JPH10115548A - Ultraviolet ray-detecting tube - Google Patents
Ultraviolet ray-detecting tubeInfo
- Publication number
- JPH10115548A JPH10115548A JP8270776A JP27077696A JPH10115548A JP H10115548 A JPH10115548 A JP H10115548A JP 8270776 A JP8270776 A JP 8270776A JP 27077696 A JP27077696 A JP 27077696A JP H10115548 A JPH10115548 A JP H10115548A
- Authority
- JP
- Japan
- Prior art keywords
- cathode electrode
- anode electrode
- tube
- ultraviolet
- side tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、入射した紫外線を
電気信号に変換することによって検知する紫外線検出管
に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultraviolet ray detecting tube for detecting incident ultraviolet rays by converting them into electric signals.
【０００２】[0002]
【従来の技術】従来の紫外線検出管は、実公昭４９−１
７１８４号に記載される。この公報には、ガラス製包囲
体の底部にガラス底板を溶接してなる密閉容器内に、陽
極電極及び陰極電極を配置した紫外線検出管が開示され
ている。2. Description of the Related Art A conventional ultraviolet detector tube is disclosed in Jpn.
No. 7184. This publication discloses an ultraviolet detecting tube in which an anode electrode and a cathode electrode are arranged in a sealed container formed by welding a glass bottom plate to the bottom of a glass enclosure.
【０００３】[0003]
【発明が解決しようとする課題】上記従来の紫外線検出
管は、長寿命で安定した紫外線検出を行うことができる
優れた検出管であるが、その特性は十分ではない。紫外
線を透過する典型的なガラス材料はフッ素を含んでい
る。このフッ素は、包囲体と底板との溶接の際に、陽極
電極、陰極電極又は密閉容器の内表面等に付着する。こ
のフッ素等の汚染物質は、紫外線検出管の動作時に発生
する放電ガスのイオン、陽極電極への電子衝突又は温度
上昇によって脱離して放電ガスの電離電圧を低下させる
とともに、陽極電極又は陰極電極の表面と化合し、紫外
線検出管の寿命及び安定性が劣化する。本発明は、この
ような課題を解決するためになされたものであり、従来
に比して更に良好な特性を有する紫外線検出管を提供す
ることを目的とする。The above-mentioned conventional ultraviolet detecting tube is an excellent detecting tube capable of long-life and stable ultraviolet detection, but its characteristics are not sufficient. Typical glass materials that transmit ultraviolet light include fluorine. This fluorine adheres to the anode electrode, the cathode electrode, the inner surface of the closed container, or the like when welding the enclosure and the bottom plate. The contaminants such as fluorine are desorbed due to the ions of the discharge gas generated during operation of the ultraviolet detector tube, electron impact on the anode electrode, or a rise in temperature, thereby lowering the ionization voltage of the discharge gas. Combines with the surface, deteriorating the life and stability of the UV detector tube. The present invention has been made in order to solve such a problem, and an object of the present invention is to provide an ultraviolet detecting tube having more excellent characteristics as compared with the related art.
【０００４】[0004]
【課題を解決するための手段】本発明に係る紫外線検出
管は、紫外線を遮蔽する金属材料からなり開口部を有す
る側管、及び、紫外線を透過するガラス材料からなり前
記側管の開口部を塞ぐ窓部材を有する密閉容器と、密閉
容器内の、窓部材に対向する位置に配置された陽極電極
及び陰極電極と、密閉容器内に封入された気体と、を備
える。側管は紫外線を遮蔽する金属材料からなるため、
入射紫外線は紫外線透過性の材料からなる窓部材を介し
て検出管の陽極電極及び陰極電極方向に導入され、本検
出管は高い指向性を有する。更に、側管は金属材料から
なるので、この側管を密閉容器の底面側を構成する材料
等に圧着又は溶接によって接続しても、フッ素等の不純
物が、密閉容器及、陽極及び陰極電極に付着しない。し
たがって、本紫外線検出管においては、フッ素等の影響
が除去され、密閉容器内に封入された気体の電離電圧及
び陽極電極又は陰極電極の表面状態を安定に保持するこ
とができる。SUMMARY OF THE INVENTION An ultraviolet detector tube according to the present invention comprises a side tube made of a metal material that blocks ultraviolet rays and having an opening, and an opening portion of the side tube made of a glass material that transmits ultraviolet rays. An airtight container having a window member to be closed, an anode electrode and a cathode electrode arranged in a position facing the window member in the airtight container, and a gas sealed in the airtight container. Since the side tube is made of a metal material that blocks ultraviolet rays,
Incident ultraviolet rays are introduced toward the anode electrode and the cathode electrode of the detection tube through a window member made of a material that transmits ultraviolet light, and the detection tube has high directivity. Furthermore, since the side tube is made of a metal material, even if the side tube is connected to a material or the like constituting the bottom side of the sealed container by crimping or welding, impurities such as fluorine may be present in the sealed container and the anode and the cathode electrode. Does not adhere. Therefore, in the present ultraviolet detecting tube, the influence of fluorine and the like is removed, and the ionization voltage of the gas sealed in the closed container and the surface state of the anode electrode or the cathode electrode can be stably maintained.
