JPH10185577A - Vibrating gyro - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a vibrating gyro by which a precise angular velocity can be detected and which is assembled easily. SOLUTION: A vibrating gyro 10 comprises an aquilateral triangular prism- shaped vibrating body 12. A piezoelectric element (14c), for drive, which is used as a driving piece is formed in the central part on one side face (12c) of the vibrating body 12. In addition, piezoelectric elements (14a), 14b, for detection and feedback, which are used as pieces for detection and feedback are formed on two other side faces (12a, 12b) of the vibrating body 12. A nearly quadrangular frame-shaped support member 16 composed of a metal plate is fixed to the vibrating body 12 so as to be fitted to parts near node points in the vibration on the ridge 12d of the vibrating body 12. In the support member 16, opposite sides 16a, 16b are bent and erected so as to be a shape in which the vibrating body 12 can be suspended. Then, the support member 16 is welded, fixed and bonded to protrusion-shaped mounting parts 18C, 18d formed on the mounting base 18 in parts near middle points of sides 16c, 16d in which the support member 16 is not bent and erected. Thereby, the vibrating body 12 is attached to the mounting base 18 via the support member 16.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibrating gyroscope, and more particularly to, for example, a navigation system for detecting a position of a moving body by detecting an angular velocity and performing appropriate guidance, or a yaw rate sensor for controlling a vehicle attitude. It relates to a vibrating gyroscope that can be applied to, for example, a gyroscope.

[0002]

2. Description of the Related Art A conventional vibration gyro will be described with reference to the drawings. The vibrating gyroscope 101 shown in FIGS. 7 and 8 includes a substantially regular triangular prism-shaped vibrating body 102 made of a constant elastic metal, and substantially rectangular piezoelectric elements 103a, 103b, and 103c are provided at substantially centers of three side surfaces of the vibrating body 102. Are respectively attached with an adhesive. Also, a ridge line portion 102d of the vibrating body 102
In the vicinity of the node in the first vibration mode, a substantially U-shaped metal support member 10 made of a thin wire having a high elastic modulus is used.
4,104 are fixed. And the support member 10
4 and 104 are fixed to one main surface of a mounting board 105 made of a glass epoxy material or the like, so that the vibrating body 10
2 is attached to the attachment board 105 via the support members 104,104.

Here, the piezoelectric element 103c is used for inputting a drive signal, and the piezoelectric elements 103a and 103b are used for detection and detection.
Used for return. Then, the piezoelectric elements 103a,
Electrodes (not shown) are formed on both surfaces of 103b, 103c, and one end of lead wires 106a, 106b, 106c is soldered to the electrode forming surface of piezoelectric elements 103a, 103b, 103c that is not bonded to vibrator 102. It is connected by such as. Then, the lead wires 106a, 106b,
106c is fixed to the vicinity of the node point of the vibrating body 102 with the elastic adhesive 107, and the lead wires 106a, 106b, 10
6c is connected to the mounting board 105 by aerial wiring,
It is electrically connected to a circuit pattern on a circuit board (not shown).

[0004] Although not particularly shown, the piezoelectric element 1
A drive circuit is connected between the piezoelectric element 103c and the piezoelectric elements 103a and 103b as a feedback loop for causing the vibrating body 102 to self-excitedly vibrate. It bends and vibrates. When rotation about the axis of the vibrating body 102 is applied in this state, the piezoelectric elements 103a and 103a are driven by Coriolis force.
An output difference corresponding to the rotation speed is generated between b and the rotation angular speed can be detected by detecting this output difference with a detection circuit.

[0005]

However, in the above-mentioned conventional vibrating gyroscope, the vibration of the vibrating body is reduced by the vibration of the supporting member.
It leaks to the mounting board along the feet of the book. Here, when external influences such as shock, vibration, and temperature change are applied to the vibrating gyroscope and the manner of leakage of the vibration from the four legs of the support member is different from each other, a subtle change in the balance of the vibration of the vibrating body ( Imbalance), which makes it difficult to detect an accurate angular velocity.

