JPH10135537A - Pre-ionized electrode for tea discharge laser device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve the workability when a pre-ionized electrode is replaced. SOLUTION: Out of a plurality of pairs of pre-ionized electrodes 3a and 3b, a plurality of electrode pins 39 are provided on one side of the discharge surface side, and a long and narrow electrode, facing to at least two or more electrode pins 39, is provided on the other side. At least, the electrodes on either side consists of a plurality of electrode pins 39 which are integrally formed and attached to the above-mentioned coupling member, or the above- mentioned electrodes consists of a long and narrow insulating coupling member and a plurality of electrode pins 39 which are integrally formed and attached in the state in which the end part of the opposite side of the discharge surface passing through the above-mentioned coupling member and protruded to outside, and they are detachably attached to a laser chamber in an integrally formed state. At least, one or more pairs of pre-ionized electrodes 3a and 3b may be formed into a pre-ionized electrode block 30 on which a pair of opposing electrodes are detachably attached to an insulating member.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement in maintainability of a preionization electrode of a TEA discharge laser device.

[0002]

2. Description of the Related Art In a TEA discharge laser device, atoms in a medium gas (hereinafter, referred to as a laser gas) sealed in a laser chamber are excited by discharge between electrodes, and the excited laser gas atoms are changed to a ground state. Sometimes, a laser beam is generated. FIG. 6 shows such a TE
FIG. 6 shows an example of a configuration inside a laser chamber of the A discharge laser device, which will be described below with reference to FIG.

The laser chamber 1 can be divided to facilitate maintenance. For example, in the case of two divisions, the laser chamber 1 is composed of a lid part 5 to which discharge electrodes and the like are attached and a gas container 6. The lid 5 and the gas container 6 are connected by bolts or the like in a state where the lid 5 and the gas container 6 are sealed by a gas seal member. Inside the laser chamber 1, a pair of main discharge electrodes 2a, 2b for performing a main discharge for exciting a laser gas is provided.
The main discharge electrodes 2a and 2b each have an elongated shape in the optical axis direction. One main discharge electrode 2 a is attached to an insulator 9 provided on the lid 5 by a power supply terminal 8, and an upper portion of the power supply terminal 8 protrudes outside the laser chamber 1. The other main discharge electrode 2b
Is supported by a conductive support member 4, and the support member 4 is connected to a conductive connection member 13. The connecting member 13 is attached to the insulator 9 by the power supply terminal 7, and an upper portion of the power supply terminal 7 protrudes outside the laser chamber 1. A capacitor 17 for storing main discharge energy is connected between the upper part of the projecting power supply terminal 8 and the upper part of the power supply terminal 7.

Further, a plurality of pairs of preionization electrodes 3 for preionization of the laser gas are arranged on the sides of the main discharge space of the main discharge electrodes 2a and 2b. Each side of the plurality of pairs of preionization electrodes 3 includes a plurality of preionization electrodes 3a and 3b, and one side of each preionization electrode 3a is connected to the connecting member 13 at a predetermined interval along the longitudinal direction of the main discharge electrode 2a. Has been attached. Further, the front end of each pre-ionization electrode 3b on the other side is disposed so as to face each of the pre-ionization electrodes 3a, and the base end thereof is connected to the conductive earth bar 14 along the longitudinal direction of the main discharge electrode 2a. Are attached at predetermined intervals. Further, the earth bar 14 is attached to the lid 5. The lid 5 to which the earth bar 14 (that is, the preliminary ionization electrode 3b) is connected is made of a conductive member (for example, aluminum or the like), and the earth bar 14 and the power supply terminal 8 are respectively connected to the earth terminal of the discharge circuit. And a pulse switch output terminal.

In the laser chamber 1, a cross flow fan 11 for circulating a laser gas and a radiator 12 for cooling a laser gas heated by electric discharge are provided.
Is provided. The laser gas flows into the main discharge space between the main discharge electrodes 2 a and 2 b by the cross flow fan 11, is cooled through the inside of the radiator 12, returns to the cross flow fan 11 and returns.