【０００５】[0005]
【発明の実施の形態】以下、実施の形態に係る紫外線検
出管について説明する。同一要素には同一符号を用いる
ものとし、重複する説明は省略する。なお、以下の説明
において、上及び下なる語は図面の上下に基づくものと
する。DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an ultraviolet detecting tube according to an embodiment will be described. The same reference numerals are used for the same elements, and duplicate description will be omitted. In the following description, the terms “upper” and “lower” are based on the upper and lower parts of the drawing.
【０００６】図１は、実施の形態に係る紫外線検出管Ｄ
１の平面図である。図２は、図１に示す紫外線検出管Ｄ
１のＡ−Ａ矢印断面図である。本検出管は、密閉容器Ｖ
１及び密閉容器Ｖ１内に配置された陽極電極１及び陰極
電極２を備える。FIG. 1 shows an ultraviolet detector tube D according to an embodiment.
1 is a plan view of FIG. FIG. 2 shows the ultraviolet detector tube D shown in FIG.
1 is a sectional view taken along the line AA of FIG. This detection tube is a sealed container V
1 and an anode electrode 1 and a cathode electrode 2 arranged in a closed container V1.
【０００７】密閉容器Ｖ１は、紫外線を遮蔽する金属材
料からなり２つの開口部を有する側管３、紫外線を透過
するガラス材料からなり側管３の一方の開口部を塞ぐ窓
部材４、側管３の他方の開口部を塞ぐように側管３に固
定された円環状金属部材５及び円環状金属部材５内の開
口を埋めるように封止するガラス封止材料７を備える。
側管３及び円環状金属部材５の側壁下部は、それぞれ外
側に向かって捲れるように湾曲しており、これらの湾曲
部が重なりあるように電気溶接されている。円環状金属
部材５の側壁中央部は、側管３の側壁中央部に平行であ
り、円筒を構成している。円環状金属部材５の側壁上部
は、内側に向かって湾曲しており、この上部湾曲部の外
表面５ａは陽極電極１の位置決めに用いられる。The closed container V1 is made of a metal material that blocks ultraviolet rays and has a side tube 3 having two openings, a glass material that transmits ultraviolet light, a window member 4 that closes one opening of the side tube 3, and a side tube. An annular metal member 5 fixed to the side tube 3 so as to close the other opening of the third metal member 3 and a glass sealing material 7 for sealing so as to fill the opening in the annular metal member 5 are provided.
The lower portions of the side walls of the side tube 3 and the annular metal member 5 are curved so as to be turned outward, and are electrically welded so that these curved portions overlap. The central part of the side wall of the annular metal member 5 is parallel to the central part of the side wall of the side tube 3 and forms a cylinder. The upper portion of the side wall of the annular metal member 5 is curved inward, and the outer surface 5 a of the upper curved portion is used for positioning the anode electrode 1.
【０００８】陽極電極１の窓部材４に対向する領域は、
その周囲に対して陰極電極２側に凹んでおり、且つ、グ
リッド或いはメッシュ１ｍが形成されている。この陽極
電極１は、その凹部の周囲から円環状金属部材５の位置
決め用外表面５ａ方向に延びており、この延び方向の端
部１ａは円環状金属部材５の上端外表面５ａに平行にな
るように、外側へ向かって湾曲している。陽極電極１
は、その端部１ａが外表面５ａに対して固定されるのみ
で、円環状金属部材５に対して位置決めされる。The area of the anode electrode 1 facing the window member 4 is
It is recessed toward the cathode electrode 2 with respect to the surroundings, and a grid or mesh 1 m is formed. The anode electrode 1 extends in the direction of the positioning outer surface 5a of the annular metal member 5 from the periphery of the concave portion, and the end 1a in the extending direction is parallel to the upper end outer surface 5a of the annular metal member 5. So that it is curved outward. Anode electrode 1
Is positioned with respect to the annular metal member 5 only by fixing its end 1a to the outer surface 5a.
