JPH0976499A - Recording device and method by jetting recording liquid - Google Patents

Abstract

PROBLEM TO BE SOLVED: To entirely intercept excess pulling-in from an individual feeding passage by a method wherein a developed air bubble fills a passage just above a heat generating part and, at the same time, intercepts the feeding of recording liquid from the individual feeding passage so as to jet a liquid from a liquid jetting and flying direction guide passage in order to form a flying liquid drop particle. SOLUTION: Through the generation of heat at a heat generating part 4 made of a heating resistor, the change of state due to heat energy develops in recording liquid on the heat generating part, at which the heat energy acts on the recording liquid, resulting in expanding the recording liquid and developing a bubble. The expanded bubble fills a passage 9 just above the heat generating part so as to entirely intercept the feeding of the recording liquid from a recording liquid individual feeding passage 8 and, at the same time, jet the recording liquid filled in the portion ranging to a recording liquid jetting port 13 in a recording liquid jetting and flying direction guide passage 12 at a single shot so as to produce a flying liquid drop particle in order to fly it against an object 19 to a predetermined jetting and flying direction. The flying liquid drop particle of the recording liquid flying toward the object 19 adheres to the object 19 turning into an adhered recording liquid 20 consisting of character, image or the like.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention heats a required liquid for recording by a heating means according to a signal such as a character or an image, and ejects droplets of the required liquid by the action of bubbles generated. The present invention relates to a recording apparatus and a recording method by ejecting a recording liquid, which ejects a jet from an outlet onto a recording object and records characters, images, and the like without impact.

[0002]

2. Description of the Related Art For non-impact recording devices,
Recording methods and recording devices such as an electrostatic recording method, an electrophotographic method, a thermal recording method, and an ink jet method have been announced. One of them is to heat the recording liquid and to generate the recording liquid by the action of bubbles generated. 2. Description of the Related Art There is a recording apparatus using an ink jet method in which droplet particles are jetted from an ejection port and recorded. A recording apparatus using the above-mentioned ink jet method according to the prior art includes a liquid passage having a discharge port for ejecting a recording liquid in a predetermined direction to form flying droplets, and a refraction portion communicating with the discharge port, in a recording head portion. And a heating element provided in the bending portion of the liquid passage for causing the recording liquid to change state due to heat.

FIG. 4 is an operation explanatory view of a recording liquid passage and a heat generating portion of a recording head used in a conventional recording apparatus. A liquid passage having a refraction portion communicating with an ejection port and a state where the recording liquid is heated. 3 shows a portion of a recording head including a heating element provided in a bending portion of a liquid passage for generating a change. 4, the recording liquid is filled in the recording liquid supply passage 41 and the recording liquid discharge passage 43, and the surface tension of the recording liquid at the recording liquid discharge port 44 and the recording liquid tank of the recording liquid (not shown). The supply pressure from) is in a balanced state. Heating element 4 provided in the bending portion of the recording liquid passage
2 is driven by a drive signal according to characters, images, etc. to heat the heating element 42, change the state of the recording liquid due to heat, generate bubbles, and eject the recording liquid from the recording liquid ejection port 44. Then, flying droplets are formed, and characters, images, etc. are recorded on the recording object.

In the conventional recording apparatus, if the entire shape of the heating element 42 is so large as to block the entire circumference of the recording liquid passage at the bending portion of the recording liquid passage, the supply of the recording liquid is hindered. Further, as shown by an arrow in FIG. 4, it is necessary to form the recording liquid passage so as not to block the entire circumference of the recording liquid passage and to incline it so as not to hinder the supply of the recording liquid. Due to the entrainment of the liquid, there is a problem that the jetting effect is poor and the jetted droplets of jetting are not well cut. A technique for a recording apparatus using the ink jet method is disclosed in, for example, Japanese Patent Publication No. 63-6356, and a passage for ejecting a recording liquid,
Providing a relationship with the heating surface of the heating element, long-term continuous recording,
A printing apparatus is disclosed for the purpose of providing multiple nozzles (plurality of ejection ports).

FIG. 5 is an explanatory view of a conventional manufacturing method of a passage centering on a heat generating portion of a recording head used in a recording apparatus. A recording liquid supply passage 51 and a passage 54 directly above the heat generating portion are shown. When the recording liquid ejection flight direction guide passage 53 is formed, a mechanical combination method or the like is performed after the electroforming, and the recording liquid supply passage 51 and the passage 54 immediately above the heat generating portion are formed.
The entrance of the recording liquid jetting flight direction guide passage 53 in the upper part of the is a mortar shape, and when forming a multi-nozzle recording head, the processing process is not always easy, and the manufacture of the high-definition multi-nozzle recording head is restricted. Was there. Therefore, in the recording head manufactured by the conventional technique,
Regarding the area of the heat generating portion 52, the cross-sectional area of the passage 54 directly above the heat generating portion facing the heat generating portion on the communication side with the recording liquid ejection flight direction guide passage 53 is larger in the latter than in the former, and the recording liquid is larger. It becomes easy for the recording liquid to be entangled from the supply passage 51. Therefore, accompanying the extra droplets of the recording liquid, the droplets become large, which is not suitable for higher speed due to the effects of higher definition and sharpness.