FIG. 7 shows an example of a discharge circuit according to the present embodiment, in which main discharge electrodes 2a and 2b and each preliminary ionization electrode 3 are connected.
a and 3b are shown. A high voltage power supply output terminal HV for supplying high voltage energy is connected in parallel to an input terminal of the pulse switch 16 and one terminal of a capacitor 19 via a resistor 18. The output terminal of the pulse switch 16 is connected to one terminal of the capacitor 17 and the main discharge electrode 2a via the power supply terminal 8.
The other terminal 7 and the main discharge electrode 2b are connected in parallel to each preliminary ionization electrode 3a via the power supply terminal 7 and the connecting member 13. Further, each preliminary ionization electrode 3b and the capacitor 19
Other terminals are connected in parallel to a ground terminal. In addition,
Each of the capacitors 17 and 19 may be configured by connecting a plurality of capacitors in parallel.

FIG. 8 is a perspective view showing an example of the arrangement of the preliminary ionization electrodes 3a and 3b, which will be described in detail below with reference to FIG. In order to uniformly pre-ionize the laser gas in the main discharge space between the main discharge electrodes 2a and 2b, a plurality of pairs of pre-ionization electrodes 3a and 3b connected in parallel in a circuit form
a, 2b are disposed at predetermined intervals along the longitudinal direction, left and right in the longitudinal direction. Each preliminary ionization electrode 3
a is connected to the left and right connecting members 13 and to each of the preliminary ionization electrodes 3b.
Are detachably attached to the left and right earth bars 14 by, for example, screws. The gap L in the discharge space between each pair of preliminary ionization electrodes 3a and 3b is adjusted to be substantially equal to each other, and to be substantially at the center of the gap in the main discharge space, so that the preionization is uniformly performed. Is being done.

[0008]

The preliminary ionizing electrodes 3a, 3a
Since b is worn due to repeated discharge for preliminary ionization, it needs to be periodically replaced according to the number of laser oscillations (operating time). However, there is a problem that the replacement operation takes a long time. That is, the replacement of the preliminary ionization electrodes 3a and 3b is performed according to the following operation procedure. First, the lid 5 is separated from the gas container 6 and removed from the laser chamber 1. And each preliminary ionization electrode 3a
Each pre-ionization electrode 3a is detached from the connecting member 13 by loosening the screw attached thereto, and each pre-ionization electrode 3b is detached from the earth bar 14 by loosening the individual screw for each pre-ionization electrode 3b. Thereafter, new preionization electrodes 3a, 3a
When attaching b, a new preliminary ionization electrode 3a is attached to the connecting member 13, and a new preliminary ionization electrode 3b is attached to the earth bar 14, respectively. As described above, since the individual preliminary ionization electrodes 3a and 3b must be removed and attached, there is a problem that the replacement operation takes time.

The adjustment of the gap L between the preliminary ionization electrodes 3a and 3b must be performed in a state where the gap L is attached to the lid 5 as described above. However, since the gaps L must be adjusted to be substantially equal, the adjustment work after the replacement of the preionization electrode also requires a long time.
As a result, there arises a problem that the actual operation rate of the laser device is reduced.

The present invention has been made in view of the above problems, and has as its object to provide a preliminary ionization electrode of a TEA discharge laser device capable of improving the workability when replacing the preliminary ionization electrode.

[0011]

Means for Solving the Problems, Functions and Effects In order to achieve the above object, the invention according to claim 1 is provided with a plurality of pairs disposed in a laser chamber 1 in which a laser gas is sealed.
A pre-ionization electrode for pre-ionizing the laser gas in a main discharge space between the pair of main discharge electrodes provided in the laser chamber by the discharge energy between the pair; In a preliminary ionization electrode of a TEA discharge laser device that excites the pre-ionized laser gas by generating a high-voltage discharge therebetween to generate laser light, a plurality of electrode pins 39 are provided on a discharge surface side among a plurality of pairs. The configuration includes one electrode and an elongated electrode on the other side having a discharge surface at a position facing the discharge surface of at least two or more of the electrode pins 39 of the one electrode.

According to the first aspect of the present invention, one of the plurality of pairs of the preionization electrodes has a plurality of electrode pins at the tip, and the other electrode has the one side. Of the electrodes are at least two or more of the above-mentioned electrode pins. When replacing the pre-ionization electrode, instead of detaching the plurality of electrode pins, it is only necessary to detach and attach the elongated electrode, so that the time required for detachment of the pre-ionization electrode can be reduced as compared with the conventional detachment time. it can. Therefore, workability at the time of replacement of the preionization electrode can be significantly improved.