【０００９】陰極電極２は、陽極電極１の凹部に形成さ
れたメッシュ領域１ｍに対向する位置に配置されてお
り、陰極電極２の下面からは、円環状金属部材５の中央
を貫くようにリードピン６が延びている。リードピン６
は、円環状金属部材の開口内に充填されたガラス封止材
料７内に埋設固定されており、したがって、陽極電極１
は、その端部１ａが円環状金属部材５の外表面５ａに対
して固定されるのみで、リードピン６に接続された陰極
電極２に対して位置決めされる。ガラス封止材料７内に
は、密閉容器Ｖ１内部に通じた金属排気管８も埋設され
ている。金属排気管８は、密閉容器Ｖ１内にアルゴン等
の希ガスを導入する際に用いられ、この気体の導入後、
金属排気管８の外側の一端は封止される。なお、陰極電
極２の材料は、仕事関数が４．１ｅＶ以上のものあれば
よいが、Ｎｉ（ニッケル）、Ｍｏ（モリブデン）又はＷ
（タングステン）を用いることができる。本態様に係る
陰極電極２の材料はＮｉであり、リードピン６及び側管
３の材料はコバールである。また、窓部材４は、紫外線
透過性のガラス（ＵＶガラス）からなり、１９０ｎｍ程
度までの紫外線を透過させる。さらに、このＵＶガラス
が、紫外線透過性の硼硅酸ガラスからなる場合は、コバ
ール金属との熱膨張係数を近くすることができるので、
側管３に容易に取付けることができ、本紫外線検出管の
製造を容易にすることができる。The cathode electrode 2 is arranged at a position facing the mesh area 1m formed in the concave portion of the anode electrode 1. From the lower surface of the cathode electrode 2, a lead pin extends through the center of the annular metal member 5. 6 is extended. Lead pin 6
Are embedded and fixed in the glass sealing material 7 filled in the opening of the annular metal member,
Is positioned with respect to the cathode electrode 2 connected to the lead pin 6 only by fixing its end 1a to the outer surface 5a of the annular metal member 5. In the glass sealing material 7, a metal exhaust pipe 8 communicating with the inside of the closed container V1 is also buried. The metal exhaust pipe 8 is used when introducing a rare gas such as argon into the closed container V1, and after introducing this gas,
One end outside the metal exhaust pipe 8 is sealed. The cathode electrode 2 may be made of any material as long as it has a work function of 4.1 eV or more, such as Ni (nickel), Mo (molybdenum) or W (molybdenum).
(Tungsten) can be used. The material of the cathode electrode 2 according to this embodiment is Ni, and the materials of the lead pin 6 and the side tube 3 are Kovar. In addition, the window member 4 is made of ultraviolet-transparent glass (UV glass), and transmits ultraviolet light up to about 190 nm. Furthermore, when this UV glass is made of borosilicate glass that transmits ultraviolet light, the coefficient of thermal expansion with Kovar metal can be made closer, so that
It can be easily attached to the side tube 3, and the manufacture of the present ultraviolet detecting tube can be facilitated.
