JPH10177000A - Sensor - Google Patents

Sensor

Info

Publication number
JPH10177000A
JPH10177000A JP8337209A JP33720996A JPH10177000A JP H10177000 A JPH10177000 A JP H10177000A JP 8337209 A JP8337209 A JP 8337209A JP 33720996 A JP33720996 A JP 33720996A JP H10177000 A JPH10177000 A JP H10177000A
Authority
JP
Japan
Prior art keywords
protective cover
sensor
outer protective
movable member
detected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8337209A
Other languages
Japanese (ja)
Inventor
Shuichi Tanaka
修一 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Motor Corp
Original Assignee
Toyota Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Motor Corp filed Critical Toyota Motor Corp
Priority to JP8337209A priority Critical patent/JPH10177000A/en
Publication of JPH10177000A publication Critical patent/JPH10177000A/en
Pending legal-status Critical Current

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  • Measuring Oxygen Concentration In Cells (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

PROBLEM TO BE SOLVED: To prevent foreign bodies from being stuck to both an inside protective cover and an outside protective cover in a sensor which is provided with the protective covers doubly. SOLUTION: A plurality of opening parts 45 are formed in the circumferential direction in an outside protective cover 4 at a sensor 1 which is attached to a mounting member 100 which is vibrated in an indefinite direction. An inside protective cover 5 is coupled to the bottom face 21 of a base part 2 and to the inner face 61 at the bottom part 6 of the external protective cover 4, and a plurality of opening parts 55 are formed in the circumferential direction. When the mounting member 100 is vibrated, a moving member 7 which is formed to be ring-shaped is moved inside a space 200 which is partitioned by the inner circumferential face 41 of the external protective cover 4, by the outer circumferential face 52 of the inner protective cover 5, by the bottom face 21 of the base part 2 and by the inner face 61 at the bottom part 6 of the external protective cover 4.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、センサ、特に、振
動を伴なう取り付け部材に取り付けられる2重保護カバ
ー付きセンサに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sensor, and more particularly, to a sensor with a double protective cover which is mounted on a mounting member with vibration.

【0002】[0002]

【従来の技術】センサ素子に物がぶつかり損傷されるの
を防止したり、センサ素子の表面に異物が付着してセン
サの検出性能等が低下するのを防止するために、センサ
素子を孔のあいた保護カバーで覆うことは広く実施され
ている。そして保護カバーの孔が異物で塞がれないよう
に、保護カバーの外側に環状リングを配設して、被検出
ガスの流れによってこの環状リングを保護カバーの外周
面上を移動、回転させて、保護カバーの外周面上に付着
した異物を除去するようにしたセンサが開示されている
(実開平5−4002号公報参照)。
2. Description of the Related Art In order to prevent an object from hitting and being damaged by a sensor element, or to prevent a foreign matter from adhering to the surface of the sensor element and lowering the detection performance of the sensor, a sensor element is provided with a hole. Covering with a protective cover is widely practiced. Then, an annular ring is provided outside the protective cover so that the hole of the protective cover is not blocked by foreign matter, and the annular ring is moved and rotated on the outer peripheral surface of the protective cover by the flow of the gas to be detected. A sensor has been disclosed which removes foreign matter adhering to the outer peripheral surface of a protective cover (see Japanese Utility Model Laid-Open No. 5-4002).

【0003】[0003]

【発明が解決しようとする課題】ところが、上記公報の
装置は保護カバーの外周面上に異物が付着するのを防止
することはできるが、センサ素子に異物が付着しないよ
うに2重の保護カバーを設けたセンサにおいては内側保
護カバーと外側保護カバーの両方に対して異物の付着を
防止することはできない。本発明は上記問題に鑑み、2
重の保護カバーを有するセンサにおいて、内側保護カバ
ーと外側保護カバーの両方に対して異物の付着を防止す
ることを目的とする。
However, although the device disclosed in the above publication can prevent foreign substances from adhering to the outer peripheral surface of the protective cover, the double protective cover does not adhere to the sensor element. In the sensor provided with the above, it is not possible to prevent foreign matter from adhering to both the inner protective cover and the outer protective cover. In view of the above problems, the present invention
In a sensor having a heavy protective cover, an object is to prevent foreign matter from adhering to both the inner protective cover and the outer protective cover.

