JPH10213239A - Follow-up type pressurized fluid guide valve - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve the operating characteristic by reducing the follow-up shift of a main spool in repeated operation while reducing its weight through the shortening of its pilot spool improving the responsiveness of the main spool and improving operating characteristics. SOLUTION: A follow-up type pressurized fluid guide valve 10 involves, on one end side of its sleeve 11 and a main spool 12, a pair of pressure chambers 15a and 15b of the same structure defined by a cylinder part 11f formed in the sleeve 11 and a piston part 12f formed in the main spool 12. The pressure chambers 15a and 15b are adapted to be fed with pressurized fluid from a pressurized fluid generator 21. Either of the pressure chambers 15a and 15b is selectively connected to a discharge port 11e by way of a lead passage 13a formed in a pilot spool 13.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a follow-up type pressure fluid guide valve, and more particularly to a follow-up type pressure fluid guide valve that controls supply and discharge of a pressure fluid by an electric signal and drives an actuator.

[0002]

2. Description of the Related Art A follow-up type pressure fluid guide valve is used for controlling the operation of a mechanical actuator such as a pneumatic cylinder or a hydraulic cylinder based on a minute electric control signal. FIG. 4 is a configuration diagram of a follow-up type pressure fluid guide valve adopting a power guide system. This type of follow-up pressure fluid guide valve controls the supply and discharge of pressure oil that operates the hydraulic cylinder. The tracking type pressure fluid guide valve includes a sleeve 1, a main spool 2, a pilot spool 3, and a force motor 4.

[0003] The sleeve 1 of the follow-up type pressure fluid guide valve is formed of a hollow body.
a, first supply / discharge port 1b, second supply / discharge port 1
c, five discharge ports 1d and 1e are prepared. The supply port 1a is connected to a pressure oil generation source, and the first supply / discharge port 1b is connected to one end of a hydraulic cylinder.
The second supply / discharge port 1c is connected to the other end of the hydraulic cylinder. The discharge ports 1d and 1e are respectively connected to an oil discharge and recovery system.

The main spool 2 is formed as a hollow body, and the main spool 2 slides in the hollow body of the sleeve 1. The main spool 2 has a plurality of fluid guide paths 2
a, 2b and 2c. The fluid guide path 2a connects and disconnects the supply port 1a and the first supply / discharge port 1b or the second supply / discharge port 1c by sliding the main spool 2. The fluid guide path 2b similarly connects and disconnects the discharge port 2d and the second supply / discharge port 1c by sliding the main spool 2, and the fluid guide path 2c is connected to the discharge port 1e and the first supply / discharge port 1b. Connection and disconnection between

[0005] One end of the main spool 2 (in FIG.
A pressure chamber 5 a formed by the inner wall of the sleeve 1, the one side wall of the main spool 2, and the outer wall of the pilot spool 3 is provided on the left side). The pressure chamber 5 a has a function of pushing the one side wall of the main spool 2 by its internal pressure to slide the main spool 2. Similarly, a pressure chamber 5 b formed by the inner wall of the sleeve 1, the other side wall of the main spool 2, and the outer wall of the pilot spool 3 is provided on the other end side (the right side in the figure) of the main spool 2. The pressure chamber 5b has a function of sliding the main spool 2 by pressing the other side wall of the main spool 2 by the internal pressure.

[0006] One end of the pilot spool 3 is connected to a force motor 4, and the driving force of the force motor 4 causes the pilot spool 3 to slide in the hollow body of the main spool 2. Conduction paths 3 a and 3 b are formed inside the pilot spool 3. The conduction path 3a performs connection between the pressure chamber 5a and the supply port 1a and connection or disconnection between the pressure chamber 5a and the discharge port 1e. The conduction path 3b is connected to the pressure chamber 5b on the opposite side and the supply port 1
a, and connection or disconnection between the pressure chamber 5b and the discharge port 1d.