【００１０】図３は、本紫外線検出管Ｄ１の駆動回路を
示す回路図である。側管３とリードピン６との間に電源
Ｓ１から抵抗Ｒ１及びＲ２を介して電圧を印加すると、
陽極電極１と陰極電極２との間に電圧が印加され、電界
が発生する。印加する電圧は、紫外線の入射によって陽
極電極１と陰極電極２との間に放電が誘発する最低の電
圧よりも高く、紫外線が入射しない場合において自発的
に放電を誘発する最低の電圧よりも低い。本態様では、
３５０Ｖ程度の電圧を印加する。側管３は紫外線を遮蔽
する金属材料からなるため、入射紫外線は紫外線透過性
の材料からなる窓部材４を介して検出管Ｄ１の陽極電極
１及び陰極電極２方向に導入される。したがって、本検
出管Ｄ１は高い指向性を有する。この状態で、窓部材４
及び陽極電極１のメッシュ領域１ｍを通過して陰極電極
２の表面に紫外線が照射されると、陰極電極２から光電
子が放出される。発生した光電子は、陽極電極１と陰極
電極２との間の電界によって、陽極電極１に向けて加速
され、陽極電極１及び陰極電極２の間の気体分子に衝突
して電子雪崩を引き起こす。電子雪崩によって、陽極電
極１と陰極電極２との間に多数の陽イオンが発生し、こ
の陽イオンは電界によって陰極電極２に向けて加速され
て陰極電極２表面に衝突し、陰極電極２からは多くの２
次電子が放出される。２次電子も光電子と同様に電子雪
崩を発生するので、紫外線の入射によって陽極電極１と
陰極電極２との間の放電電流が急激に増加する。放電電
流の電荷はコンデンサＣ１によって供給されるが、放電
電流の急激な増加に伴って陽極電極１と陰極電極２との
間のバイアス電圧が低下するので、短い期間内に放電は
終息し、結果として電流パルスとして紫外線が検知され
る。抵抗Ｒ２の両端には、放電電流パルスに相当する電
圧パルスが発生し、これをモニタすることによって紫外
線の検知がなされる。パルスの発生する頻度は、紫外線
が弱い場合には、紫外線量に比例し、紫外線量が多くな
ると飽和する。FIG. 3 is a circuit diagram showing a driving circuit of the ultraviolet ray detecting tube D1. When a voltage is applied between the side tube 3 and the lead pin 6 from the power supply S1 via the resistors R1 and R2,
A voltage is applied between the anode electrode 1 and the cathode electrode 2 to generate an electric field. The applied voltage is higher than the lowest voltage at which discharge is induced between the anode electrode 1 and the cathode electrode 2 due to the incidence of ultraviolet light, and lower than the lowest voltage at which spontaneous discharge is induced when no ultraviolet light is incident. . In this embodiment,
A voltage of about 350 V is applied. Since the side tube 3 is made of a metal material that blocks ultraviolet light, incident ultraviolet light is introduced toward the anode electrode 1 and the cathode electrode 2 of the detection tube D1 through the window member 4 made of a material that transmits ultraviolet light. Therefore, the detection tube D1 has high directivity. In this state, the window member 4
When the surface of the cathode electrode 2 is irradiated with ultraviolet light through the mesh area 1m of the anode electrode 1, photoelectrons are emitted from the cathode electrode 2. The generated photoelectrons are accelerated toward the anode electrode 1 by an electric field between the anode electrode 1 and the cathode electrode 2 and collide with gas molecules between the anode electrode 1 and the cathode electrode 2 to cause an avalanche. A large number of cations are generated between the anode electrode 1 and the cathode electrode 2 due to the electron avalanche. Is many 2
Next electrons are emitted. Secondary electrons also generate electron avalanches in the same manner as photoelectrons, and the discharge current between the anode electrode 1 and the cathode electrode 2 rapidly increases due to the incidence of ultraviolet rays. The charge of the discharge current is supplied by the capacitor C1, but the discharge is terminated within a short period because the bias voltage between the anode electrode 1 and the cathode electrode 2 decreases with the rapid increase of the discharge current. UV light is detected as a current pulse. At both ends of the resistor R2, a voltage pulse corresponding to a discharge current pulse is generated, and by monitoring this, an ultraviolet ray is detected. The frequency of generation of the pulse is proportional to the amount of ultraviolet light when the ultraviolet light is weak, and saturates as the amount of ultraviolet light increases.