According to a second aspect of the present invention, a plurality of pairs are disposed in a laser chamber 1 in which a laser gas is sealed, and the plurality of pairs are disposed in the laser chamber 1 by discharge energy between the pairs. A pre-ionization electrode for pre-ionizing the laser gas in a main discharge space between a pair of main discharge electrodes, wherein the pre-ionized laser gas is excited by high voltage discharge between the main discharge electrodes to generate a laser beam; In the pre-ionization electrode of the TEA discharge laser device to be generated, the pre-ionization electrodes 3a and 3b on at least one side of the plurality of pairs are provided with an elongated conductive coupling member 45,
A plurality of electrode pins 39 are provided at predetermined intervals along the longitudinal direction of the coupling member 45, and the opposite end of the discharge surface is integrally formed with and attached to the coupling member 45. , Is configured to be detachably attached to the laser chamber 1 in an integrally formed state.

According to the second aspect of the present invention, at least one electrode of the plurality of pairs of the preionization electrodes is
Opposite sides of the discharge surfaces of the plurality of electrode pins are attached to an elongated conductive coupling member and are integrally formed, and are detachably attached to the laser chamber in this integrally formed state. Power is supplied to the integrally formed preliminary ionization electrode via the coupling member. At this time, when replacing the preliminary ionization electrode, it is only necessary to detach and attach the integrally formed preliminary ionization electrode instead of detaching and attaching a plurality of electrode pins. Therefore, the time required for attaching and detaching the preionization electrode is reduced as compared with the conventional attaching and detaching time for each electrode pin. As a result, workability at the time of replacement of the preionization electrode can be significantly improved.

According to a third aspect of the present invention, a plurality of pairs are provided in the laser chamber 1 in which a laser gas is sealed, and the plurality of pairs are provided in the laser chamber 1 by discharge energy between the pairs. A pre-ionization electrode for pre-ionizing the laser gas in a main discharge space between a pair of main discharge electrodes, wherein the pre-ionized laser gas is excited by high voltage discharge between the main discharge electrodes to generate a laser beam; In the pre-ionization electrode of the TEA discharge laser device to be generated, at least one of the plurality of pairs of pre-ionization electrodes 3a and 3b includes a coupling member 46 formed of an elongated insulator and a longitudinal portion of the coupling member 46. Are formed at predetermined intervals along the direction, and are formed integrally with the opposite end of the discharge surface penetrating the coupling member 46 and protruding outside the coupling member 46. A plurality of electrode pins 39 which are attached Te
And is configured to be detachably attached to the laser chamber 1 in an integrally formed state.

According to the third aspect of the present invention, at least one of the plurality of pairs of the preionization electrodes is provided with:
The end faces of the plurality of electrode pins opposite to the discharge surfaces are attached and integrally formed so as to protrude outside through a coupling member formed of an elongated insulator, and are integrally formed. It is detachably attached to the chamber. Power is supplied to the integrally formed preliminary ionization electrode via an end face of an electrode pin protruding outside the coupling member. At this time, when replacing the preliminary ionization electrode, it is only necessary to detach and attach the integrally formed preliminary ionization electrode instead of detaching and attaching a plurality of electrode pins. Therefore, the time required for desorption of the preliminary ionization electrode is reduced as compared with the conventional desorption time. As a result, workability at the time of replacement of the preionization electrode can be significantly improved.

According to a fourth aspect of the present invention, in the preliminary ionization electrode of the TEA discharge laser device according to the first, second or third aspect, at least one or more of the plural pairs of the preliminary ionization electrodes 3 are provided. The preionization electrode 3 is attached to and integrated with the insulating member 31 at a predetermined distance from the discharge surface gap of the pair of electrodes facing each other, and is detachably attached to the laser chamber 1 in this integrated state. The preliminary ionization electrode block 30 is attached.

According to the fourth aspect of the present invention, at least one or more pairs of the preionization electrodes among the plurality of pairs of the preionization electrodes are constituted by the preionization electrode blocks. In this preionization electrode block, opposing electrode pairs are attached to an insulating member to be integrated, and in this integrated state, detachably attached to the laser chamber. Then, a spare ionization electrode block for replacement is prepared in advance, and a discharge surface gap between the pair of electrodes facing the replacement ionization electrode block for replacement is
Before mounting to the laser chamber, it is adjusted to a predetermined distance in advance. When the pre-ionization electrode is worn, each pre-ionization electrode block is replaced with one for which the above-mentioned discharge surface gap adjustment has been completed. This eliminates the need to adjust the gap after the replacement, thereby reducing the working time after the replacement. In addition, since replacement is performed for each preionization electrode block, the time required for detachment is reduced as compared with the conventional detachment time for each electrode pin. As a result, workability at the time of replacement of the preionization electrode can be significantly improved.