【0004】[0004]

【課題を解決するための手段】請求項1の発明によれ
ば、取り付け部材に取り付けられる2重保護カバー付き
センサであって、前記取り付け部材に固定されたセンサ
素子と、筒状に形成され、被検出流体の導入通路を備え
前記取り付け部材に固定された外側保護カバーと、筒状
に形成され、被検出流体の導入通路を備え前記外側保護
カバーの内側に離間配置された内側保護カバーと、外側
保護カバーの内側に非固定に隣接配置され取り付け部材
の振動で動く可動部材とを具備するセンサが提供され
る。この様に構成されたセンサでは外側保護カバーの内
側に配設された可動部材が振動によって外側保護カバー
には内側から、内側保護カバーには外側から当たり外側
保護カバーと内側保護カバーに付着した異物を除去す
る。
According to the first aspect of the present invention, there is provided a sensor with a double protective cover attached to an attachment member, wherein the sensor element is fixed to the attachment member, and is formed in a cylindrical shape. An outer protective cover having an introduction passage for the fluid to be detected and fixed to the mounting member, and an inner protective cover formed in a cylindrical shape and having an introduction passage for the fluid to be detected and spaced apart inside the outer protective cover, A movable member which is fixedly disposed adjacent to the inside of the outer protective cover and is movable by the vibration of the mounting member. In the sensor configured as described above, the movable member disposed inside the outer protective cover hits the outer protective cover from the inside due to vibration, and the inner protective cover hits from the outer side, and a foreign substance adhered to the outer protective cover and the inner protective cover. Is removed.

【0005】請求項2の発明によれば、請求項1の発明
において前記内側保護カバーが前記取り付け部材に固定
されていて、前記可動部材が前記外側カバーと内側カバ
ーの間を移動するようにしたセンサが提供される。この
様に構成されたセンサでは可動部材が前記外側カバーと
内側カバーの間を移動して外側保護カバーと内側保護カ
バーに付着した異物を除去する。
According to the invention of claim 2, in the invention of claim 1, the inner protective cover is fixed to the mounting member, and the movable member moves between the outer cover and the inner cover. A sensor is provided. In the sensor configured as described above, the movable member moves between the outer cover and the inner cover, and removes foreign matter attached to the outer protective cover and the inner protective cover.

【0006】請求項3の発明によれば、請求項1の発明
において前記内側保護カバーを前記可動部材としたセン
サが提供される。この様に構成されたセンサでは内側保
護カバー自体が振動により移動して、外側保護カバーに
当たり、その結果、内側保護カバーに付着した異物と、
外側保護カバーに付着した異物を除去する。
According to a third aspect of the present invention, there is provided the sensor according to the first aspect of the present invention, wherein the inner protective cover is the movable member. In the sensor configured in this way, the inner protective cover itself moves by vibration and hits the outer protective cover, and as a result, foreign matter adhered to the inner protective cover,
Remove any foreign matter adhering to the outer protective cover.

【0007】請求項4の発明によれば、請求項1の発明
において前記可動部材に前記外側保護カバーの被検出流
体導入通路を通って外側に延伸する突起を設けたことを
特徴とするセンサが提供される。この様に構成されたセ
ンサでは可動部材に設けられた突起が外側保護カバーの
被検出流体の導入通路に付着する異物を除去する。
According to a fourth aspect of the present invention, there is provided a sensor as set forth in the first aspect, wherein the movable member is provided with a projection extending outward through the detected fluid introduction passage of the outer protective cover. Provided. In the sensor configured as described above, the protrusion provided on the movable member removes foreign matter adhering to the introduction path of the fluid to be detected of the outer protective cover.

【0008】[0008]

【発明の実施の形態】以下、添付図面を用いて本発明の
実施の形態を説明する。図1は本発明の第1の実施の形
態の構造を説明する図であって、符号1により総体的に
示されるセンサは、基部2、センサ素子3、外側保護カ
バー4、内側保護カバー5から成り、適切な方法によっ
て、取り付け部材100に固定されている。ここで、取
り付け部材100は不特定方向に振動する部材であり、
例えば、内燃機関の吸気管または排気管の管壁等に相当
する。
Embodiments of the present invention will be described below with reference to the accompanying drawings. FIG. 1 is a view for explaining the structure of the first embodiment of the present invention. The sensor indicated by reference numeral 1 generally includes a base 2, a sensor element 3, an outer protective cover 4, and an inner protective cover 5. It is fixed to the mounting member 100 by an appropriate method. Here, the mounting member 100 is a member that vibrates in an unspecified direction,
For example, it corresponds to a pipe wall of an intake pipe or an exhaust pipe of an internal combustion engine.