【００１１】次に、図１及び２に示した紫外線検出管Ｄ
１の製造方法について説明する。まず、陰極電極２の下
面にリードピン６を溶接する。溶接された陰極電極２及
びリードピン６を円環状金属部材（金属シェル）５内に
ガラス封止材料７を用いて融着固定する。なお、この固
定は、陰極電極２の上面が位置決め面５ａから所定の高
さになるように行い、金属排気管８もその上方の一端が
位置決め面５ａから上側に突出するようにガラス封止材
料７を用いて円環状金属部材５内に固定する。次に、陽
極電極１の下端部１ａの下面を、位置決め面５ａ上に溶
接する。したがって、陽極電極１のメッシュ領域１ｍ及
び陰極電極２の上面は、位置決め面５ａを基準に位置決
めされる。すなわち、陽極電極１及び陰極電極２間の距
離（放電隙間）の精度は、陽極電極１及び円環状金属部
材５の加工精度によって決定される。リードピン８に接
続された陰極電極２が衝撃や加熱によって多少変形して
も、陽極電極１と陰極電極２との間の間隔は高精度に保
たれ、製造される紫外線検出管毎の特性誤差は低減され
る。Next, the ultraviolet detector tube D shown in FIGS.
1 will be described. First, the lead pin 6 is welded to the lower surface of the cathode electrode 2. The welded cathode electrode 2 and lead pin 6 are fused and fixed in an annular metal member (metal shell) 5 using a glass sealing material 7. This fixing is performed so that the upper surface of the cathode electrode 2 is at a predetermined height from the positioning surface 5a, and the metal exhaust pipe 8 is also made of a glass sealing material such that one upper end thereof projects upward from the positioning surface 5a. 7 and is fixed in the annular metal member 5. Next, the lower surface of the lower end 1a of the anode electrode 1 is welded onto the positioning surface 5a. Therefore, the mesh region 1m of the anode electrode 1 and the upper surface of the cathode electrode 2 are positioned with reference to the positioning surface 5a. That is, the accuracy of the distance (discharge gap) between the anode electrode 1 and the cathode electrode 2 is determined by the processing accuracy of the anode electrode 1 and the annular metal member 5. Even if the cathode electrode 2 connected to the lead pin 8 is slightly deformed by impact or heating, the distance between the anode electrode 1 and the cathode electrode 2 is maintained with high accuracy, and the characteristic error of each manufactured ultraviolet detector tube is reduced. Reduced.
【００１２】次に、側管３の上部開口部を内側から塞ぐ
ように、窓部材４を側管３の内側に融着する。しかる
後、環状金属部材５の下端外側湾曲部（鍔部）の外面上
に、側管（キャップ）３の下端外側湾曲部（鍔部）の内
面が重なるように、側管３を円環状金属部材５上に被
せ、これらの湾曲部を溶接する。側管３はガラスではな
く、金属からできているので、紫外線透過性のガラス中
に例えば１．９重量％含まれるフッ素は、この工程によ
っても密閉容器Ｖ１内に付着しない。また、側管３がガ
ラスではないので、この溶接によって、ガラスの主成分
であるシリカの蒸発が生じることもなく、このシリカ微
粒子の密閉容器Ｖ１や電極１，２への付着による異常放
電を防止することができる。次に、金属排気管８の下方
の一端に真空排気装置を接続し、密閉容器Ｖ１内部の気
体を排気するとともに、密閉容器Ｖ１を外側から加熱し
て、ベーキングを行う。密閉容器Ｖ１内の圧力が十分に
低下し、略真空になった後、金属排気管８の下方の一端
から還元性の混合気体を密閉容器Ｖ１内に導入する。気
体の導入後、金属排気管８の下方の一端を挟んで圧着封
止し、密閉容器Ｖ１内を気密状態にする。金属排気管８
は、ガラスではないので、この一端の封止においても、
フッ素やシリカが容器Ｖ１内に導入されることがない。
なお、キャップ３を円環状金属部材５に溶接する前に、
双方を真空チャンバ内に導入し、加熱した後、この真空
チャンバ内に混合ガスを充満させ、これらを抵抗溶接法
を用いて接続することとしても良い。この場合、排気管
８は不用である。Next, the window member 4 is fused to the inside of the side tube 3 so as to close the upper opening of the side tube 3 from the inside. Thereafter, the side tube 3 is fixed to the annular metal member 5 such that the inner surface of the lower end outer curved portion (flange) of the side tube (cap) 3 overlaps the outer surface of the lower end outer curved portion (flange) of the annular metal member 5. These curved portions are welded on the member 5. Since the side tube 3 is made of metal, not glass, fluorine contained in, for example, 1.9% by weight of the ultraviolet-transparent glass does not adhere to the closed container V1 even in this step. Further, since the side tube 3 is not made of glass, the welding does not cause evaporation of silica, which is a main component of glass, and prevents abnormal discharge due to adhesion of the silica fine particles to the sealed container V1 and the electrodes 1 and 2. can do. Next, a vacuum exhaust device is connected to the lower end of the metal exhaust pipe 8 to exhaust the gas inside the sealed container V1, and baking is performed by heating the sealed container V1 from the outside. After the pressure in the closed vessel V1 has been sufficiently reduced to be substantially vacuum, a reducing gaseous mixture is introduced into the closed vessel V1 from one end below the metal exhaust pipe 8. After the introduction of the gas, the lower end of the metal exhaust pipe 8 is clamped and sealed by sandwiching the lower end, and the inside of the sealed container V1 is made airtight. Metal exhaust pipe 8
Is not glass, so even at this end seal,
Fluorine and silica are not introduced into the container V1.