[0019]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a preliminary ionization electrode showing the first embodiment. In the present embodiment, an example is shown in which the preionization electrode on one side of the plurality of pairs of preionization electrodes 3 is formed in an elongated rod shape. FIG. 1 shows an example in which the preliminary ionization electrode 3a is formed by one elongated rod-shaped metal plate, but is not limited thereto, and the preliminary ionization electrode 3b is formed by an elongated rod-shaped metal plate. You may. The discharge surface of the preliminary ionization electrode 3a (3b) formed of this metal plate smoothly projects toward the other opposing preliminary ionization electrode 3b (3a). The other preionization electrode 3b (3a) includes a plurality of electrode pins 39, and the discharge surface of each electrode pin 39 is disposed so as to face the discharge surface of the preionization electrode 3a (3b). The preliminary ionization electrode 3b (3a) including one rod-like preliminary ionization electrode 3a (3b) and a plurality of electrode pins 39.
Thus, a plurality of pairs of preliminary ionization electrodes 3 are formed.
The power supply to the rod-shaped preliminary ionization electrodes 3a (3b) is performed via the connecting member 13 (earth bar 14). (See Fig. 6)

As described above, the electrode on any one side of the plurality of pairs of the preionization electrodes 3, for example, the preionization electrodes 3a (3b) is constituted by one elongated rod-shaped metal plate. 3a (3b) is connected to the connecting member 13 (earth bar 1).
The work time for removing or attaching to 4) can be greatly reduced as compared with the conventional case. Therefore, workability at the time of replacing the preliminary ionization electrode 3 is improved.

In this embodiment, all of the preionization electrodes 3a (3b) on either side are formed of one rod-shaped metal plate, but the present invention is not limited to this. The rod-shaped metal plate described above may be used.

Next, a second embodiment will be described with reference to FIG. The present embodiment shows an example in which at least one of the plurality of pairs of preionization electrodes 3 is integrated and made detachable. FIG. 2 shows an example of the integrated preionization electrode 3a. However, the present invention is not limited to this, and the preionization electrode 3b may be integrated. In the figure, the preliminary ionization electrode 3a is formed by integrating a plurality of electrode pins 39 and a conductive coupling member 45, and a plurality of the plurality of electrode pins 39 are formed on the elongated plate-shaped coupling member 45 at predetermined intervals along the longitudinal direction. The opposite side of the discharge surface of the electrode pin 39 is attached. A screw hole 4 is provided at a predetermined position of the coupling member 45.
7 is provided, and by inserting a screw or the like into the screw hole 47, the integrated preliminary ionization electrode 3a
(3b) is attached to the connecting member 13 (earth bar 14). (See FIG. 6) The plurality of electrode pins 39
The method of integrating the coupling member 45 with the coupling member 45 may be, for example, attachment and integration by general welding, brazing, or the like, or may be performed by press working with a mold and integrated.

The pre-ionization electrode 3 integrated as described above
According to a (3b), the operation time for detaching or attaching the preliminary ionization electrode 3a (3b) to or from the connecting member 13 (earth bar 14) can be greatly reduced as compared with the related art. At this time, the preliminary ionizing electrode 3
Since the attachment and detachment of a (3b) can be performed only from the inside of the laser chamber 1, the work is easy. Therefore, workability at the time of replacing the preliminary ionization electrode 3 is improved.

The connecting member 45 described above may be configured to also serve as the connecting member 13 and / or the earth bar 14. That is, the integrated preliminary ionization electrode 3
a, the connecting member 13 and the plurality of electrode pins 39
The work of attaching the connecting member 45 to the connecting member 13 can be omitted by integrating the above. Similarly,
In the case of forming the integrated preliminary ionization electrode 3b, the work of attaching the coupling member 45 to the earth bar 14 can be omitted by integrating the earth bar 14 and the plurality of electrode pins 39. As a result, workability at the time of replacing the preliminary ionization electrode 3 is improved.

In this embodiment, at least one of the preionization electrodes 3a (3b) on one side is integrated, but the present invention is not limited to this. For example, all of the preionization electrodes on one side are connected at least. Divided into two or more electrode pins,
Each may be integrated.

