JPH10167728A - Production of crystalline metal oxide - Google Patents

Production of crystalline metal oxide

Info

Publication number
JPH10167728A
JPH10167728A JP35193496A JP35193496A JPH10167728A JP H10167728 A JPH10167728 A JP H10167728A JP 35193496 A JP35193496 A JP 35193496A JP 35193496 A JP35193496 A JP 35193496A JP H10167728 A JPH10167728 A JP H10167728A
Authority
JP
Japan
Prior art keywords
metal oxide
hydrogen peroxide
solution
metal
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP35193496A
Other languages
Japanese (ja)
Inventor
Katsuyuki Nakano
勝之 中野
Hideko Obuchi
英子 大渕
Masayuki Hashimura
正之 橋村
Tadashi Shimoyama
正 下山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP35193496A priority Critical patent/JPH10167728A/en
Publication of JPH10167728A publication Critical patent/JPH10167728A/en
Pending legal-status Critical Current

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  • Surface Treatment Of Glass (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)

Abstract

PROBLEM TO BE SOLVED: To obtain a crystalline metal oxide having high purity and enabling the use of arbitrary material having poor heatresistance in the case of forming on a substrate by adding a hydrogen peroxide solution to a metal oxide sol to form an aqueous hydrogen peroxide solution of the metal oxide and drying the solution at a temperature within a specific range. SOLUTION: A metal oxide sol (b) is produced by using either one of a metal alkoxide (a1 ), a metal chloride (a2 ), a metal nitrate (a3 ) or an organic acid metal salt (a4 ) as a starting raw material. An aqueous solution of hydrogen peroxide (c) is added to the metal oxide sol (b) to form an aqueous hydrogen peroxide solution (d) of the metal oxide. The objective crystalline metal oxide (f) is produced by drying (e1 ) the aqueous hydrogen peroxide solution (d) at a proper temperature between room temperature and 200 deg.C. Titanium oxide is an example of the useful metal oxide. It has low crystallization temperature and slow crystallization rate and, accordingly, it can be produced with a simplified process at a low cost without necessitating heat-treatment procedure.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、結晶性の金属酸化
物の形成方法に関し、特に、金属酸化物の過酸化水素水
溶液から結晶性の金属酸化物を形成する方法に関する。
[0001] The present invention relates to a method for forming a crystalline metal oxide, and more particularly to a method for forming a crystalline metal oxide from an aqueous solution of hydrogen peroxide of the metal oxide.

【0002】[0002]

【従来の技術】例えば、結晶性の酸化チタン膜は、その
強度を利用して光学素子や一般使用のガラス等の保護コ
ーティングとして用いられ、また、屈折率など光学的特
性を利用した光学機能コーティングや光活性能力を利用
した光触媒コーティングに用いられる。
2. Description of the Related Art For example, a crystalline titanium oxide film is used as a protective coating for an optical element or a glass for general use by utilizing its strength, and an optical functional coating utilizing an optical property such as a refractive index. It is used for photocatalytic coatings utilizing photoactivities.

【0003】このような結晶性の金属酸化物(膜状、バ
ルク状のいずれの場合も含む)を形成する従来の方法と
して、以下に示すようなものが挙げられる。 熱酸化法 酸素の存在下で金属チタンを加熱することにより、加熱
した部分の表面に酸化物層を形成させる。
[0003] As a conventional method for forming such a crystalline metal oxide (both in a film form and in a bulk form), the following method can be mentioned. Thermal oxidation method By heating titanium metal in the presence of oxygen, an oxide layer is formed on the surface of the heated portion.