The force motor 4 includes a yoke 4a, a magnet 4b, and a voice coil 4c. The force motor 4 slides the pilot spool 3 according to a control signal from a controller (not shown).

Next, the operation of the follow-up type pressure fluid guide valve will be described with reference to FIGS. 5 and 6
FIG. 3 is a configuration diagram of a follow-up type pressure fluid guide valve shown for each operation.

First, from the initial state shown in FIG. 4, the force motor 4 is driven by a control signal from a controller (not shown) as shown in FIG. 5, and the pilot spool 3 is slid in the direction of arrow F1. The sliding of the pilot spool 3 connects between the pressure chamber 5a and the discharge port 1e through the conduction path 3a of the pilot spool 3, and the internal pressure of the pressure chamber 5a decreases. On the other hand, at the same time, between the pressure chamber 5b and the supply port 1a is connected through the conduction path 3b of the pilot spool 3,
The connection between the pressure chamber 5b and the exhaust port 1d is kept disconnected, and the internal pressure of the pressure chamber 5b increases due to the supply of the pressure oil from the pressure oil generation source.

Due to the decrease of the internal pressure of the pressure chamber 5a and the increase of the internal pressure of the pressure chamber 5b, as shown in FIG. 6, the internal pressure Fp of the pressure chamber 5b moves the main spool 2 to the arrow F2.
Slide in the direction. That is, following the slide of the pilot spool 3, the main spool 2 slides in the same direction. Due to the sliding of the main spool 2, the connection between the supply port 1a and the first supply / discharge port 1b is established through the fluid guide path 2a of the main spool 2,
At the same time, the connection between the discharge port 1d and the second supply / discharge port 1c is made through the fluid guide path 2b.

As a result, the pressure oil O1 from the pressure oil generation source
Is supplied to the hydraulic cylinder through the supply port 1a and the first supply / discharge port 1b of the follow-up type pressure fluid guide valve. The oil O2 discharged from the hydraulic cylinder is discharged through the second supply / discharge port 1c and the discharge port 1d.
If the operation opposite to the above operation is performed, the main spool 2
Slides in the opposite direction, and the pressure oil O from the pressure oil source
1 is supplied to the hydraulic cylinder through the supply port 1a and the second supply / discharge port 1c. The oil O2 discharged from the hydraulic cylinder is discharged through the first supply / discharge port 1b and the discharge port 1e.

FIG. 7 is a configuration diagram of a follow-up type pressure fluid guide valve adopting the Schneider system. This type of follow-up type pressure fluid guide valve has the same basic structure as the follow-up type pressure fluid guide valve adopting the power guide method described above, and includes a sleeve 1, a main spool 2, a pilot spool 3, and a force motor 4. .

The follow-up type pressure fluid guide valve shown in FIG. 7 has a pressure chamber 5c at one end of the main spool 2 and a pressure chamber 5d at the other end.
Is provided. The pressure chamber 5 c is formed by an inner wall of the sleeve 1, an inner wall of a ring-shaped portion formed at one end of the main spool 2, and an outer wall of the pilot spool 3. Pressure chamber 5
c has a function of pushing the inner wall of the ring-shaped portion on one end side of the main spool 2 by the internal pressure to slide the main spool 2. The pressure chamber 5d is the main spool 2.
Is formed by the hollow body wall on the other end side. The pressure chamber 5d has a function of sliding the main spool 2 by pushing the inner wall of the central portion in the hollow body of the main spool 2 by the internal pressure.

One end of the pilot spool 3 is similarly connected to a force motor 4, and this force motor 4
, The pilot spool 3 slides in the hollow body of the main spool 2. Conduction paths 3c and 3d are formed in the outer peripheral portion of the pilot spool 3. The conduction path 3c connects or disconnects the pressure chamber 5c and the discharge port 1e. The conduction path 3d connects and disconnects with the conduction path 2e formed in the main spool 2. The conduction path 2e formed in the main spool 2 is connected to the pressure chamber 5d, and the pressure chamber 5d is connected to the supply port 1a.