[0006]

In the conventional recording apparatus and recording method by jetting the recording liquid, the recording liquid is heated by a heating element to generate a state change due to thermal energy, and the recording liquid is jetted by the generated bubbles. When flying droplet particles are ejected from the outlet, excess recording liquid is drawn from the recording liquid supply passage communicating with the recording liquid passage provided with a heat generating portion where thermal energy acts on the recording liquid, and flying droplet particles are formed. There is a problem in that the breakage of the droplets becomes worse and an extra amount of accompanies the flying droplet particles. In order to solve the above problems, the present invention provides a heat generating portion, a passage just above the heat generating portion,
A recording liquid individual supply passage communicating with a passage directly above the heat generating portion;
A recording head having a recording liquid ejection flight direction guide passage communicating with a passage directly above the heat generating portion is provided, and the recording liquid is heated by the heat generating portion to cause a state change due to thermal energy. Of the recording liquid is ejected from the recording liquid ejection flight direction guide passage to form flying droplet particles, and the recording liquid is individually supplied from the recording liquid individual supply passage which is communicated by the bubbles filling the passage just above the heat generating portion. An object of the present invention is to provide a recording apparatus and a recording method by ejecting a recording liquid so that the drawing-in of excess recording liquid is completely blocked.

[0007]

In order to achieve the above-mentioned object, a recording apparatus for ejecting recording liquid according to the present invention comprises a plurality of recording liquid ejection passages for ejecting recording liquid from ejection ports, and a plurality of recording liquid ejection passages. A recording head having a supply passage and a plurality of heat generating parts for heating the recording liquid, wherein the heat generating part heats the recording liquid to cause a state change in the recording liquid due to thermal energy. In a recording device that ejects the recording liquid from the ejection port and ejects the recording liquid to form flying droplet particles, a plurality of heat generating portions that are portions where thermal energy generated in the heat generating portion acts on the recording liquid. , A plurality of recording liquid individual supply passages communicating with the passage just above the heat generating portion, and a plurality of recording liquid jet flight direction guide passages communicating with the passage just above the heat generating portion. A recording head having a semiconductor circuit electrically connected to the heat generating portion and driving the heat generating portion by a drive signal, and driving the heat generating portion by the drive signal input to the semiconductor circuit to drive the heat generating portion. The recording liquid is heated in response to a signal, a state change is generated in the recording liquid by thermal energy, bubbles are generated, and the bubbles fill the passage just above the heat generating portion, The supply of the recording liquid is cut off, and the recording liquid is ejected from the recording liquid ejection flight direction guide passage to form flying droplet particles.

More specifically, in the recording apparatus for ejecting the recording liquid of the present invention, the plurality of heat generating portions and the passages directly above the plurality of heat generating portions have at least the area of the heat generating portion and the surface of the heat generating portion. It is formed to be larger than the cross-sectional area of the passage directly above the heat generating portion on the communication side with the recording liquid ejection flight direction guide passage. Further, in the recording apparatus for ejecting the recording liquid according to the present invention, the heat generating portion and a part of the passage just above the heat generating portion are arranged so that at least the area of the heat generating portion faces the surface of the heat generating portion. It is formed to be larger than the cross-sectional area of the passage directly above the communication side with the recording liquid ejection flight direction guide passage.

Further, the recording apparatus for ejecting recording liquid according to the present invention has a plurality of recording liquid ejection passages for ejecting the recording liquid from the ejection ports, a plurality of supply passages for the recording liquid, and a plurality for heating the recording liquid. A recording head having a heat generating part, wherein the heat generating part heats the recording liquid to cause a state change in the recording liquid due to thermal energy, and the recording liquid is ejected from the ejection port to fly. In a recording apparatus that ejects recording liquid to form droplet particles, a plurality of passages directly above the heat generating portion, which are portions where thermal energy generated in the heat generating portion acts on the recording liquid, and a passage just above the heat generating portion. A plurality of recording liquid individual supply passages that communicate with each other, and a plurality of recording liquid ejection flight direction guide passages that communicate with the passage just above the heat generating portion are provided. And vector, the included angle Θ is 45 ° to form in the axial direction of the vector of the recording liquid separately supplied passage <
Θ <105 °, preferably about 60 ° <Θ <about 90 °, and an included angle Φ formed by the vector in the axial direction of the passage directly above the heat generating portion and the vector in the axial direction of the recording liquid ejection flight direction guide passage. Is set to 0 ° <Φ ≦ 45 °, and the recording head is electrically connected to the heat generating portion and has a semiconductor circuit for driving the heat generating portion in response to a drive signal. The heating signal is driven by a driving signal, the recording liquid is heated in response to the driving signal, a state change is caused in the recording liquid by thermal energy, bubbles are generated, and the bubbles directly above the heating unit. Filled with
The supply of the recording liquid from the individual recording liquid supply passage is cut off, and the recording liquid is ejected from the recording liquid ejection flight direction guide passage to form flying droplet particles.

