JPH10186052A - Fine object detecting method and its device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To accurately detect the presence or absence of a fine object by using reflecting type sensors as a transmission type sensor, and setting two optical axes. SOLUTION: A reflection type sensor is formed with a light projector constituted of a luminescence section 511 and a radiation section 512 and a light receiver constituted of a photoelectric conversion section 521 and an incidence section 522, and a sensor main body is formed with the luminescence section 511 and photoelectric conversion section 521. A sensor tip section P is formed with the radiation section 512 and incidence section 522, and the sensor tip section P and sensor main body are connected via a radiation optical fiber 53 and an incidence optical fiber 54. The radiation section 512 of the right side sensor tip section P is connected to the luminescence section 511 of the left side sensor main body via the left side radiation optical fiber 53, and the incidence section 522 is connected to the photoelectric conversion section 521 of the right side sensor main body via the right side incidence optical fiber 54 respectively. The radiation section 512 and incidence section 522 of the left side sensor tip section P are likewise connected to the right and left side sensor main bodies. A pair of reflection type sensors thus connected are used as a transmission type sensor, and two parallel optical axes A, B are set.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for detecting a minute object and an apparatus for implementing the method, and more particularly to a method for detecting the presence or absence of a minute object such as a minute thin IC and recognizing a positioning state thereof, and a method for detecting the minute object. An apparatus for performing the method.

[0002]

2. Description of the Related Art In an IC transport apparatus, a minute thin IC is used.
There is a case where it is necessary to detect whether or not there is a position where it should be placed, or to recognize its positioning state. As described with reference to FIG. 4, when positioning the IC 2, the light beam sensor 1, which is a distance measuring device, can be used. First, the distance between the light beam sensor 1 and the IC 2 to be measured positioned in the IC socket, tray or other positioning area 3 is measured for a plurality of points of the IC 2 to be measured. Here, the measured IC 2 is located in the positioning region 3.
It is assumed that the normal distance data between the light beam sensor 1 and the measured IC 2 when it is positioned at the normal position is measured and stored in advance. By comparing the normal distance data with the measured distance and adjusting the set position of the measured IC 2 so that the difference between the two is set to zero based on the normal distance, the measured IC 2 can be accurately positioned at the normal position of the positioning area 3. Can be positioned.

An IC 2 to be measured using a light beam sensor 1
In order to position the light beam sensor 1 at the normal position in the positioning area 3, it is necessary to measure the distance between the light beam sensor 1 and the measured IC 2 at a plurality of points on the measured IC 2 as described above. A control device for driving and positioning in the XY horizontal plane direction is provided. Alternatively, instead of controlling the driving and positioning of the light beam sensor 1, light sensors are previously installed corresponding to the respective points to be measured.

Here, referring to FIG. 5 (a), this is a diagram for explaining the use of a transmission type sensor 4 as a transmission type to detect the presence or absence of a micro thin IC 2. The transmissive sensor 4 includes a light projector 41 and a light receiver 42 for receiving light projected by the light projector. In FIG. 5A, a light emitter 41 is provided on the left side of the IC 2 to be measured, and a light receiver 42 is provided on the right side of the IC 2 to be measured.
When the light projector 41 emits light, if the minute thin IC 2 is present, the light is blocked by the minute thin IC and is not received by the light receiver 42, and the light receiver 42 is off. On the other hand, when the micro thin IC 2 does not exist, the light emitted by the light projector 41 is directly received by the light receiver 42 and the light receiver 42 is turned on. As described above, the presence / absence of a minute object can be detected.

Referring to FIG. 5 (b), this uses a reflection type sensor 5 as a reflection type, and uses
FIG. 4 is a diagram for explaining the detection of the presence or absence of a. The reflection type sensor 5 has both a light projector 51 and a light receiver 52 for receiving the reflected light. In the reflection type sensor 5, the light emitted from the light projector 51 is reflected by the light if the micro thin IC 2 to be measured is present at the position where it is to be positioned, and the light receiver 52 receives this reflected light and turns on. . On the other hand, when the micro thin IC 2 does not exist, the light emitted from the light projector 51 is not reflected, and the reflection sensor 5 remains off.