Before welding the cap 3 to the annular metal member 5,
After both are introduced into a vacuum chamber and heated, the vacuum chamber may be filled with a mixed gas, and these may be connected using a resistance welding method. In this case, the exhaust pipe 8 is unnecessary.
【００１３】次に、別の実施の態様に係る紫外線検出管
Ｄ２について説明する。図４は、本実施の形態に係る紫
外線検出管Ｄ２の平面図である。図５は、図４に示す紫
外線検出管Ｄ２のＡ−Ａ矢印断面図である。本検出管
は、側管３の上部及び陽極１の構造のみが図１及び図２
に示したものと異なる。側管３は、その管軸方向の外壁
上部と外壁下部の直径が異なり、外壁上部の直径は外壁
下部の直径よりも小さく、外壁上部及び外壁下部の内面
は、その境界で段差３ｓを形成する。側管３内面の段差
３ｓは窓部材４に平行な下面３ｂを有する。段差３ｓの
下面３ｂには、平板状の陽極電極１の外縁上面が溶接さ
れている。環状金属部材５の下端鍔部の上面３ｃから段
差３ｓの下面３ｂまでの距離は一定である。したがっ
て、段差３ｓの下面３ｂに陽極電極１を溶接するのみ
で、陽極電極１は環状金属部材５の下端鍔部の上面３ｃ
に対して位置決めされる。陰極電極２の上面は、この鍔
部上面３ｃからの距離が一定となるように、ガラス封止
材料７で固定されている。したがって、陽極電極１中央
部のメッシュ領域１ｍと陰極電極２の上面間の距離（放
電隙間）は鍔部上面３ｃを基準とし、その精度は側管３
の段差３ｓ及び円環状金属部材５の加工精度によって決
定される。本紫外線検出管Ｄ２においては、窓部材４で
一方の開口が封止された側管３の段差３ｓに陽極電極１
を固定した後、環状金属部材５の下端外側湾曲部（鍔
部）の外面上に、側管３の下端外側湾曲部（鍔部）の内
面が重なるように、側管３を円環状金属部材５上に被
せ、これらの湾曲部を溶接して、密閉容器Ｖ１とする。Next, an ultraviolet detecting tube D2 according to another embodiment will be described. FIG. 4 is a plan view of the ultraviolet ray detection tube D2 according to the present embodiment. FIG. 5 is a cross-sectional view of the ultraviolet ray detection tube D2 shown in FIG. In this detection tube, only the structure of the upper portion of the side tube 3 and the structure of the anode 1 are shown in FIGS.
Is different from that shown in the above. The side pipe 3 has different diameters in the upper part of the outer wall and the lower part of the outer wall in the pipe axis direction, the diameter of the upper part of the outer wall is smaller than the diameter of the lower part of the outer wall, and the inner surface of the upper part of the outer wall and the lower part of the outer wall form a step 3s at its boundary. . The step 3s on the inner surface of the side tube 3 has a lower surface 3b parallel to the window member 4. The upper surface of the outer edge of the plate-shaped anode electrode 1 is welded to the lower surface 3b of the step 3s. The distance from the upper surface 3c of the lower flange portion of the annular metal member 5 to the lower surface 3b of the step 3s is constant. Therefore, only by welding the anode electrode 1 to the lower surface 3b of the step 3s, the anode electrode 1 is connected to the upper surface 3c of the lower flange portion of the annular metal member 5.
