JPH10132553A - Analysis method for surface roughness and waviness and its device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method which can easily analyze surface roughness and waviness in a short time and its device. SOLUTION: When an operator inputs analyzing conditions for surface roughness and waviness (step 21) to indicate the measurement of a work (step 22), the whole estimation range of the work is measured (step 23), and the waviness of the work is analyzed from obtained measurement data (step 24), and approximate surface roughness is analyzed (step 25). Next, the detailed estimation range of the work roughness is set up from the approximate surface roughness (step 26), and only the above detailed estimation range of roughness is automatically remeasured (step 27), and the detailed surface roughness is analyzed from the obtained measurement data (step 28).

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an analysis method and an apparatus for analyzing surface roughness and waviness from data measured by a surface roughness measuring device.

[0002]

2. Description of the Related Art As typical methods for evaluating the surface shape of a work, there are surface roughness analysis and undulation analysis. Normally, the two can be analyzed by the same measuring device (surface roughness measuring device), but the analysis conditions are different. In other words, when evaluating undulation, it is necessary to increase the measurement range, and conversely, the pitch of the measurement data may be coarse. On the other hand, when evaluating the surface roughness, it is necessary to take in measurement data at a fine pitch, so that the measurement range cannot be made too long.
For this purpose, work measurement is separately performed for each item to be analyzed.

[0003]

Therefore, the analysis of the surface shape of the work is troublesome and time-consuming. In particular, when trying to evaluate the surface roughness over a long range of the work, there is a problem that it takes a long time to measure the work.
The present invention has been made in view of such circumstances, and an object of the present invention is to provide a method and an apparatus for easily analyzing surface roughness and undulation in a short time.

[0004]

According to the present invention, in order to achieve the above object, analysis of surface roughness and undulation is performed as follows. That is, first, the undulation of the work is analyzed from the measurement data obtained by measuring the entire evaluation range of the work, and the approximate surface roughness is analyzed. Next, a work roughness detailed evaluation range is set from the approximate surface roughness, and the work is automatically measured again only for the work roughness detailed evaluation range.
The detailed surface roughness is analyzed from the obtained measurement data.

That is, in the rough surface roughness analyzed from the measurement data of the entire evaluation range of the work, the pitch of the measurement data is too coarse to obtain an accurate surface roughness. Used to grab. Then, measurement (automatic measurement) is performed and analysis is performed on the range that the user wants to know in detail as before. In general, the range that the user wants to know in detail is a portion having a large surface roughness. In this case, the large portion is extracted from the approximate surface roughness, and a detailed roughness evaluation range is set in the vicinity thereof. I just need.

[0006] This makes it possible to know the surface roughness of the entire evaluation range of the work, and also shortens the work measurement time. In addition, the operator does not need to separately perform the swell measurement and the surface roughness measurement, which facilitates the operation.

[0007] An analyzer for analyzing surface roughness and undulation is configured as follows. (A) An input section for inputting analysis conditions for surface roughness and undulation. (B) A waviness analysis unit that analyzes the waviness of a work from measurement data obtained by measuring the entire evaluation range of the work with a surface roughness measuring device. (C) A rough surface roughness analysis unit that analyzes the rough surface roughness of the work from the measurement data of the entire evaluation range. (D) A detailed roughness evaluation range setting section for setting a detailed roughness evaluation range of the workpiece from the approximate surface roughness. (E) A detailed surface roughness analysis unit that analyzes the detailed surface roughness of the work from measurement data obtained by measuring the detailed evaluation range of the work with a surface roughness measuring device.

[0008]

FIG. 2 is a block diagram showing an embodiment of a surface roughness / undulation analyzer according to the present invention. In FIG. 2, a surface roughness measuring device 11 measures a workpiece to obtain measurement data. The input unit 12 inputs analysis conditions for surface roughness and undulation. The swell analysis unit 13 analyzes the swell of the measured data. The rough surface roughness analysis unit 14 analyzes the rough surface roughness of the measurement data. The roughness detail evaluation range setting unit 15 includes:
A work roughness detailed evaluation range is set from the approximate surface roughness. The surface roughness analysis unit 16 analyzes the detailed surface roughness of the work from the measurement data obtained by measuring the detailed evaluation range of the work roughness. The output unit 17 outputs the analyzed undulation and surface roughness to a CRT, a printer, or the like.

Next, an embodiment of the method for analyzing surface roughness and waviness according to the present invention will be described with reference to the flowchart of FIG. 1 and the graphs of FIGS. 3 is a sectional curve D plotting the measured data, FIG. 4 is a waviness curve W extracted from the sectional curve D, FIG. 5 is a schematic surface roughness curve R extracted from the sectional curve D, and FIG. The detailed surface roughness curve Rx (in this example, of the points having a large roughness,
Only the two near R2 and near R4 are shown. ).