【0004】 ゾルゲル法 出発原料としては、図7に示すように、金属アルコキシ
ド(a1)、金属塩化物(a2)、金属硝化物(a3)、
金属有機酸化物(a4)等を用い、金属酸化物のゾル
(b)を生成する。これを、工程(e2)において30
0℃以上の温度で焼成することにより、結晶性の金属酸
化物(f)を形成する。結晶化した酸化チタンを形成す
る場合は、チタンアルコキシドを出発原料とし、加水分
解によりチタンの水酸化物を形成し、400℃以上の温
度で熱焼成してアルコール類を蒸発させ、結晶化を進ま
せる。
Sol-gel method As starting materials, as shown in FIG. 7, metal alkoxide (a 1 ), metal chloride (a 2 ), metal nitrate (a 3 ),
Using a metal organic oxide (a 4 ) or the like, a sol (b) of a metal oxide is generated. In step (e 2 ), this is
By baking at a temperature of 0 ° C. or higher, a crystalline metal oxide (f) is formed. In the case of forming crystallized titanium oxide, titanium alkoxide is used as a starting material, a hydroxide of titanium is formed by hydrolysis, and thermal calcination is carried out at a temperature of 400 ° C. or more to evaporate alcohols and proceed with crystallization. Let

【0005】 過酸化水素水溶液法 図7において、出発原料として金属アルコキシド
(a1)を用い、金属酸化物のゾル(b)を生成した
後、これに過酸化水素水(c)を加えて金属酸化物の過
酸化水素水溶液を作成し、これを焼成(e2)して、結
晶性の金属酸化物(f)を形成する(K.MATSU
O,T.TAKESHITA,K.NAKANO,J.
Crystal Growth 99(1990)p6
21−624)。ここでは、結晶性の酸化チタンを得る
ために、600℃で焼成を行っている。
Hydrogen peroxide aqueous solution method In FIG. 7, a metal alkoxide (a 1 ) is used as a starting material, a metal oxide sol (b) is generated, and hydrogen peroxide water (c) is added to the metal oxide sol (b). An aqueous solution of hydrogen peroxide of an oxide is prepared and calcined (e 2 ) to form a crystalline metal oxide (f) (K.MATSU)
O, T. TAKESHITA, K. NAKANO, J.A.
Crystal Growth 99 (1990) p6
21-624). Here, firing is performed at 600 ° C. in order to obtain crystalline titanium oxide.

【0006】 微粒子法 結晶化した微粒子をバインダーで溶いたものを塗り、低
温で焼成あるいは単に乾燥させるだけで膜を形成する方
法が報告されている。 陽極酸化法 チタンを溶液中に浸漬させ、電気化学反応により表面に
酸化被膜を形成させる。
Fine Particle Method A method of forming a film by applying a solution obtained by dissolving crystallized fine particles with a binder and firing or simply drying at a low temperature has been reported. Anodizing method Titanium is immersed in a solution, and an oxide film is formed on the surface by an electrochemical reaction.

【0007】[0007]

【発明が解決しようとする課題】上記の方法のうち、
,,の方法は、結晶化させるために少なくとも3
00℃以上の温度における焼成が必要である。従って、
酸化チタン層を他の基材上に形成する時には、熱的変質
を受けやすい樹脂、繊維、紙等を用いることはできず、
基材として選択できる範囲が限定される欠点がある。
SUMMARY OF THE INVENTION Among the above methods,
The method of at least 3 is required for crystallization.
Firing at a temperature of 00 ° C. or more is required. Therefore,
When forming a titanium oxide layer on another substrate, it is not possible to use a resin, fiber, paper, etc., which are susceptible to thermal deterioration,
There is a drawback that the range that can be selected as a substrate is limited.

【0008】の方法は、バインダーなどの不純物が混
入したり、また、そのバインダーが光触媒作用により劣
化して膜を粉化させる問題があった。
The method (1) has a problem that impurities such as a binder are mixed in, and the binder is deteriorated by a photocatalytic action to powder the film.

【0009】の方法は、チタンあるいは他の基材上に
チタンを蒸着等の成膜方法でチタン膜を形成することが
必要であり、さらに電圧を加え、陽極酸化させた後に結
晶化率を上げるためにやはり熱処理を行う必要があっ
た。
In the method (1), it is necessary to form a titanium film on a titanium or other base material by a film forming method such as vapor deposition or the like. Therefore, heat treatment had to be performed.

【0010】そこで、本発明の目的は、基材上に形成す
る場合に耐熱性の小さい適宜の素材を用いることがで
き、しかも、他の物質を混在させずに純度の高い結晶性
の金属酸化物を形成することができる方法を提供するこ
とである。
Therefore, an object of the present invention is to use an appropriate material having low heat resistance when formed on a substrate, and to provide a highly pure crystalline metal oxide without mixing other substances. It is to provide a method by which objects can be formed.