Is positioned with respect to The upper surface of the cathode electrode 2 is fixed with a glass sealing material 7 so that the distance from the flange upper surface 3c is constant. Therefore, the distance (discharge gap) between the mesh region 1m at the center of the anode electrode 1 and the upper surface of the cathode electrode 2 is based on the flange upper surface 3c, and the accuracy is as follows.
And the processing accuracy of the annular metal member 5. In the ultraviolet ray detection tube D2, the anode electrode 1 is placed on the step 3s of the side tube 3 having one opening sealed by the window member 4.
After fixing the side tube 3 to the annular metal member, the inner surface of the lower end outer curved portion (flange) of the side tube 3 overlaps the outer surface of the lower end outer curved portion (flange) of the annular metal member 5. 5, and these curved portions are welded to form a closed container V1.
【００１４】[0014]
【発明の効果】本発明に係る紫外線検出管は、金属側管
３を用いることにより、陽極電極１及び陰極電極２を側
管３で包囲した後、ガラスの融着工程を経ることなく製
造することができるので、密閉容器Ｖ１内へのフッ素及
びシリカ粒子の混入を防ぐことができ、初期不良や特性
劣化が減少し、信頼性の高い紫外線検出管を提供するこ
とができる。The ultraviolet detecting tube according to the present invention is manufactured without using the glass fusing step after surrounding the anode electrode 1 and the cathode electrode 2 with the side tube 3 by using the metal side tube 3. Therefore, it is possible to prevent fluorine and silica particles from being mixed into the closed container V1, to reduce initial failure and deterioration of characteristics, and to provide a highly reliable ultraviolet detector tube.
【図１】紫外線検出管の平面図。FIG. 1 is a plan view of an ultraviolet detection tube.
【図２】紫外線検出管の断面図。FIG. 2 is a sectional view of an ultraviolet detection tube.
【図３】紫外線検出管の駆動回路の回路図。FIG. 3 is a circuit diagram of a drive circuit of the ultraviolet detection tube.
【図４】紫外線検出管の平面図。FIG. 4 is a plan view of an ultraviolet detection tube.
【図５】紫外線検出管の断面図。FIG. 5 is a sectional view of an ultraviolet detection tube.
３…側管、４…窓部材、Ｖ１…密閉容器、１…陽極電
極、２…陰極電極。3 ... side tube, 4 ... window member, V1 ... closed container, 1 ... anode electrode, 2 ... cathode electrode.
Claims (1)
部を有する側管、及び、紫外線を透過するガラス材料か
らなり前記側管の開口部を塞ぐ窓部材を有する密閉容器
と、 前記密閉容器内の、前記窓部材に対向する位置に配置さ
れた陽極及び陰極電極と、 前記密閉容器内に封入された気体と、を備えることを特
徴とする紫外線検出管。1. A closed vessel made of a metal material that blocks ultraviolet rays and having an opening, and a closed vessel made of a glass material that transmits ultraviolet rays and having a window member that closes an opening of the side pipe; An ultraviolet detector tube comprising: an anode and a cathode arranged at positions facing the window member; and a gas sealed in the closed container.
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27077696A JP3854669B2 (en) | 1996-10-14 | 1996-10-14 | UV detector tube |
| US08/938,334 US6121621A (en) | 1996-09-26 | 1997-09-25 | Ultraviolet detector |
| KR1019970048605A KR19980024933A (en) | 1996-09-26 | 1997-09-25 | UV detector tube |
| CN97119565A CN1089187C (en) | 1996-09-26 | 1997-09-25 | Ultraviolet detector |
| DE69727184T DE69727184T2 (en) | 1996-09-26 | 1997-09-26 | Ultraviolet detector |
| EP97307613A EP0833370B1 (en) | 1996-09-26 | 1997-09-26 | Ultraviolet detector |
| US10/139,357 USRE38234E1 (en) | 1996-09-26 | 2002-05-07 | Ultraviolet detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27077696A JP3854669B2 (en) | 1996-10-14 | 1996-10-14 | UV detector tube |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH10115548A true JPH10115548A (en) | 1998-05-06 |
| JP3854669B2 JP3854669B2 (en) | 2006-12-06 |
Family
ID=17490845