【0009】外側保護カバー4は底部6を有する円筒状
に形成され、底部6と長手方向の反対側の端部が基部2
の底面21に結合されている。また、周方向には複数の
開口部45が形成されている。内側保護カバー5は底部
を有さない円筒状に形成され、一方の端部は外側保護カ
バー4の底部6の内面61に接合され、他方の端部は基
部2の底面21に結合されている。また、周方向に複数
の開口部55が形成されている。なお、外側保護カバー
4の開口部45の基部2の底面21からの距離と、内側
保護カバー5の開口部55の基部2の底面21からの距
離は異なる様にされていて被検出流体中の異物が直接セ
ンサ素子3に当たることを防止している。
The outer protective cover 4 is formed in a cylindrical shape having a bottom 6, and the end opposite to the longitudinal direction of the bottom 6 is formed on the base 2.
Is connected to the bottom surface 21. Further, a plurality of openings 45 are formed in the circumferential direction. The inner protective cover 5 is formed in a cylindrical shape without a bottom, and one end is joined to the inner surface 61 of the bottom 6 of the outer protective cover 4 and the other end is joined to the bottom surface 21 of the base 2. . Further, a plurality of openings 55 are formed in the circumferential direction. The distance between the opening 45 of the outer protective cover 4 and the bottom surface 21 of the base 2 is different from the distance between the opening 55 of the inner protective cover 5 and the bottom surface 21 of the base 2 so that the distance in the fluid to be detected is different. Foreign matter is prevented from directly hitting the sensor element 3.

【0010】7は環状に形成された可動部材で、可動部
材7の半径方向の厚さtは外側保護カバー4の内周面4
1と内側保護カバー5の外周面52の隙間cよりも小さ
くされていて、外側保護カバー4にも内側保護カバー5
にも固定されていない。したがって、取り付け部材10
0が振動することによって、可動部材7は、外側保護カ
バー4の内周面41と、内側保護カバー5の内周面51
と、基部2の底面21と、外側保護カバー4の底部6の
内面61で区画される空間200を、両矢印Vで示され
る方向および両矢印Hで示される方向に移動可能であ
る。
Reference numeral 7 denotes a movable member formed in an annular shape. The thickness t of the movable member 7 in the radial direction is determined by the inner peripheral surface 4 of the outer protective cover 4.
1 and the gap c between the outer peripheral surface 52 of the inner protective cover 5 and the inner protective cover 5
Not even fixed. Therefore, the mounting member 10
By vibrating 0, the movable member 7 includes the inner peripheral surface 41 of the outer protective cover 4 and the inner peripheral surface 51 of the inner protective cover 5.
The space 200 defined by the bottom surface 21 of the base 2 and the inner surface 61 of the bottom 6 of the outer protective cover 4 can be moved in the directions indicated by the double-headed arrow V and the double-headed arrow H.

【0011】外側保護カバー4の周囲の被検出流体は、
外側保護カバー4の開口部45から上記の空間200内
に入り、可動部材7が図示されるような位置にある場合
には、可動部材7と外側保護カバー4の内周面41の間
の隙間、あるいは可動部材7と内側保護カバー5の外周
面51の間の隙間を通って、また可動部材7が両端部に
ある場合はそのまま内側保護カバー5の開口部55に達
し、この開口部55から内側保護カバー5の内側の空間
300に入り、センサ素子3に接触する。センサ素子3
は例えば、被検出流体中の特定成分の濃度に応じた信号
電圧を発生し、この信号電圧は、基部に取り付けられた
導線30を通って、外部の信号処理装置(図示しない)
に送られる。
The fluid to be detected around the outer protective cover 4 is:
When the movable member 7 enters the space 200 through the opening 45 of the outer protective cover 4 and is at a position as shown in the figure, a gap between the movable member 7 and the inner peripheral surface 41 of the outer protective cover 4. Alternatively, through the gap between the movable member 7 and the outer peripheral surface 51 of the inner protective cover 5, and when the movable member 7 is at both ends, the movable member 7 reaches the opening 55 of the inner protective cover 5 as it is. It enters the space 300 inside the inner protective cover 5 and contacts the sensor element 3. Sensor element 3
Generates, for example, a signal voltage corresponding to the concentration of a specific component in the fluid to be detected, and the signal voltage passes through a lead wire 30 attached to the base, and an external signal processing device (not shown).
Sent to

