JPH10131857A - Gas pump - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a gas pump compact, silent and easy to handle. SOLUTION: Valves are provided at an inlet and an outlet of a compression chamber, and displacement in the compression chamber is fluctuated to deliver gas, fed from the inlet, from the outlet. In a gas pump of such constitution, piezoelectric elements are used as the inlet valve 24 and the outlet valve 23, and a piezoelectric element 22 is used to generate displacement fluctuation in the compression chamber 28 so as to deliver gas without using a motor or the like.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pump for supplying gas, for example, an FID for a gas chromatograph analyzer.
(Hydrogen flame detector) The present invention relates to a pump used for supplying auxiliary combustion gas.

[0002]

2. Description of the Related Art In the prior art, as a mechanism for supplying gas, a pump using a motor and a diaphragm, and a cylinder containing gas compressed at a high pressure have been mainly used.

FIG. 1 shows a schematic configuration diagram of a diaphragm pump as a conventional gas supply mechanism. 1 is a gas inlet, 2 is a base, 3 is a gas outlet, 4 is a diaphragm, 5
Is a motor, 6 is a one-way valve for restricting the direction of gas movement to one direction, 7 is an on / off valve for controlling gas discharge, 8 is a gas compression chamber, and 9 is a crank. In the case of FIG. 1, air is used for the gas. The air supplied from 1 passes through a one-way valve 6 and is introduced into a compression chamber 8. Next, motor 5
Presses the diaphragm 4 through the crank 9 to pressurize the air in the compression chamber 8. The pressurized air passes through the on / off valve 7 and is supplied downstream from the gas outlet 3. A gas chromatograph analyzer, for example, is connected downstream of this, and is used, for example, to supply an auxiliary combustion gas for FID. Subsequently, the motor 5 lowers the pressure in the compression chamber 8 by pulling the diaphragm, and urges the introduction of air into the compression chamber 8.

FIG. 2 is a schematic diagram showing a conventional gas supply mechanism using a gas cylinder. 11 is a gas cylinder, 12 is a valve for controlling a gas flow rate,
Reference numeral 13 denotes a device that uses gas, for example, a gas chromatograph analyzer. Gas cylinder 1 has a high pressure (15MkP
a), the air compressed in
2, the air whose flow rate is controlled is introduced into the gas chromatograph analyzer. The flow rate of air is generally on the order of 100 to 500 cm3 / min.

[0005]

In the prior art,
When a diaphragm pump is used, since a motor is used, it is noisy and it is difficult to reduce the size. Also, when using a gas cylinder, it is difficult to reduce the size, and the gas cylinder needs to be replaced. An object of the present invention is to solve the problems described above and to provide a small, quiet, and easy-to-handle pump.

[0006]

The gas pump according to the present invention, which has been made to solve the above-mentioned problems, has a valve at the inlet and the outlet of the compression chamber and varies the volume in the compression chamber so that the pressure from the inlet is changed. A gas pump for delivering supplied gas from an outlet, wherein a piezoelectric element is used as an inlet valve and an outlet valve, and the volume of the compression chamber is changed using the piezoelectric element.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.

FIG. 3 shows an embodiment of the present invention. 21 is a control unit for controlling the operation of the piezoelectric element, 22 is a main piezoelectric element for compressing gas, 23 is an outlet-side piezoelectric element for preventing gas from leaking downstream when compressing gas, and 24 is gas for When compressing, an inlet side piezoelectric element for preventing gas from leaking upstream, 25 is a base of a main body made of a metal as in the past, 26 is an upstream inlet, 27 is a downstream outlet,
28 is a compression chamber. The inlet side piezoelectric element 24 is the upstream inlet 2
The upstream element 26 is adjusted to open when the piezoelectric element is not energized and close when the piezoelectric element is energized.
The same applies to the relationship between the outlet side piezoelectric element 23 and the downstream outlet 27. In the main piezoelectric element 22, the volume of the internal space of the compression chamber 28 fluctuates by utilizing the deformation of the volume of the element itself in the compression chamber 28 between the energized state and the non-energized state. In other words, when the piezoelectric element 22 is expanded by turning on the power, the internal space of the compression chamber 28 is reduced, and when the piezoelectric element 22 is turned off, the internal space of the compression chamber 28 is expanded. In order to increase the compression ratio, it is desirable to reduce the space remaining in the compression chamber in the energized state. Inlet side piezoelectric element 24, outlet side piezoelectric element 23, main piezoelectric element 22
Is hermetically attached to the base so that there is no leakage.

