JPH10172719A - Heater control device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To inexpensively control a heater by providing a temperature control unit to control gates of thyristors on the basis of respective pulses outputted from a three-phase synchronous unit and an output signal of a temperature detector. SOLUTION: A three-phase synchronous unit 17 of a controller part 18 forms trigger-like pulse signals at a zero cross point of respective phases R, S and T, and outputs the respective ones from R, S and T output terminals. A temperature control unit 6B forms electric power supply pulse signals on the respective phases so that the whole heating temperatures by resistors 141 to 143 become a prescribed temperature on the basis of these pulse signals and an output signal of a thermocouple 5, and outputs them to gates 131c to 133c of thyristors 131 to 133. In a heater control device having such constitution, since controller parts of a conventional single phase AC heater control device are used by three units, a heater by a three-phase power source can be controlled without newly designing the temperature control unit 6B.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heater control device using three-phase AC power, and more particularly to a heater control device used in a semiconductor manufacturing apparatus.

[0002]

2. Description of the Related Art FIG. 3 shows a vertical diffusion C which is a semiconductor manufacturing apparatus.
FIG. 4 is a block diagram illustrating a conventional heater control device used in a VD device. As shown in FIG. 3, a conventional heater control device includes a breaker 1 connected to a single-phase alternating current (200 V AC) power supply and a power supply voltage connected to the output side of the breaker 1 for converting a power supply voltage into a voltage suitable for a heater described later. Thyristor 3 connected to an output side of the heater transformer 2, an anode 3a connected to an output side of the heater transformer 2, a cathode 3b connected to the heater, and a gate 3c connected to a controller unit described later, A controller unit 6 is provided between the thyristor 3 and controls the gate of the thyristor 3. The heater 4 is a diffusion C (not shown).
It is a heater for heating the VD device, and its electric power is supplied from the thyristor 3. A thermocouple 5 for detecting a heating temperature of the heater 4 is attached to an appropriate position of the heater 4, and an output thereof is connected to a controller 6.

The controller 6 includes a trigger generation circuit 6a connected to the output side of the breaker 1, and a trigger generation circuit 6a.
And a temperature control unit 6b connected to the output side of the device. The trigger generating circuit 6a forms a pulse signal at the zero-cross point of the single-phase alternating current. This pulse signal is used not only as a basic time but also as a trigger pulse which is a signal for controlling output to the heater. The temperature control unit 6b receives the pulse signal output from the trigger generation circuit 6a and the thermocouple 5
On and off so that the heating temperature becomes a predetermined temperature based on the output signal, and outputs the pulse signal to the gate 3c of the thyristor 3.

[0004]

The conventional heater control device controls the temperature of the semiconductor manufacturing apparatus by using the single-phase power supply as described above. However, according to factory equipment and power supply equipment, three-phase alternating current is mainly used in many cases. When such a three-phase alternating current is used to control a heater by a conventional heater controller, three alternating-current power supplies having different phases are used. On the other hand, a controller unit for controlling the heater must be newly provided, and a great deal of cost is required for changing the equipment.

Accordingly, an object of the present invention is to provide a heater control device which realizes heater control using a three-phase AC power supply at low cost by using a main part of existing equipment including a controller.

[0006]

In order to solve the above-mentioned problems, a heater control device according to the present invention comprises a three-phase (R,
S, T) A thyristor provided corresponding to each phase of AC power and supplying each phase power to the heater, temperature detecting means for detecting the temperature of the heater, and a zero cross point of the three-phase AC. Forming a pulse, corresponding to each of the above phases 3
A three-phase synchronization unit that outputs the pulse from two output terminals, and a temperature control unit that performs gate control of the thyristor based on each pulse output from the three-phase synchronization unit and an output signal of the temperature detection unit. And

According to such a configuration, the three-phase synchronous unit forms a zero-cross pulse from each of the three-phase alternating currents, and the temperature control unit uses the respective pulses based on the temperature detection signal from the temperature detecting means. A thyristor on / off control signal can be formed. Therefore, according to the present invention, if three conventional heater control devices are used, a three-phase synchronous unit and a thyristor for three phases are provided, so that a three-phase power supply can be provided without providing a new controller unit for three phases. The temperature of the heater used can be controlled. In this case, the conventional trigger generation circuit becomes unnecessary. Further, a three-phase heater transformer can be provided as needed. In addition, a resistor, which is a heating element of the heater, uses a Y connection or a delta connection.

[0008]

BEST MODE FOR CARRYING OUT THE INVENTION

Embodiment 1 FIG. Hereinafter, an embodiment of the present invention will be described by taking a heater control device used in a vertical diffusion CVD apparatus as a semiconductor manufacturing apparatus as an example. FIG. 1 is a block diagram showing an embodiment. The heater control device in this embodiment is a three-phase alternating current (200 VAC, R, S, T
Phase) Breaker 1 for allowable current 120A connected to power supply
1, a three-phase heater transformer 12 which is connected to the output side of the breaker 11, converts each of the three-phase alternating currents into a voltage suitable for a heater described later, and outputs the converted voltage.
And a thyristor unit 13 having the same.