Further, the recording apparatus for ejecting the recording liquid according to the present invention has a plurality of heat generating portions, passages directly above the heat generating portions, a plurality of recording liquid ejection flight direction guide passages, and a plurality of semiconductor circuits. A recording head, the semiconductor circuit, which comprises a recording drive circuit for driving the heat generating portion and a recording signal circuit for inputting and transferring recording data to the recording drive circuit on a semiconductor substrate by a semiconductor process; In addition to forming the heat generating portion formed of a thin film heat generating resistor and a driving electrode, the recording liquid individual supply passage, a passage just above the heat generating portion, and the recording liquid jetting flight direction guide passage are formed. It was done. Also, in the recording method by jetting the recording liquid according to the present invention, the recording liquid is heated by the heat generating portion to cause a state change in the recording liquid due to thermal energy, and the recording liquid is jetted and ejected from the jet port of the jet passage In a recording method by ejecting a recording liquid for forming droplet particles, a passage directly above a heat generating portion, which is a portion where thermal energy generated in the heat generating portion acts on the recording liquid, communicates with a passage just above the heat generating portion. At least three recording liquid ejection flight direction guide passages communicating with the recording liquid individual supply passage and the passage directly above the heat generating portion are provided, and are electrically connected to the heat generating portion and drive the heat generating portion by a drive signal. A recording head having a semiconductor circuit is provided, and the recording liquid is heated by driving the heat generating portion by a drive signal input to the semiconductor circuit, and thermal energy is applied to the recording liquid. A bubble is generated due to a state change, and the bubble fills a passage just above the heat generating portion, shuts off the supply of the recording liquid from the recording liquid individual supply passage, and the recording liquid is ejected from the flight direction guide passage to perform the recording. It ejects liquid to form flying droplet particles.

In operation, the recording apparatus for ejecting the recording liquid according to the present invention has a plurality of recording liquid ejection passages for ejecting the recording liquid from the ejection ports, a plurality of supply passages for the recording liquid, and a plurality for heating the recording liquid. And a recording head having a heat generating part, wherein the heat generating part heats the recording liquid,
A recording apparatus for ejecting the recording liquid from the ejection port to generate flying droplet particles by causing a state change in the recording liquid due to thermal energy, wherein the thermal energy generated in the heat generating portion is A plurality of passages just above the heat generating portion that act on the recording liquid, a plurality of recording liquid individual supply passages that communicate with the passages directly above the heat generating portion, and a plurality of recordings that communicate with the passages directly above the heat generating portion. A recording head having at least three liquid ejection flight direction guide passages, electrically connected to the heat generating portion, and having a semiconductor circuit for driving the heat generating portion in response to a drive signal, is provided to the semiconductor circuit. Drive the heat generating portion by the drive signal
The recording liquid is heated according to the drive signal, a state change is caused in the recording liquid by thermal energy, bubbles are generated, and the bubbles fill the passage just above the heat generating portion, and the recording liquid individual supply passage The supply of the recording liquid from the recording liquid is cut off, and the recording liquid is ejected from the recording liquid ejection flight direction guide passage to form flying droplet particles.

Further, the recording apparatus for ejecting the recording liquid according to the present invention has a plurality of recording liquid ejection passages for ejecting the recording liquid from the ejection ports, a plurality of supply passages for the recording liquid, and a plurality of heating units for heating the recording liquid. A recording head having a heat generating part, wherein the heat generating part heats the recording liquid to generate a state change due to thermal energy in the recording liquid, and ejects the recording liquid from the ejection port to produce a flight liquid. A recording apparatus for ejecting a recording liquid that forms droplets, wherein a plurality of passages are provided directly above the heat generating portion, where heat energy generated in the heat generating portion acts on the recording liquid, and passages just above the heat generating portion. A plurality of recording liquid individual supply passages communicating with the recording liquid ejecting flight direction guiding passages communicating with the passages directly above the heat generating portion, and an axial direction of the passages directly above the heat generating portion. The And torr, the included angle theta is 45 ° to form in the axial direction of the vector of the recording liquid separately supplied passage <theta <
The included angle Φ formed by the vector in the axial direction of the passage directly above the heat generating portion and the vector in the axial direction of the recording liquid ejection flight direction guide passage is 0 at 105 °, preferably about 60 ° <θ <90 °. ° <Φ ≤ 45 ° is set, the recording head is electrically connected to the heat generating portion and has a semiconductor circuit for driving the heat generating portion by a drive signal, and the drive signal input to the semiconductor circuit is provided. To drive the heat generating part to heat the recording liquid in response to the drive signal, generate a state change in the recording liquid due to thermal energy, generate bubbles, and the bubbles fill the passage just above the heat generating part. Then, the supply of the recording liquid from the individual recording liquid supply passage is cut off, and the recording liquid is ejected from the recording liquid ejection flight direction guide passage to form flying droplet particles.