[0006]

As described above, a light beam sensor is used for detecting whether or not a micro thin IC exists at a place where it should be mounted or for recognizing the positioning state of the IC transport apparatus. 1 can be used. However, in this case, it is necessary to measure the distance between the light beam sensor 1 and the measured IC 2 at a plurality of points on the measured IC 2. Therefore, a control device for driving and positioning the light beam sensor 1 in the XY horizontal plane direction is prepared. Must be
This is not always easy in various respects. Instead of controlling the drive position of the light beam sensor 1, a plurality of light beam sensors 1 are previously installed at a plurality of locations, and the I
The light beam sensor 1 and the measured IC 2 for a plurality of points C2
However, the light beam sensor 1 is generally expensive.

When the transmission type sensor 4 or the reflection type sensor 5 which is inexpensive compared with the expensive optical beam sensor 1 is used, since the IC 2 to be measured is very thin, a sensor having an extremely thin optical axis is used as the sensor. Must be used. When a sensor having an extremely small optical axis is used as the sensor, the optical axis is shifted from the measured IC and the presence of the measured IC cannot be detected despite the existence of the measured IC 2 due to the narrow optical axis. There is. To ensure detection, the sensor is installed in two directions XY with respect to the IC 2 to be measured,
Light must be emitted in the direction.

According to the present invention, when detecting the presence / absence of a minute object such as a minute thin IC and recognizing its positioning state, the number of required sensors is small, and an inexpensive sensor is used. And a device for implementing the method.

[0009]

A minute object detecting method for setting two optical axes using a reflection type sensor as a transmission type sensor has been constructed. And in the minute object detection method,
A micro object detection method using reflection type sensors facing each other is constructed.

Here, in a minute object detecting apparatus in which reflection type sensors are opposed to each other and used as a transmission type sensor,
The reflection type sensor 5 includes a light emitting unit 51 including a light emitting unit 511 and a radiation unit 512, a photoelectric conversion unit 521, and an incident unit 52.
Thus, a small object detecting device constituted by the light receiving device 52 composed of the two light receiving devices was constructed. The light emitting unit 511 and the photoelectric conversion unit 521 constitute the sensor main body S, and the radiating unit 512 and the incident unit 522 constitute a small object detection device constituting the sensor tip P.

Further, a small object detecting device is connected between the sensor body S and the sensor tip P via a radiation optical fiber 53 and an incident optical fiber. Further, the radiating portion 512 of the right front end P is connected to the light emitting portion 511 of the left main body S via the left radiating optical fiber 53, and the incident portion 522 of the right front end P is connected to the right main body S via the right incident optical fiber 54. And the radiating portion 512 of the left end P is connected to the light emitting portion 511 of the right main body S via the right radiating optical fiber 53, and the incident portion 522 of the left tip P is connected to the left incident optical fiber. A minute object detection device connected to the photoelectric conversion unit 521 of the left main body S via the multiplexing unit 54 was constructed.

[0012]

Embodiments of the present invention will be described with reference to the drawings. Referring to FIG. 1, the reflection type sensor 5 is
A light projector 51 including a light emitting unit 511 and a radiation unit 512 and a light receiver 5 including a photoelectric conversion unit 521 and an incident unit 522
2. The light emitting unit 511 and the photoelectric conversion unit 521 constitute the sensor main body S. And
The radiating portion 512 and the incident portion 522 form a sensor tip P
Is composed. Here, referring to FIG. 2, this is a view for explaining the sensor tip portion P. The sensor body S and the sensor tip P are connected via a radiation optical fiber 53 and an incident optical fiber 54.

FIG. 2 (a) shows the incident and radiated ends of light at the sensor tip P. FIG. 2B shows a longitudinal section of the sensor tip P. A radiation optical fiber core 531 and an incident optical fiber core 5 are provided at the incident end and the radiation end.
The tip of 41 is exposed. Synchrotron radiation fiber core 531
The incident optical fiber core 541 is formed to have a diameter of 1 mm, and these are set to be adjacent and parallel to each other at the end face of the sensor distal end portion P.
The distance between the optical axis A and the optical axis B, which are the central axes of the optical fiber 31 and the incident optical fiber core 541, is set to be extremely narrow to about 1 mm.

