JPH10132782A - Gas-detecting apparatus - Google Patents

Gas-detecting apparatus

Info

Publication number
JPH10132782A
JPH10132782A JP8307386A JP30738696A JPH10132782A JP H10132782 A JPH10132782 A JP H10132782A JP 8307386 A JP8307386 A JP 8307386A JP 30738696 A JP30738696 A JP 30738696A JP H10132782 A JPH10132782 A JP H10132782A
Authority
JP
Japan
Prior art keywords
gas
electrode
oxygen
hollow portion
hollow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8307386A
Other languages
Japanese (ja)
Other versions
JP3675997B2 (en
Inventor
Keigo Mizutani
圭吾 水谷
Hisayoshi Ota
久喜 太田
Yoshimasa Hijikata
啓暢 土方
Tasuke Makino
太輔 牧野
Kanehito Nakamura
兼仁 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Soken Inc
Original Assignee
Denso Corp
Nippon Soken Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp, Nippon Soken Inc filed Critical Denso Corp
Priority to JP30738696A priority Critical patent/JP3675997B2/en
Publication of JPH10132782A publication Critical patent/JPH10132782A/en
Application granted granted Critical
Publication of JP3675997B2 publication Critical patent/JP3675997B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Measuring Oxygen Concentration In Cells (AREA)

Abstract

PROBLEM TO BE SOLVED: To detect the concentration of nitrogen oxide in a gas to be measured with a simple constitution accurately with good response without being influenced by the concentration of oxygen. SOLUTION: In an oxygen sensor part 51, an electrode 511 on the inner side of a hollow part 3, to which a gas to be measured is introduced via a measurement gas introduction path 2, is formed near an opening 2a of the introduction path 2. A component gas detection part 6 has an electrode 61 on the side of the hollow part 3 formed at a position separated from the opening 2a more than the electrode 511 of the oxygen sensor part 51. The electrode 61 is overlapped with an electrode 522 of an oxygen pump part 52. In the constitution, in quick response to a change of an oxygen concentration of the gas to be measured which is introduced into the hollow part 3, the oxygen is supplied or discharged by the oxygen pump part 52 in the vicinity of the electrode 61 of the component gas detection part 6. Therefore, the oxygen concentration can be maintained constant without the oxygen separated by the gas to be measured in the vicinity of the electrode 61.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明はガス検出装置に関
し、例えば内燃機関の排気管に配設されて内燃機関から
排出される排気ガスに含まれる成分ガスの濃度検出に適
用されるガス検出装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gas detection device, and more particularly to a gas detection device which is disposed in an exhaust pipe of an internal combustion engine and is used for detecting the concentration of a component gas contained in exhaust gas discharged from the internal combustion engine. .

【0002】[0002]

【従来の技術】車両等の内燃機関では、排気エミッショ
ンを改善するため、例えば混合気の空気燃料比が理論空
気燃料比になるように燃料の噴射量等をフィードバック
制御した後、内燃機関から排出される排気ガス中の排気
エミッションを三元触媒コンバータにより除去するよう
にした排気エミッション抑制技術が採用されている。近
年、排気エミッションの規制が強化され、米国では既に
自己診断規制(略称OBD−II)が開始し、三元触媒コ
ンバータ等の排気エミッション抑制関連部品の故障を検
知してドライバーに認識させることが義務付けられ、ド
ライバーも故障した排気エミッション抑制関連部品の修
理が義務付けられるようになった。
2. Description of the Related Art In an internal combustion engine of a vehicle or the like, in order to improve exhaust emission, for example, a fuel injection amount or the like is feedback-controlled so that an air-fuel ratio of a mixture becomes a stoichiometric air-fuel ratio. An exhaust emission control technology is adopted in which exhaust emissions in the exhaust gas to be removed are removed by a three-way catalytic converter. In recent years, regulations on exhaust emissions have been tightened, and self-diagnosis regulations (abbreviated as OBD-II) have already begun in the United States, obliging drivers to detect failures in exhaust emission control-related components, such as three-way catalytic converters, so that drivers can recognize them. As a result, drivers are now obliged to repair broken exhaust emission control-related parts.

【0003】三元触媒コンバータの劣化診断技術として
は、排気管の三元触媒コンバータの上流および下流にそ
れぞれ酸素濃度センサを設けたいわゆる2O2 センサシ
ステムが知られている。しかしながら排気ガス規制の強
化が上記OBD−IIのLEV(Low Emission Vehic
le)からULEV(Ultra Low Emission Vehicl
e)へと進むと、2つの酸素濃度センサの信号差から間
接的に浄化率を検知する2O2 センサシステムでは検出
精度が不十分である。そこで窒素酸化物(NOx)等の
排気エミッション成分を直接検出するガス検出装置の必
要性が高まっている。
As a technique for diagnosing deterioration of a three-way catalytic converter, a so-called 2O 2 sensor system in which an oxygen concentration sensor is provided upstream and downstream of a three-way catalytic converter in an exhaust pipe is known. However, the tightening of exhaust gas regulations has led to the above-mentioned OBD-II LEV (Low Emission Vehicle).
le) to ULEV (Ultra Low Emission Vehicl)
Proceeding to e), the detection accuracy is insufficient with the 2O 2 sensor system that indirectly detects the purification rate from the signal difference between the two oxygen concentration sensors. Therefore, there is an increasing need for a gas detection device that directly detects exhaust emission components such as nitrogen oxides (NOx).

【0004】上記排気エミッション等、検出対象である
成分ガスを直接検出するガス検出装置としては、酸素イ
オン導電性の固体電解質材の両面に被測定ガスに曝露す
る電極と基準の酸素濃度の基準ガスに曝露する電極とを
形成し電極間に発生する起電力等の変化を利用する固体
電解質式ガス検出装置が種々、提案されている。これら
はNOx を触媒等により分解して被測定ガスのNOx 濃
度を酸素濃度として検出するもので、NOx を酸素に分
解して検出するため、被測定ガス中の酸素に対する選択
性がなく、被測定ガスの酸素濃度を一定に保つ必要があ
る。
As a gas detecting device for directly detecting a component gas to be detected, such as the above-mentioned exhaust emission, an electrode exposed to a gas to be measured and a reference gas having a standard oxygen concentration are provided on both surfaces of an oxygen ion conductive solid electrolyte material. There have been proposed various solid electrolyte type gas detection devices that form an electrode that is exposed to a gas and uses a change in an electromotive force or the like generated between the electrodes. In these methods, NOx is decomposed by a catalyst or the like and the NOx concentration of the gas to be measured is detected as oxygen concentration.Since NOx is decomposed into oxygen and detected, there is no selectivity for oxygen in the gas to be measured, and It is necessary to keep the oxygen concentration of the gas constant.