Further, in the recording method by ejecting the recording liquid according to the present invention, the recording liquid is heated in the heat generating portion to cause a state change in the recording liquid due to thermal energy, and the recording liquid is ejected from the ejection port of the recording liquid ejection passage. A recording method by jetting a recording liquid to form jetted flying droplet particles, which is a path directly above the heating portion where heat energy generated in the heating portion acts on the recording liquid, and above the heating portion. At least three passages of the recording liquid individual supply passage communicating with the passage of the recording liquid and the recording liquid ejection flight direction guide passage communicating with the passage just above the heat generating portion, and electrically connected to the heat generating portion A recording head having a semiconductor circuit for driving a heat generating portion is provided, and the recording liquid is heated by driving the heat generating portion with a drive signal input to the semiconductor circuit, and the recording liquid is converted into the recording liquid. Energy is used to generate bubbles due to a change in state, the bubbles fill the passage just above the heat generating portion, and the supply of the recording liquid from the recording liquid individual supply passage is cut off, and the recording liquid jetting flight direction guide passage is provided. The recording liquid is ejected to form flying droplet particles.

[0014]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of a recording apparatus and a recording method by jetting a recording liquid according to the present invention will be described with reference to FIGS.
Use to explain. FIG. 1 is a partially enlarged explanatory view of a recording head used in a recording apparatus for ejecting a recording liquid of the present invention, which is a diagram centering on a heat generating portion that heats the recording liquid to eject and eject the recording liquid. . In FIG. 1, reference numeral 1 denotes a recording head of a recording apparatus that ejects recording liquid, and 2
Is a semiconductor substrate made of, for example, silicon (Si), 4 is a heating portion made of a heating resistor, 3 is a semiconductor circuit provided on the semiconductor substrate 2 for driving the heating portion 4, and 5 is a semiconductor circuit 3.
A drive electrode for connecting the heating section 4 to the heating section 4, 6 a wiring electrode in the semiconductor circuit 3, 8 a recording liquid individual supply passage, 9
Is a passage directly above the heat generating portion 4, and 7 is a passage 9 immediately above the heat generating portion 4.
A partition forming a part of the above, 10 a supply passage cover, 11 an outer wall, 12 a recording liquid ejection flight direction guide passage communicating with the passage 9 directly above the heat generating portion 4, and 13 a recording liquid ejecting flight. A liquid jet is shown. It should be noted that the recording head has a plurality of heat generating portions, semiconductor circuits, individual recording liquid supply passages, passages directly above the heat generating portion 4, recording liquid ejection flight direction guide passages, recording liquid ejection outlets, etc. Each is described as one.

FIG. 2 is a block diagram of a recording head formed by a semiconductor manufacturing process used in a recording apparatus for ejecting a recording liquid according to the present invention. In FIG. 2, 14 is a common supply passage communicating with the plurality of individual recording liquid supply passages 8,
Reference numeral 15 is a recording liquid communication passage communicating with the common supply passage 14 for recording liquid, 16 is a frame head mounting frame,
Reference numeral 7 represents a recording liquid in-frame common supply passage communicating with the recording liquid communication passage 15, and 18 represents a recording liquid tank communicating with a recording liquid in-frame common supply passage 17. Further, FIG. 2 shows an enlarged configuration of a main part of the recording head 1 in order to facilitate understanding of the relationship between the recording liquid passage and the recording liquid ejection port. 2 is a main part showing the arrangement of a plurality of recording liquid ejection ports 13.
2 and 23 are the recording liquid individual supply passage 8 and the common supply passage 1
4 is a main part showing a related arrangement between the heat generating portion 4 and the like. In addition,
Since the same parts as those in FIG. 1 are the same, their explanations are omitted.

In FIGS. 1 and 2, the recording liquid is communicated from the recording liquid tank 18 to the common supply passage 17 in the frame for the recording liquid and the communication passage 1 for the recording liquid.
5, the recording liquid common supply passage 14 and the recording liquid individual supply passage 8 fill the passage 9 directly above the heat generating portion and the recording liquid jet flight direction guide passage 12, and the recording liquid jets 1
The surface tension of the recording liquid at the recording liquid ejection port 13 and the supply pressure from the recording liquid tank 18 (by a pump (not shown) or the like) are balanced to such an extent that they do not eject from the recording liquid ejection port 13. In this balanced state, when a driving signal corresponding to a character to be recorded, an image, or the like is input to the semiconductor circuit 3 electrically connected to the heat generating portion 4 including a heat generating resistor, the heat generating portion 4 is A current according to the drive signal flows, and the heat generating portion 4 rapidly generates heat.