Further, when external vibration is applied, the lead wire serving as the aerial wiring resonates, or the tension of the lead wire changes due to a change in external temperature. And an accurate angular velocity cannot be detected.

In addition, since the lead wires have an aerial wiring structure, which takes a lot of time to assemble, a great deal of cost is required for devices and the like.

SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to solve the above-mentioned problems, and an object of the present invention is to provide a vibrating gyroscope which can detect an accurate angular velocity and can be easily assembled.

[0009]

In order to achieve the above object, in a vibrating gyroscope according to the present invention, a columnar vibrator, a functional piece provided on a side surface of the columnar vibrator, and a vibrating gyroscope are provided. A vibration member is suspended and supported at two places corresponding to the vicinity of the node point where the vibration occurs, and a support member is formed by integral molding, and a mounting base fixed to the support member at one or two places is provided. And

[0010] The supporting member is formed of a single flat plate having a substantially square shape or a substantially sun-shaped shape. One of the opposite sides of the flat plate is bent and raised, and the substantially central portion of the side and the vibration of the vibrating body are vibrated. It is characterized in that two points corresponding to the occasional node points are fitted and fixed so as to suspend the vibrating body.

Further, the vibrating body and the supporting member are provided with conductive means for connecting a functional piece and a circuit for causing the functional piece to function.

Further, the conductive means is characterized in that an insulating film is formed on the surface of the vibrating body and the surface of the supporting member, and a conductive film is formed on the insulating film.

Thus, since the support member is fixed to the mounting base only at one or two locations, the number of locations of vibration leakage due to the vibration of the vibrating body is reduced, and the imbalance of vibration leakage is also eliminated.

Further, the support member is formed of a flat plate having a square shape or a sun shape, and is fitted and fixed to the vibrator, so that the support structure is strong.

Further, in order to provide the support member with conductive means,
The aerial wiring of the lead wire from the vibrator is eliminated.

Further, since the functional piece and the circuit are wired by a conductive film, the structure of the entire vibrating gyroscope can be simplified, and the size can be reduced.

[0017]

Embodiments of the present invention will be described below in detail with reference to the drawings. A vibrating gyroscope 10 according to the first embodiment of the present invention shown in FIGS. 1 and 2 includes, for example, a regular triangular prism-shaped vibrating body 12. The vibrating body 12 is formed of a material that generally generates mechanical vibration such as an elinvar, an iron-nickel alloy, quartz, glass, quartz, or ceramic. In the first embodiment, the vibrating body 12 is formed of an elinvar. It is assumed that At the center of one side surface of the vibrating body 12, the driving piezoelectric element 1 serving as a driving piece as a functional piece is provided.
4c is formed. The driving piezoelectric element 14c is composed of a single piezoelectric plate made of, for example, piezoelectric ceramic and electrodes formed on both main surfaces thereof. Also, the vibrating body 1
2 on the other two sides, respectively,
Detecting / feedback piezoelectric elements 14a, 14b serving as feedback / single piece
Is formed. Similar to the driving piezoelectric element 14c, the detecting / feedback piezoelectric elements 14a and 14b each include a single piezoelectric plate made of, for example, piezoelectric ceramic and electrodes formed on both main surfaces thereof.

The vibrating body 12 is provided with a single substantially U-shaped flat supporting member 16 made of a metal plate such as an elinvar.
Are fixed so as to fit into the ridgeline 12 d of the vibrating body 12. The fitting position of the support member 16 at the ridgeline 12d is
In order not to hinder the vibration of the vibrating body 12, it is desirable to set it near the node point in the primary vibration mode of the vibrating body 12. Opposing sides 16a and 16b of the support member 16 are bent upright, and have a shape in which the vibrating body 12 is suspended. Then, the support member 16 is welded to the protruding mounting portions 18c, 18d provided on the mounting base 18 made of metal or the like in the vicinity of the midpoint of the sides 16c, 16d of the support member 16 that are not bent. In this way, the vibrating body 12 is attached to the mounting base 18 via the support member 16.
Attached to.