First, the operator inputs the surface roughness /
After inputting the undulation analysis conditions (step 21), the surface roughness measuring device 11 is instructed to measure the work (step 2).
2). Then, the entire evaluation range of the workpiece is measured (Step 23), and a cross-sectional curve D is obtained from the measurement data. The swell analysis unit 13 analyzes the swell of the cross-sectional curve D in accordance with the analysis conditions input to the input unit 12, and calculates the swell curve W and the swell parameter (step 24).

Subsequently, the rough surface roughness analysis section 14 analyzes the rough surface roughness curve R of the cross-sectional curve D in accordance with the analysis conditions input to the input section 12 (step 25).
Next, in the detailed roughness evaluation range setting section 15, a portion having a large roughness from the rough surface roughness curve R (5 in this example, R1 to R5).
The vicinity of (point) is set as the work roughness detailed evaluation range (step 26).

Next, the set work roughness detailed evaluation range is automatically measured by the surface roughness measuring device 11 (step 27). As a result, several (five in this example) detailed surface roughness curves Rx are obtained from the measurement data, and the detailed surface roughness analysis unit 16 inputs the detailed surface roughness curve Rx to the input unit 12. The surface roughness is analyzed according to the analysis conditions thus set, and a detailed surface roughness curve Rx and a surface roughness parameter are calculated (step 28).

With the above, the analysis of the undulation and the surface roughness is completed, and the calculated undulation curve W, the undulation parameter, the approximate surface roughness curve R, the detailed surface roughness curve Rx, the surface roughness parameter, etc. are output to the output unit. 17 (step 29).

In the above-described embodiment, a portion having a large roughness is extracted from the rough surface roughness curve R, and the vicinity thereof is set to the detailed roughness evaluation range. However, the present invention is not limited to this. The present invention can be applied even if it is set to.

[0015]

As described above, according to the present invention, when the operator inputs the analysis conditions of the surface roughness / undulation and instructs the measurement of the work, the entire evaluation range of the work is measured, and the obtained measurement is performed. The undulation of the workpiece is analyzed from the data, and the approximate surface roughness is analyzed. Next, the detailed roughness evaluation range of the workpiece is set from the approximate surface roughness, and only the detailed roughness evaluation range is automatically set. The measurement was performed again, and the detailed surface roughness was analyzed from the obtained measurement data. Therefore, the surface roughness and undulation can be easily analyzed in a short time.

[Brief description of the drawings]

FIG. 1 is a flowchart of an embodiment of a surface roughness / undulation analysis method according to the present invention.

FIG. 2 is a block diagram of an embodiment of a surface roughness / undulation analyzer according to the present invention.

FIG. 3 is an explanatory diagram of a cross-sectional curve.

FIG. 4 is an explanatory diagram of a undulation curve.

FIG. 5 is an explanatory diagram of a schematic surface roughness curve.

FIG. 6 is an explanatory diagram of a detailed surface roughness curve.

[Explanation of symbols]

 21: Analysis condition input step 22: Workpiece measurement instruction step 23: Workpiece evaluation range entire measurement step 24: Undulation analysis step 25: Rough surface roughness analysis step 26: Roughness detail evaluation range setting step 27 ... … Roughness evaluation range measurement step 28… Detailed surface roughness analysis step 29… Analysis result output step

Claims (4)

[Claims] When an operator inputs analysis conditions for surface roughness and undulation and instructs measurement of a work, the entire evaluation range of the work is measured, and the undulation of the work is analyzed from the obtained measurement data. The rough surface roughness is analyzed, the detailed surface roughness evaluation range of the work is set from the rough surface roughness, and only the detailed evaluation range of the work is automatically measured again, and the detailed surface is obtained from the obtained measurement data. A surface roughness and waviness analysis method characterized in that roughness is analyzed. 2. The surface roughness / undulation analysis method according to claim 1, wherein the vicinity of the portion having the large approximate surface roughness is set in the roughness detailed evaluation range. 3. An input section for inputting analysis conditions for surface roughness and undulation, and a undulation analysis section for analyzing undulation of the workpiece from measurement data obtained by measuring the entire evaluation range of the workpiece with a surface roughness measuring device. A rough surface roughness analysis unit that analyzes the rough surface roughness of the workpiece from the measurement data of the entire evaluation range; and a roughness detail evaluation range setting unit that sets a detailed roughness evaluation range of the workpiece from the rough surface roughness. And a detailed surface roughness analysis unit that analyzes the detailed surface roughness of the work from measurement data obtained by measuring the roughness detailed evaluation range of the work with the surface roughness measuring device. Characteristic surface roughness / undulation analyzer. 4. The surface roughness / undulation analyzer according to claim 3, wherein the vicinity of the portion having the large approximate surface roughness is set in the roughness detailed evaluation range.