When the heat-generating portion 4 formed of a heat-generating resistor generates heat, the recording liquid undergoes a state change due to the heat energy on the heat-generating portion 4, which is a portion where the heat energy acts on the recording liquid, and the recording liquid expands. Generate bubbles. This expanded bubble fills the passage 9 directly above the heat generating portion, completely shuts off the supply of the recording liquid from the individual recording liquid supply passage 8 (a complete shutoff will be described later), and the recording liquid is ejected. Recording liquid ejection port 13 in flight direction guide passage 12
The recording liquid, which has been filled up to, is jetted all at once to form flying droplet particles, which are then jetted toward the recording target 19 in a predetermined jetting flight direction. The flying droplet particles of the recording liquid that have flown onto the recording target 19 adhere to the recording target 19 and become the recording liquid 20 that adheres to form characters, images, and the like.

Further, by using the explanatory diagram of the basic configuration of the present invention shown in FIG. 3, the heat generating portion 4 is rapidly heated by a drive signal corresponding to a character or an image to be recorded, and the recording liquid is brought into a state of thermal energy. Passage 9 directly above the heat generating part
The recording device and the recording method for recording characters, images, etc. on a recording object by filling the recording medium with air bubbles and ejecting the recording liquid in the flight direction guide passage 12 to form flying droplet particles To do. The basic operation of the recording apparatus and the recording method by jetting the recording liquid of the present invention is such that the heat generating portion 4 formed of a heat generating resistor is centered on the passage 9 directly above the heat generating portion which is a portion where thermal energy acts on the recording liquid. , Passage 9 directly above the heat generating part
The recording liquid individual supply passage 8 for communicating the recording liquid to the passage 9 directly above the heat generating portion, and the recording liquid is filled, and the recording liquid jet port 1 is filled with the bubbles filled in the passage 9 directly above the heat generating portion.
The recording liquid ejection flight direction guide passage 12 for ejecting the recording liquid from 3 in a predetermined direction to form flying droplet particles and at least three passages work, and the effect of the present invention is possible.

Further, in the structure having the three passages,
As shown in FIG. 3 as an example, the area Sr of the heat generating part 4 (an example of a quadrangle is shown) and the passage 9 (a circular example is shown) just above the heat generating part facing the surface of the heat generating part 4 are shown. The relationship between the recording liquid ejection flight direction guide passage 12 and the cross-sectional area St on the communication side is set to an area Sr ≧ cross-sectional area St so that at least the former is larger than the latter, that is, the entire passage 9 directly above the heat generating portion. The effect of the present invention can be achieved by forming the circumference within the entire circumference of the heat generating portion 4. The relationship between the area Sr of the heat-generating portion 4 and the cross-sectional area St of the passage 9 directly above the heat-generating portion may be either all of the area Sr ≧ cross-sectional area St or a part of the area Sr ≧ cross-section, depending on the desired purpose. The area St can be set. Furthermore, in the above-described three-passage configuration, the recording liquid jet flight of the side Lr of the heat generating portion 4 (long side in the case of a rectangle) and the passage 9 directly above the heat generating portion facing the surface of the heat generating portion 4. The relationship with the side Lt of the cross section on the side communicating with the direction guide passage 12 (the diameter is a circle, the long diameter is an ellipse) is set to Lr ≧ side Lt, and at least the former is larger than the latter. hand,
The recording liquid is heated to cause a state change, the recording liquid is expanded to generate bubbles, and the bubbles filled in the passage 9 directly above the heat generating portion are formed so as to block the passage 9 directly above the heat generating portion. The effect of the invention becomes possible.

Further, in the above-mentioned basic structure, FIG.
As shown in FIG.
And the included angle Θ formed by the axial direction vector B of the recording liquid individual supply passage 8 is 60 ° <Θ <90 °. (Limited values of the included angle Θ of 60 ° and 90 ° are slightly different (for example, 45 ° <
Θ <105 °) is a value that is practically acceptable even if the width is about 60 ° <Θ <90 °. ) By setting the included angle Θ in the range of 60 ° <Θ <90 ° in this manner, the recording liquid undergoes a state change due to thermal energy in the heating portion 4 formed of a heating resistor, the recording liquid expands, and bubbles are generated. The bubbles filled in the passage 9 directly above the heat generating portion have an effect of completely interrupting the supply of the recording liquid from the individual supply passage 8 of the recording liquid. This effect is achieved by the bubbles generated by the expansion of the recording liquid, the peripheral wall of the passage 9 (including the partition wall 7) immediately above the heat generating portion, the area Sr ≧ and the cross-sectional area St of the heat generating portion 4 and the passage 9 immediately above the heat generating portion, It depends on the effect of the side Lr ≧ the side Lt. If the included angle Θ is smaller than 90 °, the recording liquid is cut off easily and the recording becomes clear, but it is difficult to make it too small, and ideally 90 °.
A more acute angle is desirable, and conversely, as shown in FIG. 4, the more obtuse the angle exceeds 90 °, the more easily the recording liquid is entrained from the individual recording liquid supply passage 8.