Next, a third embodiment will be described with reference to FIG. In the present embodiment, as in the second embodiment, at least one of the plurality of pairs of preionization electrodes 3 is integrated so as to be detachable, and each electrode pin 39 is made of an insulator. 1 shows an example formed integrally.
FIG. 3 shows an example of the integrated preionization electrode 3a, but the present invention is not limited to this, and the preionization electrode 3b may be integrated. In the figure, the preionization electrode 3a is composed of a plurality of electrode pins 39 and a coupling member 46 formed of an insulator.
Are formed integrally with each other, and a plurality of electrode pins 3 are attached to the elongated plate-shaped coupling member 46 at predetermined intervals along the longitudinal direction.
9 are provided. The opposite side of the electrode pin 39 from the discharge surface protrudes through the coupling member 46. And
A screw hole 47 is provided at a predetermined position of the coupling member 46. By inserting a screw or the like into the screw hole 47,
The integrated preliminary ionization electrodes 3a (3b) are attached to the connecting member 13 (earth bar 14). At this time, the end face 48 of the electrode pin 39 protruding from the connecting member 46 on the side opposite to the discharge surface is connected to the connecting member 13 or the earth bar 14.
, And the power is supplied through the end face 48.

The integrated preionization electrode 3 integrated as described above
According to a (3b), the operation time for detaching or attaching the preliminary ionization electrode 3a (3b) to or from the connecting member 13 (earth bar 14) can be greatly reduced as compared with the related art. At this time, the preliminary ionizing electrode 3
Since the attachment and detachment of a (3b) can be performed only from the inside of the laser chamber 1, the work is easy. Therefore, workability at the time of replacing the preliminary ionization electrode 3 is improved.

In this embodiment, at least one of the preionization electrodes 3a (3b) on at least one side is integrated. However, the present invention is not limited to this. For example, all the preionization electrodes on one side may be integrated. At least two or more electrode pins may be divided and integrated.

Next, a fourth embodiment will be described. FIG. 4 is a cross-sectional view of a laser chamber provided with a preliminary ionization electrode according to the present embodiment.
The same reference numerals are given to the same components. FIG.
, The laser chamber 1 is configured to be dividable, and includes a lid 5 and a gas container 6. One main discharge electrode 2a is attached to an insulator 9 provided inside the lid 5 by a power supply terminal 8, and an upper portion of the power supply terminal 8 is connected to a conductive power supply member 8a provided outside the lid 5. It is connected. The other main discharge electrode 2b is attached to the upper surface of a conductive electrode holder plate 22 with screws or the like, and the electrode holder plate 22 has an electrode hole 28 penetrating from the upper surface to the lower surface at a substantially central portion. Conductive electrode mounting plate 2 provided
1 is detachably attached from below with screws or the like.
At this time, the electrode holder plate 22 is attached to the electrode mounting plate 21 so that the main discharge electrode 2b passes through the electrode hole 28 and is disposed above the electrode mounting plate 21. Further, the electrode mounting plate 21 is connected to the connecting member 13 via the conductive support member 4.

The connecting member 13 is connected to the main discharge electrode 2a.
The power supply terminal 7 is attached to the insulator 9 to the left and right in the longitudinal direction and along the longitudinal direction, and the upper part of the power supply terminal 7 projects outside the lid 5. Then, between the power supply terminal 8 (that is, the power supply member 8a) and the power supply terminal 7,
A capacitor 17 for storing main discharge energy is connected.

A preionization electrode block 30 in which a plurality of pairs of preionization electrodes 3a and 3b are integrated is disposed on the left and right sides of the main discharge space of the main discharge electrodes 2a and 2b. That is, the preliminary ionization electrode block 30
a, each preionization electrode 3b, the earth bar 14, and the insulating member 31 are integrally formed. The preionization electrode 3a side of the preionization electrode block 30 is connected to the connecting member 1
The ground bar 14 is detachably attached to the cover 5 with screws or the like. Then, as described above, the lid 5 made of a conductive member is connected to the ground terminal of the discharge circuit.