【0012】ここで、上記の様に、被検出流体が流れる
過程において、被検出流体中の異物が外側保護カバー4
の開口部45や内周面41、および内側保護カバー5の
外周面52や開口部55に付着しようとするが、上述の
ように可動部材7が振動によって空間200内を移動す
る時にこれらの面とぶつかって擦り落とすので付着しな
い。また、可動部材7が、外側保護カバー4や内側保護
カバー5に当たることによって、外側保護カバー4や内
側保護カバー5は振動せしめられので可動部材7がぶつ
からない外側保護カバー4の外表面42、内側保護カバ
ー5の内表面51への異物の付着も抑制される。
Here, as described above, in the process of flowing the fluid to be detected, foreign substances in the fluid to be detected are removed by the outer protective cover 4.
Of the inner protective cover 5 and the outer peripheral surface 52 and the opening 55 of the inner protective cover 5, but when the movable member 7 moves in the space 200 due to the vibrations as described above, these surfaces are used. It does not adhere because it collides with and scrapes off. Further, the movable member 7 hits the outer protective cover 4 or the inner protective cover 5, and the outer protective cover 4 or the inner protective cover 5 is vibrated, so that the outer surface 42, the inner surface Adhesion of foreign matter to the inner surface 51 of the protective cover 5 is also suppressed.

【0013】図2は本発明の第2の実施の形態の構造を
示す図であって、第1の実施の形態とは異なり、9で示
される内側保護カバーは、長手方向の端部が、基部2の
底面21と、外側保護カバー4の底部6の内面61のい
ずれにも固定されない両端が開放された円筒状に形成さ
れ、内側保護カバー9自体が可動部材の役を成し外側保
護カバー4により囲まれた空間内をV方向、H方向に移
動する。
FIG. 2 is a view showing the structure of a second embodiment of the present invention. Unlike the first embodiment, the inner protective cover indicated by reference numeral 9 has a longitudinal end portion, Both ends of the bottom surface 21 of the base 2 and the inner surface 61 of the bottom 6 of the outer protective cover 4 which are not fixed are formed in a cylindrical shape with both open ends, and the inner protective cover 9 itself serves as a movable member and serves as an outer protective cover. 4 moves in the V and H directions in the space surrounded by 4.

【0014】ここで、内側保護カバー9が大きく傾いて
センサ素子3に接触することがないように外側保護カバ
ー4の内径D4に対する内側保護カバー9の外径D9、
および、外側保護カバー4の内部の長手方向長さL4に
対する、内側保護カバー9の長手方向長さL9が決めら
れている。そして、内側保護カバー5の端部が基部2の
底面21と対向する部分には通路95が、内側保護カバ
ー5の他方の端部が外側保護カバー4の底部6側と対向
する部分には通路96が形成される。通路95の幅w1
と、通路96の幅w2は内側保護カバー9の長手方向の
位置によって異なるが、w1+w2は一定であって、w
1+w2=L4−L9である。
Here, the outer diameter D9 of the inner protective cover 9 with respect to the inner diameter D4 of the outer protective cover 4 so that the inner protective cover 9 does not greatly incline and come into contact with the sensor element 3.
Further, the length L9 in the longitudinal direction of the inner protective cover 9 with respect to the length L4 in the longitudinal direction inside the outer protective cover 4 is determined. A passage 95 is formed in a portion where the end of the inner protective cover 5 faces the bottom surface 21 of the base 2, and a passage is formed in a portion where the other end of the inner protective cover 5 faces the bottom 6 side of the outer protective cover 4. 96 are formed. Width w1 of passage 95
And the width w2 of the passage 96 differs depending on the longitudinal position of the inner protective cover 9, but w1 + w2 is constant and w
1 + w2 = L4-L9.