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27077696A Expired - Fee Related JP3854669B2 (en) | 1996-09-26 | 1996-10-14 | UV detector tube |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3854669B2 (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10104059A (en) * | 1996-09-26 | 1998-04-24 | Hamamatsu Photonics Kk | Ultraviolet-ray detecting pipe |
| JP2005195404A (en) * | 2004-01-05 | 2005-07-21 | Hamamatsu Photonics Kk | Ultraviolet ray detection tube |
| JP2006127984A (en) * | 2004-10-29 | 2006-05-18 | Hamamatsu Photonics Kk | Photomultiplier tube and radiation detection device |
| JP2006127988A (en) * | 2004-10-29 | 2006-05-18 | Hamamatsu Photonics Kk | Photomultiplier tube and radiation detection device |
| JP2014055817A (en) * | 2012-09-12 | 2014-03-27 | Nippon Dempa Kogyo Co Ltd | Geiger-muller counter and radiation detector |
| JP2016528482A (en) * | 2013-06-13 | 2016-09-15 | ゼネラル・エレクトリック・カンパニイ | Welded joint configuration for automatic welding of tubular detectors |
| JP2017003497A (en) * | 2015-06-12 | 2017-01-05 | 浜松ホトニクス株式会社 | Ultraviolet detector |
| WO2018139416A1 (en) * | 2017-01-26 | 2018-08-02 | 京セラ株式会社 | Wiring board for sensors, package for sensors, and sensor device |
| JP2019020222A (en) * | 2017-07-14 | 2019-02-07 | アズビル株式会社 | Cathode electrode selection assisting method and device |
| JP2019067494A (en) * | 2017-09-28 | 2019-04-25 | 浜松ホトニクス株式会社 | Electron tube |
| WO2022074980A1 (en) * | 2020-10-06 | 2022-04-14 | 浜松ホトニクス株式会社 | Photoelectric tube |
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| JPH10104059A (en) * | 1996-09-26 | 1998-04-24 | Hamamatsu Photonics Kk | Ultraviolet-ray detecting pipe |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPS4959568A (en) * | 1972-06-29 | 1974-06-10 | ||
| US4581536A (en) * | 1983-03-04 | 1986-04-08 | Detector Electronics Corp. | Radiation detection tube having spurious radiation shield |
| JPH0461852U (en) * | 1990-10-04 | 1992-05-27 | ||
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Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10104059A (en) * | 1996-09-26 | 1998-04-24 | Hamamatsu Photonics Kk | Ultraviolet-ray detecting pipe |
| JP2005195404A (en) * | 2004-01-05 | 2005-07-21 | Hamamatsu Photonics Kk | Ultraviolet ray detection tube |
| JP2006127984A (en) * | 2004-10-29 | 2006-05-18 | Hamamatsu Photonics Kk | Photomultiplier tube and radiation detection device |
| JP2006127988A (en) * | 2004-10-29 | 2006-05-18 | Hamamatsu Photonics Kk | Photomultiplier tube and radiation detection device |
| JP2014055817A (en) * | 2012-09-12 | 2014-03-27 | Nippon Dempa Kogyo Co Ltd | Geiger-muller counter and radiation detector |
| JP2016528482A (en) * | 2013-06-13 | 2016-09-15 | ゼネラル・エレクトリック・カンパニイ | Welded joint configuration for automatic welding of tubular detectors |
| JP2017003497A (en) * | 2015-06-12 | 2017-01-05 | 浜松ホトニクス株式会社 | Ultraviolet detector |
| WO2018139416A1 (en) * | 2017-01-26 | 2018-08-02 | 京セラ株式会社 | Wiring board for sensors, package for sensors, and sensor device |
| JP2019020222A (en) * | 2017-07-14 | 2019-02-07 | アズビル株式会社 | Cathode electrode selection assisting method and device |
| JP2019067494A (en) * | 2017-09-28 | 2019-04-25 | 浜松ホトニクス株式会社 | Electron tube |
| WO2022074980A1 (en) * | 2020-10-06 | 2022-04-14 | 浜松ホトニクス株式会社 | Photoelectric tube |
| JP2022061252A (en) * | 2020-10-06 | 2022-04-18 | 浜松ホトニクス株式会社 | Photoelectric tube |
| US11894223B2 (en) | 2020-10-06 | 2024-02-06 | Hamamatsu Photonics K.K. | Photoelectric tube |
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| Publication number | Publication date |
|---|---|
| JP3854669B2 (en) | 2006-12-06 |
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