【0011】[0011]

【課題を解決するための手段】請求項1に記載の発明
は、金属酸化物ゾルに過酸化水素水を加えて該金属酸化
物の過酸化水素水溶液を作成する工程と、前記過酸化水
素水溶液を200℃以下の温度で少なくとも乾燥するま
で放置する工程とを含むこと特徴とする結晶性金属酸化
物の形成方法である。
According to a first aspect of the present invention, there is provided a method for preparing a hydrogen peroxide aqueous solution of a metal oxide by adding a hydrogen peroxide solution to a metal oxide sol; And leaving it at least at a temperature of 200 ° C. or less until it is dried.

【0012】この方法を図1を用いて説明する。出発原
料としては、金属アルコキシド(a1)、金属塩化物
(a2)、金属硝化物(a3)、金属有機酸化物(a4
のいずれをも用いることができ、これらの原料から金属
酸化物のゾル(b)を生成する。これに過酸化水素水
(c)を加えて金属酸化物の過酸化水素水溶液を作成
し、これを、工程(e1)において室温から200℃ま
での適当な温度で乾燥させることにより、結晶性の金属
酸化物(f)を形成する。
This method will be described with reference to FIG. Starting materials include metal alkoxide (a 1 ), metal chloride (a 2 ), metal nitrate (a 3 ), and metal organic oxide (a 4 )
Any of these can be used, and a sol (b) of a metal oxide is produced from these raw materials. Aqueous hydrogen peroxide (c) was added thereto to prepare an aqueous hydrogen peroxide solution of a metal oxide, and this was dried at a suitable temperature from room temperature to 200 ° C. in step (e 1 ) to obtain a crystalline solution. To form a metal oxide (f).

【0013】請求項2に記載の発明は、前記金属酸化物
が酸化チタンであることを特徴とする請求項1記載の結
晶性の金属酸化物の形成方法である。
The invention according to claim 2 is the method for forming a crystalline metal oxide according to claim 1, wherein the metal oxide is titanium oxide.

【0014】[0014]

【実施例】【Example】

酸化チタンの過酸化水素水溶液の作製 チタンテトライソプロポキシド(TIP)とイソプロパ
ノール(IPA)をモル比1:5で混合し、撹拌を行っ
た後、あらかじめ全組成比がTIP/IPA/水=1/
10/4となるように混合しておいた溶液を加え、27
8゜Kに保ち撹拌した。
Preparation of Titanium Oxide Hydrogen Peroxide Aqueous Solution After mixing titanium tetraisopropoxide (TIP) and isopropanol (IPA) at a molar ratio of 1: 5 and stirring, the total composition ratio was previously set to TIP / IPA / water = 1. /
The solution mixed so as to be 10/4 was added, and 27
The mixture was kept at 8 K and stirred.

【0015】この白色懸濁液に対して吸引濾過を行い、
生成した微粒子を分離し、372゜Kで20時間の通気
乾燥を行った。この微粒子を31wt%過酸化水素水に入
れ、293゜Kの恒温槽中で撹拌して溶解させ、黄色透
明のゲル体を得た。これに、過酸化水素水を再添加し、
酸化チタン過酸化水素水溶液を得た。
The white suspension is subjected to suction filtration,
The generated fine particles were separated and subjected to aeration drying at 372 ° K for 20 hours. The fine particles were placed in a 31 wt% aqueous hydrogen peroxide solution and stirred and dissolved in a 293 ° K constant temperature bath to obtain a yellow transparent gel. To this, re-add the hydrogen peroxide solution,
An aqueous solution of titanium oxide hydrogen peroxide was obtained.