FIG. 5 is a perspective view showing the details of the preionization electrode block 30, which will be described below with reference to FIG. In the present embodiment, one of the plurality of pairs of the preionization electrodes 3 is formed of an elongated conductive electrode plate, and the cross-sectional shape of the electrode plate orthogonal to the longitudinal direction is L-shaped. Has made. One end surface of the L-shape is used as a discharge surface of the preliminary ionization electrode. The preliminary ionization electrode 3a is connected to the insulating member 3 so that the discharge surface faces downward and is located on the side of the insulating member 31 facing the main discharge space.
It is attached to the upper part of the unit 1 by screws 32 along the longitudinal direction. The screw 32 is inserted into the counterbore hole 35 of the insulating member 31 so as to be detachable from the direction of the insulating member 31 (that is, from below in the figure), and attaches the preliminary ionization electrode 3a.

The other side pre-ionization electrode 3b is composed of a plurality of electrode pins 39, and the base end of each electrode pin 39 is attached to the earth bar 14 at predetermined intervals along the longitudinal direction by screws 38. ing. The earth bar 14 is attached to the upper side of the insulating member 31 and on the side opposite to the preliminary ionization electrode 3a by screws 34 along the longitudinal direction. The screw 34 is detachable from the direction of the insulating member 31 (that is, from below in the figure) so that the insulating member 3
The earth bar 14 is inserted into the counterbore hole 37 of the vehicle. Further, each electrode pin 39 is disposed along the outer periphery of the insulating member 31 from the side of the insulating member 31 opposite to the main discharge space to the side of the preliminary ionization electrode 3a via the lower surface. At this time, the discharge surface at the tip of each electrode pin 39 is arranged at a position facing the discharge surface of the preliminary ionization electrode 3a. In this state, a plurality of pairs of the preliminary ionization electrodes 3a, 3b Is formed.

As described above, a plurality of pairs of preliminary ionizing electrodes 3
a, 3b and the earth bar 14 are attached to the insulating member 31 to form the integrated preliminary ionization electrode block 30. The preionization electrode block 30 is attached to the connecting member 13 by screws 33, and the lid 5 is
Attached to. The screw 33 is detachable from the direction of the insulating member 31 (that is, from below in the drawing).
The earth bar 1 is inserted into the counterbore hole 36 of the insulating member 31.
4 is attached.

The operation of the pre-ionization electrode block 30 having the above configuration will be described. First, a pre-ionization electrode block 30 for maintenance is prepared, and the pre-ionization electrode block 3 is used.
Adjustment of the gap between the zero pre-ionization electrodes 3a and 3b is completed by itself in advance. Thereafter, when the preliminary ionization electrodes 3a and 3b are worn, it is only necessary to replace the used preliminary ionization electrode block 30 with the adjusted new preliminary ionization electrode block 30. Thereby, after replacement, the preliminary ionization electrode 3
There is no need to adjust the gap between a and 3b, and the adjustment time can be saved. In addition, the preliminary ionization electrode block 30
Since the entirety is replaced, there is no need to individually remove or attach each electrode pin and the like, and the work time for replacement is reduced. As a result, workability at the time of replacement of the preionization electrode can be greatly improved.

In the preliminary ionization electrode block 30 described above, of the plurality of pairs of preliminary ionization electrodes 3a and 3b, the preliminary ionization electrode 3b side is composed of a plurality of electrode pins, and the preliminary ionization electrode 3a side is a flat surface. It is composed of an elongated rod-shaped member having a discharge surface, but is not limited to this. That is,
At least one of the pre-ionization electrode 3a side and the pre-ionization electrode 3b side may be constituted by a plurality of electrode pins 39, an elongated rod-shaped electrode as described in the previous embodiment, or the coupling members 45 and 46. And a plurality of electrode pins 39 integrally formed, or a combination of these electrodes.

In this embodiment, all of the preionization electrodes 3a and 3b arranged on the left or right side of the main discharge electrode 2a are integrated by the preionization electrode block 30, but the invention is not limited to this. For example, at least two pairs or more of the preliminary ionization electrodes 3a and 3b may be divided and integrated as the preliminary ionization electrode block 30.

The discharge circuit is not limited to the one described in the above embodiment, but may be another circuit, for example, a series circuit of a plurality of pairs of preliminary ionization electrodes 3a and 3b and a capacitor 17 is connected to the main discharge electrodes 2a and 2b. Circuits connected in parallel may be used.
Also in this circuit, the preliminary ionization electrode block 30 as described above can be configured, and the operation and effect in this case do not change.

[Brief description of the drawings]

FIG. 1 shows an example of a preliminary ionization electrode of a first embodiment according to the present invention.