【0005】かかる固体電解質式ガス検出装置として、
Society of Automotive Eng
ineers(以下、SAEという)960334号記
載の厚膜Zr O2 NOx センサがある。この厚膜ZrO
2 NOx センサでは被測定ガスが導入される第1室に酸
素センサが設けられ、これにより検出される酸素濃度が
所定値となるように第1室内の酸素を排出する第1のポ
ンプセルが設けられている。第1室と拡散抵抗路を介し
て連通する第2室には室内の酸素を排出する第2のポン
プセルが設けられ、その室内側の電極はNOx に対して
還元活性を有している。第1室内の酸度濃度は第1室に
設けた酸素センサにより検出され、第1のポンプセルの
駆動電圧にフィードバックされて一定に保たれるから、
第2室へ拡散する被測定ガスの酸素濃度は一定である。
第2室ではNOx の分解により新たに酸素が生成し、第
2のポンプセルのポンプ電流がNOx 濃度に応じて増減
する。ポンプ電流の増減を測定することでNOx 濃度を
検出している。
[0005] As such a solid electrolyte type gas detector,
Society of Automobile Eng
There is a thick-film ZrO 2 NOx sensor described in US Pat. This thick film ZrO
2 In the NOx sensor, an oxygen sensor is provided in the first chamber into which the gas to be measured is introduced, and a first pump cell for discharging oxygen from the first chamber is provided so that the oxygen concentration detected by the sensor becomes a predetermined value. ing. A second pump cell for discharging oxygen in the chamber is provided in the second chamber communicating with the first chamber via the diffusion resistance path, and the electrode on the indoor side has a reducing activity for NOx. Since the acidity concentration in the first chamber is detected by the oxygen sensor provided in the first chamber and fed back to the driving voltage of the first pump cell and kept constant,
The oxygen concentration of the gas to be measured diffused into the second chamber is constant.
In the second chamber, oxygen is newly generated by the decomposition of NOx, and the pump current of the second pump cell increases and decreases according to the NOx concentration. The NOx concentration is detected by measuring the increase or decrease of the pump current.

【0006】[0006]

【発明が解決しようとする課題】しかしながら上記SA
E960334号記載の厚膜Zr O2 NOx センサで
は、第2室に拡散する被測定ガスの酸素濃度を一定にす
るため第1室と第2室とを分離する拡散抵抗路が設けら
れているから、構造が複雑な上に応答性や検出利得も十
分ではない。単純に拡散抵抗路を取り除けば流出入する
酸素により第2のポンプセルの電極近傍における酸素濃
度が変動し、検出誤差が生じるという問題がある。
However, the above SA
In the thick film ZrO 2 NOx sensor described in E960334, a diffusion resistance path separating the first chamber and the second chamber is provided in order to keep the oxygen concentration of the gas to be measured diffused into the second chamber constant. However, the structure is complicated and the response and detection gain are not sufficient. If the diffusion resistance path is simply removed, there is a problem that the oxygen concentration near the electrode of the second pump cell fluctuates due to the oxygen flowing in and out, and a detection error occurs.

【0007】そこで本発明では簡単な構成で、高い応答
性と高い検出利得とが得られ、しかも検出精度のよいガ
ス検出装置を提供することを目的とする。
Accordingly, an object of the present invention is to provide a gas detection device which can obtain high responsiveness and high detection gain with a simple configuration and also has high detection accuracy.

【0008】[0008]

【課題を解決するための手段】請求項1記載の発明で
は、被測定ガスが拡散抵抗を有する被測定ガス導入路を
介して導入される中空部内の酸素濃度を制御すべく以下
の構成を具備せしめる。酸素イオン導電性の固体電解質
材の相対向する両面に一対の電極を形成した酸素センサ
部と酸素ポンプ部とを設ける。酸素センサ部は一方の電
極が中空部内に面し、他方の電極が中空部外の基準ガス
に曝露するように形成する。酸素ポンプ部は、一方の電
極が中空部外の被測定ガスに曝露し、他方の電極が中空
部内に面するように形成して固体電解質材にポンプ電流
を流すようにする。酸素センサ部により検出される酸素
濃度に基づいて酸素ポンプ部のポンプ電流をフィードバ
ック制御する酸素ポンプ制御手段とを設ける。中空部内
における被測定ガス中の検出対象である窒素酸化物を分
解して酸素を生成せしめNOx 濃度を酸素濃度として検
出すべく、酸素イオン導電性の固体電解質材の相対向す
る両面に一対の電極を形成した成分ガス検出部を設け
る。その一対の電極は中空部内側の電極をNOxに対し
て還元活性を有する電極とする。他方の電極は基準酸素
濃度の基準ガスに曝露するように形成する。成分ガス検
出部の電極間の出力信号を検出する信号検出手段を設け
る。加えて酸素センサ部の中空部内側の電極を、被測定
ガス導入路の中空部内側の開口位置の近傍に形成し、成
分ガス検出部の中空部内側の電極を、酸素センサ部の中
空部内側の電極よりもガス導入路の開口から離れた位置
に、酸素ポンプ部の中空部内側の電極と畳重するように
形成する。
According to the first aspect of the present invention, the following structure is provided for controlling the oxygen concentration in the hollow portion through which the gas to be measured is introduced through the gas introduction passage having the diffusion resistance. Let me know. An oxygen sensor section and a pump section, each having a pair of electrodes formed on opposing surfaces of an oxygen ion conductive solid electrolyte material, are provided. The oxygen sensor portion is formed such that one electrode faces the inside of the hollow portion and the other electrode is exposed to a reference gas outside the hollow portion. The oxygen pump section is formed so that one electrode is exposed to the gas to be measured outside the hollow section and the other electrode faces the inside of the hollow section so that a pump current flows through the solid electrolyte material. Oxygen pump control means for performing feedback control of the pump current of the oxygen pump section based on the oxygen concentration detected by the oxygen sensor section. In order to decompose nitrogen oxides, which are to be detected in the gas to be measured in the hollow part, to generate oxygen and to detect NOx concentration as oxygen concentration, a pair of electrodes are provided on opposite surfaces of a solid electrolyte material having oxygen ion conductivity. Is provided. In the pair of electrodes, the electrode inside the hollow portion is an electrode having an activity of reducing NOx. The other electrode is formed so as to be exposed to a reference gas having a reference oxygen concentration. Signal detection means for detecting an output signal between the electrodes of the component gas detection unit is provided. In addition, the electrode inside the hollow part of the oxygen sensor part is formed near the opening position inside the hollow part of the gas introduction path to be measured, and the electrode inside the hollow part of the component gas detecting part is inside the hollow part of the oxygen sensor part. The electrode is formed at a position farther from the opening of the gas introduction path than the electrode of the above and overlaps with the electrode inside the hollow portion of the oxygen pump section.

【0009】成分ガス検出部は、その中空部内側の電極
表面においてNOx が還元反応により分解して酸素が生
成し、信号検出手段によりこの酸素生成量に応じた検出
信号が得られる。
In the component gas detection section, NOx is decomposed by a reduction reaction on the electrode surface inside the hollow section to generate oxygen, and a detection signal corresponding to the amount of generated oxygen is obtained by signal detection means.

【0010】酸素センサ部の中空部内側の電極が被測定
ガス導入路の開口の近傍位置にあるから、中空部内に導
入される被測定ガス中の酸素濃度の変化に即応して酸素
ポンプ部が作動する。成分ガス検出部の電極は被測定ガ
ス導入路の開口位置から酸素センサ部の中空部内側の電
極よりも離れた位置に、酸素ポンプ部の電極と畳重する
ように形成されているから、成分ガス検出部の中空部内
側の電極の近傍における被測定ガス中の酸素は、中空部
内に導入される被測定ガスの酸素濃度の変化に即応して
酸素ポンプ部により供給または排出される。しかして成
分ガス検出部の中空部内側の電極近傍の被測定ガスは、
これを拡散抵抗路等で分離することなく酸素濃度が一定
に保たれ、NOx 濃度の検出精度がよい。しかも成分ガ
ス検出部の中空部内側の電極近傍の被測定ガスを分離し
ないから構造が簡単で応答性もよい。
Since the electrode inside the hollow portion of the oxygen sensor portion is located near the opening of the measured gas introduction passage, the oxygen pump portion responds to the change in the oxygen concentration in the measured gas introduced into the hollow portion. Operate. Since the electrode of the component gas detection unit is formed at a position farther from the opening position of the gas introduction path to be measured than the electrode inside the hollow part of the oxygen sensor unit and overlaps with the electrode of the oxygen pump unit, the component Oxygen in the gas to be measured in the vicinity of the electrode inside the hollow portion of the gas detection unit is supplied or discharged by the oxygen pump unit in response to a change in the oxygen concentration of the gas to be measured introduced into the hollow portion. Thus, the measured gas near the electrode inside the hollow part of the component gas detector is
The oxygen concentration is kept constant without being separated by a diffusion resistance path or the like, and the detection accuracy of the NOx concentration is good. Moreover, since the gas to be measured in the vicinity of the electrode inside the hollow portion of the component gas detector is not separated, the structure is simple and the response is good.

