JPH0964458A - Semiconductor laser - Google Patents
Semiconductor laserInfo
- Publication number
- JPH0964458A JPH0964458A JP7217276A JP21727695A JPH0964458A JP H0964458 A JPH0964458 A JP H0964458A JP 7217276 A JP7217276 A JP 7217276A JP 21727695 A JP21727695 A JP 21727695A JP H0964458 A JPH0964458 A JP H0964458A
- Authority
- JP
- Japan
- Prior art keywords
- light
- semiconductor laser
- photonic crystal
- phase shift
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/11—Comprising a photonic bandgap structure
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、光集積回路等の各
種装置の光源として利用可能な半導体レーザに関する。The present invention relates to a semiconductor laser which can be used as a light source for various devices such as an optical integrated circuit.
【0002】[0002]
【従来の技術】従来から、GaAs等の半導体を用いた
半導体レーザの開発が盛んに行われている。この半導体
レーザは、スペクトルの純粋さと高効率および変調が簡
単にできて取り扱いやすい等の特徴を有し、光集積回路
やその他の光源として利用可能である。2. Description of the Related Art Conventionally, semiconductor lasers using semiconductors such as GaAs have been actively developed. This semiconductor laser has features such as spectral purity, high efficiency, easy modulation and easy handling, and can be used as an optical integrated circuit and other light sources.
【0003】このような、従来の半導体レーザでは、縦
軸を光出力、横軸を注入電流とした図6に示すように、
注入電流がある閾値を越えると、図7に示すように所定
方向に向けてレーザ光が射出され、閾値以下では、図7
に示すように、不特定な方向に自然放出光が放射され
る。In such a conventional semiconductor laser, as shown in FIG. 6 where the vertical axis represents light output and the horizontal axis represents injection current,
When the injection current exceeds a certain threshold, a laser beam is emitted in a predetermined direction as shown in FIG.
As shown in (1), spontaneous emission light is emitted in an unspecified direction.
【0004】[0004]
【発明が解決しようとする課題】上述したように、従来
の半導体レーザでは、自然放出光によって、エネルギー
のロスが生じ、また、所定方向の光出力を得るために
は、閾値以上の注入電流を必要とするため、例えば、大
規模な光集積回路等において多数の光源を必要とする場
合等は、動作のための電力が増大するという問題があっ
た。As described above, in the conventional semiconductor laser, an energy loss occurs due to the spontaneous emission light. In addition, in order to obtain a light output in a predetermined direction, an injection current equal to or more than a threshold value is required. For example, when a large number of light sources are required in a large-scale optical integrated circuit or the like, there is a problem that power for operation increases.
【0005】本発明は、かかる従来の事情に対処してな
されたもので、従来に比べて、注入エネルギーのロスを
低減することができ、少ない電力で高い光出力を得るこ
とのできる半導体レーザを提供しようとするものであ
る。SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and provides a semiconductor laser capable of reducing injection energy loss and obtaining a high optical output with a small amount of electric power as compared with the related art. It is something to offer.
【0006】[0006]
【課題を解決するための手段】請求項1記載の発明は、
光の波長オーダーの屈折率周期構造を有するホトニック
結晶内に、半導体からなり光の増幅作用を有する活性部
と、所定方向の光学モードにのみ発光エネルギーをカッ
プリングさせる位相シフト部とを配設したことを特徴と
する。According to the first aspect of the present invention,
In a photonic crystal having a refractive index periodic structure in the order of the wavelength of light, an active portion made of a semiconductor and having a light amplifying action, and a phase shift portion for coupling emission energy only to an optical mode in a predetermined direction are arranged. It is characterized by the following.
【0007】請求項2記載の発明は、請求項1記載の半
導体レーザにおいて、前記ホトニック結晶が、高屈折率
媒質と低屈折率媒質が、3次元的に規則正しく配列され
た繰り返し構造を有することを特徴とする。According to a second aspect of the present invention, in the semiconductor laser according to the first aspect, the photonic crystal has a repetitive structure in which a high refractive index medium and a low refractive index medium are regularly arranged three-dimensionally. Features.
【0008】請求項3記載の発明は、請求項1〜2記載
の半導体レーザにおいて、前記位相シフト部が、前記ホ
トニック結晶の略中央部に、平面状に配設されているこ
とを特徴とする。According to a third aspect of the present invention, in the semiconductor laser according to the first or second aspect, the phase shift portion is arranged in a plane at substantially the center of the photonic crystal. .