Next, the operation of the device of the present invention will be described. Initially, the main piezoelectric element 22 and the inlet-side piezoelectric element 24 are in a contracted state as shown in FIG. Therefore, the air flows into the upstream inlet 6
It flows into the compression chamber 28 more. Subsequently, as shown in FIG. 4, the inlet side piezoelectric element 4 extends and seals the air in the compression chamber 28. Next, as shown in FIG. 5, when the main piezoelectric element 22 shrinks, the air sealed in the compression chamber 28 is compressed. At this time, the compression ratio increases as the remaining space of the compression chamber 28 decreases. Finally, as shown in FIG.
Extends, and the compressed air in the compression chamber 28 flows to the downstream outlet 2
7, and is supplied downstream. Thereafter, the operation returns to the initial state in FIG. 3 and the same operation is repeated.

The operations of the above three piezoelectric elements are all controlled by the control unit 21.

The pump according to the present invention is small and quiet because it does not use a diaphragm, and it is small because it does not require a cylinder and does not require cylinder replacement.

If the cross-sectional area of the main piezoelectric element 22 is 1 cm 2 and the length is 1 cm, the piezoelectric element generally expands and contracts by 0.1%, so that the length can expand and contract by 10 μm. Assuming that the volume of the compression chamber is 0.01 cm3, one cycle (Fig. 3 → Fig. 4 →
In FIG. 5 → FIG. 6 → FIG. 3), 0.01 cm 3 is supplied downstream. When the piezoelectric element is controlled at a frequency of about 1 KHz, 6
About 100 cm3 / min of air can be supplied downstream.

[0013]

As described above, according to the pump of the present invention, a diaphragm which causes an increase in size and noise and a cylinder which is large and need to be replaced are not used, so that the pump can be made small, quiet, and easy to handle. . Therefore, when used in a gas chromatograph analyzer, it is very effective in reducing the size of the device.

[Brief description of the drawings]

FIG. 1 is a configuration diagram of a conventional diaphragm pump.

FIG. 2 is a configuration diagram of a conventional gas supply mechanism using a gas cylinder.

FIG. 3 is a configuration diagram of a gas supply pump according to an embodiment of the present invention, in which a main piezoelectric element and an inlet piezoelectric element are contracted.

FIG. 4 is a configuration diagram showing a state in which only a main piezoelectric element is contracted in a gas supply pump according to an embodiment of the present invention;

FIG. 5 is a configuration diagram of a gas supply pump according to an embodiment of the present invention, in which all piezoelectric elements are extended.

FIG. 6 is a configuration diagram of a gas supply pump according to an embodiment of the present invention, in which only an outlet piezoelectric element is contracted.

[Explanation of symbols]

 21: Control unit 22: Main piezoelectric element 23: Outlet side piezoelectric element 24: Inlet side piezoelectric element 25: Base 26: Upstream inlet 27: Downstream outlet 28: Compression chamber

Claims (1)

[Claims] A gas pump for providing a gas supplied from an inlet to an outlet by providing a valve at an inlet and an outlet of a compression chamber and changing a volume in the compression chamber, comprising an inlet valve and an outlet valve. A gas pump characterized in that a piezoelectric element is used as the first element and a volume change in the compression chamber is caused by using the piezoelectric element.