.

At the same time, the position of the recording unit 21 is controlled over a large stroke by repeating the feed operation of the coarse movement mechanism 24 and the expansion / contraction operation of the fine movement actuator 34.

That is, when the position command Q ₂ is issued to the fine movement actuator 34, the fine movement actuator 34 extends by several steps in the fine movement stroke S ₂ , and moves the recording unit 21 in the radial direction of the optical disk master 20. Let it.

When the extension amount of the fine movement actuator 34 reaches the coarse movement stroke S ₃ of the coarse movement mechanism 24, the fine movement actuator 34 contracts and the coarse movement table 28 performs a one-step feed operation by the coarse movement stroke S _3. .

Thereafter, these fine movement actuators 34
Is repeated feeding operation of the expansion and contraction and coarse table 28, the recording position on the optical disc master 20 of the recording unit 21 is a position control for each fine movement stroke S _2.

At this time, the position of coarse movement table 28 is
Is measured by the laser length measuring system 61 of FIG.
Where the target position command Q ₁ and the coarse movement table 2
The deviation from the position 8 is obtained and sent to the driver 30 for feedback control.

At the same time, the tip position of the fine movement actuator 34 is measured by the second laser length measuring system 63 and sent to the deviation unit 48, where the target position command Q ₂ and the tip position of the fine movement actuator 34 are compared. The feedback control is performed by obtaining the deviation and sending it to the driver 49.

On the other hand, when the recording laser beam 40 is output from the recording laser head 39, the recording laser beam 40 is guided to the recording unit 21 through a recording optical system such as a mirror 41, and is recorded by the recording unit 21. 40
Is irradiated onto the optical disc master 20 rotating at a constant speed.

As a result, the resist on the optical disk master 20 is exposed, and a group of information such as pits and grooves is spirally recorded.

On the other hand, the computer 46 determines the position P _s of the first mirror 60 measured by the first laser length measuring system 61 and the second mirror 62 measured by the second laser length measuring system 63. _Is input, and these positions P _s and P _r and the applied voltage y of the fine movement actuator 34 are input.
[V], sensitivity S _p of fine movement actuator 34 (= 0.0
8 [μm / V]) to calculate the pitching θ _p of the coarse movement table 28 by calculating the above equation (8).

Next, the computer 46 sets the pitching θ _p
Is calculated, the master optical disc 20 and the recording unit 21
Using the distance L between, calculating the track pitch recorded error E ₁ in the optical disc master 20 on the surfaces of by calculating the above expression (9).

[0117] Then, the computer 46 corrects the target position command Q ₂ for fine actuator 34 by the track pitch recorded error E _1.

The hysteresis of the fine movement actuator (piezoelectric element) 34 may be considered. However, when the coarse movement table 28 always positions the fine movement actuator 34 near the target position, for example, to ± 50 nm, the hysteresis is not changed. 1 for 34 expansion and contraction
Since it is about 0%, the hysteresis value is 50 nm × 0.1 =
The value is very small at 5 nm.

[0119] Therefore, when the longitudinal spacing L ₁ of the first and second mirrors 60, 62 50 mm, and 1mm spacing L between the optical disc master 20 and the recording unit 21, the correction error E _c is, E _c = 1 [mm] × (5 [nm] / 50 [mm]) = 0.1 [nm] (10), which is a very small value, and the hysteresis of the fine movement actuator 34 does not cause a serious problem.

As described above, in the second embodiment, the pitching θ _p when the recording unit 21 is moved above the surface of the optical disk master 20 is measured, and the operation of the fine movement actuator 34 is determined based on the pitching θ _p. since correcting the located control movement of the recording unit 21 with a high resolution and can reduce the track pitch recorded error E ₁ of on the optical disc master 20 side, it can be reduced recording errors.

As a result, the interval w between the information groups 51 such as spiral pits and grooves recorded on the optical disk master 20 is set to be equal to or smaller than the detection resolution of the first and second laser length measuring systems 61 and 63. Recording can be performed while being controlled to about 25 [nm] to 0.5 [nm].

(3) Next, a third embodiment of the present invention will be described. The same parts as those in FIG. 1 are denoted by the same reference numerals, and detailed description thereof will be omitted.

FIG. 7 is a configuration diagram of an optical disk master recording apparatus.

This optical disk master recording apparatus is provided with a measuring means 70 for measuring the relative position between the optical disk master 20 and the recording unit 21.

FIG. 8 is an enlarged block diagram of the measuring means 70.

A measuring mirror 71 is provided on the side surface of the turntable 23, and a reference mirror (corner cube) 72 is provided on the recording unit 21.

The length measuring laser head 73 outputs the length measuring laser light 7
4, a deflection beam splitter 75 and a light quantity control element 76 are arranged on the optical path of the length measuring laser light 74.

A mirror 77 is arranged in the emission direction of the deflection beam splitter 75, and
The measuring laser light 74 emitted from the mirror is reflected and guided to the reference mirror 72.

[0129] A receiver 78 is arranged in the emission direction of the deflection beam splitter 75.

This deflection beam splitter 75 has a reference mirror 72 of a plane mirror interferometer arranged in the recording unit 21 outside the interferometer. The deflection beam splitter 75 includes a measurement laser beam 74 reflected from the measurement mirror 71 and a reference mirror 72. It generates interference light with the reflected measurement laser light 74, that is, interference light corresponding to the relative position between the optical disk master 20 and the recording unit 21.

The receiver 78 includes the deflection beam splitter 7
5 by receiving the interference light of the measurement laser beam 74 reflected from the reference mirror 72 and the measurement laser beam 74 reflected from the measurement mirror 71 that occurred, and outputs an electrical signal r ₁ corresponding to the interference light intensity function have.

On the other hand, on the optical path of the recording laser beam 40 output from the recording laser head 39, the optical axis control unit 7
9, EO modulator and AO modulator 80, each mirror 81, 8
2. The optical axis control unit 83 and the mirror 84 are arranged.

The computer 85 has a function of issuing a target position command Q ₁ for the coarse movement table 28 to the deviation unit 47. The deviator 47 is configured to output the target position command Q ₁ and the first
Has a function of calculating a deviation from the position of the coarse movement table 28 measured by the laser length measuring system 42 and sending the deviation to the driver 30.

Further, the computer 85 has a function of issuing a target position command Q ₂ for the fine movement actuator 34 to the deviation device 48. The deviation device 48 has a function of calculating a deviation between the target position command Q ₂ and the tip position of the fine movement actuator 34 measured by the second laser length measurement system 44 and sending the deviation to the driver 49.

The computer 46 has a function of moving the recording unit 21 in the radial direction of the optical disk master 20 by repeating the expansion / contraction control of the fine movement actuator 34 and the feed operation of the coarse movement mechanism 24.

The computer 46 inputs the electric signal r ₁ corresponding to the intensity of the interference light output from the receiver 78, that is, the relative position between the optical disk master 20 and the recording unit 21, and the relative position. It has a function of correcting the target position command Q ₁ for coarse adjustment table 28 of the coarse feed mechanism 24 based on.

Next, the operation of the device configured as described above will be described.

The optical disk master 20 is rotated at a constant speed by the rotation of the spindle motor 22, and
The position of the recording unit 21 is controlled over a large stroke by repeating the feed operation of the coarse movement mechanism 24 and the expansion and contraction operation of the fine movement actuator 34.

That is, the fine movement actuator 34 extends by several steps in the fine movement stroke S ₂ to move the recording unit 21 in the radial direction of the optical disk master 20, and the extension amount of the fine movement actuator 34 When the movement stroke S ₃ is reached, the fine movement actuator 34 contracts and the coarse movement table 28
Only coarse stroke S ₃ 1 step feed operating, thereafter, the feeding operation of the telescopic operation and coarse table 28 of the fine actuator 34 is repeated.

At this time, the position of coarse movement table 28 is
Is measurement by the laser length measuring system 61, the deviation between the target position command Q ₁ is being sought feedback control,
At the same time, the tip position of fine actuator 34 is measurement by the second laser length measuring system 63, the deviation between the target position command Q ₂ are sought feedback control.

On the other hand, when the recording laser beam 40 is output from the recording laser head 39, the recording laser beam 40 is transmitted to the optical axis control unit 79, the EO modulator and the AO modulator 80,
The light is guided to the recording unit 21 through the mirrors 81 and 82, the optical axis control unit 83, and the mirror 84.

The recording unit 21 condenses the incident recording laser light 40 and irradiates it onto the optical disk master 20 rotating at a constant speed.

As a result, the resist on the optical disk master 20 is exposed, and a group of information such as pits and grooves is spirally recorded.

When the length measuring laser beam 74 is output from the length measuring laser head 73 in this state, the length measuring laser beam 74 is output.
Is reflected from the deflection beam splitter 75 by the mirror 77 and travels toward the reference mirror 72 (optical path h ₂ ), is reflected by the reference mirror 72 and enters the deflection beam splitter 75 again via the mirror 77. (Light path h ₃ ), and then enters the receiver 78 (light path h ₅ ).