【0009】請求項4記載の発明は、請求項1〜3記載
の半導体レーザにおいて、前記活性部が、前記位相シフ
ト部の略中央に配設されていることを特徴とする。 上
記構成の本願発明の半導体レーザでは、全方向に光が反
射して外部に放出されない構造であるホトニック結晶の
中に、活性部と位相シフト部を設けることにより、活性
部からの自然放出光も、レーザ光と同様に、位相シフト
部によって特定される所定の方向に放射させることがで
きる。これによって、注入エネルギーのロスを低減する
ことができるとともに、実質的に閾値を低くすることが
でき、少ない電力で高い光出力を得ることができる。According to a fourth aspect of the present invention, in the semiconductor laser according to any one of the first to third aspects, the active portion is disposed substantially at the center of the phase shift portion. In the semiconductor laser of the present invention having the above-described configuration, the active portion and the phase shift portion are provided in the photonic crystal having a structure in which light is reflected in all directions and is not emitted to the outside, so that the spontaneous emission light from the active portion is also reduced. Like the laser light, the light can be emitted in a predetermined direction specified by the phase shift unit. As a result, the loss of the injection energy can be reduced, and the threshold value can be substantially lowered, so that a high optical output can be obtained with a small amount of power.
【0010】[0010]
【発明の実施の形態】以下、本発明の実施の形態につい
て図面を参照して説明する。Embodiments of the present invention will be described below with reference to the drawings.
【0011】図1は、本発明に係る半導体レーザの一つ
の実施の形態を示すもので、上部には全体の断面構造を
示し、下部にはその一部の断面構造を拡大して示してあ
る。同図において1は、光の波長オーダーの屈折率周期
構造を有するホトニック結晶であり、このホトニック結
晶1内には、半導体からなり光の増幅作用を有する活性
部2と、所定方向の光学モードにのみ発光エネルギーを
カップリングさせる位相シフト部3が配設されている。FIG. 1 shows an embodiment of a semiconductor laser according to the present invention. The upper part shows the entire sectional structure, and the lower part shows an enlarged part of the sectional structure. . In the figure, reference numeral 1 denotes a photonic crystal having a periodic structure of the refractive index on the order of the wavelength of light. In the photonic crystal 1, an active portion 2 made of a semiconductor and having an optical amplifying action is provided with an optical mode in a predetermined direction. Only the phase shift unit 3 for coupling the emission energy is provided.
【0012】ホトニック結晶1は、例えば、GaAs
(n1 =3.6)等の高屈折媒質1aと、例えば、空気
(n2 =1)またはガラス等の低屈折媒質1bからな
り、これらを3次元的に、光の波長オーダー(例えば、
1/2波長)の一定の周期構造を有するようN層配列し
て構成されている。The photonic crystal 1 is made of, for example, GaAs
(N1 = 3.6) and a low refractive medium 1b such as air (n2 = 1) or glass, for example, which are three-dimensionally arranged in the order of the wavelength of light (for example,
N layers are arranged so as to have a constant periodic structure (1 / wavelength).
【0013】また、図1に示す例において、位相シフト
部3は、ホトニック結晶1の略中央部に一平面状に形成
されており、λ共振器を構成するようにその光学的な幅
が光の波長と略同一となるよう設定されている。そし
て、この位相シフト部3の略中央に平面状に活性部2が
配設されている。この活性部2は、例えばInGaAs
等の半導体から構成されている。In the example shown in FIG. 1, the phase shift portion 3 is formed in a plane at substantially the center of the photonic crystal 1 and has an optical width of light so as to form a λ resonator. Is set so as to be substantially the same as the wavelength. The active section 2 is disposed substantially in the center of the phase shift section 3 in a planar shape. The active portion 2 is made of, for example, InGaAs.
And the like.
【0014】なお、図2に、ダイヤモンド結晶構造のホ
トニック結晶のバンドギャップと規格化周波数との関係
を示す。同図に示すように、ホトニック結晶において
は、特定の周波数の光が全く外部に放出されない構造と
なっている。FIG. 2 shows the relationship between the band gap of a photonic crystal having a diamond crystal structure and the normalized frequency. As shown in the figure, the photonic crystal has a structure in which light of a specific frequency is not emitted to the outside at all.