【0016】(実施例)得られた酸化チタン過酸化水素
水溶液の一部を、上面が開口する容器(ビーカ)に深さ
5mm程度として容れ、大気中で、室温で1ヶ月放置し
て乾燥させた結果、容器形状と同形の固形物である酸化
チタン形成体が得られた。同様な方法で、保持温度及び
時間を以下のように設定して、それぞれ酸化チタン形成
体を得た。
(Example) A portion of the obtained aqueous solution of titanium oxide hydrogen peroxide was placed in a container (beaker) having an open upper surface to a depth of about 5 mm, and left to dry in the air at room temperature for one month. As a result, a titanium oxide formed body which was a solid having the same shape as that of the container was obtained. In the same manner, the holding temperature and the time were set as follows, and titanium oxide formed bodies were obtained respectively.

【0017】 [0017]

【0018】(比較例)得られた酸化チタン過酸化水素
水溶液の一部を用い、773゜K,673゜K,573
゜K,473゜Kにおいて1時間焼成した。
(Comparative Example) Using a part of the obtained aqueous solution of titanium oxide hydrogen peroxide, 773 ° K, 673 ° K, 573 ° C
It was baked at {K, 473} K for 1 hour.

【0019】実施例および比較例の酸化チタンの形成体
について、それぞれX線回折により結晶性の測定を行っ
た。図2ないし図5に実施例のサンプル1ないし4のX
線回折スペクトルを示す。また、図6に比較例のX線回
折スペクトルをまとめて示す。
The crystallinity of each of the formed titanium oxides of the examples and comparative examples was measured by X-ray diffraction. FIGS. 2 to 5 show Xs of Samples 1 to 4 of the embodiment.
2 shows a line diffraction spectrum. FIG. 6 shows an X-ray diffraction spectrum of the comparative example.

【0020】これから、比較例では773゜K,673
゜K,573゜Kで焼成したものにおいてピークが観測
され、結晶化が起こっていることがわかるが、473゜
Kではピークが観察されず、アモルファス状態であるこ
とがわかる。一方、実施例では、いずれのサンプルの場
合も、高温で熱処理したものと同様に、アナタース結晶
に特有なピーク(2θ=25°,38°,48°)が観
察された。
From this, in the comparative example, 773 ° K, 673
A peak was observed in the material fired at ゜ K, 573 ゜ K, and it was found that crystallization had occurred. However, no peak was observed at 473 、 K, indicating an amorphous state. On the other hand, in the examples, peaks (2θ = 25 °, 38 °, 48 °) unique to the anatase crystal were observed in each of the samples, similarly to those heat-treated at a high temperature.

【0021】[0021]

【発明の効果】以上説明したように、この発明によれ
ば、高温で加熱する工程を経ることなく、結晶性の金属
酸化物の形成体を得ることができるので、熱的変質を受
けやすいような、樹脂、繊維、紙等の素材からなる基材
上にも形成することができる。従って、このような金属
酸化物の形成体の用途をその特長を活用した広い範囲に
拡張することができる。結晶化温度が低く、結晶化速度
が遅いので、形成物の急激な膨張や塑性を伴う応力が生
じず、亀裂や変形の少ない酸化物を形成することができ
る。また、熱処理等が不要で、工程が簡単であり、製造
コストも小さく、バインダーを用いないので、純度の高
い製品を得ることができる。
As described above, according to the present invention, a crystalline metal oxide formed body can be obtained without going through a heating step at a high temperature, so that it is susceptible to thermal deterioration. It can also be formed on a substrate made of a material such as resin, fiber, paper and the like. Therefore, the use of the formed body of such a metal oxide can be extended to a wide range utilizing its features. Since the crystallization temperature is low and the crystallization speed is low, the formed product does not undergo rapid expansion or stress accompanied by plasticity, and an oxide with less cracks and deformation can be formed. Further, heat treatment or the like is not required, the process is simple, the production cost is small, and a binder is not used, so that a product with high purity can be obtained.

【図面の簡単な説明】[Brief description of the drawings]

【図1】この発明の方法の工程の概要を示すフロー図で
ある。
FIG. 1 is a flowchart outlining the steps of the method of the present invention.

【図2】この発明の実施例のサンプル1のX線回折スペ
クトルのグラフを示す図である。
FIG. 2 is a diagram showing a graph of an X-ray diffraction spectrum of Sample 1 of an example of the present invention.

【図3】この発明の実施例のサンプル2のX線回折スペ
クトルのグラフを示す図である。
FIG. 3 is a view showing a graph of an X-ray diffraction spectrum of Sample 2 of an example of the present invention.