The length measuring laser beam 74 output from the length measuring laser head 73 passes through the deflection beam splitter 75 and the light amount control element 76 and goes to the measuring mirror 71 (optical path h).
₁ ) The light is reflected by the measurement mirror 71, again enters the deflection beam splitter 75 through the light quantity control element 76, reflected in the deflection beam splitter 75, and travels again to the measurement mirror 71 through the light quantity control element 76. (optical path h _4),
Here, the light is reflected and again enters the receiver 78 through the light quantity control element 76 and the deflection beam splitter 75 (optical paths h ₄ and h ₅ ).

Therefore, the measurement laser light 74 is transmitted through the optical path h _1.
While passing through the to h _5, the interference light is generated in accordance with the relative positions of the optical disc master 20 and the recording unit 21, the interference light is incident on the receiver 78.

The receiver 78 outputs an electric signal r ₁ corresponding to the intensity of the interference light.

Incidentally, the measurement resolution of the relative position between the master optical disc 20 and the recording unit 21 can be measured, for example, at 1.25 nm. The measurement resolution is as follows: track pitch = 0.4 μm ± 0.01
This value is sufficient as the detection resolution of the first and second laser length measurement systems when performing the feedback control of the coarse movement and the fine movement in consideration of 7 μm.

The computer 46 inputs the electric signal r ₁ corresponding to the intensity of the interference light output from the receiver 78, that is, the relative position between the optical disk master 20 and the recording unit 21, and based on this relative position. Coarse movement mechanism 24
Correcting the target position command to Q ₁ for coarse table 28.

As described above, according to the third embodiment, the relative position between the optical disk master 20 and the recording unit 21 is measured, and the feed control of the coarse movement table 28 is performed based on the relative position. Since the correction is made, the movement of the recording unit 21 can be increased without giving the recording unit 21 the influence of disturbance such as the vibration of the spindle motor 22 and the vibration of the vibration isolating table on which the optical disk master recording device is mounted. The position can be controlled with the resolution, and the recording error can be reduced.

Further, since the optical axis control unit 79 is arranged near the emission port of the recording laser head 39 and the optical axis control unit 83 is arranged near the recording unit 21, recording for the feed operation of the coarse movement table 28 is performed. The irradiation position of the laser beam 40 can be stabilized, and the influence of disturbance such as vibration on the recording unit 21 can be sufficiently reduced in combination with the correction of the recording error based on the relative position between the master optical disk 20 and the recording unit 21. it can.

It is preferable that the laser beam diameter of the measurement laser beam 74 is reduced to φ1 to φ2 using an aperture or the like.

(4) Next, a fourth embodiment of the present invention will be described. The same parts as those in FIG. 7 are denoted by the same reference numerals, and detailed description thereof will be omitted.

FIG. 9 is a configuration diagram of an optical disk master recording apparatus.

[0155] Two anti-vibration tables 90 and 91 are provided.

On one anti-vibration table 90, the recording unit 2
1. Spindle motor 2 with turntable 23 connected
2. Optical disc masters such as a coarse motion mechanism 24 having a coarse motion table 28 and a coarse motion drive motor 25, a fine motion actuator 34, a recording laser head 39, a first laser length measuring system 42, and a second laser length measuring system 44. Each component of the recording system is provided.

On the other anti-vibration table 91, components for measuring the relative position between the optical disk master 20 and the recording unit 21, that is, the length measuring laser head 92, the first interferometer 93, the second , A first receiver 95, a second receiver 96, and the like.

The length measuring laser head 92 outputs the measuring laser light 9
7 is output. The measurement laser beam 97 passes through the beam splitter 98 and the first interferometer 93 and is irradiated on a mirror 99 provided in the recording unit 21.

The first interferometer 93 uses the measurement laser beam 97 as a reference beam, and uses this reference beam and the mirror 9 of the recording unit 21.
9 has the function of generating interference light with the reflection measurement laser light from the laser beam 9.

The first receiver 95 has a first interferometer 93
Has a function of outputting an electric signal corresponding to the light intensity of the interference light generated by the above, that is, an electric signal r ₂ corresponding to the position of the recording unit 21.

A mirror 100 is arranged on the other branch optical path of the beam splitter 98, and the measuring laser beam 97 is guided to a mirror 101 provided on the side surface of the turntable 23.

The second interferometer 94 generates interference light between the reference laser beam and the measurement laser beam reflected from the mirror 101 of the turntable 23 using the measurement laser beam 97 as a reference beam.

The second receiver 96 includes a second interferometer 94
Has a function of outputting an electric signal corresponding to the light intensity of the interference light generated by the above, that is, an electric signal r ₃ corresponding to the position of the optical disk master 20.

The computer 102 controls the coarse movement table 28
The target position command Q ₂ for fine actuator 34 with issues a target-position command Q ₁ to the deviation device 47 emits the deviation device 48 for, and repeats the expansion control and feeding operation of the coarse adjustment mechanism 24 of the fine actuator 34 recording unit 21 Is moved in the radial direction of the master optical disc 20.

[0165] Further, the computer 102 comprises the first and second computers.
Of electric signals r ₂ and r ₃ corresponding to the intensities of the interference lights output from the receivers 95 and 96 of the
_{A function} for determining the relative position between the master optical disc 20 and the recording unit 21 based on the values of r and r ₃ and correcting the target position command Q ₁ for the coarse movement table 28 of the coarse movement mechanism 24 based on the relative positions. have.

Next, the operation of the device configured as described above will be described.

The optical disk master 20 is rotated at a constant speed by the rotation of the spindle motor 22, and
The position of the recording unit 21 is controlled over a large stroke by repeating the feed operation of the coarse movement mechanism 24 and the expansion and contraction operation of the fine movement actuator 34.

At this time, the position of coarse movement table 28 is
Is measurement by the laser length measuring system 61, the deviation between the target position command Q ₁ is being sought feedback control,
At the same time, the tip position of fine actuator 34 is measurement by the second laser length measuring system 63, the deviation between the target position command Q ₂ are sought feedback control.

On the other hand, when the recording laser beam 40 is output from the recording laser head 39, the recording laser beam 40 is reflected by the mirror 41 and guided to the recording unit 21, where it is collected and rotated at a constant speed. Is irradiated onto the optical disc master 20 to be processed.

As a result, the resist on the optical disk master 20 is exposed, and a group of information such as pits and grooves is spirally recorded.

When the measuring laser beam 97 is output from the length measuring laser head 92 in this state, the measuring laser beam 97
Is transmitted through the beam splitter 98 and the first interferometer 93 to irradiate a mirror 99 provided in the recording unit 21, and the reflected measurement laser beam 97 is again transmitted to the first interferometer 93.
Incident on.

This first interferometer 93 is used to
7 is used as reference light, and interference light between the reference light and the reflection measurement laser light is generated.

The first receiver 95 includes a first interferometer 93
And outputs an electric signal corresponding to the light intensity of the interference light generated as described above, that is, an electric signal r ₂ corresponding to the position of the recording unit 21.

The measurement laser beam 97 split by the beam splitter 98 passes through the second interferometer 94 from the mirror 100 and is guided to the mirror 101 provided on the side surface of the turntable 23. The light 97 is reflected by the mirror 100 again and is incident on the second interferometer 94.

The second interferometer 94 measures the measurement laser light 9
7 is used as reference light, and interference light between the reference light and the reflection measurement laser light is generated.

The second receiver 96 includes a second interferometer 94
An electric signal corresponding to the light intensity of the interference light generated by the above, that is, an electric signal r ₃ corresponding to the position of the master optical disc 20 is output.

The computer 102 inputs the electric signals r ₂ and r ₃ corresponding to the intensities of the interference lights output from the first and second receivers 95 and 96, and inputs these electric signals r ₂ and r ₃ .
The optical disk master 20 and the recording unit 21 based on r ₃
Obtains the relative position between, correcting the target position command Q ₁ for coarse adjustment table 28 of the coarse feed mechanism 24 based on the relative position.

As described above, according to the fourth embodiment, the optical disk master recording system such as the recording unit 21, the coarse movement mechanism 24, and the recording laser head 39 is provided on one of the vibration isolating tables 90, and the other is mounted on the vibration isolating table 90. Since each component for measuring the relative position between the master optical disc 20 and the recording unit 21 is provided on the shaking table 91, the position of the recording unit 21 due to the vibration caused by the cooling water supplied to the recording laser head 39 is measured. Errors can be reduced, the position of the movement of the recording unit 21 can be controlled with high resolution, and recording errors can be reduced.

(5) Next, a fifth embodiment of the present invention will be described. The same parts as those in FIG. 1 are denoted by the same reference numerals, and detailed description thereof will be omitted.

FIG. 10 is a configuration diagram of an optical disk master recording apparatus.

A hole 111 is formed in the vibration isolator 110. A spindle motor 22 is connected to a side surface of the hole 11 via a fine actuator 112.

The fine movement actuator 112 uses, for example, a piezoelectric element, and expands and contracts by a fine movement stroke S ₂ smaller than the coarse movement stroke S ₃ of the coarse movement table 28 per step by applying a voltage as shown in FIG. Has a function.

On the other hand, the computer 113 has a function of moving the recording unit 21 in the radial direction of the optical disk master 20 by repeating the expansion / contraction control of the fine movement actuator 112 and the feed operation of the coarse movement mechanism 24.