FIG. 2 shows an example of a preionization electrode of a second embodiment according to the present invention.

FIG. 3 shows an example of a preionization electrode of a third embodiment according to the present invention.

FIG. 4 shows a sectional view of a laser chamber provided with a preionization electrode according to the present invention.

FIG. 5 is a perspective view showing details of a preliminary ionization electrode block according to the present invention.

FIG. 6 shows a configuration diagram of the inside of a laser chamber according to a conventional technique.

FIG. 7 shows an example of a discharge circuit diagram of a TEA discharge laser device.

FIG. 8 is a perspective view illustrating an arrangement example of a preliminary ionization electrode according to the related art.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Laser chamber, 2a, 2b ... Main discharge electrode, 3 ... Preionization electrode pair, 3a, 3b ... Preionization electrode, 4 ... Support member, 5 ... Lid, 6 ... Gas container, 7, 8 ... Power supply terminal, 8a
... power supply member, 9 ... insulator, 11 ... cross flow fan,
12 radiator, 13 connecting member, 14 earth bar, 15 gas seal member, 16 pulse switch, 1
7, 19: condenser, 18: resistor, 21: electrode mounting plate, 22: electrode holder plate, 23: butting portion, 24,
32, 33, 34, 38, 41: screw, 25: knock pin, 28: electrode hole, 30: preliminary ionization electrode block, 31
... insulating member, 35, 36, 37 ... counterbore hole, 39 ... electrode pin, 45, 46 ... coupling member, 47 ... screw hole, 48 ... end face.

Claims (4)

[Claims] 1. A laser chamber filled with a laser gas.
The laser gas in the main discharge space between the pair of main discharge electrodes disposed in the laser chamber (1) is pre-ionized by a plurality of pairs disposed in (1) and discharge energy between the pairs. A preliminary ionization electrode of a TEA discharge laser device for generating a laser beam by exciting the preliminary ionized laser gas by performing high voltage discharge between the main discharge electrodes. One of a plurality of pairs of electrodes having a plurality of electrode pins (39) on one side, and at least two or more of the electrode pins (3
9) A preliminary ionization electrode of a TEA discharge laser device, comprising: a discharge surface at a position facing the discharge surface of 9); and an elongated electrode on the other side. 2. A laser chamber filled with a laser gas.
The laser gas in the main discharge space between the pair of main discharge electrodes disposed in the laser chamber (1) is pre-ionized by a plurality of pairs disposed in (1) and discharge energy between the pairs. A preliminary ionizing electrode of a TEA discharge laser device, wherein the preliminary ionizing laser gas is excited by high-voltage discharge between the main discharge electrodes to generate laser light. The preionization electrodes (3a) and (3b) on at least one side of the pair are provided with a long and thin conductive coupling member (45) and at predetermined intervals along the longitudinal direction of the coupling member (45). And a plurality of electrode pins (39) integrally formed and attached to the coupling member (45) at the opposite end of the discharge surface, and the laser chamber (1) is integrally formed. ), The TEA discharge laser device being detachably attached to the Pre-ionization electrode. 3. A laser chamber filled with a laser gas.
The laser gas in the main discharge space between the pair of main discharge electrodes disposed in the laser chamber (1) is pre-ionized by a plurality of pairs disposed in (1) and discharge energy between the pairs. A preliminary ionizing electrode of a TEA discharge laser device, wherein the preliminary ionizing laser gas is excited by high-voltage discharge between the main discharge electrodes to generate laser light. The preliminary ionization electrodes (3a) and (3b) on at least one side of the pair are provided with a coupling member (46) formed of an elongated insulator and a predetermined distance along the longitudinal direction of the coupling member (46). And a plurality of integrally formed and attached with the end opposite to the discharge surface protruding outside the coupling member (46) through the coupling member (46). Laser chamber (1) consisting of electrode pins (39) and integrally formed Preionization electrode of TEA discharge laser device characterized in that it is removably attached. 4. At least one or more pairs of the preionization electrodes (3) of the plurality of pairs of preionization electrodes (3) are separated by a predetermined distance from the discharge surface gap of the opposing pair of electrodes. A pre-ionization electrode block (30) attached to and integrated with the laser chamber (1) in this integrated state so as to be detachably attached to the laser chamber (1). 4. A preliminary ionization electrode of the TEA discharge laser device according to 2 or 3.