【図4】この発明の実施例のサンプル3のX線回折スペ
クトルのグラフを示す図である。
FIG. 4 is a diagram showing a graph of an X-ray diffraction spectrum of Sample 3 of an example of the present invention.

【図5】この発明の実施例のサンプル4のX線回折スペ
クトルのグラフを示す図である。
FIG. 5 is a view showing a graph of an X-ray diffraction spectrum of Sample 4 of an example of the present invention.

【図6】従来例のサンプルのX線回折スペクトルのグラ
フを示す図である。
FIG. 6 is a graph showing an X-ray diffraction spectrum of a sample of a conventional example.

【図7】従来の方法の工程の概要を示すフロー図であ
る。
FIG. 7 is a flowchart showing an outline of steps of a conventional method.

─────────────────────────────────────────────────────
────────────────────────────────────────────────── ───

【手続補正書】[Procedure amendment]

【提出日】平成9年6月4日[Submission date] June 4, 1997

【手続補正1】[Procedure amendment 1]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0011[Correction target item name] 0011

【補正方法】変更[Correction method] Change

【補正内容】[Correction contents]

【0011】[0011]

【課題を解決するための手段】請求項1に記載の発明
は、金属酸化物ゾルに過酸化水素水を加えて該金属酸化
物の過酸化水素水溶液を作成する工程と、前記過酸化水
素水溶液を200℃以下の温度で少なくとも乾燥するま
で放置する工程とを含むこと特徴とする結晶性金属酸
化物の形成方法である。
According to a first aspect of the present invention, there is provided a method for preparing a hydrogen peroxide aqueous solution of a metal oxide by adding a hydrogen peroxide solution to a metal oxide sol; which is a method for forming a crystalline metal oxide, which comprises a step of standing at least until dried at 200 ° C. or lower.

【手続補正2】[Procedure amendment 2]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0014[Correction target item name] 0014

【補正方法】変更[Correction method] Change

【補正内容】[Correction contents]

【0014】[0014]

【実施例】 酸化チタンの過酸化水素水溶液の作製 チタンテトライソプロポキシド(TIP)とイソプロパ
ノール(IPA)をモル比1:5で混合し、攪拌を行っ
た後、あらかじめ全組成比がTIP/IPA/水=1/
10/4となるように混合しておいた溶液を加え、27
8Kに保ち攪拌した。
EXAMPLES Preparation of Titanium Oxide Hydrogen Peroxide Aqueous Solution Titanium tetraisopropoxide (TIP) and isopropanol (IPA) were mixed at a molar ratio of 1: 5, and the mixture was stirred. / Water = 1 /
The solution mixed so as to be 10/4 was added, and 27
It was kept at 8K and stirred.

【手続補正3】[Procedure amendment 3]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0015[Correction target item name] 0015

【補正方法】変更[Correction method] Change

【補正内容】[Correction contents]

【0015】この白色懸濁液に対して吸引濾過を行い、
生成した微粒子を分離し、373Kで20時間の通気乾
燥を行った。この微粒子を31wt%過酸化水素水に入
れ、293Kの恒温槽中で攪拌して溶解させ、黄色透明
のゲル体を得た。これに、過酸化水素水を再添加し、酸
化チタン過酸化水素水溶液を得た。
The white suspension is subjected to suction filtration,
The generated fine particles were separated and subjected to aeration drying at 373K for 20 hours. The fine particles were placed in a 31 wt% aqueous hydrogen peroxide solution and stirred and dissolved in a 293 K constant temperature bath to obtain a yellow transparent gel. To this, hydrogen peroxide solution was added again to obtain a titanium oxide hydrogen peroxide aqueous solution.

【手続補正4】[Procedure amendment 4]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0018[Correction target item name] 0018

【補正方法】変更[Correction method] Change

【補正内容】[Correction contents]

【0018】(比較例)得られた酸化チタン過酸化水素
水溶液の一部を用い、773K,673K,573K
473Kにおいて1時間焼成した。
(Comparative Example) Using a part of the obtained aqueous solution of titanium oxide hydrogen peroxide, 773K , 673K , 573K ,
Fired at 473K for 1 hour.