The computer 113 is provided with the coarse movement mechanism 24.
Has the function of issuing a target position command Q ₁ for the coarse movement table 28 to the deviation device 47 in order to feed the coarse movement table 28. The deviation device 47 is provided with a target position command Q
_It has a function of calculating a deviation between the position of the coarse movement table 28 measured by the first laser length measurement system 42 and the position of the coarse movement table 28 and sending the deviation to the driver 30.

The computer 113 inputs the position of the recording unit 21 measured by the second laser length measuring system 44 in order to control the expansion / contraction of the fine actuator 112, and the position of the recording unit 21 and the target position _{Has a} function of issuing a command voltage V _z1 according to the deviation to the fine movement actuator 112 through the driver 114.

Next, the operation of the device configured as described above will be described.

The optical disk master 20 is rotated at a constant speed by the rotation of the spindle motor 22, and
The position of the recording unit 21 is controlled over a large stroke by repeating the feed operation of the coarse movement mechanism 24 and the expansion / contraction operation of the fine movement actuator 112.

That is, when the command voltage V _z1 is issued to the fine movement actuator 112, the fine movement actuator 112 moves the fine movement stroke S as shown in FIG.
_The recording unit 21 is moved in the radial direction of the master optical disc 20 by extending the recording unit 21 by several steps at ₂ .

When the extension amount of the fine movement actuator 112 reaches the coarse movement stroke S ₃ of the coarse movement table 28,
Coarse table 28 with fine actuator 112 operates shrinkage operate extended by one step coarse stroke S _3.

The fine movement actuator 112 again extends by several steps in the fine movement stroke S ₂ , and moves the recording unit 21 in the radial direction of the optical disk master 20.

[0191] The subsequent expansion and contraction operation of the fine motion actuator 112, a feeding operation of the coarse table 28 is repeatedly performed, the recording position on the optical disc master 20 of the recording unit 21 is a position control for each fine movement stroke S _2.

At this time, the position of the coarse movement table 28 is measured by the first laser length measurement system 42 and sent to the deviation unit 47. Here, the target position command Q ₁ and the position of the coarse movement table 28 Is obtained and sent to the driver 30 to perform feedback control.

At the same time, the position of the recording unit 21 is
The length is measured by the laser length measurement system 44 and sent to the computer 113.

The computer 113 inputs the position of the recording unit 21 measured by the second laser length measuring system 44, and generates a command voltage V _z1 corresponding to the deviation between the position of the recording unit 21 and the target position. Emitted to the fine movement actuator 112 through the driver 114.

On the other hand, when the recording laser beam 40 is output from the recording laser head 39, the recording laser beam 40 is reflected by the mirror 41 and guided to the recording unit 21.

The recording unit 21 condenses the incident recording laser light 40 and irradiates it onto the optical disk master 20 rotating at a constant speed.

As a result, the resist on the optical disk master 20 is exposed, and a group of information such as pits and grooves is spirally recorded.

As described above, the spindle motor 22 itself is finely driven to record information on the optical disk master 20. At this time, the spindle mass M of the spindle motor 22 is set at 100 [g], and the servo band Hc of the spindle motor fine drive is adjusted. Assuming that the correction amplitude A due to fine movement is 500 [Hz] and the correction amplitude A is 1 [μm], the maximum acceleration a _max of the spindle in the servo band 500 [Hz] is x = A · sin (2π × 500t) ) (11) v = 2π × 500 × A · cos (2π × 500t) (12) Therefore, a _max = (2π × 500) ² × A · sin (2π × 500t) (13)

The required force F is a maximum F _max = M × a _max = 100 × (2π × 500) ² × A = 100 × (2π × 500) ² × 10 ^-6 = 1000 [N] (14) Becomes

For example, as the fine movement actuator 112, a laminated piezoelectric element (stroke 16 μm, generated force 3500
N, natural frequency 25 kHz), stroke 16 μm> 1 μm, and generated force 3500 N> 10
00N, the laminated piezoelectric element can provide sufficient power as the fine movement actuator 112 for finely moving the spindle motor 22, even if the support content of a leaf spring and the like around the laminated piezoelectric element and the jig of the spindle motor 22 are included. You can see that you have.

As described above, according to the fifth embodiment, the spindle motor 22 is supported on the vibration isolating table 110 via the fine movement actuator 112, and the spindle motor 22 is finely moved by the fine movement actuator 112. The spindle motor 22 and the recording unit 21 are separated from each other, so that the influence of vibration or the like due to the rotation operation of the spindle motor 22 during focus control can be eliminated.

That is, when the voice coil motor 37 oscillates up and down by about 10 μm in synchronization with the rotation of the spindle motor 22 during the focus control, the table on which the recording unit 21 is mounted is also affected by the vibration and the mechanical Vibration occurs at the resonance point, which contributes to the table feed error. By eliminating this, the position measurement error of the recording unit 21 can be reduced, the position of the recording unit 21 is controlled with high resolution, and the recording error is reduced. Can be reduced.

(6) Next, a sixth embodiment of the present invention will be described. The same parts as those in FIG. 1 are denoted by the same reference numerals, and detailed description thereof will be omitted.

FIG. 11 is a configuration diagram of an optical disk master recording apparatus.

The strain gauge 120 is attached to the coupling 27 of the coarse movement mechanism 24.

[0206] The strain gauge 120 measures the amount of distortion in the coarse movement mechanism 24 and outputs an electric signal corresponding to the amount of distortion. The output terminal of the strain gauge 120 is connected to the computer 12 via a strain gauge amplifier 121.
2 are connected.

The computer 122 has a function of moving the recording unit 21 in the radial direction of the master optical disc 20 by repeating the expansion / contraction control of the fine movement actuator 112 and the feed operation of the coarse movement mechanism 24.

Further, the computer 122 includes the coarse movement mechanism 24
Has the function of issuing a target position command Q ₁ for the coarse movement table 28 to the deviation device 47 in order to feed the coarse movement table 28.

Further, the computer 122 has a function of issuing a target position command Q ₂ to the fine movement actuator 34 to the deviation device 48 in order to extend and contract the fine movement actuator 34.

[0210] Further, the computer 122 operates the strain gauge 1
20 has a function of issuing an alarm or the like when the amount of distortion measured by 20 becomes equal to or greater than a preset amount of distortion.

Next, the operation of the device configured as described above will be described.

The optical disk master 20 is rotated at a constant speed by the rotation of the spindle motor 22, and
The feed position of the recording unit 21 is controlled over a large stroke by repeating the feed operation of the coarse movement mechanism 24 and the expansion / contraction operation of the fine movement actuator 112.

[0213] That is, when the command voltage V _z1 is issued with respect to fine actuator 34, the fine actuator 34, the fine movement stroke S ₂ a few steps at a time elongation operating in, moving the recording unit 21 in the radial direction of the optical disc master 20 Let it.

When the amount of extension of the fine movement actuator 34 reaches the coarse movement stroke S ₃ of the coarse movement table 28, the fine movement actuator 34 contracts and the coarse movement table 28 extends one step by the coarse movement stroke S _3. .

[0215] Again fine actuator 34, the fine movement stroke S ₂ a few steps at a time elongation operating in, moving the recording unit 21 in the radial direction of the optical disc master 20.

As described above, the expansion / contraction operation of the fine movement actuator 34 and the feed operation of the coarse movement table 28 are repeatedly performed.
Recording position on the optical disc master 20 of the recording unit 21 is a position control for each fine movement stroke S _2.

On the other hand, the recording laser light 40 output from the recording laser head 39 is reflected by the mirror 41 and guided to the recording unit 21 where it is collected and collected.
Irradiated on zero.

As a result, the resist on the optical disc master 20 is exposed, and a group of information such as pits and grooves is spirally recorded.

Thus, the coarse movement table 2 of the coarse movement mechanism 24
When the feed operation is performed, the strain gauge 120 moves the coarse movement mechanism 2.
The amount of distortion is measured by the coupling 27 of No. 4 and an electric signal corresponding to the amount of distortion is output. This electric signal is sent to the computer 122 via the strain gauge amplifier 121.

[0220] The computer 122 uses the strain gauge 1
Then, it is determined whether or not the amount of distortion in the coupling 27 is equal to or greater than a preset amount of distortion.

That is, the driving rod 26 of the coarse movement mechanism 24
The external force and resistance due to cable routing, dust on the table guide, dust and scratches at the contact portion between the drive rod 26 and the shaft of the coarse drive motor 25 become disturbances to the coarse table 28, and these are rough. This contributes to inducing a position error for position control of the moving table 28.

Therefore, these disturbances are measured by the strain gauge 120 as the amount of distortion, and it is determined whether or not the amount of distortion is equal to or greater than a predetermined amount of distortion.

If the result of this determination is that the amount of distortion in the coupling 27 is equal to or greater than a preset value, the computer 122 issues a warning of a position control abnormality.

As described above, according to the sixth embodiment, the strain gauge 12 is attached to the coupling 27 of the coarse movement mechanism 24.
Since the distortion amount was measured by providing 0, and an alarm was issued when the distortion amount became equal to or greater than a preset value,
The position control can be performed at a high resolution to reduce a recording error, and at the same time, the cable routed to the drive rod 26 of the coarse movement mechanism 24, the dust on the table guide, and the contact between the drive rod 26 and the axis of the coarse drive motor 25 can be achieved. The abnormality of the position control of the coarse movement table 28 due to disturbance such as external force and resistance due to dust and scratches of the unit can be warned. Thus, the present invention can be applied to foreseeing, recognizing, and troubleshooting a position control abnormality.

