JPH10201254A - Electrostatic actuator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To change the direction of relative displacement without using a switch control circuit, etc., by providing the electrode array overlapping area to generate inverse relative displacement between the electrode arrays to which a multi-phase voltage is supplied. SOLUTION: On a rotor board 4 forming an electrode board 2, a pair of left rotor left side electrode array 6 and right rotor right side electrode array 7 are formed, while on a stator board 5, a pair of left rotor left side electrode array 8 and right rotor right side electrode array 9 are formed. when an overlapping region is generated between the rotor left side electrode array 6 and stator right side electrode array 8, the 3-phase AC voltage is impressed to each electrode array so that the rotor board 4 generates relative displacement in the right side. Moreover, an overlapping region is generated between the rotor right side electrode array 7 and stator right side electrode array 9, a 3-phase AC voltage is impressed so that the rotor board 4 generates relative displacement in the left side. Thereby, relative displacement may be generated in the direction corresponding to area difference of the overlapping region of the electrode arrays without using a switch control circuit, etc.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrostatic actuator.

[0002]

2. Description of the Related Art Conventionally, there has been known an electrostatic actuator comprising a pair of opposed electrode substrates each having an electrode row and a voltage supply circuit for supplying a polyphase voltage to both of them.

[0003] In this electrostatic actuator, a polyphase voltage is supplied to an electrode row of each electrode substrate by a voltage supply circuit, and an electrostatic attraction or repulsion generated between the electrode substrates is used as a driving force. Causes relative movement.

The electrode substrate can be relatively displaced only in one direction by a normal voltage application method. However, by providing a switch control circuit, the relative displacement direction can be changed by a program.

However, changing the direction of the relative displacement by a program has a problem that the control and the like are complicated and complicated.

[0006]

SUMMARY OF THE INVENTION Therefore, the present invention
An object of the present invention is to provide an electrostatic actuator that can change the direction of relative displacement without using a switch control circuit or the like.

[0007]

In order to solve the above-mentioned problems, the present invention employs the following technical means.

An electrostatic actuator according to the present invention is an electrostatic actuator in which a pair of electrode substrates each having an electrode array to which a multi-phase voltage is supplied opposes each other, and causes relative displacement in the opposite direction between the electrode substrates. The overlapping region of the electrode rows to be formed is generated in accordance with the relative arrangement of the electrode substrates, and is relatively displaced in a direction corresponding to the area difference between the overlapping regions of the electrode rows to be displaced in the opposite direction.

[0009] According to this electrostatic actuator, the overlap region of the electrode rows to be displaced in the opposite direction is formed between the pair of electrode boards each having the electrode row to which the multi-phase voltage is supplied. Occurs according to the relative arrangement of Then, the electrodes are relatively displaced in a direction corresponding to the area difference between the overlapping regions of the electrode rows to be relatively displaced in the opposite direction. Therefore, the direction of the relative displacement can be changed by the area difference between the overlapping regions of the electrode rows without using a switch control circuit or the like.

Further, a pair of electrode rows formed on each of the electrode substrates along the advancing / retreating axis of the pair of electrode substrates may cause an overlapping area of the electrode rows to be displaced in the opposite direction. Good.

Further, the relative displacement may be made in such a manner that the electrode row is relatively displaced from the side having the larger area of the overlapping area of the electrode row to the side having the smaller area of the overlapping area of the electrode row.

[0012]

Embodiments of the present invention will be described below with reference to the drawings.

As shown in FIGS. 1 to 5, in the electrostatic actuator of this embodiment, a pair of electrode substrates 2 each having an electrode array 1 (see FIG. 1) to which a multi-phase voltage is supplied are opposed to each other. . Each electrode row 1 is formed from a plurality of strip electrodes 3.

A pair of opposing electrode substrates 2 comprises an upper movable substrate 4 and a lower stator substrate 5, and each electrode substrate 2 has a pair of electrodes along a relatively displacing advance / retreat axis. Column 1 is formed. The pair of electrode rows 1 of each of the electrode substrates 2 causes an overlapping area 10 of the electrode rows 1 to be relatively displaced in the opposite direction.

On the upper moving element substrate 4, a pair of a moving element left electrode row 6 on the left side in the figure and a moving element right electrode row 7 on the right side in the figure is formed. On the lower stator substrate 5, a pair of a stator left electrode row 8 on the left side in the figure and a stator right electrode row 9 on the right side in the figure is formed.

The electrode arrangement pattern of the mover left electrode row 6 is (A, B, C...), The electrode arrangement pattern of the mover right electrode row 7 is (C, B, A. The electrode array pattern of the electrode array 8 is (c, b, a...), And the electrode array pattern of the stator right electrode array 9 is (a, b, c...). A voltage is applied.

In each of the electrode arrangement patterns, when an overlapping region 10 is formed between the mover left electrode row 6 and the stator left electrode row 8, the mover substrate 4 is displaced to the right in a known manner. A three-phase AC voltage is applied in a manner similar to that described above, and an overlap region 10 is provided between the mover right electrode row 7 and the stator right electrode row 9.
When this occurs (see FIGS. 2 to 5), a three-phase AC voltage is applied by a known method so that the mover substrate 4 makes a relative displacement toward the left.

That is, between the electrode substrates 2 of the upper movable substrate substrate 4 and the lower stator substrate 5, an overlapping region 10 of the left and right electrode rows 1 to be displaced in the opposite direction is provided.
It is generated according to the relative arrangement of the electrode substrates 2.