【0011】請求項2記載の発明によれば、上記酸素ポ
ンプ部および酸素センサ部の上記中空部に面した電極
を、検出対象であるNOx に対して不活性な金属で構成
することにより、上記電極表面で上記中空部内の被測定
ガス中のNOx が還元反応により分解することが防止さ
れ、NOx の検出誤差が生じるのを防ぐことができる。
According to the second aspect of the present invention, the electrodes facing the hollow portion of the oxygen pump section and the oxygen sensor section are made of a metal inert to NOx to be detected. NOx in the gas to be measured in the hollow portion on the electrode surface is prevented from being decomposed by the reduction reaction, and the occurrence of NOx detection error can be prevented.

【0012】請求項3記載の発明では、ガス検出体を被
測定ガス側と大気とを隔てる隔離壁に貫通し、先端部が
上記被測定ガス側に突出するように設けるとともに、ガ
ス検出体の内部には、先端部にガス検出体の外部と被測
定ガス導入路を介して連通する中空部と、基準ガスが導
入される基準ガス導入路とを設ける。基準ガス導入路は
一端側が中空部の付近まで延び、ガス検出体の基部側の
他端側から基準ガスが導入されるように構成する。上記
酸素ポンプ部は、その固体電解質材を中空部とガス検出
体の外部とを隔てる隔壁の一部に形成し、固体電解質材
の中空部内側と中空部外側との両面に対向して第1の一
対の電極を形成する。上記酸素センサ部はその固体電解
質材を中空部と基準ガス導入路とを隔てる隔壁の一部に
形成し、固体電解質材の中空部内側と基準ガス導入路側
とに第2の一対の電極を形成する。その中空部内側の電
極は、酸素ポンプ部の中空部内側の電極よりも小面積と
するとともに該電極の中央部と対向する位置に形成す
る。上記成分ガス検出部はその固体電解質材を中空部と
基準ガス導入路とを隔てる隔壁の一部に形成し、固体電
解質材の中空部内側と基準ガス導入路側とに第3の一対
の電極を形成する。その中空部内側の電極は中央部に肉
抜き部を形成して酸素センサ部の中空部内側の電極を囲
むように、かつ酸素ポンプ部の中空部内側の電極と畳重
するように形成する。
According to the third aspect of the present invention, the gas detector penetrates the partition wall that separates the gas to be measured from the atmosphere, and is provided so that its tip protrudes toward the gas to be measured. Inside, a hollow portion communicating with the outside of the gas detector via the measured gas introduction path and a reference gas introduction path into which the reference gas is introduced are provided at the tip. One end of the reference gas introduction passage extends to the vicinity of the hollow portion, and the reference gas is introduced from the other end of the base side of the gas detector. The oxygen pump section is configured such that the solid electrolyte material is formed on a part of a partition wall that separates the hollow portion from the outside of the gas detector, and the first solid electrolyte material faces the inside of the hollow portion and the outside of the hollow portion of the solid electrolyte material. Are formed. The oxygen sensor section forms the solid electrolyte material on a part of a partition wall separating the hollow section and the reference gas introduction path, and forms a second pair of electrodes inside the hollow section of the solid electrolyte material and the reference gas introduction path side. I do. The electrode inside the hollow portion has a smaller area than the electrode inside the hollow portion of the oxygen pump portion and is formed at a position facing the central portion of the electrode. The component gas detection section forms the solid electrolyte material on a part of a partition wall separating the hollow portion and the reference gas introduction path, and forms a third pair of electrodes inside the hollow portion of the solid electrolyte material and the reference gas introduction path side. Form. The electrode inside the hollow portion is formed so as to surround the electrode inside the hollow portion of the oxygen sensor portion by forming a hollow portion at the center portion and to overlap with the electrode inside the hollow portion of the oxygen pump portion.

【0013】かかる構成とすることによりガス検出装置
の主要部を一体にコンパクトに構成できる。
With such a configuration, the main part of the gas detection device can be integrally and compactly configured.

【0014】[0014]

【発明の実施の形態】図1(A)は内燃機関から排出さ
れる排気ガスのNOx濃度の検出に適用した本発明のガ
ス検出装置を示すもので、検出場所に設置されるセンサ
部Sと、回路部Cとから構成してある。センサ部Sは内
燃機関の隔離壁たる排気管壁Wを貫通して筒状のハウジ
ング91が螺着してあり、ハウジング91内に内挿され
る絶縁部材921,922,923がハウジング91の
上端開口を塞ぐ蓋部材93によりハウジング91に固定
されている。そして絶縁部材921,922,923に
設けた貫通穴92aに、細長い平板状のガス検出体1が
挿通保持され、先端部1aはハウジング91より排気管
壁Wの内側に突出し、基部1bは蓋部材93より突出し
ている。
FIG. 1A shows a gas detector according to the present invention applied to the detection of the NOx concentration of exhaust gas discharged from an internal combustion engine. , And a circuit section C. The sensor portion S is formed by screwing a cylindrical housing 91 through an exhaust pipe wall W serving as an isolation wall of the internal combustion engine, and insulating members 921, 922, and 923 inserted into the housing 91 are opened at the upper end of the housing 91. Is fixed to the housing 91 by a lid member 93 that closes the cover. The elongated plate-shaped gas detector 1 is inserted and held in through holes 92a provided in the insulating members 921, 922, and 923, the tip 1a protrudes from the housing 91 inside the exhaust pipe wall W, and the base 1b is a lid member. It projects beyond 93.

【0015】ガス検出体の排気管W内に突出する先端部
はハウジング91の下端に固定される有底筒状の排気カ
バー95内に収容されている。排気カバー95は、ステ
ンレススチール製で、内部側のカバー951と外部側の
カバー952の二重構造となっており、これらカバー9
51,952の周壁には、被測定ガスたる排気ガスを排
気カバー95内に取り込むためのガス流通孔953,9
54がそれぞれ形成してある。
The distal end of the gas detector protruding into the exhaust pipe W is housed in a bottomed cylindrical exhaust cover 95 fixed to the lower end of the housing 91. The exhaust cover 95 is made of stainless steel and has a double structure of an inner cover 951 and an outer cover 952.
Gas flow holes 953, 9 for taking in the exhaust gas as the gas to be measured into the exhaust cover 95 are provided on the peripheral walls of the exhaust valves 51, 952.
54 are formed respectively.