A strain gauge 120 is provided on the coupling 27 of the coarse movement mechanism 24 to measure the amount of strain.
The technique of issuing an alarm when the amount of distortion becomes equal to or greater than a preset amount of distortion may be applied to the first to fifth embodiments.

(7) Next, a seventh embodiment of the present invention will be described. The same parts as those in FIG. 1 are denoted by the same reference numerals, and detailed description thereof will be omitted.

FIG. 12 is a configuration diagram of an optical disk master recording apparatus.

The computer 130 is connected to a PID calculation unit 131 via a deviation unit 47, and further connected to a fuzzy inference unit 132.

[0229] The PID calculation section 131 is
0, the target position command Q ₁ of the coarse movement table 28
And P (proportional) · to the deviation between the current position of the coarse movement table 28 measured by the first laser length measuring system 42 and
Execute each operation of I (integral) and D (differential), and calculate its PID
It has a function to output a value.

The output terminal of the first laser length measuring system 42 is connected to an acceleration calculator 133. The acceleration calculation unit 133 has a function of receiving the current position of the coarse movement table 28 measured by the first laser length measurement system 42 and obtaining a change in acceleration of the coarse movement table 28.

The fuzzy inference unit 132 operates as shown in FIGS.
Each fuzzy membership function (hereinafter, abbreviated as a membership function) for the PID output, acceleration change, and drive signal (input voltage) to the driver 30 for coarse movement, and the PID output, acceleration change, driver shown in FIG. A fuzzy rule indicating the relationship of the drive signal to 30 and inputting a PID output for a change in acceleration of the coarse movement table 28 and a deviation between the target position and the current position of the coarse movement table 28;
It has a function of outputting a drive signal of the coarse movement mechanism 24 by performing fuzzy inference based on the acceleration change and the PID output.

Note that the PID output value membership function shown in FIG. 13 shows small A, intermediate B, and large C with respect to the PID output value, and the acceleration change membership function shown in FIG. , Intermediate E, large F, and the input voltage membership function of the driver 30 shown in FIG.
The middle H and large I are shown.

Next, the operation of the device configured as described above will be described.

The optical disk master 20 is rotated at a constant speed by the rotation of the spindle motor 22, and
The feed position of the recording unit 21 is controlled over a large stroke by repeating the feed operation of the coarse movement mechanism 24 and the expansion and contraction operation of the fine movement actuator 34.

That is, when a target position command Q ₂ for the fine actuator 34 is issued from the computer 130, the target position command Q ₂ and the current position of the recording unit 21 measured by the second laser length measuring system 44 are compared. A voltage corresponding to the deviation is applied to fine movement actuator 34 through driver 49.

As a result, the fine movement actuator 34
Sequentially stretching operation one by a few steps with the fine movement stroke S ₂ moves the recording unit 21 in the radial direction of the optical disc master 20.

When the extension amount of the fine movement actuator 34 reaches the coarse movement stroke S ₃ of the coarse movement mechanism 24, the fine movement actuator 34 contracts and the coarse movement table 28 performs one-step feed operation by the coarse movement stroke S _3. Thereafter, the expansion / contraction operation of the fine movement actuator 34 and the feeding operation of the coarse movement table 28 are repeated.

At this time, the position of coarse movement table 28 is
Is measured by the laser length measuring system 42 of FIG.
And the acceleration calculation unit 133.

The deviation unit 47 is provided with the computer 13
0, the target position command Q ₁ of the coarse movement table 28.
And a deviation from the current position of the coarse movement table 28 measured by the first laser length measurement system 42 and sends it to the PID calculation unit 131.

The PID calculation unit 131 executes a PID calculation on the deviation between the target position command Q ₁ of the coarse movement table 28 sent from the deviation unit 47 and the current position, and calculates the PI
Output D value.

The acceleration calculation unit 133 receives the current position of the coarse movement table 28 measured by the first laser length measuring system 42, and obtains a change in acceleration of the coarse movement table 28 based on the current position.

[0242] The fuzzy inference unit 132 operates as follows.
33 and P from the PID calculation unit 131
An ID output is input, fuzzy inference is performed using each membership function and fuzzy rules for a drive signal to the driver 30 for PID output, acceleration change, and coarse movement, and a drive signal for the coarse movement mechanism 24 is output.

More specifically, the driver input voltage membership function corresponding to the PID output value is obtained by associating the PID output membership function with the driver input voltage membership function as shown in FIG.

[0244] In other words, PID if the output is D _1, P
Intersecting in the fuzzy membership function of the ID output is b for intermediate B and a 'for large C.

Here, the fuzzy membership function of the driver input voltage corresponding to the middle B and large C of the fuzzy membership function of the PID output follows the fuzzy rule shown in FIG. It becomes the middle H of the voltage membership function, and for large C, it becomes the middle H of the driver input voltage membership function and large I.

Therefore, as shown in FIG. 17, the fuzzy membership function b for the intermediate B cuts the middle H of the driver input voltage membership function, and the fuzzy membership function a ′ for the large C has the driver input voltage membership. Cut off the middle H and large I of the function.

At the same time, as shown in FIG. 18, the driver input voltage membership function corresponding to the acceleration change is obtained by associating the acceleration change membership function with the driver input voltage membership function.

That is, if the acceleration change is D ₂ , the intersection of the acceleration change fuzzy membership function is b ′ for small D and a for intermediate E.

Here, the fuzzy membership function of the driver input voltage corresponding to the small D and the intermediate E of the acceleration change fuzzy membership function follows the fuzzy rule shown in FIG. The middle H of the function is obtained, and for the middle E, the driver input voltage membership function has a small G, a middle H and a large I.

Therefore, as shown in FIG. 18, the fuzzy membership function b 'for a small D cuts off the middle H of the driver input voltage membership function, and the fuzzy membership function a for the middle E shows the driver input voltage membership. Cut the small G, middle H and large I functions.

Next, the values a and a ', and the values b and b', which cut off the driver input voltage membership function, are compared. As a result, a '> a b'> b is obtained. A composite membership function consisting of a small G ', a middle H' and a large I 'cut by the a and b values is obtained.

Next, as shown in FIG. 20, the fuzzy inference unit 132 obtains the center of gravity G _O of the combined membership function, and obtains the driver input voltage V _c1 from the center of gravity G _O. And
The driver input voltage _Vc1 is output to the coarse driver 30.

As a result, the coarse movement mechanism 24 operates, and the coarse movement table 28 is fed while its position is controlled.

On the other hand, when the recording laser beam 40 is output from the recording laser head 39, the recording laser beam 40 is reflected by the mirror 41 and guided to the recording unit 21, where it is collected and rotated at a constant speed. Is irradiated onto the optical disc master 20 to be processed.

As a result, the resist on the optical disk master 20 is exposed, and a group of information such as pits and grooves is spirally recorded.

As described above, according to the seventh embodiment, the fuzzy inference unit 132 is used to input the PID value for the acceleration change of the coarse movement table 28 and the deviation between the target position and the current position of the coarse movement table 28. , These acceleration changes and P
Since the input voltage to the driver 30 of the coarse movement mechanism 24 is obtained by fuzzy inference based on the ID value, the position control can be performed with high resolution, the recording error can be reduced, and the speed change is gentle. Can be provided on the coarse movement table 28, and the fine movement actuator 3 as shown in FIG.
The interference 134 between the movement of the moving table 4 and the movement of the coarse movement table 28 can be eliminated.

(8) Next, an eighth embodiment of the present invention will be described. The same parts as those in FIG. 1 are denoted by the same reference numerals, and detailed description thereof will be omitted.

FIG. 22 is a configuration diagram of an optical disk master recording apparatus.

A fuzzy inference unit 141 is connected to the computer 140 via the deviation unit 47, and a PID operation unit 142 is connected to the computer 140.

The fuzzy inference unit 141 operates as shown in FIGS.
26, a deviation between the target position and the subtraction position of the coarse movement table 28, a change in acceleration, each membership function for an input signal of the PID calculation unit 142 (hereinafter, referred to as a PID input signal), and the deviation and acceleration shown in FIG. Change, PID
A fuzzy rule indicating a relationship between input signals is held, and a change in acceleration of the coarse movement table 28 and a deviation between a target position and a current position of the coarse movement table 28 are input. It has a function of outputting an input signal.

Note that the deviation membership function shown in FIG. 23 shows small A, intermediate B, and large C with respect to the deviation value.
The acceleration change membership function shown in FIG. 24 shows a small D, middle E, and large F with respect to the acceleration change, and the PID input signal membership function shown in FIG. 25 has a small G, middle H, and large for the PID input signal. I is shown.

[0262] The PID operation unit 142 is a fuzzy inference unit 1
41, the PID input signal obtained by
PID operation is performed on the ID input signal, and the PID
It has a function of outputting the value to the coarse driver 3.

Next, the operation of the device configured as described above will be described.

The optical disk master 20 is rotated at a constant speed by the rotation of the spindle motor 22, and
The feed position of the recording unit 21 is controlled over a large stroke by repeating the feed operation of the coarse movement mechanism 24 and the expansion and contraction operation of the fine movement actuator 34.