Next, the operation of the follow-up type pressure fluid guide valve will be described with reference to FIGS. 8 and 9
FIG. 3 is a configuration diagram of a follow-up type pressure fluid guide valve shown for each operation.

First, from the initial state shown in FIG. 7, the force motor 4 is driven by a control signal from a controller (not shown) as shown in FIG. 8, and the pilot spool 3 is slid in the direction of arrow F1. The sliding of the pilot spool 3 connects between the pressure chamber 5c and the discharge port 1e through the conduction path 3c of the pilot spool 3, and the internal pressure of the pressure chamber 5c decreases. On the other hand, at the same time, the connection between the conduction path 3d of the pilot spool 3 and the conduction path 2e of the main spool 2 is cut off, and the pressure oil from the pressure oil generation source is supplied to the pressure chamber 5d through the supply port 1a. The internal pressure of 5d increases.

Due to the decrease of the internal pressure of the pressure chamber 5c and the increase of the internal pressure of the pressure chamber 5d, as shown in FIG. 9, the internal pressure Fp of the pressure chamber 5d moves the main spool 2 to the arrow F2.
Slide in the direction. That is, following the slide of the pilot spool 3, the main spool 2 slides in the same direction. As shown in FIG. 7, the main spool 2 slides until the product of the sectional area A1 of the pressure chamber 5c and the internal pressure is equal to the product of the sectional area A2 of the pressure chamber 5d and the internal pressure. Due to the sliding of the main spool 2, the connection between the supply port 1a and the first supply / discharge port 1b is established through the fluid guide path 2a of the main spool 2,
At the same time, the connection between the discharge port 1d and the second supply / discharge port 1c is made through the fluid guide path 2b. As a result, the pressure oil O1 from the pressure oil generation source is supplied to the hydraulic cylinder through the supply port 1a and the first supply / discharge port 1b of the follow-up type pressure fluid guide valve. The oil O2 discharged from the hydraulic cylinder is discharged through the second supply / discharge port 1c and the discharge port 1d.

When the pilot spool 3 slides in the opposite direction by performing an operation reverse to the above-mentioned operation, the pressure chamber 5
The connection between the pressure chamber 5c and the supply port 1a is cut off while the connection between the pressure chamber 5c and the discharge port 1e is cut off.
Connected through each of 3d. That is, the pressure oil from the pressure oil generation source is supplied from the supply port 1a to the pressure chamber 5c, and the internal pressure of the pressure chamber 5c increases. Pressure chamber 5c
Due to the rise in the internal pressure of the pressure chamber 5 as shown in FIG.
The internal pressure Fp'c slides the main spool 2 in the opposite direction. As a result, the pressure oil O from the pressure oil generation source
1 is supplied to the hydraulic cylinder through the supply port 1a and the second supply / discharge port 1c. The oil O2 discharged from the hydraulic cylinder is discharged through the first supply / discharge port 1b and the discharge port 1e.

[0019]

In the follow-up type pressure fluid guide valve adopting the power guide system shown in FIG. 4, a pair of pressure chambers 5a and 5b which follow and slide the main spool 2 are provided. Are spaced apart from each other on one end side and the other end side. A conduction path 3a connecting the pressure chamber 5a and the supply port 1a,
Each of the conductive paths 3b connecting between b and the supply port 1b is embedded in the pilot spool 3. For this reason, the length of the pilot spool 3 is longer than the length of the main spool 2 and the pilot spool 3 is heavy, so that the response of sliding of the pilot spool 3 is not sufficient, and sufficient operation characteristics cannot be obtained.