The larger the area of the overlapping region 10 of the electrode array 1, the greater the driving force is, and the relative displacement in the direction corresponding to the area difference of the overlapping region 10 of the electrode array 1 in which the relative displacement in the reverse direction is to be performed. The electrode array 1 from the side where the area of the overlapping region 10 of the electrode array 1 to be relatively displaced in the reverse direction is large.
Are relatively displaced toward the side where the area of the overlap region 10 is smaller.

Next, the use state of the electrostatic actuator of this embodiment will be described. As shown in FIG. 2, the area of the overlapping region 10 between the mover left electrode row 6 and the stator left electrode row 8 is larger than the mover right electrode row 7 and the stator right electrode row 9.
When the relative positions of the electrode substrates 2 are larger than the area of the overlapping region 10 between the
Moves relative to the right to the relative arrangement shown in FIG.

In the relative arrangement shown in FIG. 2, the area of the overlap region 10 between the mover left electrode row 6 and the stator left electrode row 8 is larger than the mover right electrode row 7 and the stator right electrode row 9. Is larger than the area of the overlapping region 10, the driving force for causing the relative displacement toward the right is greater, and therefore, the relative displacement in the right direction corresponding to the difference in the area of the overlapping region 10 of the electrode array 1. is there.

As shown in FIG. 3, the area of the overlap region 10 between the mover left electrode row 6 and the stator left electrode row 8 and the area between the mover right electrode row 7 and the stator right electrode row 9 When the electrode substrates 2 are arranged relative to each other in such a manner that the area of the overlapping region 10 is the same as that of the overlapping region 10, the relative movement between the moving member substrate 4 and the stator substrate 5 does not occur and remains stationary.

In the relative arrangement of FIG. 3, the area of the overlap region 10 between the mover left electrode row 6 and the stator left electrode row 8 and the area of the mover right electrode row 7 and the stator right electrode row 9 The reason for this is that the area of the overlapping region 10 is equal to the area therebetween, and the driving force for causing the relative displacement in the opposite direction is offset.

As shown in FIG. 4, the area of the overlap region 10 between the mover right electrode row 7 and the stator right electrode row 9 is larger than that of the mover left electrode row 6 and the stator left electrode row 8. When the electrode substrates 2 are arranged relative to each other so as to be larger than the area of the overlapping region 10 between them, the moving element substrate 4 relatively moves to the left and moves toward the relative arrangement shown in FIG. This is shown in FIG.
The opposite is the case.

When the electrode substrates 2 are arranged relative to each other in the manner as shown in FIG. 5, the relative movement between the movable element substrate 4 and the stator substrate 5 does not occur, but remains stationary.

This is because there is no force for causing relative displacement between the mover right electrode row 7 and the stator left electrode row 8 which form the overlap region 10, and the mover left electrode row 6 and the stator left electrode row This is because there is no overlapping area between the position and the position No. 8 and no relative displacement occurs.

According to this electrostatic actuator, between the pair of electrode substrates 2 each having an electrode array 1 to which a multi-phase voltage is supplied, an overlapping region 10 of the electrode array 1 which is to be displaced in the opposite direction. Is generated in accordance with the relative arrangement of the electrode substrates 2, and is relatively displaced in a direction corresponding to the area difference of the overlapping region 10 of the electrode row 1 in which the relative displacement is to be performed in the opposite direction.

Therefore, the direction of the relative displacement can be determined by the area difference of the overlapping region 10 of the electrode array 1 without using a special control circuit (switch control circuit, inversion circuit, etc.) and without providing a sensor. The relative direction of movement can be determined by the relative positional relationship between the mover electrode and the stator electrode.

The present invention can be applied to various types such as a driving source utilizing static electricity, an intelligent sensor, a shutter, and an OHP.

[0030]

The present invention is configured as described above and has the following effects.

Since the relative displacement is performed in a direction corresponding to the area difference between the overlapping regions of the electrode rows in which the relative displacement is to be made in the opposite direction, the direction of the relative displacement can be adjusted without using a switch control circuit or the like. An electrostatic actuator that can be changed by an area difference can be provided.

[Brief description of the drawings]

FIG. 1 is an exploded perspective view illustrating an embodiment of an electrostatic actuator according to the present invention.

FIG. 2 is a plan view for explaining one aspect of the relative arrangement of the electrode substrates of the electrostatic actuator of FIG. 1;

FIG. 3 is a plan view for explaining another aspect of the relative arrangement of the electrode substrates of the electrostatic actuator of FIG. 1;

FIG. 4 is a plan view for explaining still another aspect of the relative arrangement of the electrode substrates of the electrostatic actuator of FIG. 1;

FIG. 5 is a plan view for explaining still another aspect of the relative arrangement of the electrode substrates of the electrostatic actuator of FIG. 1;

[Explanation of symbols]

 1 electrode array 2 electrode substrate 10 overlapping area

Claims (3)

[Claims] 1. An electrostatic actuator in which a pair of electrode substrates each having an electrode array to which a multi-phase voltage is supplied are opposed to each other, and an electrode array of which an opposite relative displacement is to be applied between the electrode substrates. An electrostatic actuator characterized in that the overlap region is generated according to the relative arrangement of the electrode substrates, and is relatively displaced in a direction corresponding to the area difference of the overlap region of the electrode rows to be displaced in the opposite direction. . 2. An overlapping area of an electrode row to be displaced in a reverse direction by a pair of electrode rows formed on each of the electrode substrates along an advance / retreat axis of the pair of electrode substrates. An electrostatic actuator as described. 3. The device according to claim 2, wherein relative displacement in the reverse direction is performed from a side having a large area of the overlapping area of the electrode rows to a side having a small area of the overlapping area of the electrode rows. Electrostatic actuator.