That is, when the computer 140 issues a target position command Q ₂ to the fine movement actuator 34, the target position command Q ₂ and the current position of the recording unit 21 measured by the second laser length measuring system 44 are compared. A voltage corresponding to the deviation is applied to fine movement actuator 34 through driver 49.

As a result, the fine movement actuator 34
Sequentially stretching operation one by a few steps with the fine movement stroke S ₂ moves the recording unit 21 in the radial direction of the optical disc master 20.

[0267] When the stretched amount of the fine actuator 34 has reached the coarse stroke S _3, fine actuator 3
4 contracts work, and coarse table 28, only coarse stroke S ₃ 1 step feed operating, thereafter, the feeding operation of the telescopic operation and coarse table 28 of the fine actuator 34 is repeated.

At this time, the position of coarse movement table 28 is
Is measured by the laser length measuring system 42 of FIG.
And the acceleration calculation unit 133.

The deviation unit 47 is provided with the computer 13
0, the target position command Q ₁ of the coarse movement table 28.
And the deviation from the current position of the coarse motion table 28 measured by the first laser length measurement system 42 is calculated and sent to the fuzzy inference unit 141.

The acceleration calculator 133 receives the current position of the coarse movement table 28 measured by the first laser length measuring system 42, and obtains a change in acceleration of the coarse movement table 28 based on the current position.

[0271] The fuzzy inference unit 141 operates as follows.
The acceleration change from 33 and the deviation output of the deviation unit 47 are input, the fuzzy inference is executed using the deviation, the acceleration change, the respective membership functions and the fuzzy rules for the PID input signal, and the input signal of the PID operation unit 142 is output. .

That is, as shown in FIG. 27, if the deviation between the target position and the subtraction position of the coarse movement table 28 is D ₃ ,
Intersecting in the deviation membership function is d for intermediate B and e for large C.

Here, intermediate B of the deviation membership function,
The PID input signal membership function corresponding to a large C follows the fuzzy rule shown in FIG. 26, and becomes an intermediate H of the driver input voltage membership function for the intermediate B, and the driver input voltage member function for a large C. I and M have large ship functions.

Therefore, as shown in FIG. 27, the membership function d for the intermediate B cuts off the intermediate H of the driver input voltage membership function, and the membership function e for the large C has a large driver input voltage membership function. Turn off I.

In addition, as shown in FIG. 28, if the acceleration change is D ₄ , the intersection of the acceleration change membership function is f for small D and g for intermediate E.

Here, the membership function of the driver input voltage corresponding to the small D and the middle E of the acceleration change membership function follows the fuzzy rule shown in FIG. Intermediate H and large I are obtained, and for the intermediate E, the driver input voltage membership function is small G, intermediate H and large I.

Therefore, as shown in FIG. 28, the membership function f for the small D cuts the middle H and the large I of the driver input voltage membership function, and the membership function g for the middle E shows the driver input voltage membership. Cut the small G, middle H and large I functions.

Next, the fuzzy inference unit 132 compares the membership functions f and g.
G ', H cut by the membership function g as shown in FIG.
′, I ′.

Next, the fuzzy inference unit 132 obtains the center of gravity G ₁ of the composite membership function as shown in FIG. 30, and obtains the PID input signal V _c2 from the center of gravity G ₁ . Then, the PID input signal _Vc2 is output to the PID calculation unit 142.

[0280] The PID operator 142 receives the PID input signal V _c2 obtained by the fuzzy inference section 141 performs a PID operation on the PID input signal V _c2, the PID value of the coarse motion driver 3 is output.

As a result, the coarse movement mechanism 24 operates, and the coarse movement table 28 is fed while its position is controlled.

On the other hand, when the recording laser beam 40 is output from the recording laser head 39, the recording laser beam 40 is reflected by the mirror 41 and guided to the recording unit 21, where it is collected and rotated at a constant speed. Is irradiated onto the optical disc master 20 to be processed.

As a result, the resist on the optical disk master 20 is exposed, and a group of information such as pits and grooves is spirally recorded.

As described above, according to the eighth embodiment, the change in the acceleration of the coarse movement table 28 and the deviation between the target position and the current position of the coarse movement table 28 are input using the fuzzy Since the input signal of the PID operation unit 142 is obtained by performing fuzzy inference based on the change and the deviation, the position control can be performed with high resolution and the recording error can be reduced as in the seventh embodiment. In addition, the coarse movement table 28 can have an operation in which the speed change is gradual and the fine movement actuator 3 as shown in FIG.
The interference 134 between the movement of the moving table 4 and the movement of the coarse movement table 28 can be eliminated.

(9) Next, a ninth embodiment of the present invention will be described. The same parts as those in FIG. 1 are denoted by the same reference numerals, and detailed description thereof will be omitted.

FIG. 31 is a diagram showing the configuration of an optical disk master recording apparatus.

A fuzzy inference unit 150 is connected to the computer 140 via the deviation unit 47.

The fuzzy inference unit 150 operates as shown in FIGS.
35 shows the relationship between the deviation between the target position and the subtraction position of the coarse movement table 28, the change in acceleration, the respective membership functions for the input voltage to the driver 30, and the relationship between the deviation, the change in acceleration, and the input voltage to the driver 30 shown in FIG. And inputs the change in acceleration of the coarse movement table 28 and the deviation between the target position and the current position of the coarse movement table 28, and performs fuzzy inference based on the change in acceleration and the input voltage of the driver 30. Output function.

The deviation membership function shown in FIG. 32 shows small A, intermediate B, and large C with respect to the above-mentioned deviation value, and the acceleration change membership function shown in FIG. E, large F, FIG.
The driver input voltage membership function shown in FIG.
Is shown.

Next, the operation of the device configured as described above will be described.

The optical disk master 20 is rotated at a constant speed by the rotation of the spindle motor 22, and
The feed position of the recording unit 21 is controlled over a large stroke by repeating the feed operation of the coarse movement mechanism 24 and the expansion and contraction operation of the fine movement actuator 34.

That is, when a voltage corresponding to the deviation between the target position command Q ₂ issued from the computer 140 and the current position of the recording unit 21 is applied to the fine movement actuator 34 through the driver 49,
, Operating in several steps at a time extending in the fine movement stroke S ₂ moves the recording unit 21 in the radial direction of the optical disc master 20.

[0293] When the stretched amount of the fine actuator 34 has reached the coarse stroke S _3, fine actuator 3
4 contracts work, and coarse table 28, only coarse stroke S ₃ 1 step feed operating, thereafter, the feeding operation of the telescopic operation and coarse table 28 of the fine actuator 34 is repeated.

At this time, the position of coarse movement table 28 is
Is measured by the laser length measuring system 42 of FIG.
And the acceleration calculation unit 133.

[0295] Among them, the deviation device 47 is provided for the computer 13.
0, the target position command Q ₁ of the coarse movement table 28.
And a deviation from the current position of the coarse movement table 28 measured by the first laser length measurement system 42 and sends it to the fuzzy inference unit 150.

The acceleration calculator 133 receives the current position of the coarse movement table 28 measured by the first laser length measuring system 42, and obtains a change in acceleration of the coarse movement table 28 based on the current position.

The fuzzy inference unit 150 includes the acceleration calculation unit 1
The acceleration change from 33 and the deviation output from the deviation device 47 are input, and fuzzy inference is executed using the respective membership functions for the deviation, acceleration change and driver input voltage shown in FIGS. 32 to 34 and the fuzzy rule shown in FIG. , And outputs an input voltage to the driver 30.

The fuzzy inference in the fuzzy inference unit 150 is the same as each fuzzy inference in the seventh and eighth embodiments, and will not be described here.

As a result, the coarse movement mechanism 24 operates, and the coarse movement table 28 is fed while its position is controlled.

On the other hand, when the recording laser beam 40 is output from the recording laser head 39, the recording laser beam 40 is reflected by the mirror 41 and guided to the recording unit 21, where it is collected and rotated at a constant speed. Is irradiated onto the optical disc master 20 to be processed.

Thus, the resist on the optical disk master 20 is exposed, and a group of information such as pits and grooves is spirally recorded.

As described above, according to the ninth embodiment, the change in the acceleration of the coarse movement table 28 and the deviation between the target position and the current position of the coarse movement table 28 are input using the fuzzy Since the input voltage of the driver 30 of the coarse movement mechanism 24 is obtained by performing fuzzy inference based on the change and the deviation, the position control can be performed with high resolution and the recording error can be reduced as in the seventh embodiment. The operation of the coarse movement table
The interference 1 between the fine movement actuator 34 and the feed operation of the coarse movement table 28 as shown in FIG.
34 can be eliminated.

(10) Next, a tenth embodiment of the present invention will be described. The same parts as those in FIG. 1 are denoted by the same reference numerals, and detailed description thereof will be omitted.

FIG. 36 is a diagram showing the configuration of an optical disk master recording apparatus.

A neural network 160 is connected to the computer 140 via the deviation unit 47.

The neural network 160 has a function of inputting at least the acceleration change of the coarse movement mechanism 24 and repeatedly updating the synapse connection weight so as to minimize the evaluation function by the multi-layer network to obtain the drive output of the coarse movement mechanism 24. have.