【0016】蓋部材93の上端には、筒状の大気カバー
94が固定される。大気カバー94は、ハウジング91
に取りつけられるメインカバー941とその後端部を被
うサブカバー942からなり、その周壁の対向位置に大
気導入口943,944をそれぞれ有し、これら大気導
入口943,944より基準の酸素濃度の基準ガスたる
大気を大気カバー94内に取り込むようになしてある。
取り込まれた大気はガス検出体1の基部1bに導かれ、
基部1b内に導入される。また大気導入口943,94
4の形成位置において、メインカバー941とサブカバ
ー942の間に防水のために溌水性のフィルタ945が
配設してあり、センサ部S内部には大気のみが導入さ
れ、水分が侵入することが防止される。
A cylindrical air cover 94 is fixed to the upper end of the cover member 93. The air cover 94 is provided in the housing 91.
And a sub-cover 942 covering the rear end of the main cover 941. The air inlets 943, 944 are respectively provided at positions opposing the peripheral walls of the main cover 941. The gas atmosphere is taken into the atmosphere cover 94.
The taken air is led to the base 1b of the gas detector 1,
It is introduced into the base 1b. Atmospheric inlets 943, 94
4, a water-repellent filter 945 is provided between the main cover 941 and the sub-cover 942 for waterproofing. Only the atmosphere is introduced into the sensor unit S, and moisture may enter. Is prevented.

【0017】また大気カバー94は上端が開口してお
り、ガス検出体1の後端部に接続するリード線96がこ
の上端開口より外部に延びている。
The upper end of the air cover 94 is open, and a lead wire 96 connected to the rear end of the gas detector 1 extends outside from the upper end opening.

【0018】図1(B)はガス検出体1の拡大断面図、
図2はその分解図であり、ガス検出体1は、排気管W内
に突出する先端部1a(図の左側)に中空部3、酸素セ
ンサ部たるセンサセル51、酸素ポンプ部たるポンプセ
ル52、成分ガス検出部たる検出セル6等より構成さ
れ、これらを構成する部材が積層構造を有している。
FIG. 1B is an enlarged sectional view of the gas detector 1.
FIG. 2 is an exploded view of the gas detector 1. The gas detector 1 has a hollow portion 3, a sensor cell 51 serving as an oxygen sensor portion, a pump cell 52 serving as an oxygen pump portion, and a component at a distal end portion 1a (left side in the figure) protruding into the exhaust pipe W. It is composed of a detection cell 6 or the like as a gas detector, and the members constituting these have a laminated structure.

【0019】この積層構造は、図2において上側から平
板状の酸素イオン導電性の固体電解質材11、アルミナ
からなる平板状のスペーサ12、平板状の酸素イオン導
電性の固体電解質材13となっている。中間のスペーサ
12は先端部側に四角形の肉抜き部12aが形成してあ
り、固体電解質材11,13で閉鎖された空間が中空部
3を形成している。
In FIG. 2, the laminated structure is a flat oxygen ion conductive solid electrolyte material 11, a flat alumina spacer 12, and a flat oxygen ion conductive solid electrolyte material 13 from the upper side in FIG. I have. The intermediate spacer 12 has a rectangular hollow portion 12 a formed at the tip end side, and the space closed by the solid electrolyte materials 11 and 13 forms the hollow portion 3.

【0020】また図の下側は上記固体電解質材13の下
側に、アルミナからなる平板状のスペーサ14、平板状
の加熱ヒータ部15となっている。中間のスペーサ14
には細長い肉抜き部14aが形成してあり、その一端側
は、上記スペーサ12の肉抜き部12aと同じ形状で肉
抜き部12aと対向しており、他端側はスリット状をな
してスペーサ14の基端に達している。固体電解質材1
3と加熱ヒータ部15とで閉鎖された肉抜き部14aの
空間が、大気導入孔943,944(図1(A))より
大気をガス検出体1内へ導入する基準ガス導入路たるダ
クト4となっている。
On the lower side of the figure, a flat spacer 14 made of alumina and a flat heater section 15 are provided below the solid electrolyte material 13. Intermediate spacer 14
Is formed with an elongated lightening portion 14a, one end of which has the same shape as the lightening portion 12a of the spacer 12 and faces the lightening portion 12a, and the other end has a slit-like shape. 14 bases have been reached. Solid electrolyte material 1
The space of the lightening portion 14a closed by the heater 3 and the heater portion 15 is a duct 4 serving as a reference gas introduction passage for introducing the atmosphere into the gas detector 1 through the air introduction holes 943, 944 (FIG. 1A). It has become.

【0021】固体電解質材11の下面の中空部3の内表
面をなす位置にスクリーン印刷等によりスペーサ12の
肉抜き部12aと略同一形状でPt −Au 製の第1の一
対の電極の一方である電極522が形成されるととも
に、固体電解質材11の上面には電極522と対向して
Pt 製の第1の一対の電極の他方の電極521が形成さ
れている。固体電解質材11、電極521,522でポ
ンプセル52を構成している。
One of a first pair of electrodes made of Pt--Au having substantially the same shape as the lightened portion 12a of the spacer 12 by screen printing or the like at a position forming the inner surface of the hollow portion 3 on the lower surface of the solid electrolyte material 11. A certain electrode 522 is formed, and the other electrode 521 of the first pair of electrodes made of Pt is formed on the upper surface of the solid electrolyte material 11 so as to face the electrode 522. The pump cell 52 is constituted by the solid electrolyte material 11 and the electrodes 521 and 522.

【0022】また固体電解質材11、電極521,52
2を貫通する被測定ガス導入路たるピンホール2が電極
521,522の中心位置に形成してあり、ガス検出体
1外部から中空部3に被測定ガスとして排気ガスを導入
するようになっている。ピンホール2の拡散抵抗のため
中空部3内から酸素が選択的に供給または排出される
と、中空部3内と中空部3外とで被測定ガスの酸素濃度
差ができる。
The solid electrolyte material 11, the electrodes 521, 52
A pinhole 2 is formed at the center of the electrodes 521 and 522 so as to introduce a gas to be measured, which passes through the gas detector 2. Exhaust gas is introduced as a gas to be measured into the hollow portion 3 from outside the gas detector 1. I have. When oxygen is selectively supplied or discharged from the inside of the hollow portion 3 due to the diffusion resistance of the pinhole 2, a difference in oxygen concentration of the gas to be measured between the inside of the hollow portion 3 and the outside of the hollow portion 3 is generated.

【0023】固体電解質材13の上面には中空部3の内
表面をなす位置にスクリーン印刷等によりPt −Au 製
の第2の一対の電極の一方の電極511、Pt −Rh 製
の第3の一対の電極の一方の電極61が形成してある。
電極511は、ポンプセル52の電極522よりも小面
積のもので、ピンホール2の開口と対向する位置に形成
される。電極61は略コ字状で、電極511を囲むよう
に配置され、ピンホール2の開口2aからの被測定ガス
が電極61の各部に均等に到るようになっている。電極
61はポンプセル52の電極522と畳重するように、
その直下に形成される。
On the upper surface of the solid electrolyte material 13, one electrode 511 of the second pair of electrodes made of Pt-Au and the third electrode made of Pt-Rh are formed by screen printing or the like on the inner surface of the hollow portion 3. One electrode 61 of the pair of electrodes is formed.
The electrode 511 has a smaller area than the electrode 522 of the pump cell 52 and is formed at a position facing the opening of the pinhole 2. The electrode 61 is substantially U-shaped and arranged so as to surround the electrode 511, so that the gas to be measured from the opening 2 a of the pinhole 2 reaches each part of the electrode 61 uniformly. The electrode 61 overlaps with the electrode 522 of the pump cell 52,
It is formed immediately below.