One thyristor 131 constituting the thyristor unit 13 has an anode 131a connected to the T terminal of the heater transformer 12, and a cathode 131b connected to one end of a first resistor 141 constituting the heater 14. The thyristor 132 has an anode 132a connected to the S terminal of the heater transformer 12 and a cathode 132a.
b is connected to one end of the second resistor 142 forming the heater 14. The thyristor 133 has an anode 133a connected to the R terminal of the heater transformer 12, and a cathode 133b connected to one end of a third resistor 143 constituting the heater 14. Three resistors 14 constituting the heater 14
1 to 143 have the same resistance value.
The other end of each of the 43 is connected in a Y-connection type which is commonly connected.

[0010] The resistors constituting the heater may be connected in a delta connection instead of the above-described Y connection.

A thermocouple 5 constituting a temperature detecting means of the present invention for detecting a heating temperature heated by a resistor is provided at an appropriate position of the heater 14.

The heater control device includes a controller 18 having a three-phase synchronization unit 17 and a temperature control unit 6B connected to the output side of the three-phase synchronization unit 17. The three-phase synchronous unit 17 has its R, S, T input terminals connected to the respective R, S, T output terminals of the breaker 11, and its output terminals connected to the R, S, T input terminals of the temperature control unit 6B. I have. The R, S, T output terminals of the temperature control unit 6B are connected to the gates 133c, 132c, 131c of the thyristors 133, 132, 131, respectively.

The operation of this embodiment having the above configuration will be described below. The heater transformer 12 transforms each phase of the three-phase alternating current into a voltage suitable for heating each of the resistors 141 to 143 of the heater 14. Three-phase synchronous unit 17
Forms a trigger-like pulse signal (R, S, T pulse signal) at a zero-cross point of each phase (R, S, T), and outputs each from three output terminals, R, S, T output terminals. .

Each of these pulse signals is used as a basic time in the temperature control unit 6B as in the prior art, and is also used as a trigger pulse which is an output control signal to the thyristor.

The temperature control unit 6B operates based on the pulse signal output from each output terminal of the three-phase synchronous unit and the output signal of the thermocouple 5 so that the entire heating temperature of the resistors 141 to 143 becomes a predetermined temperature. A pulse signal for power supply is formed for each phase and output to the gates 131c to 133c of the thyristors 131 to 133. The method of forming the pulse signal is the same as that of the related art. For example, on / off control, energization cycle control, phase control, and the like can be used.

According to this embodiment described above,
As shown in FIG. 2, the heater control device of the present invention has a controller unit 6 in the conventional heater control device shown in FIG.
It becomes clear that heater control can be performed by a three-phase power supply without using a new temperature control unit 6B.

FIG. 2 is a block diagram in which the controller section 18 shown in FIG. 1 is constructed by using three controller sections 6 shown in FIG. 3, and the same reference numerals as those in FIGS. 1 and 3 indicate the same objects. ing. The R, S, and T output terminals of the three-phase synchronous unit 17 are input to the temperature control units of each controller 6. These temperature control units are the same as those shown in FIG. In this case, the trigger generation circuit 6a shown in FIG.
As shown by 6a in FIG. 1, the switch 6c provided between the trigger generation circuit 6a and the temperature control unit 6B is turned off, so that the switch is not used.

[0018]

As described above, the heater control device according to the present invention is provided for each phase of three-phase (R, S, T) AC power, and supplies each phase power to the heater. A thyristor, a temperature detecting means for detecting the temperature of the heater, and forming a pulse at the zero-cross point of the three-phase alternating current,
A three-phase synchronization unit that outputs the pulse from three output terminals corresponding to each of the phases; and a thyristor based on each pulse output from the three-phase synchronization unit and an output signal of the temperature detection unit. And a temperature control unit that performs gate control of the heater.Thus, in heating control of the heater using three-phase AC, the controller unit of the conventional heater control device using single-phase AC can be used without designing and installing a new controller. Can be used.

[Brief description of the drawings]

FIG. 1 is a block diagram showing an embodiment.

FIG. 2 is a block diagram illustrating an embodiment in comparison with a conventional technique.

FIG. 3 is a block diagram showing a conventional heater control device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 11 Breaker 12 Heater transformer 13 Thyristor unit 131-133 Thyristor 14 Heater 5 Thermocouple 6, 18 Controller 17 Three-phase synchronous unit 6B Temperature control unit

Claims (1)

[Claims] 1. A thyristor provided for each phase of three-phase AC power and supplying each phase power to a heater, temperature detecting means for detecting a temperature of the heater, and a zero-cross point of the three-phase AC. And a three-phase synchronization unit that outputs a pulse from three output terminals corresponding to each of the phases, a pulse output from the three-phase synchronization unit, and an output signal of the temperature detection unit. On the basis of,
A heater control device comprising: a temperature control unit that performs gate control of the thyristor.