JPH10113854A - Spherical face machining device and its method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To roughly machine and finely finish a workpiece in one process by providing a load pressing means for pressing the face to be machined of a workpiece against the polishing face of a polishing table through the polishing table and changing the pressing force of the load pressing means. SOLUTION: A polishing tape 6, on the surface of which abrasive grains are adhered and which is stretched between reels 4 and 5 is provided on the recessed and spherical polished face 2a formed in the upper face of a polishing table 2. The workpiece 9 chucked by a chucking member 8 is pressed against the polishing face 2a through the polishing tape 6 by a load pressing means 10. The workpiece 9 is rotated by a motor 11 and is also reciprocated in the direction of an arrow C (the longitudinal direction of the polishing face 2a), and the polishing tape 6 runs in the direction of an arrow B. The pressing force of the workpiece 9 against the polishing face 2a is increased in pre-finish polishing and the pressing force is decreased in finish polishing.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus and a method for mirror-finishing a columnar material such as an optical fiber connector, glass, ceramics, plastic, or the like, or an end face of a block into a convex spherical shape.

[0002]

2. Description of the Related Art FIG. 10 shows an end face 3 of an optical connector 30 provided with an optical fiber 32, which is mirror-polished into a convex spherical shape.
1 shows a state in which they face each other. These optical fibers 32, 3
When two are connected to each other to propagate an optical signal, it is necessary to minimize optical loss and reflection caused by the gap between the fiber end faces 33. As a method of realizing this low optical loss, a PC that makes the end faces 33 of the optical fiber 32 adhere to each other is used.
(Physical Contact) The optical connector 30 is widely used. In general, when the PC optical connector 30 is manufactured, during the process of inserting and fixing the optical fiber 32 into the ferrule 34, an excess adhesive or an excessively long optical fiber remains at the tip. When the end face 31 is mirror-finished into a convex spherical shape by a conventional processing apparatus, the excess adhesive and the excess optical fiber are removed by rough grinding. Next, as shown in FIG. 11A, the end face 3 of the ferrule 34 is ground by grinding using a rotary grindstone 35 or by lapping using a polishing liquid in which abrasive grains are suspended.
1 is formed in a conical shape. Further, a method disclosed in Japanese Patent Publication No. 4-2388, that is, as shown in FIG. 2B, an elastic sheet 37 stretched on a rotating plate 38 and sprayed on its upper surface with a polishing liquid in which abrasive grains 36 are turbid. By rotating the ferrule 34 while pressing the end face 31 against the end face 31, a local convex deformation of the elastic sheet 37 and a polishing action of the abrasive grains 36 are finished to a smooth convex spherical mirror surface.

[0003]

However, the above-described conventional method for processing the spherical surface of the end face 31 of the ferrule 34 is as follows.
A rotary grindstone 35 as a tool for forming a conical end face
In order to further use the loose abrasive grains 36 and the elastic sheet 37 to finish the mirror surface, one PC optical connector 3
There is a problem that the tool must be replaced every time a 0 is manufactured, resulting in poor work efficiency.

[0004] Accordingly, the present invention has been made in view of the above-mentioned conventional problems, and an object of the present invention is to provide a spherical machining apparatus capable of improving work efficiency and a method of manufacturing the same.

[0005]

In order to achieve this object, a spherical machining apparatus according to the present invention provides a machined surface formed in a groove shape having a cross section substantially the same as the machined surface of a workpiece. A polishing table having a polishing table, a polishing tape provided on a processing surface of the polishing table, a load pressing means for pressing a processing surface of a workpiece to the processing surface of the polishing table via the polishing tape; A rotation drive unit configured to rotate the object around an axis perpendicular to the processing surface through a center of the processing surface, and a movement driving unit configured to reciprocate the processing object on the processing surface of the polishing table. It is a thing. Therefore, roughing and finishing are performed by changing the pressing force of the load pressing means.