【0015】第2の実施の形態は上記の様に構成される
ので外側保護カバー4の周囲の被検出流体は、外側保護
カバー4の開口部45から、空間200に入り、そこか
ら通路95または96を通って、内側保護カバー9の内
側の空間300に入り、センサ素子3に接触する。この
様に被検出流体が流れる過程において、被検出流体中の
異物が外側保護カバー4の開口部45や内周面41、お
よび内側保護カバー9の外周面91や通路95、96に
付着しようとするが、内側保護カバー9が、振動によっ
て、外側保護カバー4の内面41や、基部2の内面21
にぶつかりながら移動するので、擦り落とされて付着し
ない。また、内側保護カバー9が外側保護カバー4に当
たることによって、外側保護カバー4および内側保護カ
バー9自体が振動するので、外側保護カバー4の外表面
42、内側保護カバー9の内表面91への異物の付着も
抑制される。
Since the second embodiment is configured as described above, the fluid to be detected around the outer protective cover 4 enters the space 200 through the opening 45 of the outer protective cover 4 and from there the passage 95 or the passage 95 or the like. Through 96, it enters the space 300 inside the inner protective cover 9 and contacts the sensor element 3. In the process of flowing the fluid to be detected in this manner, foreign substances in the fluid to be detected are likely to adhere to the opening 45 and the inner peripheral surface 41 of the outer protective cover 4, the outer peripheral surface 91 of the inner protective cover 9, and the passages 95 and 96. However, due to the vibration, the inner protective cover 9 causes the inner surface 41 of the outer protective cover 4 and the inner surface 21 of the base 2 to move.
As it moves while hitting, it is scraped off and does not adhere. In addition, since the outer protective cover 4 and the inner protective cover 9 vibrate when the inner protective cover 9 hits the outer protective cover 4, foreign matter on the outer surface 42 of the outer protective cover 4 and the inner surface 91 of the inner protective cover 9 is also reduced. Is also suppressed.

【0016】図3は本発明の第3の実施の形態の構造を
示す図であって、この第3の実施の形態は前記第2の実
施の形態における内側保護カバー9に外側保護カバー4
の開口部45内を通って外側に延伸する突起93が設け
られている点が第2の実施の形態と異なるが、その他の
構成は第2の実施の形態と同じである。内側保護カバー
5が第2の実施の形態の場合と同じように移動して同じ
ような作用をおこなうが、さらに、突起93によって、
外側保護カバー4の開口部45に付着しようとする異物
が確実に除去される。また、突起93は内側保護カバー
9の動きを規制するストッパとしての役も成すので内側
保護カバー9が必要以上に傾き、外側保護カバー4の内
部に引っ掛かって動かなくなるということが確実に防止
されるという利点がある。
FIG. 3 is a view showing the structure of a third embodiment of the present invention. In the third embodiment, the inner protective cover 9 and the outer protective cover 4 in the second embodiment are different from each other.
The second embodiment differs from the second embodiment in that a projection 93 extending outward through the inside of the opening 45 is provided, but the other configuration is the same as that of the second embodiment. The inner protective cover 5 moves and performs the same operation as in the case of the second embodiment.
Foreign matter that will adhere to the opening 45 of the outer protective cover 4 is reliably removed. Further, since the projection 93 also serves as a stopper for restricting the movement of the inner protective cover 9, it is possible to reliably prevent the inner protective cover 9 from being tilted more than necessary and being stuck inside the outer protective cover 4 and not moving. There is an advantage.

【0017】なお、上記の第2の実施の形態と、第3の
実施の形態において、内側保護カバー9を底のある部材
にすることも可能である。この様にすることにより、内
側保護カバー9と外側保護カバー4の底部6が接触面積
が大きくなり内側保護カバー9の矢印H方向の動きが滑
らかになり内側保護カバー9が外側保護カバー4の内部
に引っ掛かるのを防止することができる。
In the second embodiment and the third embodiment, the inner protective cover 9 may be a member having a bottom. By doing so, the contact area between the inner protective cover 9 and the bottom 6 of the outer protective cover 4 is increased, the movement of the inner protective cover 9 in the direction of arrow H is smoothed, and the inner protective cover 9 is moved inside the outer protective cover 4. Can be prevented.

【0018】[0018]

【発明の効果】各請求項の発明によれば、2重の保護カ
バーを有するセンサにおいて、内側保護カバーと、外側
保護カバーに異物が付着するのが防止され、2重の保護
カバーによりセンサへの異物が付着することを防止しな
がら被検出流体のセンサへの接触が確保できセンサの性
能を安定させることができる。
According to the invention of each claim, in a sensor having a double protective cover, foreign substances are prevented from adhering to the inner protective cover and the outer protective cover, and the double protective cover is applied to the sensor. Thus, contact of the fluid to be detected with the sensor can be ensured while preventing foreign matter from adhering, and the performance of the sensor can be stabilized.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の第1の実施の形態の構造を示す図であ
る。
FIG. 1 is a diagram showing a structure according to a first embodiment of the present invention.