【0024】固体電解質材13の下面には上記電極51
1,61のそれぞれに対向してPt製の第2、第3の一
対の電極の他方の電極512,62が形成してある。こ
れらは固体電解質材13、電極511,512がセンサ
セル51を構成し、固体電解質材13、電極61,62
が検出セル6を構成している。
On the lower surface of the solid electrolyte material 13, the electrode 51
The other electrodes 512 and 62 of the second and third pair of electrodes made of Pt are formed opposite to the electrodes 1 and 61, respectively. In these, the solid electrolyte material 13 and the electrodes 511 and 512 constitute the sensor cell 51, and the solid electrolyte material 13, the electrodes 61 and 62
Constitute the detection cell 6.

【0025】また加熱ヒータ部15はアルミナよりなる
平板状の基板18の表面にPt 線17を形成し、これを
アルミナよりなる平板状の被覆層16で被覆したもの
で、上記各セルを加熱し、検出感度を高めるようになっ
ている。
The heater section 15 is formed by forming a Pt wire 17 on the surface of a plate-like substrate 18 made of alumina and coating it with a plate-like coating layer 16 made of alumina. , To increase the detection sensitivity.

【0026】ガス検出体1の基部には、上記各電極51
1,512,521,522,61,62およびPt 線
17の両端と導通する端子51a,51b,52a,5
2b,6a,6b,17a,17bが形成され、上記リ
ード線96(図1(A))に通じている。
At the base of the gas detector 1, each of the electrodes 51
1, 51, 521, 522, 61, 62 and terminals 51a, 51b, 52a, 5 which are electrically connected to both ends of the Pt wire 17.
2b, 6a, 6b, 17a, and 17b are formed and communicate with the lead wire 96 (FIG. 1A).

【0027】またガス検出体1の表面には、ポンプセル
52の電極521を被覆してアルミナ等からなる多孔質
ペーストを塗布、焼き付けしてなるセラミック保護層1
8が形成してあり、ピンホール2が排気ガスに含まれる
スス等の粒径の大きなパティキュレートで目詰まりする
ことを防止している。
On the surface of the gas detector 1, a ceramic protective layer 1 is formed by coating the electrode 521 of the pump cell 52 and applying and baking a porous paste made of alumina or the like.
8 are formed to prevent the pinhole 2 from being clogged with particulates having a large particle size such as soot contained in the exhaust gas.

【0028】なお上記各固体電解質材11,13は、イ
ットリア添加ジルコニアで、ドクターブレード法等のシ
ート形成法により形成されたシートであり、その厚さは
通常、50〜300μmの範囲とするのがよい。ただし
電気抵抗とシート強度との兼ね合いを考慮すると、10
0〜200μmの範囲とすることが望ましい。また電極
の厚さは通常、1〜20μmの範囲とするが、耐熱性と
ガス拡散性とを考慮すると5〜10μm程度とすること
が望ましい。
Each of the solid electrolyte materials 11 and 13 is a sheet of yttria-added zirconia formed by a sheet forming method such as a doctor blade method, and the thickness thereof is usually in the range of 50 to 300 μm. Good. However, considering the balance between electric resistance and sheet strength, 10
It is desirable to set it in the range of 0 to 200 μm. The thickness of the electrode is usually in the range of 1 to 20 μm, but is preferably about 5 to 10 μm in consideration of heat resistance and gas diffusivity.

【0029】図3は上記ガス検出装置のブロック図で、
ここでは上記回路部C(図1(A))について説明す
る。酸素ポンプ制御手段7はセンサセル51の一対の電
極511,512間の電圧を入力とする起電力検出回路
71と、これより出力される起電力信号を入力とする後
段の酸素ポンプ制御回路72からなる。酸素ポンプ制御
回路72の前段の比較回路721は起電力検出回路71
から出力される起電力信号を起電力信号の基準信号値と
比較し、その差を酸素ポンプ制御回路72のポンプ駆動
部722に出力する。ポンプ駆動部722はポンプセル
52の電極521,522間に電圧を印加するととも
に、上記起電力信号と上記基準信号値の差を必要な修正
量としてポンプセル52の一対の電極521,522間
に印加する電圧を増減するようになっている。
FIG. 3 is a block diagram of the gas detector.
Here, the circuit section C (FIG. 1A) will be described. The oxygen pump control means 7 includes an electromotive force detection circuit 71 that receives a voltage between a pair of electrodes 511 and 512 of the sensor cell 51 and an oxygen pump control circuit 72 that receives an electromotive force signal output therefrom as an input. . The comparison circuit 721 at the preceding stage of the oxygen pump control circuit 72 includes an electromotive force detection circuit 71
Is compared with the reference signal value of the electromotive force signal, and the difference is output to the pump drive unit 722 of the oxygen pump control circuit 72. The pump driver 722 applies a voltage between the electrodes 521 and 522 of the pump cell 52 and applies the difference between the electromotive force signal and the reference signal value between the pair of electrodes 521 and 522 of the pump cell 52 as a necessary correction amount. The voltage is increased or decreased.

【0030】信号検出手段8は、検出セル6の一対の電
極61,62間に電圧を印加する検出セル駆動回路81
と、電極61,62を出入する電流を測定して検出セル
6の固体電解質材13に流れるイオン電流を検出するイ
オン電流検出回路82とから構成してある。
The signal detecting means 8 includes a detecting cell driving circuit 81 for applying a voltage between the pair of electrodes 61 and 62 of the detecting cell 6.
And an ion current detection circuit 82 that measures the current flowing into and out of the electrodes 61 and 62 and detects the ion current flowing through the solid electrolyte material 13 of the detection cell 6.

【0031】上記ガス検出装置の作動を図1〜図3によ
り説明する。排気管W内を流れる排気ガスがカバーユニ
ット95の各ガス流通孔953,954からカバーユニ
ット95内に導入される。導入された排気ガスはガス検
出体1のセラミック保護層18からピンホール2を通っ
て中空部3に導かれる。一方、センサ部Sの大気導入孔
944,945からセンサ部S内のダクト4に大気が導
入され、これにセンサセル51、検出セル6Aの電極5
12,62が曝露する。
The operation of the gas detector will be described with reference to FIGS. Exhaust gas flowing through the exhaust pipe W is introduced into the cover unit 95 from each gas flow hole 953, 954 of the cover unit 95. The introduced exhaust gas is guided from the ceramic protective layer 18 of the gas detector 1 to the hollow portion 3 through the pinhole 2. On the other hand, air is introduced into the duct 4 in the sensor unit S from the air introduction holes 944 and 945 of the sensor unit S, and the air is introduced into the sensor cell 51 and the electrode 5 of the detection cell 6A.
12,62 are exposed.

【0032】ポンプセル52はガス検出体1外側の電極
521側が正の電圧となっている場合には、中空部3内
の酸素が電極522で電子を受け取って固体電解質材1
1内を移動し、電極521で電子を放出してセラミック
保護層18から排気ガス中へ排出される。そしてピンホ
ール2はガス検出体1の外側から中空部3へ向かう酸素
の拡散を規制するから中空部3の酸素濃度が低下する。
一方、センサセル51では中空部3とダクト4の酸素分
圧比に応じて電極511,512間に起電力が発生す
る。この起電力を起電力検出回路71が検出し、検出さ
れた起電力信号と基準信号値とを比較回路721が比較
し、その差分に基づいてポンプ駆動回路722が、検出
された起電力が上記基準信号値に対応する基準の起電力
を維持するように、すなわち検出された起電力が基準の
起電力を外れると、ポンプセル52に印加する電圧を変
更することでポンプセル52が中空部3へ供給する、ま
たは中空部3から排出する酸素量が調整される。
When the electrode 521 outside the gas detector 1 has a positive voltage, the pump cell 52 receives oxygen at the electrode 522 from the oxygen in the hollow portion 3 and
1, electrons are emitted from the electrode 521 and are discharged from the ceramic protective layer 18 into the exhaust gas. The pinhole 2 regulates the diffusion of oxygen from the outside of the gas detector 1 toward the hollow portion 3, so that the oxygen concentration in the hollow portion 3 decreases.
On the other hand, in the sensor cell 51, an electromotive force is generated between the electrodes 511 and 512 according to the oxygen partial pressure ratio between the hollow portion 3 and the duct 4. The electromotive force detection circuit 71 detects the electromotive force, and the comparison circuit 721 compares the detected electromotive force signal with the reference signal value. Based on the difference, the pump driving circuit 722 determines The pump cell 52 is supplied to the hollow portion 3 by changing the voltage applied to the pump cell 52 so as to maintain the reference electromotive force corresponding to the reference signal value, that is, when the detected electromotive force deviates from the reference electromotive force. Or the amount of oxygen discharged from the hollow portion 3 is adjusted.