[0006]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a perspective view showing the entire spherical machining apparatus according to the present invention. In FIG.
A polishing table 2 having a groove-shaped processing surface 2a having a concave cross-section formed on the upper surface and extending in the longitudinal direction, and moving and adjusting the polishing table 2 in the direction of arrow A in the figure. There is provided a position adjusting table 3 which can be freely adjusted. Polishing table 2
A polishing tape 6 having abrasive grains fixed to a surface stretched between the supply reel 4 and the take-up reel 5 is provided on the processing surface 2 a of the take-up reel 5. Is wound in the direction of arrow B by a motor 7 that rotationally drives the motor.

Reference numeral 8 denotes a chuck member to which the workpiece 9 is attached, and a load pressing means 1 capable of adjusting a downward load.
The workpiece surface 9a at the lower end of the workpiece 9 is pressed downward by the workpiece surface 2a of the polishing table 2 via the polishing tape 6. Reference numeral 11 denotes a motor, which is provided with a motor gear 12 that meshes with a gear 13 fixed to the chuck member 8. The rotation of the motor 11 causes the workpiece 9 attached to the chuck member 8 to rotate. The motor 11 and the chuck member 8 are moved by a bracket (not shown) guided movably in the direction of arrow C, that is, in the longitudinal direction of the polishing table 2 by a guide member (not shown) fixed in the spherical machining apparatus 1. Connected and integrated. A pinion 14 is fixed to the motor gear 12, and the pinion 14 meshes with a rack 15 fixed in the spherical machining device 1.
1 rotates, the chuck member 8 moves the motor 1.
It is configured to reciprocate in the direction of arrow C with a bracket 1 via a bracket (not shown).

Next, the machining operation in the spherical machining apparatus having such a configuration will be described. First, the polishing table 2 is finely moved in the direction of arrow A by the position adjusting table 3 so that the rotation center of the workpiece 9 attached to the chuck member 8 and the center of curvature of the processing surface 2a of the polishing table 2 coincide with each other. A relatively large load is applied downward by the pressing means 10, and the processing surface 9 a of the workpiece 9 is pressed against the processing surface 2 a of the polishing table 2 via the polishing tape 6. In this state, the motor 7 is rotated at a low speed to move the polishing tape 6 in the direction of arrow B, and the motor 1
When 1 is rotated, the workpiece 9 rotates, and the workpiece 9 moves in the arrow C direction.

When the workpiece 9 reaches both end faces of the polishing table 2, a switch (not shown) is operated and the motor 11 is reversed, so that the workpiece 9 reciprocates between both end faces of the polishing table 2. . During the reciprocating movement, the processing surface 9a of the workpiece 9 is roughly polished by the abrasive grains of the polishing tape 6, and is pre-processed into a convex spherical shape. After a certain period of pre-processing,
By operating the load pressing means 10 to reduce the downward load, the processing surface 2 of the processing surface 9a of the workpiece 9 is reduced.
The pressing force on a is reduced. By reducing the pressing force, the work surface 9a of the work 9 is gradually finished to a smooth convex spherical shape. As described above, by performing the pre-processing and the finishing processing by changing the load by the load pressing means 10, the mounting and removing work by changing the tool as in the related art becomes unnecessary, and thus the work is continuously performed. The work efficiency can be improved.

FIG. 2 is a sectional view of a polishing tape 6 showing a second embodiment of the present invention. In FIG. 1, the polishing tape 6 has a base material 17 provided with coarse abrasive grains 18, and fine abrasive grains 20 provided on the surface on which the coarse abrasive grains 18 are provided via an adhesive 19. When a downward load is first increased by the load pressing means 10 using the polishing tape 6 in the same manner as in the first embodiment, since the load is large, the processing surface of the workpiece 9 is large. 9a is rough-polished not only by the fine abrasive grains 20 on the surface of the polishing tape 6 but also by the coarse abrasive grains 18 and pre-processed. Next, the load pressing means 10
When the downward load due to is reduced, the work surface 9a of the work 9 is polished only by the fine abrasive grains 20, so that
Fine finishing is performed.