On the other hand, in the follow-up type pressure fluid guide valve adopting the Schneider system shown in FIG. 7, about half of the hollow body of the main spool 2 is used as the pressure chamber 5d, and the length of the pilot spool 3 is reduced to about half. Because it can be shortened,
There is an advantage that the weight of the pilot spool 3 can be reduced and sufficient operating characteristics can be obtained. However, the pressure chamber 5
The structures of c and 5d are completely different from each other, and the control orifice 6 between the pressure chamber 5c and each of the conduction paths 3c and 3d is worn by repeated sliding between the pilot spool 3 and the main spool 2. Therefore, by repeatedly performing the operation of the follow-up type pressure fluid guide valve, the respective pressure conditions of the pressure chambers 5c and 5d change,
The main spool 2 slides with respect to the slide of the pilot spool 3, and a stable operation characteristic cannot be obtained.

The present invention has been made to solve the above problems. Accordingly, an object of the present invention is to reduce the length of the pilot spool, reduce the weight of the pilot spool, improve the response of the main spool, improve the operating characteristics, and reduce the displacement of the main spool due to the repetitive operation to reduce the operating characteristics. It is another object of the present invention to provide a follow-up type pressure fluid guide valve capable of improving pressure.

[0022]

According to a first aspect of the present invention, there is provided a follow-up type pressure fluid guide valve formed in a hollow body shape and connected to a pressure fluid generation source. A sleeve having a supply port, a first supply / discharge port connected to one supply / discharge port of the actuator, a second supply / discharge port connected to the other supply / discharge port of the actuator, and a hollow body shape A main spool that slides through the hollow body of the sleeve to open and close between the supply port and the first supply and discharge port and open and close between the second supply and discharge port and the discharge port; The cylinder part formed on one end side of the main spool and the piston part formed on one end side of the main spool or one end of the sleeve, A pair of pressure chambers formed on both sides of the stone part and pressing the piston part in opposite directions to slide the main spool with respect to the sleeve, and slide in the hollow body of the main spool to form the one pressure chamber A pilot spool that closes and connects the other pressure chamber to the discharge port, and a drive source that provides a slide to the pilot spool that closes the one pressure chamber and connects the other pressure chamber to the discharge port,
Slide the pilot spool by the drive source,
By closing one pressure chamber and connecting the other pressure chamber to the discharge port, the main spool is slid by the internal pressure of the one pressure chamber, and the pressure is connected by connecting between the supply port and the first supply / discharge port. A pressure fluid is supplied to the actuator from a fluid generation source, and the fluid is discharged from the actuator by connecting between the second supply / discharge port and the discharge port.

According to the first aspect of the present invention, a pair of pressure chambers for sliding the main spool following the slide of the pilot spool are provided at one end of each of the sleeve and the main spool. The pilot spool can be formed to have a length enough to connect between the pair of pressure chambers and the discharge port. As a result, the length of the pilot spool can be reduced and the weight can be reduced, so that the operating characteristics of the follow-up type pressure fluid guide valve can be improved. Further, since the pair of pressure chambers are formed by combining the cylinder portion and the piston portion and have the same structure which is symmetrical to each other, the closing operation of the pressure chamber and the connecting operation between the pressure chamber and the discharge port are repeatedly performed. The change in the operating condition caused by the abrasion or the like due to the pressure becomes equal in each of the pair of pressure chambers. As a result, even if the operation of the follow-up type pressure fluid guide valve is repeatedly performed, the displacement of the slide of the main spool with respect to the slide of the pilot spool is eliminated, and the operating characteristics of the follow-up type pressure fluid guide valve can be improved.

According to a second aspect of the present invention, in the follow-up type pressure fluid guide valve according to the first aspect, the pair of pressure chambers are respectively connected to a pressure fluid generation source through orifices formed in a sleeve. And connected to a discharge port through orifices formed in the main spool.

According to a third aspect of the present invention, in the follow-up type pressure fluid guide valve according to the second aspect, air, oil, or water is used as the pressure fluid.

[0026]

Embodiments of the present invention will be described below. FIG. 1 is a configuration diagram of a compliant pressure fluid guide valve and an actuator drive system incorporating the compliant pressure fluid guide valve according to an embodiment of the present invention. As shown in FIG. 1, the actuator drive system includes a follow-up type pressure fluid guide valve 10, a controller 20, a pressure fluid generation source 21, a discharge / recovery system 22, and an actuator 23.