【0033】センサセル51の中空部3内側の電極51
1がピンホール2の開口2a位置の近傍にあるから、ポ
ンプセル52は、中空部3内に導入される被測定ガス中
の酸素濃度変化に即応して作動する。検出セル6の電極
61はピンホール2の開口2a位置から離れており、か
つポンプセル52の電極522と畳重する位置としてあ
るから、リーン側ではポンプセル52のポンピング作動
により、ピンホール2から中空部3に流入する被測定ガ
ス中の酸素の影響を受けることなく、検出セル6の電極
61近傍における被測定ガス中の酸素が速やかに排出さ
れる。検出セル6の電極61近傍における被測定ガスの
酸素濃度は、ピンホール2の開口2aに対向する位置に
形成されたセンサセル51の電極51表面における被測
定ガスの酸素濃度よりも低い。しかして検出セル6の電
極61の近傍における被測定ガスの酸素濃度は常に略0
となる。
Electrode 51 inside hollow part 3 of sensor cell 51
Since 1 is located near the position of the opening 2 a of the pinhole 2, the pump cell 52 operates in response to a change in the oxygen concentration in the gas to be measured introduced into the hollow portion 3. Since the electrode 61 of the detection cell 6 is separated from the position of the opening 2a of the pinhole 2 and overlaps with the electrode 522 of the pump cell 52, the pumping operation of the pump cell 52 on the lean side causes the hollow portion from the pinhole 2 to move. Oxygen in the gas to be measured in the vicinity of the electrode 61 of the detection cell 6 is quickly discharged without being affected by oxygen in the gas to be measured flowing into the gas 3. The oxygen concentration of the gas to be measured in the vicinity of the electrode 61 of the detection cell 6 is lower than the oxygen concentration of the gas to be measured on the surface of the electrode 51 of the sensor cell 51 formed at a position facing the opening 2 a of the pinhole 2. Thus, the oxygen concentration of the gas to be measured in the vicinity of the electrode 61 of the detection cell 6 is almost zero.
Becomes

【0034】かかる状態において、検出セル6の電極6
1,62間には、検出セル駆動回路81から電極62側
が正となるように一定の電圧が印加される。
In this state, the electrode 6 of the detection cell 6
A constant voltage is applied between the first and the second 62 so that the electrode 62 side becomes positive from the detection cell drive circuit 81.

【0035】電極61はPt −Rh 製であるからNOx
に対して還元活性を示し、その表面において被測定ガス
中のNOxが還元反応により分解して酸素が生成され
る。検出セル6の電極61の表面における被測定ガスの
酸素濃度は略0であるから、電極61の表面に存在する
酸素は被測定ガス中のNOxが分解した酸素であり、被
測定ガスのNOx濃度に対応している。
Since the electrode 61 is made of Pt-Rh, NOx
Shows a reduction activity, and NOx in the gas to be measured is decomposed on the surface by a reduction reaction to generate oxygen. Since the oxygen concentration of the gas to be measured on the surface of the electrode 61 of the detection cell 6 is substantially 0, the oxygen present on the surface of the electrode 61 is oxygen obtained by decomposing NOx in the gas to be measured, and the NOx concentration of the gas to be measured. It corresponds to.

【0036】検出セル6の電極61,62間には検出セ
ル駆動回路81により電圧が印加されているから、電極
61表面において生成した酸素は電極61、固体電解質
材13を通って電極62からダクト4へ排出される。こ
のとき固体電解質材13を移動する酸素イオンをキャリ
アとする電流がイオン電流検出回路82により検出され
る。このイオン電流は、検出セル6の電極61表面にお
いて分解した酸素量すなわち被測定ガスのNOx 濃度に
対応する。しかしてイオン電流検出回路82は、被測定
ガスのNOx 濃度に対してオフセット電流のない線形な
電流を出力する。
Since a voltage is applied between the electrodes 61 and 62 of the detection cell 6 by the detection cell driving circuit 81, oxygen generated on the surface of the electrode 61 passes through the electrode 61 and the solid electrolyte material 13 to be ducted from the electrode 62. It is discharged to 4. At this time, a current using oxygen ions moving as carriers in the solid electrolyte material 13 is detected by the ion current detection circuit 82. This ion current corresponds to the amount of oxygen decomposed on the surface of the electrode 61 of the detection cell 6, that is, the NOx concentration of the gas to be measured. Thus, the ion current detection circuit 82 outputs a linear current having no offset current with respect to the NOx concentration of the gas to be measured.

【0037】またリッチ状態ではピンホール2の開口2
aから流入する被測定ガスの酸素濃度に基づいてポンプ
セル52による中空部3への酸素供給量が決定される。
検出セル6の中空部3側の電極61はポンプセル52の
電極522と畳重する位置としてあるから検出セル6の
電極61近傍の酸素濃度は速やかに一定値に収束する。
In the rich state, the opening 2 of the pinhole 2 is formed.
The oxygen supply amount to the hollow portion 3 by the pump cell 52 is determined based on the oxygen concentration of the gas to be measured flowing from a.
Since the electrode 61 on the hollow portion 3 side of the detection cell 6 is located at a position overlapping the electrode 522 of the pump cell 52, the oxygen concentration near the electrode 61 of the detection cell 6 quickly converges to a constant value.

【0038】図4は本発明のガス検出装置における、被
測定ガスのNOx (ここではNO)濃度に対する、イオ
ン電流検出回路82が検出したイオン電流の測定結果の
一例である。拡散抵抗路を設ける必要がないので上記S
AE960334号記載の厚膜ZrO2 NOx センサに
比して約20倍の検出利得で、しかもオフセット電流の
ない線形な出力信号が得られた。
FIG. 4 shows an example of the measurement result of the ion current detected by the ion current detection circuit 82 with respect to the NOx (here, NO) concentration of the gas to be measured in the gas detection device of the present invention. Since there is no need to provide a diffusion resistance path,
A linear output signal having a detection gain of about 20 times as much as that of the thick film ZrO 2 NOx sensor described in AE960334 and having no offset current was obtained.

【0039】またポンプセル52の中空部3内側の電極
522およびセンサセル51の中空部3内側の電極51
1をNOx に不活性なPt −Au 製で構成したから、ポ
ンプセル52の電極522表面およびセンサセル51の
電極511表面におけるNOx の還元反応が防止され、
中空部3内に導入される被測定ガスのNOx の濃度が変
化することがない。
The electrode 522 inside the hollow portion 3 of the pump cell 52 and the electrode 51 inside the hollow portion 3 of the sensor cell 51
Since No. 1 is made of Pt-Au which is inert to NOx, the reduction reaction of NOx on the surface of the electrode 522 of the pump cell 52 and the surface of the electrode 511 of the sensor cell 51 is prevented,
The NOx concentration of the gas to be measured introduced into the hollow portion 3 does not change.