FIG. 3 is a sectional view of a polishing tape 6 showing a third embodiment of the present invention. In the drawing, a polishing tape 6 is provided with a high-hardness coarse abrasive grain 21 on a substrate 17, and a low-hardness fine abrasive grain 22 via an adhesive 19 on the surface on which the rough abrasive grain 21 is provided. Is provided. When the downward load is first increased by the load pressing means 10 using the polishing tape 6 in the same manner as in the first embodiment described above, since the load is large, the workpiece 9 is processed. The surface 9a is made of the low-hardness fine abrasive grains 2 on the surface of the polishing tape 6.
2, and is pre-processed and roughly pre-processed by high-hardness coarse abrasive grains 21, and pre-processed in a short time. Next, when the downward load by the load pressing means 10 is reduced, the surface 9 of the workpiece 9
"a" is finish-processed to a good surface with a small number of affected layers.

FIG. 4 is a front view showing a fourth embodiment of the present invention. In the figure, the same or equivalent members as those in the first embodiment are denoted by the same reference numerals, and detailed description is omitted. The features of the fourth embodiment are as follows.
A grindstone 24 with a shaft whose tip is formed in a convex spherical shape is attached to a chuck member 8 to which a workpiece is attached. The cross-sectional shape of the tip of the grindstone 24 is substantially the same as the cross-section of the processing surface 2a of the polishing table 2 described above. With this configuration, it is possible to form a concave spherical processing surface on the upper end surface of the polishing table 2 using the grindstone 24. In the drawing, reference numeral 25 denotes a bracket connecting the motor 11 and the chuck member 8, and reference numeral 26 denotes a guide member fixed to the frame of the spherical machining apparatus 1 and guiding the bracket 25 in the direction of arrow C. Switches 27 and 27 are fixed to the guide member 26, detect the both ends of the movement of the bracket 25 in the C direction, reverse the rotation of the motor 11, and reciprocate the grindstone 24 between both end surfaces of the polishing table 2. It is.

FIGS. 5 to 7 are views for explaining the operation of the fifth embodiment. FIG. 5 is a front view of the spherical machining apparatus, FIG. 6 is a side view showing the essential parts, and FIG. It is a front view which expands and shows the grindstone with a shaft. In these figures, the same or equivalent members as those of the above-described fourth embodiment are denoted by the same reference numerals, and detailed description is omitted.
As shown in FIG. 7A, the tip of the grindstone 24 is formed in a hemispherical shape, and the abrasive grains 28 are provided on the surface.

In such a configuration, first, the grindstone 24
Is attached to the chuck member 8, and the tip of the grindstone 24 is pressed against the upper surface of the polishing table 2 by the load pressing means 10, and the motor 11
Is rotated, the grindstone 24 is rotated, and the rack 12 is reciprocated in the longitudinal direction, that is, the direction of arrow C. Due to this reciprocating movement, as shown in FIG. 6B, the top surface of the polishing table 2 has the spherical shape of the tip end surface of the grindstone 24 whose sectional center coincides with the rotation center of the chuck member 8 due to the polishing action of the grindstone 24. A groove-shaped processed surface 2a having substantially the same cross section is formed.

Next, the grindstone 24 is removed from the chuck member 8, the workpiece is attached to the chuck member 8, and the polishing tape is attached to the workpiece and the polishing table in the same manner as in the first to third embodiments. 2 and the second processing surface 2a. In this state, the motor 4 is rotated to move the polishing tape, and when the motor 11 is rotated, the workpiece rotates and reciprocates in the arrow C direction. Like the first to third embodiments described above, it is formed in a convex spherical shape.