The follow-up type pressure fluid guide valve 10 includes a sleeve 11, a main spool 12, a pilot spool 13, and a drive source 14. The sleeve 11 of the follow-up type pressure fluid guide valve 10 is formed of a hollow body, and has a supply port 11a, a first supply / discharge port 11b, a second supply / discharge port 11c, and five discharge ports 11d and 11e.
Ports are provided. The supply port 11a is connected to the pressure fluid generation source 21. A pressure oil generation source that generates pressure oil in the present embodiment is used as the pressure fluid generation source 21. The first supply / discharge port 11b is connected to the actuator 23
Connected to one of the terminals. In this embodiment, a hydraulic cylinder is used for the actuator 23. The second supply / discharge port 11c is connected to another terminal of the actuator 23. The discharge ports 11d and 11e are connected to a discharge recovery system 22, respectively.

The main spool 12 is formed as a hollow body, and the main spool 12 slides in the hollow body of the sleeve 11. The main spool 12 has a plurality of fluid guide paths 12a, 12b and 12c. Fluid guideway 12
In a, connection and disconnection between the supply port 11a and the first supply / discharge port 11b or the second supply / discharge port 11c are performed by sliding the main spool 12. The fluid guide path 12b similarly connects and disconnects the discharge port 11d and the second supply / discharge port 11c by sliding the main spool 12, and the fluid guide path 12c is connected to the discharge port 11
e and the first supply / discharge port 11b are connected or disconnected.

One end of the main spool 12 (FIG. 1)
A pair of pressure chambers 15a and 15 which are substantially symmetrical and have the same structure
b is configured. The pair of pressure chambers 15 a and 15 b are constructed by combining a cylinder portion 11 f formed by a ring-shaped groove along the hollow body wall of the sleeve 11 and a piston portion 12 f formed to protrude from the outer wall of the main spool 12. Is done. That is, the pair of pressure chambers 15a and 15b
Are formed by a cavity formed by the cylinder portion 11f and the piston portion 12f, and are formed on both sides of the piston portion 12f. More specifically, the pressure chamber 15a is formed by the inner wall of the cylinder portion 11f, the left side wall of the piston portion 12f, and the outer periphery of the pilot spool 13.
5b is formed by the inner wall of the cylinder portion 11f, the right side wall of the piston portion 12f, and the outer periphery of the pilot spool 13. Each of the pair of pressure chambers 15a and 15b is a sleeve 1
1 is connected to the pressure fluid generation source 21 through the upstream control orifice 16a. The pressure chamber 15a has a function of pushing the left side wall of the piston portion 12f by its internal pressure to slide the main spool 2 rightward. Similarly, the pressure chamber 15b has a function of pushing the right side wall of the piston portion 12f by its internal pressure to slide the main spool 2 to the left.

In the present invention, the pair of pressure chambers 1
5a and 15b can be constructed by a piston portion formed on the sleeve 11 side and a cylinder portion formed on the main spool 12 side.

One end of the pilot spool 13 is connected to a drive source 14. The drive force of the drive source 14 causes the pilot spool 13 to slide in the hollow body of the main spool 12. A conduction path 13 a is formed inside the pilot spool 13. The conduction path 13a is connected to the connection between the pressure chamber 15a and the discharge port 11e and to the pressure chamber 15a.
b and the discharge port 11e. One of the pair of pressure chambers 15a and 15b is connected to the conduction path 13a.
When connected to the discharge port 11e through the port, the other one is disconnected from the discharge port 11e. Each of the pair of pressure chambers 15a and 15b and the conduction path 1
The connection to 3a is made through a downstream control orifice 16b formed in the main spool 12.

In the present embodiment, a force motor is used as the drive source 14. Force motor is yoke 1
4a, a magnet 14b and a voice coil 14c. The force motor slides the pilot spool 13 according to a control signal from the controller 20.