【図2】本発明の第2の実施の形態の構造を示す図であ
る。
FIG. 2 is a diagram illustrating a structure according to a second embodiment of the present invention.

【図3】本発明の第3の実施の形態の構造を示す図であ
る。
FIG. 3 is a diagram illustrating a structure according to a third embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1…センサ 2…基部 3…センサ素子 4…外側保護カバー 5…内側保護カバー 7…可動部材 9…内側保護カバー 45…被検出流体導入通路 55…被検出流体導入通路 93…突起 95…被検出流体導入通路 96…被検出流体導入通路 100…取り付け部材 DESCRIPTION OF SYMBOLS 1 ... Sensor 2 ... Base part 3 ... Sensor element 4 ... Outer protective cover 5 ... Inner protective cover 7 ... Movable member 9 ... Inner protective cover 45 ... Detected fluid introduction passage 55 ... Detected fluid introduction passage 93 ... Protrusion 95 ... Detected Fluid introduction passage 96 ... Detected fluid introduction passage 100 ... Mounting member

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 取り付け部材に取り付けられる2重保護
カバー付きのセンサであって、 前記取り付け部材に固定されたセンサ素子と、 筒状に形成され、被検出流体の導入通路を備え前記取り
付け部材に固定された外側保護カバーと、 筒状に形成され、被検出流体の導入通路を備え前記外側
保護カバーの内側に離間配置された内側保護カバーと、 外側保護カバーの内側に非固定に隣接配置され取り付け
部材の振動で動く可動部材とを具備するセンサ。
1. A sensor with a double protective cover attached to a mounting member, comprising: a sensor element fixed to the mounting member; and a cylindrically formed passage for introducing a fluid to be detected. A fixed outer protective cover, an inner protective cover formed in a cylindrical shape and having a passage for introducing a fluid to be detected and spaced apart inside the outer protective cover, and non-fixedly disposed inside the outer protective cover. A movable member that is moved by the vibration of the mounting member.
【請求項2】 前記内側保護カバーが前記取り付け部材
に固定されていて、前記可動部材が前記外側カバーと内
側カバーの間を移動することを特徴とする請求項1に記
載のセンサ。
2. The sensor according to claim 1, wherein the inner protective cover is fixed to the mounting member, and the movable member moves between the outer cover and the inner cover.
【請求項3】 前記内側保護カバーが前記可動部材であ
ることを特徴とする請求項1に記載のセンサ。
3. The sensor according to claim 1, wherein the inner protective cover is the movable member.
【請求項4】 前記可動部材に前記外側保護カバーの前
記被検出流体の導入通路を通って外側に延伸する突起を
設けたことを特徴とする請求項1に記載のセンサ。
4. The sensor according to claim 1, wherein the movable member is provided with a projection extending outward through the passage of the fluid to be detected of the outer protective cover.
JP8337209A 1996-12-17 1996-12-17 Sensor Pending JPH10177000A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8337209A JPH10177000A (en) 1996-12-17 1996-12-17 Sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8337209A JPH10177000A (en) 1996-12-17 1996-12-17 Sensor

Publications (1)

Publication Number Publication Date
JPH10177000A true JPH10177000A (en) 1998-06-30

Family

ID=18306470

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8337209A Pending JPH10177000A (en) 1996-12-17 1996-12-17 Sensor

Country Status (1)

Country Link
JP (1) JPH10177000A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6843622B2 (en) 2002-02-14 2005-01-18 Concept Design Electronics And Manufacturing, Inc. Apparatus and method for profiling optical disks
JP2011112557A (en) * 2009-11-27 2011-06-09 Ngk Insulators Ltd Gas concentration detection sensor

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6843622B2 (en) 2002-02-14 2005-01-18 Concept Design Electronics And Manufacturing, Inc. Apparatus and method for profiling optical disks
JP2011112557A (en) * 2009-11-27 2011-06-09 Ngk Insulators Ltd Gas concentration detection sensor
EP2333534A3 (en) * 2009-11-27 2011-12-28 NGK Insulators, Ltd. Gas concentration detection sensor comprising a protection cover
US8464573B2 (en) 2009-11-27 2013-06-18 Ngk Insulators, Ltd. Gas concentration detection sensor

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