That is, this neural network 1
60 inputs the deviation ei between the target position and the current position of the coarse movement table 28, the speed au, the acceleration ai, and the acceleration change y * of the coarse movement table 28, and inputs the acceleration change y * of the coarse movement table 28 and the deviation ei. And adjusts the evaluation function R based on the weighting coefficient (synaptic connection weight) _Wij to determine the input signal to the PID calculation unit 142.

The learning method is the back pro vacation (B
The P) method is used.

The evaluation function R is, for example, the sum of squares of the deviation ei between the target position and the current position of the coarse movement table 28 and the acceleration change y * of the coarse movement table 28, and a synapse such that the evaluation function R is minimized. The connection weight W _ij is repeatedly updated,
The input signal to the PID calculation unit 142 is determined.

This neural network 160 has a three-layer structure of an input layer, an intermediate layer, and an output layer as a model of the multilayer network.

(Equation 1) y (0, i) = xi (input layer) (16) y (K, i) = yi (output layer) (17) Note that k = 1, 2,..., K, and in FIG. = 3.

Here, f in the above equation (15) is a sigmoid function represented by f (z) = 1 / (1 + exp (−z)) (18).

The evaluation function R is

(Equation 2) Using (ei = positional deviation, ai = acceleration), a specific calculation of the synaptic connection weight W _ij that minimizes the evaluation function R is: W (k, j, i: s + 1) = W (k, j , i: s) −ε · d (k, j) · y (k−1, i) (20) where ε: gain coefficient

(Equation 3) Becomes

Next, the operation of the device configured as described above will be described.

The optical disc master 20 is rotated at a constant speed by the rotation of the spindle motor 22, and
The feed position of the recording unit 21 is controlled over a large stroke by repeating the feed operation of the coarse movement mechanism 24 and the expansion and contraction operation of the fine movement actuator 34.

That is, when the target position command Q ₂ for the fine movement actuator 34 is issued from the computer 140, the target position command Q ₂ and the current position of the recording unit 21 measured by the second laser length measuring system 44 are compared. A voltage corresponding to the deviation is applied to fine movement actuator 34 through driver 49.

[0316] Thus, the fine movement actuator 34
Sequentially stretching work a few steps at a time with the fine movement stroke S _2,
The recording unit 21 is moved in the radial direction of the master optical disc 20.

[0317] When the stretched amount of the fine actuator 34 has reached the coarse stroke S _3, fine actuator 3
4 contracts work, and coarse table 28, only coarse stroke S ₃ 1 step feed operating, thereafter, the feeding operation of the telescopic operation and coarse table 28 of the fine actuator 34 is repeated.

At this time, the position of coarse movement table 28 is
Is measured by the laser length measuring system 42 of FIG.
And the acceleration calculation unit 133.

[0319] The deviation unit 47 is provided with the computer 14.
0, the target position command Q ₁ of the coarse movement table 28.
And a deviation from the current position of the coarse movement table 28 measured by the first laser length measurement system 42, and sends the deviation to the neural network 160.

The acceleration calculating section 133 receives the current position of the coarse movement table 28 measured by the first laser length measuring system 42, and obtains an acceleration change y * of the coarse movement table 28.

The neural network 160 inputs the deviation ei between the target position and the current position of the coarse movement table 28, the speed au, the acceleration ai, and the acceleration change y * of the coarse movement table 28, and receives the acceleration change y of the coarse movement table 28. * And deviation ei
_Is adjusted by the synapse connection weight _Wij to determine the input signal to the PID calculation unit 142.

The PID calculation section 142 receives the PID input signal obtained by the neural network 160, executes a PID calculation on the PID input signal, and outputs the PID value to the coarse driver 30. I do.

As a result, the coarse movement mechanism 24 operates, and the coarse movement table 28 is fed while its position is controlled.

On the other hand, when the recording laser beam 40 is output from the recording laser head 39, the recording laser beam 40 is reflected by the mirror 41 and guided to the recording unit 21, where it is collected and rotated at a constant speed. Is irradiated onto the optical disc master 20 to be processed.

As a result, the resist on the optical disk master 20 is exposed, and a group of information such as pits and grooves is spirally recorded.

As described above, according to the tenth embodiment,
The deviation ei between the target position and the current position of the coarse movement table 28, the speed au, the acceleration ai, and the acceleration change y * of the coarse movement table 28 are input from the neural network 160, and the acceleration change y * and the deviation ei of the coarse movement table 28 are input. _Is adjusted by the synapse connection weight W _ij based on
Since the input signal to the calculation unit 142 is determined and the coarse movement mechanism 24 is driven by the PID calculation unit 142, position control with high resolution can be performed and the recording error can be reduced as in the seventh embodiment. Thus, the coarse movement table 28 can be provided with an operation having a small speed change, and interference 134 between the fine movement actuator 34 and the feed operation of the coarse movement table 28 as shown in FIG. 21 can be eliminated.

(11) Next, an eleventh embodiment of the present invention will be described. Note that the same portions as those in FIG. 36 are denoted by the same reference numerals, and detailed description thereof will be omitted.

FIG. 37 is a diagram showing the configuration of an optical disk master recording apparatus.

A neural network 170 is connected to the computer 140 via the deviation unit 47.

The neural network 170 receives at least the acceleration change y * of the coarse movement table 28 in the coarse movement mechanism 24 and repeatedly updates the synapse connection weight W _ij so as to minimize the evaluation function R by the multilayer network. It has a function of obtaining a drive output of the coarse movement mechanism 24.

That is, this neural network 1
Reference numeral 60 denotes a deviation ei between the target position and the current position of the coarse movement table 28, and preset PID constants P _o , I _o , and D _o.
And the acceleration change y * of the coarse movement table 28 is input, and the evaluation function R based on the acceleration change y * of the coarse movement table 28 and the deviation ei is adjusted by the synapse connection weight _Wij to obtain the PID.
It has a function of determining a PID value for the calculation unit 171.

The learning method uses the back propagation (BP) method.

The evaluation function R is, for example, the sum of squares of the deviation ei between the target position and the current position of the coarse movement table 28 and the acceleration change y * of the coarse movement table 28, and a synapse such that the evaluation function R is minimized. The connection weight W _ij is repeatedly updated,
The input signal to the PID operation unit 171 is determined.

The PID calculator 171 inputs the PID value obtained by the neural network 170 and the deviation ei between the target position and the current position of the coarse movement table 28, and performs PID calculation based on the PID value and the deviation ei. And has a function of outputting the PID value to the coarse driver 30.

Next, the operation of the device configured as described above will be described.

The optical disk master 20 is rotated at a constant speed by the rotation of the spindle motor 22.
The feed position of the recording unit 21 is controlled over a large stroke by repeating the feed operation of the coarse movement mechanism 24 and the expansion and contraction operation of the fine movement actuator 34.

That is, when a target position command Q ₂ for the fine actuator 34 is issued from the computer 140, the target position command Q ₂ and the current position of the recording unit 21 measured by the second laser length measuring system 44 are compared. A voltage corresponding to the deviation is applied to fine movement actuator 34 through driver 49.

Thus, the fine movement actuator 34
Sequentially stretching work a few steps at a time with the fine movement stroke S _2,
The recording unit 21 is moved in the radial direction of the master optical disc 20.

[0339] When the stretched amount of the fine actuator 34 has reached the coarse stroke S _3, fine actuator 3
4 contracts work, and coarse table 28, only coarse stroke S ₃ 1 step feed operating, thereafter, the feeding operation of the telescopic operation and coarse table 28 of the fine actuator 34 is repeated.

At this time, the position of coarse movement table 28 is
Is measured by the laser length measuring system 42 of FIG.
And the acceleration calculation unit 133.

The deviation unit 47 is provided with the computer 14
0, the target position command Q ₁ of the coarse movement table 28.
And a deviation from the current position of the coarse movement table 28 measured by the first laser length measurement system 42, and sends the deviation to the neural network 170.

The acceleration calculator 133 receives the current position of the coarse movement table 28 measured by the first laser length measurement system 42 and obtains the acceleration change y * of the coarse movement table 28.

The neural network 170 inputs the deviation ei between the target position and the current position of the coarse movement table 28, constants P _o , I _o , and D _{o of} the preset PID, and the acceleration change y * of the coarse movement table 28. Then, the evaluation function R based on the acceleration change y * and the deviation ei of the coarse movement table 28 is adjusted by the synapse connection weight _Wij to determine the PID value for the PID calculation unit 171.

The PID calculator 171 inputs the PID value obtained by the neural network 170 and the deviation ei between the target position and the current position of the coarse movement table 28, and performs PID calculation based on the PID value and the deviation ei. And outputs the PID value to the coarse driver 30.

As a result, the coarse movement mechanism 24 operates, and the coarse movement table 28 is fed while its position is controlled.

On the other hand, when the recording laser beam 40 is output from the recording laser head 39, the recording laser beam 40 is reflected by the mirror 41 and guided to the recording unit 21, where it is collected and rotated at a constant speed. Is irradiated onto the optical disc master 20 to be processed.

As a result, the resist on the optical disk master 20 is exposed, and a group of information such as pits and grooves is spirally recorded.