Next, the operation of the follow-up type pressure fluid guide valve according to this embodiment will be described with reference to FIGS. 2 and 3 are configuration diagrams of the follow-up type pressure fluid guide valve shown for each operation.

First, from the initial state shown in FIG. 1, the drive source 14 is driven by the control signal from the controller 20 as shown in FIG.
Slide in one direction. This pilot spool 13
Slides, the conduction path 1 of the pilot spool 13
The connection between the pressure chamber 15a and the discharge port 11e is made through 3a, and the internal pressure of the pressure chamber 15a decreases. on the other hand,
At the same time, the connection between the passage 3b of the pilot spool 13 and the pressure chamber 15b is cut off, and the internal pressure of the pressure chamber 15b is increased by the pressure oil supplied from the pressure fluid generation source 21 through the upstream control orifice 16a.

Due to the decrease in the internal pressure of the pressure chamber 15a and the increase in the internal pressure of the pressure chamber 15b, the internal pressure Fp of the pressure chamber 15b is reduced as shown in FIG.
Is slid in the direction of arrow F2. That is, the main spool 1 follows the slide of the pilot spool 13 and slides.
2 slides in the same direction. This main spool 12
Slide, the fluid guide path 1 of the main spool 12
2a through the supply port 11a and the first supply / discharge port 1
1b, and at the same time, between the discharge port 11d and the second supply / discharge port 11c through the fluid guide path 12b.

As a result, the pressure fluid (pressure oil) f1 from the pressure fluid generation source 21 is supplied to the actuator 23 through the supply port 11a and the first supply / discharge port 11b of the follow-up type pressure fluid guide valve. The fluid (oil) f2 discharged from the actuator 23 is discharged to the discharge / recovery system 22 through the second supply / discharge port 11c and the discharge port 11d. The fluid f2 discharged to the discharge recovery system 22 is regenerated, and the regenerated fluid is used again in the pressure fluid generation source 21.

When the operation reverse to the above-described operation is performed, the main spool 12 slides in the opposite direction, and the pressure fluid f1 from the pressure fluid generation source 21 is supplied to the supply port 11a and the second port.
It is supplied to the actuator 23 through the supply / discharge port 11c. The fluid f2 discharged from the actuator 23 is discharged to the discharge / recovery system 22 through the first supply / discharge port 11b and the discharge port 11e.

In the follow-up type pressure fluid guide valve 10 configured as described above, a pair of pressure chambers 15a and 15b for sliding the main spool 12 so as to follow the slide of the pilot spool 13 are used for the sleeve 11 and the main spool 12, respectively. The pilot spool 13 can be formed to have a length enough to connect between the pair of pressure chambers 15a and 15b and the discharge port 11e. As a result, the length of the pilot spool 13 can be reduced and the weight can be reduced, so that the operating characteristics of the follow-up type pressure fluid guide valve 10 can be improved.

Further, in the follow-up type pressure fluid guide valve 10, the pair of pressure chambers 15a and 15b are formed by combining the cylinder portion 11f and the piston portion 12f and have the same structure which is symmetrical to each other. Fifteen
b, and changes in operating conditions caused by wear and the like due to repeated execution of the connecting operation between each of the pressure chambers 15a and 15b and the discharge port 11e become equal in each of the pair of pressure chambers 15a and 15b. . As a result, even if the operation of the follow-up type pressure fluid guide valve 10 is repeatedly performed, the follow-up displacement of the slide of the main spool 12 with respect to the slide of the pilot spool 13 is eliminated, and the operating characteristics of the follow-up type pressure fluid guide valve 10 can be improved.

Modifications The present invention is not limited to the above-described embodiment, and various modifications can be made. For example, in the follow-up type pressure fluid guide valve according to the present invention, a pressure fluid generation source 21 that supplies any of pressure air, pressure inert gas, pressure water, or the like, and the actuator 23 may be driven by these fluids. . If pressurized air is used, the exhaust recovery system 22 is not required and the pressurized air is discharged to the atmosphere.