Further, as shown in FIGS. 1 and 3, in the above structure, the vector C in the axial direction of the recording liquid jet flight direction guide passage 12 or an extension of the vector C and the axis of the passage 9 directly above the heat generating portion. The included angle Φ formed by the direction vector A is 0 ° <Φ ≦ 45 °. Although FIG. 1 shows an example in which the vector C in the axial direction of the recording liquid ejection flight direction guide passage 12 is provided in the moving direction of the recording object 19, the axis of the recording liquid ejection flight direction guide passage 12 is shown. The vector C of the direction may be a desired direction, for example, the passage 9 directly above the heat generating portion.
Alternatively, the included angle Φ formed by the vector A in the axial direction may be maintained and the direction opposite to the moving direction of the recording object 19 may be maintained. When the included angle Φ is set to 0 ° <Φ ≦ 45 °, the recording liquid filled in the passage 9 directly above the heat generating portion is heated by the heat generating portion 4 in the heat generating portion 4 made of a heat generating resistor, and thus the recording liquid is generated. A state change due to thermal energy is caused to expand the recording liquid to generate bubbles, and the bubbles are formed so as to close the entire circumference of the passage. In parallel with the above, the temperature rises sharply along the vector A in the axial direction of the passage 9 just above the heat generating portion. This action is a means for effectively utilizing the heat energy of the heat generating section 4,
This is made possible by separating and combining the means for ejecting and flying the recording liquid in the required direction.

As described above, in the recording apparatus for ejecting the recording liquid of the present invention, the heat generating portion 4 formed of the heat generating resistor is centered,
At least three passages, that is, the passage 9 directly above the heat generating portion, the recording liquid individual supply passage 8, and the recording liquid jetting flight direction guide passage 12, are provided, and the area Sr of the heat generating portion 4 and the heat generating portion 4 are provided.
Of the passage 9 directly above the heat generating portion facing the surface of the recording liquid, and the cross-sectional area St on the communication side with the recording liquid ejection flight direction guide passage 12,
With the area Sr ≧ cross-sectional area St, the included angle formed by the axial vectors of the three passages is 45 ° <Θ <105.
By forming 0 °, 0 ° <Φ ≦ 45 °, the bubbles generated by the heat energy of the heat generating portion 4 driven by the drive signal completely cut off the supply of the recording liquid to the passage 9 directly above the heat generating portion. At the same time, the recording liquid is ejected from the recording liquid ejection port by the extension of the passage 9 just above the heat generating portion and the recording liquid ejection flight direction guide passage 12 by the action of a water gun, so that excess droplet particles of the recording liquid are generated. Accompaniment is completely prevented, and droplet particles are smaller, which is suitable for higher definition, and the sharpness allows higher speed. As shown in FIG. 3, the effective portion of the passage 9 just above the heat generating portion has a length Lm from the surface of the heat generating portion 4 to the inlet side surface of the recording liquid ejection flight direction guide passage 12. Therefore, as long as the operation of the present invention occurs, the thickness of the passage cover 10 may be t ≧ 0.

Next, the formation of the above-described recording head used in the recording liquid jetting recording apparatus of the present invention by the semiconductor process will be described. High-definition recording is possible,
In order to provide a recording apparatus and a recording method by jetting a recording liquid using a multi-nozzle recording head with high productivity, the heating resistor of the heating portion 4 which is the heating resistor of the recording head 1 used in the present invention is made of metal. An oxide thin film heating resistor such as Ta-Si-SiO is used, and a special protective layer is not required on the heating resistor. For this,
The action of the generated heat energy on the recording liquid is extremely effective, and the action can be performed with energy smaller by one digit or more than the conventional one. Therefore, on the semiconductor substrate 2, the semiconductor circuit 3 including a recording drive circuit for driving the heating resistor of the heating section 4 and a recording signal circuit for inputting and transferring the recording data to the recording drive circuit, and the heat generation. A heating portion 4 made of a resistor,
The drive electrode 5 can be formed by a semiconductor process.

The formation of the recording head 1 shown in FIGS. 1 and 2 by the semiconductor process is carried out by the general oxidation in the semiconductor process.
It can be formed by a combination of etching, film (oxide film) formation, layer (epitaxial layer) formation, diffusion, sputtering, vapor deposition, annealing and the like. On the semiconductor substrate 2, there is formed a semiconductor drive circuit 3 for driving a heat generating portion 4 composed of a heat generating resistor, and a semiconductor circuit 3 including a recording signal circuit for inputting and transferring recording data to the recording drive circuit. After forming the heating portion 4 made of a heating resistor and the driving electrode 5, the recording liquid communication passage 15 by etching, the partition wall 7 by adhesion, exposure, development and resist removal of the water resistant film resist, and a plurality of recording liquids. The individual supply passage 8 and a part of the passage 9 directly above the heat generating portion are formed, and then the passage cover 10 formed by sticking a PET film and a portion of the passage 9 right above the heat generating portion formed by etching, for example, a PET film sticking And the process of forming a plurality of recording liquid ejection flight direction guide passages 12 and recording liquid ejection ports 13 by etching by oblique exposure. .