The manner of connection between the sensor body S and the sensor tip P according to the embodiment of the present invention is as follows. The radiating portion 512 at the right end P is connected to the light emitting portion 511 of the left main body S via the left radiating optical fiber 53. The incident part 522 of the right end P is connected to the photoelectric conversion part 521 of the right main body S via the right incident optical fiber 54. The radiating portion 512 of the left end P is provided with the right radiating optical fiber 53.
Is connected to the light emitting unit 511 of the right main body S via the. The incident part 522 of the left end P is connected to the left incident optical fiber 54.
Is connected to the photoelectric conversion unit 521 of the left main body S via the.

As described above, the embodiment of the present invention uses a pair of reflective sensors 5 and connects two parallel optical axes between the sensor body S and the sensor tip P as described above. A and the optical axis B are set. The light emitted from one of the light emitters 51 of the reflection type sensor 5 is reflected by the other light receiver 52 of the reflection type sensor 5.
And the light emitted from the other light emitter 51 of the reflection type sensor 5 is received by one light receiver 52 of the reflection type sensor 5.
Both the optical axis A and the optical axis B are radiated from the radiating section 512 and reach not the own incident section 522 but the opposite incident section 522 of the reflection type sensor 5. The type sensor 5 is used as a transmission type sensor. The two parallel optical axes A and B are shown in FIG.
As shown in (a), the interval is set to be extremely narrow, about 1 mm.

Here, referring to FIG. 3, the IC 2 to be measured is positioned and installed in a positioning area 3 formed in an IC socket, a tray and other members. 3, the optical axis A is formed on the upper side, and the optical axis B is formed on the lower side of the optical axis A. (1) When the measured IC 2 is positioned in the positioning area 3 as shown in FIG. 3A, the light generated by the photoelectric conversion unit 521 of the left main body S is transmitted to the left radiation optical fiber 53.
, And reaches the radiating portion 512 of the right end portion P, and is radiated therefrom along the optical axis A. The incident portion 522 of the left end portion P
Can be incident. Incident part 5 of this left end P
The light incident on 22 enters the photoelectric converter 521 of the left main body S via the left incident optical fiber 54 and turns it on, and it is recognized that the IC 2 to be measured does not exist. On the other hand, the light generated by the photoelectric conversion unit 521 of the right main body S reaches the radiating unit 512 of the left end P via the right radiating optical fiber 53, and is radiated from the radiating unit 512 along the optical axis B. Is done. However, the optical axis B is measured as shown in FIG.
The light cannot be incident on the incident portion 522 of the right end portion P while being blocked by C2. Therefore, the photoelectric conversion unit 52 of the right main body S
1 is off, and it is recognized that the measured IC 2 exists.

When the optical axis A passes and the photoelectric conversion unit 521 of the left main body S is on, and the optical axis B is blocked and the photoelectric conversion unit 521 of the right main body S is off, the measured IC 2 is positioned in the positioning area 3. And the relationship that they are accurately positioned and installed can be set between the IC 2 to be measured, the positioning area 3, and the distal end portions P of the pair of reflective sensors 5.

(Second) When the IC 2 to be measured is positioned in the positioning area 3 as shown in FIG. 3B, the light generated by the photoelectric conversion unit 521 of the left main body S passes through the left radiation optical fiber 53. The light reaches the radiating portion 512 of the right end portion P via the optical axis A, and is radiated from the radiating portion 512 along the optical axis A. However, the optical axis A is blocked by the IC 2 to be measured as shown in the figure, and cannot enter the incident portion 522 of the left end P. Therefore, the photoelectric conversion unit 521 of the left main body S is off, and it is recognized that the IC 2 to be measured exists. On the other hand, the light generated by the photoelectric conversion unit 521 of the right main body S reaches the radiating unit 512 of the left end portion P via the right radiating optical fiber 53, and is radiated from there to the right along the optical axis B. The light can enter the incidence part 522 of the tip end portion P.
The light incident on the incident part 522 of the right end part P is transmitted through the right incident optical fiber 54 to the photoelectric conversion part 52 of the right main body S.
1 and is turned on, and it is recognized that the IC 2 to be measured does not exist.