【0040】なお検出セルの中空部側の電極は、検出対
象であるNOx に対して還元活性を有する金属(Pt −
Rh )で構成したが、電極の本体となる電気伝導性の薄
膜の表面に、1種以上の貴金属元素を含み金属酸化物を
有する触媒層を形成することで、電極がNOx に対して
還元活性を有するようにしてもよい。
The electrode on the hollow side of the detection cell is a metal (Pt −) having a reducing activity for NOx to be detected.
Rh), but by forming a catalyst layer containing a metal oxide containing one or more noble metal elements on the surface of an electrically conductive thin film serving as the main body of the electrode, the electrode has a reducing activity against NOx. May be provided.

【0041】酸素ポンプ制御手段は、センサセルで検出
される酸素量に基づいてポンプセルの作動をフィードバ
ック制御するものであれば実施形態記載のものに限定さ
れるものではない。また酸素の供給量、排出量の制御は
ポンプセルの印加電圧の大きさの制御ではなく、デュー
ティ制御で行ってもよい。
The oxygen pump control means is not limited to the one described in the embodiment as long as it performs feedback control of the operation of the pump cell based on the amount of oxygen detected by the sensor cell. Further, the control of the supply amount and the discharge amount of oxygen may be performed by duty control instead of controlling the magnitude of the applied voltage to the pump cell.

【0042】センサセルと検出セルとは、固体電解質材
を共用しているが、それぞれ別の固体電解質材で構成し
てもよい。この場合、センサセルの固体電解質材と検出
セルの固体電解質材とを絶縁材で分離することによりセ
ンサセルと検出セル間の信号の干渉が防止され、検出精
度をさらに高めることができる。また上記実施形態では
中空部や検出セル等の各セルを一体に構成したが必ずし
もこれに限定されるものではなく、それぞれが別体の構
成としてもよい。
Although the sensor cell and the detection cell share a solid electrolyte material, they may be made of different solid electrolyte materials. In this case, by separating the solid electrolyte material of the sensor cell and the solid electrolyte material of the detection cell with an insulating material, signal interference between the sensor cell and the detection cell is prevented, and the detection accuracy can be further improved. In the above-described embodiment, the cells such as the hollow portion and the detection cell are integrally formed. However, the present invention is not limited to this, and each of them may be configured separately.

【0043】センサセルの電極と検出セルの電極とを、
検出セルの電極がセンサセルの電極を囲むように配置し
たが、両者をポンプセルの電極の略半分の大きさの長方
形としてポンプセルの電極の直下に並設してもよい。こ
の場合、ピンホールはセンサセルの電極に対向する位置
に寄せるか、もしくはガス検出体の先端から中空部のセ
ンサセル側の側壁へ貫通するように形成してセンサセル
の中空部内側の電極がピンホールの開口近傍となるよう
にする。
The electrode of the sensor cell and the electrode of the detection cell are
Although the electrodes of the detection cells are arranged so as to surround the electrodes of the sensor cells, both electrodes may be arranged as a rectangle having a size approximately half that of the electrodes of the pump cells and arranged directly below the electrodes of the pump cells. In this case, the pinhole is brought to a position facing the electrode of the sensor cell, or formed so as to penetrate from the tip of the gas detector to the side wall of the sensor cell side of the hollow, so that the electrode inside the hollow of the sensor cell has the pinhole. It should be near the opening.

【0044】ポンプセルからの酸素は排気ガス中に排出
されるように構成したが必ずしもこれに限定されるもの
ではなく、大気中に排出するようにしてもよい。この場
合、酸素をセンサ部から排出する排出孔は大気カバーの
大気導入孔から離して設け、大気導入孔から導入される
大気の酸素濃度に影響しないようにするのがよい。
Although oxygen is discharged from the pump cell into the exhaust gas, the invention is not limited to this. The oxygen may be discharged into the atmosphere. In this case, it is preferable that the discharge hole for discharging oxygen from the sensor unit is provided apart from the air introduction hole of the air cover so as not to affect the oxygen concentration of the air introduced from the air introduction hole.

【図面の簡単な説明】[Brief description of the drawings]

【図1】(A)は本発明のガス検出装置の全体断面図で
あり、(B)は本発明のガス検出装置の要部拡大断面図
である。
FIG. 1A is an overall cross-sectional view of a gas detection device of the present invention, and FIG. 1B is an enlarged cross-sectional view of a main part of the gas detection device of the present invention.

【図2】本発明のガス検出装置の要部の分解図である。FIG. 2 is an exploded view of a main part of the gas detection device of the present invention.

【図3】本発明のガス検出装置のブロック図である。FIG. 3 is a block diagram of the gas detection device of the present invention.

【図4】本発明のガス検出装置の作動を説明するグラフ
である。
FIG. 4 is a graph illustrating the operation of the gas detection device according to the present invention.

【符号の説明】[Explanation of symbols]

1 ガス検出体 11,13 固体電解質材 1a 先端部 1b 基部 2 ピンホール(被測定ガス導入路) 3 中空部 4 ダクト(基準ガス導入路) 51 センサセル(酸素センサ部) 511,512 センサセルの電極 52 ポンプセル(酸素ポンプ部) 521,522 ポンプセルの電極 6 検出セル(成分ガス検出部) 61,62 検出セルの電極 7 酸素ポンプ制御手段 8 信号検出手段 W 排気管壁(隔離壁) DESCRIPTION OF SYMBOLS 1 Gas detector 11, 13 Solid electrolyte material 1a Tip 1b Base 2 Pinhole (measured gas introduction path) 3 Hollow section 4 Duct (reference gas introduction path) 51 Sensor cell (oxygen sensor section) 511, 512 Electrode of sensor cell 52 Pump cell (oxygen pump section) 521, 522 Electrode of pump cell 6 Detection cell (component gas detection section) 61, 62 Electrode of detection cell 7 Oxygen pump control means 8 Signal detection means W Exhaust pipe wall (isolation wall)