FIGS. 8 and 9 are views for explaining a sixth embodiment of the present invention. FIG. 8 is a perspective view showing the entire spherical machining apparatus of the present invention, and FIG. 9 is an enlarged view of a main part. FIG. In the sixth embodiment, a rod-shaped jig 29 whose tip is formed in a convex spherical shape is attached to the chuck member 8, and the side on which the abrasive grains 6 a are provided contacts the upper surface of the polishing table 2. A polishing tape 6 is stretched between the supply reel 4 and the take-up reel 5. In this state, the motor 7 is rotated to wind the polishing tape 6 in the direction of arrow B, and the motor 11 is rotated to rotate the jig 29 and reciprocate in the direction of arrow C. The polishing table 2 is polished by the polishing action of the abrasive grains 6a of the polishing tape 6 pressed by the jig 29.
9 (b), the center of the cross section coincides with the center of rotation of the chuck member 8, and the grooved processing surface 2a having a cross section substantially the same as the convex spherical shape of the tip end surface of the jig 29 as shown in FIG. Is formed. Next, the polishing tape 6 is turned upside down to remove the abrasive grains 6.
The polishing tape 6 is stretched between the supply reel 4 and the take-up reel 5 so that the side provided with “a” faces upward, and the workpiece is attached to the chuck member 8. In this state,
The motor 7 is rotated to wind the polishing tape 6 in the direction of arrow B, and the motor 11 is rotated to rotate the workpiece and reciprocate in the direction of arrow C so that the tip of the workpiece has a convex shape. Formed into a spherical shape.

[0017]

EXAMPLE In the first embodiment, the material of the polishing table 2 was Teflon, and the radius of curvature of the processed surface was 20 mm.
And The polishing tape 6 had a total length of 150 m, a width of 25 mm, a thickness of the substrate 17 of 25 μm, and was fixed to Al ₂ O ₃ abrasive grains having a diameter of 8 μm. The workpiece 9 has a diameter of 12
An optical connector made of a glass ferrule having a diameter of 2.5 mm into which a 5 μm optical fiber was inserted was used. The outer diameter ratio between the motor gear 12 of the motor 11 and the gear 13 of the chuck member 8 is set to 2: 1.
Was rotated twice. 3 from the load pressing means 10 to the workpiece 9
After applying a vertical load of 00 gf, the motor 11
Rotate at pm and preprocess for 2 minutes. Thereafter, a vertical load applied to the workpiece 9 is applied to the load pressing means 1.
0 to 150 gf, and set the motor 11 to 200 gf.
The film was rotated at rpm to perform a finishing process for 2 minutes. In this example, 300 workpieces 9 could be processed continuously. The time required for spherical machining of the workpiece 9 was 4.5 minutes per piece including the time for replacing the workpiece 9. The end face 9a of the workpiece 9 has a spherical surface with a radius of curvature of 20.
A smooth convex spherical mirror surface having a distortion of ± 1 mm and a surface roughness of 0.01 μm Rmax or less was obtained.

In the above-described second embodiment, the polishing tape 6 has a total length of 150 m, a width of 25 mm, a thickness of the substrate 17 of 25 μm, and a coarse abrasive 18 on the surface of the substrate 17 having an Al ₂ diameter of 8 μm. CeO ₃ abrasive grains having a diameter of 0.1 μm were used for the fine abrasive grains 20 covering the surface of the O ₃ abrasive grains. In this embodiment, the apparatus shown in FIG. 1 was used, the material of the polishing table 2 was Teflon, and the radius of curvature of the processed surface was 20 mm. The workpiece 9 was an optical connector made of a glass ferrule having a diameter of 2.5 mm into which an optical fiber having a diameter of 125 μm was inserted. The outer diameter ratio between the motor gear 12 of the motor 11 and the gear 13 of the chuck member 8 is set to 2: 1.
The workpiece 9 was rotated twice each time the. After applying a vertical load of 300 gf to the workpiece 9 from the load pressing means 10, the motor 11 is rotated at 200 rpm to perform preprocessing for 2 minutes. Thereafter, the load in the vertical direction applied to the workpiece 9 was reduced to 150 gf by the load pressing means 10, and the motor 11 was rotated at 200 rpm to perform finishing for 2 minutes. In this embodiment, 30
0 workpieces 9 could be processed. The time required for spherical machining of the workpiece 9 was 4.5 minutes per piece including the time for replacing the workpiece 9. End surface 9 of workpiece 9
For a, a smooth convex spherical mirror surface having a curvature radius of the spherical surface of 20 ± 1 mm and a surface roughness of 0.01 μm Rmax or less was obtained without distortion. Further, an optical connection loss of 0.2 dB or less and a return loss of 40 dB or more were obtained.