When the optical axis B passes and the photoelectric conversion unit 521 of the right main body S is on and the optical axis A is blocked and the photoelectric conversion unit 521 of the left main body S is off, the IC 2 to be measured is located in the positioning area. 3 but recognizes that it has not been accurately positioned and installed. (Third) The photoelectric conversion unit 52 of the left main body S through which the optical axis A passes.
When 1 is on and the optical axis B passes and the photoelectric conversion unit 521 of the right main body S is on, it is recognized that the IC 2 to be measured does not exist in the positioning area 3.

(Fourth) When the optical axis A is blocked and the photoelectric conversion unit 521 of the left main body S is off, and the optical axis B is also blocked and the photoelectric conversion unit 521 of the right main body S is off, this is also true. Although the measured IC 2 exists in the positioning area 3, it is recognized that the IC 2 is not accurately positioned and installed.

[0021]

As described above, according to the present invention, two optical axes are set by using a reflection type sensor as a transmission type sensor. It is simple and easy to use. By setting two optical axes at minute intervals, even a slight displacement of the minute object to be measured leads to transmission or blocking of the optical axis, so that the detection of the presence or absence of the minute object can be accurately recognized. In addition, it is possible to simultaneously recognize whether the positioning state is appropriate.

Further, since the sensor body and the sensor tip are connected via a flexible radiation optical fiber and an incident optical fiber, the sensor tip can be mounted on a minute object to be measured. In addition, it is possible to easily finely adjust the installation position of the sensor tip portion and appropriately implement the adjustment.

[Brief description of the drawings]

FIG. 1 illustrates an embodiment.

FIG. 2 is a diagram illustrating a sensor tip portion of the embodiment.

FIG. 3 is a diagram showing a position where an IC to be measured is positioned and installed in a positioning area.

FIG. 4 is a diagram illustrating a conventional example.

FIG. 5 is a diagram illustrating another conventional example.

[Explanation of symbols]

 Reference Signs List 5 Reflection type sensor 51 Projector 511 Light emitting unit 512 Radiating unit 52 Light receiving unit 521 Photoelectric converting unit 522 Incident unit 53 Radiating optical fiber 531 Radiating optical fiber core 54 Incident optical fiber 541 Incident optical fiber core A Optical axis B Optical axis P Tip S Sensor body

Claims (6)

[Claims] 1. A method for detecting a minute object, comprising setting two optical axes using a reflection sensor as a transmission sensor. 2. The small object detecting method according to claim 1, wherein the reflection type sensors are used to face each other. 3. A minute object detecting apparatus in which reflection sensors are opposed to each other and used as a transmission sensor, wherein the reflection sensor is a light emitter comprising a light emitting unit and a radiation unit and a light receiver comprising a photoelectric conversion unit and an entrance unit. And a minute object detecting device. 4. The minute object detecting device according to claim 3, wherein a light emitting unit and a photoelectric conversion unit constitute a sensor main body, and a radiation unit and an incident unit constitute a sensor tip. Detection device. 5. The minute object detecting apparatus according to claim 4, wherein the sensor body and the sensor tip are connected via a radiation optical fiber and an incident optical fiber. apparatus. 6. The minute object detecting device according to claim 5, wherein the radiation part at the right end is connected to the light emitting part of the left body via the left radiation optical fiber, and the incident part at the right end is right incidence. Connected to the photoelectric conversion unit of the right main unit via optical fiber, the radiating unit at the left end is connected to the light emitting unit of the right main unit via the right radiating optical fiber, and the incident unit at the left end is connected to the left incident optical fiber. A minute object detection device, which is connected to the photoelectric conversion unit of the left main body via the left body.