In this vibrating gyroscope 10, as shown in FIG. 3, a driving piezoelectric element 14c, which is a driving piece, has an oscillation circuit 2c.
By applying the drive signal from the second device 2, the vibration body 12 is excited / generated in a certain direction. When no rotational angular velocity is applied to the vibrating gyroscope 10, the vibrating body 1
Reference numeral 2 indicates bending vibration in a direction orthogonal to the surface on which the driving piezoelectric element 14c is formed. In this state, when the vibrating body 12 rotates around its axis, the vibration direction of the vibrating body 12 changes due to Coriolis force. As a result, different voltages are generated in the detection / feedback piezoelectric elements 14a and 14b, and the difference between the voltages is output from the differential circuit 24. Since the output signal from the differential circuit 24 is a signal generated by a change in the vibration direction of the vibrating body 12, it becomes a detection signal corresponding to the rotational angular velocity applied to the vibrating gyroscope 10. The detection / feedback piezoelectric elements 14a and 14b, which are both detection / feedback pieces, not only deform the vibrating body 12 due to the Coriolis force but also drive and return.
The deformation of the vibrating body 12 generated by the excitation is also detected.
The detection signal (feedback signal) resulting from the driving / excitation is fed back to the driving piezoelectric element 14c, which is a driving piece, via the summing circuit 26, the phase shift circuit 28, and the oscillation circuit 22, thereby mechanically. It realizes stable self-excited vibration.

The driving piezoelectric element 14c as a driving piece
And the detection / feedback piezoelectric element 14a, 1
4b and the like, and FIG.
As shown in FIG. 4, an insulating film 32 is formed on the surfaces of the vibrating body 12 and the support member 16 to electrically connect the circuit shown in FIG.
Is provided, and a conductive paste containing silver, copper, or the like as a main component is applied and baked on the insulating film 32 to form a conductive film 34 as a conductive means.

Next, a vibrating gyroscope 40 according to a second embodiment of the present invention will be described with reference to FIGS. In addition,
The same components as those of the vibrating gyroscope 10 shown in the first embodiment are denoted by the same reference numerals, and description thereof will be omitted. In the vibrating gyroscope 40, a substantially flat plate-shaped support member 46 made of a metal plate such as an elinver is fixed to the vibrating body 12 so as to fit to the ridgeline 12d of the vibrating body 12. . The fitting position of the support member 46 at the ridgeline 12 d is set so as not to hinder the vibration of the vibrating body 12.
It is desirable to be near the node point in the primary vibration mode of the vibrating body 12. The support member 46 has opposite sides 46a,
46b is bent upright and has a shape in which the vibrating body 12 is suspended. The support member 46 is provided on the mounting base 18 made of metal or the like near the midpoint of a side 46e corresponding to a center line between the sides 46a and 46b of the sun character of the support member 46. The vibrating body 12 is attached to the attachment base 18 via the support member 46 by being fixed to the projecting attachment portion 18e by a method such as welding.

Although not particularly shown, the vibration gyro 4
In the same manner as in the vibrating gyroscope 10, an insulating film is provided on the surface of the vibrating body and the supporting member, and a conductive paste containing silver, copper, or the like as a main component is applied and baked on the insulating film to provide a conductive means. The conductive film is formed, and the functional piece and the circuit are conducted.

In the above two embodiments, the support member is a substantially square-shaped or substantially sun-shaped flat plate which is integrally molded. However, the support member has a thin high elasticity mainly composed of tungsten or molybdenum. The supporting member may be formed by integrally molding a wire. Further, the shape is not limited to these, and may be another integrally molded shape. However, by using a substantially square-shaped or substantially sun-shaped flat plate as a support member, more stable support is provided against external impacts, that is, a vibration gyro having a support structure with improved impact resistance is provided. Achieved.