フロントページの続き (72)発明者 土方 啓暢 愛知県西尾市下羽角町岩谷14番地 株式会 社日本自動車部品総合研究所内 (72)発明者 牧野 太輔 愛知県西尾市下羽角町岩谷14番地 株式会 社日本自動車部品総合研究所内 (72)発明者 中村 兼仁 愛知県刈谷市昭和町1丁目1番地 株式会 社デンソー内Continued on the front page (72) Inventor: Hironobu Hijikata 14 Iwatani, Shimowasumi-cho, Nishio-shi, Aichi Pref. Japan Automobile Parts Research Institute (72) (72) Inventor Kanehito Nakamura 1-1-1, Showa-cho, Kariya-shi, Aichi Pref.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 被測定ガスが拡散抵抗を有する被測定ガ
ス導入路を介して導入される中空部と、酸素イオン導電
性の固体電解質材の相対向する両面に一対の電極を一方
の電極が中空部内に面し、他方の電極が中空部外の基準
の酸素濃度の基準ガスに曝露するように形成し、一方の
電極の表面の酸素濃度を検出する酸素センサ部と、酸素
イオン導電性の固体電解質材の相対向する両面に一対の
電極を、一方の電極が中空部外の被測定ガスに曝露する
ように、他方の電極が中空部内に面して形成し、この一
対の電極から上記固体電解質材にポンプ電流を流し、中
空部内と外の間で酸素を移動せしめる酸素ポンプ部と、
酸素センサ部で検出される酸素濃度に基づいて酸素ポン
プ部のポンプ電流をフィードバック制御する酸素ポンプ
制御手段と、酸素イオン導電性の固体電解質材の相対向
する両面に一対の電極を、一方の電極が上記中空部に面
し、他方の電極が基準ガスに曝露するように形成した成
分ガス検出部と、成分ガス検出部の電極間の出力信号を
検出する信号検出手段とを具備し、かつ酸素センサ部の
中空部内側の電極を、被測定ガス導入路の中空部内側の
開口位置の近傍に形成し、成分ガス検出部の中空部内側
の電極を、酸素センサ部の中空部内側の電極よりもガス
導入路の開口から離れた位置に酸素ポンプ部の中空部内
側の電極と畳重するように形成し、かつ成分ガス検出部
の中空部内側の電極を窒素酸化物に還元活性を有する電
極としたことを特徴とするガス検出装置。
1. A pair of electrodes are provided on one of two opposing surfaces of a hollow portion into which a gas to be measured is introduced via a gas introduction passage having a diffusion resistance and a solid electrolyte material having oxygen ion conductivity. An oxygen sensor section that faces the inside of the hollow section and is formed so that the other electrode is exposed to a reference gas having a standard oxygen concentration outside the hollow section, and an oxygen sensor section that detects the oxygen concentration on the surface of one electrode, A pair of electrodes are formed on opposite sides of the solid electrolyte material, and one electrode is formed facing the inside of the hollow portion so that one electrode is exposed to the gas to be measured outside the hollow portion. An oxygen pump section that sends a pump current to the solid electrolyte material and moves oxygen between the inside and the outside of the hollow portion,
Oxygen pump control means for performing feedback control of the pump current of the oxygen pump section based on the oxygen concentration detected by the oxygen sensor section, and a pair of electrodes on both opposing surfaces of the solid electrolyte material having oxygen ion conductivity, one electrode Has a component gas detector formed so that the other electrode is exposed to the reference gas, and signal detection means for detecting an output signal between the electrodes of the component gas detector. An electrode inside the hollow portion of the sensor portion is formed near the opening position inside the hollow portion of the gas introduction path to be measured, and the electrode inside the hollow portion of the component gas detecting portion is located closer to the electrode inside the hollow portion of the oxygen sensor portion. The electrode inside the hollow part of the oxygen pump part is formed so as to overlap with the electrode inside the hollow part at a position away from the opening of the gas introduction path, and the electrode inside the hollow part of the component gas detecting part has an activity to reduce nitrogen oxides. Specially Gas detecting apparatus according to.
【請求項2】 請求項1に記載のガス検出装置におい
て、上記酸素ポンプ部および酸素センサ部の上記中空部
内側の電極を、窒素酸化物に対して不活性な金属で構成
したガス検出装置。
2. The gas detection device according to claim 1, wherein the oxygen pump portion and the electrode inside the hollow portion of the oxygen sensor portion are made of a metal inert to nitrogen oxides.
【請求項3】 請求項1または2いずれか記載のガス検
出装置において、被測定ガス側と大気とを隔てる隔離壁
に貫通し、先端部が上記被測定ガス側に突出するガス検
出体を備え、ガス検出体の内部には、先端部にガス検出
体の外部と上記被測定ガス導入路を介して連通する上記
中空部を設けるとともに、一端側が中空部の付近まで延
び、他端側から基準ガスが導入される基準ガス導入路を
設け、上記酸素ポンプ部は、これを中空部内と上記ガス
検出体の外部とを隔てる隔壁の一部をなす固体電解質材
と、その中空部内側と中空部外側との両面に対向して形
成した第1の一対の電極とで構成し、上記酸素センサ部
は、これを中空部内と基準ガス導入路とを隔てる隔壁の
一部をなす固体電解質材と、その中空部内側と基準ガス
導入路側との両面に形成した第2の一対の電極とで構成
し、その中空部内側の電極を、酸素ポンプ部の中空部内
側の電極よりも小面積とするとともに該電極の中央部と
対向する位置に形成し、上記成分ガス検出部は、これを
中空部と基準ガス導入路とを隔てる隔壁の一部をなす固
体電解質材と、その中空部内側と基準ガス導入路側との
両面に形成した第3の一対の電極とで構成し、その中空
部内側の電極は中央部に肉抜き部を形成して酸素センサ
部の中空部内側の電極を囲むようにかつ酸素ポンプ部の
中空部内側の電極と畳重する位置に形成したガス検出装
置。
3. The gas detection device according to claim 1, further comprising a gas detector penetrating through an isolation wall separating the gas to be measured and the atmosphere, and having a tip end projecting toward the gas to be measured. Inside the gas detector, the hollow portion communicating with the outside of the gas detector via the measured gas introduction path is provided at the distal end, and one end side extends to the vicinity of the hollow portion, and the other end has a reference. A reference gas introduction path into which gas is introduced is provided, and the oxygen pump section is a solid electrolyte material that forms a part of a partition wall separating the inside of the hollow section and the outside of the gas detector, and the inside and the hollow section of the hollow section. A first pair of electrodes formed opposite to both sides of the outside, and the oxygen sensor portion is a solid electrolyte material forming a part of a partition separating the inside of the hollow portion from the reference gas introduction path; On both sides of the inside of the hollow part and the reference gas introduction path side A second pair of electrodes formed, the inner electrode of the hollow portion having a smaller area than the inner electrode of the hollow portion of the oxygen pump portion and formed at a position facing the central portion of the electrode, The component gas detection unit is a solid electrolyte material that forms a part of a partition wall separating the hollow portion and the reference gas introduction path, and a third pair of a pair formed on both sides of the inside of the hollow portion and the reference gas introduction path side. The electrode inside the hollow portion is formed with a hollow portion at the center to surround the electrode inside the hollow portion of the oxygen sensor portion and overlap with the electrode inside the hollow portion of the oxygen pump portion. Gas detection device formed at the position.
JP30738696A 1996-10-31 1996-10-31 Gas detector Expired - Fee Related JP3675997B2 (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000162175A (en) * 1998-11-25 2000-06-16 Ngk Spark Plug Co Ltd Gas sensor, its production, and gas sensor system
JP2002257784A (en) * 2001-02-28 2002-09-11 Kyocera Corp Air-fuel ratio sensor element
US6994780B2 (en) 2001-09-05 2006-02-07 Denso Corporation Gas sensor and method of detecting gas concentration

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6338154A (en) * 1986-08-04 1988-02-18 Ngk Insulators Ltd Nox sensor
JPH08247995A (en) * 1995-03-09 1996-09-27 Ngk Insulators Ltd Method and apparatus for measuring combustible gas component
JPH08271476A (en) * 1994-04-21 1996-10-18 Ngk Insulators Ltd Method and apparatus for measuring specified gas component in gas to be measured

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6338154A (en) * 1986-08-04 1988-02-18 Ngk Insulators Ltd Nox sensor
JPH08271476A (en) * 1994-04-21 1996-10-18 Ngk Insulators Ltd Method and apparatus for measuring specified gas component in gas to be measured
JPH08247995A (en) * 1995-03-09 1996-09-27 Ngk Insulators Ltd Method and apparatus for measuring combustible gas component

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000162175A (en) * 1998-11-25 2000-06-16 Ngk Spark Plug Co Ltd Gas sensor, its production, and gas sensor system
JP2002257784A (en) * 2001-02-28 2002-09-11 Kyocera Corp Air-fuel ratio sensor element
US6994780B2 (en) 2001-09-05 2006-02-07 Denso Corporation Gas sensor and method of detecting gas concentration

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