【手続補正5】[Procedure amendment 5]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0020[Correction target item name] 0020

【補正方法】変更[Correction method] Change

【補正内容】[Correction contents]

【0020】これから、比較例では773K,67
,573Kで焼成したものにおいてピークが観測さ
れ、結晶化が起こっていることがわかるが、473K
はピークが観察されず、アモルファス状態であることが
わかる。一方、実施例では、いずれのサンプルの場合
も、高温で熱処理したものと同様に、アナタース結晶に
特有なピーク(2θ=25°,38°,48°)が観察
された。
[0020] Now, in the comparative example 77 3K, 67 3
A peak was observed in the product fired at K and 573K , indicating that crystallization had occurred. However, no peak was observed at 473K , indicating an amorphous state. On the other hand, in the examples, peaks (2θ = 25 °, 38 °, 48 °) unique to the anatase crystal were observed in each of the samples, similarly to those heat-treated at a high temperature.

【手続補正6】[Procedure amendment 6]

【補正対象書類名】図面[Document name to be amended] Drawing

【補正対象項目名】図6[Correction target item name] Fig. 6

【補正方法】変更[Correction method] Change

【補正内容】[Correction contents]

【図6】 FIG. 6

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 金属酸化物ゾルに過酸化水素水を加えて
該金属酸化物の過酸化水素水溶液を作成する工程と、 前記過酸化水素水溶液を200℃以下の温度で少なくと
も乾燥するまで放置する工程とを含むことを特徴とする
結晶性金属酸化物の形成方法。
1. A step of adding an aqueous solution of hydrogen peroxide to a metal oxide sol to form an aqueous solution of hydrogen peroxide of the metal oxide, and leaving the aqueous solution of hydrogen peroxide at a temperature of 200 ° C. or less until it is at least dried. And a method for forming a crystalline metal oxide.
【請求項2】 前記金属酸化物が酸化チタンであること
を特徴とする請求項1記載の結晶性の金属酸化物の形成
方法。
2. The method for forming a crystalline metal oxide according to claim 1, wherein said metal oxide is titanium oxide.
JP35193496A 1996-12-11 1996-12-11 Production of crystalline metal oxide Pending JPH10167728A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP35193496A JPH10167728A (en) 1996-12-11 1996-12-11 Production of crystalline metal oxide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP35193496A JPH10167728A (en) 1996-12-11 1996-12-11 Production of crystalline metal oxide

Publications (1)

Publication Number Publication Date
JPH10167728A true JPH10167728A (en) 1998-06-23

Family

ID=18420628

Family Applications (1)

Application Number Title Priority Date Filing Date
JP35193496A Pending JPH10167728A (en) 1996-12-11 1996-12-11 Production of crystalline metal oxide

Country Status (1)

Country Link
JP (1) JPH10167728A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001230069A (en) * 1999-12-08 2001-08-24 Nec Corp Organic el element and its manufacturing method
JP2004014529A (en) * 1999-12-08 2004-01-15 Nec Corp Organic el element
CN1329306C (en) * 2003-12-04 2007-08-01 株式会社三得科 Method of producing titania solution
JP2009107906A (en) * 2007-10-31 2009-05-21 Nagamune Sangyo Kk Method of producing metal compound-containing gel, metal compound-containing liquid, metal compound, and metal compound film

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001230069A (en) * 1999-12-08 2001-08-24 Nec Corp Organic el element and its manufacturing method
JP2004014529A (en) * 1999-12-08 2004-01-15 Nec Corp Organic el element
US6734624B2 (en) 1999-12-08 2004-05-11 Nec Corporation Organic electro-luminescence device and method for fabricating same
EP1107334A3 (en) * 1999-12-08 2005-07-20 Samsung SDI Co., Ltd. Organic electro-luminescence device and method for fabricating same
CN1329306C (en) * 2003-12-04 2007-08-01 株式会社三得科 Method of producing titania solution
JP2009107906A (en) * 2007-10-31 2009-05-21 Nagamune Sangyo Kk Method of producing metal compound-containing gel, metal compound-containing liquid, metal compound, and metal compound film

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