【0015】また、図3に、上記構成の半導体レーザを
簡略化し、高屈折媒質(GaAs)中に、低屈折媒質
(空気またはガラス)のロッドを、配設した3角周期構
造の2次元結晶の間にλ共振器を配設し、その中央に発
光波長1.0μmの発光層を配設した構造について解析
した結果のモード密度の模式図(TEモード)を示す。
なお、同図に斜線で示す領域は、外部に光がカップリン
グする度合いを示すモード密度が高い領域を示し、ホト
ニックバンドギャップとして示された斜線のない領域は
モード密度が低い領域すなわち外部に光が放出されない
領域を示している。そして、共振器として作用する位相
シフト部が設けられていることにより、ホトニックバン
ドギャップの中に発振モードが強く現れる。FIG. 3 shows a simplified two-dimensional crystal of a triangular periodic structure in which a rod of a low refractive medium (air or glass) is arranged in a high refractive medium (GaAs). A schematic diagram of the mode density (TE mode) as a result of analyzing a structure in which a λ resonator is disposed between the two layers and a light emitting layer having a light emission wavelength of 1.0 μm is disposed in the center thereof is shown.
The hatched region in the figure indicates a region with a high mode density indicating the degree of light coupling to the outside, and the region without a hatched line indicated as the photonic band gap indicates a region with a low mode density, that is, the outside. An area where no light is emitted is shown. Since the phase shift portion acting as a resonator is provided, an oscillation mode appears strongly in the photonic band gap.
【0016】したがって、活性部2の発光周波数を選択
することによって、縦軸を光出力、横軸を注入電流とし
た図4に示すように、注入電流が極少ない領域において
も、図5に示すように、本発明の半導体レーザ(ホトニ
ック結晶構造レーザ)では、レーザ光と同様に所定方向
に自然放出光を放射させることができる。Therefore, by selecting the light emission frequency of the active portion 2, as shown in FIG. 4 in which the vertical axis represents the light output and the horizontal axis represents the injection current, even in the region where the injection current is extremely small, FIG. As described above, in the semiconductor laser (photonic crystal structure laser) of the present invention, spontaneous emission light can be emitted in a predetermined direction similarly to the laser light.
【0017】これによって、自然放出光として放出され
てしまう注入エネルギーのロスを低減することができる
とともに、実質的に閾値を低くすることができ、少ない
電力で高い光出力を得ることができる。Thus, the loss of the injection energy emitted as spontaneous emission light can be reduced, the threshold value can be substantially lowered, and a high light output can be obtained with a small power.
【0018】なお、上述した例では、位相シフト部3
を、ホトニック結晶1の略中央部に一平面状に配設した
場合について説明したが、位相シフト部3の位置、形
状、数は、この例に限定されるものではなく、偏心させ
て配設したり、曲面的な形状としたり、複数設けるなど
の変形が可能である。In the example described above, the phase shift unit 3
Has been described in the form of a single plane disposed substantially at the center of the photonic crystal 1. However, the position, shape and number of the phase shift units 3 are not limited to this example, but are disposed eccentrically. It can be deformed, for example, into a curved shape, or provided with a plurality.
【0019】また、ホトニック結晶1の材質、構造等に
ついても種々の変形が可能であり、同様に、活性部2の
材質、構造等についても種々の変形が可能である。Various modifications can be made to the material and structure of the photonic crystal 1, and similarly, various modifications can be made to the material and structure of the active part 2.
【0020】[0020]
【発明の効果】以上説明したように、本発明の半導体レ
ーザによれば、従来に比べて、注入エネルギーのロスを
低減することができ、少ない電力で高い光出力を得るこ
とができる。As described above, according to the semiconductor laser of the present invention, the loss of the injection energy can be reduced, and a high optical output can be obtained with a small amount of power, as compared with the prior art.
【図1】本発明の実施の形態を説明するための図。FIG. 1 is a diagram illustrating an embodiment of the present invention.
【図2】ホトニック結晶のバンドギャップと規格化周波
数との関係を示す図。FIG. 2 is a diagram showing a relationship between a band gap of a photonic crystal and a normalized frequency.
【図3】本発明の実施の形態におけるモード密度を模式
的に示す図。FIG. 3 is a diagram schematically showing a mode density in the embodiment of the present invention.