As described above, according to the eleventh embodiment, the coarse movement table 2
8, the deviation ei between the target position and the current position, the preset PID constants P _o , I _o , D _o and the acceleration change y * of the coarse movement table 28 are input, and the acceleration change y * of the coarse movement table 28 is input. And the deviation ei are used to adjust the evaluation function R with the synapse connection weight W _ij,
Since the ID value is determined, and the coarse movement mechanism 24 is driven by the PID calculation unit 171, the position control can be performed with high resolution, the recording error can be reduced, and the speed can be reduced, as in the seventh embodiment. An operation with a small change can be given to the coarse movement table 28, and interference 134 between the fine movement actuator 34 and the feed operation of the coarse movement table 28 as shown in FIG. 21 can be eliminated.

(12) Next, a twelfth embodiment of the present invention will be described. Note that the same portions as those in FIG. 36 are denoted by the same reference numerals, and detailed description thereof will be omitted.

FIG. 38 is a configuration diagram of an optical disk master recording apparatus.

A neural network 180 is connected to the computer 140 via the deviation unit 47.

The neural network 180 has a function of inputting at least a change in acceleration of the coarse movement mechanism 24 and repeatedly updating a synapse connection load so as to minimize the evaluation function by the multilayer network, thereby obtaining a drive output of the coarse movement mechanism 24. have.

That is, this neural network 1
Reference numeral 80 denotes a deviation ei between the target position and the current position of the coarse movement table 28, and PID constant values P _o , I _o , and D _o set in advance.
And the acceleration change y * of the coarse movement table 28 are input, and the evaluation function R based on the acceleration change y * of the coarse movement table 28 and the deviation ei is adjusted by the synapse connection load W _ij to the driver 30 of the coarse movement mechanism 24. Has the function of determining the output of

The learning method uses a back propagation (BP) method.

The evaluation function R is, for example, the sum of squares of the deviation ei between the target position and the current position of the coarse movement table 28 and the acceleration change y * of the coarse movement table 28, and a synapse such that the evaluation function R is minimized. The connection weight W _ij is repeatedly updated,
The output of the coarse movement mechanism 24 to the driver 30 is determined.

Next, the operation of the device configured as described above will be described.

The optical disk master 20 is rotated at a constant speed by the rotation of the spindle motor 22, and
The feed position of the recording unit 21 is controlled over a large stroke by repeating the feed operation of the coarse movement mechanism 24 and the expansion and contraction operation of the fine movement actuator 34.

That is, when the computer 140 issues a target position command Q ₂ to the fine actuator 34, the target position command Q ₂ and the current position of the recording unit 21 measured by the second laser length measuring system 44 are compared. A voltage corresponding to the deviation is applied to fine movement actuator 34 through driver 49.

Thus, the fine movement actuator 34
Sequentially stretching work a few steps at a time with the fine movement stroke S _2,
The recording unit 21 is moved in the radial direction of the master optical disc 20.

[0360] When the stretched amount of the fine actuator 34 has reached the coarse stroke S _3, fine actuator 3
4 contracts work, and coarse table 28, only coarse stroke S ₃ 1 step feed operating, thereafter, the feeding operation of the telescopic operation and coarse table 28 of the fine actuator 34 is repeated.

At this time, the position of coarse movement table 28 is
Is measured by the laser length measuring system 42 of FIG.
And the acceleration calculation unit 133.

[0362] Among them, the deviation unit 47 is provided with the computer 14.
0, the target position command Q ₁ of the coarse movement table 28.
And a deviation from the current position of the coarse movement table 28 measured by the first laser length measurement system 42, and sends the deviation to the neural network 170.

The acceleration calculating section 133 receives the current position of the coarse movement table 28 measured by the first laser length measuring system 42 and obtains an acceleration change y * of the coarse movement table 28.

The neural network 180 inputs the deviation ei between the target position and the current position of the coarse movement table 28, the preset PID constant values P _o , I _o , _Do and the acceleration change y * of the coarse movement table 28. Then, the output to the driver 30 of the coarse movement mechanism 24 is determined by adjusting the evaluation function R based on the acceleration change y * and the deviation ei of the coarse movement table 28 using the synapse connection load W _ij .

As a result, the coarse movement mechanism 24 operates, and the coarse movement table 28 is fed while its position is controlled.

On the other hand, when the recording laser beam 40 is output from the recording laser head 39, the recording laser beam 40 is reflected by the mirror 41 and guided to the recording unit 21, where it is collected and rotated at a constant speed. Is irradiated onto the optical disc master 20 to be processed.

As a result, the resist on the optical disk master 20 is exposed, and a group of information such as pits and grooves is spirally recorded.

As described above, according to the twelfth embodiment,
The deviation ei between the target position and the current position of the coarse movement table 28 from the neural network 180, a PI set in advance
The D constant values P _o , I _o , _Do and the acceleration change y * of the coarse movement table 28 are input, and the acceleration change y of the coarse movement table 28 is input.
The output of the coarse movement mechanism 24 to the driver 30 is determined by adjusting the evaluation function R based on the * and the deviation ei using the synapse connection load _Wij , and the coarse movement mechanism 24 is driven by this output. As in the embodiment, position control with high resolution can be performed, recording errors can be reduced, and an operation with a small speed change can be provided in the coarse movement table 28.
Interference 134 between the fine movement actuator 34 and the feed operation of the coarse movement table 28 as shown in FIG. 21 can be eliminated.

The present invention is not limited to the first to twelfth embodiments but may be modified as follows.

For example, in the first to twelfth embodiments, the case where the present invention is applied to information recording on the optical disk master 20 has been described. However, the present invention can be applied to not only the optical disk master 20 but also position control of any other exposure apparatus. .

[0371]

As described in detail above, according to the first aspect of the present invention, it is possible to provide a master recording apparatus capable of performing position control with high resolution and reducing recording errors.

Further, according to the second aspect of the present invention, it is possible to provide a position control method capable of performing position control with high resolution.

Further, according to the third to fifteenth aspects of the present invention, it is possible to provide a master recording apparatus capable of performing position control with high resolution and reducing recording errors.

Further, according to the third aspect of the present invention, the position of the movement of the recording unit is controlled with high resolution, and the recording error based on the pitching error when the recording unit is roughly moved on the disk surface can be reduced. An original recording device can be provided.

According to the fourth aspect of the present invention, by controlling the coarse movement based on the relative position between the disk and the recording unit, the recording unit is not affected by disturbance such as vibration. In addition, it is possible to provide a master recording apparatus capable of controlling the movement of the recording unit with high resolution and reducing recording errors.

According to the present invention, the measurement error of the recording unit position caused by the vibration caused by the cooling water supplied to the laser head can be reduced, and the movement of the recording unit is controlled with high resolution to reduce the recording error. It is possible to provide a master recording device that can perform the recording.

According to the present invention, the rotation mechanism and the recording unit are separated from each other to eliminate the influence of vibration and the like caused by the rotation operation during the focus control, thereby reducing the measurement error of the recording unit position. It is possible to provide an original recording apparatus capable of controlling the movement of a recording unit with high resolution and reducing a recording error.

[0378] According to the seventh aspect, the dust of the coarse movement mechanism is
It is possible to provide a master recording apparatus capable of issuing a warning of one cause of a recording error due to a disturbance such as a scratch.

According to the eighth to eleventh aspects, by controlling using fuzzy inference, the measurement error of the recording unit position can be reduced, the position of the recording unit is controlled with high resolution, and the recording error is reduced. It is possible to provide a master recording device that can perform the recording.

Further, according to the twelfth to fifteenth aspects, by controlling using a neural network, the measurement error of the recording unit position can be reduced, the position of the recording unit is controlled with high resolution, and the recording error is reduced. It is possible to provide a master recording device that can perform the recording.

[Brief description of the drawings]

FIG. 1 shows a first example of an optical disk master recording apparatus according to the present invention.
FIG. 1 is a configuration diagram showing an embodiment.

FIG. 2 is a diagram showing a movement operation by an ultra-fine movement actuator, a fine movement actuator, and a coarse movement mechanism.

FIG. 3 is a diagram showing an ultra-fine movement operation of the ultra-fine movement actuator.

FIG. 4 is a diagram showing a shift of a light intensity distribution of a recording laser beam by an ultrafine actuator.

FIG. 5 is a diagram showing intervals between information groups recorded on an optical disk master.

FIG. 6 shows a second example of the optical disk master recording apparatus according to the present invention.
FIG. 1 is a configuration diagram showing an embodiment.

FIG. 7 shows a third example of the optical disk master recording apparatus according to the present invention.
FIG. 1 is a configuration diagram showing an embodiment.

FIG. 8 is an enlarged configuration diagram of a measuring unit.

FIG. 9 shows a fourth example of the optical disk master recording apparatus according to the present invention.
FIG. 1 is a configuration diagram showing an embodiment.

FIG. 10 is a configuration diagram showing a fifth embodiment of the optical disk master recording apparatus according to the present invention.

FIG. 11 is a configuration diagram showing a sixth embodiment of the optical disc master recording apparatus according to the present invention.

FIG. 12 is a configuration diagram showing a seventh embodiment of an optical disc master recording apparatus using fuzzy inference according to the present invention.

FIG. 13 is a diagram showing a fuzzy membership function for a PID output value.

FIG. 14 is a diagram showing a fuzzy membership function with respect to a change in acceleration.

FIG. 15 is a diagram illustrating a fuzzy membership function with respect to an input voltage of a coarse driver.