Further, in the follow-up type pressure fluid guide valve according to the present invention, another drive system such as a torque motor can be used for the drive source 14.

[0042]

As described above, according to the present invention, the length of the pilot spool is shortened to reduce the weight, the responsiveness of the main spool is improved, and the operating characteristics are improved. A compliant pressure fluid guide valve capable of improving operating characteristics can be provided.

[Brief description of the drawings]

FIG. 1 is a configuration diagram of a compliant pressure fluid guide valve and an actuator drive system incorporating the compliant pressure fluid guide valve according to an embodiment of the present invention.

FIG. 2 is a configuration diagram in a first operation of the follow-up type pressure fluid guide valve.

FIG. 3 is a configuration diagram in a second operation of the follow-up type pressure fluid guide valve.

FIG. 4 is a configuration diagram of a follow-up type pressure fluid guide valve according to the related art.

FIG. 5 is a configuration diagram in a first operation of the follow-up type pressure fluid guide valve.

FIG. 6 is a configuration diagram in a second operation of the follow-up type pressure fluid guide valve.

FIG. 7 is a configuration diagram of a follow-up type pressure fluid guide valve according to the related art.

FIG. 8 is a configuration diagram in a first operation of the follow-up type pressure fluid guide valve.

FIG. 9 is a configuration diagram in a second operation of the follow-up type pressure fluid guide valve.

[Explanation of symbols]

10 Follow-up type pressure fluid guide valve, 11 Sleeve, 11a
Supply port, 11b first supply / discharge port, 11c second supply / discharge port, 11d, 11e discharge port, 11
f Cylinder part, 12 main spool, 12a, 12
b, 12c fluid guide path, 11f cylinder part, 12f
Piston section, 13 Pilot spool, 13a Conduction path, 14 Drive source, 15a, 15b Pressure chamber, 16a
Upstream control orifice, 16b Downstream control orifice, 2
0 controller, 21 pressure fluid generation source, 22 discharge recovery system, 23 actuator.

Claims (3)

[Claims] 1. A supply port formed in a hollow body shape and connected to a pressure fluid generation source, a first supply / discharge port connected to one supply / discharge port of an actuator, and connected to another supply / discharge port of the actuator. A sleeve having a second supply / discharge port and a discharge port, and a hollow formed in the shape of a hollow body, and opening / closing between the supply port and the first supply / discharge port by sliding in the hollow body of the sleeve, and a second supply / discharge port A main spool that opens and closes between the main spool and a discharge port; a cylinder portion formed at one end of the sleeve or one end of the main spool; and a piston portion formed at one end of the main spool or one end of the sleeve. Formed on both sides of the piston portion, presses the piston portions in opposite directions to each other, A pair of pressure chambers, a pilot spool that slides in the hollow body of the main spool to close the one pressure chamber and connect the other pressure chamber to the discharge port, and closes the one pressure chamber. And a drive source for providing a slide connecting the other pressure chamber to the discharge port to the pilot spool, wherein the drive source slides the pilot spool,
By closing one pressure chamber and connecting the other pressure chamber to the discharge port, the main spool is slid by the internal pressure of the one pressure chamber, and the pressure is connected by connecting between the supply port and the first supply / discharge port. A follow-up pressure fluid guide valve, wherein a pressure fluid is supplied from a fluid generation source to an actuator, and fluid is discharged from the actuator by connecting between the second supply / discharge port and the discharge port. 2. The follow-up type pressure fluid guide valve according to claim 1, wherein the pair of pressure chambers are respectively connected to a pressure fluid generation source through orifices formed in a sleeve, and are respectively formed in a main spool. A compliant pressure fluid guide valve connected to a discharge port through a defined orifice. 3. The follow-up pressure fluid guide valve according to claim 2, wherein the pressure fluid is pressurized air, pressure oil or pressure water.