【図4】本発明の実施の形態における光出力と注入電流
との関係を示す図。FIG. 4 is a diagram showing a relationship between light output and injection current in the embodiment of the present invention.
【図5】本発明の実施の形態における光出力の状態を説
明するための図。FIG. 5 is a diagram illustrating a state of light output according to the embodiment of the present invention.
【図6】従来技術における光出力と注入電流との関係を
示す図。FIG. 6 is a diagram showing a relationship between a light output and an injection current in a conventional technique.
【図7】従来技術における光出力の状態を説明するため
の図。FIG. 7 is a diagram for explaining a state of light output in the related art.
1…………ホトニック結晶 1a………高屈折媒質 1b………低屈折媒質 2…………活性部 3…………位相シフト部 1 Photonic crystal 1a High refraction medium 1b Low refraction medium 2 Active part 3 Phase shift part
Claims (4)
するホトニック結晶内に、半導体からなり光の増幅作用
を有する活性部と、所定方向の光学モードにのみ発光エ
ネルギーをカップリングさせる位相シフト部とを配設し
たことを特徴とする半導体レーザ。1. A photonic crystal having a periodic structure of a refractive index on the order of the wavelength of light within an active portion made of a semiconductor and having an effect of amplifying light, and a phase shift portion coupling light emission energy only to an optical mode in a predetermined direction. And a semiconductor laser.
が、3次元的に規則正しく配列された繰り返し構造を有
することを特徴とする半導体レーザ。2. The semiconductor laser according to claim 1, wherein the photonic crystal has a repeating structure in which a high-refractive-index medium and a low-refractive-index medium are regularly arranged three-dimensionally.
て、 前記位相シフト部は、前記ホトニック結晶の略中央部
に、平面状に配設されていることを特徴とする半導体レ
ーザ。3. The semiconductor laser according to claim 1, wherein the phase shift portion is provided in a plane at substantially the center of the photonic crystal.
て、 前記活性部は、前記位相シフト部の略中央に配設されて
いることを特徴とする半導体レーザ。4. The semiconductor laser according to claim 1, wherein said active portion is disposed substantially at a center of said phase shift portion.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21727695A JP3785503B2 (en) | 1995-08-25 | 1995-08-25 | Semiconductor laser |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21727695A JP3785503B2 (en) | 1995-08-25 | 1995-08-25 | Semiconductor laser |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0964458A true JPH0964458A (en) | 1997-03-07 |
JP3785503B2 JP3785503B2 (en) | 2006-06-14 |
Family
ID=16701608
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21727695A Expired - Fee Related JP3785503B2 (en) | 1995-08-25 | 1995-08-25 | Semiconductor laser |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3785503B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1999042892A1 (en) * | 1998-02-19 | 1999-08-26 | Massachusetts Institute Of Technology | Photonic crystal omnidirectional reflector |
US6650672B2 (en) * | 2000-03-13 | 2003-11-18 | Matsushita Electric Industrial Co., Ltd. | Semiconductor laser element having excellent light confinement effect and method for producing the semiconductor laser element |
JP2004119671A (en) * | 2002-09-26 | 2004-04-15 | Mitsubishi Electric Corp | Optical active device |
-
1995
- 1995-08-25 JP JP21727695A patent/JP3785503B2/en not_active Expired - Fee Related
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1999042892A1 (en) * | 1998-02-19 | 1999-08-26 | Massachusetts Institute Of Technology | Photonic crystal omnidirectional reflector |
US6903873B1 (en) | 1998-02-19 | 2005-06-07 | Omniguide Communications | High omnidirectional reflector |
US6650672B2 (en) * | 2000-03-13 | 2003-11-18 | Matsushita Electric Industrial Co., Ltd. | Semiconductor laser element having excellent light confinement effect and method for producing the semiconductor laser element |
JP2004119671A (en) * | 2002-09-26 | 2004-04-15 | Mitsubishi Electric Corp | Optical active device |
US7181120B2 (en) | 2002-09-26 | 2007-02-20 | Mitsubishi Denki Kabushiki Kaisha | Optical active device |
JP4569942B2 (en) * | 2002-09-26 | 2010-10-27 | 三菱電機株式会社 | Optical active device |
Also Published As
Publication number | Publication date |
---|---|
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