In the third embodiment, the polishing tape 6 has a total length of 150 m, a width of 25 mm, a thickness of the substrate 17 of 25 μm, and a highly hard abrasive grain 21 on the surface of the substrate 17 having a diameter of 8 μm. Al ₂ O ₃ using the abrasive grains of the abrasive grain, the low-hardness abrasive grains 22 covering the surface, diameter 0.3μm of Al ₂ O ₃
Abrasive grains were used. In this embodiment, the apparatus shown in FIG. 1 is used, the material of the polishing table 2 is Teflon, and the radius of curvature of the processing surface is 20.
mm. The workpiece 9 was an optical connector made of a glass ferrule having a diameter of 2.5 mm into which an optical fiber having a diameter of 125 μm was inserted. The outer diameter ratio between the motor gear 12 of the motor 11 and the gear 13 of the chuck member 8 was set to 2: 1 and the workpiece 9 was rotated twice each time the motor 11 rotated once.
After applying a vertical load of 300 gf to the workpiece 9 from the load pressing means 10, the motor 11 is rotated at 200 rpm to perform preprocessing for 2 minutes. Thereafter, the vertical load applied to the workpiece 9 is increased by 150 by the load pressing means 10.
gf, the motor 11 was rotated at 200 rpm, and finishing was performed for 2 minutes. In this example, 300 workpieces 9 could be processed continuously. Workpiece 9
The time required for spherical machining of each of them was 4.5 minutes per piece including the time for replacing the workpiece 9. On the end surface 9a of the workpiece 9, a smooth convex spherical mirror surface having a radius of curvature of a spherical surface of 20 ± 1 mm and a surface roughness of 0.01 μm Rmax or less without distortion was obtained. In addition, the optical connection loss 0.
2 dB or less and return loss of 40 dB or more were obtained.

In the fourth and fifth embodiments described above, in this embodiment, the apparatus shown in FIG. 4 is used, the material of the polishing table 2 is vinyl chloride resin, and the grindstone 24 with a shaft is the same as that shown in FIG.
In the shape shown in (a), the radius of the convex spherical shape at the tip is 2
The diameter was set to 0 mm, and diamond abrasive grains 28 having a diameter of 8 μm were attached to the tip. Motor gear 1 of motor 11
The ratio of the outer diameter of the gear 2 to the gear 13 of the chuck member 8 was set to 2: 1, and the grinding wheel 24 with the shaft was rotated twice each time the motor 11 rotated once. 30 from the load pressing means 10 to the whetstone 24 with shaft
After applying a vertical load of 0 gf, the motor 11
m, and the grinding wheel 24 with the shaft was rotated and reciprocated for 3 minutes. Due to the grinding action of the diamond abrasive grains 28 at the tip of the whetstone 24 with a shaft, 20 mm
A concave spherical shape of R was formed. Thereafter, as in the first and third embodiments described above, an optical connector made of a glass ferrule having a diameter of 2.5 mm into which an optical fiber having a diameter of 125 μm was inserted was processed, and similar results were obtained. Was done. Also, after processing 300 optical connectors, the polishing table 2 can be replaced without aligning the center of rotation of the workpiece 9 with the center of the spherical cross section of the processing surface 2a of the polishing table 2, which is required for position adjustment. Time was reduced. Here, the one shown in FIG. 7A is used as the whetstone 24 with a shaft. However, a rod-shaped whetstone having no protruding side surface as shown in FIG. 20m
A mR concave spherical shape could be formed.