FIG. 16 is a diagram showing a fuzzy rule for a coarse movement table feeding operation.

FIG. 17 is a view showing an operation of obtaining an input voltage of a coarse driver from a PID value.

FIG. 18 is a diagram illustrating an operation of obtaining an input voltage of a coarse driver from a change in acceleration.

FIG. 19 is a diagram showing a composite membership function.

FIG. 20 is a diagram illustrating an operation of obtaining an input voltage of a coarse driver by a centroid method.

FIG. 21 is a view showing the occurrence of interference between a fine movement operation of a fine movement actuator and a feed operation of a coarse movement table.

FIG. 22 is a configuration diagram showing an eighth embodiment of an optical disk master recording apparatus using fuzzy inference according to the present invention.

FIG. 23 is a diagram showing a fuzzy membership function for a deviation.

FIG. 24 is a diagram showing a fuzzy membership function with respect to a change in acceleration.

FIG. 25 is a diagram showing a fuzzy membership function for a PID input signal.

FIG. 26 is a diagram showing a fuzzy rule for a coarse movement table feeding operation.

FIG. 27 is a view showing an operation of obtaining a PID input signal from a deviation.

FIG. 28 is a diagram showing an operation of obtaining a PID input signal from a change in acceleration.

FIG. 29 is a diagram showing a composite membership function.

FIG. 30 is a diagram showing an operation of obtaining a PID input signal by the centroid method.

FIG. 31 is a configuration diagram showing a ninth embodiment of an optical disk master recording apparatus using fuzzy inference according to the present invention.

FIG. 32 is a diagram showing a fuzzy membership function with respect to a deviation.

FIG. 33 is a diagram showing a fuzzy membership function with respect to a change in acceleration.

FIG. 34 is a diagram showing a fuzzy membership function for a driver input signal.

FIG. 35 is a diagram showing a fuzzy rule for a coarse movement table feeding operation.

FIG. 36 is a configuration diagram showing a tenth embodiment of an optical disk master recording apparatus using a neural network according to the present invention.

FIG. 37 is a configuration diagram showing an eleventh embodiment of an optical disk master recording apparatus using a neural network according to the present invention.

FIG. 38 is a configuration diagram showing a twelfth embodiment of an optical disk master recording apparatus using a neural network according to the present invention.

FIG. 39 is a configuration diagram of a conventional optical disc master recording apparatus.

[Explanation of symbols]

Reference Signs List 20: optical disk master, 21: recording unit, 22: spindle motor, 24: coarse movement mechanism, 28: coarse movement table, 34, 112: fine movement actuator, 36: ultra-fine movement actuator, 39: recording laser head, 42, 61 ... First laser length measuring system, 44, 63 ... Second laser length measuring system, 46, 64, 85, 102, 122, 130 ... Computer, 60 ... First mirror, 62 ... Second mirror, 70 ... Measuring means Reference numeral (71) Measuring mirror (72) Reference mirror (corner cube) (73, 92) Laser measuring head (75) Interferometer (78) Receiver (90, 91, 110) Vibration isolator (93) First interferometer (93) 94, a second interferometer, 95, a first receiver, 96, a second receiver, 120, a strain gauge, 131, 142, a PID calculation unit, 32,141,150 ... fuzzy inference section, 160, 170, 180 ... neural network.

Claims (15)

[Claims] 1. A master recording apparatus for forming a master of an optical disk by condensing and exposing a laser beam by an imaging optical system, wherein a first drive system for feeding the imaging optical system in a radial direction of the optical disk. A second drive system provided in the first drive system for feedback control for adjusting the position of the imaging optical system in the radial direction; and a second drive system provided in the second drive system. The third of the open loop control to adjust the distance within the resolution of the system
A master recording device, comprising: 2. An optical disc recording apparatus for producing an optical disc master by condensing and exposing a laser beam by an image forming optical system, wherein a focal position of the laser light by the image forming optical system with respect to a radial direction of the optical disc is determined. A position control method for detecting the focal position with a target position by detecting with a position detector, wherein a first step of bringing the focal position closer to the target position by feedback control based on position information of the position detector; A second step of converting an error between the focus position and the target position generated in the first step into a voltage amount, and approaching the target position by open-loop control. 3. A master provided with a coarse movement mechanism for coarsely moving a recording unit for recording information on a disk surface with a predetermined coarse movement stroke, and a fine movement mechanism for finely moving the recording unit with a fine movement stroke smaller than the coarse movement stroke. In the recording apparatus, measuring means for measuring pitching when the recording unit is moved onto the disk surface by the coarse movement mechanism, and control means for controlling the fine movement mechanism based on the pitching measured by the pitching measurement means And a master recording apparatus comprising: 4. A master provided with a coarse movement mechanism for coarsely moving a recording unit for recording information on a disk surface with a predetermined coarse movement stroke, and a fine movement mechanism for finely moving the recording unit with a fine movement stroke smaller than the coarse movement stroke. In the recording apparatus, measuring means for measuring a relative position between the disc and the recording unit; and at least the coarse movement mechanism based on a relative position between the disc and the recording unit measured by the measuring means. And a control means for controlling coarse movement by the master disc. 5. At least the disk, the recording unit, the disk recording system of the coarse movement mechanism and the fine movement mechanism, and the measuring means having a laser head for outputting a laser beam are respectively installed on separate vibration isolation tables. 5. The master recording apparatus according to claim 4, wherein: 6. A recording unit for recording information on a disk surface is coarsely moved by a predetermined coarse movement stroke and finely moved by a fine movement stroke smaller than the coarse movement stroke to record the information on the disk surface. A rotating mechanism that drives the disk to rotate; and a disk fine movement unit that finely moves the rotation mechanism in the same direction as the movement direction of the recording unit by the coarse movement and the fine movement. An original recording device, comprising: 7. A measuring means for measuring the amount of distortion in the coarse movement mechanism, and a notifying means for notifying based on the fact that the amount of distortion measured by the measuring means has become equal to or greater than a preset value are added. 7. The master disc recording device according to claim 1, wherein: 8. A master provided with a coarse movement mechanism for coarsely moving a recording unit for recording information on a disk surface with a predetermined coarse movement stroke, and a fine movement mechanism for finely moving the recording unit with a fine movement stroke smaller than the coarse movement stroke. A master disc recording apparatus, comprising: a fuzzy inference means for controlling a coarse movement by the coarse movement mechanism by fuzzy inference based on at least a change in acceleration of the coarse movement mechanism. 9. The fuzzy inference means inputs a PID value for a change in acceleration of the coarse movement mechanism and a deviation between a target position and a current position of the coarse movement mechanism, and performs fuzzy inference based on the change in acceleration and the PID value. 9. The master recording apparatus according to claim 8, further comprising a function of outputting a drive signal for the coarse movement mechanism. 10. The fuzzy inference means inputs a change in acceleration of the coarse movement mechanism and a deviation between a target position and a current position of the coarse movement mechanism, and performs fuzzy inference based on the change in acceleration and the PID control. 9. The master recording apparatus according to claim 8, wherein the master recording apparatus has a function of obtaining an input signal to the unit, and drives and controls the coarse movement mechanism by an output of the PID control unit. 11. The fuzzy inference means inputs a change in acceleration of the coarse movement mechanism and a deviation between a target position and a current position of the coarse movement mechanism, and performs fuzzy inference based on the change in acceleration and the deviation. 9. The master recording apparatus according to claim 8, wherein a driving signal of the moving mechanism is output. 12. A master provided with a coarse movement mechanism for coarsely moving a recording unit for recording information on a disk surface with a predetermined coarse movement stroke, and a fine movement mechanism for finely moving the recording unit with a fine movement stroke smaller than the coarse movement stroke. The recording apparatus further comprises a neural network which receives at least a change in acceleration of the coarse movement mechanism and repeatedly updates a synapse connection load so as to minimize an evaluation function by a multi-layer network to obtain a drive output of the coarse movement mechanism. A master recording device, characterized in that: 13. The neural network inputs a deviation between a target position and a current position of the coarse movement mechanism, a speed and an acceleration change of the coarse movement mechanism, and is based on the acceleration change and the deviation of the coarse movement mechanism. 13. The coarse movement mechanism according to claim 12, further comprising a function of adjusting an evaluation function by a synaptic connection weight to obtain an input signal to a PID control unit, and driving and controlling the coarse movement mechanism by an output of the PID control unit. Master recording device. 14. The neural network inputs a deviation between a target position and a current position of the coarse movement mechanism, a preset PID value and a change in acceleration of the coarse movement mechanism, and calculates a change in acceleration of the coarse movement mechanism. The method according to claim 1, further comprising a function of adjusting an evaluation function based on the deviation with a synaptic connection load to obtain a PID value for a PID control unit, and controlling the coarse movement mechanism by an output of the PID control unit. Item 13. A master recording apparatus according to Item 12. 15. The neural network inputs a deviation between a target position and a current position of the coarse movement mechanism, a preset PID value and a change in acceleration of the coarse movement mechanism, and calculates a change in acceleration of the coarse movement mechanism. 13. The apparatus according to claim 12, further comprising a function of adjusting the evaluation function based on the deviation with a synaptic connection load to obtain a drive output of the coarse movement mechanism.
Master recording device as described.