The connection between the functional piece and the circuit is made by a conductive film formed on the insulating film. Although not shown, a lead wire may be attached to the insulating film. The lead wires may be fixed to the vibrating body and the support member with an elastic adhesive or the like. And when the support member is a flat plate,
It is also possible to attach and fix the lead wires to the support member, which was impossible in the past. However, by forming a conductive film to form a conductive structure, the wiring configuration around the vibrating body of the vibrating gyroscope is most simplified, and the balance of the vibration of the vibrating body is not lost. Is obtained.

In this embodiment, the vibration gyro made of a triangular prism vibrator is exemplified. However, the present invention can be applied to a vibration gyro made of a quadrangular prism, another polygonal column, or a columnar vibrator.

Although the vibrating body is made of an elinver, the vibrating body may be made of any of the other materials described in the embodiments. The functional piece provided on the vibrating body is not limited to a piezoelectric element, but may be an electrode. The film formed directly on the vibrator may be used.

Further, it goes without saying that the present invention can be applied to a vibrating gyroscope in which the arrangement of the functional pieces shown in FIG. 3 and the arrangement of the functional pieces other than the corresponding operation are performed.

The vibrating gyroscope according to the present invention is not limited to the above embodiment, but can be variously modified within the scope of the gist.

[0029]

As described above, in the vibrating gyroscope according to the present invention, since the supporting member and the mounting base are fixed at only one or two places by using the integrally formed supporting member, In addition to reducing the number of vibration leaks to the mounting base due to the vibration, the imbalance of the vibration leak is also eliminated, and an accurate angular velocity can be detected.

Further, the support member is formed of a flat plate in the shape of a square or a sun and is fitted and fixed to the vibrating body, and the support structure is strengthened, so that the impact resistance is improved.

Further, in order to provide conductive means on the support member,
The aerial wiring of the lead wire from the vibrator is eliminated.

Furthermore, since the functional piece and the circuit pattern are wired by the conductive film, the lead wire is not wired in the air, so that the influence of resonance and tension of the lead wire is eliminated, and stable vibration is obtained, and the accurate angular velocity is obtained. Can be detected, and the entire structure of the vibrating gyroscope can be simplified and downsized.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a structure of a vibrating gyroscope according to a first embodiment of the present invention.

FIG. 2 is a sectional view taken along line AA in FIG.

FIG. 3 is a circuit diagram illustrating an operation of the vibrating gyroscope according to the first embodiment of the present invention.

FIG. 4 is an explanatory view illustrating a conductive means according to the present invention.

FIG. 5 is a perspective view showing a structure of a vibrating gyroscope according to a second embodiment of the present invention.

6 is a sectional view taken along line BB in FIG.

FIG. 7 is a perspective view showing a conventional vibrating gyroscope.

FIG. 8 is a front view showing a conventional vibrating gyroscope.

[Explanation of symbols]

 10, 40 vibrating gyroscope 12 vibrating body 16, 46 support member 18 mounting base 32 insulating film 34 conductive film

Claims (4)

[Claims] 1. A columnar vibrating body, a functional piece provided on a side surface of the columnar vibrating body, and the vibrating body suspended at two locations corresponding to a vicinity of a node generated when the vibrating body vibrates. A support member that supports and is integrally molded, a mounting base fixed to the support member at one or two places,
A vibration gyro consisting of 2. The support member is formed of a single flat plate having a substantially square shape or a substantially sun-shape. One of the opposite sides of the flat plate is bent and erected, and the substantially central portion of the side and the substantially flat portion are formed. The vibrating gyroscope according to claim 1, wherein two points corresponding to node points generated when the vibrating body vibrates are fitted and fixed so as to suspend the vibrating body. 3. The vibrating body and the support member are provided with conductive means for connecting the functional piece and a circuit for causing the functional piece to function. The vibrating gyro described. 4. The vibrating gyroscope according to claim 3, wherein said conductive means forms an insulating film on the surface of the vibrating body and the surface of the supporting member, and forms a conductive film on the insulating film.