In the sixth embodiment described above, in this embodiment, the apparatus shown in FIG. 8 is used, the material of the polishing table 2 is vinyl chloride resin, the material of the jig 29 is SUS303, and the convex spherical surface at the tip is used. The radius of the shape was 20 mm. The polishing tape 6 has a total length of 50 m, a width of 25 mm, and a thickness of the substrate 17 of 25.
μm, and a diamond abrasive having a diameter of 8 μm was used. The outer diameter ratio between the motor gear 12 of the motor 11 and the gear 13 of the chuck member 8 is set to 2: 1.
The jig 29 was rotated twice each time the. After applying a vertical load of 300 gf to the jig 29 from the load pressing means 10, the polishing tape 6 is run at a speed of 100 mm / min by the motor 7, and the motor 11 is rotated at 200 rpm to rotate the jig 29 for 3 minutes. A reciprocating motion was given. Due to the grinding action of the polishing tape 6, 20
A concave spherical shape of mmR was formed. Thereafter, similarly to the above-described first to third embodiments, an optical connector made of a glass ferrule having a diameter of 2.5 mm into which an optical fiber having a diameter of 125 μm was inserted was processed. When the polishing tape of the second embodiment is used, the optical connection loss is 0.2 d.
B, the return loss is 40 dB or more, and when the polishing tape of the third embodiment is used, the optical connection loss is 0.2 dB or less, the return loss is 45 dB or more, and the same as in the second and third embodiments. Results were obtained. Also, after processing 300 optical connectors, the polishing table 2 can be replaced without aligning the center of rotation of the workpiece 9 with the center of the spherical cross section of the processing surface 2a of the polishing table 2, which is required for position adjustment. Time was reduced.

In this embodiment, the workpiece 9 is C
Although the polishing tape 6 is reciprocated in the direction and the polishing tape 6 is made to run in the direction B, it is needless to say that the processing surface 9a of the workpiece 9 can be formed only by moving or running one of them. . In addition, although the workpiece 9 used was a cylindrical ferrule made of glass and a quartz optical fiber inserted therein, a ferrule made of zirconia ceramics or a plastic ferrule was used. Is used, a similar good spherical mirror surface having a convex shape can be obtained. Also, before processing for the coarse abrasive 18 as Al ₂ O _3, was used CeO ₃ as finishing fine abrasive grains 20, the pre-processing coarse abrasive 18 SiC ·
Similar effects can be obtained by using Cr ₂ O ₃ as the diamond and the fine abrasive grains 20 for finishing.

[0023]

As described above, according to the present invention, the load pressing means for pressing the processing surface of the workpiece against the processing surface of the polishing table via the polishing tape is provided. By changing the pressing force, the rough finishing and the fine finishing of the workpiece can be performed in one step, so that the working efficiency is improved.

According to the present invention, the processing surface of the polishing table is processed by a grindstone member or a jig attached to a load pressing means for pressing the processing surface of the workpiece against the processing surface of the polishing table. With this configuration, it is not necessary to align the processing surface of the polishing table with the processing surface of the workpiece, and the efficiency of the operation is improved.

[Brief description of the drawings]

FIG. 1 is a perspective view of a spherical machining apparatus according to the present invention.

FIG. 2 is a sectional view of a polishing tape showing a second embodiment of the spherical machining apparatus according to the present invention.

FIG. 3 is a cross-sectional view of a polishing tape showing a third embodiment of the spherical machining apparatus according to the present invention.

FIG. 4 is a side view showing a fourth embodiment of the spherical machining apparatus according to the present invention.

FIG. 5 is a side view showing a fifth embodiment of the spherical machining apparatus according to the present invention.

FIGS. 6A and 6B are front views showing a main part for explaining the operation of the fifth embodiment of the spherical machining apparatus according to the present invention, wherein FIG. 6A shows a state before machining and FIG. Is shown.

FIG. 7 is an enlarged front view showing a grindstone with a shaft in a fifth embodiment of the spherical machining apparatus according to the present invention.

FIG. 8 is a perspective view showing a sixth embodiment of the spherical machining apparatus according to the present invention.

FIGS. 9A and 9B are front views showing main parts for explaining the operation of the sixth embodiment of the spherical machining apparatus according to the present invention, wherein FIG. 9A shows a state before machining and FIG. 9B shows a state after machining. Is shown.

FIG. 10 is a side view showing a ferrule used for a general optical fiber connector, partially cut away.