As another means for forming the recording liquid jet flight direction guide passage 12 and the recording liquid jet port 13, an outer wall 11 is provided.
There is a means for producing a plate of the outer wall 11 in advance by using, for example, photosensitive glass (for example, glass ceramics PEG3 made by HOYA etc.) as the material, and a thickness of 50 to 100 μm is also possible. Prefabricated outer wall 1 of the same size as the semiconductor substrate 2 wafer
The plate of No. 1 is the semiconductor substrate 2 on which the partition wall 7 is formed.
Of the multi-nozzle recording head is aligned and bonded to the wafer of FIG.
Install on top. With such a process, various high definition recording pitches of 600 dpi or more (dot size of 40 μm or less), low power (3 μJ), which is one digit or more smaller than conventional ones, and speed of one digit or more of conventional recording time (1 M
It is possible to realize an excellent multi-nozzle recording head (100 to several thousand nozzles) that is inexpensive and inexpensive.

[0026]

According to the present invention, the heat generating portion, the passage just above the heat generating portion, the recording liquid individual supply passage communicating with the passage just above the heat generating portion, and the recording liquid communicating with the passage just above the heat generating portion. Equipped with a recording head having a jetting flight direction guide passage, the recording liquid is heated by the heat generating portion to generate a state change due to thermal energy, and the generated bubbles fill the passage just above the heat generating portion,
The recording liquid is ejected from the recording liquid ejection flight direction guide passage to form flying droplet particles, and the extra recording liquid is drawn from the individual recording liquid supply passages which are communicated by the bubbles filling the passage just above the heat generating part. It is possible to provide a recording apparatus and a recording method by jetting a recording liquid that completely shuts off the recording liquid. When Φ = 0, even if the passage directly above the heat generating portion and the recording liquid ejection flight direction guide passage become a straight line, the effect in the passage directly above the heat generating portion is the same.

[Brief description of drawings]

FIG. 1 is a partially enlarged explanatory view of a recording head used in an apparatus of the present invention.

FIG. 2 is a configuration diagram of a recording head formed by a semiconductor process used in the apparatus of the present invention.

FIG. 3 is an explanatory diagram of a basic configuration relationship of the present invention.

FIG. 4 is an operation explanatory diagram of a recording liquid passage and a heat generating portion of a recording head used in a conventional apparatus.

FIG. 5 is a manufacturing explanatory diagram of a passage of a heat generating portion of a recording head used in a conventional apparatus.

[Explanation of symbols]

1 ... Recording head, 2 ... Semiconductor substrate, 3 ... Semiconductor circuit, 4
... Heating portion, 5 ... Driving electrode, 6 ... Wiring electrode, 7 ... Partition wall,
8 ... Individual supply passage for recording liquid, 9 ... Passage directly above heat generating part, 1
0 ... Passage cover, 11 ... Outer wall, 12 ... Recording liquid ejection flight direction guide passage, 13 ... Recording liquid ejection port, 14 ... Recording liquid common supply passage, 15 ... Recording liquid communication passage, 16 ... Recording head mounting frame base , 17 ... Common supply passage for recording liquid in frame, 18 ... Recording liquid tank, 19 ... Recording object, 20 ... Recording liquid, 41 ... Recording liquid supply passage, 42
Heating element 43 recording liquid discharge passage 44 recording liquid discharge port 51 recording liquid supply passage 52 heating portion 53
A recording liquid ejection flight direction guide passage, 54 a passage just above the heat generating portion, 55 a drive electrode, 56 a partition wall, 57 an outer wall.

Claims (7)

[Claims] 1. A plurality of recording liquid ejection passages for ejecting the recording liquid from ejection ports, and a plurality of supply passages for the recording liquid,
A recording head having a plurality of heat generating parts for heating the recording liquid, wherein the heat generating part heats the recording liquid to cause a state change in the recording liquid due to thermal energy, In a recording apparatus that ejects the recording liquid and ejects the recording liquid to form flying droplet particles, a plurality of passages directly above the heat generating portion, which is a portion where thermal energy generated in the heat generating portion acts on the recording liquid, A plurality of recording liquid individual supply passages communicating with the passages directly above the heat generating portion and a plurality of recording liquid jet flight direction guide passages communicating with the passages directly above the heat generating portion are provided, and the heat generating portion is electrically connected. A recording head having a semiconductor circuit that is electrically connected to each other and drives the heat generating portion by a drive signal, and drives the heat generating portion by the drive signal input to the semiconductor circuit. Heating said recording liquid according to,
The recording liquid is caused to undergo a state change due to thermal energy, bubbles are generated, the bubbles directly fill the passage immediately above the heat generating portion, and the supply of the recording liquid from the recording liquid individual supply passage is cut off, and the recording is performed. A recording apparatus for ejecting recording liquid, characterized in that the recording liquid is ejected from a liquid ejection flight direction guide passage to form flying droplet particles. 2. The heating element according to claim 1, wherein the plurality of heat generating portions and the passages directly above the plurality of heat generating portions have at least an area of the heat generating portion directly above the heat generating portion facing the surface of the heat generating portion. The recording apparatus for ejecting the recording liquid is characterized in that the recording liquid is ejected in a larger size than the cross-sectional area of the passage on the side communicating with the flight direction guide passage. 3. The heating element according to claim 1, wherein a part of the plurality of heat generating portions and the passages directly above the plurality of heat generating portions are at least:
The area of the heat generating portion is formed to be larger than the cross-sectional area of the passage directly above the heat generating portion facing the surface of the heat generating portion on the communication side with the recording liquid ejection flight direction guide passage. Recording device that ejects recording liquid. 4. A plurality of recording liquid ejection passages for ejecting the recording liquid from ejection ports, and a plurality of supply passages for the recording liquid,
A recording head having a plurality of heat generating parts for heating the recording liquid, wherein the heat generating part heats the recording liquid to cause a state change in the recording liquid due to thermal energy, In a recording apparatus that ejects the recording liquid and ejects the recording liquid to form flying droplet particles, a plurality of passages directly above the heat generating portion, which is a portion where thermal energy generated in the heat generating portion acts on the recording liquid, A plurality of recording liquid individual supply passages communicating with the passages directly above the heat generating portion and at least three passages of a plurality of recording liquid jetting flight direction guide passages communicating with the passages directly above the heat generating portion are provided. The included angle θ formed by the vector in the axial direction of the passage and the vector in the axial direction of the recording liquid individual supply passage is 45 ° <Θ <105 °, and the vector in the axial direction of the passage just above the heat generating portion, Before The included angle Φ formed by the vector in the axial direction of the recording liquid ejection flight direction guide passage is set to 0 ° <Φ ≦ 45 °, and is electrically connected to the heat generating portion, and the heat generating portion is driven by the drive signal. A recording head having a semiconductor circuit to be driven is provided, the heat generating portion is driven by a drive signal input to the semiconductor circuit, and the recording liquid is heated according to the drive signal,
The recording liquid is caused to undergo a state change due to thermal energy, bubbles are generated, the bubbles directly fill the passage just above the heat generating portion, and the supply of the recording liquid from the recording liquid individual supply passage is cut off, and the recording is performed. A recording apparatus for ejecting recording liquid, characterized in that the recording liquid is ejected from a liquid ejection flight direction guide passage to form flying droplet particles. 5. The heating element according to claim 4, wherein the plurality of heat generating portions and the passages directly above the plurality of heat generating portions have at least the area of the heat generating portion directly above the heat generating portion facing the surface of the heat generating portion. The recording apparatus for ejecting the recording liquid is characterized in that the recording liquid is ejected in a larger size than the cross-sectional area of the passage on the side communicating with the flight direction guide passage. 6. The apparatus according to claim 1, further comprising: a plurality of heat generating portions, passages directly above the heat generating portions, a plurality of recording liquid ejection flight direction guide passages, and a plurality of semiconductor circuits. The recording head has a semiconductor circuit including a recording drive circuit for driving the heat generating part and a recording signal circuit for inputting and transferring recording data to the recording drive circuit on a semiconductor substrate by a semiconductor process. A heating electrode formed of a thin film heating resistor and a driving electrode are formed, and the recording liquid individual supply passage, a passage directly above the heating portion, and the recording liquid ejection flight direction guide passage are formed. A recording apparatus for ejecting a recording liquid, which is formed. 7. A recording liquid which heats the recording liquid in a heat generating portion to cause a state change in the recording liquid due to thermal energy, and ejects the recording liquid from an ejection port of a recording liquid ejection passage to form flying droplet particles. In the recording method by jetting, a passage directly above the heat generating portion, which is a portion where the thermal energy generated in the heat generating portion acts on the recording liquid, and a recording liquid individual supply passage communicating with the passage directly above the heat generating portion, A recording head having at least three passages of recording liquid ejection flight direction guide passages communicating with a passage just above the heat generating portion, the recording head having a semiconductor circuit electrically connected to the heat generating portion and driving the heat generating portion by a drive signal. And heating the recording liquid by driving the heat generating portion with a drive signal input to the semiconductor circuit to generate bubbles in the recording liquid due to a change in state with thermal energy, The air bubbles fill the passage just above the heat generating portion, the supply of the recording liquid from the individual recording liquid supply passage is shut off, and the recording liquid is ejected from the recording liquid ejection flight direction guide passage to eject flying droplet particles. A recording method by ejecting a recording liquid, characterized by forming the recording liquid.