FIG. 11 shows a schematic configuration of a conventional spherical machining apparatus;
(A) shows the pre-processing and (b) shows the finishing processing.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Spherical processing device, 2 ... Polishing table, 2a ... Processing surface, 6 ... Polishing tape, 9 ... Workpiece, 10 ... Load changing device, 18 ...
Coarse abrasive grains, 20: fine abrasive grains, 21: high hardness coarse abrasive grains, 22 ...
Low hardness fine abrasive grains, 24 ... whetstone with shaft, 29 ... rod-shaped jig,
Reference numeral 30 denotes an optical connector, 32 denotes an optical fiber, 33 denotes a fiber end face, and 34 denotes a ferrule.

Claims (8)

[Claims] A polishing table having a groove-shaped processing surface having a cross section substantially the same as the processing surface of the workpiece; a polishing tape provided on the processing surface of the polishing table; Load pressing means for pressing the work surface of the work piece to the work surface of the polishing table via a polishing tape, and the work piece, with an axis perpendicular to the work surface passing through the center of the work surface as the rotation center. A spherical machining apparatus comprising: a rotation driving means for rotating; and a movement driving means for reciprocating the workpiece on a processing surface of the polishing table. 2. A polishing table having a processing surface whose cross section is formed in the same shape as the processing surface of the workpiece, a polishing tape provided on the processing surface of the polishing table, and Load pressing means for pressing the work surface of the work to the work surface of the polishing table, and rotation drive means for rotating the work around an axis passing through the center of the work surface and perpendicular to the work surface. And a traveling drive means for traveling the polishing tape with respect to the workpiece. 3. The spherical machining apparatus according to claim 1, wherein the pressing force by the load pressing means is high in the first half of the processing and low in the second half. 4. The spherical machining apparatus according to claim 3, wherein
A spherical machining apparatus characterized in that the polishing tape comprises two layers, a layer of fine abrasive grains provided on the surface side and a layer of a coarse abrasive flow covered by the layer of fine abrasive grains. 5. The spherical machining apparatus according to claim 3, wherein
Abrasive tape, with a layer of low abrasive grains provided on the surface side,
A spherical machining apparatus comprising two layers of high-grade abrasive grains covered with the low-grade abrasive grains layer. 6. A polishing table having a groove-shaped processing surface having a cross section substantially the same as the processing surface of a workpiece, a polishing tape running on the processing surface of the polishing table, and the polishing table. A load pressing means for pressing the work surface of the work to the work surface of the polishing table via a tape; and rotating the work around an axis passing through the center of the work surface and perpendicular to the work surface. A rotating drive means for rotating the polishing table, wherein the polishing tape is removed from the surface of the polishing table, and the processing apparatus is mounted on the load pressing means instead of the workpiece to process the processing surface of the polishing table. A spherical machining apparatus provided with a grindstone member. 7. A polishing tape is placed on a processing surface of a polishing table, and a processing surface of a workpiece is pressed against a processing surface of the polishing table via the polishing tape, and the polishing tape is moved and the workpiece is moved. A spherical processing method for processing a processing surface of a workpiece by a polishing action of a polishing tape by rotating, wherein the polishing tape is removed from a surface of a polishing table, and a grindstone is used instead of the workpiece. After pressing the member against the processing surface of the polishing table and processing the processing surface of the polishing table by the polishing action of the grindstone member, pressing the processing surface of the workpiece on the processing surface of the polishing table via a polishing tape, A spherical processing method, wherein a processing surface of a workpiece is processed by a polishing action of a polishing tape. 8. A polishing tape is arranged on a processing surface of a polishing table, and a processing surface of a workpiece is pressed against the processing surface of the polishing table via the polishing tape, and the polishing tape is moved and the workpiece is moved. A spherical processing method of processing a processing surface of a workpiece by a polishing action of a polishing tape by rotating, pressing a jig instead of the workpiece to a processing surface of a polishing table via a polishing tape, After processing the processing surface of the polishing table with the polishing action of the polishing tape, the work piece is processed by the polishing action of the polishing tape by inverting the front and back of the polishing tape and pressing the workpiece against the processing surface of the polishing table. A spherical surface processing method characterized by processing a surface.